Interpolymerized With Hydrocarbon Monomer Patents (Class 526/272)
  • Patent number: 6610219
    Abstract: Functional optical materials for optical systems that are typically useful in optical waveguides, optical switching systems, optical modulators, optical computing systems and the like. Included are polymer systems and electrooptical chromophores. Polymers are thermoplastic and/or thermosetting polymers and are blended or co-polymerized with the electrooptic chromophore. The thermoplastic or thermosetting polymer selected from an acrylic/methacrylic, polyester, polyurethane, polyimide, polyamide, epoxy resin, or hybrid (organic-inorganic) or nanocomposite polyester polymer. The electrooptic chromophore is selected from a substituted aniline, substituted azobenzene, substituted stilbene, or substituted imine. Methods for improving adhesion promotion for the various novel materials are also provided.
    Type: Grant
    Filed: February 6, 2001
    Date of Patent: August 26, 2003
    Assignee: Battelle Memorial Institute
    Inventors: Vincent D. McGinniss, Steven M. Risser
  • Patent number: 6608158
    Abstract: The present invention relates to a copolymer resin for a photoresist used in far ultraviolet ray such as KrF or ArF, process for preparation thereof, and photoresist comprising the same resin. The copolymer resin according to the present invention is easily prepared by conventional radical polymerization due to the introduction of mono-methyl cis-5-norbonen-endo-2,3-dicarboxylate unit to a structure of norbornene-maleic anhydride copolymer for photoresist. The resin has high transparency at 193 nm wavelength, provides increased etching resistance and settles the problem of offensive odor occurred in the course of copolymer resin synthesis. Further, as the resin composition can be easily controlled due to the molecular structure, the resin can be manufactured in a large scale.
    Type: Grant
    Filed: January 22, 2002
    Date of Patent: August 19, 2003
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Min Ho Jung, Jae Chang Jung, Cheol Kyu Bok, Ki Ho Baik
  • Patent number: 6589705
    Abstract: A positive-working photoresist composition comprises (A) a resin comprising the specific repeating structural units which resin increases in its solubility in an alkaline developer when acted upon by an acid, (B′) an onium salt compound which generates an acid when irradiated with active ray or radiation and (C) at least one of fluorine-based and/or silicon-based surface active agent and nonionic surface active agent or a positive-working photoresist composition comprises (A) a resin comprising the specific repeating structural units which resin increases in its solubility in an alkaline developer when acted upon by an acid, (B) a compound which generates an acid when irradiated with active ray or radiation, and (D) a mixed solvent containing at least one propylene glycol monoalkyl ether carboxylate and at least one of solvents selected from the group consisting of propylene glycol monoalkyl ether, alkyl lactate and alkoxyalkyl propionate and solvents selected from the group consisting of &ggr;-butyrola
    Type: Grant
    Filed: October 30, 2000
    Date of Patent: July 8, 2003
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Kenichiro Sato, Kazuyoshi Mizutani, Shoichiro Yasunami
  • Patent number: 6569971
    Abstract: The present invention relates to photoresist monomers, polymers formed therefrom and photoresist compositions suitable for photolithography processes employing a DUV light source, such as KrF(249 nm) and ArF(193 nm); EUV; VUV; E-beam; ion-beam; and X-ray. Photoresist monomers of the present invention are represented by the following Chemical Formula 1: wherein, m is 1 or 2. Polymers of the present invention comprise repeating units derived from the comonomer of Chemical Formula 1, preferably together with monomers of the following Chemical Formula 2: wherein, R* is an acid-labile group, and W is 1 or 2.
    Type: Grant
    Filed: August 26, 1999
    Date of Patent: May 27, 2003
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Chi Hyeong Roh, Jae Chang Jung
  • Patent number: 6566037
    Abstract: A polymer comprising recurring units of formula (1) and having a Mw of 1,000-500,000 is provided. R1 is H, methyl or CH2CO2R3, R2 is H, methyl or CO2R3, R3 is alkyl, R4 is H, alkyl, alkoxyalkyl or acyl, R5 and R15 are acid labile groups, and at least one of R6 to R9 is a carboxyl or hydroxyl-containing monovalent hydrocarbon group, and the reminders are H or alkyl, at least one of R10 to R13 is a monovalent hydrocarbon group containing a —CO2— partial structure, and the reminders are H or alkyl, R14 is a polycyclic hydrocarbon group or polycyclic hydrocarbon-containing alkyl group, Z is a trivalent hydrocarbon group, k=0 or 1, x is>0, a, b, c and d are≧0, satisfying x+a+b+c+d=1. A resist composition comprising the polymer has significantly improved sensitivity, resolution and etching resistance and is very useful in microfabrication.
    Type: Grant
    Filed: March 5, 2001
    Date of Patent: May 20, 2003
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Jun Hatakeyama
  • Patent number: 6566038
    Abstract: A polymer comprising units of formulas (1) and (2) and having a Mw of 1,000-500,000 is provided. R1 is H, CH3 or CH2CO2R3, R2 is H, CH3 or CO2R3, R3 is alkyl, R4 is halogen or acyloxy, alkoxycarbonyloxy or alkylsulfonyloxy group which may be substituted with halogen, R5 is H or alkyl, R6 is an acid labile group, Z is a single bond or a divalent hydrocarbon group, k is 0 or 1, and W is —O— or —(NR)— wherein R is H or alkyl. A resist composition comprising the polymer as a base resin is sensitive to high-energy radiation, has excellent sensitivity, resolution, and etching resistance, and lends itself to micropatterning with electron beams or deep-UV rays.
    Type: Grant
    Filed: April 26, 2001
    Date of Patent: May 20, 2003
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana, Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe, Jun Hatakeyama
  • Patent number: 6548606
    Abstract: A process for preparing a grafted polymer in which a substrate polymer is graft reacted with a nitrogen-containing grafting monomer in the presence of a free radical initiator and an amide coupling inhibitor that reduces polymer crosslinking during the graft reaction.
    Type: Grant
    Filed: January 23, 2002
    Date of Patent: April 15, 2003
    Assignee: Infineum International Ltd.
    Inventors: Eleanor M. De Groot, Martin L. Hess, Robert B. Rhodes
  • Patent number: 6538086
    Abstract: The present invention relates to a polymer with at least one pericyclic protective group such as 2-methyl-2-bicyclo[2,2,1]heptanyl. The resist composition containing the polymer can be used as a chemically amplified resist and exhibits strong etch resistance. In addition, a line-and-space pattern of 0.1 &mgr;m pitch can be resolved successfully using the resist composition.
    Type: Grant
    Filed: February 28, 2000
    Date of Patent: March 25, 2003
    Assignees: Industrial Technology Research Institute, Everlight Chemical Industrial Corporation
    Inventors: Sheng-Yueh Chang, Bang-Chein Ho, Jui-Fa Chang, Jian-Hong Chen, Ming-Chia Tai
  • Patent number: 6533823
    Abstract: Provided is a dye composition for keratinous fibers, which comprises (A) a hydrolyzate of a lower alkyl vinyl ether/maleic anhydride copolymer partially crosslinked with a terminal unsaturated diene compound, or a monoalkyl ester of the hydrolyzate; and (B) a dye. The dye composition for keratinous fibers according to the present invention has a stable and appropriate viscosity even in a wide pH range and even in a system containing a salt or solvent at a high concentration; and has excellent usability and dyeing properties. It is particularly suited for use with an acid dye.
    Type: Grant
    Filed: March 5, 2001
    Date of Patent: March 18, 2003
    Assignee: KAO Corporation
    Inventors: Atsushi Nakashimada, Masaki Fukuhara
  • Patent number: 6534611
    Abstract: A functional polymer having active and stable functional groups useful for separation or reactive processes in chemical manufacture or analysis is disclosed. The polymer comprises repeat units having structures corresponding to cycloaddition products of polymeric 1-(vinylphenyl)ethylene with electron-poor alkenes. A process for preparing the functional polymer does not require radical reactions or the exclusion of oxygen. The properties of the polymeric matrix produced can be adjusted by modifying the polymer. For example, the polymer particle size and shape, porosity, swellability, surface area, and number, type and distribution of functional groups may be controlled.
    Type: Grant
    Filed: July 31, 2000
    Date of Patent: March 18, 2003
    Assignee: Active Materials Inc.
    Inventors: Graham D. Darling, Brent R. Stranix
  • Patent number: 6531563
    Abstract: Polymerization of a fatty acid or fatty acid derivatives containing conjugated double bonds and alkenes or alkynes containing electron acceptor substituents provides compositions useful as coatings, adhesives, sealants, fillers and the like.
    Type: Grant
    Filed: June 10, 1999
    Date of Patent: March 11, 2003
    Assignee: Henkel Kommanditgesellschaft auf Aktien
    Inventors: Johann Klein, Kai Boege, Wolfgang Klauck
  • Patent number: 6517990
    Abstract: There are provided a photosensitive polymer having a copolymer of alkyl vinyl ether and a resist composition containing the same. The photosensitive polymer includes a copolymer of alkyl vinyl ether and maleic anhydride, represented by the following structure: wherein X is one of a linear alkyl vinyl ether and a cyclic alkyl vinyl ether, which are respectively represented by the structures wherein y is one of the integer values 1 through 4, R1 is one of a hydrogen atom and a methyl group, R2 is a C1 to C20 hydrocarbon, and R3 is one of a hydrogen atom, a C1 to C3 alkyl group and an alkoxy group.
    Type: Grant
    Filed: May 23, 2000
    Date of Patent: February 11, 2003
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sang-jun Choi, Hyun-woo Kim
  • Patent number: 6503992
    Abstract: Disclosed are cyclic phosphate esters of fumarate- or maleic acids suitable for use as a comonomer, capable of being copolymerized with a monovinylidene aromatic compounds to impart flame resistant properties to the resultant copolymers.
    Type: Grant
    Filed: July 24, 2001
    Date of Patent: January 7, 2003
    Assignees: The Dow Chemical Company, The University of Akron
    Inventors: Steven R. Mitchell, H. James Harwood, William G. Stobby, Duane B. Priddy, Kyung W. Suh
  • Publication number: 20020177069
    Abstract: The present invention discloses a cross-linking monomer represented by the following Chemical Formula 1, a process for preparing a photoresist polymer using the same, and said photoresist polymer: 1
    Type: Application
    Filed: February 22, 2002
    Publication date: November 28, 2002
    Applicant: Hyundai Electronics Industries Co., Ltd.
    Inventors: Jae Chang Jung, Keun Kyu Kong, Min Ho Jung, Geun Su Lee, Ki Ho Baik
  • Publication number: 20020169266
    Abstract: A photoresist polymeric compound includes a monomer unit represented by following Formula (I): 1
    Type: Application
    Filed: October 19, 2001
    Publication date: November 14, 2002
    Inventors: Yoshinori Funaki, Kiyoharu Tsutsumi, Akira Takaragi
  • Patent number: 6475497
    Abstract: The present invention relates to a non-aqueous denture adhesive composition comprising a safe and effective adhesive amount of a denture adhesive; a safe and effective amount of an anticalculus agent; and a non-aqueous denture adhesive carrier; wherein the anticalculus agent is a material effective in reducing calcium phosphate mineral deposition related to calculus formation. The present invention further relates to a method of delivering an anticalculus agent to the oral cavity and teeth, by applying the above composition to dentures, directly to the oral cavity, or applying it to both, and thereafter securing the dentures to the oral cavity.
    Type: Grant
    Filed: November 20, 2000
    Date of Patent: November 5, 2002
    Assignee: The Procter & Gamble Company
    Inventors: Jayanth Rajaiah, Kimberly Ann Gilday-Weber, Lisa Catron Ernst
  • Publication number: 20020160301
    Abstract: The present invention provides a cross-linker monomer of formula 1, a photoresist polymer derived from a monomer comprising the same, and a photoresist composition comprising the photoresist polymer. The cross-linking unit of the photoresist polymer can be hydrolyzed (or degraded or broken) by an acid generated from a photoacid generator on the exposed region. It is believed that this acid degradation of the cross-linking unit increases the contrast ratio between the exposed region and the unexposed region. The photoresist composition of the present invention has improved pattern profile, enhanced adhesiveness, excellent resolution, sensitivity, durability and reproducibility.
    Type: Application
    Filed: April 9, 2002
    Publication date: October 31, 2002
    Applicant: Hyundai Electronics Industries Co., Ltd.
    Inventors: Geun Su Lee, Jae Chang Jung, Ki Ho Baik
  • Patent number: 6451501
    Abstract: A chemical amplification resist composition comprising an acid sensitive copolymer wherein the protecting group of a protected carboxyl group bonded to the side chain of a first monomer unit is represented by the following formula (I): where R1 represents hydrogen or another substituent, L represents a linking group and n is an integer of 1 to 4, and a second monomer unit has an acidic functional group protected with an acid-unstable protecting group, bonded to its side chain. It can be used to form fine resist patterns that have practically usable sensitivity and undergo no swelling.
    Type: Grant
    Filed: September 13, 2000
    Date of Patent: September 17, 2002
    Assignee: Fujitsu Limited
    Inventors: Koji Nozaki, Ei Yano
  • Publication number: 20020086956
    Abstract: A process for producing a copolymer of an &agr;,&bgr;-unsaturated monomer having at least one pendant unit selected from a carboxylic acid group and derivatives thereof, and a copolymerizable monomer is described in which the process is carried out in a single solvent which is particularly an aromatic solvent. Processes of controlling the reaction and the particle size of the polymer produced are also described.
    Type: Application
    Filed: November 9, 2001
    Publication date: July 4, 2002
    Inventors: Israel D. Fridman, John C. Lamont, Ervin Dan
  • Patent number: 6410670
    Abstract: The present invention relates to novel monomers and their polymers, which are useful in a photolithography employing a light source in the far ultraviolet region of the light spectrum, copolymers thereof, and photoresist compositions prepared therefrom. Photoresist monomers of the present invention are represented by the following Chemical Formula 1: wherein, R is substituted or non-substituted linear or branched (C1-C10)alkyl, substituted or non-substituted (C1-C10)ether, substituted or non-substituted (C1-C10)ester, or substituted or non-substituted (C1-C10)ketone; X and Y are independently CH2, CH2CH2, oxygen or sulfur; and i is 0 or an integer of 1 to 2.
    Type: Grant
    Filed: August 26, 1999
    Date of Patent: June 25, 2002
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Geun Su Lee, Cha Won Koh, Jae Chang Jung, Min Ho Jung, Ki Ho Baik
  • Patent number: 6403281
    Abstract: The present invention provides a cross-linker monomer of formula 1, a photoresist polymer derived from a monomer comprising the same, and a photoresist composition comprising the photoresist polymer. The cross-linking unit of the photoresist polymer can be hydrolyzed (or degraded or broken) by an acid generated from a photoacid generator on the exposed region. It is believed that this acid degradation of the cross-linking unit increases the contrast ratio between the exposed region and the unexposed region. The photoresist composition of the present invention has improved pattern profile, enhanced adhesiveness, excellent resolution, sensitivity, durability and reproducibility. where A, B, R1, R2, R3, R4, R5, R6 and k are as defined herein.
    Type: Grant
    Filed: August 22, 2000
    Date of Patent: June 11, 2002
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Geun Su Lee, Jae Chang Jung, Ki Ho Baik
  • Patent number: 6395851
    Abstract: The present invention is directed to copolymers of norbornene and functional group containing norbornene comonomers and processes for the preparation thereof. These polymers may be random, alternating or block copolymers or terpolymers, etc.
    Type: Grant
    Filed: June 9, 2000
    Date of Patent: May 28, 2002
    Assignee: Eastman Chemical Company
    Inventors: Gino Georges Lavoie, Peter Borden Mackenzie
  • Publication number: 20020061463
    Abstract: The invention provides a polymer comprising recurring units of formula (1-1) or (1-2) wherein k is 0 or 1, m is 0, 1, 2, 3 or 4, and n is 1 or 2 and having a weight average molecular weight of 1,000 to 500,000. A resist composition comprising the polymer as a base resin is sensitive to high-energy radiation, has excellent sensitivity, resolution, and etching resistance, and lends itself to micropatterning with electron beams or deep-UV.
    Type: Application
    Filed: September 14, 2001
    Publication date: May 23, 2002
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana, Takeshi Kinsho, Koji Hasegawa, Takeru Watanabe, Jun Hatakeyama
  • Patent number: 6391518
    Abstract: The present invention provides a photoresist monomer represented by the following formula 2; a photoresist copolymer represented by the following formula 100; and a photoresist composition containing the same. wherein, R1 and R2 are independently —COOH or —R—COOH; and R is a substituted or unsubstituted (C1-C10) alkyl. wherein, R1 and R2 are independently —COOH or —R—COOH ; R is a substituted or unsubstituted (C1-C10) alkyl; R3 is —COOR* or —R′COOR*; R* is an acid labile group; R′ is a substituted or unsubstituted (C1-C10) alkyl; R4 is H or R3; R5 is a substituted or unsubstituted (C1-C10) alkyl; and a:b:c is the polymerization ratio of the comonomer.
    Type: Grant
    Filed: July 23, 1999
    Date of Patent: May 21, 2002
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Min Ho Jung, Jae Chang Jung, Geun Su Lee, Ki Ho Baik
  • Patent number: 6387589
    Abstract: The present invention provides photoresist polymers and photoresist compositions comprising the same. The photoresist polymer is represented by the following Chemical Formula 5. Photoresist compositions containing the polymers of the present invention have superior transmittance at 157 nm wavelength, etching resistance, heat resistance, and adhesiveness. In addition, photoresist compositions of the present invention can be developed easily in 2.38 wt % aqueous TMAH solution, and are therefore suitable for lithography processes using a 157 nm wavelength-light source for fabricating a minute circuit of a high integration semiconductor device: wherein R, R*, X, Y, V, W, i, j, w, x, y and z are as described herein.
    Type: Grant
    Filed: August 16, 2000
    Date of Patent: May 14, 2002
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Cha Won Koh, Geun Su Lee, Ki Ho Baik
  • Patent number: 6380339
    Abstract: The present invention relates to a silicon-containing vinyl copolymer which includes a maleic anhydride repeating unit, a norbornene repeating unit with an acid-labile group, and a vinyl repeating unit with a silicon-containing group. The silicon-containing vinyl copolymer is suitable for use as a top layer resist in a bilayer resist system.
    Type: Grant
    Filed: December 27, 2000
    Date of Patent: April 30, 2002
    Assignee: Industrial Technology Research Institute
    Inventors: Mao-Ching Fang, Ming-Chia Tai, Jui-Fa Chang, Ting-Chun Liu, Tzu-Yu Lin
  • Publication number: 20020049287
    Abstract: The present invention relates to photoresist monomers, polymers formed therefrom and photoresist compositions suitable for photolithography processes employing a DUV light source, such as KrF (249 nm) and ArF(193 nm); EUV; VUV; E-beam; ion-beam; and X-ray.
    Type: Application
    Filed: August 26, 1999
    Publication date: April 25, 2002
    Inventors: CHI HYEONG ROH, JAE CHANG JUNG
  • Patent number: 6372851
    Abstract: Acid modified C5 hydrocarbon resins are disclosed. The resins are predominantly piperylene resins with isobutylene. The resins are acid modified with from about 0.1 to 30 weight percent maleic anhydride to provide an acid-modified resin with a acid number from about 30 to about 170 mg KOH/g resin. The acid-modified resins have a mettler drop softening point from about 40° C. to about 140° C. The acid modified resins are useful as a natural rosin alternative.
    Type: Grant
    Filed: July 6, 2000
    Date of Patent: April 16, 2002
    Assignee: Eastman Chemical Resins, Inc.
    Inventor: Michel Hendrikus Theelen
  • Publication number: 20020042485
    Abstract: The present invention relates to a silicon-containing vinyl copolymer which includes a maleic anhydride repeating unit, a norbornene repeating unit with an acid-labile group, and a vinyl repeating unit with a silicon-containing group. The silicon-containing vinyl copolymer is suitable for use as a top layer resist in a bilayer resist system.
    Type: Application
    Filed: December 27, 2000
    Publication date: April 11, 2002
    Applicant: Industrial Technology Research Institute
    Inventors: Mao-Ching Fang, Ming-Chia Tai, Jui-Fa Chang, Ting-Chun Liu, Tzu-Yu Lin
  • Patent number: 6369143
    Abstract: A radiation-sensitive polymer and a chemical amplification resist composition based on the polymer, which can be easily controlled in sensitivity by regulating the content and kind of the carboxylic acid-grafted norbornene derivatives in the matrix polymer and is superior in adherence to substrate and dry etch resistance, so that it can be formed into resist patterns improved in transparency, photosensitivity and resolution by use of KrF or ArF excimer lasers. The polymer is represented by the formula I: wherein, X is an acid-dissociable grafted norbornene derivative selected from the group consisting of the formulas II and III; Y is a carboxylic acid-grafted norbornene derivative represented by the formula IV, and l, m, n and o each are a repeating number not more than 0.5, satisfying the condition that l+m+n+o=l and 0.4≦o≦0.
    Type: Grant
    Filed: June 21, 1999
    Date of Patent: April 9, 2002
    Assignee: Korea Kumho Petrochemical Co., Ltd.
    Inventors: Joo-Hyeon Park, Seong-Ju Kim, Dong-Chul Seo, Sun-Yi Park
  • Patent number: 6369181
    Abstract: The present invention relates to a copolymer resin for a photoresist used with far ultraviolet rays such as KrF or ArF.
    Type: Grant
    Filed: December 29, 1998
    Date of Patent: April 9, 2002
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Min Ho Jung, Jae Chang Jung, Cheol Kyu Bok, Ki Ho Baik
  • Patent number: 6365691
    Abstract: A continuous, solvent-free process for obtaining solvent-free, fine white powders of high molecular weight alternating terpolymers of maleic anhydride, a C1-C4 alkyl vinyl ether and isobutylene, without odor or taste.
    Type: Grant
    Filed: July 6, 2000
    Date of Patent: April 2, 2002
    Assignee: ISP Investments Inc.
    Inventors: Russell Biss, Jeffrey Cohen, John Zamora, Krystyna Plochocka, Jeffrey A. Lynn
  • Patent number: 6358666
    Abstract: This invention relates to a chemically amplified positive photoresist composition comprising a multi copolymer copolymer whose repeating units is represented by the following formula I, a low molecular additive represented by the following formula 2 or 3, an acid generator and a solvent wherein the repeating units comprising X and Y are independent monomers, respectively, selected from the group consisting of the following formulae (II), (III) and (IV):
    Type: Grant
    Filed: July 14, 2000
    Date of Patent: March 19, 2002
    Assignee: Korea Kumho Petrochemical Co., Ltd.
    Inventors: Dong Chul Seo, Sun Yi Park, Joo Hyeon Park, Seong Ju Kim
  • Patent number: 6316554
    Abstract: A process for producing a copolymer of an a, &bgr;-unsaturated monormer having at least one pendant unit selected from a carboxylic acid group and derivatives thereof, and a copolymersable monomer is described in which the process is carried out in a single solvent which is particularly an aromatic solvent. Processes of controlling the reaction and the particle size of the polymer produced are also described.
    Type: Grant
    Filed: September 28, 1998
    Date of Patent: November 13, 2001
    Assignee: Camelot Superabsorbents Limited
    Inventors: Israel D. Fridman, John C. Lamont, Ervin Dan
  • Patent number: 6315987
    Abstract: A polymer useful in oral care compositions which has a reactive group covalently bonded to a bactericide, flavorant and/or essential oil compound, said bond being hydrolyzable in aqueous solution to slowly release said compound into said composition.
    Type: Grant
    Filed: May 10, 2000
    Date of Patent: November 13, 2001
    Assignee: ISP Investments Inc.
    Inventor: Krystyna Plochocka
  • Patent number: 6313250
    Abstract: The invention relates to polyfunctionally reactive polymeric substances which contain at least two structural units of the general formulae (I) and/or (II) in the molecule and whose polymer backbone linkages are C—C bonds, ether bonds, urethane bonds, amide bonds, ketone bonds or combinations thereof. The substances are useful as binders for various applications.
    Type: Grant
    Filed: April 6, 1999
    Date of Patent: November 6, 2001
    Assignee: BASF Aktiengesellshaft
    Inventors: Rainer Blum, Lukas Haeussling, Wolfgang Reich
  • Patent number: 6313201
    Abstract: A composition is provided which comprises catalase modified with a copolymer (A) and a second copolymer, i.e., copolymer (B). The copolymer (A) comprises an alkenyl ether, maleic anhydride, and at least one monomer selected from the group consisting of unsaturated carboxylic acid, vinyl compound and olefin, and copolymer (B) consists of an ethylenically unsaturated monomer and a monomer selected from the group consisting of a monomer having a carboxyl group and a monomer having an acid anhydride group, or a salt of the copolymer (B).
    Type: Grant
    Filed: December 22, 1998
    Date of Patent: November 6, 2001
    Assignees: Mitsubishi Gas Chemical Company, Inc., NOF Corporation
    Inventors: Satoshi Nanba, Tomomi Suzuki, Syunsuke Ohhashi, Tohru Yasukohchi
  • Patent number: 6310159
    Abstract: The present invention refers to a paper surface sizing composition comprising a copolymer having: a) structural units derived from ethylenically unsaturated hydrocarbons; structural units derived from monomers selected from esters of ethylenically unsaturated mono-carboxylic acids, half-esters of ethylenically unsaturated dicarboxylic acids, allylethers and vinylethers and mixtures thereof; optionally c) structural units derived from ethylenically unsaturated monomers selected from monocarboxylic acids as well as salts and amides thereof, dicarboxylic acids as well as salts, amides and half-amides thereof, and cyclic anhydrides and imides of dicarboxylic acids and mixtures thereof; and optionally d) structural units derived from alkyl or amino-substituted alkyl acrylates or methacrylates with the proviso, that if no structural units c) are present, the structural units b) are derived from monomers selected from half esters of ethylenically unsaturated dicarboxylic acids.
    Type: Grant
    Filed: January 19, 1999
    Date of Patent: October 30, 2001
    Assignee: The Dow Chemical Company
    Inventors: Jürgen Eiffler, Roger Carlsson, Jürgen Hermanns, Stephen Oliver
  • Patent number: 6306554
    Abstract: The invention includes polymers that contain a heterocyclic ring, preferably an oxygen- or sulfur-containing ring. The heterocyclic ring is preferably fused to the polymer backbone. The invention also provides photoresists that contain such polymers, particularly for imaging at short wavelengths such as sub-200 nm.
    Type: Grant
    Filed: May 9, 2000
    Date of Patent: October 23, 2001
    Assignee: Shipley Company, L.L.C.
    Inventors: George G. Barclay, Wang Yueh
  • Patent number: 6306990
    Abstract: Film-forming, functionalized polymers having 1,2-dicarboxylic acid monoester groups have at least two polymer units, one of which is acid-labile and hydrolysis-stable and the other is thermally stable. These polymers are used in particular in photoresists.
    Type: Grant
    Filed: April 26, 1999
    Date of Patent: October 23, 2001
    Assignee: Siemens Aktiengesellschaft
    Inventors: Stefan Hien, Michael Sebald
  • Patent number: 6284429
    Abstract: A novel ester compound having an exo-form 2-alkylbicyclo[2.2.1]heptan-2-yl group as the protective group is provided as well as a polymer comprising units of the ester compound. The polymer is used as a base resin to formulate a resist composition having a higher sensitivity, resolution and etching resistance than conventional resist compositions.
    Type: Grant
    Filed: February 24, 2000
    Date of Patent: September 4, 2001
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takeshi Kinsho, Tsunehiro Nishi, Hideshi Kurihara, Mutsuo Nakashima, Koji Hasegawa, Takeru Watanabe
  • Patent number: 6258508
    Abstract: The present invention relates to a polymer prepared by synthesizing monomer having a derivative of cholic acid, deoxycholic acid or lithocholic acid bonded to norbornene, and then homopolymerizing these monomer, copolymerizing these monomer with maleic anhydride, or copolymerizing these monomer, maleic anhydride and 2-hydroxyethyl 5-norbornene-2-carboxylate and/or 5-norbornene-2carboxylic acid, and its use as a photoresist. The polymer synthesized according to the present invention is dissolved in a solvent, together with a photo-acid generator, and filtered through a filter to make a photoresist solution which can be used to produce a lithographic image on a silicon wafer.
    Type: Grant
    Filed: February 25, 2000
    Date of Patent: July 10, 2001
    Assignee: Korea Advanced Institute of Science and Technology
    Inventors: Jin Baek Kim, Bum Wook Lee
  • Patent number: 6235849
    Abstract: The invention is directed to polymers containing a repeating unit derived from a norbornene sulfonamide. These may be addition polymers which include copolymers with one or more comonomers such as norbornene, ethylene, an acrylate or sulfur dioxide or carbon monoxide. Said monomers may be polymerized using single or multicomponent Group VIII catalysts. The norbornene sulfonamides can also form ROMP polymers using known metathesis catalysts. Preferably the ROMP polymers may be hydrogenated to give more stable polymers.
    Type: Grant
    Filed: February 3, 2000
    Date of Patent: May 22, 2001
    Assignee: The B. F. Goodrich Company
    Inventors: Saikumar Jayaraman, Richard Vicari, Larry F. Rhodes
  • Patent number: 6214956
    Abstract: Solvent-free, free-flowing, fine white powders of a copolymer of maleic anhydride and a C1-C4 alkyl vinyl ether having a specific viscosity of about 0.5 to about 5 (1% wt/v in methyl ethyl ketone, 25° C.) and substantially without residue, odor or taste. A solvent-free process of polymerizing the monomers in the presence of 0.01 to 1.9% acetaldehyde also is described.
    Type: Grant
    Filed: March 16, 1999
    Date of Patent: April 10, 2001
    Assignee: ISP Investments Inc.
    Inventor: Krystyna Plochocka
  • Patent number: 6197879
    Abstract: A polymer useful as an inorganic pigment dispersant is provided. The polymer is derived from monomers consisting essentially of an ethylenically unsaturated aromatic monomer, an ethylenically unsaturated dicarboxylic acid monomer, and an ethylenically unsaturated monocarboxylic acid monomer. The total amount of said ethylenically unsaturated acid monomers is sufficient to permit said polymer to associate with an inorganic pigment in an aqueous medium in a manner which disperses said inorganic pigment in said aqueous medium to form a stable aqueous dispersion of said inorganic pigment, and the amount of said ethylenically unsaturated aromatic monomer is sufficient to reduce the water sensitivity of a dried coating of a latex paint comprised of said stable aqueous dispersion of said inorganic pigment. A process of preparing a polymer useful as an inorganic pigment dispersant and a method of preparing an inorganic pigment dispersion useful in the preparation of latex paints are also provided.
    Type: Grant
    Filed: September 13, 1996
    Date of Patent: March 6, 2001
    Assignee: Henkel Corporation
    Inventors: Stephen A. Fischer, Michael S. Wiggins, Bruce Matta, Eric Nowicki
  • Patent number: 6146810
    Abstract: A copolymer represented by the formula I and a chemical amplification resist containing the copolymer, which can be easily controlled in sensitivity by regulating the content and kind of the norbornene derivatives in the matrix polymers in addition to being superior in adherence to substrate and dry etch resistance: ##STR1## wherein, X is selected from the group consisting of the following general formulas II, III and IV; and, l, m, n and o each are a repeating number not more than 0.5, satisfying the condition that l+m+n+o=1 and 0.4.ltoreq.o.ltoreq.0.
    Type: Grant
    Filed: June 21, 1999
    Date of Patent: November 14, 2000
    Assignee: Korea Kumho Petrochemical Co., Ltd.
    Inventors: Dong-Chul Seo, Sun-Yi Park, Joo-Hyeon Park, Seong-Ju Kim
  • Patent number: 6143466
    Abstract: A chemically amplified photoresist composition, having a large etching resistance and excellent adhesion and contrast characteristics, includes a polymer represented by formula (1): ##STR1## wherein R.sub.1 is hydrogen, --OH, --COOH, or aliphatic hydrocarbon having a C.sub.1 -C.sub.20 polar functional group, R.sub.2 is a t-butyl group, a tetrahydropyranyl group or a 1-alkoxyethyl group, l, m and n are integers, l/(l+m+n) equals 0.0 to 0.4, m/(l+m+n) equals 0.5, n/(l+m+n) equals 0.1 to 0.5, and the weight average molecular weight of the polymer is in the range of 3,000 to 100,000.
    Type: Grant
    Filed: September 20, 1999
    Date of Patent: November 7, 2000
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Sang-jun Choi
  • Patent number: 6143465
    Abstract: A photosensitive polymer represented by the following formula, and a resist composition including (a) a photosensitive polymer represented by the following formula: ##STR1## where R.sub.1 is a C.sub.1 to C.sub.20 aliphatic hydrocarbon, R.sub.2 is t-butyl, tetrahydropyranyl or 1-alkoxy ethyl, 1/(1+m+n) is from 0.0 to about 0.4, m/(1+m+n) is 0.5, and n/(1+m+n) is from about 0.1 to about 0.5, and (b) a photoacid generator (PAG).
    Type: Grant
    Filed: July 8, 1999
    Date of Patent: November 7, 2000
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Sang-jun Choi
  • Patent number: 6132926
    Abstract: A photoresist including a copolymer prepared from bicycloalkene derivative, maleic anhydride and/or vinylene carbonate, which has molecular weight ranging from about 3,000 to 100,000. The photoresist can be used for submicrolithography employing deep ultra violety as a light source. In addition to being of high etch resistance and thermal resistance, the photoresist has good adhesiveness and can be developed in a TMAH solution.
    Type: Grant
    Filed: December 30, 1997
    Date of Patent: October 17, 2000
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Jae Chang Jung, Cheol Kyu Bok, Ki Ho Baik
  • Patent number: 6127499
    Abstract: A polymeric amphipathic stabilizer is formed of hydrophobic monomer units and hydrophilic monomer units which comprise carboxylic free acid or acid salt units and glycidyl or anhydride units. The glycidyl or anhydride units react onto reactive groups on polymer particles when dispersed in non-aqueous liquid and provide improved stability when the particles are subsequently dispersed in liquid electrolyte.
    Type: Grant
    Filed: June 30, 1998
    Date of Patent: October 3, 2000
    Assignee: Ciba Specialty Chemicals Water Treatments Limited
    Inventors: Kenneth Charles Symes, Kishor Kumar Mistry