Abstract: A polyester polymer includes at least one hydroxyl terminated polyoxetane block containing repeat units derived from polymerizing at least one oxetane monomer having a pendant —CH2—O—(CH2)n—Rf group wherein said Rf group is partially or fully fluorinated. A preferred process for forming said polymer is by reacting a hydroxyl terminated polyoxetane with a polycarboxylic acid under appropriate conditions to form an ester linkage and then adding and reacting that product with polyester forming reactants. The polyester polymer containing at least one polyoxetane block therein when reacted with an amino resin curative can be used as a coating on a substrate wherein the coating has dry erase properties. The coated substrate can be used as prepared or applied to yet other substrates.

Abstract: A fluorene compound and polymers thereof having a polyphenylene group, and EL element comprising the same, which can be prepared through a Diels-Alder reaction of a compound having one or more cyclopentadienone group and a compound having one or more acetylene group and can be used as a core material for organic and polymeric EL element and/or other optical devices.

Abstract: Compositions of specialty fluoroelastomers containing copolymerized units of tetrafluoroethylene, propylene, optionally vinylidene fluoride, and a cure site monomer selected from the group consisting of i) trifluoroethylene, ii) 3,3,3-trifluoropropene-1, iii) 1,2,3,3,3-pentafluoropropylene, iv) 1,1,3,3,3-pentafluoropropylene, and v) 2,3,3,3-tetrafluoropropene are readily curable with polyhydroxy curing systems. The resulting cured articles have a combination of excellent resistance to alkaline fluids, superior tensile properties and compression set resistance.

Abstract: Fluorinated chemical precursors, methods of manufacture, polymer thin films with low dielectric constants, and integrated circuits comprising primarily of sp2C—F and some hyperconjugated sp3C—F bonds are disclosed in this invention. Precursors are disclosed for creating fluorinated silanes and siloxanes, and fluorinated hydrocarbon polymers. Thermal transport polymerization (TP), chemical vapor deposition (CVD), plasma enhanced CVD (PECVD), high density PECVD (HDPCVD), photon assisted CVD (PACVD), and plasma-photon assisted (PPE) CVD and PPETP of these chemicals provides thin films with low dielectric constants and high thermal stabilities for use in the manufacture of integrated circuits.

Abstract: To provide an un-sintered polytetrafluoroethylene processed article which has an un-sintered polytetrafluoroethylene layer formed by coating and/or impregnating with an aqueous dispersion of PTFE and is characterized in that a content of alkyl phenols detected from the un-sintered PTFE layer is not more than 0.1 ppm. The un-sintered PTFE-processed article scarcely contains alkyl phenols which are suspected as chemical substances having endocrine disrupting activity.

Abstract: Fluorinated oligomers, polymers, and copolymers including poly[[1,1 ′-biphenyl]-4,4′-diyl[2,2,2-trifluoro-1-(trifluoromethyl)ethylidene]] and other compounds useful for high performance polymer, electronic, aerospace, coatings, and high temperature gas separation applications. Also provided are methods for synthesizing fluorinated polymer derivatives.

Abstract: Process of producing polytrimethylene terephthalate (PTT) by esterification of terephthalic acid (TPA) with trimethylene glycol (TMG) in the presence of a catalytic titanium compound, precondensation and polycondensation. The esterification is effected in at least two stages, where in the first stage a molar ratio of TMG to TPA of 1.15 to 2.5, a content of titanium of 0 to 40 ppm, a temperature of 240 to 275° C., and a pressure of 1 to 5.0 bar, preferably 3.5 bar are used. In the at least one subsequent stage a content of titanium is adjusted which is higher than in the initial stage by 35 to 110 ppm.

Abstract: Disclosed are polyarylene ether sulfides and polyarylene ether sulfones for optical device and a method for preparing the same. Polyarylene ether sulfides containing fluorine and polyarylene ether sulfones containing fluorine are synthesized through polycondensation of pentafluorophenyl sulfide and pentafluorophenyl sulfone monomer with dihydroxy monomer. In addition, by attaching ethynyl phenol and phenylethynylphenol to terminals of the high molecular weight polymer, solvent resistance of the polymer is increased. Thus, the high molecular weight polymers prepared by very simplified process have low light loss, excellent resistance for heat, solvent and water, and so can be used to manufacture inactive optical waveguide devices.

Abstract: In 100 parts by weight of a composition, from 2 to 89 parts by weight of a fluorinated polymer having a fluorine content of at least 65 wt %, from 97 to 10 parts by weight of a non-fluorinated polymer and from 1 to 35 parts by weight of a dispersing agent having a carboxylic acid group or its derivative, or a sulfonic acid group or its derivative, are blended.

Abstract: A novel polycyanoaryl ether exhibiting excellent heat-resistance, hydrolysis-resistance and weatherability, as well as industrially high general-purpose properties, and the method for the production thereof is to be provided. The polycyanoaryl ether of this invention is represented by the formula (1): wherein R1 stands for a substituted or unsubstituted alkyl group of 1 to 12 carbon atoms, a substituted or unsubstituted alkoxy group of 1 to 12 carbon atoms, a substituted or unsubstituted alkylamino group of 1 to 12 carbon atoms, a substituted or unsubstituted alkylthio group of 1 to 12 carbon atoms, a substituted or unsubstituted aryl group of 6 to 20 carbon atoms, a substituted or unsubstituted aryloxy group of 6 to 20 carbon atoms, a substituted or unsubstituted arylamino group of 6 to 20 carbon atoms, or a substituted or unsubstituted arylthio group of 6 to 20 carbon atoms; R2 stands for a divalent organic group; and n stands for a degree of polymerization.

Abstract: A coating material comprising the following composition: 0.1 to 49 vol % of polyvinylidenefluoride (PVDF), 0.1 to 49 vol % of ethylene chlorotrifluoroethylene copolymer (ECTFE), 0.1 to 49 vol % of fluoroethylenepolypropylene (FEP) and balance substantially polytetrafluoroethylene (PTFE) is synthesized. Sintered coatings of this material are found to be non-stick and offer corrosion protection from a wide range of organic solvents and mineral acids.

Abstract: A polymer which has a flexible structure in its main chain and thus exhibits a high toughness and can difficultly be deteriorated in its mechanical properties and thermal properties even when sulfonated, a sulfonic acid group-containing polymer obtained by the sulfonation of the polymer, and a proton-conductive membrane having an excellent mechanical strength and durability made of the sulfonic acid group-containing polymer.

Abstract: Provided is a method of producing a polymeric fluorescent substance wherein one or more monomers represented by the general formula (1) are polymerized in the presence of a zerovalent nickel complex,

Abstract: A synthetic process of perfluoropolyether iodides, by reaction with LiI of monoacyl- or diacyl-halides of perfluoropolyethers, having number average molecular weight from 200 to 3,000, and having the following structure:

Abstract: 1

Abstract: A fluorochemical composition to impart water repellency and/or oil repellency to a substrate, the composition comprising one or more condensates of (i) a methylolated amine or a C1-C4 alkoxylated derivative thereof, (ii) a hydrocarbon compound represented by formula (II) and (iii) a fluorinated compound represented by formula (I): Rf—(X1)n—Z1  (I) wherein: Rf is a fluorinated aliphatic group; X1 is an organic divalent linking group; Z1 is selected from the group consisting of hydroxy, thiol, amide or acid groups; and n is 0 or 1; and Rh—Z2  (II)  wherein: Rh is a hydrocarbon group having at least 6 carbon atoms and optionally being substituted with 1 to 3 subsituents; Z2 is selected from the group consisting of hydroxy, thiol, amide or acid groups. The invention further provides a method of treatment of a substrate with the fluorochemical composition and a treated substrate.

Abstract: A class of fluorinated multifunctional alcohols and their derivatives such as acrylates, epoxies and vinyl ethers. The multifunctional alcohols were synthesized from a core molecule having at least three equivalents of hydroxy-reacting functional groups and a fluorinated molecule containing at least two hydroxyl groups.

Abstract: The process for producing a vic-dichloro acid fluoride compound in a short process and in good yield from the starting material which is inexpensive and readily available is provided. (RH1—EH1—)CRH2RH3CH2—OCORHB (I) is fluorinated in a liquid phase to form (CF2ClCFCl—EFF1—) CRF2RF3CF2—OCORFB (II), and then, an ester bond of the compound (II) is decomposed to form (CF2ClCFCl—EF1—)CRF2RF3COF(III) or the compound (III) and FCORFB (IV).

Abstract: The invention relates to conjugated polycarbazole derivates comprising repeating or alternating units of the formula: 1

Abstract: The present invention relates to water-borne ceramer compositions capable of being cured to form antistatic, abrasion resistant ceramers. The ceramer compositions comprise water having dispersed or dissolved therein a plurality of colloidal silica particles, a binder precursor, and an electrically conductive organic polymer. The present invention also relates to ceramer articles, for example, ceramer coatings and shaped ceramer particles made from the ceramer compositions and to methods of making the ceramer compositions and ceramer articles.

Abstract: A low dielectric constant material has a polymeric network that is fabricated from a first and a second component. The first component comprises a polymeric strand, and the second component comprises a molecule having a central portion with at least three arms extending from the central portion, wherein each of the arms includes a backbone with a reactive group. The first component and the second component form the polymeric network in a reaction that involves at least one of the reactive groups when the first and second components are thermally activated. Contemplated low dielectric constant materials are advantageously employed in the fabrication of electronic devices, and particularly contemplated devices include integrated circuits.

Abstract: The present invention refers to an optical film comprising one or more polyarylates having at least some units represented by the general structure: 1

Abstract: A method of preparing a composition containing a fluorocarbon thermoplastic random copolymer comprising the steps of: (A) providing a mixture having: (i) a fluorocarbon thermoplastic random copolymer having subunits of: —(CH2CF2)x—, —(CF2CF(CF3)y—, and —(CF2 CF2)z—,  wherein x is from 1 to 50 or 60 to 80 mole percent, y is from 10 to 90 mole percent, z is from 10 to 90 mole percent, x+y+z equals 100 mole percent; (ii) a filler comprising zinc oxide; (iii) a curable amino functional polydimethyl siloxane copolymer comprising aminofunctional units selected from the group consisting of (aminoethylaminopropyl) methyl, (aminopropyl) methyl and (aminopropyl) dimethyl; and (iv) antimony-doped tin oxide particles; (v) a bisphenol residue curing agent; and (B) curing the mixture for 5 to 10 hours at a temperature in the range of 25° C. to 275° C.

Abstract: A curable fluoropolyether rubber composition comprising (A) a straight-chain fluoropolyether compound having at least two alkenyl groups and a perfluoropolyether structure backbone, (B) an organosilicon compound having at least two silicon atom-bonded hydrogen atoms, which all form H—SiCH2— structures, and (C) a hydrosilylation catalyst cures into parts which have good heat resistance, chemical resistance, solvent resistance, parting property, water repellency, oil repellency and weather resistance as well as improved acid and alkali resistance and are useful as sealants.

Abstract: A polyester polymer including at least one polyoxetane block of repeating units derived from polymerizing at least one oxetane monomer having at least one pendant —CH2—O—(CH2)n— Rf group wherein said Rf group is partially or fully fluorinated is described. A preferred process for forming said polymer by reacting the hydroxyl terminated polymer with a polycarboxylic acid under appropriate conditions to form an ester linkage and then adding and reacting that product with polyester forming reactants.

Abstract: The invention relates to a fluorine-containing polybenzoxazole including a structural unit represented by the general formula (1): where X is a tetravalent organic group containing an aromatic ring, and two sets of N and O are each bonded to the ortho positions of the aromatic ring of X such that two five-membered rings are formed next to the aromatic ring of X. This polybenzoxazole demonstrates low dielectric constant and low coefficient of thermal expansion while maintaining the properties of polybenzoxazole including mechanical strength and thermal stability.

Abstract: Compositions and methods are provided in which an electrical device is fabricated by incorporating macrocycles in a polymer on a substrate portion of the device, and crosslinking the polymer to form a crosslinked polymer. It is preferred that at least some of the macrocycles are relatively large, including at least six rings in the backbone of a macrocycle. It is also preferred that rings used in forming the macrocycles may be relatively large, preferably having at least six members as in phenyl rings. The intermacrocyclic links can be relatively complex, such as where four macrocycles may be coupled to a single atom or a single phenyl group. In yet other aspects, macrocycles can be heavily conjugated, with more preferred macrocycles having a completely conjugated backbone. In yet other aspects the macrocycles can have backbones with ether, carboxyl, and ethynyl groups, some of which can be used in crosslinking without reliance on an extrinsic crosslinker.

Abstract: This invention relates generally to poly(aryl ether ketones) bearing alkylated side chains. It relates particularly to soluble, thermally stable, low dielectric poly(aryl ether ketones) with alkylated side chains and especially to films and coatings thereof. These poly(aryl ether ketones) have the following structural formula: wherein Y is selected from the group consisting of CF3 and CH3; and wherein R is CnH(2n+1) and n=11-18.

Abstract: A medical material composed of a poly(alkyl aryl ether)sulfone copolymer (A) and a thermoplastic polymer (B), such as cellulose triacetate, and being used in contact with the blood, wherein the concentration of the copolymer (A) is at least 40% by weight at least near the surface of a part having a surface to be used in contact with the blood and the copolymer (A) is a specified polysulfone bearing fluorine atoms and polyalkyl ether units and which is suitable for a hollow fiber membrane for artificial kidneys, and the like.

Abstract: Disclosed is a composition comprising a polymer with a weight average molecular weight of from about 1,000 to about 100,000, said polymer containing at least some monomer repeat units with a first, photosensitivity-imparting substituent which enables crosslinking or chain extension of the polymer upon exposure to actinic radiation, said polymer also containing a second, thermal sensitivity-imparting substituent which enables further crosslinking or chain extension of the polymer upon exposure to temperatures of about 140° C.

Abstract: Block copolymers containing a fluorinated hydrocarbon unit, a hydrocarbon unit, and a poly(oxyethylene) unit are useful in fluid formulations of pharmaceutical agents. A typical embodiment is: C11H23—CONHC2H4NHCO—C8F16—CONHC2H4NHCOO—(C2H4O)34—H.

Abstract: Dielectric compositions encompassing one or more poly(arylene ether) polymers are provided. The dielectric compositions have the repetitive structural unit: where n=1 to 200, Y and Ar are each a divalent arylene radical, Y derived from bisphenol compounds of general formula HO—Y—OH, Ar derived from difluoro diarylacetylenes and/or ethynylated benzophenones of general formula F—Ar—F and Z is optionally hydrogen, a methyl group or derived from a monofluoro-benzophenone derivative of general formula Z—F. Such poly(arylene ether) polymers are employed with a variety of microelectronic devices, for example, integrated circuits and multichip modules.

Abstract: Fluorinated chemical precursors, methods of manufacture, polymer thin films with low dielectric constants, and integrated circuits comprising primarily of sp2C—F and some hyperconjugated sp3C—F bonds are disclosed in this invention. Precursors are disclosed for creating fluorinated silanes and siloxanes, and fluorinated hydrocarbon polymers. Thermal transport polymerization (TP), chemical vapor deposition (CVD), plasma enhanced CVD (PECVD), high density PECVD (HDPCVD), photon assisted CVD (PACVD), and plasma-photon assisted (PPE) CVD and PPETP of these chemicals provides thin films with low dielectric constants and high thermal stabilities for use in the manufacture of integrated circuits.

Abstract: A polybenzoxazole precursor having recurring units represented by the following general formula (1) and a polybenzoxazole resin having a structure obtained by cyclizing the polybenzoxazole precursor: wherein n denotes an integer of 1-1000, and (i) when X is selected from bivalent aromatic groups represented by the general formulas (2)-(4) defined in the specification each having two OR groups (Rs each denotes H or a monovalent organic group and may be the same or different), and the amide group in the formula (1) and the OR group respectively bond to the adjacent carbon atoms of the aromatic group, Y denotes a bivalent organic group containing fluorine; and (ii) when Y is selected from bivalent aromatic groups represented by the general formulas (5)-(7) defined in the specification, X denotes a bivalent aromatic group containing fluorine and having two OR groups (Rs each denotes H or a monovalent organic group and may be the same or different), and the amide group in the formula (1) and the

Abstract: Use in the treatment of ceramic materials for obtaining an easy stain removal, of mono- and bifunctional (per)fluoropolyether derivatives having the following structures:

Abstract: The invention relates to a fluorine-containing polybenzoxazole including a structural unit represented by the general formula (1): where X is a tetravalent organic group containing an aromatic ring, and two sets of N and O are each bonded to the ortho positions of the aromatic ring of X such that two five-membered rings are formed next to the aromatic ring of X. This polybenzoxazole demonstrates low dielectric constant and low coefficient of thermal expansion while maintaining the properties of polybenzoxazole including mechanical strength and thermal stability.

Abstract: Process of producing polytrimethylene terephthalate (PTT) by esterification of terephthalic acid (TPA) with trimethylene glycol (TMG) in the presence of a catalytic titanium compound, precondensation and polycondensation. The esterification is effected in at least two stages, where in the first stage a molar ratio of TMG to TPA of 1.15 to 2.5, a content of titanium of 0 to 40 ppm, a temperature of 240 to 275° C., and a pressure of 1 to 3.5 bar are used. In the at least one subsequent stage a content of titanium is adjusted which is higher than in the initial stage by 35 to 110 ppm.

Abstract: The invention relates to novel crosslinkable, photoactive silane derivatives of the formula I mixtures of silane derivatives of the formula I and mixtures of silane derivatives of the formula I with uncrosslinkable silane derivatives as usually used for silanizing inorganic, oxide-containing surfaces. The invention furthermore relates to the use of silane derivatives of the formula I and of mixtures which contain at least one silane derivative of the formula I as orientation layers for liquid crystals and for the production of unstructured or structured optical elements and multilayer systems.

Abstract: Maghnia or Mostaganem bentonites, are activated by contacting the Maghnia or Mostaganem bentonite with an acid solution of selected concentration and then drying the Maghnia or Mostaganem bentonite to form an activated bentonite catalyst. This activated bentonite catalyst may be used to polymerize a vinyl, acrylic, cyclic ether, aldehyde, lactone or olefin monomer. In a further embodiment, a perflourinated amine or diamine is synthesized by contacting a Maghnia or Mostaganem bentonite with an acid solution of selected concentration, drying the Maghnia or Mostaganem bentonite, and absorbing a secondary amine with the Maghnia or Mostaganem bentonite to form a perflouroamide iodide salt. The perflouramide idodide salt can then be extracted with a polar solvent and neutralized by the use of a basic solution.

Abstract: A compound of the formula: and compound of the formulas: wherein R1 is independently in each occurrence C1-20 hydrocarbyl or C1-20 hydrocarbyl containing one or more S, N, O, P or Si atoms, C4-16 hydrocarbyl carbonyloxy, C4-16 aryl(trialkylsiloxy) or both R1 may form with the 9-carbon on the fluorene ring a C5-20 ring structure or a C4-20 ring structure containing one or more heteroatoms of S, N or O; R2 is independently in each occurrence C1-20 hydrocarbyl, C1-20 hydrocarbyloxy, C1-20 thioether, C1-20 hydrocarbylcarbonyloxy or cyano; R3 is independently in each occurrence C1-20 hydrocarbyl or C1-20 hydrocarbyl substituted with di(C1-20 alkyl)amino, C1-20 hydrocarbyloxy or C1-20 hydrocarbyl or tri(C1-10 alkyl)siloxy; a is independently in each occurrence 0 or 1; X is independently in each occurrence a halogen moiety; and Z is independently in each occurrence —B(OH)2, —B(OR4)2 or wherein R4 is independently in each occurrence a C1-10 alkyl

Abstract: Dichloro-tetrafluoro-[2,2]-paracyclophane (formula I), which is a novel compound useful as a material for forming a coating film by chemical vapor deposition, and a process for manufacturing thereof and poly-&agr;&agr;-difluoro-chloro-para-xylylene film prepared therefrom are disclosed. Dichloro-tetrafluoro-[2,2]-paracyclophane is manufactured by chlorinating tetrafluoro-[2,2]-paracyclophane. The film to be formed by chemical vapor deposition of dichloro-tetrafluoro-[2,2]-paracyclophane has remarkably improved thermostability, as compared with the conventional products and is expected to be applied in various fields.

Abstract: Optical waveguides prepared by irradiating selected regions of positive photochromic polymeric materials with actinic radiation are disclosed. The photochromic materials undergo an irreversible photochemical change which results in an increase in the refractive index of light-exposed regions. In addition, the materials exhibit negligible second-order polarizability prior to exposure and excellent nonlinear optical properties after exposure and polarization. Thus, the exposed regions are particularly useful as the core in active waveguides for use in second-order nonlinear optical applications, as well as the core in passive waveguides. In addition, a simple two step process is disclosed for forming optical waveguides from the positive photochromic polymers. Optical structures, such as optical integrated circuits, and optical devices which incorporate the waveguides are also disclosed.

Abstract: A (2,3,4,5,6-pentafluorobenzoyl)diphenyl ether compound represented by the formula (I): wherein R stands for a hydroxyl group or a group represented by ether ketone polymer represented by the formula (II): wherein n stands for a degree of polymerization, m is an integer of 0 or 1, and R1 stands for a group represented by the formula (III): wherein p is an integer 0 or 1 and R2 stands for

Abstract: A compound of the formula: and compounds of the formulas: wherein R1 is independently in each occurrence C1-20 hydrocarbyl or C1-20 hydrocarbyl containing one or more S, N, O, P or Si atoms, C4-16 hydrocarbyl carbonyloxy, C4-16 aryl(trialkylsiloxy) or both R1 may form with the 9-carbon on the fluorene ring a C5-20 ring structure or a C4-20 ring structure containing one or more heteroatoms of S, N or O; R2 is independently in each occurrence C1-20 hydrocarbyl, C1-20 hydrocarbyloxy, C1-20 thioether, C1-20 hydrocarbylcarbonyloxy or cyano; R3 is independently in each occurrence C1-20 hydrocarbyl or C1-20 hydrocarbyl substituted with di(C1-20 alkyl)amino, C1-20 hydrocarbyloxy or C1-20 hydrocarbyl or tri(C1-10 alkyl)siloxy; a is independently in each occurrence 0 or 1; X is independently in each occurrence a halogen moiety; and Z is independently in each occurrence —B(OH)2, —B(OR4)2 or wherein R4 is independently in each occurrence a C1-10 alkyl

Abstract: A method for the synthesis of TFPX-dichloride is disclosed. The method involves reacting hexachloro-p-xylene with anhydrous HF in an inert organic solvent. The reaction is advantageous in that it produces relatively high yields of TFPX-dichloride, provides little waste, and is carried out as a simple, one-step process.

Abstract: New starting materials and chemical processes will be used to make fluorinated poly(para-xylylenes) (F-PPX) and fluorinated poly(para-fluoroxylylenes) (F-PPFX). The processes will use some very low cost and readily available starting materials, catalysts, chemical reactors, transport polymerization (TP) systems, and chemical vapor deposition (CVD) systems commonly used for making F-PPX. New TP and CVD deposition systems will also be used to make F-PPX and F-PPFX. These polymers are used for the manufacture of low dielectric films with high thermal stability and are sufficiently strong to withstand planarization and polishing for the manufacture of integrated circuits.

Abstract: Polyarylene ether for optical communications, expressed by the formula 1: ##STR1## The polyarylene ether has excellent resistance to heat and film processing properties and the light absorption loss in the wavelength range for optical communications is low. Also, by controlling the copolymerization ratio of a monomer whose hydrogen of C--H bond is substituted by F and a monomer whose hydrogen of C--H bond is substituted by Cl, the refractive index of the polymer can be adjusted to a level suitable for an optical material used for optical communications.

Abstract: Before hexafluoropropene oxide (HFPO) is polymerized in a polymerization initiator solution of a polymerization initiator of the formula: CSOCF.sub.2 --Rf--CF.sub.2 OCs wherein Rf is a perfluoroalkylene group which may have an ether bond in an aprotic polar solvent, the initiator solution is treated by adding a perfluoroolefin thereto at a sufficient temperature for the removal of protonic substances, cesium fluoride and hydrogen fluoride. This simple treatment restrains chain transfer reaction, and the process is successful in producing a difunctional HFPO polymer having a high degree of polymerization while suppressing formation of a monofunctional HFPO polymer.

Abstract: The degree of bonding of a perfluoro polyether lubricant topcoat to various protective overcoats of magnetic recording media is improved by forming a silyl ether of the perfluoro polyether lubricant. The degree of bonding of the lubricant topcoat to a particular protective overcoat is optimized and controlled by selecting a silyl ether end group having a high affinity for the protective overcoat.

Abstract: A method is disclosed for making hydroxy-substituted ethynylated biphenyl compounds and for reacting such compounds with a family of noncross-linking thermosetting poly(arylene ethers) to produce novel poly(arylene ether) compositions which, when cured at glass transition temperatures greater than about 350° C. to form thin films, possess properties such as low dielectric constant, low moisture absorption, and high thermal stability. These films are suitable for use as intermetal dielectrics for multilevel interconnection.