Nonmetallic Coating Formed By Vapor Deposition Patents (Class 427/70)
  • Patent number: 8853100
    Abstract: According to an embodiment of present disclosure, a film formation method is provided. The film formation method includes supplying a first process gas as a source gas for obtaining a reaction product to a substrate while rotating a turntable and revolving the substrate, and supplying a second process gas as a gas for nitriding the first process gas adsorbed to the substrate to the substrate in a position spaced apart along a circumferential direction of the turntable from a position where the first process gas is supplied to the substrate. Further, the film formation method includes providing a separation region along the circumferential direction of the turntable between a first process gas supply position and a second process gas supply position, and irradiating ultraviolet rays on a molecular layer of the reaction product formed on the substrate placed on the turntable to control stresses generated in a thin film.
    Type: Grant
    Filed: June 28, 2013
    Date of Patent: October 7, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Masanobu Igeta, Jun Sato, Kazuo Yabe, Hitoshi Kato, Yusaku Izawa
  • Patent number: 8734915
    Abstract: A film-formation method whereby a minute pattern thin film can be formed on a deposition substrate, without provision of a mask between a material and the deposition substrate. Moreover, a light-emitting element is formed by such a film-formation method, and a high-definition light-emitting device can be manufactured. Through a film-formation substrate in which a reflective layer, a light-absorbing layer and a material layer are formed, the light-absorbing layer is irradiated with light, so that a material contained in the material layer is deposited on a deposition substrate which is disposed to face the film-formation substrate. Since the reflective layer is selectively formed, a film to be deposited on the deposition substrate can be selectively formed with a minute pattern reflecting the pattern of the reflective layer. A wet process can be employed for formation of the material layer.
    Type: Grant
    Filed: February 24, 2009
    Date of Patent: May 27, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Takahiro Ibe, Takuya Tsurume, Koichiro Tanaka, Satoshi Seo
  • Publication number: 20140093041
    Abstract: A sensor panel provided with a photoelectric conversion element that detects entering light, a columnar-structure scintillator layer arranged on the sensor panel, a light reflection layer formed on the columnar-structure scintillator layer, and a resin layer including a particulate scintillator formed between the columnar-structure scintillator layer and the light reflection layer are included in a detecting apparatus, and the resin layer includes a particulate scintillator.
    Type: Application
    Filed: September 27, 2013
    Publication date: April 3, 2014
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Taiki Takei, Masato Inoue, Shinichi Takeda, Satoru Sawada, Takamasa Ishii, Kota Nishibe
  • Publication number: 20140004641
    Abstract: A vapor deposition device (1) performs a vapor deposition treatment to form a luminescent layer (47) having a predetermined pattern on a film formation substrate (40). The vapor deposition device includes: a nozzle (13) having a plurality of injection holes (16) from which vapor deposition particles (17), which constitute the luminescent layer, are injected toward the film formation substrate when the vapor deposition treatment is carried out; and a plurality of control plates (20) provided between the nozzle and the film formation substrate and restricting an incident angle, with respect to the film formation substrate, of the vapor deposition particles injected from the plurality of injection holes. The nozzle includes: a nozzle main body (14b) in a container shape having an opening (14c) on a surface thereof on a film formation substrate side and (ii) a plurality of blocks (15) covering the opening and separated from each other, each of the plurality of blocks having the plurality of injection holes.
    Type: Application
    Filed: March 9, 2012
    Publication date: January 2, 2014
    Applicant: SHARP KABUSHIKI KAISHA
    Inventors: Tohru Sonoda, Shinichi Kawato, Satoshi Inoue, Satoshi Hashimoto
  • Patent number: 8609181
    Abstract: It is an object of the present invention to provide a method for fabricating a light emitting device, in which brightness gradient due to potential drop of a counter electrode can be prevented from being observed and an auxiliary electrode can be formed without increasing the number of steps, even when the precision of a light emitting device is improved. It is another object of the invention to provide a light emitting device fabricated according to the method. The light emitting device has a light emitting element and an auxiliary electrode in each pixel. The light emitting element includes a first electrode, a second electrode, an electroluminescent layer provided between the first and the second electrodes. Further, the first electrode is overlapped with the electroluminescent layer and the second electrode formed over an insulating film by means of a first opening formed in the insulating film.
    Type: Grant
    Filed: July 23, 2009
    Date of Patent: December 17, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Ritsuko Nagao, Yasuo Nakamura
  • Patent number: 8535759
    Abstract: A method of depositing organic material is provided. A carrier gas carrying organic material is ejected from a nozzle at a flow velocity that is at least 10% of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate. In some embodiments, the dynamic pressure in a region between the nozzle and the substrate surrounding the carrier gas is at least 1 Torr, and more preferably 10 Torr, during the ejection. In some embodiments, a guard flow is provided around the carrier gas.
    Type: Grant
    Filed: June 25, 2010
    Date of Patent: September 17, 2013
    Assignee: The Trustees of Princeton University
    Inventors: Stephen R. Forrest, Max Shtein
  • Patent number: 8431432
    Abstract: An object is to provide a manufacturing method of a light-emitting device including an organic compound layer, in which a desired organic compound layer is easily formed using a plurality of evaporation materials. A first organic compound layer containing a plurality of evaporation materials is formed over a first substrate. The first organic compound layer is formed using a mixture formed by mixture of the plurality of evaporation materials in advance. A second substrate is placed at a position facing the first substrate so as to face the first organic compound layer provided for the first substrate. The first organic compound layer as an evaporation source is heated to be vaporized and a desired second organic compound layer is formed over the second substrate placed so as to face the first substrate. Accordingly, a light-emitting device is manufactured.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: April 30, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hisao Ikeda, Tomoya Aoyama
  • Patent number: 8404125
    Abstract: In a metal processing method, a photoresist liquid is applied to both surfaces of a metal plate (210) to form photoresist films (220, 230), respectively (Step S102). Subsequently, the photoresist films (220, 230) are exposed and developed so that the photoresist films (220, 230) is removed while leaving the photoresist films (220, 230) corresponding to portions in which a hole is to be formed (Step S103). Next, metal thin films (240, 250) are formed on both the surfaces of the metal plate (210), respectively, on which the photoresist films (220, 230) are formed (Step S104). Subsequently, the photoresist films (220, 230) are removed, and metal thin films (245, 255) are also removed, which are formed on the photoresist films (220, 230), respectively (Step S105). Finally, the metal plate (210) is immersed in an etchant to be etched, to thereby form a high-precision hole in the metal plate (210) (Step S106).
    Type: Grant
    Filed: July 27, 2010
    Date of Patent: March 26, 2013
    Assignees: Hitachi Displays, Ltd., Canon Kabushiki Kaisha
    Inventors: Noriharu Matsudate, Takeshi Ookawara
  • Patent number: 8383194
    Abstract: To provide a film forming apparatus capable of using an expensive organic EL raw material without waste and uniformly forming an organic EL film over a long period of time and a jig therefor. A plurality of ejection vessels are provided for a single raw material container section. A switcher is provided for carrying out switching from a piping system, which evaporates an organic EL raw material in the raw material container section and supplies it along with a carrier gas to one of the ejection vessels, to a piping system for another ejection vessel. In this manner, by supplying the organic EL raw material from the single raw material container section to the plurality of ejection vessels by switching, the use efficiency of the organic EL raw material can be improved.
    Type: Grant
    Filed: September 5, 2006
    Date of Patent: February 26, 2013
    Assignees: Tohoku University, Tokyo Electron Limited
    Inventors: Tadahiro Ohmi, Takaaki Matsuoka, Shozo Nakayama, Hironori Ito
  • Patent number: 8263174
    Abstract: Disclosed is a light emitting device manufacturing apparatus including a plurality of processing chambers for performing a substrate processing for forming, on a target substrate, a light emitting device having multiple layers including an organic layer, wherein each of the plurality of processing chambers is configured to perform a substrate process on the target substrate while maintaining the target substrate such that its device forming surface, on which the light emitting device is to be formed, is oriented toward a direction opposite to a direction of gravity.
    Type: Grant
    Filed: June 13, 2007
    Date of Patent: September 11, 2012
    Assignees: Tokyo Electron Limited, National University Corporation Tohoku University
    Inventors: Yasushi Yagi, Shingo Watanabe, Toshihisa Nozawa, Chuichi Kawamura, Kimihiko Yoshino, Tadahiro Ohmi
  • Publication number: 20120097855
    Abstract: A scintillator panel which has achieved enhanced sharpness and sensitivity is disclosed, comprising on a first support a phosphor layer comprising phosphor columnar crystals formed by a process of vapor phase deposition and containing a parent component of cesium iodide (CsI) and an activator of thallium (Tl), and the phosphor layer comprising a first layer of a CsI layer which is in the bottom portion of the phosphor layer and does not contain any activator of thallium, and on the first layer, a second layer of a CsI—Tl layer which contains the activator of thallium and exhibits not more than 32% of a coefficient of variation of concentration of thallium in the direction of thickness.
    Type: Application
    Filed: March 4, 2010
    Publication date: April 26, 2012
    Applicant: KONICA MINOLTA MEDICAL & GRAPHIC, INC.
    Inventors: Shigetami Kasai, Hiroshi Isa, Makoto Iijima, Yasushi Nagata
  • Patent number: 8124442
    Abstract: An object is to provide a manufacturing method of a light-emitting device including an organic compound layer, in which a desired organic compound layer is easily formed using a plurality of evaporation materials. A first organic compound layer containing a plurality of evaporation materials is formed over a first substrate. The first organic compound layer is formed using a mixture formed by mixture of the plurality of evaporation materials in advance. A second substrate is placed at a position facing the first substrate so as to face the first organic compound layer provided for the first substrate. The first organic compound layer as an evaporation source is heated to be vaporized and a desired second organic compound layer is formed over the second substrate placed so as to face the first substrate. Accordingly, a light-emitting device is manufactured.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: February 28, 2012
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hisao Ikeda, Tomoya Aoyama
  • Patent number: 8119204
    Abstract: A binder material layer including an evaporation material is formed over a main surface of an evaporation source substrate, a substrate on which a film is formed is placed so that the binder material layer and a main surface thereof face each other, and heat treatment is performed on a rear surface of the evaporation source substrate so that the evaporation material in the binder material layer is heated to be subjected to sublimation or the like, whereby a layer of the evaporation material is formed on the substrate on which a film is formed. When a low molecular material is used for the evaporation material and a high molecular material is used for the binder material, the viscosity can be easily adjusted, and thus, film formation is possible with higher throughput than conventional film formation.
    Type: Grant
    Filed: March 26, 2008
    Date of Patent: February 21, 2012
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hisao Ikeda, Takahiro Ibe, Tomoya Aoyama
  • Patent number: 8057856
    Abstract: The present invention is a method for gettering undesirable atomic species from a vaporizing atmosphere during deposition of multi-element thin film phosphor compositions. The method comprises vaporizing one or more getter species immediately prior and/or simultaneously during the deposition of a phosphor film composition within a deposition chamber. The method improves the luminance and emission spectrum of phosphor materials used for full colour ac electroluminescent displays employing thick film dielectric layers with a high dielectric constant.
    Type: Grant
    Filed: March 10, 2005
    Date of Patent: November 15, 2011
    Assignee: Ifire IP Corporation
    Inventors: Dan Daeweon Cheong, Paul Barry Del Bel Belluz, Stephen Charles Cool, Abdul M. Nakua, James Alexander Robert Stiles, Yong-seon Lee, Terry Hunt, Vincent Joseph Alfred Pugliese
  • Patent number: 8012537
    Abstract: A method for controlling the deposition of vaporized organic material onto a substrate surface, includes providing a manifold having at least one aperture through which vaporized organic material passes for deposition onto the substrate surface; and providing a volume of organic material and maintaining the temperature of such organic material in a first condition so that its vapor pressure is below that needed to effectively form a layer on the substrate, and in a second condition heating a volume percentage of the initial volume of such organic material so that the vapor pressure of the heated organic material is sufficient to effectively form a layer.
    Type: Grant
    Filed: May 24, 2010
    Date of Patent: September 6, 2011
    Assignee: Global OLED Technology LLC
    Inventors: Michael L. Boroson, Michael Long, Jeremy M. Grace, Jinmei Zhang, Bruce E. Koppe, Thomas W. Palone, Neil P. Redden
  • Patent number: 7744957
    Abstract: A method of depositing organic material is provided. A carrier gas carrying an organic material is ejected from a nozzle at a flow velocity that is at least 10% of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate. In some embodiments, the dynamic pressure in a region between the nozzle and the substrate surrounding the carrier gas is at least 1 Torr, and more preferably 10 Torr, during the ejection. In some embodiments, a guard flow is provided around the carrier gas. In some embodiments, the background pressure is at least about 10e-3 Torr, more preferably about 0.1 Torr, more preferably about 1 Torr, more preferably about 10 Torr, more preferably about 100 Torr, and most preferably about 760 Torr. A device is also provided. The device includes a nozzle, which further includes a nozzle tube having a first exhaust aperture and a first gas inlet; and a jacket surrounding the nozzle tube, the jacket having a second exhaust aperture and a second gas inlet.
    Type: Grant
    Filed: October 23, 2003
    Date of Patent: June 29, 2010
    Assignee: The Trustees of Princeton University
    Inventors: Stephen R. Forrest, Max Shtein
  • Patent number: 7695758
    Abstract: Disclosed herein are novel light-emitting materials of Formula I and II below. These new complexes are synthesized and found to be sufficiently stable to allow sublimation and vacuum deposition. These new emitters are electrophosphorescent and can be used in organic light-emitting devices (OLEDs) for device elements capable of emitting light of color ranging from orange to red with high-efficiency and high-brightness. wherein E=Group 16 elements (including sulphur); M=Group 10 metal (including platinum); R1-R14 are each independently selected from the group consisting of hydrogen; halogen; alkyl; substituted alkyl; aryl; substituted aryl, with substituents selected from the group consisting of halogen, lower alkyl and recognized donor and acceptor groups. R1 can also be selected from (C?C)nR15, where (C?C) represents a carbon-carbon triple bond (acetylide group), n is selected from 1 to 10, and R15 is selected from alkyl, aryl, substituted aryl, and tri(alkyl)silyl.
    Type: Grant
    Filed: March 2, 2007
    Date of Patent: April 13, 2010
    Inventors: Chi-Ming Che, Wei Lu, Michael Chi-Wang Chan
  • Patent number: 7662427
    Abstract: An organic film vapor deposition method includes a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from the vapor deposition table; a second step of introducing the vapor deposition table having the substrate supported by the target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of the substrate, provided with the scintillator, introduced into the vapor deposition chamber.
    Type: Grant
    Filed: March 27, 2006
    Date of Patent: February 16, 2010
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Takuya Homme, Toshio Takabayashi, Hiroto Sato
  • Patent number: 7651722
    Abstract: An apparatus for manufacturing an organic electroluminescence display having an alignment chamber for aligning a mask having openings corresponding to a predetermined pattern with a substrate on which a first electrode layer is formed and detachably attaching the mask and the substrate. The apparatus further including a number of vacuum processing chambers for sequentially forming a number of organic material layers on the substrate attached with the mask. The apparatus also including a transfer robot for transferring the attached mask and substrate to one of the number of vacuum processing chambers and sequentially transferring it between the number of the vacuum processing chambers.
    Type: Grant
    Filed: May 21, 2002
    Date of Patent: January 26, 2010
    Assignee: Sony Corporation
    Inventors: Takao Mori, Masaru Yamaguchi, Isao Kamiyama
  • Patent number: 7625602
    Abstract: A method for metering powdered or granular material onto a heated surface to vaporize such material. The method comprises providing a rotatable auger d for receiving powdered or granular material and as the rotatable auger rotates, such rotatable auger translates such powdered or granular material along a feed path to a feeding location. The method also providing at least one opening at the feeding location such that the pressure produced by the rotating rotatable auger at the feeding location causes the powdered or granular material to be forced through the opening onto the heated surface in a controllable manner. The material is agitated or fluidized proximate to the feeding location.
    Type: Grant
    Filed: May 3, 2005
    Date of Patent: December 1, 2009
    Assignee: Eastman Kodak Company
    Inventors: Michael Long, Neil P. Redden, Bruce E. Koppe, Thomas W. Palone
  • Patent number: 7625601
    Abstract: A method for metering powdered or granular material onto a heated surface to vaporize such material, includes providing a container with powdered or granular material having at least one component; providing a rotatable auger disposed in material receiving relationship with the container for receiving powdered or granular material from the container and as the auger rotates, such rotating auger translates such powdered or granular material along a feed path to a feeding location; and providing at least one opening at the feeding location such that the pressure produced by the rotating auger at the feeding location causes the powdered or granular material to be forced through the opening onto the heated surface in a controllable manner.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: December 1, 2009
    Assignee: Eastman Kodak Company
    Inventors: Michael Long, Thomas W. Palone, Bruce E. Koppe
  • Patent number: 7622149
    Abstract: A physical vapor deposition method for the deposition of thioaluminate phosphor compositions includes providing one or more source materials including an intermetallic barium aluminum compound, a barium aluminum alloy or a protected barium metal, providing an activator species and effecting deposition of the one or more source materials and activator species as a phosphor composition on a selected substrate. The method allows for the deposition of blue thin film electroluminescent phosphors with high luminance and colors required for TV applications.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: November 24, 2009
    Assignee: Ifire IP Corporation
    Inventors: Yue (Helen) Xu, Alexander Kosyachkov, Guo Liu, Xingwei Wu, Joe Acchione
  • Patent number: 7618674
    Abstract: A deposition mask and a method for manufacturing an organic light emitting display (OLED) using the same are provided. The deposition mask is intended for preventing an organic film from being damaged due to touching of a blocked-off portion of the mask to an emission layer (EML), or chemical transition from being generated at the organic film. For that purpose, the deposition mask stuck to a substrate of the OLED to deposit an organic EML includes an opening and an indentation. The opening is opened so as to deposit the organic EML. The indentation is indented a predetermined depth from a plane facing the substrate.
    Type: Grant
    Filed: July 14, 2005
    Date of Patent: November 17, 2009
    Assignee: Samsung Mobile Display Co., Ltd.
    Inventors: Chang-Ho Kang, Tae-Seung Kim, Jae-Min Hong
  • Publication number: 20090258237
    Abstract: Disclosed herein is a graded composition encapsulation thin film and a fabrication method thereof. The encapsulation thin film comprises a substrate, a graded composition layer and an anchoring layer interposed therebetween. The anchoring layer serves to improve the adhesion between the graded composition layer and the substrate and creates advantageous conditions for the formation of the graded composition layer. Due to the presence of the anchoring layer, the encapsulation thin film has excellent barrier properties against the permeation of moisture and oxygen and is highly resistant to diffusion of other chemical species.
    Type: Application
    Filed: August 13, 2008
    Publication date: October 15, 2009
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yun Hyuk CHOI, Kwang Hee LEE, Hyung Jin BAE, Jong Jin PARK, Xavier BULLIARD
  • Publication number: 20090206266
    Abstract: A radiation transducer has a luminophore layer applied on a substrate, and at least one anti-discoloration substance is applied on the luminophore layer. In a method to produce a radiation transducer a luminophore layer is applied on a substrate, and at least one anti-discoloration substance is applied on the luminophore layer after the application of the luminophore layer on the substrate.
    Type: Application
    Filed: February 18, 2009
    Publication date: August 20, 2009
    Inventors: Manfred Fuchs, Oliver Kirch, Georg Wittmann
  • Patent number: 7550173
    Abstract: Disclosed are a luminescent device and electric appliance which have low power consumption and a long life. An organic luminescent element is provided by a scheme that a region 204b where the concentrations of first and second organic compounds change gradually is provided in the organic compound layer 203b, a region 201b where the first organic compound can express its function is formed, and a region 202b where the second organic compound can express its function is formed. Thereby the functions of the individual materials are allowed to express. This scheme provides an organic luminescent element which has low power consumption and a long life. A luminescent device and electric appliance are manufactured by using the organic luminescent element.
    Type: Grant
    Filed: March 2, 2005
    Date of Patent: June 23, 2009
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Satoshi Seo, Shunpei Yamazaki
  • Publication number: 20090134025
    Abstract: A probe for a scanning device having an anode, a cathode, and an organic material. The organic material is positioned between the anode and the cathode. The organic material is operable for at least one of emitting and detecting light by an electrical bias applied between the anode and the cathode.
    Type: Application
    Filed: September 12, 2007
    Publication date: May 28, 2009
    Inventors: Max Shtein, Kevin P. Pipe, Kwang Hyup An, Yiying Zhao, Brendan T. O'Connor
  • Publication number: 20090121219
    Abstract: Provided is a method of growing carbon nanotubes (CNTs) by forming a catalyst layer that is used to facilitate growth of CNTs to have a multi-layer structure; and injecting a carbon-containing gas to the catalyst layer to grow CNTs, and light emitting devices fabricated by incorporating the CNTs grown.
    Type: Application
    Filed: September 12, 2008
    Publication date: May 14, 2009
    Inventors: Byong-gwon Song, Jin-pyo Hong, Yong-wan Jin, Seung-nam Cha, Jong-hyun Lee, Jae-hwan Ha
  • Patent number: 7517551
    Abstract: A technique for manufacturing a light-emitting device by using a method of forming a thin film having a highly uniform thickness with high throughput is provided. The technique includes the steps of filling a small molecular organic electroluminescence material into an evaporation cell that has an orifice-like evaporation material ejecting port, and heating the small molecular organic electroluminescence material in an inert gas atmosphere to form a light emitting layer on a substrate from the small molecular organic electroluminescence material.
    Type: Grant
    Filed: May 3, 2001
    Date of Patent: April 14, 2009
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Yasuyuki Arai
  • Publication number: 20090074952
    Abstract: An evaporation apparatus with high utilization efficiency for EL materials and excellent film uniformity is provided. The invention is an evaporation apparatus having a movable evaporation source and a substrate rotating unit, in which the space between an evaporation source holder and a workpiece (substrate) is narrowed to 30 cm or below, preferably 20 cm, more preferably 5 to 15 cm, to improve the utilization efficiency for EL materials. In evaporation, the evaporation source holder is moved in the X-direction or the Y-direction, and the workpiece (substrate) is rotated for deposition. Therefore, film uniformity is improved.
    Type: Application
    Filed: November 18, 2008
    Publication date: March 19, 2009
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Masakazu Murakami, Hisashi Ohtani
  • Publication number: 20080299296
    Abstract: A successive vapor deposition system in which a vapor deposition material is heated, vaporized in a vacuum, and deposited onto a vapor deposition area of a substrate, includes a conveyer which conveys the substrate in a conveying direction parallel to a plane on which the substrate lies, wherein the vapor deposition area faces downward and is exposed through the underside of the conveyer; a plurality of vapor deposition chambers aligned in the conveying direction, each the vapor deposition chamber including a space through which the substrate is conveyed; at least one container positioned in each of the plurality of vapor deposition chambers below the plane on which the substrate lies, and containing the vapor deposition material, wherein a width of the container covers the vapor deposition area in a direction perpendicular to the conveying direction; and a heating medium provided for the container.
    Type: Application
    Filed: August 7, 2008
    Publication date: December 4, 2008
    Applicant: International Manufacturing and Engineering Services Co. Ltd.
    Inventors: Junji Kido, Tokio Mizukami
  • Publication number: 20080268137
    Abstract: A binder material layer including an evaporation material is formed over a main surface of an evaporation source substrate, a substrate on which a film is formed is placed so that the binder material layer and a main surface thereof face each other, and heat treatment is performed on a rear surface of the evaporation source substrate so that the evaporation material in the binder material layer is heated to be subjected to sublimation or the like, whereby a layer of the evaporation material is formed on the substrate on which a film is formed. When a low molecular material is used for the evaporation material and a high molecular material is used for the binder material, the viscosity can be easily adjusted, and thus, film formation is possible with higher throughput than conventional film formation.
    Type: Application
    Filed: March 26, 2008
    Publication date: October 30, 2008
    Inventors: Hisao Ikeda, Takahiro Ibe, Tomoya Aoyama
  • Publication number: 20080241587
    Abstract: For increasing the film-forming rate and enabling uniform film formation and waste elimination of raw material, a film-forming method and a film-forming apparatus can reach an evaporated film-forming material to a surface of a substrate by the flow of a transport gas so as to control the film-forming conditions by the flow of the gas. Thereby a uniform thin film can be deposited on the large-area substrate. That is, by directing the evaporated raw material toward the substrate, it is possible to increase the film-forming rate and achieve uniform film formation.
    Type: Application
    Filed: March 29, 2005
    Publication date: October 2, 2008
    Inventors: Tadahiro Ohmi, Takaaki Matsuoka
  • Publication number: 20080237181
    Abstract: A method for forming a coating over a surface is disclosed. The method comprises depositing over a surface, a hybrid layer comprising a mixture of a polymeric material and a non-polymeric material. The hybrid layer may have a single phase or comprise multiple phases. The hybrid layer is formed by chemical vapor deposition using a single source of precursor material. The chemical vapor deposition process may be plasma-enhanced and may be performed using a reactant gas. The precursor material may be an organo-silicon compound, such as a siloxane. The hybrid layer may comprise various types of polymeric materials, such as silicone polymers, and various types of non-polymeric materials, such as silicon oxides. By varying the reaction conditions, the wt % ratio of polymeric material to non-polymeric material may be adjusted. The hybrid layer may have various characteristics suitable for use with organic light-emitting devices, such as optical transparency, impermeability, and/or flexibility.
    Type: Application
    Filed: October 31, 2007
    Publication date: October 2, 2008
    Applicant: TRUSTEES OF PRINCETON UNIVERSITY
    Inventors: Sigurd WAGNER, Prashant MANDLIK
  • Patent number: 7399497
    Abstract: To provide a film forming method and a film forming system, which efficiently use materials and forming a high-quality organic thin film, and an electronic device and an electronic apparatus that are manufactured using the method and the device, an organic thin film-forming system includes a solution supplying unit, a gas supplying unit, a soft ionizing unit, and an ion separating unit, a deflecting unit, and a film-forming unit. After organic materials to be converted in film become minute liquid droplets in the soft ionizing unit and the liquid droplets are ionized or charged, the liquid droplets are vaporized and thus pseudo-molecular ions of a vapor state are created. In the ion separating unit, an organic material pseudo-molecular ion is separated from the pseudo-molecular ions.
    Type: Grant
    Filed: April 12, 2004
    Date of Patent: July 15, 2008
    Assignee: Seiko Epson Corporation
    Inventor: Yoichi Imamura
  • Patent number: 7338582
    Abstract: It is an object of the present invention to provide an oxygen reduction electrode having excellent oxygen reduction catalysis ability. In a method of manufacturing a manganese oxide nanostructure having excellent oxygen reduction catalysis ability and composed of secondary particles which are aggregations of primary particles of manganese oxide, a target plate made of manganese oxide is irradiated with laser light to desorb the component substance of the target plate, and the desorbed substance is deposited on a substrate facing substantially parallel to the aforementioned target plate.
    Type: Grant
    Filed: August 16, 2005
    Date of Patent: March 4, 2008
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Nobuyasu Suzuki, Yasunori Morinaga, Hidehiro Sasaki, Yuka Yamada
  • Patent number: 7247073
    Abstract: An organic light emitting device (OLED) is disclosed for which the hole transporting layer, the electron transporting layer and/or the emissive layer, if separately present, is comprised of a non-polymeric material. A method for preparing such OLED's using vacuum deposition techniques is further disclosed.
    Type: Grant
    Filed: October 15, 2004
    Date of Patent: July 24, 2007
    Assignee: The Trustees of Princeton University
    Inventors: Gong Gu, Paul Burrows, Stephen R. Forrest
  • Patent number: 7186439
    Abstract: A method of manufacturing an organic EL display in which organic EL devices are prevented from being promoted in degradation by interfaces that occur between the hole transporting layer and the luminescent layer and between the luminescent layer and the electron transporting layer during the formation of the organic EL devices. The material of the luminescent layer is evaporated from a first evaporation source. At that time, the first evaporation source is moved from one end of a glass substrate to the other. Consequently, the luminescent layer is formed evenly on the glass substrate. After the formation of the luminescent layer is completed, the material of the electron transporting layer is evaporated from a second evaporation source. The second evaporation source is moved as if the first evaporation source is, whereby the electron transporting layer is formed evenly.
    Type: Grant
    Filed: March 5, 2003
    Date of Patent: March 6, 2007
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Shingo Nakano, Hiroshi Kanno, Masaya Nakai
  • Patent number: 7067170
    Abstract: A method of depositing a patterned organic layer includes providing a manifold and an OLED display substrate in a chamber at reduced pressure and spaced relative to each other; providing a structure sealingly covering at least one surface of the manifold, the structure including a plurality of nozzles extending through the structure into the manifold. The method also includes delivering vaporized organic materials into the manifold, and applying an inert gas under pressure into the manifold so that the inert gas provides a viscous gas flow through each of the nozzles, such viscous gas flow transporting at least portions of the vaporized organic materials from the manifold through the nozzles to provide directed beams of the inert gas and of the vaporized organic materials and projecting the directed beams onto the OLED display substrate for depositing a pattern of an organic layer on the substrate.
    Type: Grant
    Filed: September 23, 2002
    Date of Patent: June 27, 2006
    Assignee: Eastman Kodak Company
    Inventors: Michael A. Marcus, Jeremy Grace, Justin H. Klug, Steven A. Van Slyke
  • Patent number: 7048967
    Abstract: An organic film vapor deposition method includes a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from the vapor deposition table; a second step of introducing the vapor deposition table having the substrate supported by the target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of the substrate, provided with the scintillator, introduced into the vapor deposition chamber.
    Type: Grant
    Filed: August 14, 2002
    Date of Patent: May 23, 2006
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Takuya Homme, Toshio Takabayashi, Hiroto Sato
  • Patent number: 7022864
    Abstract: An organosilicon precursor for vapor deposition, e.g., low pressure (<100 Torr), plasma-enhanced chemical vapor deposition (PECVD) of a low k, high strength dielectric film, wherein the precursor includes at least one of: (i) silicon-pendant oxiranyl functionality; and (ii) a disilyl moiety of the formula wherein x is an integer having a value of from 0 to 4 inclusive. These precursors are useful for the formation of dielectric films having dielectric constants on the order of ˜3 and less, and a hardness exceeding ˜1 GigaPascals.
    Type: Grant
    Filed: July 15, 2003
    Date of Patent: April 4, 2006
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Alexander S. Borovik, Chongying Xu, Thomas H. Baum, Steven Bilodeau, Jeffrey F. Roeder, Abigail Ebbing, Daniel Vestyck
  • Patent number: 6939482
    Abstract: A phosphor thin film includes a matrix material expressed by a composition formula AxByOwSz, and a substance functioning as a luminescence center in the matrix material. In the composition formula, A represents at least one element selected from the group consisting of Mg, Ca, Sr, Ba, and Zn; B represents at least one rare-earth element selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu; O represents oxygen atoms; and S represents sulfur atoms, respectively. Molar ratios are respectively set as 0<x<5, 0<y<4, 0?z<8, and 0?w?8, and 0=z=w never holds true.
    Type: Grant
    Filed: September 22, 2003
    Date of Patent: September 6, 2005
    Assignees: TDK Corporation
    Inventors: Noboru Miura, Mitsuhiro Kawanishi, Yoshihiko Yano
  • Patent number: 6885149
    Abstract: A highly transparent non-metallic cathode is disclosed that comprises a metal-doped organic electron injection layer that is in direct contact with a transparent non-metallic electron injecting cathode layer, such as indium tin oxide (ITO), wherein the metal-doped organic electron injection layer also functions as an exciton blocking or hole blocking layer. The metal-doped organic electron injection layer is created by diffusing an ultra-thin layer of about 5-10 ? of a highly electropositive metal such as Li throughout the layer. A representative embodiment of the highly transparent non-metallic cathode comprises a layer of ITO, a layer of 2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline (BCP), which acts as an electron injection, exciton blocking, and hole blocking layer, and an ultra-thin layer of lithium, which degenerately dopes the layer of BCP, improving the electron injecting properties of the BCP layer.
    Type: Grant
    Filed: October 28, 2003
    Date of Patent: April 26, 2005
    Assignee: The Trustees of Princeton University
    Inventors: Gautam Parthasarathy, Chihaya Adachi, Paul E. Burrows, Stephen R. Forrest
  • Patent number: 6869636
    Abstract: In evaporating thin film used in organic electro-luminescent (EL) display, a mask having a plurality of openings is placed below a display substrate, and a plane evaporation source is placed below the mask. The plane evaporation source has a plurality of evaporating material cells which are respectively aligned to the openings of the mask. Next, evaporating the evaporating material cells, a plurality of thin films is deposited on predetermined regions of the display substrate.
    Type: Grant
    Filed: January 22, 2002
    Date of Patent: March 22, 2005
    Assignees: Chi Mei Optoelectronics Corporation, Kyocera Corporation
    Inventor: Chia-Tin Chung
  • Patent number: 6852356
    Abstract: A glass substrate and a shadow mask are put tightly together by inserting the glass substrate between a magnet and the shadow mask made of magnetic material. A pattern forming of an organic EL device is performed by depositing an organic EL material on the surface of the glass substrate from an evaporation source through an opening portion in the shadow mask. A coarsening processing has been performed on the surface of shadow mask facing the glass substrate. This suppresses the damage on the substrate surface by the shadow mask during the evaporation processing.
    Type: Grant
    Filed: March 3, 2003
    Date of Patent: February 8, 2005
    Assignee: Sanyo Electric Co., Ltd.
    Inventor: Ryuji Nishikawa
  • Patent number: 6852357
    Abstract: A radiation image storage panel composed of a support and a phosphor film of a stimulable europium activated cesium bromide phosphor having the formula (I): CsBr.MIX?aMIIX?2+bMIIIX?3:zEu ??(I) [MI is an alkali metal element; MII is an alkaline earth metal element or a divalent metal element; MIII is a rare earth element or a trivalent metal element; each of X, X? and X? is a halogen; and 0?a<0.5, 0?b<0.5, 0?c<0.5, and 0<z<1.0] is prepared by the steps of depositing on the support a prismatic europium activated cesium bromide phosphor crystal layer on the support in a gas phase; and heating the crystal layer at a temperature of <300 ° C. but >50° C. for 1 to 8 hours in an inert gas atmosphere which may contain a small amount of oxygen or hydrogen.
    Type: Grant
    Filed: March 25, 2003
    Date of Patent: February 8, 2005
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Yuji Isoda, Yasuo Iwabuchi
  • Patent number: 6802991
    Abstract: A CsX:Eu phosphor produced by heating a cesium halide with a Europium compound containing one or more halides selected from the group consisting of F, Cl, Br and I. Preferably the Europium compound is selected from the group consisting of EuX′2, and EuX′3 and EuX′, X′ being one or more halides selected from the group consisting of F, Cl, Br and I. The invention also includes novel phosphors having properties inherent to the manufacturing process as well as other phosphors containing a mixture of Br and Cl in the cesium halide, europium doped phosphor. A method for preparing a binderless phosphor screen using these phosphors and a method for recording and reproducing an X-ray image using such screens are also disclosed.
    Type: Grant
    Filed: December 21, 2001
    Date of Patent: October 12, 2004
    Assignees: Symyx Technologies, Inc., AGFA-Gevaert, N.V.
    Inventors: Martin Devenney, Casper Reaves, Paul Leblans, Luc Struye
  • Patent number: 6797314
    Abstract: A method of handling powders of organic materials in making an organic light-emitting device (OLED) is disclosed. The method includes forming solid pellets from powders of organic materials and using such pellets in a thermal physical vapor deposition source for making an organic layer on a structure which will form part of an OLED.
    Type: Grant
    Filed: July 3, 2001
    Date of Patent: September 28, 2004
    Assignee: Eastman Kodak Company
    Inventors: Steven A. Van Slyke, Dilip K. Chatterjee, Syamal K. Ghosh, Donn B. Carlton
  • Patent number: 6773813
    Abstract: A new fluidized bed particle coating method is disclosed by the use of which coatings can be uniformly and conveniently deposited on the surfaces of fluidized particulate materials by vapor deposition processes at temperatures lower than those of the heated coating precursor transport lines. By this method, particle materials with relatively low surface temperatures may be brought into close proximity with a coating precursor containing gas stream characterized by a substantially higher gas volume temperature in such a way that the vaporized precursor molecules are caused to adsorb or condense on the relatively cold particle surfaces without also condensing on any other surface. Further, if the adsorbed precursor molecules are capable of reacting or polymerizing on the relatively cold particle surfaces, thus forming substantially continuous coatings on those surfaces, they may do so without also depositing such coatings on any other surfaces.
    Type: Grant
    Filed: September 27, 2001
    Date of Patent: August 10, 2004
    Assignee: Osram Sylvania Inc.
    Inventors: Keith A. Klinedinst, Christoforos Kazazis, Daniel Carril
  • Patent number: 6720026
    Abstract: In a method for improving the optical separation of needle-shaped fluorescent layers, made from a fluorescent material, which are formed by vapor deposition on a substrate, vapor deposition is controlled so that the fluorescent layer is deposited on the substrate with a density which is reduced in comparison to the density that the fluorescent material has as a solid.
    Type: Grant
    Filed: January 17, 2001
    Date of Patent: April 13, 2004
    Assignee: Siemens Aktiengesellschaft
    Inventors: Manfred Fuchs, Erich Hell, Detlef Mattern, Bernhard Schmitt