Abstract: At least one or more of a conductive layer which forms a wiring or an electrode and a pattern necessary for manufacturing a display panel such as a mask for forming a predetermined pattern is formed by a method capable of selectively forming a pattern to manufacture a liquid crystal display device. A droplet discharge method capable of forming a predetermined pattern by selectively discharging a droplet of a composition in accordance with a particular object is used as a method capable of selectively forming a pattern in forming a conductive layer, an insulating layer, or the like.

Abstract: The invention relates to a method for the thermal treatment of tungsten electrodes having a fibrous mocrostructure and being free from thorium oxide for high-pressure discharge lamps, to such a tungsten electrode free from thorium oxide, to a method of manufacturing a high-pressure gas discharge lamp with at least one such tungsten electrode free from thorium oxide, to a high-pressure gas discharge lamp with at least one such tungsten electrode free from thorium oxide, and to a lighting unit with at least one such high-pressure gas discharge lamp.

Abstract: A thermal electron emitter includes at least one carbon nanotube twisted wire and a plurality of electron emission particles mixed with the twisted wire. The carbon nanotube twisted wire comprises a plurality of carbon nanotubes. A work function of the electron emission particles is lower than the work function of the carbon nanotubes. A thermal electron emission device using the thermal electron emitter is also related.

Abstract: Methods and articles providing for precise aligning, positioning, shaping, and linking of nanotubes and carbon nanotubes. An article comprising: a solid surface comprising at least two different surface regions including: a first surface region which comprises an outer boundary and which is adapted for carbon nanotube adsorption, and a second surface region which is adapted for preventing carbon nanotube adsorption, the second region forming an interface with the outer boundary of the first region, at least one carbon nanotube which is at least partially selectively adsorbed at the interface. The shape and size of the patterns on the surface and the length of the carbon nanotube can be controlled to provide for selective interfacial adsorption.

Abstract: Spindt-type field-emission cathodes for use in electric propulsion (EP) systems having self-assembling nanostructures that can repeatedly regenerate damaged cathode emitter nanotips. A nanotip is created by applying a negative potential near the surface of a liquefied base metal to create a Taylor cone converging to a nanotip, and solidifying the Taylor cone for use as a field-emission cathode. When the nanotip of the Taylor cone becomes sufficiently blunted or damaged to affect its utility, the base metal is re-liquefied by application of a heat source, a negative potential is reapplied to the surface of the base metal to recreate the Taylor cone, and a new nanotip is generated by solidifying the base metal.

Abstract: A manufacturing method of an electron-emitting device including the steps of: preparing a base substrate provided with an insulating or semi-conducting layer in advance and exposing the layer to an atmosphere which contains neutral radical containing hydrogen. It is preferable that the insulating or semi-conducting layer contains metal particles; the insulating or semi-conducting layer is a film containing carbon as a main component; the neutral radical containing hydrogen contains any of H., CH3., C2H5., and C2H. or mixture gas thereof; compared with a density of a charged particle in the atmosphere, a density of the neutral radical containing hydrogen in the atmosphere is more than 1,000 times; and a step of exposing the insulating or semi-conducting layer to the atmosphere is a step of making a hydrogen termination by using a plasma apparatus provided with a bias grid.

Abstract: A method for making the thermal electron emitter includes following steps. Providing a carbon nanotube film including a plurality of carbon nanotubes. Treating the carbon nanotube film with a solution comprising of a solvent and compound or a precursor of a compound, wherein the compound and the compound that is the basis of the precursor of a compound has a work function that is lower than the carbon nanotubes. Twisting the treated carbon nanotube film to form a carbon nanotube twisted wire. Drying the carbon nanotube twisted wire. Activating the carbon nanotube twisted wire.

Abstract: In a flat display panel, a surface of at least one of a sustain electrode and an address electrode may be formed to have a curved surface. The surface of the electrode may be formed as a continuous curved surface. The sustain electrode and the address electrode may be elongated in a lengthwise direction thereof. These lengthwise directions may be perpendicular to each other. The electrode may be formed by transferring an electrode material onto the substrate using an electrode frame defined with electrode forming grooves each having a same sectional shape as the electrode. Therefore, the surface of the electrode may be formed as the curved surface.

Abstract: A method of manufacturing a field emission device comprises: sequentially forming cathodes and a light blocking layer on a substrate, and patterning the light blocking layer to form blocking layer holes; sequentially forming an insulating layer and a gate material layer on the light blocking layer, and patterning the gate material layer to form gate electrodes in which gate electrode holes are formed; coating a photoresist on the gate electrodes, and exposing and developing the photoresist to form resist holes inside the gate electrode holes; isotropically etching portions of the insulating layer exposed through the resist holes to form insulating layer holes; etching portions of the gate electrodes exposed by the insulating layer holes to form gate holes, and removing the photoresist; and forming emitters on the cathode electrodes exposed by the blocking layer holes.

Abstract: Some embodiments include methods of forming plasma-generating microstructures. Aluminum may be anodized to form an aluminum oxide body having a plurality of openings extending therethrough. Conductive liners may be formed within the openings, and circuitry may be formed to control current flow through the conductive liners. The conductive liners form a plurality of hollow cathodes, and the current flow is configured to generate and maintain plasmas within the hollow cathodes. The plasmas within various hollow cathodes, or sets of hollow cathodes, may be independently controlled. Such independently controlled plasmas may be utilized to create a pattern in a display, or on a substrate. In some embodiments, the plasmas may be utilized for plasma-assisted etching and/or plasma-assisted deposition. Some embodiments include constructions and assemblies containing multiple plasma-generating structures.

Abstract: A method for manufacturing a field emitter, includes the steps of: providing a CNT yarn segment; attaching the CNT yarn segment to a heat conductor; and burning the CNT yarn segment thereby yielding a remaining portion of the CNT yarn segment for use as a field emitter. It is proper to manufacture a plurality of field emitters with essentially even field emission properties using the present method.

Abstract: Disclosed herein are a method of producing microstructure and a method of producing mold, the methods permitting production of much smaller pores than before in an atmosphere where impurities are negligible and also permitting production of microstructures having a smaller size and a higher crystallinity than before with the help of the pores. The method of producing microstructure comprises a step of making pores (4) in a substrate (1) to become a mold (5) by irradiation with a focused energy beam (3) and a step of growing a microstructure (8) in the thus made pores (4). The method of producing a mold includes a step of making pores (4) by irradiating a substrate (1) to become a mold (5) with a focused energy beam (3).

Abstract: A method for manufacturing a field emission includes: providing a CNT array; drawing a bundle of CNTs from the CNT array to form a CNT yarn; soaking the CNT yarn into an organic solvent, and shrinking the CNT yarn into a CNT string after the organic solvent volatilizing; applying a voltage between two opposite ends of the CNT string; bombarding a predetermined point of the CNT string by an electron emitter, until the CNT string snapping; and attaching the snapped CNT string to a conductive base, and achieving a field emission electron source. The field emission efficiency of the field emission electron source is high.

Abstract: An electronic device including a pair of electrodes disposed on a substrate and carbon nanotubes electrically connecting the electrodes. A method for manufacturing this device in which the electrodes are disposed on the substrate and the nanotubes are prepared to electrically connect the electrodes.

Abstract: A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.

Abstract: A method for making a field emission device includes the following steps. A base and at least one carbon nanotube yarn are provided. The at least one carbon nanotube yarn is attached to the base. The at least one carbon nanotube yarn includes a plurality of carbon nanotube segments. The carbon nanotube segments are joined end to end by van der Waals attractive force.

Abstract: This invention provides a process for improving the field emission of an electron field emitter comprised of an acicular emitting substance such as acicular carbon, an acicular semiconductor, an acicular metal or a mixture thereof, comprising applying a force to the surface of the electron field emitter wherein the force results in the removal of a portion of the electron field emitter thereby forming a new surface of the electron field emitter.

Abstract: In accordance with the invention, there are field emission light emitting devices and methods of making them. The field emission light emitting device can include a plurality of spacers, each connecting a substantially transparent substrate to a backing substrate. The device can also include a plurality of pixels, wherein each of the plurality of pixels can include one or more first electrodes disposed over the substantially transparent substrate, a light emitting layer disposed over each of the one or more first electrodes, and one or more second electrodes disposed over the backing substrate, wherein the one or more second electrodes and the one or more first electrode are disposed at a predetermined gap in a low pressure region. Each of the plurality of pixels can further include one or more nanocylinder electron emitter arrays disposed over each of the one or more second electrodes.

Abstract: Described herein are methods of manufacturing an electrode and emitter in a field emission device, and devices formed from the methods. Compositions useful for the manufacture of an electrode and emitter in a field emission device are also described.

Abstract: A field emission electron source having carbon nanotubes includes a CNT string and a conductive base. The CNT string has an end portion and a broken end portion, the end portion is contacted with and electrically connected to the surface of the conductive base. The CNTs at the broken end portion form a tooth-shape structure, wherein some CNTs protruding and higher than the adjacent CNTs. Each protruding CNT functions as an electron emitter. Further, a method for manufacturing a field emission electron source is provided. The field emission efficiency of the field emission electron source is high.

Abstract: A method for manufacturing a field emission electron source includes: providing a CNT array; drawing a bundle of CNTs from the CNT array to form a CNT yarn; soaking the CNT yarn into an organic solvent, and shrinking the CNT yarn into a CNT string after the organic solvent volatilizing; applying a voltage between two opposite ends of the CNT string, until the CNT string snapping at a certain point; and attaching the snapped CNT string to a conductive base, and achieving a field emission electron source. The field emission efficiency of the field emission electron source is high.

Abstract: A method for making a field emission lamp generally includes the steps of: (a) providing a cathode emitter; (b) providing a transparent glass tube having a carbon nanotube transparent conductive film and a fluorescent layer, wherein the carbon nanotube transparent conductive film and the fluorescent layer are both disposed on an inner surface of the transparent glass tube; (c) providing a first glass feedthrough, a second glass feedthrough, and a nickel pipe, wherein the first glass feedthrough has an anode down-lead pad and an anode down-lead pole connected to the anode down-lead pad, and the second glass feedthrough has a cathode down-lead pole; (d) securing the nickel pipe to one end of the cathode emitter and securing the other end of the cathode emitter to one end of the cathode down-lead pole of the second glass feedthrough; and (e) melting and assembling the first and second glass feedthroughs to ends of the transparent glass tube respectively.

Abstract: A light emitting device comprising an anode, a cathode, a light emissive layer located between the anode and the cathode, said light emissive layer comprising a compound for emitting light, said compound comprising a metal complex and X, said metal complex containing a metal (M) and a phosphorous atom that is coordinated directly to M, and an aryl or heteroaryl group Ars that is directly bonded to the phosphorous atom, where Ars is substituted with X, and characterized in the X comprises an aryl or heteroaryl group.

Abstract: Methods are disclosed for batch fabrication of vacuum switch tubes that reduce manufacturing costs and improve tube to tube uniformity. The disclosed methods comprise creating a stacked assembly of layers containing a plurality of adjacently spaced switch tube sub-assemblies aligned and registered through common layers. The layers include trigger electrode layer, cathode layer including a metallic support/contact with graphite cathode inserts, trigger probe sub-assembly layer, ceramic (e.g. tube body) insulator layer, and metallic anode sub-assembly layer. Braze alloy layers are incorporated into the stacked assembly of layers, and can include active metal braze alloys or direct braze alloys, to eliminate costs associated with traditional metallization of the ceramic insulator layers. The entire stacked assembly is then heated to braze/join/bond the stack-up into a cohesive body, after which individual switch tubes are singulated by methods such as sawing.

Abstract: A method of manufacturing a micro-lens array and light-emitting device, comprising forming a first structured polymer film with close packed surface cavities having a mean diameter of less than 20 micrometers and a relatively lower surface energy surface, forming a transparent second structured film with an array of microlenses formed thereon corresponding to the cavities of the first structured film, wherein the second structured film comprises a relatively high surface energy material and has a refractive index greater than 1.45, and wherein the microlenses are randomly distributed, separating the second structured film with the micro-lens array from the first structured polymer film, and attaching the second structured film to a transparent substrate or cover of a light-emitting device through which light is emitted.

Abstract: A method for manufacturing a field emission electron source, the method comprising the steps of: preparing a substrate, a carbon nanotubes slurry, and a conductive slurry; applying a conductive slurry layer onto the substrate; applying a layer of carbon nanotubes slurry onto the conductive slurry layer; and solidifying the substrate under a temperature of 300 to 600 degrees centigrade so as to form the field emission electron source.

Abstract: A method for manufacturing a device including a field of micrometric tips, including forming a polycrystalline layer on a support; performing an anisotropic plasma etching of all or part of the polycrystalline layer by using a gas mixture including chlorine and helium, whereby tips are formed at the surface of the polycrystalline layer.

Abstract: A method for manufacturing a field emission electron source includes: (a) Providing a carbon nanotube (CNT) film, the CNT film has a plurality of CNTs, the CNTs are aligned along a same direction; a first electrode and a second electrode. (b) Fixing the two opposite sides of the CNT film on the first electrode and the second electrode, the CNTs in the CNT film extending from the first electrode to the second electrode. (c) Treating the CNT film with an organic solvent to form at least one CNT string. (d) Applying a voltage between two opposite ends of the CNT string until the CNT string snaps, thereby at least one CNT needle, the CNT needle has an end portion and a broken end portion. (e) Securing the CNT needle to a conductive base by attaching the end portion of the CNT needle to the conductive base.

Abstract: A field emission backlight unit for a liquid crystal display (LCD) includes: a lower substrate; first electrodes and second electrodes alternately formed in parallel lines on the lower substrate; emitters disposed on at least the first electrodes; an upper substrate spaced apart from the lower substrate by a predetermined distance such that the upper and lower substrates face each other; a third electrode formed on a bottom surface of the upper substrate; and a fluorescent layer formed on the third electrode. Since the backlight unit has a triode-type field emission structure, field emission is very stable. Since the first electrodes and the second electrodes are formed in the same plane, brightness uniformity is improved and manufacturing processes are simplified.

Abstract: A method of manufacturing a tubular carbon molecule capable of regularly aligning a carbon nanotube with a finer spacing is provided. A catalyst is arranged on a material substrate (10) made of a semiconductor such as silicon (Si) and including iron (Fe) as a catalyst through the use of melting according to a modulated heat distribution (11). The heat distribution (11) is formed, for example, through diffracting an energy beam (12) by a diffraction grating (13). As a method of arranging the catalyst, for example, iron may be deposited in a planar shape or a projection shape in a position corresponding to the heat distribution (11), or the deposited iron may be used as a master to be transferred to another substrate. A carbon nanotube is grown through the use of the arranged catalyst. The grown carbon nanotube can be used as a recording apparatus, a field electron emission device, an FED or the like.

Abstract: In a method for making a pulsed high-voltage silicon quantum dot fluorescent lamp, an excitation source is made by providing a first substrate, coating the first substrate with a buffer layer of titanium, coating the buffer layer with a catalytic layer of a material selected from a group consisting of nickel, aluminum and platinum and providing a plurality of nanometer discharging elements one the catalytic layer. An emission source is made by providing a second substrate, coating the second substrate with a transparent electrode film of titanium nitride and coating the transparent electrode film with a silicon quantum dot fluorescent film comprising silicon quantum dots. A pulsed high-voltage source is provided between the excitation source and the emission source to generate a pulsed field-effect electric field to cause the nanometer discharging elements to release electrons and accelerate the electrons to excite the silicon quantum dots to emit pulsed visible light.

Abstract: A manufacturing method of an electron-emitting device according to the present invention includes the steps of: preparing a substrate having a first electrode and a second electrode, and a conductive film for connecting the first electrode and the second electrode; and forming a gap on the conductive film by applying a voltage between the first electrode and the second electrode; wherein a planar shape of the conductive film has a V-shape portion between the first electrode and the second electrode.

Abstract: A field emission device has pixels with cathode and anode provided on the same plane, so that electrons directly penetrate an independently provided fluorescent powder layer to produce light, giving the display the advantages of easy focusing, no dark spots, high brightness, and enhanced light emitting performance. Since the light produced by the fluorescent powder layer is not blocked by the anode, the problem of charge accumulation on the fluorescent powder layer is avoided, and it is not necessary to use expensive light-transmittable conducting glass as the anode. With the cathode and the anode located at the same plane, it is not necessary to use a high precision spacer to maintain a fixed distance between the cathode and the anode, enabling the device to be manufactured at reduced cost and high good yield.

Abstract: A method of manufacturing carbon nanotube (CNT) field emission source, comprising the following steps of: providing a substrate; disposing an electrode layer on substrate; applying a mixture on electrode layer by means of screen printing, and mixture is a mixture of CNT paste and carbon powder; performing sinter in proceeding with a heat cracking reaction, and the carbon cracked and obtained in a heat cracking reaction of carbon powder and polymer in CNT paste is used as a carbon source, and that is used to grow a CNT emission layer of a hedgehog-shaped CNT cluster structure, thus obtaining a cathode plate after completion of sinter process. The hedgehog-shaped CNT cluster structure is a carbon nanotube (CNT) emission layer capable of having multi-direction electron emission routes. As such, it can realize the characteristics of high current density, and low turn-on voltage, while raising the stability of electron field emission.

Abstract: A method of manufacturing a tubular carbon molecule capable of regularly aligning a carbon nanotube with a finer spacing is provided. A catalyst is arranged on a material substrate (10) made of a semiconductor such as silicon (Si) and including iron (Fe) as a catalyst through the use of melting according to a modulated heat distribution (11). The heat distribution (11) is formed, for example, through diffracting an energy beam (12) by a diffraction grating (13). As a method of arranging the catalyst, for example, iron may be deposited in a planar shape or a projection shape in a position corresponding to the heat distribution (11), or the deposited iron may be used as a master to be transferred to another substrate. A carbon nanotube is grown through the use of the arranged catalyst. The grown carbon nanotube can be used as a recording apparatus, a field electron emission device, an FED or the like.

Abstract: Apparatus and methods are provided through which a multi-electrode cathode assembly can be manufactured comprising bonding a monolithic metal block to the nonconductive base; and thereafter machining the block to form at least one electrode.

Abstract: A field emission backlight module has a field emission structure with cathode and anode provided on the same plane, so that electrons directly penetrate an independently provided fluorescent powder layer to produce light. The light is emitted uniformly without the need of the conventional optical membrane. Since the light produced by the fluorescent powder layer is not blocked by the anode, the problem of charge accumulation on the fluorescent powder layer is avoided, and it is not necessary to use expensive light-transmittable conducting glass as the anode. With the cathode and the anode located at the same plane, it is not necessary to use a precision spacer to adjust the distance between the cathode and the anode, enabling the module to be manufactured at reduced cost and high good yield. When the color sequential displaying method is adopted, expensive color filters required in the conventional LCD may be omitted.

Abstract: A method for sharpening a metal carbide emitter tip is disclosed. The metal carbide emitter tip is exposed to an oxygen rich, low vacuum environment when the metal carbide emitter tip is at a first temperature. The metal carbide emitter tip is rapidly heated to a higher second temperature at regular intervals of time.

Abstract: A new Rhenium alloy usable for improving the performance of emission filaments used in mass spectrometers or other similar scientific instruments, which is made by adding low level concentrations of Yttrium Oxide to Rhenium of less than 10%. This new alloy has demonstrated superior performance characteristics compared to pure Rhenium for this purpose. Filaments made from the Yttria/Rhenium alloy exhibit the same voltage, current and emission properties as Rhenium but have the added advantage of greatly decreasing warping during use. The Rhenium alloy filaments are usable with various shapes and configurations including straight filaments, multiple coiled filaments and pin shaped filaments. Electron microscopy and microscopy studies verify that the Yttria/Rhenium material of the new alloy has a smaller grain size and increased strength when compared to pure Rhenium, which accounts for the enhanced structural strength.

Abstract: A fabricating method of a structure having nano-hole is provided. The fabricating method includes: providing a substrate, forming a photoresist layer on the substrate, forming an opening, and performing a heat treatment process on the photoresist layer to shrink the opening to form a nano-hole. The structure having nano-hole fabricated by the method of the present invention can be used to fabricate a nano-tip having a diameter of tip-body of no more than 10 nm, high aspect ratio, and a uniform diameter of tip-body.

Abstract: Provided is a method of manufacturing an electron emission device. The method includes: forming electron emission sources including a carbon-based material; and emitting electrons from the electron emission sources in a chamber containing a gas. Accordingly, an electron emission display device employing the electron emission device can improve uniformity between pixels and increase device lifespan.

Abstract: A method for preparation of carbon nanotubes (CNTs) bundles for use in field emission devices (FEDs) includes forming a plurality of carbon nanotubes on a substrate, contacting the carbon nanotubes with a polymer composition comprising a polymer and a solvent, and removing at least a portion of the solvent so as to form a solid composition from the carbon nanotubes and the polymer to form a carbon nanotube bundle having a base with a periphery, and an elevated central region where, along the periphery of the base, the carbon nanotubes slope toward the central region.

Abstract: An emitter is disclosed. The emitter includes a a base layer comprising an array of nanocavities on an emission surface of the base layer, wherein facets of the nanocavities are substantially along equivalent crystallographic planes of one or more families of planes having substantially equal surface energies, wherein the equivalent crystallographic planes have surface energies equal to or lower than a surface energy of the crystallographic plane of the emission surface. Methods of making such emitters and radiation sources including such emitters are also disclosed.

Abstract: The invention relates to an electrode having a nano-hollow array on the surface thereof, the nano-hollow array comprising a plurality of nano-pores or nano-balls, each pore having a diameter of less than 500 nm, formed by a process comprising depositing a uniform metal film on the electrode structure surface at a rate of 2 ? per second or less, annealing the metal film under rapid anneal conditions at a temperature within about 100 degrees of the melting point of the metal film and without subjecting the metal film to a temperature ramp-up to create metal droplets, and anodizing and over-anodizing the metal droplets in the presence of an anodization agent for the metal at from 20 to 200 volts at 0.1 to 2 amps to create nano-pores in the metal droplets or nano-balls to, creating increased surface area and increased electric field around the electrode which enhances speed of fill gas ionization.

Abstract: A field emission lamp includes a transparent glass tube, a cathode, and an anode. The anode and cathode are both disposed in the transparent glass tube. The cathode includes an electron emission layer. The anode includes a carbon nanotube transparent conductive film formed on an inner wall of the transparent glass tube and a fluorescent layer formed on the carbon nanotube transparent conductive film. A method for fabricating the above-described field emission lamp, includes the steps of: (a) providing a transparent glass tube including at least one conductive wire, a carbon nanotube transparent conductive film and a fluorescent layer formed on the inner wall thereof; and (b) providing an anode electrode, a cathode electrode, a cathode emitter sealed by feedthroughs in the glass tube to achieve the field emission lamp.

Abstract: A method for fabricating a surface-conduction electron emitter includes the steps of: (a) providing a substrate; (b) disposing two lower layers on the surface of the substrate, the two lower layers are parallel and apart from each other; (c) disposing a plurality of carbon nanotube elements on the lower layers; (d) disposing two upper layers on the two lower layers, and thereby, sandwiching the carbon nanotube elements therebetween; and (e) forming a micro-fissure between the carbon nanotube elements.

Abstract: In this display, an upper electrical insulation layer covers the active matrix; each electrooptic element comprises a lower supply electrode that is applied to this insulation layer. According to the invention, this lower electrode includes an organic conducting layer applied directly to said insulation layer and a metal layer covering the organic conducting layer. Such a structure makes it possible to optimize both planarization and light extraction by an optical cavity effect thereby improving the performance of the display.

Abstract: One embodiment relates to a dynamic pattern generator for reflection electron beam lithography which includes conductive pixel pads, an insulative border surrounding each conductive pixel pad so as to electrically isolate the conductive pixel pads from each other, and conductive elements coupled to the conductive pixel pads for controllably applying voltages to the conductive pixel pads. The conductive pixel pads are advantageously cup shaped with a bottom portion, a sidewall portion, and an open cavity. Another embodiment relates to a pattern generating apparatus which includes a well structure with sidewalls and a cavity configured above each conductive pixel pad. The sidewalls may include alternating layers of conductive and insulative materials. Other embodiments, aspects and feature are also disclosed.

Abstract: An electron emission display device includes first and second substrates facing each other with a non-active area and an active area having a plurality of pixel, a first pixel portion, e.g., an electron emission unit, formed on the first substrate, a second pixel portion, e.g., a light emission unit, formed on the second substrate, and one or more alignment marks formed in the non-active area of at least one of the first and the second substrates and having a pattern substantially similar to that of the plurality of pixels.

Abstract: A method of growing carbon nanotubes and a method of manufacturing a field emission device using the same is provided. The method of growing carbon nanotubes includes steps of preparing a substrate, forming a catalyst metal layer on the substrate to promote growing of carbon nanotubes, forming an inactivation layer on the catalyst metal layer to reduce the activity of the catalyst metal layer, and growing carbon nanotubes on a surface of the catalyst metal layer. Because the inactivation layer partially covers the catalyst metal layer, carbon nanotubes are grown on a portion of the catalyst metal layer that is not covered by the inactivation layer. Thus, density of the carbon nanotubes can be controlled. This method for growing carbon nanotubes can be used to make an emitter of a field emission device. The field emission device having carbon nanotube emitter made of this method has superior electron emission characteristics.