Vacuum Utilized Prior To Or During Coating Patents (Class 427/294)
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Patent number: 6953618Abstract: Composite film structures exhibit a predetermined finished color tone comprised of a transparent film layer which exhibits a color deficiency as compared to the finished color tone, and a pigment which is visually associated with, and satisfies the color deficiency of, the film layer. Most preferably, the pigment is provided as a homogenous dispersion in a transparent color-matching layer positioned adjacent to the film layer. Thus, when the film and color-matching layers are viewed collectively as a unit, the perceived color tone will be that of the finished predetermined color tone. That is, the color-matching layer provides visually an additive effect on the perceived color of the composite film structure.Type: GrantFiled: July 23, 2003Date of Patent: October 11, 2005Assignee: CPFilms, Inc.Inventors: James P. Enniss, Steven A. Barth, Mary E. Lawless, Anthony B. Port, Elizabeth J. Packer
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Patent number: 6933015Abstract: A method of forming a film of a coating solution on a substrate includes steps of moving a coating solution discharge member relative to a substrate while a coating solution is being discharged from the coating solution discharge member to the surface of the substrate, and changing a discharge direction of the coating solution to an outer peripheral portion of the substrate to make the amount of application to the outer peripheral portion smaller than that to other portions. This can reduce the amount of application to the outer peripheral portion of the substrate, thereby making it possible to restrain protuberance of the coating solution at the outer peripheral portion of the substrate caused by surface tension. Consequently, a coating film which is uniform also at the outer peripheral portion on the substrate is formed.Type: GrantFiled: February 11, 2003Date of Patent: August 23, 2005Assignee: Tokyo Electron LimitedInventors: Takahiro Kitano, Shinji Kobayashi, Yukihiko Esaki, Masateru Morikawa
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Patent number: 6933009Abstract: In a thin-film deposition method, a substrate is placed in a heat chamber having a pressure equal to or higher than an atmospheric pressure, and the substrate is heated in the heat chamber by supplying gas having a temperature higher than a room temperature by forced convection. The heated substrate is transferred from the heat chamber into a deposition chamber which is a vacuum chamber connected to the heat chamber directly or indirectly with a valve interposed therebetween. Then, a thin-film deposition is carried out on the substrate in the deposition chamber at a deposition temperature higher than the room temperature.Type: GrantFiled: May 5, 2003Date of Patent: August 23, 2005Assignee: Ishikawajima-Harima Heavy Industies Co., Ltd.Inventors: Masashi Ueda, Tomoko Takagi
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Patent number: 6897086Abstract: A CMOS image sensor for improving a characteristic of transmittance therein is provided by forming a convex-shaped color filter pattern that acts as a micro-lens. The CMOS image sensor includes a semiconductor structure having a photodiode and a peripheral circuit, an insulating layer that is formed on the semiconductor structure and that has a trench, and a convex-shaped color filter pattern formed on the insulating layer and covering the trench.Type: GrantFiled: October 17, 2003Date of Patent: May 24, 2005Assignee: Hyundai Electronics IndustriesInventor: Chae-Sung Kim
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Patent number: 6896929Abstract: Provided herein is a method of improving the planarity of a support plate of a susceptor for use during deposition of a film of material onto a substrate comprising the steps of reducing pressure in a hollow core of a shaft to a level below atmospheric pressure; and reducing a pressure in the deposition chamber to a level required for the deposition of the film of material onto the substrate, where the pressure in the hollow core of the shaft acts upon a lower surface of the support plate connected to the shaft and interfacing with the hollow core of the shaft and the pressure in the deposition chamber acts upon an upper surface of the support plate adapted to support the substrate thereby improving planarity. Also provided are a susceptor and a method of depositing a film onto a substrate affixed to the susceptor of the present invention.Type: GrantFiled: August 3, 2001Date of Patent: May 24, 2005Assignee: Applied Materials, Inc.Inventors: Sanjay Yadav, Quanyuan Shang, Ernst Keller, Wei Chang
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Patent number: 6890588Abstract: A rotatable vacuum chamber receives an optical connector having an output face on which an optical gel is applied substantially without entrapped air. Opposite the output face is placed a gel dispenser with its opened nozzle pointing towards the output face. Uncured gel components contained in the dispenser are outgased prior to application of the gel on the output face while a vacuum is maintained in the chamber. Outgasing takes place at a first chamber orientation with the nozzle pointing upwards through which the outgasing air ventilates. The gel is applied at a second chamber orientation where the output face is horizontal and upwards pointing. Immediately following the gel application, the vacuum is unmade to prevent cooking of the mixed and uncured gel. A glass plate is then pressed against the applied fluid gel.Type: GrantFiled: September 5, 2002Date of Patent: May 10, 2005Assignee: Intel CorporationInventor: Janusz Liberkowski
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Patent number: 6884464Abstract: A silicon comprising film and its method of fabrication is described. The silicon comprising film is grown on a substrate. A hexachlorodisilane (HCD) source gas is one of the reactant species used to form the silicon comprising film. The silicon comprising film is formed under a pressure between 10 Torr and 350 Torr.Type: GrantFiled: November 4, 2002Date of Patent: April 26, 2005Assignee: Applied Materials, Inc.Inventors: Lee Luo, R. Suryanarayanan Iyer, Janardhanan Anand Subramony, Errol Antonio C. Sanchez, Xiaoliang Jin, Aihua Chen, Chang-Lian Yan, Nobuo Tokai, Yuji Maeda, Randhir P. Singh Thakur
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Patent number: 6884911Abstract: A method for repeatedly converting a solvent from a state of solvent to a state of antisolvent with relatively little loss of solvent. The method is used to allow for processing of large amounts of solute material with minimum amounts of solvent.Type: GrantFiled: January 30, 2001Date of Patent: April 26, 2005Assignee: Boehringer Ingelheim Pharmaceuticals, Inc.Inventors: Said Saim, Stephen Horhota, David Joseph Bochniak
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Patent number: 6881264Abstract: A process tool, preferably a spin coater, includes a set of at least three arms and an adjustable rinse nozzle. The arms lift a substrate, e.g. a semiconductor wafer, from a chuck inside the process chamber after having performed the corresponding manufacturing step, e.g. coating. The contact area between the arms and the substrate is as small as possible. The rinse nozzle dispenses a solvent liquid onto the backside of the substrate, thereby removing contaminating particles located at the area of contact between the vacuum channels of the chuck and the substrate. The set of arms rotates for a homogeneous cleaning. A gas flowing out of vacuum ports of the chuck prevents the vacuum ports from being obstructed with particles. While the substrate is being lifted, the chuck can also be cleaned by dispensing the solvent liquid onto the chuck.Type: GrantFiled: August 19, 2003Date of Patent: April 19, 2005Assignees: Infineon Technologies AG, Infineon Technologies SC300 GmbH, Motorola Inc.Inventors: Mark Hiatt, Karl Mautz, Ralf Schuster
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Patent number: 6881446Abstract: A method for production of endless plastic hollow profiles, in particular tubes, comprises several production stages for the plastic tube and a coating stage for a metal coating. A reduced pressure is provided in the coating stage, whereby the metal is transferred into the gas phase and deposited on the tube as a surface layer homogeneously bonded thereto.Type: GrantFiled: March 20, 2002Date of Patent: April 19, 2005Assignee: Ivt Installations - und Verbindungstechnik GmbH & CO KGInventor: Christoph Hennig
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Patent number: 6863851Abstract: A process for making functional or decorative flakes or platelets economically and at high production rates comprises applying a multi-layer sandwich of vapor deposited metal and release coats in alternating layers to a rotating chilled drum or suitable carrier medium contained in a vapor deposition chamber. The alternating metallized layers are applied by vapor deposition and the intervening release layers are preferably solvent soluble thermoplastic polymeric materials applied by vapor deposition sources contained in the vapor deposition chamber. The multi-layer sandwich built up in the vacuum chamber is removed from the drum or carrier and treated with a suitable organic solvent to dissolve the release coating from the metal in a stripping process that leaves the metal flakes essentially release coat free.Type: GrantFiled: May 4, 2001Date of Patent: March 8, 2005Assignee: Avery Dennison CorporationInventors: Karl Josephy, James P. Rettker, Howard H. Enlow
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Patent number: 6858254Abstract: A getter device is shaped like a substrate used in a deposition process. Embodiments of the device include a powdered getter material coated onto one or both sides of a support with a narrow rim portion left uncoated so that the device can be manipulated by automatic handling equipment. A method for using the getter device includes providing a vacuum chamber and automatic handling equipment, loading the device into the chamber, reducing the chamber pressure to a desired value by using the getter device in conjunction with an external pump, removing the getter device and replacing it with a substrate, and depositing a thin film on the substrate. The getter device can be in an activated state when loaded into the chamber, or it can be activated after being loaded by employing heating equipment ordinarily used to heat substrates placed in the chamber. The getter material of the device may also be activated in a separate activation chamber before the getter device is loaded into the vacuum chamber.Type: GrantFiled: April 23, 2003Date of Patent: February 22, 2005Assignee: SAES Getters S.p.A.Inventors: Andrea Conte, Francesco Mazza, Marco Moraja
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Patent number: 6852196Abstract: A method for applying a foam to a paper web is provided. Specifically, a foam is first formed from a liquid-based composition and a gas, such as air. Once formed, the foam is applied by a foam applicator to the web. In one embodiment, for example, the foam applicator applies the foam without substantially contacting the web. When applied with the foam, the web typically has a solids consistency less than about 95% by weight of the web. In some embodiments, one or more vacuum slots can be utilized in conjunction with the foam applicator to facilitate uniform application of the foam to the paper web.Type: GrantFiled: November 8, 2001Date of Patent: February 8, 2005Assignee: Kimberly-Clark Worldwide, Inc.Inventor: Joseph G. Capizzi
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Patent number: 6852423Abstract: In paper coating slips containing, as a binder, a copolymer which is obtainable by free radical polymerization of ethylenically unsaturated compounds, at least one of the ethylenically unsaturated compounds is a polymer having at least one copolymerizable ethylenically unsaturated group, a number average molecular weight of from 500 to 50000 g/mol and at least one carboxyl group (referred to below as ethylenically unsaturated polymer for short).Type: GrantFiled: March 27, 2001Date of Patent: February 8, 2005Assignee: BASF AktiengesellschaftInventors: Volker Schädler, David Christie, Roland Ettl
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Patent number: 6846515Abstract: A method for providing a porous organosilica glass (OSG) film that consists of a single phase of a material represented by the formula SivOwCxHyFz, v+w+x+y+z=100%, v is from 10 to 35 atomic %, w is from 10 to 65 atomic %, x is from 5 to 30 atomic %, y is from 10 to 50 atomic % and z is from 0 to 15 atomic %, wherein the film has pores and a dielectric constant less than 2.6 is disclosed herein. In one aspect of the present invention, the film is provided by a chemical vapor deposition method in which a preliminary film is deposited from organosilane and/or organosiloxane precursors and pore-forming agents (porogens), which can be independent of, or alternatively bonded to, the precursors. The porogens are subsequently removed to provide the porous film. In another aspect of the present invention, porogenated precursors are used for providing the film.Type: GrantFiled: May 17, 2002Date of Patent: January 25, 2005Assignee: Air Products and Chemicals, Inc.Inventors: Raymond Nicholas Vrtis, Mark Leonard O'Neill, Jean Louise Vincent, Aaron Scott Lukas, Manchao Xiao, John Anthony Thomas Norman
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Patent number: 6835416Abstract: An apparatus for growing thin films by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The apparatus comprises a reaction chamber including a reaction space, infeed means connected to the reaction space for feeding into the reaction space the reactants, and outfeed means connected to the reaction space for discharging waste gases. At least one substrate is adapted into the reaction space and a second surface is also adapted into the reaction space in a disposition opposed to the surface of the substrate. The thin-film growth supporting surface of the substrate and the other surface disposed opposing the same are arranged in the reaction chamber so as to subtend an angle opening in the flow direction of the reactants in relation to the opposed surfaces. The distance between the opposed surfaces at the infeed end of reactants is smaller than at the gas outfeed end.Type: GrantFiled: February 13, 2003Date of Patent: December 28, 2004Assignee: ASM International N.V.Inventor: Vaino Kilpi
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Publication number: 20040258846Abstract: Apparatus and method for treating by injecting a fluid treatment material into porous structures such as those formed from concrete, brick, stone, marble, and wood. The apparatus includes an applicator head having an inner chamber and an outer chamber surrounding the inner chamber both of which chambers are connected with a vacuum source. The inner chamber is also connected with a source of pressurized liquid treatment material. The method is for treating such porous structures and includes the steps of engaging the structures with the applicator head, drawing a vacuum on at least the outer chamber to secure the applicator head to the structure, and supplying the pressurized liquid treatment material to the inner chamber to impregnate the structure to be treated.Type: ApplicationFiled: June 20, 2003Publication date: December 23, 2004Inventors: Gerard J. Vaerewyck, Edward A. Vitunac, Anthony F. Fiasco
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Publication number: 20040258834Abstract: Methods and devices are provided to actively apply finish to one or more yarns in motion at speeds greater than about 3000 m/min, to achieve a finish application of 0.2 wt. % or more, and with a coefficient of variation of finish concentration of 10% or less. The devices are compact, portable and readily installed at a variety of positions on a fiber processing line. The devices of the invention contain the finish so that contamination of the surrounding areas is prevented.Type: ApplicationFiled: July 8, 2004Publication date: December 23, 2004Applicant: Honeywell International Inc.Inventors: Thomas Yui-Tai Tam, Jeffrey T. Perkins, Qiang Zhou, Arlin L. Fynaardt
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Patent number: 6833159Abstract: A method provides high-vacuum vapor coating methods, with the methods producing novel coating compositions with surprisingly increased performance levels over coatings produced from the same materials under different processing conditions. Compounds of the general formulae II, III and IV, defined herein, can be applied by vapor deposition from a merely compacted, rather than fused or sintered porous matrix source with improved performance, even where the same chemicals are used in the coating, at the same coating temperatures. The generally useful materials include silanes and siloxanes, and siloxazanes of formulae I, II, III and IV.Type: GrantFiled: May 2, 2000Date of Patent: December 21, 2004Assignee: Vision-Ease Lens, Inc.Inventors: Michael S. Boulineau, Thomas J. Moravec
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Patent number: 6824826Abstract: Use of photocatalytic preparations of colloidal titanium dioxide optionally doped with a metal chosen from groups I-VA, and the lanthanide and actinide series of the periodic table, for preserving the original appearance of cementitious, stone, and marble products.Type: GrantFiled: April 11, 2002Date of Patent: November 30, 2004Assignee: Italcementi S.p.A.Inventors: Rossano Amadelli, Luigi Cassar, Carmine Pepe
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Publication number: 20040234692Abstract: A method is described for vacuum impregnation of particulate material in an impregnation installation (16, 16′) which has an impregnation chamber (54, 84) that can be placed under vacuum, an inlet orifice (64, 64′) for transferring the material into the impregnation chamber (54, 84) and an outlet orifice (82, 82′) for transferring the material out of the impregnation installation (16, 16′), with the following method stepsType: ApplicationFiled: February 9, 2004Publication date: November 25, 2004Inventor: Herbert Georg Nopper
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Publication number: 20040228970Abstract: Fluid discharge device and method for intermittently discharging and feeding fluid in a constant amount with high speed and high precision, the fluid exemplified by various kinds of liquids such as adhesives, solder paste, fluorescent materials, electrode materials, greases, paints, hot melts, chemicals, foods and the like in production processes in the fields of electronic components, household electrical appliances, displays, and the like. By providing a fluid supply device for supplying the fluid to two surfaces that are moved relative to each other along a direction of a gap, a continuous flow supplied from the fluid supply device is converted into an intermittent flow by utilizing a pressure change due to a change in the gap of the relatively moving surfaces, while the intermittent discharge amount per dot is controlled by the rotational speed of the fluid supply device.Type: ApplicationFiled: February 12, 2004Publication date: November 18, 2004Inventors: Teruo Maruyama, Takashi Inoue, Ryoji Hyuga
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Patent number: 6818257Abstract: Systems to achieve both more uniform and particle free DLC deposition is disclosed which automatically cycles between modes to effect automatic removal of carbon-based buildups or which provides barriers to achieve proper gas flow involves differing circuitry and design parameter options. One ion source may be used in two different modes whether for DLC deposition or not through automatic control of gas flow types and rates and through the control of the power applied to achieve maximum throughput or other desired processing goals. Arcing can be controlled and even permitted to optimize the overall results achieved.Type: GrantFiled: September 17, 2002Date of Patent: November 16, 2004Assignee: Advanced Energy Industries, Inc.Inventors: Michael S. Amann, Michael Kishinevsky, Andrew Shabalin, Colin Quinn
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Publication number: 20040213891Abstract: This invention is a method of forming a nitride layer on at least one metal or metal alloy biomedical device, comprising: providing a vacuum chamber with at least one biomedical device positioned thereon on a worktable within the vacuum chamber; reducing the pressure in the vacuum chamber; introducing nitrogen into the vacuum chamber so that the pressure in the vacuum chamber is about 0.01 to about 10 milli-Torr; generating electrons within the vacuum chamber to form positively charged nitrogen ions; providing a negative bias to the worktable so that the positively charged nitrogen ions contact the biomedical devices under conditions such that a nitride layer forms on the at least one prosthetic device.Type: ApplicationFiled: March 26, 2004Publication date: October 28, 2004Inventors: Ronghua Wei, Thomas L. Booker, Christopher Rincon, James H. Arps
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Patent number: 6808741Abstract: An apparatus for performing simultaneous pass-by vapor deposition of a uniform thickness thin film of a lubricant on at least one surface of each of a plurality of substrates, comprising: (a) chamber means having an interior space adapted to be maintained at a reduced pressure below atmospheric pressure, including entrance and exit means at opposite ends thereof; (b) at least one linearly extending vapor source means for supplying the interior space of the chamber with at least one linearly extending stream of lubricant vapor; (c) a substrate/workpiece mounting/supporting means adapted for supporting thereon a plurality of substrates/workpieces; and (d) a transporter/conveyor means for continuously moving the substrate/workpiece mounting/supporting means transversely past the at least one linearly extending stream of lubricant vapor for depositing a uniform thickness thin film of lubricant on the surfaces of each of a plurality of substrates/workpieces carried by the substrate/workpiece mounting/supportinType: GrantFiled: February 21, 2002Date of Patent: October 26, 2004Assignee: Seagate Technology LLCInventor: Paul Stephen McLeod
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Patent number: 6808605Abstract: A fabrication method of metallic nanowires includes the steps of: forming a layer of autocatalytic metal with a thickness of 30 nm-1000 nm on the surface of a substrate; and forming nanowires on the front surface of the layer of autocatalytic metal, wherein the substrate is put into an evaporator and the layer of autocatalytic metal is grown by autocatalytic reaction for 10˜5000 seconds. A large amount of nanowires can be grown on a substrate without a lithography process.Type: GrantFiled: October 7, 2002Date of Patent: October 26, 2004Assignee: Korea Institute of Science and TechnologyInventors: Yun-Hi Lee, Byeong-Kwon Ju, Yoon-Taek Jang, Chang-Hoon Choi
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Patent number: 6808744Abstract: A composite crucible for pulling up monocrystalline silicon, which is superior in shape stability and suitable for a large-sized one is provided. The composite crucible is characterized in that a carbonaceous material as an outer layer and a quartz glass as an inner layer are integrally formed. Methods for preparing and regenerating a composite crucible are also disclosed.Type: GrantFiled: January 28, 2003Date of Patent: October 26, 2004Assignee: Mitsubishi Material Quartz CorporationInventors: Yoshiyuki Tsuji, Masanori Fukui, Ken-ichi Hiroshima
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Publication number: 20040208996Abstract: A process for rapidly infusing a synthetic resinous substrate with an alkali metal nitrite, comprises (a) essentially completely dissolving the alkali metal nitrite in supercritical carbon dioxide to form a solids-free solution having from about 1 to 15% by weight of the alkali metal nitrite; (b) contacting the synthetic resinous substrate with the solution for a time sufficient to transfer at least a portion of the alkali metal nitrite into the synthetic resinous substrate while maintaining the carbon dioxide under supercritical conditions; and, (c) decreasing pressure or temperature, or both, on the synthetic resinous material sufficiently to evolve carbon dioxide and leave micronized solid alkali metal nitrite crystals in an amount less than 2% by weight essentially uniformly distributed in the synthetic resinous substrate.Type: ApplicationFiled: May 13, 2004Publication date: October 21, 2004Inventors: Mehmet A. Gencer, Sunggyu Lee, Abhay Sardesai
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Patent number: 6805910Abstract: A process for applying a thermoplastic coating to a substrate wherein the gases and other volatiles in a boundary layer between the substrate and the coating are evacuated using a high volume, high velocity air stream which traverses the surface of the substrate to be coated (functioning as an air knife) such that, when the coating is applied, gases/volatiles do not disrupt the coating while:the coating cools and solidifies. The effect of the air knife may be enhanced by heating the substrate and/or by applying a solvent to the substrate. The air knife also cools down the boundary layer of the substrate so that, as the thermoplastic coating is applied, this cooled-down and gas-evacuated boundary layer provides a measure of insulation between the coating and any gases/volatiles which have not been evacuated from the substrate.Type: GrantFiled: August 30, 2002Date of Patent: October 19, 2004Assignee: Hunter Douglas, Inc.Inventor: Richard N. Anderson
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Patent number: 6803074Abstract: A metal compound solution in the atomized state is introduced directly into a film-forming chamber of which the pressure is maintained at about 100 Torr or lower by mean of a two-fluid nozzle to form a complex oxide thin-film. For use in the two-fluid nozzle, gases including an oxidative gas are used. To dissolve the metal compound, a solvent having a boiling point under ordinary pressure of about 100° C. or higher is used.Type: GrantFiled: July 27, 2001Date of Patent: October 12, 2004Assignee: Murata Manufacturing Co. LtdInventor: Yutaka Takeshima
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Publication number: 20040191405Abstract: A method of coating a stent using a pressure mandrel is provided.Type: ApplicationFiled: April 2, 2004Publication date: September 30, 2004Inventor: Cameron Kerrigan
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Patent number: 6797311Abstract: A process for impregnating a porous material with a cross-linkable composition is disclosed. The degree of impregnation and placement of the cross-linkable composition within the pores of the porous material can be controlled very precisely through the use of a pressure differential. The pressure differential is effected through a nonreactive gas, a vacuum, or a combination thereof. Medical devices produced using such a method are also disclosed.Type: GrantFiled: February 6, 2003Date of Patent: September 28, 2004Assignee: SciMed Life Systems, Inc.Inventors: Gary L. Loomis, Bruce Parsons
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Patent number: 6797334Abstract: In order to deopsit a high-grade and extra-thin film without causing damage to the substrate at a relatively low temperature, the present invention provides a method for forming a cluster which is a lumpy group of atoms or molecules of a reactive substance at the room temperature under the atmospheric pressure, irradiating electrons onto clusters, irradiating the resulting cluster ions onto a substrate surface by accelerating by an acceleration voltage, and at the same time or alternately, irradiating one or more component gases of the deposit film onto the substrate surface, thereby depositing a thin film on the substrate surface through reaction.Type: GrantFiled: August 27, 2003Date of Patent: September 28, 2004Assignees: Research Development Corporation of Japan, Sanyo Electric Co., Ltd.Inventors: Makoto Akizuki, Mitsuaki Harada, Satoru Ogasawara, Atsumasa Doi, Isao Yamada, Jiro Matsuo
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Patent number: 6797340Abstract: A method for forming a tungsten layer on a substrate surface is provided. In one aspect, the method includes positioning the substrate surface in a processing chamber and exposing the substrate surface to a boride. A nucleation layer is then deposited on the substrate surface in the same processing chamber by alternately pulsing a tungsten-containing compound and a reducing gas selected from a group consisting of silane (SiH4), disilane (Si2H6), dichlorosilane (SiCl2H2), derivatives thereof, and combinations thereof. A tungsten bulk fill may then be deposited on the nucleation layer using cyclical deposition, chemical vapor deposition, or physical vapor deposition techniques.Type: GrantFiled: October 10, 2002Date of Patent: September 28, 2004Assignee: Applied Materials, Inc.Inventors: Hongbin Fang, Hyung-Suk A. Yoon, Ken Kaung Lai, Chi Chung Young, James Horng, Ming XI, Michael X. Yang, Hua Chung
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Patent number: 6798963Abstract: An improved method for providing high-quality optical fiber metallization with the required length at the required location. The method enables metallized optical fibers to be soldered and connected to mechanical components while reducing the level of stress in the metal coatings and providing strong adhesion, good conductivity and connectivity. The advantage of the method is a combination of vacuum evaporation and electroless deposition for the optical fiber metallization. A strong adhesion of the metal layer is achieved by the use of an evaporated thin metal layer, comprising an adhesion layer and a seed layer. The stress reduction is achieved due to electroless deposition, which is adequately thick for subsequent soldering/welding or other applications. The method comprises preparation for evaporation, preparation of optical fibers, evaporation of the thin metal adhesion and seed layer on the optical fiber, electroless deposition of an adequately thick metal layer, and acceptance testing.Type: GrantFiled: May 3, 2002Date of Patent: September 28, 2004Assignee: Bluebird Optical Mems Ltd.Inventors: Yael Nemirovsky, Elena Sidorov, Victor Sidorov
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Patent number: 6787180Abstract: A method of applying a layer of a flowable material to a substrate. The substrate is received with a rotatable chuck, and an amount of the flowable material is dispensed on to the substrate. The substrate is spun on the rotatable chuck, thereby spreading the flowable material across the substrate and conveying a surplus amount of the flowable material away from the substrate. An exhaust stream is created with a vacuum source. At least a portion of the surplus amount of the flowable material conveyed away from the substrate is entrained into the exhaust stream, which exhaust stream is conveyed into an exhaust system. A pressure drop is created in the exhaust stream across a vane anemometer within the exhaust system. The blow back of the entrained portion of the surplus amount of the flowable material from a downstream position in the exhaust system to the substrate is thereby reduced.Type: GrantFiled: July 17, 2002Date of Patent: September 7, 2004Assignee: LSI Logic CorporationInventors: Richard C. Gimmi, James E. Cossitt
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Patent number: 6783797Abstract: Device for filling multiple blind holes. The invention involves a device that permits the filling of blind holes in an effective and controlled manner. It is composed of a mobile body (1) in airtight contact with the surface (10) containing the hole openings. The body (1) contains two slots, the first (2) of which is kept airtight from the exterior of the device and from the second slot (5), is separate and parallel to the direction of travel of the device, and is larger than the largest opening. The first slot exposed to the openings while moving is connected to a vacuum chamber (3), while the second slot exposed to the openings is connected to a reservoir (6) containing the product (7) to be transferred.Type: GrantFiled: July 1, 2002Date of Patent: August 31, 2004Assignee: Societe Novatec S.A.Inventors: Francis Bourrieres, Clement Kaiser
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Patent number: 6783598Abstract: A method of applying a moisture barrier seal to a fiber optic coil includes mounting a fiber optic coil in a vacuum deposition chamber, so as to expose a large exterior surface area of the fiber optic coil to an interior portion of the deposition chamber. The method further includes reducing the air pressure within the chamber to a value that is less than ambient pressure outside of the chamber. The method further includes introducing a vapor form of a non-porous material, preferably parylene, into the chamber. The vapor form of the non-porous material changes into a solid state upon contact with the fiber optic coil, so as to form a conformal coat on the fiber optic coil.Type: GrantFiled: August 15, 2002Date of Patent: August 31, 2004Assignee: Fibersense Technology Corp.Inventor: Peter Gregory
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Patent number: 6777028Abstract: A cleaned, sterile ceramic, metallic or polymeric substrate surface is vapor-deposited under sterile conditions with silica, is wetted on top of this with a saline coupling agent under sterile conditions, and is provided on top of the latter with a preserving protective layer which is sterile and/or can be sterilized after polymerization and constitutes the activatable first component of a multi-component adhesive which at the time of use is formed by addition of at least one further adhesive component. A workpiece which has been partially or completely coated in this way can be connected with good adhesion to a polymer, even after several months of sterile storage and transportation, by means of the activation of the protective layer with a monomer.Type: GrantFiled: June 14, 2002Date of Patent: August 17, 2004Inventors: Rudolf Marx, Horst Fischer
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Publication number: 20040146642Abstract: A process for making functional or decorative flakes or platelets economically and at high production rates comprises applying a multi-layer sandwich of vapor deposited metal and release coats in alternating layers to a rotating chilled drum or suitable carrier medium contained in a vapor deposition chamber. The alternating metallized layers are applied by vapor deposition and the intervening release layers are preferably solvent soluble thermoplastic polymeric materials applied by vapor deposition sources contained in the vapor deposition chamber. The multi-layer sandwich built up in the vacuum chamber is removed from the drum or carrier and treated with a suitable organic solvent to dissolve the release coating from the metal in a stripping process that leaves the metal flakes essentially release coat free.Type: ApplicationFiled: January 16, 2004Publication date: July 29, 2004Applicant: Avery Dennison CorporationInventors: Karl Josephy, James P. Rettker, Howard H. Enlow
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Publication number: 20040131781Abstract: The coating apparatus and method enable the coating liquid having been scraped-off to be reused without doing any one of the fluid adjusting treatment and the filtering treatment, while maintaining the features of the scraping-off type of extrusion coater, which is suitable for obtaining a uniform and extremely thin coating film. The coating head is provided with two slits: a coating slit and a recovering slit, and the excessive coating liquid having been discharged through the coating slit and applied to the web is scraped-off and recovered through the recovering slit.Type: ApplicationFiled: December 11, 2003Publication date: July 8, 2004Applicant: FUJI PHOTO FILM CO., LTD.Inventors: Toshihiro Mandai, Mikio Tomaru, Norio Shibata
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Publication number: 20040131760Abstract: A battery-operated device provided on a thin-film battery and a method for making. Some embodiments provide a system that includes a vacuum chamber, a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel that supplies a first strip of substrate material and a first take-up reel, and a second source reel that supplies onto a second strip of substrate running between the second source reel and a second take-up reel; and a controller operatively coupled to run the first strip of substrate between the first source reel and the first take-up reel at a first independent rate and tension, and to run the second strip of substrate between the second source reel and the second take-up reel at a second independent rate and tension. Some embodiments further include a roll-to-roll mask that has a plurality of different mask patterns that are moved into place as needed.Type: ApplicationFiled: January 2, 2003Publication date: July 8, 2004Inventor: Stuart Shakespeare
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Patent number: 6759085Abstract: A cold spraying process for forming a coating of powder particles sprayed in a gas substantially at ambient temperature onto a workpiece is improved by placement in a low ambient pressure environment in which the pressure is substantially less than atmospheric pressure. The low pressure environment acts to substantially accelerate the sprayed powder particles, thereby forming an improved coating of the particles on the workpiece. The low ambient pressure environment is provided by a vacuum tank coupled to a vacuum pump and having both the workpiece and a cold spray gun located therein. The cold spray gun is coupled to a source of pressurized inert gas as well as to a feeder for providing a flow of the powder to be sprayed. A gas compressor downstream of the vacuum pump compresses gas from the vacuum tank for recycling to the source of pressurized gas.Type: GrantFiled: June 17, 2002Date of Patent: July 6, 2004Assignee: Sulzer Metco (US) Inc.Inventor: Erich Muehlberger
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Patent number: 6759081Abstract: A structure and method of fabricating a magnetic read head, comprises forming a fill layer for a magnetic read head gap using atomic layer deposition (ALD). The fill layer comprises an insulator, preferably aluminum oxide, aluminum nitride, mixtures thereof and layered structures thereof. Materials having higher thermal conductivity than aluminum oxide, such as berylium oxide and boron nitride, can also be employed in layers within an aluminum oxide structure. The thickness of the ALD-formed head gap fill layer is between approximately 5 nm and 100 nm, preferably between approximately 10 nm and 40 nm.Type: GrantFiled: April 30, 2002Date of Patent: July 6, 2004Assignee: ASM International, N.V.Inventors: Juha Huganen, Tapio Kanniainen
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Publication number: 20040126495Abstract: A pneumatic handling and recoating apparatus for handling workpieces, such as glass, is provided. The apparatus utilizes a holding device operatively connected to a vacuum assembly. The holding device engages workpieces by vacuum and subsequently releases them by a burst of gas. The burst of gas also facilitates the application of a coating material, such as a stain-retardant agent, to a workpiece upon release from the holding device.Type: ApplicationFiled: December 30, 2002Publication date: July 1, 2004Inventors: Klaus Hartig, David Stebbins
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Patent number: 6756085Abstract: Low dielectric constant materials with improved elastic modulus and material hardness. The process of making such materials involves providing a dielectric material and ultraviolet (UV) curing the material to produce a UV cured dielectric material. UV curing yields a material with improved modulus and material hardness. The improvement is each typically greater than or about 50%. The UV cured dielectric material can optionally be post-UV treated. The post-UV treatment reduces the dielectric constant of the material while maintaining an improved elastic modulus and material hardness as compared to the UV cured dielectric material. UV cured dielectrics can additionally exhibit a lower total thermal budget for curing than for furnace curing processes.Type: GrantFiled: July 21, 2003Date of Patent: June 29, 2004Assignee: Axcelis Technologies, Inc.Inventors: Carlo Waldfried, Qingyuan Han, Orlando Escorcia, Ivan L. Berry, III
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Patent number: 6749906Abstract: A thermal physical vapor deposition apparatus includes an elongated vapor distributor disposed in a chamber held at reduced pressure, and spaced from a structure which is to receive an organic layer in forming part of an OLED. One or more detachable organic material vapor sources are disposed outside of the chamber, and a vapor transport device including a valve sealingly connects each attached vapor source to the vapor distributor. During vapor deposition of the organic layer, the structure is moved with respect to the vapor distributor to provide an organic layer of improved uniformity on the structure.Type: GrantFiled: April 25, 2002Date of Patent: June 15, 2004Assignee: Eastman Kodak CompanyInventor: Steven A. Van Slyke
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Publication number: 20040109938Abstract: A material deposition sensor includes a heater and a temperature sensor separated from one another. In operation, the sensor is disposed within a deposition chamber, and material is deposited onto the sensor. When a particular material thickness is deposited, a direct thermally conductive path is created between the heater and temperature sensor, and heat from the heater conducts directly to the temperature sensor. By predetermining a deposition thickness necessary to create the direct thermally conductive path, the deposition thickness can be controlled and/or predicted.Type: ApplicationFiled: December 4, 2002Publication date: June 10, 2004Applicant: The Board of Trustees of the University of IllinoisInventor: Chang Liu
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Patent number: 6746716Abstract: The invention provides a process for coating a cylindrical carrier structure with a predetermined amount (target take-up) of a coating suspension, wherein the carrier structure has a cylinder axis, two end faces, an encasing face and an axial length L and a large number of channels running from the first end face to the second end face. The process comprises: a) vertically aligning the cylinder axis of the carrier structure and filling the empty volume of the channels up to a predetermined height H1 starting from the lower end face, b) removing the excess coating suspension through the lower end face of the carrier structure down to the target take-up, c) turning the carrier structure 180°, so that the upper and lower end faces are exchanged one for the other, and d) repeating steps a) and b), wherein the height H2, up to which the channels are filled in this case is given by H2=L−x·H1 where x is between 0.8 and 1.0.Type: GrantFiled: June 27, 2002Date of Patent: June 8, 2004Assignee: OMG AG & Co KGInventors: Ralph Kiessling, Michael Harris, Dieter Detterbeck, Josef Piroth
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Publication number: 20040105938Abstract: Disclosed is an accelerated petrifaction process of lignocellulose materials, including the step of impregnating with an aqueous solution an alkaline hydroxide and a soluble silicate, under pH conditions that permits its partial neutralization and insolubilization of the salts in situ in the interior of the lignocellulose material by the action of acid groups present in the lignocellulose material and the acidic action of carbon dioxide present in the surrounding air.Type: ApplicationFiled: November 18, 2003Publication date: June 3, 2004Applicants: Universidad de Conception, Burkkhard Seeger Stein, Aserraderos Quelen Quelen S.A., Maderas Impregnadas Preserva Ltd., Barraca y Fabrica de Muebles, Puertas y Ventanas Silvia UgarteInventor: Julio Burkhard Seeger Stein