Closed Or Loop Gate Patents (Class 438/177)
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Patent number: 9502505Abstract: An integrated circuit die includes a substrate having a first layer of semiconductor material, a layer of dielectric material on the first layer of semiconductor material, and a second layer of semiconductor material on the layer of dielectric material. An extended channel region of a transistor is positioned in the second layer of semiconductor material, interacting with a top surface, side surfaces, and potentially portions of a bottom surface of the second layer of semiconductor material. A gate dielectric is positioned on a top surface and on the exposed side surface of the second layer of semiconductor material. A gate electrode is positioned on the top surface and the exposed side surface of the second layer of semiconductor material.Type: GrantFiled: December 31, 2014Date of Patent: November 22, 2016Assignees: STMICROELECTRONICS, INC., STMICROELECTRONICS (CROLLES 2) SASInventors: Qing Liu, Thomas Skotnicki
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Patent number: 8940602Abstract: A FinFET structure which includes a bulk semiconductor substrate; semiconductor fins extending from the bulk semiconductor substrate, each of the semiconductor fins having a top portion and a bottom portion such that the bottom portion of the semiconductor fins is doped and the top portion of the semiconductor fins is undoped; a portion of the bulk semiconductor substrate directly underneath the plurality of semiconductor fins being doped to form an n+ or p+ well; and an oxide formed between the bottom portions of the fins. Also disclosed is a method for forming a FinFET device.Type: GrantFiled: April 11, 2013Date of Patent: January 27, 2015Assignee: International Business Machines CorporationInventors: Veeraraghavan S. Basker, Effendi Leobandung, Tenko Yamashita, Chun-Chen Yeh
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Patent number: 8916427Abstract: A semiconductor device may be formed by forming a silicon-containing gate dielectric layer over a semiconductor layer. A gate metal layer is formed over the gate dielectric layer; the gate metal layer includes 2 atomic percent to 10 atomic percent silicon during formation. The gate metal layer is patterned to form a metal gate. Source and drain contact holes are subsequently formed, and contact metal is formed and patterned in the contact holes. A subsequent contact anneal heats the contact metal and gate for at least 30 seconds at a temperature of at least 750° C.Type: GrantFiled: May 3, 2013Date of Patent: December 23, 2014Assignee: Texas Instruments IncorporatedInventors: Asad Mahmood Haider, Jungwoo Joh
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Patent number: 8912612Abstract: A FinFET structure which includes: silicon fins on a semiconductor substrate, each silicon fin having two sides and a horizontal surface; a gate wrapping around at least one of the silicon fins, the gate having a first surface and an opposing second surface facing the at least one of the silicon fins; a hard mask on a top surface of the gate; a silicon nitride layer formed in each of the first and second surfaces so as to be below and in direct contact with the hard mask on the top surface of the gate; spacers on the gate and in contact with the silicon nitride layer; and epitaxially deposited silicon on the at least one of the silicon fins so as to form a raised source/drain.Type: GrantFiled: August 30, 2013Date of Patent: December 16, 2014Assignee: International Business Machines CorporationInventors: Veeraraghavan S. Basker, Sanjay Mehta, Tenko Yamashita, Chun-Chen Yeh
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Patent number: 8906759Abstract: A method of forming a FinFET structure which includes forming fins on a semiconductor substrate; forming a gate wrapping around at least one of the fins, the gate having a first surface and an opposing second surface facing the fins; depositing a hard mask on a top of the gate; angle implanting nitrogen into the first and second surfaces of the gate so as to form a nitrogen-containing layer in the gate that is below and in direct contact with the hard mask on top of the gate; forming spacers on the gate and in contact with the nitrogen-containing layer; and epitaxially depositing silicon on the at least one fin so as to form a raised source/drain. Also disclosed is a FinFET structure.Type: GrantFiled: February 25, 2013Date of Patent: December 9, 2014Assignee: International Business Machines CorporationInventors: Veeraraghavan S. Basker, Sanjay Mehta, Tenko Yamashita, Chun-Chen Yeh
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Patent number: 8895370Abstract: A vertical conduction power device includes respective gate, source and drain areas formed in an epitaxial layer on a semiconductor substrate. The respective gate, source and drain metallizations are formed by a first metallization level. The gate, source and drain terminals are formed by a second metallization level. The device is configured as a set of modular areas extending parallel to each other. Each modular area has a rectangular elongate source area perimetrically surrounded by a gate area, and a drain area defined by first and second regions. The first regions of the drain extend parallel to one another and separate adjacent modular areas. The second regions of the drain area extend parallel to one another and contact ends of the first regions of the drain area.Type: GrantFiled: September 30, 2013Date of Patent: November 25, 2014Assignee: STMicroelectronics S.R.L.Inventors: Ferruccio Frisina, Giuseppe Ferla, Angelo Magri′
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Patent number: 8361849Abstract: A method of fabricating a semiconductor device in which a plurality of conductive lines having a fine pitch and a uniform thickness can be formed is provided. The method includes forming a plurality of first conductive patterns in a insulation layer as closed curves, forming a plurality of mask patterns on the insulation layer, the mask patterns exposing end portions of each of the first conductive patterns, and forming a plurality of second conductive patterns in the insulation layer as lines by removing the end portions of each of the first conductive patterns.Type: GrantFiled: July 15, 2011Date of Patent: January 29, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Yong-Hwan Ryu, Jun Seo, Eun-Young Kang, Jae-Seung Hwang, Sung-Un Kwon
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Patent number: 8329535Abstract: A memory device having at least one multi-level memory cell is disclosed, and each multi-level memory cell configured to store n multiple bits, where n is an integer, wherein the multiple bits are stored in a charge storage layer trapping charge carriers injected by application of a voltage to set or reset a threshold voltage Vt of the memory cell to one of 2n levels. Each memory cell may be programmed to one of 2n multiple levels, wherein each level represents n multiple bits.Type: GrantFiled: June 11, 2007Date of Patent: December 11, 2012Assignee: MACRONIX International Co., Ltd.Inventor: Chao-I Wu
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Patent number: 8148219Abstract: A circuit with dielectric thicknesses is presented that includes a low-pass filter including one or more semiconductor devices having a thick gate oxide layer, while further semiconductor devices of the circuit have thin gate oxide layers. The low-pass filter semiconductor device includes an N-type substrate, a P-type region formed on the N-type substrate, a thick gate oxide layer formed over the P-type region, a P+ gate electrode formed over the thick gate oxide layer and coupled to a first voltage supply line, and P+ pick-up terminals formed in the P-type region adjacent the gate electrode and coupled to a second voltage supply line. The low-pass filter semiconductor device acts as a capacitor, whereby a gate-to-substrate voltage is maintained at less than zero volts to maintain a stable control voltage for the circuit.Type: GrantFiled: June 15, 2009Date of Patent: April 3, 2012Assignee: Broadcom CorporationInventors: Derek Tam, Jasmine Cheng, Jungwoo Song, Takayuki Hayashi
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Patent number: 8124961Abstract: A single electron transistor includes source/drain layers disposed apart on a substrate, at least one nanowire channel connecting the source/drain layers, a plurality of oxide channel areas in the nanowire channel, the oxide channel areas insulating at least one portion of the nanowire channel, a quantum dot in the portion of the nanowire channel insulated by the plurality of oxide channel areas, and a gate electrode surrounding the quantum dot.Type: GrantFiled: June 3, 2011Date of Patent: February 28, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Sung-Dae Suk, Kyoung-Hwan Yeo, Ming Li, Yun-Young Yeoh
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Patent number: 8008142Abstract: A Schottky barrier diode comprises a doped guard ring having a doping of a second conductivity type in a semiconductor-on-insulator (SOI) substrate. The Schottky barrier diode further comprises a first-conductivity-type-doped semiconductor region having a doping of a first conductivity type, which is the opposite of the second conductivity type, on one side of a dummy gate electrode and a Schottky barrier structure surrounded by the doped guard ring on the other side. A Schottky barrier region may be laterally surrounded by the dummy gate electrode and the doped guard ring. The doped guard ring includes an unmetallized portion of a gate-side second-conductivity-type-doped semiconductor region having a doping of a second conductivity type. A Schottky barrier region may be laterally surrounded by a doped guard ring including a gate-side doped semiconductor region and a STI-side doped semiconductor region. Design structures for the inventive Schottky barrier diode are also provided.Type: GrantFiled: August 10, 2009Date of Patent: August 30, 2011Assignee: International Business Machines CorporationInventors: Alan B. Botula, Alvin J. Joseph, Alan D. Norris, Robert M. Rassel, Yun Shi
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Patent number: 7989279Abstract: A method of fabricating a semiconductor device in which a plurality of conductive lines having a fine pitch and a uniform thickness can be formed is provided. The method includes forming a plurality of first conductive patterns in a insulation layer as closed curves, forming a plurality of mask patterns on the insulation layer, the mask patterns exposing end portions of each of the first conductive patterns, and forming a plurality of second conductive patterns in the insulation layer as lines by removing the end portions of each of the first conductive patterns.Type: GrantFiled: June 10, 2008Date of Patent: August 2, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Yong-Hwan Ryu, Jun Seo, Eun-Young Kang, Jae-Seung Hwang, Sung-Un Kwon
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Patent number: 7910413Abstract: A method of manufacturing a fin structure comprises forming a first structure of a first material type on a wafer and forming a buried channel of a second material adjacent sidewalls of the first structure. The second material type is different than the first material type. The structure includes a first structure and a buried channel.Type: GrantFiled: December 20, 2007Date of Patent: March 22, 2011Assignee: International Business Machines CorporationInventor: Huilong Zhu
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Patent number: 7560347Abstract: A field effect transistor is formed having wrap-around, vertically-aligned, dual gate electrodes. Starting with a silicon-on-insulator (SOI) structure having a buried silicon island, a vertical reference edge is defined, by creating a cavity within the SOI structure, and used during two etch-back steps that can be reliably performed. The first etch-back removes a portion of an oxide layer for a first distance over which a gate conductor material is then applied. The second etch-back removes a portion of the gate conductor material for a second distance. The difference between the first and second distances defines the gate length of the eventual device. After stripping away the oxide layers, a vertical gate electrode is revealed that surrounds the buried silicon island on all four side surfaces.Type: GrantFiled: May 2, 2008Date of Patent: July 14, 2009Assignee: International Business Machines CorporationInventors: Toshiharu Furukawa, Mark Charles Hakey, David Vaclav Horak, Charles William Koburger, III, Peter H. Mitchell
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Patent number: 7439104Abstract: A semiconductor device with an increased channel length and a method for fabricating the same are provided. The semiconductor device includes: a substrate with an active region including a planar active region and a prominence active region formed on the planar active region; a gate insulation layer formed over the active region; and a gate structure including at least one gate lining layer encompassing the prominence active region on the gate insulation layer.Type: GrantFiled: October 21, 2005Date of Patent: October 21, 2008Assignee: Hynix Semiconductor Inc.Inventor: Jin-Ki Jung
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Patent number: 7435653Abstract: A field effect transistor is formed having wrap-around, vertically-aligned, dual gate electrodes. Starting with a silicon-on-insulator (SOI) structure having a buried silicon island, a vertical reference edge is defined, by creating a cavity within the SOI structure, and used during two etch-back steps that can be reliably performed. The first etch-back removes a portion of an oxide layer for a first distance over which a gate conductor material is then applied. The second etch-back removes a portion of the gate conductor material for a second distance. The difference between the first and second distances defines the gate length of the eventual device. After stripping away the oxide layers, a vertical gate electrode is revealed that surrounds the buried silicon island on all four side surfaces.Type: GrantFiled: April 13, 2007Date of Patent: October 14, 2008Assignee: International Business Machines CorporationInventors: Toshiharu Furukawa, Mark Charles Hakey, David Vaclav Horak, Charles William Koburger, III, Peter H. Mitchell
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Patent number: 7220636Abstract: A variety of processes are disclosed for controlling NDR characteristics for an NDR element, such as peak-to-valley ratio (PVR), NDR onset voltage (VNDR) and related parameters. The processes are based on conventional semiconductor manufacturing operations so that an NDR device can be fabricated using silicon based substrates and along with other types of devices.Type: GrantFiled: November 4, 2004Date of Patent: May 22, 2007Assignee: Synopsys, Inc.Inventor: Tsu-Jae King
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Patent number: 6849483Abstract: A charge trapping device, and a method of forming the same is disclosed. Charge traps are optimally distributed through a trapping region based on controlling various conventional processing operations, such as an implant, an anneal, an insulator film deposition, and the like. In some embodiments, FETs can be configured to include a negative differential resistance (NDR) characteristic when they utilize a particular charge trap energy and distribution.Type: GrantFiled: December 9, 2002Date of Patent: February 1, 2005Assignee: Progressant Technologies, Inc.Inventor: Tsu-Jae King
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Patent number: 6759286Abstract: A method of fabricating a gate structure of a field effect transistor, comprising forming a hard mask, etching a gate electrode, and contemporaneously forming a gate dielectric and removing the hard mask.Type: GrantFiled: September 16, 2002Date of Patent: July 6, 2004Inventors: Ajay Kumar, Padmapani C. Nallan