Vacuum Utilized Prior To Or During Coating Patents (Class 427/294)
  • Patent number: 11904519
    Abstract: Present invention is related to an extrusion equipment for processing a fibre composite. The extrusion equipment comprises a decompression and a melt tank arranged and operated vertically along with the direction of gravity. The melt tank comprises a melt tank impregnation section and a melt tank control section with a melt tank cavity as a channel condition defined within. The channel has its inner diameter or passage gradually decreased from top to bottom. The extrusion equipment provided by the present invention is configured in the direction of gravity for processing the melted thermoplastic resin and the fibre vertically for avoiding fibre fracture or breakage and improving the quality of the final products. As the melted plastic is processed vertically along with the gravity, the melted plastic could transfer or pass through the channel quickly without resulting decomposition due to the high heat and the long retention time in the cavity.
    Type: Grant
    Filed: April 7, 2022
    Date of Patent: February 20, 2024
    Assignee: Plastics Industry Development Center
    Inventors: Chia-Yu Yu, Li-Kai Lin, Chia-Hsin Tung, Wei-Cheng Chen
  • Patent number: 11761361
    Abstract: A method for manufacturing a pillar-shaped honeycomb structure filter including preparing a pillar-shaped honeycomb structure having a plurality of first cells and a plurality of second cells that are alternately arranged adjacent to each other with a porous partition wall interposed therebetween; adhering ceramic particles containing 50% by mass or more in total of one or two selected from SiC and SiN to a surface of the first cells; and performing a heat-oxidation treatment on the pillar-shaped honeycomb structure in which the ceramic particles are adhered to the surface of the first cells to form a porous film comprised of the ceramic particles having an oxide film thereon so as to satisfy: (1) 0.05?T?0.5; (2) 0.05?T/D50; and (3) 4?{(W1?W0)/W0×100}/D50.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: September 19, 2023
    Assignee: NGK INSULATORS, LTD.
    Inventor: Koichi Sendo
  • Patent number: 11264571
    Abstract: A bake system may include a chamber having an internal space, a stage disposed in the internal space of the chamber and on which a target substrate is disposed, a gas ejection structure providing a process gas in the chamber, an exhaust structure, an atmosphere analyzer monitoring moisture and oxygen in the chamber, and a gas supplier controlling a flow rate of the process gas based on information provided from the atmosphere analyzer. The exhaust structure may include a suction part disposed in the internal space, and an exhaust part connected to the suction part and is disposed outside the chamber.
    Type: Grant
    Filed: October 17, 2019
    Date of Patent: March 1, 2022
    Inventor: Katsushi Kishimoto
  • Patent number: 10870737
    Abstract: A sensing material for gas sensors including carbon nanotubes in which lanthanum fluoride (LaF3) nanoparticles are fixed, a method of fabricating the sensing material, a gas sensor including the sensing material, and a method of fabricating the gas sensor are provided. The gas sensor having an excellent response and excellent selectivity to F2 gas without any electrolytes may be provided using the sensing material. Also, the gas sensor can be useful in measuring a concentration of the F2 gas and minimizing power consumption because the gas sensor may be operated at room temperature without using a heater, and can be used for portable purposes because it is possible to miniaturize the gas sensor.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: December 22, 2020
    Assignee: Korea Institute of Science and Technology
    Inventors: Young Tae Byun, Sun-woo Choi, Dong Jin Lee
  • Patent number: 10615008
    Abstract: A temperature control method of controlling a temperature of an object to be processed includes supplying a heat-transfer gas between an object to be processed and a mounting stage from a gas port from among a plurality of gas ports provided in a mounting stage, exhausting the heat-transfer gas from another gas port different from the gas port, detecting pressure of the gas port supplying the heat-transfer gas and the another gas port exhausting the heat-transfer gas, and adjusting the pressure.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: April 7, 2020
    Assignee: Tokyo Electron Limited
    Inventor: Jun Young Chung
  • Patent number: 10538012
    Abstract: The invention relates to a process for treating a lignocellulosic material, preferably wood, comprising the following steps: (1) soaking of the material with organic fluid in order to dissolve at least 40% and at most 85%, in weight %, of the lignin of the material; (2) washing with organic fluid so as to discharge the dissolved lignin; (3) filling with a filling compound; and (4) finishing, so as to obtain a composite formed of a three-dimensional network of transformed filling compound incorporated into a cellulose and lignin network. The invention also relates to a composite structure able to be obtained in this way, and to any part comprising at least one such structure.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: January 21, 2020
    Inventor: Timothée Boitouzet
  • Patent number: 10504703
    Abstract: A plasma treatment apparatus and a plasma treatment method are provided. The apparatus includes a chamber, a planar plasma-generating electrode, a sample suspension and holding system, and an optical observation system. The chamber defines a processing inner chamber, and the top portion of the chamber has a window. The planar plasma-generating electrode is located in the processing inner chamber for generating a planar plasma. The sample suspension and holding system is disposed opposite to the planar plasma-generating electrode in the processing inner chamber to suspend and hold a sample. The optical observation system is located in the processing inner chamber adjacent to the sample suspension and holding system to measure the thickness range of a planar plasma effective influence region through the window of the chamber.
    Type: Grant
    Filed: December 21, 2017
    Date of Patent: December 10, 2019
    Assignee: Industrial Technology Research Institute
    Inventor: Hung-Yuan Hsieh
  • Patent number: 10450236
    Abstract: A method of making a carbon-carbon composite part may comprise fabricating a fibrous preform comprising a fiber volume ratio of 25% or greater, heat treating the fibrous preform at a first temperature, infiltrating the fibrous preform with a first ceramic suspension, densifying the fibrous preform by chemical vapor infiltration (CVI) to form a densified fibrous preform, and heat treating the densified fibrous preform at a second temperature of 1600° C. or greater.
    Type: Grant
    Filed: September 25, 2017
    Date of Patent: October 22, 2019
    Assignee: GOODRICH CORPORATION
    Inventors: Christopher T. Kirkpatrick, Jean-Francois Le Costaouec, John Linck
  • Patent number: 10322523
    Abstract: A process for producing nano veneers generally involving: placing a veneer to be treated in a vacuum vessel; adding a nano carbon powder and nano silicon dioxide suspension in the vacuum vessel; reducing the pressure in the vessel over a first period of time; increasing the pressure in the vessel; letting the contents of the vessel rest over a second period of time. The veneer may optionally be subjected to ultrasonic treatment, ultraviolet solidification treatment, or subsequent pressurization treatments to obtain the final nano veneer product. As a result, veneer manufactured using embodiments of the present invention will have the advantages of high strength, wear resistance, pollution resistance, acid and alkali resistance, water segregation and decay resistance.
    Type: Grant
    Filed: January 5, 2018
    Date of Patent: June 18, 2019
    Inventor: Gui-Xue Xu
  • Patent number: 10155865
    Abstract: Embodiments of the present disclosure are directed to water-resistant products which contain a wax emulsion, or silicones, or siliconates, or fluorinated compounds, or stearates, or combinations thereof. In some embodiments, the compound can be used to provide enhanced moisture resistance to joints, or holes such as screw holes or nail holes, in a wallboard.
    Type: Grant
    Filed: October 26, 2017
    Date of Patent: December 18, 2018
    Assignee: Henry Company, LLC
    Inventors: Amba Ayambem, Alex Gonzalez, John Dobson
  • Patent number: 10128134
    Abstract: Provided is a substrate transfer method for sequentially transferring a substrate between a heat treatment chamber and another chamber different from the heat treatment chamber using a transfer unit having a first pick and a second pick. An unprocessed substrate is held by the first pick, and the substrate is transferred to the heat treatment chamber. A processed substrate, heat-treated in the heat treatment chamber, is held by the second pick, and the unprocessed substrate held by the first pick is loaded into the heat treatment chamber. The processed substrate held by the second pick is transferred to the other chamber. An unprocessed substrate in the other chamber is held by the first pick, the processed substrate held by the second pick is loaded into the other chamber, and then both the first pick and the second pick are put into a state of not holding a substrate.
    Type: Grant
    Filed: September 7, 2015
    Date of Patent: November 13, 2018
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Keisuke Kondoh
  • Patent number: 10106930
    Abstract: In a method for impregnating semi-finished fibrous products using resin as the impregnating means, winding or laying the semi-finished fibrous products in a plurality of layers on top of one another onto a receiving carrier is initially performed. Here, lower layers lie close to the receiving carrier, and upper layers lie more remote therefrom. The receiving carrier is configured so as to be permeable to the impregnating means. The impregnating means is then introduced through the receiving carrier into the semi-finished fibrous products, wherein the impregnating means initially permeates the lower layers and then permeates the upper layers of the semi-finished fibrous products.
    Type: Grant
    Filed: March 21, 2014
    Date of Patent: October 23, 2018
    Assignee: Universität Stuttgart
    Inventors: Gerd Falk, Markus Blandl
  • Patent number: 9987654
    Abstract: The present invention includes (i) a liquid storing tank in which an impregnating liquid is stored, (ii) a hollow tube provided in the liquid storing tank, (iii) a vacuum pump which produces a vacuum in one end of the hollow tube, and (iv) a transport mechanism which transports a porous material in the impregnating liquid drawn into the hollow tube. A degree of vacuum in the vacuum is maintained in a given range.
    Type: Grant
    Filed: November 5, 2014
    Date of Patent: June 5, 2018
    Assignee: Toshio Murata
    Inventor: Toshio Murata
  • Patent number: 9889011
    Abstract: The present document is directed to medical implants in the form of titanium dioxide scaffolds. Disclosed is a method for producing titanium dioxide scaffolds having an increased mechanical strength by recoating the titanium dioxide scaffold with a low viscosity titanium dioxide slurry in a vacuum infiltration process followed by sintering of the scaffold. The document is also directed to the recoated titanium dioxide scaffolds produced and their uses as medical implants.
    Type: Grant
    Filed: September 17, 2013
    Date of Patent: February 13, 2018
    Assignee: CORTICALIS AS
    Inventors: Hanna Tiainen, Havard J. Haugen, S. Petter Lyngstadaas
  • Patent number: 9828504
    Abstract: Embodiments of the present disclosure are directed to water-resistant products which contain a wax emulsion, or silicones, or siliconates, or fluorinated compounds, or stearates, or combinations thereof. In some embodiments, the compound can be used to provide enhanced moisture resistance to joints, or holes such as screw holes or nail holes, in a wallboard.
    Type: Grant
    Filed: December 11, 2014
    Date of Patent: November 28, 2017
    Assignee: Henry Company, LLC
    Inventors: Amba Ayambem, Alex Gonzalez, John Dobson
  • Patent number: 9751804
    Abstract: Hydrophobic aggregates for use in refractory castables and gunning mixtures and methods of their preparation. The aggregates here are formed by crushing insulating fire brick and coating the resulting particles with a hydrophobic component. The hydrophobic component may be a polydimethylsiloxane having a terminal silanol group. As a result of the coating process, the coated aggregate has very low levels of alkalis. The aggregates may be used to form refractory castables that do not undergo substantial alkaline hydrolysis due to the reduced levels of alkalis. The castables made from these aggregates display superior physical properties, including lower water content, lower permanent linear change, high strength, and superior thermal conductivity/insulation properties, while at the same time possessing lower density and requiring less water to be used during castable formation. These improved properties also are observed in gunning mixtures formed from these aggregates.
    Type: Grant
    Filed: August 26, 2016
    Date of Patent: September 5, 2017
    Assignee: BNZ Materials, Inc.
    Inventors: Kenneth J. Moody, Bryan K. Doerr
  • Patent number: 9433965
    Abstract: A sealant forming device, a sealant forming method and a method for manufacturing a liquid crystal display device using the same are disclosed. According to the present invention, a sealant coagulated in a nozzle can be minimized or prevented by performing an instantaneous suction process. A sealant forming device includes a dispenser including a syringe, and a nozzle connected to a lower end of the syringe to discharge a sealant therethrough; a dispensing tube connected to the syringe to apply a pressure to the syringe; and an instantaneous suction tube connected to the syringe to extract the sealant remaining in the nozzle after discharging the sealant.
    Type: Grant
    Filed: June 3, 2010
    Date of Patent: September 6, 2016
    Assignee: LG Display Co., Ltd.
    Inventors: Hae Joon Son, In Kyu Lee
  • Patent number: 9227881
    Abstract: Hydrophobic aggregates for use in refractory castables and gunning mixtures and methods of their preparation. The aggregates here are formed by crushing insulating fire brick and coating the resulting particles with a hydrophobic component. The hydrophobic component may be a polydimethylsiloxane having a terminal silanol group. As a result of the coating process, the coated aggregate has very low levels of alkalis. The aggregates may be used to form refractory castables that do not undergo substantial alkaline hydrolysis due to the reduced levels of alkalis. The castables made from these aggregates display superior physical properties, including lower water content, lower permanent linear change, high strength, and superior thermal conductivity/insulation properties, while at the same time possessing lower density and requiring less water to be used during castable formation. These improved properties also are observed in gunning mixtures formed from these aggregates.
    Type: Grant
    Filed: May 13, 2015
    Date of Patent: January 5, 2016
    Assignee: BNZ Materials, Inc.
    Inventors: Kenneth J. Moody, Bryan K. Doerr
  • Patent number: 9138771
    Abstract: An apparatus and method for solution coating layers onto a substrate of an electronic device. A slot die coater in conjunction with a vacuum assist device is used in priming, coating and cleaning stations to produce thin layers having performance advantages over competing technologies.
    Type: Grant
    Filed: May 19, 2009
    Date of Patent: September 22, 2015
    Assignee: E I DU PONT DE NEMOURS AND COMPANY
    Inventors: Charles D. Lang, Tami Janene Faircloth
  • Patent number: 9136476
    Abstract: A method of manufacturing an organic light emitting display apparatus, and an organic light emitting display apparatus manufactured by the method, the method being suitable for mass producing a large substrate, enabling high-definition patterning, and allowing controlling of a distance between a patterning slit sheet and a substrate which are moved relative to each other.
    Type: Grant
    Filed: July 19, 2013
    Date of Patent: September 15, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventors: Yun-Ho Chang, Mi-Joo Yoon
  • Patent number: 9114418
    Abstract: A system is disclosed. The system includes a fluid reservoir containing a volume of fluid, a bell housing that forms a chamber, a workpiece having a first surface portion and a second surface portion, and a pressure manipulating sub-system in fluid communication with the chamber of the bell housing. The bell housing is arranged relative to the fluid reservoir such that a lower end of the bell housing is at least partially submerged in the fluid thereby sealing the chamber of the bell housing from atmosphere. The bell housing is arranged relative to the fluid reservoir such that the second surface portion of the workpiece is disposed within the chamber of the bell housing that is sealed from atmosphere. A method is also disclosed. An apparatus is also disclosed.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: August 25, 2015
    Assignee: Android Industries LLC
    Inventors: John Donnay, George B. Byma
  • Publication number: 20150147475
    Abstract: The present invention is directed to a method of forming a polymer coating on a substrate. The method comprising the steps of providing in an evacuated reaction chamber a substrate having a surface to be coated; and providing a first source of polymer forming material and a second source of radicals. According to the invention the first source and the second source are separated from each other and from the reaction chamber, and the polymer forming material as well as the radicals are, at least temporarily, conducted contemporaneously but spatially separated to the substrate's surface, so that a reaction of the polymer forming material with the radicals is avoided before they reach the substrate's surface. Further, the present invention is directed to a device for carrying out the method according to the invention.
    Type: Application
    Filed: January 9, 2013
    Publication date: May 28, 2015
    Applicant: Centre De Recherche Public - Gabriel Lippmann
    Inventor: Damien Lenoble
  • Publication number: 20150125608
    Abstract: The present invention includes (i) a liquid storing tank in which an impregnating liquid is stored, (ii) a hollow tube provided in the liquid storing tank, (iii) a vacuum pump which produces a vacuum in one end of the hollow tube, and (iv) a transport mechanism which transports a porous material in the impregnating liquid drawn into the hollow tube. A degree of vacuum in the vacuum is maintained in a given range.
    Type: Application
    Filed: November 5, 2014
    Publication date: May 7, 2015
    Inventor: Toshio Murata
  • Publication number: 20150110960
    Abstract: A deposition arrangement for depositing a material on a substrate is described. The deposition arrangement includes a vacuum chamber; a roller device within the vacuum chamber; and an electrical heating device within the roller device, wherein the heating device comprises a first end and a second end, and wherein the heating device is held at the first end and at the second end. Also, a method for heating a substrate in a vacuum deposition arrangement is described.
    Type: Application
    Filed: April 16, 2014
    Publication date: April 23, 2015
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Andreas SAUER, Jürgen HENRICH, Thomas DEPPISCH, Dirk WAGNER
  • Patent number: 9011980
    Abstract: A dampening device and method of making are provided, in which the method includes providing a first layer of a sponge rubber. An isocyanate-base prepolymer and a polyol base curing agent are combined to form a curable liquid urethane polymer. The curable liquid urethane polymer is shredded and during shredding air in the form of micro-bubbles is entrained in the curable liquid urethane polymer. The curable liquid urethane polymer is applied to form a second layer overlying the first layer and is then cured to form a tacky polyurethane cast elastomer. Micro-bubbles remain present in the tacky polyurethane cast elastomer and curing bonds the first and second layer forming a dampening device. The dampening device includes a first layer of neoprene and a second layer of a micro-bubble infused tacky polyurethane cast elastomer bonded to the first layer.
    Type: Grant
    Filed: March 6, 2013
    Date of Patent: April 21, 2015
    Assignee: Studio Lab, LLC
    Inventor: Cristian Gene Beaulieu
  • Publication number: 20150101306
    Abstract: A method for impregnating a liquid material (105) into a rope (101) comprising a plurality of fibers and interstices between said fibers, said method comprising the steps of: (a) Providing a liquid material in a tank, (104) said liquid material defining a level of liquid (105-1) in said tank (104); (b) Providing an impregnation unit (103) containing a chamber (106) at least partially immersed in said liquid material (105), said chamber (106) comprising: (i.
    Type: Application
    Filed: March 1, 2013
    Publication date: April 16, 2015
    Inventors: Hans Schneiders, Stefan Beckers
  • Publication number: 20150099078
    Abstract: Provided herein are compositions, comprising polysilazane, polysiloxane, and a boron constituent. The compositions may further comprise carbon nanofibers. Also provided is a method for forming the compositions, composites formed from a composition, and a method for forming composites from a composition by mixing the compositions with fibers and curing the composition-fiber mixture.
    Type: Application
    Filed: October 3, 2014
    Publication date: April 9, 2015
    Applicant: Burning Bush Technologies, LLC
    Inventor: Christopher Fish
  • Publication number: 20150079301
    Abstract: Embodiments include systems, apparatuses, and methods of thin metal-organic film deposition with inkjet printheads. A method of depositing a metal-organic thin film over a substrate includes introducing chemical precursors into one or more piezoelectric printheads. The chemical precursors including a metallic compound and a reactive liquid or gas. The method further includes dispensing droplets or a stream of the chemical precursors with the piezoelectric printheads onto a surface of the substrate supported by a stage in a vacuum chamber.
    Type: Application
    Filed: October 30, 2013
    Publication date: March 19, 2015
    Inventors: Srinivas NEMANI, Ellie YIEH, Dmitry LUBOMIRSKY
  • Patent number: 8980374
    Abstract: A functional film having a particular organic film and a particular inorganic film is produced. The functional film is consistently produced and exhibits the intended performance. The functional film production method includes forming an organic film on a surface of a substrate, handling the substrate having the organic film formed thereon so that no member comes in contact with an organic film surface in vacuum until formation of an inorganic film, and forming the inorganic film by vacuum deposition on the organic film surface.
    Type: Grant
    Filed: January 30, 2009
    Date of Patent: March 17, 2015
    Assignee: FUJIFILM Corporation
    Inventors: Masami Nakagame, Hiroyuki Nishida, Norihiro Kadota, Jun Fujinawa, Daisuke Onodera
  • Patent number: 8962085
    Abstract: Disclosed are pre-wetting apparatus designs and methods. These apparatus designs and methods are used to pre-wet a wafer prior to plating a metal on the surface of the wafer. Disclosed compositions of the pre-wetting fluid prevent corrosion of a seed layer on the wafer and also improve the filling rates of features on the wafer.
    Type: Grant
    Filed: January 8, 2010
    Date of Patent: February 24, 2015
    Assignee: Novellus Systems, Inc.
    Inventors: Steven T. Mayer, David W. Porter, Mark J. Willey
  • Patent number: 8962084
    Abstract: Methods apply a layer of material to a glass sheet having a non-planar shape. The methods can each include the step of providing the glass sheet having an initial non-planar shape including a thickness defined between a first sheet surface and a second sheet surface. The method further includes the step of at least partially flattening the glass sheet into an application shape. The method further includes the step of applying the layer of material to the first sheet surface while the glass sheet is in the application shape. The method then includes the step of releasing the glass sheet to relax into a post non-planar shape.
    Type: Grant
    Filed: May 31, 2012
    Date of Patent: February 24, 2015
    Assignee: Corning Incorporated
    Inventors: Douglas Edward Brackley, Christopher Paul Daigler, Mark Stephen Friske, Alexander Lakota
  • Patent number: 8962083
    Abstract: A method for forming a material for a brake disc, the method comprising the steps of: (i) providing at least one porous body; (ii) introducing into pores of the porous body one or more precursor materials for forming or depositing a ceramic material; and (iii) forming the brake disc material by forming or depositing the ceramic material from the precursor material within the pores of the body, wherein the precursor material is a liquid containing a suspension of ceramic particles and/or acid phosphate.
    Type: Grant
    Filed: June 2, 2006
    Date of Patent: February 24, 2015
    Assignee: Huntercombe Consultancy Limited
    Inventor: Martin Murphy
  • Publication number: 20150048050
    Abstract: An inkjet-based process for programmable deposition of thin films of a user-defined profile. Drops of a pre-cursor liquid organic material are dispensed at various locations on a substrate by a multi-jet. A superstrate that has been bowed due to a backside pressure is brought down such that a first contact of the drops is made by a front side of the superstrate thereby initiating a liquid front that spreads outward merging with the drops to form a contiguous film captured between the substrate and the superstrate. A non-equilibrium transient state of the superstrate, the contiguous film and the substrate then occurs after a duration of time. The contiguous film is then cured to crosslink it into a polymer. The superstrate is then separated from the polymer thereby leaving a polymer film on the substrate. In such a manner, non-uniform films can be formed without significant material wastage in an inexpensive manner.
    Type: Application
    Filed: August 18, 2014
    Publication date: February 19, 2015
    Inventors: Sidlgata V. Sreenivasan, Shrawan Singhal
  • Publication number: 20150037514
    Abstract: A method and apparatus for coating and baking and deposition of surfaces on glass substrate or flexible substrate, such as films and thin glass sheets or other similar work pieces as it transitions thru and between small gaps of aero-static or hydro-static porous media bearings and differentially pumped vacuum grooves, in a non-contact manner, in order to process within a vacuum environment. The process is also intended to incorporate simultaneous and immediately sequential ordering of various processes.
    Type: Application
    Filed: August 4, 2014
    Publication date: February 5, 2015
    Applicant: NEW WAY MACHINE COMPONENTS, INC.
    Inventor: Andrew J. Devitt
  • Patent number: 8945683
    Abstract: A prepreg of FRP (fiber reinforced plastic) having with (i) a matrix resin composition containing a bifunctional isocyanate and/or a trifunctional isocyanate, a polyol and a bifunctional chain extender having two active hydrogen groups at a molar ratio, as a functional group, of isocyanate:polyol:chain extender=5.0 to 1.0:1.0:4.0 to 0, or containing a bifunctional isocyanate and/or a trifunctional isocyanate and a polyol at a molar ratio, as a functional group, of liquid isocyanate:polyol=0.9 to 1.1:1.0; and (ii) a fibrous material. A production process of the prepreg. According to the present invention, the prepreg has a sufficient pot life and permits convenient production of an FRP molding.
    Type: Grant
    Filed: November 17, 2009
    Date of Patent: February 3, 2015
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventors: Noriya Hayashi, Shunichi Hayashi, Norio Miwa, Toshikatsu Nohara
  • Publication number: 20150030774
    Abstract: A plating method can improve adhesivity with an underlying layer. The plating method of performing a plating process on a substrate includes forming a first plating layer 23a serving as a barrier film on a substrate 2; baking the first plating layer 23a; forming a second plating layer 23b serving as a barrier film; and baking the second plating layer 23b. A plating layer stacked body 23 serving as a barrier film is formed of the first plating layer 23a and the second plating layer 23b.
    Type: Application
    Filed: February 22, 2013
    Publication date: January 29, 2015
    Applicant: Tokyo Electron Limited
    Inventors: Takashi Tanaka, Yuichiro Inatomi, Nobutaka Mizutani, Yusuke Saito, Mitsuaki Iwashita
  • Patent number: 8936830
    Abstract: The present invention relates to a method and an apparatus by which powder is evenly dispersed and is coated on a substrate uniformly and continuously so that a uniform layer may be formed. More specifically the present invention provides a method and an apparatus for forming a coating layer that powder is coated on an entire surface of a substrate uniformly and continuously, regardless of the material or the size of the substrate, as a uniform amount of powder entrained on the carrier air which is generated by carrier air and powder transported to a carrier pipe at a certain rate is consistently fed in to a nozzle, regardless of the size, morphology, and specific weight of the powder particles.
    Type: Grant
    Filed: February 11, 2013
    Date of Patent: January 20, 2015
    Assignees: FEMVIX Corp.
    Inventor: Ok Ryul Kim
  • Publication number: 20150008227
    Abstract: The present invention relates to a fire resistant material comprising a matrix of thermosetting elastomeric resin of the silicone resin type wherein endothermic fillers are incorporated as well as to a high pressure storage tank coated with said material, processes for the preparation thereof and uses thereof.
    Type: Application
    Filed: February 28, 2013
    Publication date: January 8, 2015
    Inventors: Stephane Villalongaa, Fabien Nony, Jean-Luc Yvernes, Francois Garonne
  • Patent number: 8910998
    Abstract: Systems and methods for altering the appearance and/or texture of a vehicle surface include installing a vest relative to a vehicle surface such that an exterior side of the vest, spaced from the vehicle surface, defines a fluid-tight space between the vehicle surface and the exterior side of the vest. Visual media can be provided into and from the fluid-tight space using one or more ports, the exterior side being at least partially transparent or translucent such that the visible media within the fluid-tight space are visible through the exterior side of the vest, thereby allowing the repeatable alteration of the appearance of the surface.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: December 16, 2014
    Inventor: Srinivas S. Devathi
  • Publication number: 20140349073
    Abstract: A method for coating a component for use in a semiconductor chamber for plasma etching includes providing the component and loading the component in a deposition chamber. A pressure in the deposition chamber is reduced to below atmospheric pressure. A coating is deposited on the component by spraying an aerosol comprising a suspension of a first type of metal oxide nanoparticle and a second type of metal oxide nanoparticle onto the component at approximately room temperature.
    Type: Application
    Filed: May 20, 2014
    Publication date: November 27, 2014
    Applicant: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Biraja Kanungo, Tom Cho, Ying Zhang
  • Patent number: 8889227
    Abstract: A method for preparing monolithic catalyst washcoat is disclosed and includes the following steps: preparing a coating slurry; pretreating a monolithic carrier; applying the coating slurry onto the monolithic carrier by vacuum spraying; removing the excess coating slurry by vacuum extraction; and obtaining the monolithic carrier applied with the washcoat after drying and calcination. The washcoat of 5-20 wt % can be obtained on the monolithic carrier of the present invention by one-off applying. The method can be used to prepare the washcoat on monolithic cordierite ceramic carrier, monolithic metal carrier, monolithic active carbon carrier or monolithic molecular sieve carrier. The obtained washcoat is uniform, and has good adhesion with the carrier and excellent repeatability.
    Type: Grant
    Filed: February 14, 2007
    Date of Patent: November 18, 2014
    Assignee: East China University of Science & Technology
    Inventors: Yun Guo, Guanzhong Lu, Zhigang Zhang
  • Publication number: 20140335698
    Abstract: A component of a plasma processing chamber having a protective liquid layer on a plasma exposed surface of the component. The protective liquid layer can be replenished by supplying a liquid to a liquid channel and delivering the liquid through liquid feed passages in the component. The component can be an edge ring which surrounds a semiconductor substrate supported on a substrate support in a plasma processing apparatus wherein plasma is generated and used to process the semiconductor substrate. Alternatively, the protective liquid layer can be cured or cooled sufficiently to form a solid protective layer.
    Type: Application
    Filed: May 7, 2013
    Publication date: November 13, 2014
    Applicant: Lam Research Corporation
    Inventors: Harmeet Singh, Thorsten Lill
  • Publication number: 20140322446
    Abstract: An integrated system for transferring and processing a substrate in a controlled environment to enable selective deposition of a thin layer of a cobalt-alloy material on a copper surface of a copper interconnect to improve electromigration performance of the copper interconnect, comprising: a lab-ambient transfer chamber; a substrate cleaning reactor coupled to the lab-ambient transfer chamber, wherein the substrate cleaning reactor cleans the substrate surface to remove metal-organic complex contaminants on the substrate surface; a vacuum transfer chamber; a vacuum process module for removing organic contaminants from the substrate surface; a controlled-ambient transfer chamber filled with an inert gas; and an electroless cobalt-alloy material deposition process module used to deposit the thin layer of cobalt-alloy material on the copper surface of the copper interconnect after the substrate surface has been removed of metallic contaminants and organic contaminants, and the copper surface has been removed of
    Type: Application
    Filed: July 8, 2014
    Publication date: October 30, 2014
    Inventors: Yezdi Dordi, John Boyd, Tiruchirapalli Arunagiri, Fritz C. Redeker, William Thie, Arthur M. Howald
  • Patent number: 8871305
    Abstract: A method of forming composite nanostructures using one or more nanomaterials. The method provides a nanostructure material having a surface region and one or more nano void regions within a first thickness in the surface region. The method subjects the surface region of the nanostructure material with a fluid. An external energy is applied to the fluid and/or the nanostructure material to drive in a portion of the fluid into one or more of the void regions and cause the one or more nano void regions to be substantially filled with the fluid and free from air gaps.
    Type: Grant
    Filed: November 1, 2011
    Date of Patent: October 28, 2014
    Assignee: Stion Corporation
    Inventor: Howard W. H. Lee
  • Patent number: 8863685
    Abstract: A camera is used to take an image of an end surface of a honeycomb structure gripped by a hand. Based on the image, an initial rotation angle of the honeycomb structure around a vertical axis at a reference position where the image has been taken is recognized. An arm turning section is driven to convey the honeycomb structure gripped by the hand from the reference position to above a plugging mask. A rotation angle required to adjust the rotation angle of the honeycomb structure on the plugging mask to a desired final rotation angle is acquired based on the initial rotation angle recognized at the reference position and a rotation angle of the honeycomb structure around the vertical axis associated with the driving of the arm turning section from the reference position to above the plugging mask. The honeycomb structure is rotated based on the required rotation angle.
    Type: Grant
    Filed: November 8, 2011
    Date of Patent: October 21, 2014
    Assignee: Sumitomo Chemical Company, Limited
    Inventors: Masaharu Mori, Ying Gong
  • Publication number: 20140302332
    Abstract: To provide a fluorinated ether compound, a fluorinated ether composition and a coating liquid, whereby it is possible to form a surface-treated layer which has high initial water/oil repellency and which is excellent in abrasion resistance and fingerprint stain removability, and a substrate having a surface-treated layer and a method for its production. A fluorinated ether compound which has a poly(oxyperfluoroalkylene) chain ((??)n) made of at least two units (??) linked to one another, and which has a hydrolysable silyl group on at least one terminal of the chain ((??)n) via a linking group, wherein each unit (??) is a poly(oxyperfluoroalkylene) group comprising one to three groups (?) made of at least one type of a C1-2 oxyperfluoroalkylene group and one to three groups (?) made of at least one type of a C3-6 oxyperfluoroalkylene group.
    Type: Application
    Filed: June 23, 2014
    Publication date: October 9, 2014
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventors: Eisuke MUROTANI, Taiki Hoshino, Akinobu Kunimoto, Daisuke Jomuta, Nobuyuki Otozawa
  • Patent number: 8852687
    Abstract: An organic layer deposition apparatus for forming an organic layer while a substrate is being moved, in which an interval between the substrate and the organic layer deposition apparatus can be measured at a vacuum condition.
    Type: Grant
    Filed: August 4, 2011
    Date of Patent: October 7, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventors: Uno Chang, Jae-Kwang Ryu, Eun-Sun Choi, Byung-Su Kim
  • Publication number: 20140287246
    Abstract: To provide a fluorinated ether compound, a fluorinated ether composition and a coating liquid, whereby it is possible to form a surface-treated layer which has high initial water/oil repellency and which is excellent in abrasion resistance and finger print stain removability, and a substrate having a surface-treated layer and a method for its production. A fluorinated ether compound which has a poly(oxyperfluoroalkylene) chain (??) having a structure of block (?)-block (?) or a structure of block (?)-block (?)-block (?), formed by linking a block (?) comprising at least three C1-3 oxyperfluoroalkylene units of at least one type and a block (?) having C4-15 oxyperfluoroalkylene units of at least one type, wherein the proportion of the C4-15 oxyperfluoroalkylene units is at least 30 mol % among all oxyperfluoroalkylene units constituting the block (?), and which has a hydrolysable silyl group on at least one terminal of the poly(oxyperfluoroalkylene) chain (??) via a linking group.
    Type: Application
    Filed: June 6, 2014
    Publication date: September 25, 2014
    Applicant: Asahi Glass Company, Limited
    Inventors: Eisuke MUROTANI, Taiki Hoshino
  • Publication number: 20140287240
    Abstract: To provide a fluorinated ether compound, a fluorinated ether composition and a coating liquid, whereby it is possible to form a surface-treated layer which has high initial water/oil repellency and which is excellent in abrasion resistance and fingerprint stain removability, and a substrate having a surface-treated layer and a method for its production. A fluorinated ether compound which has a poly(oxyperfluoroalkylene) chain (??) having a C4 oxyperfluoroalkylene unit (?) and an oxyperfluoroalkylene unit (?) other than the unit (?) and which has a hydrolysable silyl group on at least one terminal of the poly(oxyperfluoroalkylene) chain (??) via a linking group.
    Type: Application
    Filed: June 6, 2014
    Publication date: September 25, 2014
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventors: Eisuke MUROTANI, Taiki Hoshino, Akira Isobe, Daisuke Shirakawa, Daisuke Jomuta, Nobuyuki Otozawa
  • Publication number: 20140272183
    Abstract: The present disclosure relates to methods for producing large scale nanostructured material comprising carbon nanotubes. Therefore, there is disclosed a method for making nanostructured materials comprising depositing carbon nanotubes onto at least one substrate via a deposition station, wherein depositing comprises transporting molecules to the substrate from a deposition fluid, such as liquid or gas. By using a substrate that is permeable to the carrier fluid, and allowing the carrier fluid to flow through the substrate by differential pressure filtration, a nanostructured material can be formed on the substrate, which may be removed, or may act as a part of the final component.
    Type: Application
    Filed: June 3, 2014
    Publication date: September 18, 2014
    Applicant: SELDON TECHNOLOGIES, LLC
    Inventors: Christopher H. Cooper, Alan G. Cummings, Mikhail Y. Starostin