Abstract: A cutting machine of a type having bellows means disposed at least on one side of a chuck table to be reciprocated. A protective sheet covering the upper surface of the bellows means is disposed. One end of the protective sheet is reciprocated in accordance with the reciprocation of the chuck table, while the other end of the protective sheet is connected to winding means. When the chuck table is moved forward or backward, the protective sheet is gradually wound up by the winding means. When the chuck table is moved backward or forward, the protective sheet is gradually wound off from the winding means.

Abstract: A method for dust-free cutting of rotating a cutting blade at a predetermined rotational speed to create turbulent flow of air on the face of the cutting blade, directing a liquid coolant against the face of the cutting blade whereby the coolant is dispersed on the spinning blade and captures or entrains the dust particles created and converts the same a harmless slurry.

Abstract: In order to provide a machining apparatus which can save fluids such as water, compressed air and clean air, it comprises at least a spindle unit including a rotary spindle having a machining element attached thereto for effecting a required machining work on a workpiece and a spindle housing rotatably bearing the rotary spindle, and means for supplying the spindle unit with fluid for use in machining the workpiece. The means for supplying the spindle unit with fluid has a flow control provided in the fluid flowing passage for controlling the flow rate of the fluid in response to the rotating and stopping of the rotary spindle, thereby saving such fluid. Also, a controlled small quantity of such fluid is allowed to flow in the spindle housing after the machining is stopped, thereby retaining the thermal condition without being changed until the machining is resumed. Thus, no thermal calibration is required when the machining apparatus resumes work.

Abstract: Disclosed is a clogging-free drain system installed in a cutting apparatus. It comprises an expandable cover for covering the path on which the chuck table follows, a water case for receiving used machining water guided by the expandable cover, and a drain pool for tentatively storing the used machining water from the water case before allowing it to drain off. The drain pool has its bottom positioned at a level lower than the bottom of the water case, and the drain pool has its drain outlet formed at a level higher than the bottom of the drain pool. The water case has water flow creating means for driving the used machining water to the water pool.

Abstract: The invention provides a method and an apparatus that prevent the accumulation of copper ions during CMP of copper lines by performing the CMP process at low temperatures and by maintaining this low temperature during the CMP process by adding a slurry that functions as a corrosion inhibitor.

Abstract: There is provided a conductive grinding wheel 10 rotating centering on a vertical shaft center and including a horizontal working surface 10a, and the grinding wheel comprises a conductive base member 11 formed of an integrally molded flat plate, and a plurality of fan-shaped segments 12 detachably attached to the base member to entirely constitute the annular working surface. Each segment comprises a base metal 12a directly attached to the base member and a grinding wheel part 12b formed on the surface of the base metal. Moreover, the grinding wheel part comprises a recessed groove 14 for partitioning the working surface into a plurality of working areas 13, and an electrolytic fluid supply hole 15 for directly supplying the electrolytic fluid to the respective working areas, so that the electrolytic fluid is supplied to the respective electrolytic fluid supply holes through the base member.

Abstract: A cold-gas-blow-cooling type machining apparatus in which a cold gas blow is provided to cool a machining tool and a workpiece while the workpiece is machined by the machining tool. The machining apparatus includes: a rectifying device which rectifies the machining tool; a workpiece-temperature detecting device which detects a temperature of the workpiece; and a rectifying-device control device which controls an operation of the rectifying device on the basis of the temperature of the workpiece which is detected by the workpiece-temperature detecting device.

Abstract: A polishing apparatus includes a cleaning device for critical cleaning of a top ring or a dressing tool to obtain high quality polishing by minimizing surface damage caused by contaminants originating from the top ring and/or dressing tool. The polishing apparatus includes a polishing table; a workpiece holding member for pressing a workpiece onto the polishing table; a dressing tool for conditioning a work surface provided on the polishing table. A cleaning device is provided for cleaning the dressing tool and/or the workpiece holding member. The cleaning device is provided with a spray nozzle for directing a cleaning solution toward at least an upper surface of the workpiece holding member or the dressing tool.

Abstract: Accessories for an angle grinder include a disposable rotary sanding disk having quite large shaped ventilating/viewing apertures, for use with a resilient backing plate also having shaped ventilating apertures. The apertures of one or both parts are shaped so that snagging of the apertures on projections from the work surface is minimized and to facilitate air flow across the work surface during use. This air flow helps in cooling the work and ejecting detritus, so minimising clogging effects. The ventilating apertures also facilitate viewing the work to be sanded through the spinning disk during the abrasion process, so that operator feedback is immediate. The holes also give the sanding disk more resilience so that a greater area comes in contact with the work and the disk wears more evenly over its abrasive surface.

Abstract: A buffing pad assembly is provided for buffing, polishing or otherwise finishing a painted surface. The buffing pad assembly includes a rigid backing mount, a back-up pad affixed to the backing mount, and a buffing pad removably attached to the back-up pad by way of fastening material provided on the back-up pad and the buffing pad. The buffing pad has a number of channels extending completely through the pad to facilitate dissipation of heat generated by friction during use of the buffing pad. The back-up pad and the fastening material are designed to accommodate the heat dissipation channels in the buffing pad so that the channels are substantially unobstructed. Additionally, a centering system is provided on the buffing pad assembly to facilitate alignment of the buffing pad during use.

Abstract: A method of using a finishing element having a fixed abrasive finishing surface including boundary lubricants for finishing semiconductor wafers is described. The lubricants in the finishing element are transferred to operative finishing interface a forming lubricating boundary layer. The lubricating boundary layer thickness is controlled to improve finishing and reduce unwanted surface defects. Differential lubricating boundary layer methods are described to differentially finish semiconductor wafers. Planarization and localized finishing can be improved using differential lubricating boundary layer methods of finishing.

Abstract: Systems and methods for polishing a substrate with reduced contamination are described. Moist air is directed to one or more surfaces in proximity to the polishing surface and exposed to airborne slurry particles generated during polishing. By maintaining the atmosphere in the vicinity of the exposed surfaces at an elevated relative humidity level, airborne slurry particles adhering to the exposed surfaces remain in suspension and, therefore, may be easily cleaned, e.g., during a high pressure rinse cycle. This feature reduces the likelihood that slurry particles will accumulate on exposed surfaces of the polishing apparatus and flake off while a substrate is being polished, reducing the likelihood of substrate defects caused by such slurry contamination.

Abstract: When machining a workpiece (W) with a tool (T) detachably mounted on a spindle (12) included in a machine tool, a machining liquid supply system (42) for supplying a machining liquid into a machining region in which the tool (T) machines has a machining liquid spouting nozzle (44) having a machining liquid spouting opening (44a), the machining liquid spouting nozzle (44) is supported by a support rod (48) and a bracket (50) so as to be moved by moving means (54, 74) in radial directions and circumferential direction with respect to the axis of the spindle (12) in a region around a headstock (10) supporting the spindle (12). The diameter of the tool (T) held on the spindle (12) can be measured by an automatic tool measuring device (30) installed on the machine tool.

Abstract: The present invention discloses a method for preventing particle contamination in a polishing machine that utilizes slurry composition for the removal of material from the surface of a substrate. The novel method is particularly suited for use in a chemical mechanical polishing apparatus in which a slurry composition is used. The method includes the step of providing a plurality of cleaning devices each having a bendable, shapable conduit and a spray nozzle for dispensing a cleaning solvent on the spindle and the conditioner arm utilized in the CMP apparatus. The present invention further discloses an apparatus for use in carrying out a method for preventing particle contamination in a CMP apparatus by using bendable, shapable conduits for dispensing a cleaning solvent such as deionized water onto the chamber components for removing slurry deposits that may have splattered thereon and therefore, eliminating sources for particle contamination.

Abstract: A method of cutting metal materials and non-metal materials in a non-combustible gas atmosphere, the method including forming a non-combustible gas atmosphere, providing the non-combustible gas atmosphere to at least one of a cutting part of a machine tool and an area adjacent to the cutting part, and machining the metal materials and the non-metal materials using the cutting part, and where the non-combustible gas includes one of nitrogen gas and carbon dioxide gas, and where the non-combustible gas occupies a proportion of at least 90% of the non-combustible gas atmosphere.

Abstract: A polisher comprises a turn table having first and second end surfaces which are substantially normal to an axis of the turn table. The first end surface defines a polishing surface for polishing an article. A drive shaft is connected to the turn table in such a manner that the shaft extends along the axis of the turn table from the second end surface of the turn table. The polisher further includes a cooling system which comprises a cooling fluid path provided in the turn table for passing a cooling fluid therethrough to deprive the polishing surface of heat generated in a polishing operation and a fluid coupler provided at the center of the first end surface of the turn table for fluidly connecting the cooling fluid path with a cooling fluid supply outside of the turn table.

Abstract: A work machining method including ejecting a mist of cooling water on a face side of an outside diameter tool from a nozzle of a cooling water supply tube and ejecting a mist of oil cutting fluid on a flank side of the outside diameter tool from a nozzle of an oil cutting fluid supply tube, the nozzle of the cooling water supply tube and the injection nozzle of the oil cutting fluid tube being mounted on a turret. With such a method, durability of the machining tool and the finishing accuracy of the machined surface can be improved and no environmental problem is caused.

Abstract: The invention relates to a workhead for mechanical working of materials. This invention is directed to metal working machines and is adaptable for use in the mechanical working of metals and plastics, involving the use of liquid lubricants and/or coolants. The technical result achieved by implementing the invention comprises an improvement in the efficiency of the cavitation treatment of a liquid lubricant and/or coolant, which secures the dispersion of a solid lubrication in aqueous solutions, an increase in the stability of water-in-oil emulsions, decomposition of a liquid lubricant and/or coolant and a decrease of viscosity, an improvement in corrosion resistance, reduction in a tool wear and, simultaneously, an improvement in the quality of a working surface. The apparatus comprises a housing (1), inside which is fitted a main oscillator (2), to which is connected a tool (4) through the intermediary of an extension piece (3).

Abstract: Disclosed is an improved method of forming a series of hills and valleys alternately arranged at a predetermined pitch on the surface of a given workpiece. It comprises the steps of: carrying out a first grinding on the workpiece with a saw-toothed grindstone having a series of hills and valleys alternately arranged at “N” pitches (“N” being two or more integer or whole number), the height measured from the bottom of the valley to the peak of the hill in the saw-toothed grindstone being taller than the corresponding height in the workpiece; moving the saw-toothed grindstone and/or the workpiece one pitch relative to each other to carry out a second grinding on the workpiece; and repeating the relative movement of one-pitch long-distance and sequential grinding until the final “N”th grinding has been finished. All grindings are effected while the workpiece is being cooled by cooling water.

Abstract: Processing, such as grinding or cutting, in a cold air blast is performed at low temperature with higher precision and higher efficiency in a pollution-less situation, wherein a conventional processing fluid is not applied. A compressed dry cold air of a temperature of minus 30.degree. C. or lower is blasted to a processing spot during processing, while a pollution-less fine mist of an oil, such as Accu-Lube, is supplied to the surface of a grinding stone in a small amount, or with a processing tool which has been treated in a fixed lubrication treatment. The apparatus includes a cooler for cooling a temperature of a filtered, compressed, dry air to minus 1.degree. C. or lowers a cold air blasting unit for supplying the cooled dry air to a processing spot, and a device which supplies a mist of a pollution-less oil, such as a vegetable oil or the like, to the processing spot directly or indirectly by the help of the processing tool.

Abstract: A universal grinding machine, particularly for the grinding of tools, having a tool magazine in which a plurality of grinding tools, together with coolant supply devices which are matched thereto, are disposed in holders and can be supplied according to choice to the grinding spindle, where the grinding tool and its coolant supply device are introduced into their receivers; simultaneously by an axial movement of the grinding spindle and of the grinding spindle slide and are withdrawn by a movement of the grinding spindle and of its grinding spindle slide perpendicular to the grinding spindle axis so that the grinding tool and the coolant supply device are always in a position in relation to each other which is correct for machining.

Abstract: The material removal rate of a creep-feed grinding operation may be increased significantly by use of a type of porous grinding wheel in combination with jet of coolant liquid at high pressure directed at the periphery of the wheel in advance of the cutting point. The apparatus for performing the method may comprise a multi-axis machining centre adapted to enable the coolant nozzle(s) to be retracted to provide working clearance for automatic tool changer operation and to re-position the aiming point of the nozzle(s) over an angular range relative to a cutting point.

Abstract: A coolant liquid feeding method comprises feeding a coolant liquid, with air bubbles caused to form continuously therein, for cutting or grinding operation to a region under machining, expediting the splashing of air bubbles in all directions when the air bubbles impinge on the region under machining and burst, and also expediting the entry of accelerated splashed liquid particles into a cutter/workpiece pressure contact plane, thereby improving the cooling and lubrication of the region under machining, whereby the air bubbles in the coolant liquid which has failed to reach the region under machining or which, though reaching there, has left there for the recovery channel are allowed to adhere to suspended foreign matters in the liquid, thereby expediting the surfacing of the foreign matters.

Abstract: A de-marking apparatus and method are provided for de-marking a marked packaged integrated circuit (IC). The de-marking apparatus comprises a de-marking head for removing a thin layer of material from the marked surface. The apparatus may also include mechanisms for feeding, transferring and conveying the marked ICs to and from the de-marking head, and washing, drying, and receiving the de-marked ICs in an automated fashion. The method includes physically removing package material from a marked IC surface and producing a surface reflectivity suitable for re-marking with a laser beam.

Abstract: A grinding cup includes a wear part having a cavity at its front end, the cavity configured for grinding a button of a rock drill bit. A flush channel extends forwardly through the wear part and terminates at the cavity for conducting a flushing medium thereto. The flush channel is spaced from a center axis of rotation of the grinding cup by a distance greater than 2% and less than 30% of a largest diameter of the cavity.

Abstract: A high speed fluid jet nozzle made at least in part of a porous material and configured so that the porous part of the nozzle is surrounded at least in part by a reservoir containing a lubricant fluid. As a cutting fluid passes through the nozzle, lubricant from the reservoir is drawn through the porous material and lubricates the surfaces of the nozzle exposed to the fluid jet. The invention not only resolves the main difficulties of the prior art relating to nozzle wear, it expands the use and applications of high speed fluid jet cutters. By reducing wear of a jet nozzle, it is possible to increase the jet speed and reduce the nozzle diameter even further than the prior art, allowing much higher precision, deeper cutting, and usage on difficult to cut material such as ceramics. The invention thus provides a reliable but yet very simple method for preventing nozzle wear.

Abstract: An electrodeposited diamond wheel including a circular substrate having an attaching aperture formed at the center and a plurality of cooling apertures each formed at a predetermined distance from the attaching aperture in the outer circumferential direction and each at a predetermined pitch. Diamond abrasive particles are electrodeposited on the outer circumference of the circular substrate. Ridges and grooves are formed as corrugations on both surfaces of the circular disc, and diamond abrasive particles are electrodeposited on the outer circumference of the corrugations to form a cutting edge, the cutting edge being formed into a corrugated shape conforming to the substrate. The diamond wheel is suitable for cutting of a composite material of a heat-softening material and a reinforcing material.

Abstract: A combination of a die lubricant source, a feedtube, and a nozzle assembly, as well as a method of using the combination to cool and/or lubricate a die. The die lubricant source supplies a plurality of bursts of a metered amount of a die lubricant to a feedtube bore. The nozzle assembly includes a removable barrel having a barrel bore therethrough and a removable atomizing spray tip having a spray tip bore therethrough. A posterior end of the barrel bore communicates with the feedtube bore and an anterior end of the barrel bore communicates with the spray tip bore. The ratio of the cross-sectional area of the barrel bore divided by the cross-sectional area of the spray tip bore is not less than 2.5, and the cross-sectional area of the barrel bore is preferably not greater than the cross-sectional area of the feedtube bore.

Abstract: A grinding machine for grinding a wafer includes a pressure sensing grinding wheel and a source of wheel dressing. Based on a pressure signal received from the grinding wheel, a contoller provides a control signal to the source of wheel dressing to release the wheel dressing to sharpen the grinding wheel. A method of grinding wafers includes the steps of grinding a wafer, receiving a signal indicative of the amount of grinding and controlling the release of wheel dressing in response to the signal. The controller can also receive signals from a spindle shaft speed sensor and a spindle motor current detector to determine when, and how much, wheel dressing to release.

Abstract: The prior art discloses machines which, for cooling the surface to be machined, have a gas supply line which opens into a gas outlet which is in the direct vicinity of the polishing disk. When CO.sub.2 is used as cooling gas, stoppages, which can be traced back to snow formation of the CO.sub.2, may occur in the line and in the gas outlet. In order to avoid blockages, the machine is assigned means for the supply of the liquid or supercritical CO.sub.2 which comprise a valve for regulating the throughflow quantity of the CO.sub.2 with an expansion nozzle, the valve being arranged inside the machine.

Abstract: A metal abrasive belt is used to grind, debur, sand, cut, finish or otherwise abrade a workpiece. The metal abrasive belt includes a continuous metal belt and abrasive particles electroplated onto at least a portion of an outer surface of the continuous metal belt. The abrasive particles are electroplated by electrochemically depositing an electroplating matrix, such as a Nickel matrix, in the presence of abrasive particles, such as diamond or Cubic Boron Nitride particles. The abrasive particles can be electroplated to form selected abrasive and non-abrasive regions on the continuous metal member, for example, by masking selected regions of the continuous metal belt. One embodiment of the metal abrasive belt includes one or more perforations extending through the continuous metal belt. The perforations facilitate cooling and allow swarf to pass through the continuous metal belt while abrading a workpiece.

Abstract: A precision drill sharpener and grinding wheel assembly is provided, as is a corresponding drill chuck for use with the drill sharpener, in which the drill sharpener includes a lever and spring clip alignment subassembly for properly positioning a drill in the drill chuck, and sharpening ports for sharpening the drill and splitting the drill tip, the sharpening ports being positioned such that a single grinding wheel assembly is used to both sharpen the drill and split the tip. The drill sharpener uses a small diameter grinding wheel operated at high speed to provide cutting rates comparable to large industrial sharpeners. The drill chuck is of short length, relative to most of the drills to be sharpened, and is open at a back end, enabling the manipulation of the drill by its shank relative to the drill chuck when disposed in the alignment subassembly.

Abstract: A polishing machine for polishing a flat workpiece such as a semiconductor wafer has a rotatable reference table supporting an abrasive cloth disposed on a surface thereof, and a rotatable workpiece holder for holding a flat workpiece against the abrasive cloth. While the flat workpiece is being polished by the abrasive cloth, an abrasive compound is supplied between the abrasive cloth and the flat workpiece. The reference table has grooves defined therein for dissipating heat from the reference table and the abrasive cloth while the flat workpiece is being polished by the abrasive cloth. The grooves may be supplied with either the abrasive compound or a coolant.

Abstract: A blade comprises a disc-shaped substrate having a major surface and an outer peripheral edge portion encircling the major surface, and an abrasive grain layer mounted on the outer peripheral edge portion of the substrate. The substrate includes a first disc having a major surface, and a second disc having a major surface which is superposed on that of the first disc. The major surface of the second disc is separated from that of the first disc, thereby defining a clearance between the major surfaces of the first and second discs and correspondingly forming a convex surface region on the outside surface of the substrate. The peripheral portion of the convex surface region is provided with a contact portion where the major surfaces of the first and second discs are slidably in contact with each other.

Abstract: A machine tool comprises at least one revolvable spindle having an end for supporting a work piece, a first processing tool disposed opposite to the end of the spindle for processing the work piece, a second processing tool disposed parallel to the first processing tool, and a revolving unit for revolving the spindle about a central revolving axis to place the end of the spindle opposite to the second processing tool for processing the work piece. A chamber is disposed on the outer peripheral surface of the work spindle. A pair of inlet and outlet connections are revolved integrally with the work spindle and are arranged on opposite sides of the central revolving axis. Connecting pipes connect the inlet and outlet connection on one side of the central revolving axis to the inlet and outlet connection at the opposite side of the central revolving axis through the chamber. A coolant supply pipe is provided for supplying a coolant to the chamber through the inlet and outlet connections and the connecting pipes.

Abstract: A method for grinding a surface of a golf ball and removing the thin outer layer thereof, wherein grinding tools arranged on three axes on a plane which axes radiate from a definite point at intervals of 120.degree. between one another are used. Each of the grinding tools possesses a circular grinding face which gradually spreads toward the end and contacts a surface of a golf ball. The grinding tools turn on the respective axes toward the same direction at the same speed keeping the same distance from the definite point.

Abstract: There is disclosed herein an adapter system for use with a hand-held electrically-driven grinding tool, which rotatably drives a grinding wheel for removing grout or mortar from a work site. The adapter system is constructed to controllably deliver a liquid, usually water to the grinding wheel. The adapter system includes a valve assembly mounted to the tool body, which assembly includes: (1) a housing which defines an inlet and an outlet and (2) a shut off valve member positioned within the housing and between the inlet and outlet and operable from external of the housing to selectively provide and interrupt communication between the inlet and the outlet. There is also provided a supply conduit leading from a source and connected to the inlet for delivering liquid from the source to the valve housing inlet. A flexible delivery conduit is provided and connected to the valve housing and positionable adjacent to periphery of the grinding element.

Abstract: A grinding wheel is provided having a wheel body and an abrasive surface layer having a plurality of dead end grooves extending rearwardly from the side of the circumference of the wheel to effectively gather and then trap coolant therein during grinding. The dead end grooves are preferably arranged in alternating right and left hand sections extending respectively from the right and left hand sides of the wheel. The dead end grooves effectively feed and trap coolant therein during cutting. The grinding wheel and related grinding method effectively reduce workpiece burning during creep feed grinding large surface areas and deep cuts, with a water base coolant.

Abstract: A machine is disclosed for forming facets on the surfaces of a plurality of workpieces. The machine is characterized by the presence of a plurality of pin members for holding the workpieces to be faceted against an abrading surface of a lap or an abrading wheel. The pin members are positioned and held together in a contiguous relationship. The machine also includes a mechanism for setting the angular relationship of the pin members relative to the lap or abrading wheel and for causing movement of the pin members away from the lap. An automated lap cooling, moisturizing and working compound supply system is also provided in another embodiment of this invention, for allowing continuous operation of the machine.

Abstract: In accordance with the present invention, a polishing pad useful for polishing a semiconductor-comprising substrate is disclosed. The polishing pad is constructed to include conduits which pass through at least a portion of and preferably through the entire thickness of the polishing pad. The conduits, preferably tubulars, are constructed from a first material which is different from a second material used as a support matrix. The conduits are positioned within the support matrix such that the longitudinal centerline of the conduit forms an angle ranging from about 60.degree. to about 120.degree. with the working surface of the polishing pad.

Abstract: A paint removing device is adapted for attachment to a hand held rotary grinder for fast, efficient removal of paint from a surface. The device includes a disc with abrasive platelets arranged in a ring around the periphery of the disc, leaving a central area free from abrasive particles. Rotation of the disc at high speeds removes paint from the entire area encompassed by the disc.

Abstract: A grinding wheel assembly is provided for shaping and finishing the edges of planar workpieces, such as glass sheets. The assembly comprises a rotatable support member, a grinding wheel fixedly connected to the support member for rotation therewith, and an impeller positioned within the grinding wheel and fixedly connected to the support member for rotation with the support member and the grinding wheel. The grinding wheel includes a plurality of bores extending between inner and outer circumferential surfaces thereof. The impeller includes an inlet for receiving a fluid and a plurality of curvilinear vanes for forcing the fluid radially outwardly toward the grinding wheel so that at least a portion of the fluid passes through the bores in the grinding wheel.

Abstract: A grinding tool bit is formed of a disk-shaped base member (1) with a central through opening (6) for attaching the base member to a drive spindle of a machine tool. The base member (1) is covered with individual cutting elements (4) at the radially outer circumferential surface (2) and in the side faces (3) adjacent the outer circumferential surface (2).

Abstract: A machine for regrinding components of a constant velocity universal joint is disclosed. The machine contains (1) a chuck mechanism and an adaptor for mounting a component in the chuck mechanism, (2) a grinding bit comprised of a grinding tip, an arbor, and means for removably attaching the grinding tip to the arbor, (3) a rotatable support means for supporting the chuck mechanism, (4) a high speed spindle, (5) a means for adjusting the position of the spindle in the Y axis to move the spindle in and out, (6) means for injecting nonaqueous lubricant onto the grinding bit, and (7) means for purifying contaminated nonaqueous lubricant.

Abstract: A process for selectively abrading one surface of a veneer knife at a higher rate that the other face and includes a novel way of providing lubricating and cooling fluid to the faces of the knife wherein the majority of the lubricant is provided to the face which abrades slower to further enhance the self sharpening of the knife.