File Patents (Class 451/79)
  • Polishing slurry for aluminum and aluminum alloys
    Patent number: 8251777
    Abstract: The invention is directed to a method of polishing a surface of an object that includes aluminum. The method includes the step of contacting the surface of the object with a soft polishing pad and a polishing composition. The polishing composition includes abrasive particles, an agent that oxidizes aluminum, and a liquid carrier to polish the surface of the object. The polishing composition includes the abrasive particles suspended in the liquid carrier, and is applied at a pH above about 7.
    Type: Grant
    Filed: February 11, 2008
    Date of Patent: August 28, 2012
    Assignee: Cabot Microelectronics Corporation
    Inventors: Kevin Moeggenborg, John Clark, Jeffrey Gilliland, Stanley Lesiak, Susan Wilson, Vlasta Brusic
  • Use of CMP for aluminum mirror and solar cell fabrication
    Patent number: 8062096
    Abstract: The invention is directed to a method of polishing a surface of a substrate comprising aluminum, comprising contacting a surface of the substrate with a polishing pad and a polishing composition comprising an abrasive, an agent that oxidizes aluminum, and a liquid carrier, and abrading at least a portion of the surface to remove at least some aluminum from the substrate and to polish the surface of the substrate, wherein the abrasive is in particulate form and is suspended in the liquid carrier.
    Type: Grant
    Filed: June 30, 2005
    Date of Patent: November 22, 2011
    Assignee: Cabot Microelectronics Corporation
    Inventors: Vlasta Brusic, Richard Jon Jenkins, Christopher C. Thompson
  • Method and apparatus to remove cast from an individual
    Patent number: 8042439
    Abstract: A method for installing a fiberglass cast on and removing the cast from an individual includes a guide track and cutting tool designed to control carefully the vertical displacement and lateral displacement of the tool when the tool is used to cut the cast, and, accordingly, to prevent, while a cast is being removed, injury to the individual.
    Type: Grant
    Filed: December 1, 2008
    Date of Patent: October 25, 2011
    Inventors: Suresh Nayak, Ronald R. Watson
  • Ball polishing method and apparatus, and annular groove forming method
    Patent number: 5906535
    Abstract: A ball polishing method includes the steps of rotating one of two plates through use of a rotating mechanism while balls are sandwiched between the plates, pressing one of the two plates against the other plate via a guide slide mechanism for guiding one of the two plates to the other plate by means of a pressing mechanism, and polishing the balls while the pressing force is regulated through use of a pressing force control mechanism. The method is further provided with rotary support means for supporting the rotating mechanism and guide support means for supporting the guide slide mechanism, and at least one of them utilizes hydrostatics. By virtue of this method, a machining pressure can be controlled with a high degree of accuracy, and the accuracy of polishing of balls can be improved.
    Type: Grant
    Filed: May 27, 1997
    Date of Patent: May 25, 1999
    Assignee: NSK Ltd.
    Inventors: Katsuhisa Tonooka, Chuichi Sato, Hiroyuki Nojima, Yuichi Sumita, Shoji Jibu