Vacuum Utilized Prior To Or During Coating Patents (Class 427/294)
  • Patent number: 6953618
    Abstract: Composite film structures exhibit a predetermined finished color tone comprised of a transparent film layer which exhibits a color deficiency as compared to the finished color tone, and a pigment which is visually associated with, and satisfies the color deficiency of, the film layer. Most preferably, the pigment is provided as a homogenous dispersion in a transparent color-matching layer positioned adjacent to the film layer. Thus, when the film and color-matching layers are viewed collectively as a unit, the perceived color tone will be that of the finished predetermined color tone. That is, the color-matching layer provides visually an additive effect on the perceived color of the composite film structure.
    Type: Grant
    Filed: July 23, 2003
    Date of Patent: October 11, 2005
    Assignee: CPFilms, Inc.
    Inventors: James P. Enniss, Steven A. Barth, Mary E. Lawless, Anthony B. Port, Elizabeth J. Packer
  • Patent number: 6933015
    Abstract: A method of forming a film of a coating solution on a substrate includes steps of moving a coating solution discharge member relative to a substrate while a coating solution is being discharged from the coating solution discharge member to the surface of the substrate, and changing a discharge direction of the coating solution to an outer peripheral portion of the substrate to make the amount of application to the outer peripheral portion smaller than that to other portions. This can reduce the amount of application to the outer peripheral portion of the substrate, thereby making it possible to restrain protuberance of the coating solution at the outer peripheral portion of the substrate caused by surface tension. Consequently, a coating film which is uniform also at the outer peripheral portion on the substrate is formed.
    Type: Grant
    Filed: February 11, 2003
    Date of Patent: August 23, 2005
    Assignee: Tokyo Electron Limited
    Inventors: Takahiro Kitano, Shinji Kobayashi, Yukihiko Esaki, Masateru Morikawa
  • Patent number: 6933009
    Abstract: In a thin-film deposition method, a substrate is placed in a heat chamber having a pressure equal to or higher than an atmospheric pressure, and the substrate is heated in the heat chamber by supplying gas having a temperature higher than a room temperature by forced convection. The heated substrate is transferred from the heat chamber into a deposition chamber which is a vacuum chamber connected to the heat chamber directly or indirectly with a valve interposed therebetween. Then, a thin-film deposition is carried out on the substrate in the deposition chamber at a deposition temperature higher than the room temperature.
    Type: Grant
    Filed: May 5, 2003
    Date of Patent: August 23, 2005
    Assignee: Ishikawajima-Harima Heavy Industies Co., Ltd.
    Inventors: Masashi Ueda, Tomoko Takagi
  • Patent number: 6897086
    Abstract: A CMOS image sensor for improving a characteristic of transmittance therein is provided by forming a convex-shaped color filter pattern that acts as a micro-lens. The CMOS image sensor includes a semiconductor structure having a photodiode and a peripheral circuit, an insulating layer that is formed on the semiconductor structure and that has a trench, and a convex-shaped color filter pattern formed on the insulating layer and covering the trench.
    Type: Grant
    Filed: October 17, 2003
    Date of Patent: May 24, 2005
    Assignee: Hyundai Electronics Industries
    Inventor: Chae-Sung Kim
  • Patent number: 6896929
    Abstract: Provided herein is a method of improving the planarity of a support plate of a susceptor for use during deposition of a film of material onto a substrate comprising the steps of reducing pressure in a hollow core of a shaft to a level below atmospheric pressure; and reducing a pressure in the deposition chamber to a level required for the deposition of the film of material onto the substrate, where the pressure in the hollow core of the shaft acts upon a lower surface of the support plate connected to the shaft and interfacing with the hollow core of the shaft and the pressure in the deposition chamber acts upon an upper surface of the support plate adapted to support the substrate thereby improving planarity. Also provided are a susceptor and a method of depositing a film onto a substrate affixed to the susceptor of the present invention.
    Type: Grant
    Filed: August 3, 2001
    Date of Patent: May 24, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Sanjay Yadav, Quanyuan Shang, Ernst Keller, Wei Chang
  • Patent number: 6890588
    Abstract: A rotatable vacuum chamber receives an optical connector having an output face on which an optical gel is applied substantially without entrapped air. Opposite the output face is placed a gel dispenser with its opened nozzle pointing towards the output face. Uncured gel components contained in the dispenser are outgased prior to application of the gel on the output face while a vacuum is maintained in the chamber. Outgasing takes place at a first chamber orientation with the nozzle pointing upwards through which the outgasing air ventilates. The gel is applied at a second chamber orientation where the output face is horizontal and upwards pointing. Immediately following the gel application, the vacuum is unmade to prevent cooking of the mixed and uncured gel. A glass plate is then pressed against the applied fluid gel.
    Type: Grant
    Filed: September 5, 2002
    Date of Patent: May 10, 2005
    Assignee: Intel Corporation
    Inventor: Janusz Liberkowski
  • Patent number: 6884464
    Abstract: A silicon comprising film and its method of fabrication is described. The silicon comprising film is grown on a substrate. A hexachlorodisilane (HCD) source gas is one of the reactant species used to form the silicon comprising film. The silicon comprising film is formed under a pressure between 10 Torr and 350 Torr.
    Type: Grant
    Filed: November 4, 2002
    Date of Patent: April 26, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Lee Luo, R. Suryanarayanan Iyer, Janardhanan Anand Subramony, Errol Antonio C. Sanchez, Xiaoliang Jin, Aihua Chen, Chang-Lian Yan, Nobuo Tokai, Yuji Maeda, Randhir P. Singh Thakur
  • Patent number: 6884911
    Abstract: A method for repeatedly converting a solvent from a state of solvent to a state of antisolvent with relatively little loss of solvent. The method is used to allow for processing of large amounts of solute material with minimum amounts of solvent.
    Type: Grant
    Filed: January 30, 2001
    Date of Patent: April 26, 2005
    Assignee: Boehringer Ingelheim Pharmaceuticals, Inc.
    Inventors: Said Saim, Stephen Horhota, David Joseph Bochniak
  • Patent number: 6881264
    Abstract: A process tool, preferably a spin coater, includes a set of at least three arms and an adjustable rinse nozzle. The arms lift a substrate, e.g. a semiconductor wafer, from a chuck inside the process chamber after having performed the corresponding manufacturing step, e.g. coating. The contact area between the arms and the substrate is as small as possible. The rinse nozzle dispenses a solvent liquid onto the backside of the substrate, thereby removing contaminating particles located at the area of contact between the vacuum channels of the chuck and the substrate. The set of arms rotates for a homogeneous cleaning. A gas flowing out of vacuum ports of the chuck prevents the vacuum ports from being obstructed with particles. While the substrate is being lifted, the chuck can also be cleaned by dispensing the solvent liquid onto the chuck.
    Type: Grant
    Filed: August 19, 2003
    Date of Patent: April 19, 2005
    Assignees: Infineon Technologies AG, Infineon Technologies SC300 GmbH, Motorola Inc.
    Inventors: Mark Hiatt, Karl Mautz, Ralf Schuster
  • Patent number: 6881446
    Abstract: A method for production of endless plastic hollow profiles, in particular tubes, comprises several production stages for the plastic tube and a coating stage for a metal coating. A reduced pressure is provided in the coating stage, whereby the metal is transferred into the gas phase and deposited on the tube as a surface layer homogeneously bonded thereto.
    Type: Grant
    Filed: March 20, 2002
    Date of Patent: April 19, 2005
    Assignee: Ivt Installations - und Verbindungstechnik GmbH & CO KG
    Inventor: Christoph Hennig
  • Patent number: 6863851
    Abstract: A process for making functional or decorative flakes or platelets economically and at high production rates comprises applying a multi-layer sandwich of vapor deposited metal and release coats in alternating layers to a rotating chilled drum or suitable carrier medium contained in a vapor deposition chamber. The alternating metallized layers are applied by vapor deposition and the intervening release layers are preferably solvent soluble thermoplastic polymeric materials applied by vapor deposition sources contained in the vapor deposition chamber. The multi-layer sandwich built up in the vacuum chamber is removed from the drum or carrier and treated with a suitable organic solvent to dissolve the release coating from the metal in a stripping process that leaves the metal flakes essentially release coat free.
    Type: Grant
    Filed: May 4, 2001
    Date of Patent: March 8, 2005
    Assignee: Avery Dennison Corporation
    Inventors: Karl Josephy, James P. Rettker, Howard H. Enlow
  • Patent number: 6858254
    Abstract: A getter device is shaped like a substrate used in a deposition process. Embodiments of the device include a powdered getter material coated onto one or both sides of a support with a narrow rim portion left uncoated so that the device can be manipulated by automatic handling equipment. A method for using the getter device includes providing a vacuum chamber and automatic handling equipment, loading the device into the chamber, reducing the chamber pressure to a desired value by using the getter device in conjunction with an external pump, removing the getter device and replacing it with a substrate, and depositing a thin film on the substrate. The getter device can be in an activated state when loaded into the chamber, or it can be activated after being loaded by employing heating equipment ordinarily used to heat substrates placed in the chamber. The getter material of the device may also be activated in a separate activation chamber before the getter device is loaded into the vacuum chamber.
    Type: Grant
    Filed: April 23, 2003
    Date of Patent: February 22, 2005
    Assignee: SAES Getters S.p.A.
    Inventors: Andrea Conte, Francesco Mazza, Marco Moraja
  • Patent number: 6852196
    Abstract: A method for applying a foam to a paper web is provided. Specifically, a foam is first formed from a liquid-based composition and a gas, such as air. Once formed, the foam is applied by a foam applicator to the web. In one embodiment, for example, the foam applicator applies the foam without substantially contacting the web. When applied with the foam, the web typically has a solids consistency less than about 95% by weight of the web. In some embodiments, one or more vacuum slots can be utilized in conjunction with the foam applicator to facilitate uniform application of the foam to the paper web.
    Type: Grant
    Filed: November 8, 2001
    Date of Patent: February 8, 2005
    Assignee: Kimberly-Clark Worldwide, Inc.
    Inventor: Joseph G. Capizzi
  • Patent number: 6852423
    Abstract: In paper coating slips containing, as a binder, a copolymer which is obtainable by free radical polymerization of ethylenically unsaturated compounds, at least one of the ethylenically unsaturated compounds is a polymer having at least one copolymerizable ethylenically unsaturated group, a number average molecular weight of from 500 to 50000 g/mol and at least one carboxyl group (referred to below as ethylenically unsaturated polymer for short).
    Type: Grant
    Filed: March 27, 2001
    Date of Patent: February 8, 2005
    Assignee: BASF Aktiengesellschaft
    Inventors: Volker Schädler, David Christie, Roland Ettl
  • Patent number: 6846515
    Abstract: A method for providing a porous organosilica glass (OSG) film that consists of a single phase of a material represented by the formula SivOwCxHyFz, v+w+x+y+z=100%, v is from 10 to 35 atomic %, w is from 10 to 65 atomic %, x is from 5 to 30 atomic %, y is from 10 to 50 atomic % and z is from 0 to 15 atomic %, wherein the film has pores and a dielectric constant less than 2.6 is disclosed herein. In one aspect of the present invention, the film is provided by a chemical vapor deposition method in which a preliminary film is deposited from organosilane and/or organosiloxane precursors and pore-forming agents (porogens), which can be independent of, or alternatively bonded to, the precursors. The porogens are subsequently removed to provide the porous film. In another aspect of the present invention, porogenated precursors are used for providing the film.
    Type: Grant
    Filed: May 17, 2002
    Date of Patent: January 25, 2005
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Raymond Nicholas Vrtis, Mark Leonard O'Neill, Jean Louise Vincent, Aaron Scott Lukas, Manchao Xiao, John Anthony Thomas Norman
  • Patent number: 6835416
    Abstract: An apparatus for growing thin films by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises a reaction chamber including a reaction space, infeed means connected to the reaction space for feeding into the reaction space the reactants, and outfeed means connected to the reaction space for discharging waste gases. At least one substrate is adapted into the reaction space and a second surface is also adapted into the reaction space in a disposition opposed to the surface of the substrate. The thin-film growth supporting surface of the substrate and the other surface disposed opposing the same are arranged in the reaction chamber so as to subtend an angle opening in the flow direction of the reactants in relation to the opposed surfaces. The distance between the opposed surfaces at the infeed end of reactants is smaller than at the gas outfeed end.
    Type: Grant
    Filed: February 13, 2003
    Date of Patent: December 28, 2004
    Assignee: ASM International N.V.
    Inventor: Vaino Kilpi
  • Publication number: 20040258846
    Abstract: Apparatus and method for treating by injecting a fluid treatment material into porous structures such as those formed from concrete, brick, stone, marble, and wood. The apparatus includes an applicator head having an inner chamber and an outer chamber surrounding the inner chamber both of which chambers are connected with a vacuum source. The inner chamber is also connected with a source of pressurized liquid treatment material. The method is for treating such porous structures and includes the steps of engaging the structures with the applicator head, drawing a vacuum on at least the outer chamber to secure the applicator head to the structure, and supplying the pressurized liquid treatment material to the inner chamber to impregnate the structure to be treated.
    Type: Application
    Filed: June 20, 2003
    Publication date: December 23, 2004
    Inventors: Gerard J. Vaerewyck, Edward A. Vitunac, Anthony F. Fiasco
  • Publication number: 20040258834
    Abstract: Methods and devices are provided to actively apply finish to one or more yarns in motion at speeds greater than about 3000 m/min, to achieve a finish application of 0.2 wt. % or more, and with a coefficient of variation of finish concentration of 10% or less. The devices are compact, portable and readily installed at a variety of positions on a fiber processing line. The devices of the invention contain the finish so that contamination of the surrounding areas is prevented.
    Type: Application
    Filed: July 8, 2004
    Publication date: December 23, 2004
    Applicant: Honeywell International Inc.
    Inventors: Thomas Yui-Tai Tam, Jeffrey T. Perkins, Qiang Zhou, Arlin L. Fynaardt
  • Patent number: 6833159
    Abstract: A method provides high-vacuum vapor coating methods, with the methods producing novel coating compositions with surprisingly increased performance levels over coatings produced from the same materials under different processing conditions. Compounds of the general formulae II, III and IV, defined herein, can be applied by vapor deposition from a merely compacted, rather than fused or sintered porous matrix source with improved performance, even where the same chemicals are used in the coating, at the same coating temperatures. The generally useful materials include silanes and siloxanes, and siloxazanes of formulae I, II, III and IV.
    Type: Grant
    Filed: May 2, 2000
    Date of Patent: December 21, 2004
    Assignee: Vision-Ease Lens, Inc.
    Inventors: Michael S. Boulineau, Thomas J. Moravec
  • Patent number: 6824826
    Abstract: Use of photocatalytic preparations of colloidal titanium dioxide optionally doped with a metal chosen from groups I-VA, and the lanthanide and actinide series of the periodic table, for preserving the original appearance of cementitious, stone, and marble products.
    Type: Grant
    Filed: April 11, 2002
    Date of Patent: November 30, 2004
    Assignee: Italcementi S.p.A.
    Inventors: Rossano Amadelli, Luigi Cassar, Carmine Pepe
  • Publication number: 20040234692
    Abstract: A method is described for vacuum impregnation of particulate material in an impregnation installation (16, 16′) which has an impregnation chamber (54, 84) that can be placed under vacuum, an inlet orifice (64, 64′) for transferring the material into the impregnation chamber (54, 84) and an outlet orifice (82, 82′) for transferring the material out of the impregnation installation (16, 16′), with the following method steps
    Type: Application
    Filed: February 9, 2004
    Publication date: November 25, 2004
    Inventor: Herbert Georg Nopper
  • Publication number: 20040228970
    Abstract: Fluid discharge device and method for intermittently discharging and feeding fluid in a constant amount with high speed and high precision, the fluid exemplified by various kinds of liquids such as adhesives, solder paste, fluorescent materials, electrode materials, greases, paints, hot melts, chemicals, foods and the like in production processes in the fields of electronic components, household electrical appliances, displays, and the like. By providing a fluid supply device for supplying the fluid to two surfaces that are moved relative to each other along a direction of a gap, a continuous flow supplied from the fluid supply device is converted into an intermittent flow by utilizing a pressure change due to a change in the gap of the relatively moving surfaces, while the intermittent discharge amount per dot is controlled by the rotational speed of the fluid supply device.
    Type: Application
    Filed: February 12, 2004
    Publication date: November 18, 2004
    Inventors: Teruo Maruyama, Takashi Inoue, Ryoji Hyuga
  • Patent number: 6818257
    Abstract: Systems to achieve both more uniform and particle free DLC deposition is disclosed which automatically cycles between modes to effect automatic removal of carbon-based buildups or which provides barriers to achieve proper gas flow involves differing circuitry and design parameter options. One ion source may be used in two different modes whether for DLC deposition or not through automatic control of gas flow types and rates and through the control of the power applied to achieve maximum throughput or other desired processing goals. Arcing can be controlled and even permitted to optimize the overall results achieved.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: November 16, 2004
    Assignee: Advanced Energy Industries, Inc.
    Inventors: Michael S. Amann, Michael Kishinevsky, Andrew Shabalin, Colin Quinn
  • Publication number: 20040213891
    Abstract: This invention is a method of forming a nitride layer on at least one metal or metal alloy biomedical device, comprising: providing a vacuum chamber with at least one biomedical device positioned thereon on a worktable within the vacuum chamber; reducing the pressure in the vacuum chamber; introducing nitrogen into the vacuum chamber so that the pressure in the vacuum chamber is about 0.01 to about 10 milli-Torr; generating electrons within the vacuum chamber to form positively charged nitrogen ions; providing a negative bias to the worktable so that the positively charged nitrogen ions contact the biomedical devices under conditions such that a nitride layer forms on the at least one prosthetic device.
    Type: Application
    Filed: March 26, 2004
    Publication date: October 28, 2004
    Inventors: Ronghua Wei, Thomas L. Booker, Christopher Rincon, James H. Arps
  • Patent number: 6808741
    Abstract: An apparatus for performing simultaneous pass-by vapor deposition of a uniform thickness thin film of a lubricant on at least one surface of each of a plurality of substrates, comprising: (a) chamber means having an interior space adapted to be maintained at a reduced pressure below atmospheric pressure, including entrance and exit means at opposite ends thereof; (b) at least one linearly extending vapor source means for supplying the interior space of the chamber with at least one linearly extending stream of lubricant vapor; (c) a substrate/workpiece mounting/supporting means adapted for supporting thereon a plurality of substrates/workpieces; and (d) a transporter/conveyor means for continuously moving the substrate/workpiece mounting/supporting means transversely past the at least one linearly extending stream of lubricant vapor for depositing a uniform thickness thin film of lubricant on the surfaces of each of a plurality of substrates/workpieces carried by the substrate/workpiece mounting/supportin
    Type: Grant
    Filed: February 21, 2002
    Date of Patent: October 26, 2004
    Assignee: Seagate Technology LLC
    Inventor: Paul Stephen McLeod
  • Patent number: 6808605
    Abstract: A fabrication method of metallic nanowires includes the steps of: forming a layer of autocatalytic metal with a thickness of 30 nm-1000 nm on the surface of a substrate; and forming nanowires on the front surface of the layer of autocatalytic metal, wherein the substrate is put into an evaporator and the layer of autocatalytic metal is grown by autocatalytic reaction for 10˜5000 seconds. A large amount of nanowires can be grown on a substrate without a lithography process.
    Type: Grant
    Filed: October 7, 2002
    Date of Patent: October 26, 2004
    Assignee: Korea Institute of Science and Technology
    Inventors: Yun-Hi Lee, Byeong-Kwon Ju, Yoon-Taek Jang, Chang-Hoon Choi
  • Patent number: 6808744
    Abstract: A composite crucible for pulling up monocrystalline silicon, which is superior in shape stability and suitable for a large-sized one is provided. The composite crucible is characterized in that a carbonaceous material as an outer layer and a quartz glass as an inner layer are integrally formed. Methods for preparing and regenerating a composite crucible are also disclosed.
    Type: Grant
    Filed: January 28, 2003
    Date of Patent: October 26, 2004
    Assignee: Mitsubishi Material Quartz Corporation
    Inventors: Yoshiyuki Tsuji, Masanori Fukui, Ken-ichi Hiroshima
  • Publication number: 20040208996
    Abstract: A process for rapidly infusing a synthetic resinous substrate with an alkali metal nitrite, comprises (a) essentially completely dissolving the alkali metal nitrite in supercritical carbon dioxide to form a solids-free solution having from about 1 to 15% by weight of the alkali metal nitrite; (b) contacting the synthetic resinous substrate with the solution for a time sufficient to transfer at least a portion of the alkali metal nitrite into the synthetic resinous substrate while maintaining the carbon dioxide under supercritical conditions; and, (c) decreasing pressure or temperature, or both, on the synthetic resinous material sufficiently to evolve carbon dioxide and leave micronized solid alkali metal nitrite crystals in an amount less than 2% by weight essentially uniformly distributed in the synthetic resinous substrate.
    Type: Application
    Filed: May 13, 2004
    Publication date: October 21, 2004
    Inventors: Mehmet A. Gencer, Sunggyu Lee, Abhay Sardesai
  • Patent number: 6805910
    Abstract: A process for applying a thermoplastic coating to a substrate wherein the gases and other volatiles in a boundary layer between the substrate and the coating are evacuated using a high volume, high velocity air stream which traverses the surface of the substrate to be coated (functioning as an air knife) such that, when the coating is applied, gases/volatiles do not disrupt the coating while:the coating cools and solidifies. The effect of the air knife may be enhanced by heating the substrate and/or by applying a solvent to the substrate. The air knife also cools down the boundary layer of the substrate so that, as the thermoplastic coating is applied, this cooled-down and gas-evacuated boundary layer provides a measure of insulation between the coating and any gases/volatiles which have not been evacuated from the substrate.
    Type: Grant
    Filed: August 30, 2002
    Date of Patent: October 19, 2004
    Assignee: Hunter Douglas, Inc.
    Inventor: Richard N. Anderson
  • Patent number: 6803074
    Abstract: A metal compound solution in the atomized state is introduced directly into a film-forming chamber of which the pressure is maintained at about 100 Torr or lower by mean of a two-fluid nozzle to form a complex oxide thin-film. For use in the two-fluid nozzle, gases including an oxidative gas are used. To dissolve the metal compound, a solvent having a boiling point under ordinary pressure of about 100° C. or higher is used.
    Type: Grant
    Filed: July 27, 2001
    Date of Patent: October 12, 2004
    Assignee: Murata Manufacturing Co. Ltd
    Inventor: Yutaka Takeshima
  • Publication number: 20040191405
    Abstract: A method of coating a stent using a pressure mandrel is provided.
    Type: Application
    Filed: April 2, 2004
    Publication date: September 30, 2004
    Inventor: Cameron Kerrigan
  • Patent number: 6797311
    Abstract: A process for impregnating a porous material with a cross-linkable composition is disclosed. The degree of impregnation and placement of the cross-linkable composition within the pores of the porous material can be controlled very precisely through the use of a pressure differential. The pressure differential is effected through a nonreactive gas, a vacuum, or a combination thereof. Medical devices produced using such a method are also disclosed.
    Type: Grant
    Filed: February 6, 2003
    Date of Patent: September 28, 2004
    Assignee: SciMed Life Systems, Inc.
    Inventors: Gary L. Loomis, Bruce Parsons
  • Patent number: 6797334
    Abstract: In order to deopsit a high-grade and extra-thin film without causing damage to the substrate at a relatively low temperature, the present invention provides a method for forming a cluster which is a lumpy group of atoms or molecules of a reactive substance at the room temperature under the atmospheric pressure, irradiating electrons onto clusters, irradiating the resulting cluster ions onto a substrate surface by accelerating by an acceleration voltage, and at the same time or alternately, irradiating one or more component gases of the deposit film onto the substrate surface, thereby depositing a thin film on the substrate surface through reaction.
    Type: Grant
    Filed: August 27, 2003
    Date of Patent: September 28, 2004
    Assignees: Research Development Corporation of Japan, Sanyo Electric Co., Ltd.
    Inventors: Makoto Akizuki, Mitsuaki Harada, Satoru Ogasawara, Atsumasa Doi, Isao Yamada, Jiro Matsuo
  • Patent number: 6797340
    Abstract: A method for forming a tungsten layer on a substrate surface is provided. In one aspect, the method includes positioning the substrate surface in a processing chamber and exposing the substrate surface to a boride. A nucleation layer is then deposited on the substrate surface in the same processing chamber by alternately pulsing a tungsten-containing compound and a reducing gas selected from a group consisting of silane (SiH4), disilane (Si2H6), dichlorosilane (SiCl2H2), derivatives thereof, and combinations thereof. A tungsten bulk fill may then be deposited on the nucleation layer using cyclical deposition, chemical vapor deposition, or physical vapor deposition techniques.
    Type: Grant
    Filed: October 10, 2002
    Date of Patent: September 28, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Hongbin Fang, Hyung-Suk A. Yoon, Ken Kaung Lai, Chi Chung Young, James Horng, Ming XI, Michael X. Yang, Hua Chung
  • Patent number: 6798963
    Abstract: An improved method for providing high-quality optical fiber metallization with the required length at the required location. The method enables metallized optical fibers to be soldered and connected to mechanical components while reducing the level of stress in the metal coatings and providing strong adhesion, good conductivity and connectivity. The advantage of the method is a combination of vacuum evaporation and electroless deposition for the optical fiber metallization. A strong adhesion of the metal layer is achieved by the use of an evaporated thin metal layer, comprising an adhesion layer and a seed layer. The stress reduction is achieved due to electroless deposition, which is adequately thick for subsequent soldering/welding or other applications. The method comprises preparation for evaporation, preparation of optical fibers, evaporation of the thin metal adhesion and seed layer on the optical fiber, electroless deposition of an adequately thick metal layer, and acceptance testing.
    Type: Grant
    Filed: May 3, 2002
    Date of Patent: September 28, 2004
    Assignee: Bluebird Optical Mems Ltd.
    Inventors: Yael Nemirovsky, Elena Sidorov, Victor Sidorov
  • Patent number: 6787180
    Abstract: A method of applying a layer of a flowable material to a substrate. The substrate is received with a rotatable chuck, and an amount of the flowable material is dispensed on to the substrate. The substrate is spun on the rotatable chuck, thereby spreading the flowable material across the substrate and conveying a surplus amount of the flowable material away from the substrate. An exhaust stream is created with a vacuum source. At least a portion of the surplus amount of the flowable material conveyed away from the substrate is entrained into the exhaust stream, which exhaust stream is conveyed into an exhaust system. A pressure drop is created in the exhaust stream across a vane anemometer within the exhaust system. The blow back of the entrained portion of the surplus amount of the flowable material from a downstream position in the exhaust system to the substrate is thereby reduced.
    Type: Grant
    Filed: July 17, 2002
    Date of Patent: September 7, 2004
    Assignee: LSI Logic Corporation
    Inventors: Richard C. Gimmi, James E. Cossitt
  • Patent number: 6783797
    Abstract: Device for filling multiple blind holes. The invention involves a device that permits the filling of blind holes in an effective and controlled manner. It is composed of a mobile body (1) in airtight contact with the surface (10) containing the hole openings. The body (1) contains two slots, the first (2) of which is kept airtight from the exterior of the device and from the second slot (5), is separate and parallel to the direction of travel of the device, and is larger than the largest opening. The first slot exposed to the openings while moving is connected to a vacuum chamber (3), while the second slot exposed to the openings is connected to a reservoir (6) containing the product (7) to be transferred.
    Type: Grant
    Filed: July 1, 2002
    Date of Patent: August 31, 2004
    Assignee: Societe Novatec S.A.
    Inventors: Francis Bourrieres, Clement Kaiser
  • Patent number: 6783598
    Abstract: A method of applying a moisture barrier seal to a fiber optic coil includes mounting a fiber optic coil in a vacuum deposition chamber, so as to expose a large exterior surface area of the fiber optic coil to an interior portion of the deposition chamber. The method further includes reducing the air pressure within the chamber to a value that is less than ambient pressure outside of the chamber. The method further includes introducing a vapor form of a non-porous material, preferably parylene, into the chamber. The vapor form of the non-porous material changes into a solid state upon contact with the fiber optic coil, so as to form a conformal coat on the fiber optic coil.
    Type: Grant
    Filed: August 15, 2002
    Date of Patent: August 31, 2004
    Assignee: Fibersense Technology Corp.
    Inventor: Peter Gregory
  • Patent number: 6777028
    Abstract: A cleaned, sterile ceramic, metallic or polymeric substrate surface is vapor-deposited under sterile conditions with silica, is wetted on top of this with a saline coupling agent under sterile conditions, and is provided on top of the latter with a preserving protective layer which is sterile and/or can be sterilized after polymerization and constitutes the activatable first component of a multi-component adhesive which at the time of use is formed by addition of at least one further adhesive component. A workpiece which has been partially or completely coated in this way can be connected with good adhesion to a polymer, even after several months of sterile storage and transportation, by means of the activation of the protective layer with a monomer.
    Type: Grant
    Filed: June 14, 2002
    Date of Patent: August 17, 2004
    Inventors: Rudolf Marx, Horst Fischer
  • Publication number: 20040146642
    Abstract: A process for making functional or decorative flakes or platelets economically and at high production rates comprises applying a multi-layer sandwich of vapor deposited metal and release coats in alternating layers to a rotating chilled drum or suitable carrier medium contained in a vapor deposition chamber. The alternating metallized layers are applied by vapor deposition and the intervening release layers are preferably solvent soluble thermoplastic polymeric materials applied by vapor deposition sources contained in the vapor deposition chamber. The multi-layer sandwich built up in the vacuum chamber is removed from the drum or carrier and treated with a suitable organic solvent to dissolve the release coating from the metal in a stripping process that leaves the metal flakes essentially release coat free.
    Type: Application
    Filed: January 16, 2004
    Publication date: July 29, 2004
    Applicant: Avery Dennison Corporation
    Inventors: Karl Josephy, James P. Rettker, Howard H. Enlow
  • Publication number: 20040131781
    Abstract: The coating apparatus and method enable the coating liquid having been scraped-off to be reused without doing any one of the fluid adjusting treatment and the filtering treatment, while maintaining the features of the scraping-off type of extrusion coater, which is suitable for obtaining a uniform and extremely thin coating film. The coating head is provided with two slits: a coating slit and a recovering slit, and the excessive coating liquid having been discharged through the coating slit and applied to the web is scraped-off and recovered through the recovering slit.
    Type: Application
    Filed: December 11, 2003
    Publication date: July 8, 2004
    Applicant: FUJI PHOTO FILM CO., LTD.
    Inventors: Toshihiro Mandai, Mikio Tomaru, Norio Shibata
  • Publication number: 20040131760
    Abstract: A battery-operated device provided on a thin-film battery and a method for making. Some embodiments provide a system that includes a vacuum chamber, a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel that supplies a first strip of substrate material and a first take-up reel, and a second source reel that supplies onto a second strip of substrate running between the second source reel and a second take-up reel; and a controller operatively coupled to run the first strip of substrate between the first source reel and the first take-up reel at a first independent rate and tension, and to run the second strip of substrate between the second source reel and the second take-up reel at a second independent rate and tension. Some embodiments further include a roll-to-roll mask that has a plurality of different mask patterns that are moved into place as needed.
    Type: Application
    Filed: January 2, 2003
    Publication date: July 8, 2004
    Inventor: Stuart Shakespeare
  • Patent number: 6759085
    Abstract: A cold spraying process for forming a coating of powder particles sprayed in a gas substantially at ambient temperature onto a workpiece is improved by placement in a low ambient pressure environment in which the pressure is substantially less than atmospheric pressure. The low pressure environment acts to substantially accelerate the sprayed powder particles, thereby forming an improved coating of the particles on the workpiece. The low ambient pressure environment is provided by a vacuum tank coupled to a vacuum pump and having both the workpiece and a cold spray gun located therein. The cold spray gun is coupled to a source of pressurized inert gas as well as to a feeder for providing a flow of the powder to be sprayed. A gas compressor downstream of the vacuum pump compresses gas from the vacuum tank for recycling to the source of pressurized gas.
    Type: Grant
    Filed: June 17, 2002
    Date of Patent: July 6, 2004
    Assignee: Sulzer Metco (US) Inc.
    Inventor: Erich Muehlberger
  • Patent number: 6759081
    Abstract: A structure and method of fabricating a magnetic read head, comprises forming a fill layer for a magnetic read head gap using atomic layer deposition (ALD). The fill layer comprises an insulator, preferably aluminum oxide, aluminum nitride, mixtures thereof and layered structures thereof. Materials having higher thermal conductivity than aluminum oxide, such as berylium oxide and boron nitride, can also be employed in layers within an aluminum oxide structure. The thickness of the ALD-formed head gap fill layer is between approximately 5 nm and 100 nm, preferably between approximately 10 nm and 40 nm.
    Type: Grant
    Filed: April 30, 2002
    Date of Patent: July 6, 2004
    Assignee: ASM International, N.V.
    Inventors: Juha Huganen, Tapio Kanniainen
  • Publication number: 20040126495
    Abstract: A pneumatic handling and recoating apparatus for handling workpieces, such as glass, is provided. The apparatus utilizes a holding device operatively connected to a vacuum assembly. The holding device engages workpieces by vacuum and subsequently releases them by a burst of gas. The burst of gas also facilitates the application of a coating material, such as a stain-retardant agent, to a workpiece upon release from the holding device.
    Type: Application
    Filed: December 30, 2002
    Publication date: July 1, 2004
    Inventors: Klaus Hartig, David Stebbins
  • Patent number: 6756085
    Abstract: Low dielectric constant materials with improved elastic modulus and material hardness. The process of making such materials involves providing a dielectric material and ultraviolet (UV) curing the material to produce a UV cured dielectric material. UV curing yields a material with improved modulus and material hardness. The improvement is each typically greater than or about 50%. The UV cured dielectric material can optionally be post-UV treated. The post-UV treatment reduces the dielectric constant of the material while maintaining an improved elastic modulus and material hardness as compared to the UV cured dielectric material. UV cured dielectrics can additionally exhibit a lower total thermal budget for curing than for furnace curing processes.
    Type: Grant
    Filed: July 21, 2003
    Date of Patent: June 29, 2004
    Assignee: Axcelis Technologies, Inc.
    Inventors: Carlo Waldfried, Qingyuan Han, Orlando Escorcia, Ivan L. Berry, III
  • Patent number: 6749906
    Abstract: A thermal physical vapor deposition apparatus includes an elongated vapor distributor disposed in a chamber held at reduced pressure, and spaced from a structure which is to receive an organic layer in forming part of an OLED. One or more detachable organic material vapor sources are disposed outside of the chamber, and a vapor transport device including a valve sealingly connects each attached vapor source to the vapor distributor. During vapor deposition of the organic layer, the structure is moved with respect to the vapor distributor to provide an organic layer of improved uniformity on the structure.
    Type: Grant
    Filed: April 25, 2002
    Date of Patent: June 15, 2004
    Assignee: Eastman Kodak Company
    Inventor: Steven A. Van Slyke
  • Publication number: 20040109938
    Abstract: A material deposition sensor includes a heater and a temperature sensor separated from one another. In operation, the sensor is disposed within a deposition chamber, and material is deposited onto the sensor. When a particular material thickness is deposited, a direct thermally conductive path is created between the heater and temperature sensor, and heat from the heater conducts directly to the temperature sensor. By predetermining a deposition thickness necessary to create the direct thermally conductive path, the deposition thickness can be controlled and/or predicted.
    Type: Application
    Filed: December 4, 2002
    Publication date: June 10, 2004
    Applicant: The Board of Trustees of the University of Illinois
    Inventor: Chang Liu
  • Patent number: 6746716
    Abstract: The invention provides a process for coating a cylindrical carrier structure with a predetermined amount (target take-up) of a coating suspension, wherein the carrier structure has a cylinder axis, two end faces, an encasing face and an axial length L and a large number of channels running from the first end face to the second end face. The process comprises: a) vertically aligning the cylinder axis of the carrier structure and filling the empty volume of the channels up to a predetermined height H1 starting from the lower end face, b) removing the excess coating suspension through the lower end face of the carrier structure down to the target take-up, c) turning the carrier structure 180°, so that the upper and lower end faces are exchanged one for the other, and d) repeating steps a) and b), wherein the height H2, up to which the channels are filled in this case is given by H2=L−x·H1 where x is between 0.8 and 1.0.
    Type: Grant
    Filed: June 27, 2002
    Date of Patent: June 8, 2004
    Assignee: OMG AG & Co KG
    Inventors: Ralph Kiessling, Michael Harris, Dieter Detterbeck, Josef Piroth
  • Publication number: 20040105938
    Abstract: Disclosed is an accelerated petrifaction process of lignocellulose materials, including the step of impregnating with an aqueous solution an alkaline hydroxide and a soluble silicate, under pH conditions that permits its partial neutralization and insolubilization of the salts in situ in the interior of the lignocellulose material by the action of acid groups present in the lignocellulose material and the acidic action of carbon dioxide present in the surrounding air.
    Type: Application
    Filed: November 18, 2003
    Publication date: June 3, 2004
    Applicants: Universidad de Conception, Burkkhard Seeger Stein, Aserraderos Quelen Quelen S.A., Maderas Impregnadas Preserva Ltd., Barraca y Fabrica de Muebles, Puertas y Ventanas Silvia Ugarte
    Inventor: Julio Burkhard Seeger Stein