With Epitaxial Deposition Of Semiconductor Adjacent Mesa Patents (Class 438/41)
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Patent number: 11349039Abstract: A photoelectrode, methods of making and using, including systems for water-splitting are provided. The photoelectrode can be a semiconducting material having a photocatalyst such as nickel or nickel-molybdenum coated on the material. The photoelectrode includes an elongated axially integrated wire having at least two different wire compositions.Type: GrantFiled: September 13, 2018Date of Patent: May 31, 2022Assignee: California Institute of TechnologyInventors: Nathan S. Lewis, Shu Hu
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Patent number: 11239636Abstract: A buried typed semiconductor optical device includes a semiconductor substrate having a pair of grooves extending in a first direction. An upper surface of a buried layer has a first region that is adjacent to a mesa stripe structure, overlaps with a corresponding one of the pair of grooves, is inclined so as to be higher in a second direction from the mesa stripe structure, and on which a passivation film is not formed. The upper surface of the buried layer has a second region that does not overlap with any of the pair of grooves, is flat, and is higher than a lower end of the first region, and on which the passivation film is formed. The upper surface of the buried layer has a connection region between the first region and the second region at a same height as the second region.Type: GrantFiled: August 21, 2019Date of Patent: February 1, 2022Assignee: Lumentum Japan, Inc.Inventor: Masatoshi Mitaki
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Patent number: 11049997Abstract: The invention relates to an optoelectronic device, having at least one microwire or nanowire extending along a longitudinal axis substantially orthogonal to a plane of a substrate, and including: a first doped portion produced from a first semiconductor compound; an active zone extending from the first doped portion; a second doped portion, at least partially covering the active zone; characterised in that the active zone comprises a wider single-crystal portion: formed of a single crystal of a second semiconductor compound and at least one additional element; extending from an upper face of one end of the first doped portion, and having a mean diameter greater than that of the first doped portion.Type: GrantFiled: November 28, 2016Date of Patent: June 29, 2021Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Pierre Ferret, Abdelkarim Kahouli
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Patent number: 10658177Abstract: In example implementations of a heterogeneous substrate, the heterogeneous substrate includes a first material having an air trench, a second material coupled to the first material, a dielectric mask on a first portion of the second material and an active region that is grown on a remaining portion of the second material. An air gap may be formed in the air trench by the second material coupled to the first material. Defects in the second material may be contained to an area below the dielectric mask and the active region may remain defect free.Type: GrantFiled: September 3, 2015Date of Patent: May 19, 2020Assignee: Hewlett Packard Enterprise Development LPInventor: Di Liang
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Patent number: 10644213Abstract: A transparent light emitting diode (LED) includes a plurality of III-nitride layers, including an active region that emits light, wherein all of the layers except for the active region are transparent for an emission wavelength of the light, such that the light is extracted effectively through all of the layers and in multiple directions through the layers. Moreover, the surface of one or more of the III-nitride layers may be roughened, textured, patterned or shaped to enhance light extraction.Type: GrantFiled: September 11, 2019Date of Patent: May 5, 2020Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Shuji Nakamura, Steven P. DenBaars, Hirokuni Asamizu
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Patent number: 10181695Abstract: A laser diode has a layer arrangement including a first layer structure extending along a Z axis in a longitudinal direction, along an X axis in a transverse direction and along a Y axis in a height direction, and a second and third layer structure arranged along the Z axis on opposite longitudinal sides of the first layer structure and adjoining the first layer structure, wherein the active zone of the first layer structure is arranged offset in height relative to the active zones of the second and third layer structures, and an intermediate layer is arranged laterally with respect to the first layer structure in the second and third layer structures, the intermediate layer configured as an electrically blocking layer that hinders or prevents a current flow, and the intermediate layer being arranged between the active zone and an n contact.Type: GrantFiled: March 18, 2016Date of Patent: January 15, 2019Assignee: OSRAM Opto Semiconductors GmbHInventors: Alfred Lell, Harald Koenig, Adrian Stefan Avramescu
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Patent number: 10134960Abstract: In at least one embodiment, the semiconductor layering sequence (1) is designed for generating light and comprises semiconductor columns (2). The semiconductor columns (2) have a respective core (21) made of a semiconductor material of a first conductivity type, and a core shell (23) surrounding the core (21) made of a semiconductor material of a second conductivity type. There is an active zone (22) between the core (21) and the core shell (23) for generating a primary radiation by means of electroluminescence. A respective conversion shell (4) is placed onto the semiconductor columns (2), which conversion shell at least partially interlockingly surrounds the corresponding core shell (23), and which at least partially absorbs the primary radiation and converts same into a secondary radiation of a longer wavelength by means of photoluminescence. The conversion shells (4) which are applied to adjacent semiconductor columns (2), only incompletely fill an intermediate space between the semiconductor columns (2).Type: GrantFiled: December 3, 2015Date of Patent: November 20, 2018Assignee: OSRAM Opto Semiconductors GmbHInventors: Dominik Scholz, Martin Mandl, Ion Stoll, Martin Strassburg, Barbara Huckenbeck
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Patent number: 10100434Abstract: A nitride semiconductor single crystal substrate manufacturing method includes providing a template that a first nitride semiconductor single crystal layer is hetero-epitaxially grown on a heterogeneous substrate, forming a plurality of linear grooves on a surface of the template that have a depth reaching an inside of the heterogeneous substrate, wherein a pattern of the plurality of the linear grooves has three-fold or six-fold rotational symmetry with respect to a central axis of the template, epitaxially growing a second nitride semiconductor single crystal layer on the template with the plurality of the linear grooves formed thereon, and cutting a nitride semiconductor single crystal substrate from the second nitride semiconductor single crystal layer.Type: GrantFiled: April 14, 2014Date of Patent: October 16, 2018Assignee: SUMITOMO CHEMICAL COMPANY, LIMITEDInventors: Masatomo Shibata, Takehiro Yoshida, Takayuki Suzuki, Yukio Abe
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Patent number: 9939582Abstract: A method for forming a non-linear thickness-profile in a first layer of a first material is disclosed. The method comprises forming an accelerator layer of a second material on the first layer and forming a mask layer disposed on the accelerator layer, wherein the mask layer enables the accelerator layer to expose the first layer to a first etchant in a first region, where the exposure time for each point along a first axis varies non-linearly as a function of distance from a first point on the first axis. Since the time for which the first layer is exposed to the first etch in the first region is non-linear, the thickness of the first layer in the first region changes non-linearly along the first axis.Type: GrantFiled: January 22, 2016Date of Patent: April 10, 2018Assignee: LioniX International BVInventors: Rene Gerrit Heideman, Marcel Hoekman
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Patent number: 9263633Abstract: A light-emitting diode is provided, including an active semiconductor area for the radiative recombination of electron-hole pairs having a plurality of nanowires, each made of an unintentionally doped semiconductor material, a first semiconductor area for radially injecting holes into each nanowire, the first semiconductor area being made of a doped semiconductor material having a first conductivity type and having a bandgap that is greater than the bandgap of the semiconductor material of the nanowires, and a second semiconductor area for axially injecting electrons into each nanowire, the second semiconductor area being made of a doped semiconductor material having a second conductivity type that is opposite to that of the first conductivity type.Type: GrantFiled: June 11, 2015Date of Patent: February 16, 2016Assignee: Commissariat A L'Energie Atomique Et Aux Energies AlternativesInventors: Philippe Gilet, Anne-Laure Bavencove
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Patent number: 9190569Abstract: A flip-chip light emitting diode (LED) includes: a substrate having a P-type pad electrode and an N-type pad electrode; a light-emitting epitaxial layer flip-chip mounted over the substrate, including, from top down, an n-type semiconductor layer, an active layer, and a p-type semiconductor layer. The n-type semiconductor layer is divided into a light-emitting region, an isolation region, and an electrode region. The light-emitting region and the electrode region are electrically isolated by the isolation region. The active layer and the p-type semiconductor layer are below the light-emitting region. The p-type semiconductor layer connects with the P-type pad electrode. The electrode region of the n-type semiconductor layer connects with the N-type pad electrode.Type: GrantFiled: December 25, 2014Date of Patent: November 17, 2015Assignee: Xiamen Sanan Optoelectronics Technology Co., Ltd.Inventors: Xiaoqiang Zeng, Shunping Chen, Qunfeng Pan, Shaohua Huang
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Patent number: 9184058Abstract: Some embodiments include methods of forming patterns. A first mask is formed over a material. The first mask has features extending therein and defines a first pattern. The first pattern has a first level of uniformity across a distribution of the features. A brush layer is formed across the first mask and within the features to narrow the features and create a second mask from the first mask. The second mask has a second level of uniformity across the narrowed features which is greater than the first level of uniformity. A pattern is transferred from the second mask into the material.Type: GrantFiled: December 23, 2013Date of Patent: November 10, 2015Assignee: Micron Technology, Inc.Inventors: William R. Brown, Adam Olson, Kaveri Jain, Ho Seop Eom, Xue Gloria Chen, Nik Mirin, Dan Millward, Peter Trefonas, III, Phillip Dene Hustad, Jong Keun Park, Christopher Nam Lee
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Patent number: 9093607Abstract: A light-emitting diode is provided, including an active semiconductor area for the radiative recombination of electron-hole pairs having a plurality of nanowires, each made of an unintentionally doped semiconductor material, a first semiconductor area for radially injecting holes into each nanowire, the first semiconductor area being made of a doped semiconductor material having a first conductivity type and having a bandgap that is greater than the bandgap of the semiconductor material of the nanowires, and a second semiconductor area for axially injecting electrons into each nanowire, the second semiconductor area being made of a doped semiconductor material having a second conductivity type that is opposite to that of the first conductivity type.Type: GrantFiled: December 26, 2012Date of Patent: July 28, 2015Assignee: Commissariat A L'Energie Atomique et Aux Energies AlternativesInventors: Philippe Gilet, Anne-Laure Bavencove
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Patent number: 8932888Abstract: A method of applying a conversion means to an optoelectronic semiconductor chip includes preparing the optoelectronic semiconductor chip having a main radiation face, preparing the conversion means, the conversion means being applied to a main carrier face of a carrier, arranging the conversion means such that it faces the main radiation face and has a spacing relative to the main radiation face, and releasing the conversion means from the carrier and applying the conversion means to the main radiation face by irradiation and heating of an absorber constituent of the conversion means and/or of a release layer located between the conversion means and the carrier with a pulsed laser radiation which passes through the carrier.Type: GrantFiled: September 6, 2011Date of Patent: January 13, 2015Assignee: OSRAM Opto Semiconductors GmbHInventor: Ralph Wagner
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Patent number: 8890184Abstract: A nanostructured light-emitting device including: a first type semiconductor layer; a plurality of nanostructures each including a first type semiconductor nano-core grown in a three-dimensional (3D) shape on the first type semiconductor layer, an active layer formed to surround a surface of the first type semiconductor nano-core, and a second type semiconductor layer formed to surround a surface of the active layer and including indium (In); and at least one flat structure layer including a flat-active layer and a flat-second type semiconductor layer that are sequentially formed on the first type semiconductor layer parallel to the first type semiconductor layer.Type: GrantFiled: February 10, 2012Date of Patent: November 18, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Joo-sung Kim, Taek Kim, Moon-seung Yang
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Patent number: 8877652Abstract: A substrate structure and method of manufacturing the same are disclosed. The substrate structure may includes a substrate on which a plurality of protrusions are formed on one surface thereof and a plurality of buffer layers formed according to a predetermined pattern and formed spaced apart from each other on the plurality of protrusions.Type: GrantFiled: January 2, 2014Date of Patent: November 4, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Jun-youn Kim, Su-hee Chae, Hyun-gi Hong, Young-jo Tak
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Patent number: 8815656Abstract: A semiconductor processing method is provided which promotes greater growth on <110> crystallographic planes than on other crystallographic planes. Growth rates with the process can be reversed compared to typical epitaxial growth processes such that the highest rate of growth occurs on <110> crystallographic planes and the least amount of growth occurs on <100> crystallographic planes. The process can be applied to form embedded stressor regions in planar field effect transistors, and the process can be used to grow semiconductor layers on exposed wall surfaces of adjacent fins in source-drain regions of finFETs to fill spaces between the fins.Type: GrantFiled: September 19, 2012Date of Patent: August 26, 2014Assignee: International Business Machines CorporationInventors: Thomas N. Adam, Kangguo Cheng, Judson R. Holt, Keith H. Tabakman, Alexander Reznicek
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Patent number: 8803189Abstract: A circuit structure includes a substrate; a patterned mask layer over the substrate, wherein the patterned mask layer includes a plurality of gaps; and a group-III group-V (III-V) compound semiconductor layer. The III-V compound semiconductor layer includes a first portion over the mask layer and second portions in the gaps, wherein the III-V compound semiconductor layer overlies a buffer/nucleation layer.Type: GrantFiled: August 10, 2009Date of Patent: August 12, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Chia-Lin Yu, Ding-Yuan Chen, Wen-Chih Chiou, Hung-Ta Lin
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Patent number: 8796119Abstract: The present invention relates to semiconductor devices comprising semiconductor nanoelements. In particular the invention relates to devices having a volume element having a larger diameter than the nanoelement arranged in epitaxial connection to the nanoelement. The volume element is being doped in order to provide a high charge carrier injection into the nanoelement and a low access resistance in an electrical connection. The nanoelement may be upstanding from a semiconductor substrate. A concentric layer of low resistivity material forms on the volume element forms a contact.Type: GrantFiled: May 3, 2013Date of Patent: August 5, 2014Assignee: Qunano ABInventors: Lars Ivar Samuelson, Patrik Svensson, Jonas Ohlsson, Truls Lowgren
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Patent number: 8765501Abstract: Methods of epitaxy of gallium nitride, and other such related films, and light emitting diodes on patterned sapphire substrates, and other such related substrates, are described.Type: GrantFiled: February 28, 2011Date of Patent: July 1, 2014Assignee: Applied Materials, Inc.Inventors: Jie Su, Tuoh-Bin Ng, Olga Kryliouk, Sang Won Kang, Jie Cui
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Patent number: 8766281Abstract: A light emitting diode chip includes a substrate, an epitaxial layer, two inclined plane units, and two electrode units. The substrate has top and bottom surfaces. The epitaxial layer is disposed on the top surface of the substrate. Each of the inclined plane units is inclined downwardly and outwardly from the epitaxial layer toward the bottom surface of the substrate, and includes an inclined sidewall formed on the epitaxial layer, and a substrate inclined wall formed on the substrate. Each of the electrode units includes an electrode disposed on the epitaxial layer, and a conductive portion extending from the electrode to the substrate inclined wall along corresponding one of the inclined plane units.Type: GrantFiled: December 13, 2012Date of Patent: July 1, 2014Assignees: Lite-On Electronics (Guangzhou) Limited, Lite-On Technology Corp.Inventor: Chih-Chiang Kao
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Patent number: 8716045Abstract: Exemplary embodiments provide semiconductor devices including high-quality (i.e., defect free) group III-N nanowires and uniform group III-N nanowire arrays as well as their scalable processes for manufacturing, where the position, orientation, cross-sectional features, length and the crystallinity of each nanowire can be precisely controlled. A pulsed growth mode can be used to fabricate the disclosed group III-N nanowires and/or nanowire arrays providing a uniform length of about 10 nm to about 1000 microns with constant cross-sectional features including an exemplary diameter of about 10-1000 nm. In addition, high-quality GaN substrate structures can be formed by coalescing the plurality of GaN nanowires and/or nanowire arrays to facilitate the fabrication of visible LEDs and lasers. Furthermore, core-shell nanowire/MQW active structures can be formed by a core-shell growth on the nonpolar sidewalls of each nanowire.Type: GrantFiled: March 1, 2013Date of Patent: May 6, 2014Assignee: STC.UNMInventors: Stephen D Hersee, Xin Wang, Xinyu Sun
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Patent number: 8698284Abstract: A nitride-based semiconductor substrate may includes a plurality of hollow member patterns arranged on a substrate, a nitride-based seed layer formed on the substrate between the plurality of hollow member patterns, and a nitride-based buffer layer on the nitride-based seed layer so as to cover the plurality of hollow member patterns, wherein the plurality of hollow member patterns contact the substrate in a first direction and both ends of each of the plurality of hollow member patterns are open in the first direction.Type: GrantFiled: April 1, 2011Date of Patent: April 15, 2014Assignee: Samsung Electronics Co., Ltd.Inventor: Sang-Moon Lee
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Patent number: 8685773Abstract: A method for making a semiconductor epitaxial structure is provided. The method includes growing a substrate having an epitaxial growth surface, placing a carbon nanotube layer on the epitaxial growth surface, epitaxially growing a doped semiconductor epitaxial layer on the epitaxial growth surface. The carbon nanotube layer can be suspended above the epitaxial growth surface.Type: GrantFiled: October 18, 2011Date of Patent: April 1, 2014Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.Inventors: Yang Wei, Shou-Shan Fan
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Patent number: 8652918Abstract: A structure method for producing same provides suppressed lattice defects when epitaxially forming nitride layers over non-c-plane oriented layers, such as a semi-polar oriented template layer or substrate. A patterned mask with “window” openings, or trenches formed in the substrate with appropriate vertical dimensions, such as the product of the window width times the cotangent of the angle between the surface normal and the c-axis direction, provides significant blocking of all diagonally running defects during growth. In addition, inclined posts of appropriate height and spacing provide a blocking barrier to vertically running defects is created. When used in conjunction with the aforementioned aspects of mask windows or trenches, the post structure provides significant blocking of both vertically and diagonally running defects during growth.Type: GrantFiled: May 17, 2012Date of Patent: February 18, 2014Assignee: Palo Alto Research Center IncorporatedInventor: Andre Strittmatter
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Patent number: 8647929Abstract: Semiconductor devices and methods of manufacturing thereof are disclosed. A preferred embodiment includes a semiconductor device comprising a workpiece, the workpiece including a first region and a second region proximate the first region. A first material is disposed in the first region, and at least one region of a second material is disposed within the first material in the first region, the second material comprising a different material than the first material. The at least one region of the second material increases a first stress of the first region.Type: GrantFiled: February 9, 2010Date of Patent: February 11, 2014Assignee: Infineon Technologies AGInventor: Jin-Ping Han
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Patent number: 8633045Abstract: A method for making epitaxial structure is provided. The method includes providing a substrate having an epitaxial growth surface, placing a carbon nanotube layer on the epitaxial growth surface, and epitaxially growing an epitaxial layer on the epitaxial growth surface. The carbon nanotube layer can be a carbon nanotube film drawn from a carbon nanotube array and including a plurality of successive and oriented carbon nanotubes joined end-to-end by van der Waals attractive force therebetween.Type: GrantFiled: October 18, 2011Date of Patent: January 21, 2014Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.Inventors: Yang Wei, Chen Feng, Shou-Shan Fan
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Patent number: 8629534Abstract: A semiconductor structure includes a Si substrate, a supporting layer and a blocking layer formed on the substrate and an epitaxy layer formed on the supporting layer. The supporting layer defines a plurality of grooves therein to receive the blocking layer. The epitaxy layer is grown from the supporting layer. A plurality of slots is defined in the epitaxy layer and over the blocking layer. The epitaxy layer includes an N-type semiconductor layer, a light-emitting layer and a P-type semiconductor layer.Type: GrantFiled: June 25, 2013Date of Patent: January 14, 2014Assignee: Advanced Optoelectronics Technology, Inc.Inventors: Shih-Cheng Huang, Po-Min Tu, Shun-Kuei Yang, Chia-Hung Huang
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Patent number: 8574935Abstract: A manufacturing method of a solid state light emitting element is provided. A plurality of protrusion structures separated to each other are formed on a first substrate. A buffer layer is formed on the protrusion structures and fills the gaps between protrusion structures. An epitaxial growth layer is formed on the buffer layer to form a first semiconductor stacking structure. The first semiconductor stacking structure is inverted to a second substrate, so that the first semiconductor epitaxial layer and the second substrate are connected to form a second semiconductor stacking structure. The buffer layer is etched by a first etchant solution to form a third semiconductor stacking structure. A second etchant solution is used to permeate through the gaps between the protrusion structures, so that the protrusion structures are etched completely. The first substrate is removed from the third semiconductor stacking structure to form a fourth semiconductor stacking structure.Type: GrantFiled: April 10, 2012Date of Patent: November 5, 2013Assignee: Lextar Electronics CorporationInventors: Chang-Chin Yu, Mong-Ea Lin
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Patent number: 8575726Abstract: A semiconductor device includes: a semiconductor chip including: a first main face having an edge portion, a second main face locating the opposite side to the first main face, a crystalline defect region present within a region including at least the edge portion being adjacent to the first main face, the crystalline defect region being configured to have lower stress than the stress in the other semiconductor region for the same strain; and a metallic substrate to be bonded via a bonding member to the first main face of the semiconductor chip.Type: GrantFiled: March 6, 2008Date of Patent: November 5, 2013Assignee: Nissan Motor Co., Ltd.Inventor: Yoshinori Murakami
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Patent number: 8558243Abstract: A micro light emitting diode (LED) and a method of forming an array of micro LEDs for transfer to a receiving substrate are described. The micro LED structure may include a micro p-n diode and a metallization layer, with the metallization layer between the micro p-n diode and a bonding layer. A conformal dielectric barrier layer may span sidewalls of the micro p-n diode. The micro LED structure and micro LED array may be picked up and transferred to a receiving substrate.Type: GrantFiled: December 7, 2012Date of Patent: October 15, 2013Assignee: LuxVue Technology CorporationInventors: Andreas Bibl, John A. Higginson, Hung-Fai Stephen Law, Hsin-Hua Hu
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Patent number: 8552436Abstract: A micro light emitting diode (LED) and a method of forming an array of micro LEDs for transfer to a receiving substrate are described. The micro LED structure may include a micro p-n diode and a metallization layer, with the metallization layer between the micro p-n diode and a bonding layer. A conformal dielectric barrier layer may span sidewalls of the micro p-n diode. The micro LED structure and micro LED array may be picked up and transferred to a receiving substrate.Type: GrantFiled: December 7, 2012Date of Patent: October 8, 2013Assignee: LuxVue Technology CorporationInventors: Andreas Bibl, John A. Higginson, Hung-Fai Stephen Law, Hsin-Hua Hu
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Patent number: 8518285Abstract: A substrate section for a flexible display device is disclosed. The substrate section includes: a first substrate, a second substrate disposed above a center region of the first substrate, a reinforcing layer disposed between the first and second substrates, configured to reinforce adhesion between the first and second substrates, and a barrier layer disposed above the second substrate and surrounding side surfaces of the second substrate and of the reinforcing layer.Type: GrantFiled: April 21, 2010Date of Patent: August 27, 2013Assignee: Samsung Display Co., Ltd.Inventor: Dong-Beom Lee
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Patent number: 8513039Abstract: A method for fabricating a semiconductor lighting chip includes steps of: providing a substrate; forming a first etching layer on the substrate; forming a connecting layer on the first etching layer; forming a second etching layer on the connecting layer; forming a lighting structure on the second etching layer; and etching the first etching layer, the connecting layer, the second etching layer and the lighting structure, wherein an etching rate of the first etching layer and the second etching layer is lager than that of the connecting layer and the lighting structure, thereby to form the connecting layer and the lighting structure each with an inverted frustum-shaped structure.Type: GrantFiled: August 24, 2011Date of Patent: August 20, 2013Assignee: Advanced Optoelectronic Technology, Inc.Inventors: Po-Min Tu, Shih-Cheng Huang, Tzu-Chien Hung, Ya-Wen Lin
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Patent number: 8501510Abstract: An optoelectronic component with three-dimension quantum well structure and a method for producing the same are provided, wherein the optoelectronic component comprises a substrate, a first semiconductor layer, a transition layer, and a quantum well structure. The first semiconductor layer is disposed on the substrate. The transition layer is grown on the first semiconductor layer, contains a first nitride compound semiconductor material, and has at least a texture, wherein the texture has at least a first protrusion with at least an inclined facet, at least a first trench with at least an inclined facet and at least a shoulder facet connected between the inclined facets. The quantum well structure is grown on the texture and shaped by the protrusion, the trench and the shoulder facet.Type: GrantFiled: May 17, 2012Date of Patent: August 6, 2013Assignee: Hermes-Epitek Corp.Inventors: Benson Chao, Chung-Hua Fu, Shih-Chieh Jang
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Patent number: 8501582Abstract: A semiconductor structure includes a Si substrate, a supporting layer and a blocking layer formed on the substrate and an epitaxy layer formed on the supporting layer. The supporting layer defines a plurality of grooves therein to receive the blocking layer. The epitaxy layer is grown from the supporting layer. A plurality of slots is defined in the epitaxy layer and over the blocking layer. The epitaxy layer includes an N-type semiconductor layer, a light-emitting layer and a P-type semiconductor layer. A method for manufacturing the semiconductor structure is also disclosed.Type: GrantFiled: December 21, 2010Date of Patent: August 6, 2013Assignee: Advanced Optoelectronic Technology, Inc.Inventors: Shih-Cheng Huang, Po-Min Tu, Shun-Kuei Yang, Chia-Hung Huang
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Patent number: 8492186Abstract: The present invention is a method for producing a group III nitride semiconductor layer in which a single crystal group III nitride semiconductor layer (103) is formed on a substrate (101), the method including: a substrate processing step of forming, on the (0001) C-plane of the substrate (101), a plurality of convex parts (12) of surfaces (12c) not parallel to the C-plane, to thereby form, on the substrate, an upper surface (10) that is composed of the convex parts (12) and a flat surface (11) of the C-plane; and an epitaxial step of epitaxially growing the group III nitride semiconductor layer (103) on the upper surface (10), to thereby embed the convex parts (12) in the group III nitride semiconductor layer (103).Type: GrantFiled: December 19, 2007Date of Patent: July 23, 2013Assignee: Toyoda Gosei Co., Ltd.Inventors: Hironao Shinohara, Hiromitsu Sakai
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Patent number: 8455281Abstract: A method of manufacturing an optical semiconductor device includes: forming a mesa structure having an n-type cladding layer, an active layer and a p-type cladding layer in this order on a substrate; forming a p-type semiconductor layer on a side face of the mesa structure and a plane area located at both sides of the mesa structure, the p-type semiconductor layer having a thickness of 5 nm to 45 nm on the plane area; and forming a current blocking semiconductor layer on the p-type semiconductor layer so as to bury the mesa structure, a product of the thickness of the p-type semiconductor layer and a concentration of p-type impurity of the p-type semiconductor layer on the plane area being 2.5×1019 nm/cm3 or less.Type: GrantFiled: April 25, 2011Date of Patent: June 4, 2013Assignee: Sumitomo Electric Device Innovations, Inc.Inventor: Tatsuya Takeuchi
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Patent number: 8450192Abstract: Growth methods for planar, non-polar, Group-III nitride films are described. The resulting films are suitable for subsequent device regrowth by a variety of growth techniques.Type: GrantFiled: September 9, 2008Date of Patent: May 28, 2013Assignees: The Regents of the University of California, Japan Science and Technology CenterInventors: Benjamin A. Haskell, Paul T. Fini, Shigemasa Matsuda, Michael D. Craven, Steven P. DenBaars, James S. Speck, Shuji Nakamura
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Patent number: 8435820Abstract: A circuit structure includes a substrate and a film over the substrate and including a plurality of portions allocated as a plurality of rows. Each of the plurality of rows of the plurality of portions includes a plurality of convex portions and a plurality of concave portions. In each of the plurality of rows, the plurality of convex portions and the plurality of concave portions are allocated in an alternating pattern.Type: GrantFiled: March 12, 2012Date of Patent: May 7, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Ding-Yuan Chen
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Patent number: 8426845Abstract: An embodiment of the present invention improves the fabrication and operational characteristics of a type-II superlattice material. Layers of indium arsenide and gallium antimonide comprise the bulk of the superlattice structure. One or more layers of indium antimonide are added to unit cells of the superlattice to provide a further degree of freedom in the design for adjusting the effective bandgap energy of the superlattice. One or more layers of gallium arsenide are added to unit cells of the superlattice to counterbalance the crystal lattice strain forces introduced by the aforementioned indium antimonide layers.Type: GrantFiled: May 6, 2011Date of Patent: April 23, 2013Assignee: SVT Associates, Inc.Inventors: Yiqiao Chen, Peter Chow
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Patent number: 8409894Abstract: A solid state light emitting semiconductor structure and an epitaxy growth method thereof are provided. The method includes the following steps: A substrate is provided. A plurality of protrusions separated from each other are formed on the substrate. A buffer layer is formed on the protrusions, and fills or partially fills the gaps between the protrusions. A semiconductor epitaxy stacking layer is formed on the buffer layer, wherein the semiconductor epitaxy stacking layer is constituted by a first type semiconductor layer, an active layer and a second type semiconductor layer in sequence.Type: GrantFiled: April 10, 2012Date of Patent: April 2, 2013Assignee: Lextar Electronics CorporationInventors: Chang-Chin Yu, Mong-Ea Lin
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Patent number: 8409893Abstract: A convex part formation method of forming a convex part in parallel with a <110> direction of a backing on the backing having a {100} face as the top surface thereof, includes: (a) forming a mask layer in parallel with the <110> direction on the backing; (b) etch the backing so as to form a convex-part upper layer whose sectional shape on a cutting plane corresponding to a {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of ?U; and (c) further etching the backing so as to form a convex-part lower layer whose sectional shape on the cutting plane corresponding to the {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of ?D (where ?D??U).Type: GrantFiled: January 23, 2012Date of Patent: April 2, 2013Assignee: Sony CorporationInventors: Kiyotaka Yashima, Yoshinari Kiwaki, Kamada Michiru, Sachio Karino, Hironobu Narui, Nobukata Okano
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Patent number: 8399340Abstract: A method of manufacturing a super-junction semiconductor device facilitates increasing the epitaxial growth rate without increasing the manufacturing steps greatly. In substitution for the formation of alignment mark in the surfaces of the second and subsequent non-doped epitaxial layers, patterning for forming a new alignment mark is conducted simultaneously with the resist pattering for selective ion-implantation into the second and subsequent non-doped epitaxial layers in order to form the new alignment mark at a position different from the position, at which the initial alignment mark is formed, and to form the new alignment mark in every one or more repeated epitaxial layer growth cycles.Type: GrantFiled: June 10, 2011Date of Patent: March 19, 2013Assignee: Fuji Electric Co., Ltd.Inventor: Akihiko Ohi
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Patent number: 8394653Abstract: A method for fabricating a semiconductor lighting chip includes steps of: providing a substrate with a first block layer dividing an upper surface of the substrate into a plurality of epitaxial regions; forming a first semiconductor layer on the epitaxial regions; forming a second block layer partly covering the first semiconductor layer; forming a lighting structure on an uncovered portion of the first semiconductor layer; removing the first and the second block layers thereby defining clearances at the bottom surfaces of the first semiconductor layer and the lighting structure; and permeating etching solution into the first and second clearances to etch the first semiconductor layer and the lighting structure, thereby to form each of the first semiconductor layer and the lighting structure with an inverted frustum-shaped structure.Type: GrantFiled: August 24, 2011Date of Patent: March 12, 2013Assignee: Advanced Optoelectronic Technology, Inc.Inventors: Po-Min Tu, Shih-Cheng Huang, Ya-Wen Lin, Chia-Hung Huang, Shun-Kuei Yang
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Patent number: 8377727Abstract: Provided is a method of manufacturing a surface-emitting laser capable of preventing characteristics fluctuations within the plane and among wafers and oscillating in a single fundamental transverse mode. The method includes after performing selective oxidation: exposing a bottom face of a surface relief structure by etching a second semiconductor layer with a first semiconductor layer where a pattern of the surface relief structure has been formed as an etching mask and a third semiconductor layer as an etching stop layer; and exposing a top face of the surface relief structure by etching the first semiconductor layer where the pattern of the surface relief structure has been formed, with the second semiconductor layer and the third semiconductor layer as etching stop layer.Type: GrantFiled: November 1, 2011Date of Patent: February 19, 2013Assignee: Canon Kabushiki KaishaInventors: Yasuhisa Inao, Tatsuro Uchida, Takeshi Uchida
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Patent number: 8372671Abstract: Solid state lighting devices with semi-polar or non-polar surfaces and associated methods of manufacturing are disclosed herein. In one embodiment, a solid state lighting device includes a substrate material having a substrate surface and an epitaxial silicon structure in direct contact with the substrate surface. The epitaxial silicon structure has a sidewall extending away from the substrate surface. The solid state lighting device also includes a semiconductor material on at least a portion of the sidewall of the epitaxial silicon structure. The semiconductor material has a semiconductor surface that is spaced apart from the substrate surface and is located on a semi-polar or non-polar crystal plane of the semiconductor material.Type: GrantFiled: June 21, 2010Date of Patent: February 12, 2013Assignee: Micron Technology, Inc.Inventor: Jaydeb Goswami
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Patent number: 8349742Abstract: A gallium nitride-based semiconductor device includes a composite substrate and a gallium nitride layer. The composite substrate includes a silicon substrate and a filler. The silicon substrate includes a first surface and a second surface opposite to the first surface, and the first surface defines a number of grooves therein. The filler is filled into the number of grooves on the first surface of the silicon substrate. A thermal expansion coefficient of the filler is bigger than that of the silicon substrate. The gallium nitride layer is formed on the second surface of the silicon substrate.Type: GrantFiled: January 26, 2011Date of Patent: January 8, 2013Assignee: Advanced Optoelectronic Technology, Inc.Inventors: Po-Min Tu, Shih-Cheng Huang, Shun-Kuei Yang, Chia-Hung Huang
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Patent number: 8334155Abstract: A substrate including a host and a seed layer bonded to the host is provided, then a semiconductor structure including a light emitting layer disposed between an n-type region and a p-type region is grown on the seed layer. In some embodiments, a bonding layer bonds the host to the seed layer. The seed layer may be thinner than a critical thickness for relaxation of strain in the semiconductor structure, such that strain in the semiconductor structure is relieved by dislocations formed in the seed layer, or by gliding between the seed layer and the bonding layer an interface between the two layers. In some embodiments, the host may be separated from the semiconductor structure and seed layer by etching away the bonding layer.Type: GrantFiled: September 27, 2005Date of Patent: December 18, 2012Assignee: Philips Lumileds Lighting Company LLCInventors: Michael R. Krames, Nathan F. Gardner, John E. Epler
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Patent number: 8288186Abstract: A substrate including a host and a seed layer bonded to the host is provided, then a semiconductor structure including a light emitting layer disposed between an n-type region and a p-type region is grown on the seed layer. In some embodiments, a bonding layer bonds the host to the seed layer. The seed layer may be thinner than a critical thickness for relaxation of strain in the semiconductor structure, such that strain in the semiconductor structure is relieved by dislocations formed in the seed layer, or by gliding between the seed layer and the bonding layer an interface between the two layers. In some embodiments, the host may be separated from the semiconductor structure and seed layer by etching away the bonding layer.Type: GrantFiled: September 22, 2010Date of Patent: October 16, 2012Assignee: Philips Lumileds Lighting Company LLCInventors: Michael R. Krames, Nathan F. Gardner, John E. Epler