Patent number: 8617305
Abstract: Novel families of tri-valent metal complexes including scandium, yttrium, lanthanum, cerium, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, aluminum, gallium, indium, manganese, antimony, bismuth; and of divalent metal complexes including magnesium, calcium, strontium, barium, manganese, cobalt, iron, nickel, ruthenium, copper, zinc, cadium are disclosed. These metal complexes can be used as precursors to deposit metal or metal oxide films in semi-conductor industries.
Type:
Grant
Filed:
January 11, 2012
Date of Patent:
December 31, 2013
Assignee:
Air Products and Chemicals, Inc.
Inventors:
Xinjian Lei, Daniel P. Spence
Publication number: 20130008345
Abstract: Novel families of tri-valent metal complexes including scandium, yttrium, lanthanum, cerium, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, aluminum, gallium, indium, manganese, antimony, bismuth; and of divalent metal complexes including magnesium, calcium, strontium, barium, manganese, cobalt, iron, nickel, ruthenium, copper, zinc, cadium are disclosed. These metal complexes can be used as precursors to deposit metal or metal oxide films in semi-conductor industries.
Type:
Application
Filed:
January 11, 2012
Publication date:
January 10, 2013
Applicant:
AIR PRODUCTS AND CHEMICALS, INC.
Inventors:
Xinjian Lei, Daniel P. Spence