Abstract: In an airlock system, through which drums containing radioactive material are transferred into a containment area, a passage has an intermediate region, of reduced cross section relative to the inlet and outlet ends of the passage. The passage has a convergent inlet region and a divergent outlet region leading, respectively, to and from the intermediate region. The passage functions in the manner of a venturi so that an airstream is caused to flow along the passage towards the containment so as to inhibit the escape of atmosphere therefrom. A roller conveyor transfers the items through the airlock system and a detector monitors the atmosphere in the passage.

Abstract: An air filtering system for filtering air streams for use in a clean environment to effectively remove a process-limiting molecular contaminant therefrom comprising sequentially arranged upstream and downstream air filtering beds. The upstream air filtering bed is positioned to receive an air stream for use in the clean environment and comprises an upstream reagent selected to effectively remove the process-limiting molecular contaminant from the air stream as the air stream passes through the upstream air filtering bed, the upstream reagent releasing a characteristic volatile component into the air streams. The downstream air filtering bed is positioned to receive the air stream that has passed through the upstream air filtering bed and comprises a downstream reagent selected to remove the characteristic volatile component released by the upstream reagent into the air stream. Clean environments (e.g., a deep UV processing station) incorporating the above-mentioned air filtering system are also disclosed.

Abstract: In order to transfer a magazine from a depositing position to a processing station, a linear drive for a rigid gripper arm is attached to a supporting column, an air passage opening being formed by the space between the supporting column and an elevator drive, this linear drive being vertically adjustable in the movement direction of the elevator. The range of action of the gripper arm is located above the magazine in the depositing position and is directed vertically to the movement direction of the elevator. All drive parts are separated from the clean room by a dust-tight enclosure and suction devices are arranged adjacent to openings through which the transport elements project into the clean room.

Abstract: A gas injection apparatus and process to form a controlled atmosphere in a confined space, comprising at least one assembly of ducts installed in series and/or in parallel, of which at least a part (2, 12, 13) of a duct comprises gas injection apertures. The assembly is supplied by at least one gas supply main (9, 14, 15), each main being connected to the assembly at the level of a primary connection node (8, 16, 17), the dimensions of the assembly observing the following relationship:.SIGMA..omega..sub.i /.SIGMA..phi..sub.i .gtoreq.1, preferably .gtoreq.1.5;wherein .SIGMA..omega..sub.i represents the sum of internal sections of the gas supply mains feeding the assembly and .SIGMA..phi..sub.i represents the sum of the cross-sections of the gas injection apertures of the ducts assembly.

Abstract: A clean space system prevents pollution of clean surroundings in a processing space. Pollution is avoided which could otherwise occur when a worker comes in contact with the processing space while carrying out processes and operations in the clean surroundings. The apparatus includes a clean processing space, in which the processes and operations are carried out, and a preparing space coupled with an opening for work in the processing space. The preparing space is used by the worker prior to entering the processing space. In the preparing space, the worker performs preliminary actions such as changing his clothes and cleaning himself using an air shower to remove particles from his body.

Abstract: For reducing the equipment cost for monitoring dust particles and improving the operation efficiency in a clean room, a plurality of sampling tubes each having a plurality of perforations formed in the side thereof and along the extension thereof are disposed under the floor board of the clean room so as to extend in X and Y directions. The perforations are for sucking the air together with dust particles discharged from the clean room through openings formed in the regions defined in rows and columns on the floor board. The perforations are formed corresponding to each of the region. The sampling tubes are sequentially selected to be connected to laser particle counters dedicated for the X direction and Y direction, respectively, and the dust particles sent via each of the sampling tubes are counted.

Abstract: Treatment booth provides patient isolation for sputum induction and aerosolized treatment. The booth is provided with a seat assembly to enable a patient to comfortably recline in a number of positions. Hazardous microbial airborne particles within the booth are filtered using a removable HEPA filter and U.V. germicidal radiation lamps supported by a rigid floor assembly constructed from a grid of interconnected longitudinal and transverse members.

Abstract: A plurality of shelves (14) having an storage space (13) are provided in the vertical direction, each of which is open in a front face and closed on the side of a back face with a space (16) by a cover (11), a clean air supply unit (20) comprising a fan (23) and a filter (22) is provided vertically in plural levels, and air inlets (17, 18A and 18B ) are formed on the side of the cover (11).By driving the fans, air can be inspired from within the space, discharged, cleaned to a high cleanliness through a filter, and supplied from the side of the back face to the shelves. Cargos stored in the storage spaces are maintained at a high cleanliness by the clean air flowing from the back face to the front face. Since the space is subject approximately to the barometric pressure, any dirty air that has not passed through the filter is prevented from leaking to the side of shelves and to the outside from a joint of the cover.

Abstract: The apparatus for treating small items is provided with a workbench surface which is supplied with air from above from a flow space and which is sealingly surrounded by a double-wall housing. The housing forms continuously extending flow cross-sections at edges of the surface. Disposed in front of the housing wall is a partition which defines therewith the flow cross-sections and forms in the interior of the housing a deflection edge at a spacing from the workbench surface.

Abstract: A clean room system has at least one clean room through which clean air is guided. The clean room has a bottom through which the clean air exits. At least one blower for sucking the clean air from the clean room through the bottom is provided. The blower is in the form of an axial blower operating at low pressure. At least one inlet channel for introducing the clean air leaving the blower into the clean room is provided. Filter units are positioned at the ceiling of the clean room for filtering the clean air before entering the clean room.

Abstract: A method for protecting an ultraclean surface of an object includes the step of forming, from an ultraclean fluid, a laminar flow moving over the surface. In order to enhance the reliability of protection, the velocity in the layer of the laminar flow from the ultraclean is varied according to the height thereof in a cross-section perpendicular with respect to the direction of the propagation of the flow.

Abstract: A modular pharmacy and a modular pharmacy system and process for the admixture of intravenous drugs and total parenteral nutrition solution which includes automatic daily computer download of hospital prescriptions and the daily compounding under controlled systematic aseptic conditions including individually controlled environments at each work station and following systematically controlled process steps.

Abstract: An improved machine for performing a manufacturing process on a workpiece. The machine includes a cabinet defining an interior workspace for performing the manufacturing process. The workpiece is placed in the workspace by an operator. The cabinet is coupled with a gas source for receiving a flow of gas from the gas source. The improvement comprises a first aperture in the cabinet providing access to an interior chamber within the cabinet. The interior chamber has an interior surface and an open end aligned with the first aperture for storing a work-in-process unit. The interior chamber is accessible to the operator for transferring the work-in-process unit between the interior chamber and the workspace. The improvement further comprises a second aperture in the interior surface of the interior chamber, the second aperture admitting the flow of gas from the gas source to establish a laminar flow of the gas in the chamber intermediate the first aperture and the second aperture.

Abstract: A module for the construction of a cleaning room ceiling has a housing wh can be fitted like a tile in the ceiling and which is divided internally into three chambers. A fan in an upper false floor draws air into the housing along an upper chamber which is aligned with a sound-damping lining. Sound-damping baffles are provided on the underside of the upper floor and the upper side and lower floor in the intermediate chamber and the bottom of the lower chamber is closed by high efficiency particle filters.

Abstract: A coved corner facility for providing a sealed work area to handle, manipulate and formulate materials which includes a walled enclosure having a plurality of mutually adjoining generally planar walls which define a work area. The planar portions of at least a plurality of mutually adjoining pairs of the walls intersect at angles of less than about 135.degree.. Each of the plurality of adjoining pairs of the walls are connected by preformed generally arcuate transition areas extending continuously between the planar portions of the adjoining pairs of walls. An inlet port in the walled enclosure is provided for allowing air to flow into the work area. An outlet port is provided in the walled enclosure for allowing air to flow out of the work area. An air flow control device causes air to flow through the inlet port into the work area and out of the enclosure work area through the outlet port.

Abstract: An environmental control system including a modular isolation chamber wherein work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located, Use of the portable, modular chambers also permits control over particulate contaminates and individualized regulation of differing processing environments within a single room.

Abstract: In an automatic transferring system using a portable closed container in which articles to be conveyed between a first equipment and a second equipment are set in the portable closed container, which is automatically conveyed by an unmanned conveying vehicle; the automated guided vehicle has a container interface in its carriage which is adapted to control the operation of automatically taking the articles in and out of the closed container.

Abstract: According to the present invention, chamber units are sequentially coupled with each other to thereby provide a volume of clean space, and whereby different environments can be maintained in the different chamber units. An air blowhole or door is provided at an opening section of each chamber unit. Moreover, a space section can be defined at the coupling part of the chamber units, and a suction pump and a suction hose can be provided in the space section, so as to prevent the environments of the different chambers from influencing one another.

Abstract: A ceiling structure within a cleanroom, including an array of conventional HEPA filters supported in openings of a grid support structure, wherein the ceiling structure includes a gel track coupled near a lowest interior perimeter of each of the openings of the grid support structure. HEPA filters including a peripheral flange are suspended in the ceiling structure by having a ceiling edge of the peripheral flange immersed in the gel track in near proximity with the ceiling level. An inclined channel is formed along an inclined wall of the gel track such that a downward extension of the inclined wall projects into the vortex region under the grid support structure. Filtered air passing from the HEPA filter is then directed into this flow channel at a sufficient rate of speed to flush the particulate contaminate from the vortex region.

Abstract: A decompression apparatus comprises an exhaust line connected to a processing unit, an exhaust device connected to the exhaust line, whereby the processing unit is exhausted through the exhaust line, and an ambience in the processing unit can be set under a negative pressure, a main valve in the exhaust line for opening and closing the exhaust line, a bypass line having one end portion, connected to that portion of the exhaust line which is situated nearer to the processing unit than the main valve, and the other end portion connected to that portion of the exhaust line which is situated on the exhaust side of the main valve, the exhaust flow quantity of the bypass line per unit time being lower than that of the exhaust line, a sub-valve in the bypass line for opening and closing the bypass line, and a control unit adapted to close the main valve and the sub-valve as the pressure in the processing unit is increased from the negative pressure to the normal pressure and to open only the sub-valve to keep the ex

Abstract: A multi-compartment outer housing, positioned in an ambient fluid having an ambient pressure P, has a compressor developed fluid flow through the outer housing compartments. A multi-chamber inner housing is positioned in a housing compartment having a fluid pressure greater than the ambient pressure P. This inner housing has a sealed equipment chamber, a still-fluid chamber, and an optically transparent wall between the equipment and still-fluid chambers. The still-fluid chamber has a restricted port at its distal or lee end which places the still-fluid chamber in fluid communication with the housing compartment. The inner housing is oriented relative to a fluid egress port in this housing compartment so that the optically transparent wall, the equipment chamber and the fluid egress port are placed in a line-of-sight alignment through the restricted port of the still-fluid chamber.

Abstract: A substrate holder containing semiconductor substrates is held in an air-tight container for conveyance which is placed over the entrance of a chamber. The gas drawn by a first fan for circulating gas through the bottom wall of the chamber flows through a first duct for circulating gas so as to be cleaned by a first high-efficiency filter and to be supplied into the chamber again in a horizontal laminar flow. The clean gas is supplied into the chamber in a vertical laminar flow from a second duct for circulating gas which has a second fan for circulating gas and a second high-efficiency filter.

Abstract: A locating table apparatus according to the present invention is provided with a housing, a base member fixed in the housing, a table mounted so as to freely move in a longitudinal direction, driving members located on the base member for supporting and driving the table, and a plurality of electrostatic dust absorbing members arranged at predetermined positions in the housing via respective electrical insulative members, wherein the electrostatic dust absorbing members provide a parallel plate-shaped condenser. Further, the locating table apparatus may provide a dust counter for monitoring the dust density at predetermined positions outside the housing, a device for operating the electrostatic dust absorbing members when the monitored dust density exceeds a warning level, and a device for forcing the motor to stop in response to a level of a signal detected by the dust counter.

Abstract: An environmental control systems including a modular isolation chamber is disclosed. Together with associated atmospheric regulatory equipment, the connectable modular chambers provide a smaller, cost-effective alternative to the traditional clean rooms utilized for fabricating or processing semiconductors and other products. Because the work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located, decontamination of much of each room is not required. Use of the portable, modular chambers of the present invention also permits increased control over particulate contaminates smaller than heretofore satisfactorily regulated and individualized regulation of differing processing environments within a single room.

Abstract: A porous light-weight getter which collects particulate and molecular contaminates that is believed a significant improvement over the prior art is provided in which a metal mesh matrix is coated with a low-density porous aerogel. In the prior art bare metal mesh matrices have been employed as getters, which are subject to ablation from high-velocity contaminant particles. In the composite getter of the present invention, the low-density aerogel coating protects the enclosed metal matrix from ablation and also can attract and hold the incoming high-velocity particle. On its part, the metal mesh provides reinforcing support to the aerogel covering and also good thermal conductivity therein so that such covering can be cooled to the low temperatures that attract such contaminants. The invention further provides method for manufacture of the composite getters of the invention.

Abstract: A manufacturing plant is described for producing semiconductors that will function at a low production level during the initial phase. The plant can be expanded to provide a greater production volume with minimum additional investment, minimum disruption to the existing manufacturing line, and can be done quickly at minimum cost. Also described is a method for building a manufacturing plant for integrated circuit devices that can be operated at a low level during the initial phase, and provides for an efficient and rapid expansion to a higher level of manufacturing with minimum cost, and disruption to the existing line.

Abstract: A building houses a semiconductor manufacturing facility, which is circular in shape and is of a multi-story structure. A silo is located at the center for use in storing and transferring wafers to clean rooms disposed radially around the silo at each floor. Human access is not permitted in the silo and in the clean rooms in order to prevent contamination of the wafers. Due to the modularity of the clean room structures, clean rooms can be reconfigured easily without significant impact on the on-going manufacturing operation. The modularity also permits portions of the facility to be deactivated when not needed.

Abstract: An air lock system for the transfer of large containers into a containment comprises a set of horizontally and vertically slidable doors adapted to define a variable opening for the passage of containers. The set of doors cooperate with a further preceding set, which can be a single slidable door, to form an airlock. Ventilation means in the containment provide an inward air flow through the opening into the containment.

Abstract: A clean space having a desired total volume is formed by coupling unit room bodies in sequence. Alterations in the configuration of clarifying and air-conditioning facilities are carried out easily and quickly, even if the structure and disposition of the clean space are altered. Each of the unit room bodies includes an air-circulator such as a fan unit and a dust catcher such as an air-filter. Each of the unit room bodies also includes an air conditioner-setting space shut off from the clean space in the interior of the unit room body.

Abstract: A clean containment room construction (2) comprising a work room (4) having a floor (6), walls (8) and a ceiling (10), an isolation void (12) which surrounds the walls (8) and the ceiling (10) of the work room (4), air-circulating apparatus (14) for maintaining a circulation of air in the workroom (4) which is at a positive pressure with respect to atmospheric pressure, and air-circulating apparatus (16) for maintaining air in the isolation void (12) which is at a negative pressure with respect to atmospheric pressure.

Abstract: A device for sealing a clearance between a ceiling frame and a filter frame placed on the ceiling frame. The ceiling frame includes closed tubes and has an upper wall formed with holes for holding the interior of the ceiling frame in communication with a groove formed in the bottom face of the filter frame. The interior of the ceiling frame is given a negative pressure by suction.

Abstract: A portable clean air isolation enclosure which includes a collapsible enclosure, that has a top mounted inflatable plenum chamber, connected to a source of filtered air, and with peripheral curtains sealed at the bottom to the floor, to provide a positive or negative pressured sterile or dust free environment, which enclosure can be moved through normal doorways, set up and operated by one person.

Abstract: A cleaning device comprises at least one cleaning tub containing a cleaning liquid, a chamber housing the cleaning tub, a mechanism for taking an article to be cleaned in/out of the cleaning liquid in the cleaning tub, and a shutter for shutting the inside of the chamber from the outside thereof. The shutter opens when a cleaned material is conveyed in/out of the chamber, thereby passing the cleaned material there through. A clean air supplying unit for forming downflow of clean air around the cleaning tub is provided on the upper portion of the chamber. A exhausting unit for sucking the clean air passing around the cleaning tub and exhausting the air out of the chamber is provided on the lower portion of the chamber.

Abstract: A filter-ventilator-arrangement for employment with clean chambers with at least one ventilator of which the pressure side is located toward an air flow chamber which is limited by boundary walls including a flow chamber formed by at least one annular channel of which one of two boundary walls at least consists of a noise-damping material. Furthermore at least an outer boundary wall consists of noise-damping material. The arrangement includes modular units having several annular channels of which the boundary walls decrease in height from the outside to the inside. Each unit has at least one filter which is arranged in a region below the flow chamber. Innermost boundary walls with inner sides thereof adjoin a plate consisting of noise-damping material. The boundary walls are secured, hanging or suspended on the cover sealing part. At least one heat exchanger lies in a suction region of the ventilator via which the return air flows.

Abstract: A liquid spill containment system inserted into an open airflow structure such that minimum interference with existing airflow occurs while simultaneously directing liquid spill particles into spill containers. A deflector is located below an upper partition portion of the open airflow structure. Spill containers are positioned below the deflector. The deflector and containers are located with respect to each other such that liquid particles coming through the open airflow structure are directed by the deflector into a container while, simultaneously, airflow entering the open air structure is exited unimpeded.

Abstract: In a method of constructing a ceiling frame to support a filter at the ceiling of a clean room, the method is characterized in that a number of divisional frame units are formed, each in a rectangular frame, to frame a filter unit to be installed, that those divisional frame units are positioned one after another at the ceiling of the clean room, that the ceiling frame is formed by connecting, to unify, abutting frame members of the divisional frame units, and that the divisional frame units are hanged at the ceiling with hangers applied at the abutting portions of the divisional frame units.

Abstract: Portable, wheeled apparatus for transporting two or more contaminated asbestos workers to a remote decontamination facility after performing asbestos removal. The portable device is wheeled and is provided with a brake to selectively prevent rolling. A fiberglass shell is mounted upon a rugged angle iron frame and is provided with a window along one side. A hingedly connected door is preferably provided with a window and has a gasket to provide an air-tight seal. Internally mounted door latches permit locking and opening from the interior. An air inlet is provided with a HEPA filter and fan to create positive pressure within the enclosure. An exhaust port is provided at the top end and is also fitted with a HEPA filter. A sealing flap extends around the people carrier door and is provided with a Velcro surface for attachment to a cooperating Velcro surface on the decontamination chamber as well as the work area.

Abstract: A vertical heat treating apparatus comprises a casing having an opening through which articles to be processed are loaded and unloaded, a heat treating furnace provided in the casing, a loading and unloading mechanism provided under the heat treating furnace so as to load the articles to be processed in and unload the same from the heat treating furnace, and a clean air flow forming unit provided in a space which is formed in the casing and in which the loading and unloading mechanism is provided so as to form a clean air flow conducted from one side of the casing to the opposite side thereof.

Abstract: The clean room, which exceeds the Class 100 standards, constructed out of structural materials that are free of metal, in particular aluminum. The room is sterile and allows for a variety of manipulations to be performed including sensitive analysis steps. Intrinsic aluminum and most metal contamination is eliminated by constructing the clean room with aluminum free structural materials. Extrinsic contamination is prevented by following standard clean room procedures in a two-door positive pressure entry system under a single self-motorized ULPA filtered air flow. Analysis of samples is conducted under a vertical laminar ULPA filtered air flow at at least a Class 10 limit particle concentration standard. In addition, a clean room containment center wherein samples are prepared and processed inside a modular containment center that is under a negative pressure allowing a horizontal laminar ULPA filtered air flow that provides a Class 1 limit particle concentration rating.

Abstract: A modular clean room structure in which the interior is finished without any seams between adjacent modules or crevices at the corners of the room such that the room can be easily sterilized. The seamless nature of the interior surface of the clean room eliminates locations where moisture can accumulate and promote bacteria growth. A cove is used to finish the corners of the room with a larger radius curve blending smoothly into adjacent flat surfaces. A durable coating is applied continuously over the ceiling, side walls and floor of the clean room to provide a seamless interior surface.

Abstract: The invention relates to an air circulation and filtration system for use with an indoor ice-skating arena. The air circulation and filtration system consists of intake and return air panels which replace and simulate in substantially all respects the boundary "boards" commonly used in indoor ice-skating facilities. The circulation and filtration system remains designed to remove undesirable gases such as carbon monoxide, carbon dioxide, nitrogen dioxide, and exhaust gases emanating from ice resurfacing machinery, from the ice-skating areas used by skaters. The return air panels contain a plurality of angularly offset air passage apertures which direct an air circulation course within an indoor ice-skating arena. The angularly offset air passage apertures promote a circular air course proximal to the ice-skating surface. The location of the intake air panels also promotes a circular air flow course.

Abstract: An air supplying apparatus for supplying a clean room with air having a conditioned cleanliness, temperature and/or humidity includes an air control unit for discharging the controlled air, and an air outlet duct connected to an air outlet of the air control unit so as to receive the conditioned air from the air control unit through an opening which opens in a direction different from the direction of flow of air through the air control unit. The air outlet duct is formed from one or more perforated sheets having a multiplicity of air outlet apertures. The cross-sectional area of the air passage formed in the air outlet duct preferably progressively decreases towards the downstream end of the duct. A joint duct, which guides air in a direction different from the directions of flow of air through the air control unit and through the air outlet duct, may be connected between the air control unit and the air outlet duct.

Abstract: A clean air apparatus comprises a body in which clean air is supplied, an I/O port having an opening for carrying a carrier housing objects to be treated in/out of the body, a door which opens/closes the opening, and dust preventing device for preventing dusts from entering the body from the outside through the opening, when the door is opened.

Abstract: An environmental control system including a modular isolation chamber wherein the work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located. Use of the portable, modular chambers also permits control over particulate contaminates and individualized regulation of differing processing environments within a single room.

Abstract: A clean room diffuser panel for positioning below a ceiling grid mounted filter element. The diffuser panel is perforated throughout its area with increased size and density of perforations in a peripheral region to provide increased airflow beneath the ceiling grid. The peripheral regions are further angled or provided with directional vanes to create a lateral airflow beneath the ceiling grid.

Abstract: A semiconductor processing apparatus comprises a main body having an air passage, a plurality of filter units connected in series with the air passage in the main body, each filter unit having an air intake port, an air otlet port and an air blower, the air intake port of each filter unit communicating with the air outlet ports of the filter units disposed upstream side of the air passage, and a mechanism for arranging articles to be processed close to the air outlet port of each filter unit such that air is supplied to the articles to be processed after the air has passed through the corresponding filter units.

Abstract: A device attachable to a suspended floor member (i) for collecting materials which fall through grid openings in the floor member and (ii) for controlling the rate of airflow through the grid openings in an adjustable manner. The device includes a spill container for positioning under the grid openings of the floor member in a coordinated position such that a venting path is provided for permitting airflow past the spill container from above the floor member while retaining the capacity to collect liquids and particulate matter flowing through the grid openings. Adjustable dampening structure is coupled with the spill member to provide selection of differing vent openings to control rate of airflow through the structure.

Abstract: A filtration system for removing gaseous and particulate contaminants from a contaminated structure includes a positive pressure source for raising the static pressure within the contaminated structure above an ambient pressure; and a decontamination tunnel which seals around an outlet opening in the contaminated structure. The tunnel contains and channels the contaminates as they exit the contaminated structure. The tunnel includes an outer, gas impermeable skin; removable frames which support the skin; filters which are mounted within the tunnel; and an exhaust duct for channelling filtered air from the tunnel. In a first embodiment, the filters may be wetted with a wetting or neutralizing agent before they are installed within the tunnel; or alternatively, the filters may be dry filters impregnated with dry chemicals that may neutralize or dilute the exhausted contaminates.

Abstract: A clean room arrangement comprises a clean room having an upper portion and a lower portion. Clean air is introduced into the upper portion of the clean room, flows downward and expelled from the lower portion of the clean room. An air recirculation passage is connected to the clean room such that the lower portion of the clean room is communicated with the upper portion of the clean room. A heat source is provided in the air recirculation passage to generate an ascending flow of air in the air recirculation passage so that the air descends in the clean room due to natural convection.

Abstract: This invention relates to operable partition systems for internally partitioning clean room areas into various work area configurations without the need for substantial manual operations. The operable, internally-partitionable clean room includes internal partitions which can be moved to a plurality of predetermined sites for physically, environmentally or visually separating the working area. This permits the user to easily provide the requisite level of work area separation. The internal partition system may be automatically operated. The partition system may be stored at one or more locations within the clean room when not in use. The operable partition system may include a track and carrier assembly for moving the internal partitions into place, typically an overhead track and carrier assembly.