Vacuum Utilized Prior To Or During Coating Patents (Class 427/294)
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Publication number: 20120171429Abstract: Novel decorative products including interior home decorative products, garden ornaments, building decorative products and the like are disclosed in which the novel decorative products are characterized in having rigid shells of compacted fiber reinforced magnesium oxychloride composite, seam lines of below two millimeters and cores of which densities can be adjusted according to the preferred weight of the products during the product design stage. The aforesaid compacted fiber reinforced magnesium oxychloride composite is characterized in having compacted structures of F-5 MOC phase magnesium oxychloride. A method for producing the novel decorative products is also provided.Type: ApplicationFiled: October 27, 2011Publication date: July 5, 2012Applicant: COMPOCLAY HOLDINGS LIMITEDInventors: Ching Wah MAN, Lai Kit LAU, King Lung LEE
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Publication number: 20120171382Abstract: A pressure lock system passes a wire along a wire path from a wire source at a high pressure first region to a destination at a low pressure second region. The pressure lock system includes a pressure lock chamber. A first conduit has an interior positioned to pass the wire along the path and is mounted for rotation. A second conduit has an interior positioned to pass the wire from the pressure lock chamber and is also mounted for rotation. A motor may drive rotation of the first conduit and the second conduit. Pumps may maintain a pressure of the pressure lock chamber lower than a pressure of the first region.Type: ApplicationFiled: December 30, 2010Publication date: July 5, 2012Applicant: United Technologies CorporationInventors: Richard S. Mullin, Igor V. Belousov, Oleg G. Pankov, Igor V. Gulyayev
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Patent number: 8197907Abstract: The invention relates to a method for coating a metal strip with a coating containing a solvent and for drying and/or cross-linking said coating. Accordingly, the metal strip is provided with the coating in an inner chamber of a coating device. The coated metal strip is conducted through a drying unit and in an inner chamber of the latter is exposed to a form of energy by at least one radiation source that is cooled by a cooling gas, said form of energy being converted to heat in the coating and/or the metal strip. The cooling gas that is supplied to the radiation source flows through the latter, absorbs the waste heat from said source and is then conducted into the inner chamber of the drying unit, thus saving energy and gas. The invention also relates to an installation that is suitable for carrying out said method.Type: GrantFiled: December 5, 2005Date of Patent: June 12, 2012Assignee: Value & Intellectual Properties Management GmbHInventors: Andreas Dibon, Kai Baer
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Publication number: 20120138878Abstract: A filled composite material is disclosed that includes a preformed syntactic composite material of particulate structure defining interstitial spaces between the particles thereof, and that is at least partially impregnated in the interstitial spaces by a reinforcing filler.Type: ApplicationFiled: October 5, 2011Publication date: June 7, 2012Inventor: John Edmund Dower
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Publication number: 20120135143Abstract: The present invention relates to a device and a method for coating a microstructured and/or nanostructured structured substrate. According to the present invention, the coating is performed in a vacuum chamber. The pressure level in the vacuum chamber is elevated during or after the charging of the vacuum chamber with coating substance.Type: ApplicationFiled: February 7, 2012Publication date: May 31, 2012Inventor: Erich Thallner
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Patent number: 8182872Abstract: A method is provided for fabricating a porous elastomer, the method comprising the steps of: providing a predetermined amount of a liquid elastomer and a predetermined amount of a porogen; mixing the liquid elastomer and the porogen in vacuum until a homogenous emulsion without phase separation is formed; curing the homogenous emulsion until polymerizations of the emulsion is reached, thereby forming a cured emulsion; and removing the porogen from the cured emulsion. The method can advantageously be used for forming biocompatible porous elastomers and biocompatible porous membranes.Type: GrantFiled: September 21, 2009Date of Patent: May 22, 2012Assignees: IMEC, Universiteit GentInventors: Fabrice Axisa, Pritesh Dagur, Jan Vanfleteren
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Publication number: 20120121896Abstract: A process for metalizing a ceramic surface or attaching a ceramic to a metal is provided. The process may comprise: immersing the ceramic into an aluminum or aluminum alloy melt, making the ceramic move or stay still relative to the melt to adhere the melt to the ceramic; and then removing the ceramic from the melt to unaffectedly cool the film adhered thereto. The process can attach an aluminum or aluminum alloy thin film having a thickness of several to tens of micrometers on a ceramic surface. The thin film is formed by solidification, and does not have microscopic faults such as oxide film inclusions or pores, therefore having proper physical of mechanical properties of aluminum. Ceramics or a ceramic and a metal can be brazed via the surface metalizing film, the bonding strength of their interface can over the strength of aluminum itself. This invention discloses a process for metalizing the surface of a ceramic and a process for attaching a ceramic to a metal.Type: ApplicationFiled: April 30, 2010Publication date: May 17, 2012Applicant: TSINGHUA UNIVERSITYInventors: Xiaoshan Ning, Bo Wang, Sha Li, Guocai Li
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Patent number: 8178166Abstract: A die of a coating apparatus for applying a coating solution includes down- and upstream blocks in a feeding direction of a web, which respectively have a first lip and a second lip. A lip land of the first lip is shorter than a lip land of the second lip in the feeding direction so as to satisfy a predetermined condition. In assembling the coating apparatus, bottoms of down- and upstream blocks are fixed to a fixer with bolts. Between the fixer and the downstream block, a plate member is provided such that the first lip land protrudes from the second lip land.Type: GrantFiled: October 10, 2006Date of Patent: May 15, 2012Assignee: Fujifilm CorporationInventors: Yasuhiko Tokimasa, Yoshinobu Katagiri, Akio Tsuji
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Publication number: 20120114854Abstract: A vacuum processing apparatus has a degassing chamber and does not need a large-sized vacuum evacuation device. In the process of heating and degassing an object to be processed in the degassing chamber, transferring the object to be processed into a processing chamber through a buffer chamber; and performing vacuum processing, the degassing chamber is connected to an vacuum evacuation system having a low evacuation speed and degassing processing is performed in a vacuum atmosphere of 1 to 100 Pa (time 0 to t2). Next, the object to be processed is moved to the buffer chamber, and the pressure inside the buffer chamber is lowered to near the pressure of the processing chamber (time t2 to t3), then the buffer chamber and the processing chamber are connected, and the object to be processed is transferred into the processing chamber.Type: ApplicationFiled: November 29, 2011Publication date: May 10, 2012Applicant: ULVAC, INC.Inventors: Eiichi IIJIMA, Hiroto Ikeda, Muneto Hakomori
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Publication number: 20120108132Abstract: In one embodiment, the present invention provides a preform. The preform includes (a) a reinforcing fabric layer; and (b) a thermoplastic block copolymer fiber incorporated into the reinforcing fabric layer. The thermoplastic block copolymer includes methylmethacrylate structural units and is substantially soluble in an uncured epoxy resin and substantially insoluble in a corresponding cured epoxy resin. An uncured composite composition, a cured composite, and a method of making the cured composite are also provided.Type: ApplicationFiled: October 28, 2010Publication date: May 3, 2012Applicant: GENERAL ELECTRIC COMPANYInventors: Xiaomei Fang, Wendy Wen-Ling Lin, Jack Allen Woods
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Publication number: 20120100306Abstract: Particles coming from an evaporation source 9 are deposited on a substrate 21 at a specified film forming position 33 in a vacuum so as to form a thin film on the substrate 21. A rod-shaped material 32 containing a source material of the thin film is melted above the evaporation source 9 and the melted material is supplied to the evaporation source 9 in the form of droplets 14.Type: ApplicationFiled: July 1, 2010Publication date: April 26, 2012Applicant: Panasonic CorporationInventors: Yuma Kamiyama, Kazuyoshi Honda, Yasuharu Shinokawa
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Publication number: 20120090539Abstract: A device for infusing liquid into material samples includes a container assembly configured to contain multiple material samples submerged in liquid. The material samples have pores containing air or gas. A pressure source and a vacuum source are both operatively connectable to the container assembly and alternately communicable with the container assembly to force the liquid to at least substantially fill the pores. The samples are thus ready for further processing, testing or use. A method of filling pores in material samples with liquid includes supporting multiple material samples within liquid in an airtight container assembly. The method further includes alternately applying a vacuum source and a pressure source to the container assembly, thereby replacing air with liquid in the pores of the material samples.Type: ApplicationFiled: October 13, 2011Publication date: April 19, 2012Applicant: Wildcat Discovery TechnologiesInventors: Justin James Dutton, Paul Christopher Ziegelbauer, Doron Greenberg, David James Brecht, Bin Li
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Publication number: 20120094031Abstract: In order to produce a method of providing a workpiece with a coating comprising the following process steps: —coating the workpiece: and —drying the workpiece by means of a drying device which is of increased capacity and is also particularly suitable for very long workpieces, there is proposed a method wherein the workpiece is moved relative to the drying device after the process of coating the workpiece has begun and before the process of drying the workpiece has terminated.Type: ApplicationFiled: November 21, 2011Publication date: April 19, 2012Applicant: DURR SYSTEMS GMBHInventors: Bernhard Schmitt, Gerald Dalibor, Jerzy Mrozek, Jorg Fojtzik
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Patent number: 8129001Abstract: A method of manufacturing a thermal interface material, comprising providing a sheet comprising nano-scale fibers, the sheet having at least one exposed surface; and stabilizing the fibers with a stabilizing material disposed in at least a portion of a void space between the fibers in the sheet. The fibers may be CNT's or metallic nano-wires. Stabilizing may include infiltrating the fibers with a polymerizable material. The polymerizable material may be mixed with nano- or micro-particles. The composite system may include two films, with the fibers in between, to create a sandwich. Each capping film may include two sub films: a palladium film closer to the stabilizing material to improve adhesion; and a nano-particle film for contact with a device to be cooled or a heat sink.Type: GrantFiled: March 12, 2009Date of Patent: March 6, 2012Assignee: The Research Foundation of State University of New YorkInventors: Hao Howard Wang, Bahgat Sammakia, Yayong Liu, Kaikun Yang
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Publication number: 20120052272Abstract: A functional film includes a substrate, at least two organic layers including a first organic layer directly formed on the substrate and a second organic layer being an uppermost layer farthest from the substrate, and at least one inorganic layer. The reminder of the least two organic layers except the second organic layer and the at least one inorganic layer are laminated on the substrate in such a way that one of the at least one inorganic layer is formed on each of the reminder of the least two organic layers. The first organic layer is thickest in the at least two organic layers, and the second organic layer is thinnest in the at least two organic layers and thicker than a thickest inorganic layer in the at least one inorganic layer.Type: ApplicationFiled: August 31, 2011Publication date: March 1, 2012Applicant: FUJIFILM CorporationInventor: Eijirou IWASE
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Patent number: 8119243Abstract: The invention relates to a process for the coating of objects made of valve metals selected from aluminum, magnesium, titanium, niobium and/or zirconium and their alloys with an oxide ceramic layer formed from the metal which has a thin barrier layer as a boundary layer towards the metal whose surface has been coated with polymers, characterized in that said polymers are introduced into the capillary system of the oxide ceramic layer in the form of dimers or halogenated dimers of general formula I wherein R1 represents one or more hydrogen or halogen residues; each R2 represents hydrogen or halogen; and R3 commonly represent a corresponding xylylene residue for completing a dimeric structure; by vacuum coating, followed by polymerizing the dimers.Type: GrantFiled: August 17, 2006Date of Patent: February 21, 2012Assignee: Oerlikon Leybold Vacuum GmbHInventors: Michael Froitzheim, Josef Heppekausen
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Patent number: 8119203Abstract: A method of treating a substrate by applying a layer of at least one metal to the substrate to form an applied metal layer on the substrate and followed by curing of the applied metal layer at sub-atmospheric pressure to form a metal protective layer. A method of treating a substrate by applying a layer of at least one metal to a substrate of an unassembled component of a reactor system to form an applied metal layer on the substrate of the unassembled component and curing the applied metal layer on the substrate of the unassembled component to form a metal protective layer. A method of treating a substrate by applying a layer of at least one metal to the substrate to form an applied metal layer, curing the applied metal layer at a first temperature and pressure for a first period of time, and curing the applied metal layer at a second temperature and pressure for a second period of time, wherein the curing forms a metal protective layer.Type: GrantFiled: May 30, 2006Date of Patent: February 21, 2012Assignee: Chevron Phillips Chemical Company LPInventors: Robert L. Hise, Geoffrey E. Scanlon, Joseph Bergmeister, III, Daniel B. Knorr
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Patent number: 8119197Abstract: The invention relates to a novel metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative or a fluorinated alkyl poly-phosphoric acid derivative, including a phosphorous atom and an alkyl chain. The anti-adhesive layer is bonded directly onto a surface of the base metal mold. The base metal mold may be e.g. Nickel, and said fluorinated alkyl phosphoric acid derivative or said fluorinated alkyl poly-phosphoric acid derivative may be selected front the group consisting of phosphonic acids, phosphinic acids, phosphonates and phosphonate salts, phosphinates and phosphinate salts, or their respective oligomers, such that the phosphorous atom is coupled directly to the alkyl chain, such that the phosphorous atom is coupled directly to the alkyl chain.Type: GrantFiled: March 31, 2010Date of Patent: February 21, 2012Assignee: Obducat ABInventors: Matthias Keil, Göran Frennesson, Marc Beck, Babak Heidari
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Publication number: 20120038564Abstract: In an embodiment of the present invention, a touch screen is provided, the touch screen characterized by: an indium tin oxide (ITO) film deposited on a top surface of a flexible plastic film; a first metal layer deposited on the ITO film, and a second metal layer plated on the first metal layer. According to the embodiment of the present invention, the touch screen and the method of manufacturing the same having the excellent sensitivity while securing durability may be provided.Type: ApplicationFiled: November 13, 2009Publication date: February 16, 2012Applicant: LG Innotek Co., Ltd.Inventors: Gap Young Kim, Hyun Min Na, Hyuk Jin Hong
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Publication number: 20120040106Abstract: A method for forming a fiber-reinforced plastic part is provided. The method includes providing a mold, providing a vibration generator, placing a fiber material in the mold, infusing the fiber material with a resin while the fiber material and/or the resin are exposed to vibrations, and curing the resin.Type: ApplicationFiled: August 16, 2010Publication date: February 16, 2012Inventors: Stefan SIMMERER, Uli RAMM, Markus GRIESEL, Jan Willem BAKHUIS
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Patent number: 8113143Abstract: A coating apparatus and method are disclosed that applies a coating to a product in a uniform and controlled manner. The coating apparatus comprises a feeding stage, an optional pre-treatment stage, at least one coating stage and a finishing stage. The coating stage(s) comprise a coating material feeder and a coating device. The coating device includes an aperture conforming to the perimeter of a substrate to be coated in a first and second dimension. As the substrate passes through the aperture, coating material is applied in a uniform and consistent layer ranging from 0.001 inches to 0.250 inches. The coating material also back fills minor surface imperfections and blemishes on the substrate to achieve a consistent finish across the whole area where coating material is applied. The coating device includes first and second shell portions. The first shell portion has a concave surface surrounding the aperture portion.Type: GrantFiled: May 19, 2008Date of Patent: February 14, 2012Inventors: Kendall W. Prince, Gordon L. King, Roderick Hughes, Richard B. Flora
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Publication number: 20120015209Abstract: In one embodiment, an article includes a surface; a metallic layer including a first metal and contacting the surface; and an oxide layer including an oxide of a second metal different from the first metal and contacting the metallic layer. The article may further include a polymer layer contacting the surface of the oxide layer directed away from the article surface. In certain instances, the article is a vehicle wheel.Type: ApplicationFiled: July 8, 2011Publication date: January 19, 2012Applicant: FORD GLOBAL TECHNOLOGIES, LLCInventors: Ann Marie Straccia, Larry P. Haack, Steven J. Simko
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Publication number: 20120009348Abstract: A method and apparatus for continuously depositing thin film on substrate in vacuum, the method including the following steps: maintaining the degree of vacuum in the vacuum deposition chamber by disposing at least one inlet vacuum pre-evacuating chamber at the inlet of the vacuum deposition chamber and disposing at least one outlet vacuum protection chamber at the outlet of the vacuum deposition chamber; connecting each inlet vacuum pre-evacuating chamber, the vacuum deposition chamber and each outlet vacuum protection chamber by a slit; adjusting the transportation speed of the substrate to shorten the distance between two adjacent substrates before arriving at the deposition device and to enlarge the distance between two adjacent substrates after the substrate left the vacuum deposition chamber, thereby realizing the continuous film deposition process and improving significantly the efficiency of utilizing raw materials.Type: ApplicationFiled: July 5, 2011Publication date: January 12, 2012Inventors: Shenjiang XIA, Jiong JIN, Zhiqiang ZHU
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Publication number: 20120009349Abstract: In a film forming method using gas cooling, a decrease in a film formation rate and an excessive load on a vacuum pump due to gas introduction are avoided while achieving an adequate cooling effect. A thin film forming device of the present invention includes: a cooling body 10 having a cooling surface 10S located near a rear surface of a substrate 7 in a thin film forming region 9; and a gas introducing unit configured to introduce a gas to between the cooling surface 10S and the rear surface of the substrate 7. In a width-direction cross section of the substrate, a center portion of the cooling surface is shaped to project toward the rear surface of the substrate 7 as compared to both end portions of the cooling surface. In the width-direction cross section of the substrate, the cooling surface preferably has a bilaterally-symmetric shape and more preferably has a shape represented by a catenary curve.Type: ApplicationFiled: April 14, 2010Publication date: January 12, 2012Inventors: Yasuharu Shinokawa, Satoshi Shibutani, Kazuyoshi Honda, Takashi Shimada, Yuma Kamiyama, Masahiro Yamamoto
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Patent number: 8092595Abstract: A method for forming an ordered array of nanocrystals where a hydrophobic precursor solution with a hydrophobic core material in an organic solvent is added to a solution of a surfactant in water, followed by removal of a least a portion of the organic solvent to form a micellar solution of nanocrystals. A precursor co-assembling material, generally water-soluble, that can co-assemble with individual micelles formed in the micellar solution of nanocrystals can be added to this micellar solution under specified reaction conditions (for example, pH conditions) to form an ordered-array mesophase material. For example, basic conditions are used to precipitate an ordered nanocrystal/silica array material in bulk form and acidic conditions are used to form an ordered nanocrystal/silica array material as a thin film.Type: GrantFiled: February 27, 2008Date of Patent: January 10, 2012Assignee: Sandia CorporationInventors: Hongyou Fan, C. Jeffrey Brinker, Gabriel P. Lopez
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Publication number: 20120003497Abstract: Coated articles and methods and systems for coating the articles are described herein. The methods and systems described herein include, but are not limited to, steps for actively or passively controlling the temperature during the coating process, steps for providing intimate contact between the substrate and the support holding the substrate in order to maximize energy transfer, and/or steps for preparing gradient coatings. Methods for depositing high molecular weight polymeric coatings, end-capped polymer coatings, coatings covalently bonded to the substrate or one another, metallic coatings, and/or multilayer coatings are also disclosed. Deposition of coatings can be accelerated and/or improved by applying an electrical potential and/or through the use of inert gases.Type: ApplicationFiled: December 28, 2010Publication date: January 5, 2012Inventors: Erik S. Handy, Aleksander J. White, W. Shannan O'Shaughnessy, Hilton G. Pryce Lewis, Neeta P. Bansal, Karen K. Gleason
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Publication number: 20120003390Abstract: A copper interconnection structure includes an insulating layer, an interconnection body including copper in an opening provided on the insulating layer, and a diffusion barrier layer formed between the insulating layer and the interconnection body. The diffusion barrier layer includes an oxide layer including manganese having a compositional ratio of oxygen to manganese (y/x) less than 2.Type: ApplicationFiled: September 12, 2011Publication date: January 5, 2012Applicant: Advanced Interconnect Materials, LLCInventors: Junichi Koike, Akihiro Shibatomi
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Method for forming a yttria-stabilized zirconia coating with a molten silicate resistant outer layer
Patent number: 8080283Abstract: A method for providing a component with protection against sand related distress includes the steps of: providing a substrate; depositing a layer of a yttria-stabilized zirconia material on the substrate; and forming a molten silicate resistant outer layer over the yttria-stabilized zirconia material.Type: GrantFiled: April 15, 2010Date of Patent: December 20, 2011Assignee: United Technologies CorporationInventors: Kevin W. Schlichting, Michael J. Maloney, David A. Litton, Melvin Freling, John G. Smeggil, David B. Snow -
Publication number: 20110304568Abstract: A touch screen according to an embodiment of the present invention includes: a transparent conductive material deposited on a top surface of a flexible plastic film; and a metal layer vacuum-deposited on the transparent conductive film. According to the embodiment of the present invention, the touch screen capable of providing the excellent flexibility and simplifying the manufacturing process, and the method of manufacturing the same can be provided.Type: ApplicationFiled: November 13, 2009Publication date: December 15, 2011Applicant: LG Innotek Co., Ltd.Inventors: Gap Young Kim, Hyun Min Na, Hyuk Jin Hong
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Publication number: 20110293837Abstract: The present invention relates to a composition of phase change materials (PCMs) and to the application thereof to natural stone in order to improve the thermal properties of same. Different PCMs are used depending on the type of stone and the manner in which they are introduced into or applied to the stone. The use of PCMs in powder form, emulsions, etc., depends on the porosity of the stone and the manner in which the PCMs are applied. PCMs are added to natural stone: as a surface layer on the stone, as a mastic applied to the posterior surface of the natural stone, as a reinforcing layer (for example in the form of mortar) applied to the posterior surface of the natural stone, or by impregnation through immersion of the stone in a PCMcontaining solution.Type: ApplicationFiled: January 25, 2010Publication date: December 1, 2011Inventors: María Dolores Romero Sánchez, Celia Guillem López, Ángel Miquel López Buendía, Founti Maria Aristeidis Elissabet
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Patent number: 8067101Abstract: This invention relates to a capacitor electrode which includes porous layers made of a fiber and/or a whisker containing crystal tungsten oxides. The tungsten oxide fiber and/or whisker contain W18O49 as a main ingredient. The tungsten oxide fiber and/or whisker are made on a substrate. When manufacturing the capacitor electrode the substrate or its precursor is heated in vacuo or in an inactive containing a minute amount of oxygen, thereby completing the fiber and/or whisker.Type: GrantFiled: September 14, 2007Date of Patent: November 29, 2011Assignee: Nissan Motor Co., Ltd.Inventors: Yoshiko Hishitani, Hidetoshi Nojiri, Didier Hamm, Masaharu Hatano, Makoto Uchiyama
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Publication number: 20110281034Abstract: A layer-by-layer fabrication method of sprayed nanopaper is disclosed in the present invention. According to one embodiment, a plurality of nano-micro particles are suspended in a solvent to form a sprayable particle precursor. Afterwards, one or more sprayed nanopapers are formed by vacuum-assisted layer-by-layer spray of the sprayable particle precursor on a porous substrate.Type: ApplicationFiled: May 12, 2011Publication date: November 17, 2011Inventors: James L. Lee, Dante Guerra, Siva Movva, Yong G. Min
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Patent number: 8043656Abstract: A method and an apparatus impregnate a lining module for repairing a pipe. An end area of the lining module provided with a resin-absorbing layer and an air-tight, outer coating, is introduced into an air-tight sleeve, and an auxiliary introduction device is fixed at an introduction area of the lining module. The transitions between the lining module and the sleeve and between the introduction area and the auxiliary introduction device are closed off in an air-tight manner by at least one sealing device. The auxiliary introduction device is closed off with respect to the ambient by a releasable blocking device in an air-tight manner in such a way that the chamber, formed by the sleeve and the auxiliary introduction device and optionally also the lining module, is closed in an air-tight manner and an introduction chamber accessible from the outside is provided for filling with resin.Type: GrantFiled: November 5, 2009Date of Patent: October 25, 2011Assignee: Trelleborg Pipe Seals Duisburg GmbHInventors: Michael Mühlin, Andreas Bichler
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Publication number: 20110250357Abstract: The present invention relates to a vacuum coating system (01), comprising at least one process chamber (02) that can be evacuated, at least one entry opening (10) and at least one exit opening (11), wherein wafer elements (03), which are coated in the process chamber (02) while passing through, can be fed into and removed from the process chamber through the entry opening (10) and the exit opening (11), and wherein a paddle valve (08, 09), which can be adjusted between an open position and a pressure-tight closed position along a paddle valve closing path, is respectively provided on the entry opening (10) and on the exit opening (11), and wherein for the purpose of transporting the wafer elements (03) a transport system having at least three transport devices (04, 05, 06, 07) is provided, wherein the first transport device (04, 17) is arranged upstream of the entry opening (10), the second transport device (05, 17) is arranged in the process chamber (02) and the third transport device (06, 17) is arranged doType: ApplicationFiled: December 9, 2009Publication date: October 13, 2011Inventor: Guido Willers
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Patent number: 8021723Abstract: A method for processing a substrate by plasma CVD includes: (i) forming a film on a substrate placed on a susceptor by applying RF power between the susceptor and a shower plate in the presence of a film-forming gas in a reactor; and (ii) upon completion of step (i), without unloading the substrate, applying amplitude-modulated RF power between the susceptor and the shower plate in the absence of a film-forming gas but in the presence of a non-film-forming gas to reduce a floating potential of the substrate.Type: GrantFiled: November 27, 2007Date of Patent: September 20, 2011Assignee: ASM Japan K.K.Inventors: Yasushi Fukasawa, Mitsutoshi Shuto, Yasuaki Suzuki
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Patent number: 8022012Abstract: A device for fabricating thin films on a substrate includes a vacuum chamber, a rotatable platen configured to hold one or more substrates within the vacuum chamber, and a housing disposed within the vacuum chamber. The housing contains a heating element and is configured to enclose an upper surface of the platen and a lower portion configured to partially enclose an underside surface of the platen which forms a reaction zone. A heated evaporation cell is operatively coupled to the lower portion of the housing and configured to deliver a pressurized metallic reactant to the reaction zone. The device includes a deposition zone disposed in the vacuum chamber and isolated from the reaction zone and is configured to deposit a deposition species to the exposed underside of the substrates when the substrates are not contained in the reaction zone.Type: GrantFiled: September 11, 2008Date of Patent: September 20, 2011Assignee: Superconductor Technologies, Inc.Inventors: Brian H. Moeckly, Ward S. Ruby
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Patent number: 8017186Abstract: The present invention provides film forming method and a droplet discharge method for removing bubbles in a pressurizing chamber to prevent defective discharge without disposing a large amount of materials in a droplet discharging device. Before a material is discharged in the droplet discharging device, a step is provided in which reduced pressure is kept in a pressurizing chamber and a material supply portion, which are connected, to remove bubbles that exist in the pressurizing chamber. A flow path connected to the outside such as an opening of a nozzle surface of the pressurizing chamber or a material supply port of the material supply portion is sealed, and pressure in the pressurizing chamber and the material supply portion is reduced from an inlet and outlet connected to the material supply portion with the use of a reduced pressure means such as a pump.Type: GrantFiled: August 15, 2007Date of Patent: September 13, 2011Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Gen Fujii
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Patent number: 7998539Abstract: A method of forming thin-film structure by oblique-angle deposition is provided. The method includes the steps of: evaporating target source in a chamber by an electron beam evaporation system, and introducing process gas into the chamber and adjusting tilt angle of the evaporation substrate and controlling temperature in the chamber during evaporation to form thin-film on a evaporation substrate by oblique-angle deposition, and then annealing the evaporation substrate to form a thin-film having porous nanorod microstructure.Type: GrantFiled: November 5, 2008Date of Patent: August 16, 2011Assignee: National Chiao Tung UniversityInventors: Chia-Hua Chang, Chin-Sheng Yang, Ching-Hua Chiu, Pei-Chen Yu, Hao-Chung Kuo
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Publication number: 20110174608Abstract: A method for forming a diamond-like carbon (DLC) layer on air bearing surface (ABS) of a slider, comprises steps of: providing sliders arranged in arrays, each slider having an ABS; forming a mixing layer in the ABS of the slider by depositing a first DLC layer on the ABS, the mixing layer consisting of the slider material and the first DLC layer material; removing the first DLC layer to make the mixing layer exposed; forming a second DLC layer on the mixing layer.Type: ApplicationFiled: January 20, 2010Publication date: July 21, 2011Applicant: SAE Magnetics (H.K.) Ltd.Inventors: Kunihiro UEDA, Hongxin Fang, Dong Wang
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Patent number: 7981471Abstract: A process for producing a thin film and an optical member which are free from discoloration of a lens and exhibit a good antistatic property and a good water repellency. The thin film is formed by a vacuum deposition of a water repellent solution which contains (a) a water repellent having a perfluoroalkyl group, (b) a mixture of a silane coupling agent, a modified silicone oil introduced with an organic group into its side chain and/or both terminal ends, and a perfluoroether compound, and (c) at least one conductive substance selected from the group consisting of fullerenes, carbon nanotubes and graphite compounds.Type: GrantFiled: May 18, 2007Date of Patent: July 19, 2011Assignee: Hoya CorporationInventors: Takeshi Mitsuishi, Terufumi Hamamoto, Ken-ichi Shinde
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Publication number: 20110159190Abstract: A method for fabricating a carbon nanotube film includes the following steps: providing a vacuum chamber having a carbon nanotube array therein; and pulling a carbon nanotube film out from the carbon nanotube array.Type: ApplicationFiled: March 30, 2010Publication date: June 30, 2011Applicant: BEIJING FUNATE INNOVATION TECHNOLOGY CO., LTD.Inventors: LIANG LIU, LI QIAN, CHEN FENG, YU-QUAN WANG
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Publication number: 20110143033Abstract: A vacuum processing apparatus has a degassing chamber and does not need a large-sized vacuum evacuation device. In the process of heating and degassing an object to be processed in the degassing chamber, transferring the object to be processed into a processing chamber through a buffer chamber; and performing vacuum processing, the degassing chamber is connected to an vacuum evacuation system having a low evacuation speed and degassing processing is performed in a vacuum atmosphere of 1 to 100 Pa (time 0 to t2). Next, the object to be processed is moved to the buffer chamber, and the pressure inside the buffer chamber is lowered to near the pressure of the processing chamber (time t2 to t3), then the buffer chamber and the processing chamber are connected, and the object to be processed is transferred into the processing chamber.Type: ApplicationFiled: January 31, 2011Publication date: June 16, 2011Applicant: ULVAC, INCInventors: Eiichi IIJIMA, Hiroto Ikeda, Muneto Hakomori
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Patent number: 7955649Abstract: A method of forming a thin film of amphiphilic molecules on a substrate by using a resealable vial carrier is provided. The method includes placing the substrate in a vacuum chamber. A resealable cap member of the vial carrier is opened. The vial carrier may contain a liquid or solid amphiphilic material. The open vial carrier is placed within the chamber. The chamber is sealed and a pressure from about 2×10+2 to 5×10?6 torr is applied to the chamber. The vial carrier is heated to a temperature between 100-350° C. The amphiphilic material is vaporized in the chamber. A thin film of amphiphilic molecules is formed on the substrate. The chamber is opened and the substrate having the thin film of amphiphilic molecules thereon is removed. The resealable vial carrier includes a temperature resilient vial carrier and a resealable member selectively disposed about an opening of the vial carrier.Type: GrantFiled: January 16, 2008Date of Patent: June 7, 2011Assignee: Visichem Technology, Ltd.Inventor: Brij Pal Singh
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Patent number: 7947331Abstract: A method for making a thermal interface material includes the steps of: (a) providing an array of carbon nanotubes formed on a substrate, the carbon nanotubes having interfaces defined therebetween; (b) providing a transferring device and disposing at least one low melting point metallic material above the array of carbon nanotubes, using the transferring device; and (c) heating the low melting point metallic material and the array of carbon nanotube to a certain temperature to make the at least one low melting point metallic material melt, then flow into the interspaces between the carbon nanotubes, and combine (e.g., mechanically) with the array of carbon nanotubes to acquire a carbon-nanotube-based thermal interface material.Type: GrantFiled: April 28, 2008Date of Patent: May 24, 2011Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.Inventors: Yun-Hsin Kevin Liao, Yuan Yao, Chang-Shen Chang, Hsien-Sheng Pei, Kai-Li Jiang, Chang-Hong Liu
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Publication number: 20110117279Abstract: A thin film forming apparatus (100) includes: a vacuum chamber (1); a substrate transfer mechanism (40) that is provided in the vacuum chamber (1) and feeds an elongated substrate (8) to a predetermined film forming section (4) that faces a film forming source (27); an endless belt (10) capable of moving in accordance with the feeding of the substrate (8) by the substrate transfer mechanism (40), and configured to define, along an outer peripheral surface of the endless belt itself, a transfer path of the substrate (8) in the film forming section (4) so that a thin film is formed on a surface of the substrate (8) that is being transferred linearly; a through-hole (16) formed in the endless belt (10); and a substrate cooling unit (30) for introducing a cooling gas between the endless belt (10) and a back surface of the substrate (8) through the through-hole (16) from a side of an inner peripheral surface of the endless belt (10) that is moving.Type: ApplicationFiled: February 17, 2009Publication date: May 19, 2011Applicant: PANASONIC CORPORATIONInventors: Yasuharu Shinokawa, Kazuyoshi Honda, Yuma Kamiyama, Masahiro Yamamoto, Tomofumi Yanagi
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Publication number: 20110114707Abstract: A method for making thermally conductive high aspect ratio large area contact between devices with different coefficients of thermal expansion. The method of the invention includes the creation or placement of sparse structures on at least one of two surfaces or between the surfaces to maintain enough thickness that an interposed bonding material remains sufficiently compliant that relative thermal motion of the two devices can occur without damage to the devices or the bond during changes in temperature.Type: ApplicationFiled: November 19, 2009Publication date: May 19, 2011Applicant: Santa Barbara InfraredInventor: Gregory P. Matis
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Patent number: 7943195Abstract: A porous organosilica glass (OSG) film consists of a single phase of a material represented by the formula SivOwCxHyFz, where v+w+x+y+z=100%, v is from 10 to 35 atomic %, w is from 10 to 65 atomic %, x is from 5 to 30 atomic %, y is from 10 to 50 atomic % and z is from 0 to 15 atomic %, wherein the film has pores and a dielectric constant less than 2.6. The film is provided by a chemical vapor deposition method in which a preliminary film is deposited from organosilane and/or organosiloxane precursors and pore-forming agents (porogens), which can be independent of, or bonded to, the precursors. The porogens are subsequently removed to provide the porous film. Compositions, such as kits, for forming the films include porogens and precursors. Porogenated precursors are also useful for providing the film.Type: GrantFiled: May 6, 2008Date of Patent: May 17, 2011Assignee: Air Products and Chemicals, Inc.Inventors: Raymond Nicholas Vrtis, Mark Leonard O'Neill, Jean Louise Vincent, Aaron Scott Lukas, Manchao Xiao, John Anthony Thomas Norman
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Publication number: 20110101856Abstract: Organometallic soft salt compounds are provided. In particular, the compounds comprise mononuclear Ir-based soft salts. The compounds may be used in organic light emitting diodes (OLED) and light emitting cells (LEC).Type: ApplicationFiled: November 1, 2010Publication date: May 5, 2011Applicant: The University of Southern CaliforniaInventors: Mark E. Thompson, Chao Wu, Hsiao-Fan Chen
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Patent number: 7935384Abstract: The present invention relates to a method of forming a metal-nitride film onto a surface of an object to be processed in a processing container in which a vacuum can be created. The method of the invention includes: a step of continuously supplying an inert gas into a processing container set at a low film-forming temperature; and a step of intermittently supplying a metal-source gas into the processing container, during the step of continuously supplying the inert gas. During the step of intermittently supplying the metal-source gas, a nitrogen-including reduction gas is supplied into the processing container at the same time that the metal-source gas is supplied, during a supply term of the metal-source gas. The nitrogen-including reduction gas is also supplied into the processing container for a term shorter than a non-supply term of the metal-source gas, during the non-supply term of the metal-source gas.Type: GrantFiled: September 2, 2002Date of Patent: May 3, 2011Assignee: Tokyo Electron LimitedInventor: Toshio Hasegawa
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Publication number: 20110091644Abstract: A metal flake film assembly comprising a base film having a first side and a second side. A coating is positioned on the first side of the base film. The coating is one of a water soluble polymer or a water dispersible polymer with a predetermined content of a water soluble polymer which coats and adheres to the base film. A metal layer is vacuum deposited upon the coating. The coating may be embossed. A method of manufacture of metal flakes is likewise disclosed.Type: ApplicationFiled: October 16, 2009Publication date: April 21, 2011Inventors: Kurt B. Gundlach, Thomas R. Fields