Abstract: This disclosure concerns a device for machining surfaces, e.g., superfinishing, polishing, grinding or lapping spherical shells or flattened domes of a workpiece, or, for example, a ball joint, using a tool having a machining stone with a workpiece receiver, a first drive for an oscillating motion about a first axis of the workpiece, a tool holder and a second drive for an oscillating motion about a second axis of the tool holder, whereby the axes are an angle to one another.

Abstract: The invention provides a model-based control approach to chemical-mechanical planarization (CMP) control. The preferred embodiment comprises mathematical models of the CMP process. These models play a critical role in obtaining superior control performance. Model-based Control Design involves the construction of a dynamic mathematical model of the system to be controlled, e.g. a removal rate model of a CMP system. The model can then be evaluated via computer simulations, and validated using data from the system. The invention provides a method and apparatus that processes in-situ data from a suite of real-time sensors and produces real-time commands to multiple actuators, such as applied pressures, slurry-flow rate, and wafer/pad velocity. A key aspect of the invention is an integrated model-based pressure-temperature-velocity-slurry flow control system that includes many innovations in real-time mode identification, real-time gain estimation, and real-time control.

Abstract: The apparatus, especially a grinding machine, comprises a frame (14) on which two working planes (A, B) are used, at least two oscillating elements (11, 12) disposed on one of the planes and each including at least one tool device (15, 16), at least one further tool device disposed on the other plane, and at least one means for generating oscillating motion (20) whereby a reciprocating movement can be generated at the level of each of the oscillating elements, so that the resultant of the vectors representing the dynamic forces associated with the movement of each of the oscillating elements is substantially equal to zero. There is then little or no induced vibration.

Abstract: A machine for scraping tire treads comprising two units (10, 30), one (10) upper and one (30) lower, arranged according to a vertical axis (y--y) for the handling and positioning of a tire (2) in a symmetrical position relative to a horizontal axis (z--z) and for operating the tire in rotation around an axis of rotation coinciding with the vertical axis of such handling and operating units (10, 30). There is further provided a unit (20) for work tools (21) placed in rotation around a vertical axis parallel to the axis of rotation of tire (2) and automatic means (5, 5a) for loading/unloading tire (2) on/from lower supporting and positioning unit (30).