Abstract: A styrylcoumarin compound jointing a styryl group by--(C.dbd.C)n--portion and having --NR.sub.1 R.sub.2 group, wherein n is an integer of 2 to 4, and each R is a proton or an alkyl group having 1 to 10 carbon atoms. A photopolymerizable composition comprises the styrylcoumarin compound as a photosensitizer, a polymerization initiator and a polymerizable compound. A photocrosslinking composition comprises the styrylcoumarin compound as a photosensitizer, a crosslinking agent and a polymerizable compound. A volume phase hologram recording medium which comprises the styrylcoumarin compound, a crosslinking agent and a polymer comprising a carbazole.

Abstract: A thick holographic recording medium suitable for use in multiplex holography is prepared from a solution of a bi-functional oligomer and a mono-functional monomer. Precuring, possibly at the same radiation wavelength used for recording, cross-links the oligomer, thereby creating a host for the recording monomer.

Abstract: A hologram recording plate, which has a plastic layer (a rosin derivative) that undergoes frost deformation by being acted upon by a solvent vapor, is set in a developing box supplied with a solvent vapor (cyclohexane) from a solvent vapor reservoir. The solvent vapor is exhausted from the developing box by a suction device. This is followed by subjecting the hologram recording plate to a high voltage from a high-voltage power supply and irradiating the plate with laser light, which represents a hologram to be formed, by opening a light shutter. This makes it possible to reduce the size of and to automate the hologram producing apparatus. The developing box and optical elements inclusive of a light source are secured to respective ones of individual carriers, and the carriers are provided so as to be free to be moved along an optical system aligning rail and fixed to the rail.

Abstract: A photosensitive recording medium comprises a composition containing a radical-polymerizable monomer, a cationic-polymerizable monomer, a radical polymerization initiator, and a cationic-polymerization initiator as main constituents. A method of producing a hologram comprises a first step of preparing the photosensitive recording medium; a second step of exposing the medium to an interference pattern of radiation rays; and a third step of exposing the entire region of the medium to light; and optionally a fourth step of heating the entire of the medium.

Abstract: A photosensitive composition for volume hologram recording used for recording an interference fringe produced by the interference of laser beams or lights having excellent coherence as a fringe having a different refractive index, the composition comprising:(a) a radical polymerizable compound having a 9,9-diarylfluorene skeleton, which is liquid at a normal temperature;(b) a compound having compatibility with the component (a), which is selected from the group consisting of a cationic polymerizable compound, a radical polymerizable compound having no 9,9-diarylfluorene skeleton and a plasticizer; and(c) a radical photopolymerization initiator which is sensitive to laser beam having a specific wavelength or light having a specific wavelength and excellent coherence to polymerize the component (a);wherein an average refractive index of the component (a) is larger than that of the component (b).

Abstract: The invention is directed to an information-recorded medium with easily selectable and identifiable items of information, which is virtually protected against forgery and has enhanced security against some improper use, and a method for reading such a medium. This information-recorded medium 1 includes a substrate 2 and a layer 3 with information recorded thereon by the printing of infrared absorbing ink, said layer 3 being provided on the surface of the layer 2. The printed layer 3 is provided thereon with a relief hologram-recorded layer 7 through an adhesive layer 4, said hologram-recorded layer 7 being built up of a reflecting layer 5 transparent to the infrared region and a relief hologram-formed layer 6 provided on the surface of the reflecting layer 5. For reading, the hologram-recorded layer 7 is reconstructed by visible light, while the printed layer is reconstructed by infrared light, and the medium 1 is identified on the basis of the thus reconstructed information.

Abstract: A filter for a liquid crystal display device, having a light diffusing plate which is obtained by forming a composition in the form of a film which contains at least two photopolymerizable oligomers or monomers having refractive indexes which differ from each other by at least 0.01 and irradiating UV light on the composition. When the filter is fitted to a light emitting side of a liquid crystal display device, an angle of view of the liquid crystal display face plane is widened, shadows due to opaque parts of the device are reduced, and a Moire fringe is hardly formed.

Abstract: A new photorefractive material comprises BaTiO.sub.3 double-doped with two dopant species, both of which have at least two valence states, with one of the dopant species (e.g., cerium) having an ionization level that is near the middle of the barium titanate bandgap and the other dopant species (e.g., rhodium) having an ionization level that is closer to the valence band edge of barium titanate, such that both dopant species are sensitive to visible light, but only one dopant species (the one closer to the valence band edge) is sensitive to infrared radiation. The double-doped BaTiO.sub.3 provides a unique combination of photorefractive properties, thereby improving its performance as a holographic storage medium. The double-doped barium titanate crystal is employed as a holographic recording element. The double-doped barium titanate crystal has a dark storage time at room temperature of several years or more and may be nondestructively read out at an infrared wavelength.

Abstract: The invention provides a hologram-recording subject plate comprising a block and a variety of subjects fixedly contained therein, which ensures easy, stable yet continuous recording of a multiplicity of identical holograms or different holograms reconstructible by illuminating light, , a hologram-making method using the same, and a hologram-recorded article. The subject plate comprises a transparent solid block and a hologram-recording subject contained therein. A photosensitive material film is applied directly onto one surface of the subject plate, and the subject plate is then irradiated with laser light through the photosensitive material film. Such simple operation enables a multiplicity of identical holograms to be recorded in an easy, stable yet continuous manner.

Abstract: A film of photosensitive material is illuminated from first and second sides with coherent polarized light so as to form an interference pattern within the film. Regions of cyclicly varying refractive index are provided in the film in accordance with the intensity of the interference patten, thereby forming an polarization sensitive refractive index grating. The refractive index grating may be used as a polarization and wavelength dependent mirror, patterned polarizer, beamsplitter or filter.

Abstract: A recording element which comprises a recording layer containing, a first charge-generating material adapted to generate a first electric charge by a supply of external energy, a first charge-transporting material for transporting the first electric charge, a charge-capturing material for capturing the first electric charge, and a material having an electro-optical effect, wherein a change in optical properties of the recording layer is caused only through an inner electric field to be generated by a delivery of electric charge between the first charge-generating material generating electric charge and the charge-capturing material capturing the electric charge.

Abstract: A hologram duplicating method and apparatus whereby a photosensitive material film is continuously and smoothly brought into close contact with the surface of a hologram original plate, and the film is effectively delaminated after a duplicating process. The apparatus includes a film supply part (31) for supplying a photosensitive material film (1), a film laminating part for successively laminating the supplied film (1) on a hologram original plate (35) with the film (1) being squeezed with a roller (46) from the upper side, a film delaminating part for successively delaminating the film (1) from the original plate (35) from one end thereof with the film (1) being pressed with the roller (46), and a film take-up part (43) for taking up the delaminated film. The film (1) can be laminated on the original plate (35) without trapping air bubbles, and the film (1) can be delaminated from the original plate (35) without causing peel unevenness such as undesired lines.

Abstract: The present invention pertains to a process for the stabilization of Holograms formed on gelatin.According to the invention, after (i) exposing, (ii) developing, and (iii) quenching said Hologram, there is added thereto (iv) a bleaching bath based on an oxidative cross-linking agent at a pH value of at least 3 or more, and thereafter, following (v) rinsing, (vi) fixing, (vii) additional rinsing and (viii) a final bath, (ix) said support material is dehydrated by the use of one or more baths in series containing a solvent which is water-miscible and does not affect the cured gelatin structure.In another embodiment, the invention pertains to light-directing wall elements for buildings made of a Holograms obtainable by the process mentioned above and applied to a transparent or opaque substrate.By means of the present invention, silver-free holographic support materials can be prepared.

Abstract: The phase grating of the present invention includes a substrate with a reflective, continuous layer disposed thereon on which a structured spacer layer 3 of dielectric material is applied. To form a phase grating that can be used as a scale in photoelectric position measuring instruments, a further thin reflective surface layer is located solely on the reflective, continuous surfaces, parallel to the layer, of the structured spacer layer.

Abstract: A photosensitive recording medium comprises a composition containing a radical-polymerizable monomer, a cationic-polymerizable monomer, a radical polymerization initiator, and a cationic-polymerization initiator as main constituents. A method of producing a hologram comprises a first step of preparing the photosensitive recording medium; a second step of exposing the medium to an interference pattern of radiation rays; and a third step of exposing the entire region of the medium to light; and optionally a fourth step of heating the entire of the medium.

Abstract: A holographic recording medium comprises an acid generator capable of producing an acid upon exposure to actinic radiation; a binder; and at least one monomer or oligomer capable of undergoing cationic polymerization initiated by the acid produced from the acid generator. This recording medium is not subject to the disadvantages (for example, oxygen sensitivity) associated with radical-polymerized prior art holographic recording media.

Abstract: A photorefractive (PR) device comprises of a layer of a novel photorefractive polymer composite sandwiched inbetween two transparent electrodes. The PR polymer composite comprises a photoconducting polymer, a photosensitizer, a novel second-order, non-linear optical chromophore, and a plasticizer in an amount sufficient to provide the PR polymer composite with a glass transition temperature below about 45.degree. C. The PR polymer composite is capable of internally storing image patterns generated by interfering two coherent light beams inside the material. The PR polymer composite shows high diffraction efficiencies (near 100%) and high net two-coupling gain (>200 cm.sup.-1). The writing of information is reversible. Consequently, the device is suitable for read/write holographic storage and real-time image processing applications, and is capable of being poled at essentially room temperature.

Abstract: A two-photon process for writing to a holographic recording medium comprising a photorefractive material doped with an excitation dopant selected from rare earth ions and an ionization dopant selected from transition metal ions or rare earth ions.

Abstract: A full color hologram is made by exposing a holographic emulsion to the 514 nm and 458 nm lines of an argon laser and the 413 nm line of a krypton laser. The hologram can be returned to its original thickness and used as a master with the same three wavelengths, or it can be swelled to longer wavelengths to reconstruct with red, green and blue light. The source of the red, green and blue information may be acquired by an electronic video signal displayed on an electronic image modulator.

Abstract: Broad band reflection holograms and process for producing broad band reflection holograms in photosensitive elements comprising photopolymer photosensitive layers are disclosed. These holograms may be used to form very bright display holograms, ultraviolet, visible and infrared rejection filters, and holographic security devices, as well as may be used in a wide variety of other applications.

Abstract: A process for transferring a holographic image from a conventional polymeric support to a foil support is described in this invention. A host of images may be envisioned and since this image, on a foil support, may then be wound up in a roll, it can be used as a wrapping element for a host of applications such as in the candy and gum industry; wrapping foils; etc. This element and process permits the wide spread use of such holographic images, such use not being available until now.

Abstract: A high-efficiency holographic diffuser is provided, the holographic diffuser being comparatively thin, yet characterized by good optical density along a broad bandwidth.

Abstract: A silver halide color light-sensitive material is disclosed comprising a support having thereon at least one layer containing at least one yellow dye forming coupler represented by formula (I) ##STR1## wherein Z represents a nonmetallic atom group necessary for forming a 5-membered ring represented by formula (II-1) or (II-2): ##STR2## and the remaining substituents are as defined herein the specification.

Abstract: A laminated multilayer film substrate for use in the production of banknotes. The film substrate includes a first layer comprising at least about 50 weight percent of a high density polyethylene having a density of at least about 0.95, the first layer oriented in at least a first direction to a degree which is at least three times greater than the degree of orientation present in a direction substantially normal to the first direction, and a second layer comprising at least about 50 weight percent of a high density polyethylene having a density of at least about 0.95, the second layer oriented in at least a first direction to a degree which is at least three times greater than the degree of orientation present in a direction substantially normal to the first direction, wherein the second layer is laminated to the film substrate so that the first direction of orientation of the second layer is substantially normal to the first direction of orientation of the first layer.

Abstract: A three-dimensional photo mask is formed from a substrate having a first side and a three-dimensional side. A holograph is provided on the first side of the substrate. The three-dimensional side of the substrate has a photosensitive resist material provided thereon. The holograph includes information that defines features to be imaged onto the photosensitive resist material. A method and a system are disclosed for producing the three-dimensional mask.

Abstract: The present invention provides a photosensitive composition for volume hologram recording, comprising the following components:(A) a cationic polymerizable compound and a radical polymerizable compound,(B) a cationic polymerization initiating material, and(C) a radical polymerization initiating material, as an essential component, wherein at least one of the cationic polymerizable compound and radical polymerizable compound of the component contains a siloxane group, and a difference in refractive index between the cationic polymerizable compound and radical polymerizable compound is not less than 0.01.

Abstract: A hologram decal structure including a photopolymer hologram layer having hologram fringes recorded therein, a transparent pressure sensitive adhesive layer disposed on a first surface of the photopolymer hologram layer, and a transparent urethane coating disposed on a second surface of the photopolymer hologram layer, and techniques for making the hologram decal.

Abstract: A new personal laser dosimetry badge records intentional or unintentional exposure to laser radiation. A Fresnel biprism is mounted over a layer of photopolymerizable material, preferably a polymer-dispersed liquid crystal material. A laser beam striking the apex of the biprism splits into two beams crossing at an angle which depends on the prism apex angle and the angle of incidence. These crossed beams form an interference pattern at the photopolymer with bright and dark fringes separated by a distance which depends on wavelength and the crossing angle of the two beams. The light triggers a photopolymerization reaction in the bright regions and records a permanent refractive index modulation, a hologram, which serves as a record of the laser interference pattern. Light incident normally on the badge will produce a normal index grating. Light incident at an angle will produce a slanted grating.

Abstract: Ferroelectric materials are disclosed as reversible holographic recording media (25) for use in two-photon recording systems. The ferroelectric materials disclosed herein provide long-lived electronic states intermediate the ferroelectric material's valence and conduction bands. These intermediate states have a sufficiently long life (on the order of 1 to 100 milliseconds) that low-power continuous wave ("cw") lasers (1) can be used to record interference patterns on them. Thus, two-photon holographic recording systems are also disclosed which do not require high-power, short pulse length, mode-locked or Q-switched lasers. Rather, the disclosed holographic recording systems employ visible and near IR cw lasers such as diode lasers.The disclosed two-photon holographic recording systems provide for absorption of a first photon which excites electrons of holographic recording media to an intermediate state.

Abstract: A photosensitive recording material comprising a solvent-soluble, thermosetting epoxy oligomer capable of cationic polymerization, an aliphatic monomer having at least one ethylenically unsaturated bond, the monomer being liquid at normal temperature and pressure, having a boiling point of 100.degree. C. or above at normal pressure and being capable of radical polymerization, a photoinitiator selected from the group consisting of i) a first photoinitiator capable of simultaneously generating a radical species that activates radical polymerization and a Br.o slashed.nsted acid or Lewis acid that activates cationic polymerization, upon exposure to actinic radiation, and ii) a second photoinitiator comprised of a radical polymerization photoinitiator capable of generating a radical species that activates radical polymerization upon exposure to actinic radiation and a cationic polymerization photoinitiator capable of generating a Br.o slashed.

Abstract: An apparatus is disclosed for changing the scale of a pattern printed from a total internal reflection hologram into a photosensitive layer, which apparatus includes means for reconstructing an image from said total internal reflection hologram by illuminating said total internal reflection hologram with a scanning beam and means for moving at least one of the hologram and photosensitive layer such that the magnitude of movement of the hologram relative to the photosensitive layer is equal to that of the scanning beam multiplied by the change of scale required and such that if said change of scale is a magnification the direction of said movement of the hologram relative to the photosensitive layer is the same as that of the scanning beam whereas if said change of scale is a demagnification then the direction of said movement of the hologram relative to the photosensitive layer is opposite to that of the scanning beam, and optionally comprising also means for increasing or reducing the convergence or divergen

Abstract: A hologram forming system for forming holograms on multiple exposures is provided. In this system, a holographic recording medium is exposed to light beams at least twice at incident angles different between exposures. The incident angle during each exposure process is determined in a given relation to the thickness of the holographic recording medium which tends to vary as the exposure process is repeated so that the reconstruction wavelengths match with target values without shifting between image colors during reconstruction of the hologram.

Abstract: Disclosed is a photosensitive composition for volume hologram recording which is used for recording an interference fringe produced by a laser beam or a light having excellent coherence, as fringes having different refractive index. The composition comprising:(a) a cationic polymerizable compound which is liquid at ambient temperature;(b) a radical polymerizable compound;(c) a radical photopolymerization initiator composition sensitized by a laser beam or a light having excellent coherence which has a specific wavelength to polymerize the ingredient (b); and(d) a cationic photopolymerization initiator composition which shows low photosensitivity to the light having a specific wavelength and is sensitized by a light having the other wavelength to polymerize the ingredient (a), wherein an average refractive index of the ingredient (a) is smaller than that of the ingredient (b). A process for producing the photosensitive composition is also disclosed.

Abstract: Rare earth doped ferroelectric materials are disclosed as reversible holographic recording medium (25) for use in two-photon recording systems. Such rare earth elements provide long-lived electronic states intermediate the ferroelectric material's valence and conduction bands. In some cases, these rare earth intermediate states have a sufficiently long life that low-power continuous wave ("cw") lasers (1) can be used to record interference patterns on them. Thus, two-photon holographic recording systems are also disclosed which do not require high-power, short pulse length, mode-locked or Q-switched lasers. Rather, the disclosed holographic recording systems employ cw lasers such as diode lasers. The rare earth dopants include praseodymium, neodymium, dysprosium, holmium, erbium, and thulium. These dopants provide ions having 4f excited states that give rise to absorptions in the near infra-red and visible spectral regions and typically have lifetimes on the order of 0.1 to 1 milliseconds.

Abstract: A duplicating photosensitive material film is brought into close contact with an ND glass reduced in thickness so as to become flexible or a flexible sheet or an ND glass coated with a cushioning layer through an optical contacting liquid containing a surface active agent. In addition, a spacer is interposed between a hologram original plate and a duplicating photosensitive material, and a space defined by the spacer is filled with an optical contacting liquid, thereby regulating the thickness of the optical contacting liquid layer with the spacer. Therefore, when pressure is applied, the optical contacting liquid is uniformly pressed, so that it can be made uniform and thin in thickness. Accordingly, it is possible to prevent a failure of duplication of a hologram image due to undesirable flow of the optical contacting liquid.

Abstract: A hologram comprising a diffraction grating film with an interference fringe recorded thereon, a substrate provided on one side of said diffraction grating film, and cover plates provided on the surfaces of the aforesaid diffraction grating film by use of an adhesive, wherein the lateral face portion of the aforesaid hologram is covered with a water repellent layer, or a hologram comprising a diffraction grating film with an interference fringe recorded thereon and a substrate provided on one side of said diffraction grating film, the surface of the aforesaid diffraction grating film being covered with an adhesive, wherein the aforesaid adhesive contains an epoxy resin mixture consisting of an alicyclic epoxy and novolak type epoxy and an alicyclic acid anhydride type curing agent, a chief ingredient composed of an aromatic epoxy resin(s) and a curing agent comprising a mixture of an alicyclic amine and an aliphatic amine, or a chief ingredient composed of an aromatic epoxy resin(s) and a curing agent compris

Abstract: The preparation of a filter comprises illuminating a photographic material and a mask located at a given distance therefrom with light from the opposite directions to make a hologram and then reproducing an reproduced image of said hologram in the photographic material, thus making it possible to prepare a precise color filter with no need of any close contact of the mask with the photographic material and without causing the mask image to shade off. According to the reproduction of a hologram applicable as a color filter, a master hologram having recorded red, green and blue stripes is located in opposition to a photographic material, and then illuminated with light obtained by mixing the three colors from the photographic material, thus making it possible to reproduce the reproduced image in the photographic material at one exposure operation, while dispensing with a photolithographic step, precise alignment or registration, etc.

Abstract: A method of identifying an object by a machine readable image applied to it in which the image is produced by a plurality of fine particles embossed with a machine readable pattern produced by replicating contact with a diffraction grating having from about 5,000 to about 11,000 grooves per cm.

Abstract: A method for the manufacture of TIR holograms includes the division of an input laser beam into an object beam and a reference beam, the direction of the beams to a holographic recording layer so that the object beam is incident on a surface of the holographic recording layer following transmission through an object mask, so that the reference beam is incident on the other surface of the holographic recording layer at an angle such that following passage through the holographic recording layer it is totally internally reflected back into the holographic recording layer and so that the two beams are superposed at the holographic recording layer, and the displacement of the input laser beam causing the object and reference beams to traverse together the holographic recording layer. The method is especially useful for obtaining a high uniformity of exposure of the holographic recording layer.

Abstract: This invention relates to a process for forming a reflection hologram. A process for forming a volume reflection hologram is provided wherein the formation of secondary holograms is suppressed by the placement of index matched filters contiguous to at least one surface of the photosensitive recording element during formation of the hologram.

Abstract: Disclosed is a method for producing an optical member having excellent optical characteristics. An optical member is composed of a support plate and an optical sheet stuck on said plate via an optical adhesive. The optical adhesive is made sticky after it is coated, including ultraviolet-curing adhesives, epoxy adhesives and their mixtures. To produce the optical member, the optical sheet is formed on the surface of a fixed substrate via a transfer film. The optical adhesive is coated onto the optical sheet, the adhesive is made sticky on the sheet, the fixed substrate is peeled off, the sheet is stuck onto the support plate using the adhesive, and the adhesive is cured.

Abstract: A method of forming e.g. pixel elements on a flat panel display for use as a flat screen for a TV or a computer display includes forming a volume holographic image on a recording medium (21) by interference between an object beam (OB) of coherent light after passage through a mask (22) and a reference beam (RB1) of coherent light which is totally internally reflected at a surface on which the recording medium (21) is disposed, then replacing the mask (22) by the flat panel (26) and forming on a photo-resist or other photosensitive coating thereof an image of the holographic recording using a second reference beam (RB2) replayed in the opposite direction from the first reference beam.

Abstract: A method for selectively altering the refractive index of selected portions of a polyimide material can be used to form a variety of optical components, such as waveguides that can be used as optical interconnections between elements in electronic or microelectronic circuits. The method includes the steps of introducing a dopant which is capable of altering the index of refraction of the film and which will be photoattached to the polyimide material after exposure to radiation, exposing selected portions of the material to radiation, removing at least some of the dopant from the non-irradiated portions of the material, and then exposing the non-irradiated portions of the material to radiation of a type and quantity sufficient to alter the index of refraction of the material.

Abstract: The present invention relates to a three-component optical photorefractive article having improved diffraction efficiency. The article comprises (i) nonphotoconductive polymer, (ii) benzimidazoline, and (iii) a sensitizer.

Abstract: A process for the production of a flexible laminate having an outer and visible layer which provides a holographic effect. A metal foil bearing a holographic image and a layer of plastics size is brought together with a flexible substrate having an outer layer of a plastics material which is comparable with said size. The substrate and foil are brought together with their plastics layers adjacent each other, under conditions of heat and pressure at a level and for a time sufficient to adhere the foil to the substrate but insufficient to destroy the holographic effect.

Abstract: A hologram recording device, which comprises a recording layer of a polymer composition a photoconductive element, a second-order super-polarization element and an electron or hole capturing material and having a non-centro symmetric structure is disclosed. Transparent electrode layers are provided on each side of the recording layer. The hologram recording device is capable of space light modulation and real time hologram recording. Also disclosed is a method of manufacturing the hologram recording device and a method of hologram recording using the device. The hologram recording material is of a polymer composition a photoconductive element, a second-order super-polarization element and an electron or hole capturing element. The polymer composition has a non-centro symmetric structure. The hologram recording device according to the invention comprises a recording layer of a polymer composition including a photoconductive element and a second-order super-polarization element.

Abstract: A method and system for fabricating a multiple holographic element. The method comprises the steps of forming a master multiple holographic element having an absorption grating pattern that produces a given index of refraction pattern across the master multiple holographic element, coating the master holographic element with a layer of a photopolymer, and directing a recording beam to and through the master holographic element and into the photopolymer layer. The absorption grating pattern of the master holographic element modulates the amplitude of the recording beam, and the modulated recording beam causes the monomers of the photopolymer to form a monomer pattern that produces the given index of refraction pattern across the photopolymer layer. The method further comprises the steps of fixing the monomers of the photopolymer layer in that monomer pattern to form thereby a copy of the multiple holographic element, and removing the photopolymer layer from the master holographic element.

Abstract: Holographic images are constructed in a recording material in accordance with a temporal interleaving technique in which a first set of images is constructed for a predetermined first imaging time with a predetermined first time gap being defined between each of the images. Thereafter, in accordance with a subsequent predetermined sequence a subsequent set of images is constructed into the same predetermined location. The image sets have at least one member in common. In one aspect all of the images are constructed into the same predetermined defined region of the holographic recording material (an angle hologram). In another aspect the predetermined defined region into which each of the images is constructed is separate from all other regions of the holographic recording material (a spatial hologram).

Abstract: In microelectronic processing, the method of producing complex, two-dimensional patterns on a photosensitive layer with dimensions in the extreme submicron range. A photosensitive layer is first exposed to two beams of coherent radiation to form an image of a first interference pattern on the surface of the layer. The layer is subsequently exposed to one or more interference pattern(s) that differ from the first interference pattern in some way, such as by varying the incident angle of the beams, the optical intensity, the periodicity, rotational orientation, translational position, by using complex amplitude or phase masks in one or both of the coherent beams, or a combination of the above. Desired regions of the complex pattern thus produced are isolated with a further exposure of the photosensitive layer using any conventional lithography.

Abstract: In microelectronic processing, the method of producing complex, two-dimensional patterns on a photosensitive layer with dimensions in the extreme submicron range. A photosensitive layer is first exposed to two beams of coherent radiation to form an image of a first interference pattern on the surface of the layer. The layer is subsequently exposed to one or more interference pattern(s) that differ from the first interference pattern in some way, such as by varying the incident angle of the beams, the optical intensity, the periodicity, rotational orientation, translational position, by using complex amplitude or phase masks in one or both of the coherent beams, or a combination of the above. Desired regions of the complex pattern thus produced are isolated with a further exposure of the photosensitive layer using any conventional lithography.