Complementary Junction Gate Field Effect Transistors Patents (Class 438/188)
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Patent number: 12111284Abstract: In one example, a gas sensor is provided. The gas sensor includes a substrate, an isolation region formed on outer edges of the substrate, a micro-heater formed on the isolation region, a sensing layer formed on the substrate inside of the isolation region, and a source and drain formed around the sensing layer and inside of the isolation region.Type: GrantFiled: April 23, 2020Date of Patent: October 8, 2024Assignee: The Regents of the University of CaliforniaInventors: Niharika Gupta, Ali Javey, Hossain Mohammad Fahad
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Patent number: 11393718Abstract: A method for forming a semiconductor structure includes forming a first cap layer over a metal layer. The method also includes patterning the metal layer and the first cap layer to form openings exposing the gate structure, and forming a first dielectric layer in the openings, and patterning the first cap layer to form a via cap plug over the metal layer. The method also includes forming a second dielectric layer over the via cap plug and the metal layer, and forming a trench in the second dielectric material to expose the via cap plug. The method also includes removing the via cap plug to enlarge the trench and filling the trench with a conductive material.Type: GrantFiled: July 30, 2020Date of Patent: July 19, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hwei-Jay Chu, Chieh-Han Wu, Cheng-Hsiung Tsai, Chih-Wei Lu, Chung-Ju Lee
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Patent number: 10672877Abstract: An apparatus includes one or more field effect transistors configured as a switch. Each of the one or more field effect transistors comprises one or more source diffusions, one or more drain diffusions, and one or more gate fingers. Each of the one or more gate fingers is disposed between a source diffusion and a drain diffusion. A first electrical connection to the one or more source diffusions is made using one or more source electrodes that extend from a first end for a first length along a long axis of the source diffusions. A second electrical connection to the one or more drain diffusions is made using one or more drain electrodes that extend from a second end for a second length along a long axis of the drain diffusions. The first length of the one or more source electrodes and the second length of the one or more drain electrodes are generally selected to avoid juxtaposition of the one or more source electrodes and the one or more drain electrodes.Type: GrantFiled: February 5, 2019Date of Patent: June 2, 2020Assignee: Integrated Device Technology, Inc.Inventors: Roberto Aparicio Joo, Shawn Bawell
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Patent number: 9741844Abstract: Provided is a semiconductor power device. The semiconductor power device includes a well disposed in a substrate, a gate overlapping the well, a source region disposed at one side of the gate, a buried layer disposed in the well, and a drain region or a drift region contacting the buried layer.Type: GrantFiled: December 20, 2013Date of Patent: August 22, 2017Assignee: Magnachip Semiconductor, Ltd.Inventors: Young Bae Kim, Jin Woo Moon, Francois Hebert
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Patent number: 9455332Abstract: The Rds*Cgd figure of merit (FOM) of a laterally diffused metal oxide semiconductor (LDMOS) transistor is improved by forming the drain drift region with a number of dopant implants at a number of depths, and forming a step-shaped back gate region with a number of dopant implants at a number of depths to adjoin the drain drift region.Type: GrantFiled: November 30, 2014Date of Patent: September 27, 2016Assignee: TEXAS INSTRUMENTS INCORPORATEDInventor: Jun Cai
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Power source apparatus equipped with a service plug and vehicle carrying that power source apparatus
Patent number: 9130220Abstract: A power source apparatus provided with battery blocks (2) that have a plurality of battery cells (1) connected together, an outer case (3) that houses the battery blocks and/or electrical components connected to the battery blocks, a socket (4) connected in series with the battery blocks and disposed on the outer case, and a service plug (5) that connects with the socket in a removable manner. The service plug connects with the socket to connect the service plug in series with the batteries via the socket. The outer case is provided with a socket and service plug thermal isolation region (8) sectioned-off by a heat-shielding plate (7), and the socket and service plug are disposed in the thermal isolation region.Type: GrantFiled: December 20, 2011Date of Patent: September 8, 2015Assignee: SANYO ELECTRIC CO., LTD.Inventors: Wataru Okada, Shinsuke Nakamura, Akinobu Wakabayashi, Tomoyuki Ohmura -
Patent number: 9024365Abstract: A high voltage junction field effect transistor and a manufacturing method thereof are provided. The high voltage junction field effect transistor includes a base, a drain, a source and a P type top layer. The drain and the source are disposed above the base. A channel is formed between the source and the drain. The P type top layer is disposed above the channel.Type: GrantFiled: September 10, 2012Date of Patent: May 5, 2015Assignee: Macronix International Co., Ltd.Inventors: Li-Fan Chen, Wing-Chor Chan, Jeng Gong
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Patent number: 8987120Abstract: The present invention relates to a flat panel display device comprising a polysilicon thin film transistor and a method of manufacturing the same. Grain sizes of polysilicon grains formed in active channel regions of thin film transistors of a driving circuit portion and a pixel portion of the flat panel display device are different from each other. Further, the flat panel display device comprising P-type and N-type thin film transistors having different particle shapes from each other.Type: GrantFiled: April 16, 2013Date of Patent: March 24, 2015Assignee: Samsung Display Co., Ltd.Inventors: Ji-Yong Park, Jae-Bon Koo, Hye-Hyang Park, Ki-Yong Lee, Ul-Ho Lee
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Patent number: 8962397Abstract: At least one N-well implant having a different doping level is formed in a silicon substrate by first etching the substrate with an alignment target for aligning future process masks thereto. This alignment target is outside of any active device area. By using at least one N-well implant having a different doping level in combination with the substrate, a graded junction in the drift area of a metal oxide semiconductor (MOS) field effect transistor (FET) can be created and a pseudo Ldd structure may be realized thereby.Type: GrantFiled: July 20, 2012Date of Patent: February 24, 2015Assignee: Microchip Technology IncorporatedInventors: Gregory Dix, Leighton E. McKeen, Ian Livingston, Roger Melcher, Rohan Braithwaite
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Patent number: 8871583Abstract: A non-planar JFET device having a thin fin structure is provided. A fin is formed projecting upwardly from or through a top surface of a substrate, where the fin has a first semiconductor layer portion formed from a first semiconductor material of a first conductivity type. The first semiconductor layer portion has a source region and a drain region, a channel region extending between the source region and the drain region. Two or more channel control regions are formed adjoining the channel region for generating charge depletion zones at and extending into the channel region for thereby controlling current conduction through the channel region. A gate is provided so as to adjoin and short together the at least two channel control regions from the outer sides of the channel control regions.Type: GrantFiled: November 13, 2012Date of Patent: October 28, 2014Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventor: Mieno Fumitake
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Patent number: 8722477Abstract: A cascoded junction field transistor (JFET) device comprises a first stage high voltage JFET cascoded to a second stage low voltage JFET wherein one of the first and second stages JFET is connected to a drain electrode of another JFET stage.Type: GrantFiled: January 14, 2012Date of Patent: May 13, 2014Assignee: Alpha and Omega Semiconductor IncorporatedInventor: Hideaki Tsuchiko
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Patent number: 8716764Abstract: A semiconductor device and a manufacturing method thereof are provided. The fin semiconductor device includes a fin formed on a substrate and an insulating material layer formed on the substrate and surrounding the fin. The fin has a semiconductor layer that has a source region portion and a drain region portion. The fin includes a first channel control region, a second channel control region, and a channel region between the two channel control regions, all of which are positioned between the source region portion and the drain region portion. The two channel control regions may have the same conductivity type, different from the channel region.Type: GrantFiled: May 17, 2013Date of Patent: May 6, 2014Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventor: Mieno Fumitake
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Patent number: 8481372Abstract: In accordance with the present techniques, there is provided a JFET device structures and methods for fabricating the same. Specifically, there is provided a transistor including a semiconductor substrate having a source and a drain. The transistor also includes a doped channel formed in the semiconductor substrate between the source and the drain, the channel configured to pass current between the source and the drain. Additionally, the transistor has a gate comprising a semiconductor material formed over the channel and dielectric spacers on each side of the gate. The source and the drain are spatially separated from the gate so that the gate is not over the drain and source.Type: GrantFiled: December 11, 2008Date of Patent: July 9, 2013Assignee: Micron Technology, Inc.Inventor: Chandra Mouli
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Patent number: 8480926Abstract: Disclosed is a visible light-transmissive liquid-crystalline compound having good hole and electron-transport characteristics and useful as an organic semiconductor material. The compound is represented by a formula (1): wherein R independently represents hydrogen, or alkyl having from 1 to 24 carbon atoms, and any —CH2— in the alkyl may be replaced by —O—, —S—, —CO— or —SiH2—, any —(CH2)2— may be replaced by —CH?CH— or —C?C—, and any hydrogen may be replaced by halogen; Ar represents naphthylene, anthrylene, phenanthrylene, or phenylene; and every hydrogen in phenylene is replaced by halogen, and any hydrogen in naphthylene, anthrylene and phenanthrylene may be replaced by halogen.Type: GrantFiled: July 4, 2011Date of Patent: July 9, 2013Assignee: JNC CorporationInventors: Yasuyuki Sasada, Tetsuharu Miwa
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Patent number: 8461049Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a gate structure thereon; forming a first cap layer on a surface of the substrate and sidewall of the gate structure; forming a second cap layer on the first cap layer; forming a third cap layer on the second cap layer; performing an etching process to partially remove the third cap layer, the second cap layer, and the first cap layer to form a first spacer and a second spacer on the sidewall of the gate structure; and forming a contact etch stop layer (CESL) on the substrate to cover the second spacer, wherein the third cap layer and the CESL comprise same deposition condition.Type: GrantFiled: October 11, 2011Date of Patent: June 11, 2013Assignee: United Microelectronics Corp.Inventors: Chu-Chun Chang, Chun-Mao Chiou, Chiu-Te Lee
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Patent number: 8460990Abstract: Provided is a CMOS transistor formed using Ge condensation and a method of fabricating the same. The CMOS transistor may include an insulating layer, a silicon layer on the insulating layer and including a p-MOS transistor region and an n-MOS transistor region, a first gate insulating layer and a first gate on a channel region of the p-MOS transistor region, and a second gate insulating layer and a second gate on a channel region of the n-MOS transistor region, wherein a source region and a drain region of the p-MOS transistor region may be tensile-strained due to Ge condensation, and the channel region of the n-MOS transistor region may be tensile-strained due to the Ge condensation.Type: GrantFiled: May 2, 2012Date of Patent: June 11, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Jun-youn Kim, Joong S. Jeon
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Publication number: 20130134485Abstract: A non-planar JFET device having a thin fin structure is provided. A fin is formed projecting upwardly from or through a top surface of a substrate, where the fin has a first semiconductor layer portion formed from a first semiconductor material of a first conductivity type. The first semiconductor layer portion has a source region and a drain region, a channel region extending between the source region and the drain region. Two or more channel control regions are formed adjoining the channel region for generating charge depletion zones at and extending into the channel region for thereby controlling current conduction through the channel region. A gate is provided so as to adjoin and short together the at least two channel control regions from the outer sides of the channel control regions.Type: ApplicationFiled: November 13, 2012Publication date: May 30, 2013Applicants: SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORPORATIONInventors: Semiconductor Manufacturing International Corpor, Semiconductor Manufacturing International Corpor
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Patent number: 8435845Abstract: A method of fabricating a semiconductor device that includes forming a replacement gate structure on a portion of a semiconductor substrate, wherein source regions and drain regions are formed in opposing sides of the replacement gate structure. A dielectric is formed on the semiconductor substrate having an upper surface that is coplanar with an upper surface of the replacement gate structure. The replacement gate structure is removed to provide an opening to an exposed portion of the semiconductor substrate. A functional gate conductor is epitaxially grown within the opening in direct contact with the exposed portion of the semiconductor substrate. The method is applicable to planar metal oxide semiconductor field effect transistors (MOSFETs) and fin field effect transistors (finFETs).Type: GrantFiled: April 6, 2011Date of Patent: May 7, 2013Assignee: International Business Machines CorporationInventors: Tak H. Ning, Kangguo Cheng, Ali Khakifirooz, Pranita Kulkarni
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Patent number: 8361891Abstract: Methods for consistently reproducing channels of small length are disclosed. An ink composition comprising silver nanoparticles and a surface modification agent is used. The surface modification agent may also act as a stabilizer for the nanoparticles. A first line is printed which forms a modified region around the first line. A second line is printed, which is repelled from the modified region. As a result, a channel between the first line and the second line is formed.Type: GrantFiled: December 11, 2008Date of Patent: January 29, 2013Assignee: Xerox CorporationInventors: Yiliang Wu, Jason S. Doggart, Ping Liu, Shiping Zhu
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Patent number: 8330219Abstract: A semiconductor device includes: a semiconductor substrate having a first conductivity type; a well having a second conductivity type and provided inside the semiconductor substrate; a first impurity region having the first conductivity type and provided within the well; a second impurity region having the second conductivity type, provided inside the well and away from the first impurity region; and a third impurity region having a first conductivity type, provided surrounding the well and away from the second impurity region. In this semiconductor device, the well is formed to be deeper than the first impurity region, the second impurity region, and the third impurity region, in a thickness direction of the semiconductor substrate; and a minimum distance between the first impurity region and the second impurity region is smaller than a minimum distance between the second impurity region and the third impurity region.Type: GrantFiled: June 25, 2009Date of Patent: December 11, 2012Assignee: Seiko Epson CorporationInventors: Tomoyuki Furuhata, Hideyuki Akanuma, Hiroaki Nitta
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Publication number: 20120309142Abstract: Junction field effect transistors (JFETs) are shown to be a viable replacement for metal oxide semiconductor field effect transistors (MOSFETs) for gate lengths of less than about 40 nm, providing an alternative to the gate leakage problems presented by scaled down MOSFETs. Integrated circuit designs can have complementary JFET (CJFET) logic cells substituted for existing MOSFET-based logic cells to produce revised integrated circuit designs. Integrated circuits can include JFETS where the channel comprises a wide bandgap semiconductor material and the gate comprises a narrow bandgap semiconductor material. Mixtures of JFET and MOSFET transistors can be included on an integrated circuit design.Type: ApplicationFiled: July 27, 2012Publication date: December 6, 2012Applicant: The University of Utah Research FoundationInventors: Mark S. Miller, Justin B. Jackson, Divesh Kapoor, Justin Millis
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Patent number: 8288798Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes forming a buffer layer over a substrate, the buffer layer containing a first compound semiconductor that includes elements from one of: III-V families of a periodic table; and II-VI families of the periodic table. The method includes forming a channel layer over the buffer layer. The channel layer contains a second compound semiconductor that includes elements from the III-V families of the periodic table. The method includes forming a gate over the channel layer. The method includes depositing impurities on regions of the channel layer on either side of the gate. The method includes performing an annealing process to activate the impurities in the channel layer.Type: GrantFiled: January 19, 2011Date of Patent: October 16, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Matthias Passlack
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Patent number: 8268688Abstract: A method for producing VDMOS transistors in which a specific layer arrangement and a specific method sequence allow setting up an improved gate contact when simultaneously producing source and gate contacts using a single contact hole mask (photo mask).Type: GrantFiled: April 10, 2006Date of Patent: September 18, 2012Assignee: X-Fab Semiconductor Foundries AGInventors: Jochen Doehnel, Siegfried Hering
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Patent number: 8264083Abstract: A first impurity diffusion layer in a memory cell portion and a second impurity diffusion layer in a peripheral circuit portion are provided in a surface of a semiconductor substrate and having upper faces substantially flush with each other. First and second insulating films are formed to cover the upper faces of the impurity diffusion layers, and having substantially uniform film thicknesses. A first metal plug is formed in the insulating films, and connected to the first impurity diffusion layer. A second metal plug is formed in the first insulating film, to have a lower height than the first metal plug, and is connected to the second impurity diffusion layer. A first metal interconnection is connected to an upper end portion of the first metal plug, and having an upper face embedded in and flush with the second insulating film. A second metal interconnection is connected to an upper end portion of the second metal plug, and having an upper face embedded in and flush with the second insulating film.Type: GrantFiled: August 27, 2009Date of Patent: September 11, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Hidefumi Nawata, Kikuko Sugimae, Akihiro Kajita, Takamichi Tsuchiya
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Patent number: 8253168Abstract: Junction field effect transistors (JFETs) are shown to be a viable replacement for metal oxide semiconductor field effect transistors (MOSFETs) for gate lengths of less than about 40 nm, providing an alternative to the gate leakage problems presented by scaled down MOSFETs. Integrated circuit designs can have complementary JFET (CJFET) logic cells substituted for existing MOSFET-based logic cells to produce revised integrated circuit designs. Integrated circuits can include JFETS where the channel comprises a wide bandgap semiconductor material and the gate comprises a narrow bandgap semiconductor material. Mixtures of JFET and MOSFET transistors can be included on an integrated circuit design.Type: GrantFiled: June 29, 2010Date of Patent: August 28, 2012Assignee: University of Utah Research FoundationInventors: Mark S. Miller, Justin B. Jackson, Divesh Kapoor, Justin Millis
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Patent number: 8198147Abstract: In a replacement gate approach for forming high-k metal gate electrodes in semiconductor devices, a tapered configuration of the gate openings may be accomplished by using a tensile stressed dielectric material provided laterally adjacent to the gate electrode structure. Consequently, superior deposition conditions may be achieved while the tensile stress component may be efficiently used for the strain engineering in one type of transistor. Furthermore, an additional compressively stressed dielectric material may be applied after providing the replacement gate electrode structures.Type: GrantFiled: August 11, 2010Date of Patent: June 12, 2012Assignee: GlobalFoundries, Inc.Inventors: Frank Feustel, Kai Frohberg, Thomas Werner
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Publication number: 20120142149Abstract: A cascoded junction field transistor (JFET) device comprises a first stage high voltage JFET cascoded to a second stage low voltage JFET wherein one of the first and second stages JFET is connected to a drain electrode of another JFET stage.Type: ApplicationFiled: January 14, 2012Publication date: June 7, 2012Inventor: Hideaki Tsuchiko
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Patent number: 8115256Abstract: A semiconductor device includes an inverter having an NMOSFET and a PMOSFET having sources, drains and gate electrodes respectively, the drains being connected to each other and the gate electrodes being connected to each other, and a pnp bipolar transistor including a collector (C), a base (B) and an emitter (E), the base (B) receiving an output of the inverter.Type: GrantFiled: August 31, 2007Date of Patent: February 14, 2012Assignee: Sanyo Electric Co., Ltd.Inventors: Haruki Yoneda, Hideaki Fujiwara
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Patent number: 8071396Abstract: An embedded memory required for a high performance, multifunction SOC, and a method of fabricating the same are provided. The memory includes a bipolar transistor, a phase-change memory device and a MOS transistor, adjacent and electrically connected, on a substrate. The bipolar transistor includes a base composed of SiGe disposed on a collector. The phase-change memory device has a phase-change material layer which is changed from an amorphous state to a crystalline state by a current, and a heating layer composed of SiGe that contacts the lower surface of the phase-change material layer.Type: GrantFiled: November 9, 2010Date of Patent: December 6, 2011Assignee: Electronics and Telecommunications Research InstituteInventors: Seung-Yun Lee, Sangouk Ryu, Sung Min Yoon, Young Sam Park, Kyu-Jeong Choi, Nam-Yeal Lee, Byoung-Gon Yu
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Patent number: 8062966Abstract: Semiconductor devices and fabrication methods are provided, in which metal transistor replacement gates are provided for CMOS transistors. The process provides dual or differentiated work function capability (e.g., for PMOS and NMOS transistors) in CMOS processes.Type: GrantFiled: December 24, 2009Date of Patent: November 22, 2011Assignee: Texas Instruments IncorporatedInventors: Freido Mehrad, James J. Chambers, Shaofeng Yu
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Patent number: 8063448Abstract: A memory device includes a multi gate field effect transistor (MuGFET) having a fin with a contact area. A programmable memory element abuts the fin contact area.Type: GrantFiled: March 16, 2007Date of Patent: November 22, 2011Assignee: Infineon Technologies AGInventors: Christian Pacha, Tim Schönauer, Michael Kund
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Patent number: 8058131Abstract: A semiconductor integrated circuit device includes a substrate, a nonvolatile memory device formed in a memory cell region of the substrate, and a semiconductor device formed in a device region of the substrate. The nonvolatile memory device has a multilayer gate electrode structure including a tunnel insulating film and a floating gate electrode formed thereon. The floating gate electrode has sidewall surfaces covered with a protection insulating film. The semiconductor device has a gate insulating film and a gate electrode formed thereon. A bird's beak structure is formed of a thermal oxide film at an interface of the tunnel insulating film and the floating gate electrode, the bird's beak structure penetrating into the floating gate electrode along the interface from the sidewall faces of the floating gate electrode, and the gate insulating film is interposed between the substrate and the gate electrode to have a substantially uniform thickness.Type: GrantFiled: November 18, 2010Date of Patent: November 15, 2011Assignee: Fujitsu Semiconductor LimitedInventors: Hiroshi Hashimoto, Koji Takahashi
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Patent number: 8053843Abstract: A semiconductor device for ESD protection includes a semiconductor substrate of a first conductivity type and a well region of a second conductivity type formed within the substrate. The well region is characterized by a first depth. The device includes an MOS transistor, a first bipolar transistor, and a second bipolar transistor. The MOS transistor includes a first lightly doped drain (LDD) region of a second depth within the well region, and a drain region and an emitter region within in the first LDD region. The emitter region is characterized by a second conductivity type. The first bipolar transistor is associated with the emitter region, the first LDD region, and the well region, and is characterized by a first trigger voltage. The second bipolar transistor is associated with the first LDD region, the well region, and the substrate, and is characterized by a second trigger voltage.Type: GrantFiled: June 11, 2009Date of Patent: November 8, 2011Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventors: Chi Kang Liu, Ta Lee Yu, Quan Li
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Patent number: 7974058Abstract: A group protection module for a switchgear arrangement is provided in order to protect a group of load feeders, each having a contactor for connecting or disconnecting a respective load. The group protection module has a circuit breaker for providing short-circuit protection, said circuit breaker being connected to a supply-side input and to a load-side output of the group protection module for connection to a power supply system and for connecting the group of load feeders. The group protection module has a safety evaluation unit via which the circuit breaker can be tripped if a status signal detectable by the respective load feeders indicates that one of the contactors of the load feeders can no longer be de-energized. The group protection module is implemented as a constructional unit.Type: GrantFiled: July 10, 2008Date of Patent: July 5, 2011Assignee: Siemens AktiengesellschaftInventors: Guillaume Maigret, Martin Moosburger, Andreas Röβler
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Publication number: 20110079825Abstract: A cascoded junction field transistor (JFET) device comprises a first stage high voltage JFET cascoded to a second stage low voltage JFET wherein one of the first and second stages JFET is connected to a drain electrode of another JFET stage.Type: ApplicationFiled: December 2, 2010Publication date: April 7, 2011Inventor: Hideaki Tsuchiko
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Patent number: 7915107Abstract: This invention describes a method of building complementary logic circuits using junction field effect transistors in silicon. This invention is ideally suited for deep submicron dimensions, preferably below 65 nm. The basis of this invention is a complementary Junction Field Effect Transistor which is operated in the enhancement mode. The speed-power performance of the JFETs becomes comparable with the CMOS devices at sub-70 nanometer dimensions. However, the maximum power supply voltage for the JFETs is still limited to below the built-in potential (a diode drop). To satisfy certain applications which require interface to an external circuit driven to higher voltage levels, this invention includes the structures and methods to build CMOS devices on the same substrate as the JFET devices.Type: GrantFiled: June 26, 2009Date of Patent: March 29, 2011Assignee: SuVolta, Inc.Inventor: Ashok K. Kapoor
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Patent number: 7910417Abstract: A Junction Field Effect Transistor (JFET) can be fabricated with a well region that include a channel region having an average dopant concentration substantially less the average doping concentration of the remaining portions of the well region. The lower average doping concentration of channel region compared to the remaining portions of the well region reduces the pinch-off voltage of the JFET.Type: GrantFiled: July 21, 2008Date of Patent: March 22, 2011Assignee: Texas Instruments IncorporatedInventors: Philip L. Hower, David A. Walch, John Lin, Steven L. Merchant
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Patent number: 7888195Abstract: A method for fabricating a transistor having metal gate is disclosed. First, a substrate is provided, in which the substrate includes a first transistor region and a second transistor region. A plurality of dummy gates is formed on the substrate, and a dielectric layer is deposited on the dummy gate. The dummy gates are removed to form a plurality of openings in the dielectric layer. A high-k dielectric layer is formed to cover the surface of the dielectric layer and the opening, and a cap layer is formed on the high-k dielectric layer thereafter. The cap layer disposed in the second transistor region is removed, and a metal layer is deposited on the cap layer of the first transistor region and the high-k dielectric layer of the second transistor region. A conductive layer is formed to fill the openings of the first transistor region and the second transistor region.Type: GrantFiled: August 26, 2008Date of Patent: February 15, 2011Assignee: United Microelectronics Corp.Inventors: Chien-Ting Lin, Li-Wei Cheng, Jung-Tsung Tseng, Che-Hua Hsu, Chih-Hao Yu, Tian-Fu Chiang, Yi-Wen Chen, Chien-Ming Lai, Cheng-Hsien Chou
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Patent number: 7883948Abstract: Methods and structures for relieving stresses in stressed semiconductor liners. A stress liner that enhances performance of either an NFET or a PFET is deposited over a semiconductor to cover the NFET and PFET. A disposable layer is deposited to entirely cover the stress liner, NFET and PFET. This disposable layer is selectively recessed to expose only the single stress liner over a gate of the NFET or PFET that is not enhanced by such stress liner, and then this exposed liner is removed to expose a top of such gate. Remaining portions of the disposable layer are removed, thereby enhancing performance of either the NFET or PFET, while avoiding degradation of the NFET or PFET not enhanced by the stress liner. The single stress liner is a tensile stress liner for enhancing performance of the NFET, or it is a compressive stress liner for enhancing performance of the PFET.Type: GrantFiled: May 14, 2009Date of Patent: February 8, 2011Assignee: International Business Machines CorporationInventors: Brian J. Greene, Rajesh Rengarajan
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Patent number: 7820467Abstract: A solid-state imaging device, a line sensor and an optical sensor for enhancing a wide dynamic range while keeping high sensitivity with a high S/N ratio, and a method of operating a solid-state imaging device for enhancing a wide dynamic range while keeping high sensitivity with a high S/N ratio are provided. The solid-state imaging device comprises an integrated array of a plurality of pixels, each of which comprises a photodiode PD for receiving light and generating photoelectric charges, a transfer transistor Tr1 for transferring the photoelectric charges, and a storage capacitor element C connected to the photodiode PD at least through the transfer transistor Tr1 for accumulating, at least through the transfer transistor Tr1, the photoelectric charge overflowing from the photodiode PD during accumulating operation.Type: GrantFiled: March 4, 2009Date of Patent: October 26, 2010Assignee: National University Corporation Tohoku UniversityInventor: Shigetoshi Sugawa
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Publication number: 20100264425Abstract: Junction field effect transistors (JFETs) are shown to be a viable replacement for metal oxide semiconductor field effect transistors (MOSFETs) for gate lengths of less than about 40 nm, providing an alternative to the gate leakage problems presented by scaled down MOSFETs. Integrated circuit designs can have complementary JFET (CJFET) logic cells substituted for existing MOSFET-based logic cells to produce revised integrated circuit designs. Integrated circuits can include JFETS where the channel comprises a wide bandgap semiconductor material and the gate comprises a narrow bandgap semiconductor material. Mixtures of JFET and MOSFET transistors can be included on an integrated circuit design.Type: ApplicationFiled: June 29, 2010Publication date: October 21, 2010Applicant: UNIVERSITY OF UTAH RESEARCH FOUNDATIONInventors: Mark S. Miller, Justin B. Jackson, Divesh Kapoor, Justin Millis
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Patent number: 7790535Abstract: A semiconductor device and a method of manufacturing are provided. A dielectric layer is formed over a substrate, and a first silicon-containing layer, undoped, is formed over the dielectric layer. Atomic-layer doping is used to dope the undoped silicon-containing layer. A second silicon-containing layer is formed over first silicon-containing layer. The process may be expanded to include forming a PMOS and NMOS device on the same wafer. For example, the first silicon-containing layer may be thinned in the PMOS region prior to the atomic-layer doping. In the NMOS region, the doped portion of the first silicon-containing layer is removed such that the remaining portion of the first silicon-containing layer in the NMOS is undoped. Thereafter, another atomic-layer doping process may be used to dope the first silicon-containing layer in the NMOS region to a different conductivity type. A third silicon-containing layer may be formed doped to the respective conductivity type.Type: GrantFiled: September 16, 2008Date of Patent: September 7, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jing-Cheng Lin, Chen-Hua Yu
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Patent number: 7785973Abstract: An electronic device can include a gate electrode having different portions with different conductivity types. In an embodiment, a process of forming the electronic device can include forming a semiconductor layer over a substrate, wherein the semiconductor layer has a particular conductivity type. The process can also include selectively doping a region of the semiconductor layer to form a first doped region having an opposite conductivity type. The process can further include patterning the semiconductor layer to form a gate electrode that includes a first portion and a second portion, wherein the first portion includes a portion of the first doped region, and the second region includes a portion of the semiconductor layer outside of the first doped region. In a particular embodiment, the electronic device can have a gate electrode having edge portions of one conductivity type and a central portion having an opposite conductivity type.Type: GrantFiled: January 25, 2008Date of Patent: August 31, 2010Assignee: Spansion LLCInventor: Burchell B. Baptiste
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Patent number: 7781276Abstract: A CMOS integrated circuit has NMOS and PMOS transistors therein and an insulating layer extending on the NMOS transistors. The insulating layer is provided to impart a relatively large tensile stress to the NMOS transistors. In particular, the insulating layer is formed to have a sufficiently high internal stress characteristic that imparts a tensile stress in a range from about 2 gigapascals (2 GPa) to about 4 gigapascals (4 GPa) in the channel regions of the NMOS transistors.Type: GrantFiled: January 14, 2009Date of Patent: August 24, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Kyoung-woo Lee, Ja-hum Ku, Seung-man Choi
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Patent number: 7772056Abstract: Junction field effect transistors (JFETs) are shown to be a viable replacement for metal oxide semiconductor field effect transistors (MOSFETs) for gate lengths of less than about 40 nm, providing an alternative to the gate leakage problems presented by scaled down MOSFETs. Integrated circuit designs can have complementary JFET (CJFET) logic cells substituted for existing MOSFET-based logic cells to produce revised integrated circuit designs. Integrated circuits can include JFETS where the channel comprises a wide bandgap semiconductor material and the gate comprises a narrow bandgap semiconductor material. Mixtures of JFET and MOSFET transistors can be included on an integrated circuit design.Type: GrantFiled: June 18, 2008Date of Patent: August 10, 2010Assignee: University of Utah Research FoundationInventors: Mark S. Miller, Justin B. Jackson, Divesh Kapoor, Justin Millis
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Patent number: 7754545Abstract: A semiconductor device and a method of fabricating the same are provided. First, a first oxide layer and a nitride layer are formed on a base having a first region and a second region. Next, the nitride layer is oxidized. A part of nitride in the nitride layer moves to the first oxide layer and the base. An upper portion of the nitride layer is converted to an upper oxide layer. Then, the upper oxide layer, the nitride layer and the first oxide layer in the second region are removed. Thereon, a second oxide layer is grown on the base in the second region. Nitride in the second region moves to the second oxide layer.Type: GrantFiled: December 3, 2007Date of Patent: July 13, 2010Assignee: Macronix International Co., Ltd.Inventors: Erh-Kun Lai, Yen-Hao Shih
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Patent number: 7718486Abstract: Methods and systems for fabricating integrated pairs of HBT/FET's are disclosed. One preferred embodiment comprises a method of fabricating an integrated pair of GaAs-based HBT and FET. The method comprises the steps of: growing a first set of epitaxial layers for fabricating the FET on a semi-insulating GaAs substrate; fabricating a highly doped thick GaAs layer serving as the cap layer for the FET and the subcollector layer for the HBT; and producing a second set of epitaxial layers for fabricating the HBT.Type: GrantFiled: January 13, 2006Date of Patent: May 18, 2010Assignee: Anadigics, Inc.Inventors: Oleh Krutko, Kezhou Xie, Mohsen Shokrani, Aditya Gupta, Boris Gedzberg
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Patent number: 7704813Abstract: The present invention provides a high-voltage junction field effect transistor (JFET), a method of manufacture and an integrated circuit including the same. One embodiment of the high-voltage junction field effect transistor (JFET) (300) includes a well region (320) of a first conductive type located within a substrate (318) and a gate region (410) of a second conductive type located within the well region (320), the gate region (410) having a length and a width. This embodiment further includes a source region (710) and a drain region (715) of the first conductive type located within the substrate (318) in a spaced apart relation to the gate region (410) and a doped region (810) of the second conductive type located in the gate region (410) and extending along the width of the gate region (410).Type: GrantFiled: November 1, 2007Date of Patent: April 27, 2010Assignee: Texas Instruments IncorporatedInventors: Kaiyuan Chen, Joe Trogolo, Tathagata Chatterjee, Steve Merchant
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Patent number: 7670890Abstract: An junction field effect transistor (JFET) is fashioned with a patterned layer of silicide block (SBLK) material utilized in forming gate, source and drain regions. Utilizing the silicide block in this manner helps to reduce low-frequency (flicker) noise associated with the JFET by suppressing the impact of surface states, among other things.Type: GrantFiled: July 26, 2006Date of Patent: March 2, 2010Assignees: Texas Instruments Deutschland GmbH, Texas Instruments IncorporatedInventors: Badih El-Kareh, Hiroshi Yasuda, Scott Gerard Balster, Philipp Steinmann, Joe R. Trogolo
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Patent number: 7608496Abstract: A method and a layered heterostructure for forming high mobility Ge channel field effect transistors is described incorporating a plurality of semiconductor layers on a semiconductor substrate, and a channel structure of a compressively strained epitaxial Ge layer having a higher barrier or a deeper confining quantum well and having extremely high hole mobility for complementary MODFETs and MOSFETs. The invention overcomes the problem of a limited hole mobility due to alloy scattering for a p-channel device with only a single compressively strained SiGe channel layer. This invention further provides improvements in mobility and transconductance over deep submicron state-of-the art Si pMOSFETs in addition to having a broad temperature operation regime from above room temperature (425 K) down to cryogenic low temperatures (0.4 K) where at low temperatures even high device performances are achievable.Type: GrantFiled: September 12, 2008Date of Patent: October 27, 2009Assignee: International Business Machines CorporationInventor: Jack Oon Chu