Abstract: In semiconductor manufacturing, there are wafer fabrication processes in cluster tools that need a wafer to visit some processing steps for more than once, leading to a revisiting process. Also, wafers may be subject to wafer residency time constraints. By considering atomic layer deposition (ALD) as a typical wafer revisiting process, this invention studies the challenging scheduling problem of single-arm cluster tools for the ALD process with wafer residency time constraints. By recognizing that the key to this problem is to schedule the robot tasks, the present invention presents different robot task sequencing strategies. With these strategies for different cases, the present invention performs the schedulability analysis and derives the schedulability conditions for such tools for the first time. If schedulable, the present invention proposes scheduling algorithms to obtain an optimal schedule efficiently. Illustrative examples are given to show the application of the proposed concepts and approach.

Abstract: According to various embodiments, a load planning system is provided for simulating shipments based on a shipping entity's planned routing of packages and a shipper's (e.g., shipping entity customer) historical shipping volume. By using the load planning system to simulate shipments according to a variety of package routing plans, a user of the load planning system may identify shipping routes along which certain shipments may by-pass the sorting process of regional shipping hubs. These by-passing routes allow the shipping entity to provide the shipper with more efficient and less costly shipping options according to various embodiments.

Abstract: A press load balancer automatically balances the printing load over a number of presses by taking into account the load on each press and the substrates (i.e., paper types) and inks installed on the presses to improve throughput while minimizing load on the press operators.

Abstract: A method and system for treating a substrate are provided. The system includes a coating unit, a pre/post-exposure treatment unit, and a developing unit. Each of the units includes a load port and an index module. The pre/post-exposure treatment unit includes first and second modules that are arranged in different layers. The first module performs a process for coating a protective layer on the wafer before an exposure process. The second module performs a process for cleaning the wafer and a post-exposure bake process after the exposure process.

Abstract: A system and a method for controlling the operations of a manufacturing facility with production resources that execute a production process and a manufacturing execution system with a production modeler and a production scheduler. A man-machine interface and/or graphical user interface enable the user to enter production orders and production scheduling data into the execution system. A production scheduler database stores production orders and production scheduling data. A data server process updates sensitive data that are required for real-time scheduling when a user modifies sensitive data. The data server process executes an event list queue with the data modification events launched by the database, periodically checks the event list queue for data modification events, reads from the database only the modified data of the sensitive data and/or sensitive class of data, and merges the modified data with the existing data. The updated data are then accessible to all users.

Abstract: The present inventors devised, among other things, systems, methods, and software that radically simplify and reduce the time necessary to specify, design, manufacture, and document control panels and wiring harnesses for semi-custom and custom equipment, such as HVAC equipment. A computer storage medium includes data relating to a plurality of control panel enclosures and a set of rules for designing a control panel. The system receives a selection of two or more components for placement in the control panel, retrieves information about the two or more components from a database, and generates one or more layouts. The one or more layouts comprise placement of the two or more components within at least one of the plurality of control panel enclosures as a function of the set of rules for designing a control panel. The control panel enclosures are dynamically selected as a function of the two or more components.

Abstract: A system manages results of an analysis process on objects handled along a technical process line. The system contains measures for defining workflow steps of the technical process line and workflow execution software, and measures for generating for each object an object record containing the results of the workflow steps and a status. The system further has measures for defining an event manager for managing a transition from an actual status to a new status according to results of the workflow steps. The event manager contains a customized number of statuses linked to the workflow steps and contains for each transition a customizable set of rules for delivering check results. Finally, measures are provided for executing in parallel the analysis process, the workflow execution software and the event manager, thereby assigning a status to the object record depending on the check results derived from the execution of the set of rules.

Abstract: Common portions of applications are extracted as common system service. A platform is formed by the common system service and a general purpose OS. A printer application, a copy application, and various applications are mounted on the platform. As a result, each software (application) corresponding to a printer, a copier, a facsimile device, and so on can be developed efficiently and the productivity of the apparatus as a whole can be improved.

Abstract: Hardware resource sharing for a computerized system running software tasks. A mutex controller is associated with the hardware resource. Lock and unlock indicators are settable by a software task and readable by the controller, and locked and waiters flags are settable and readable by the controller. The controller monitors whether the lock indicator has been set and determines whether the locked flag is set. If not, it sets the locked flag and, if so, it sets the waiters flag and asserts a mutex interrupt signaling the computer system to divert the software task to run a lock request routine. The controller also monitors whether the unlock indicator has been set and then determines whether the waiters flag is set. If not, it clears the locked flag and, if so, it asserts a mutex interrupt signaling the computer system to divert the software task to run an unlock request routine.

Abstract: A system is disclosed providing visualization of a production control framework. The system includes a database storing production control data associated with one or more entities and a production control system coupled with the database and configured to model a production control framework of the one or more entities. The production control system includes one or more work centers authorizing one or more tasks for one or more parts and one or more manufacturing processes that produce one or more finished parts using the one or more parts.

Abstract: In accordance with aspects of the disclosure, systems and methods are provided for managing production resources including scheduling production events for production resources used to manufacture products relative to time intervals while maintaining collaboration among the production resources. The systems and methods may include retrieving information related to each production resource, evaluating each production event for each product to determine a sequence of the production events, and generating potential production scheduling schemes for use of each production resource within the time intervals while maintaining collaboration among the production resources. The systems and methods may include generating a production schedule for the production events within the time intervals based on the potential production scheduling schemes for use of each production resource within the time intervals while maintaining collaboration among the production resources.

Abstract: A manufacturing execution system (MES) with virtual-metrology capabilities and a manufacturing system including the MES are provided. The MES is built on a middleware architecture (such as an object request broker architecture), and includes an equipment manager, a virtual metrology system (VMS), a statistical process control (SPC) system, an alarm manager and a scheduler. The manufacturing system includes a first process tool, a second process tool, a metrology tool, the aforementioned MES, a first R2R (Run-to-Run) controller and a second R2R controller.

Abstract: Only a wafer for QC check may be transferred and a production wafer may prevent from being transferred into an assigned process chamber whose QC check is not completed after a maintenance task, and the production wafer may be processed the assigned process chamber after the completion of the QC check. The wafer for QC check is transferred while inhibiting a transfer of the production wafer into the assigned process chamber, and the production wafer is transferred into each of the process chambers of the plurality except the assigned process chamber.

Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

Abstract: A method for continuous production planning includes identifying a forbidden transition associated with production of first and second end products. The forbidden transition indicates that a manufacturer should not produce the first and second end products consecutively. The method also includes identifying a bridge product associated with the forbidden transition. The bridge product represents a product that the manufacturer could produce between production of the first and second end products. The method further includes determining a quantity of the bridge product that could be produced by the manufacturer. In addition, the method includes scheduling production of the first and second end products and the bridge product. At least a portion of the quantity of the bridge product is scheduled for production between the production of the first and second end products.

Abstract: A system and method is disclosed providing visualization of a production control framework. The system includes a storage medium stored therein one or more user interfaces providing a visual representation of one or more graphical elements representing one or more entities, the one or more entities comprising one or more work centers, wherein the one or more work centers each comprise one or more user interfaces. The system further includes a storage medium stored therein a job queue display within the one or more user interfaces and a plurality of tasks for each of a plurality of parts produced by the one or more entities.

Abstract: A system including a computer solves supply chain campaign planning problems involving major and minor setups. The computer is configured to execute a major campaign for two or more of a plurality of major product families and fix an optimal major product family to a major time period on a planning horizon, based at least on aggregated major productivity fractions and calculated second moments of a plurality of two or more major product families. The computer is further configured to execute a minor campaign for two or more minor product families associated with the optimal major product family, obtain a minor productivity fraction of a campaignable resource for the minor product family over at least a portion of a major time period and fix an optimal minor product family from the two or more minor product families to a minor time period based at least on the minor productivity fraction.

Abstract: The description refers to a method, computer program product, and computer system for displaying a chart for production planning. The chart includes a timeline, a material area associated with each of one or more materials and a resource area associated with each of one or more resources. The chart also includes a material sufficiency indicator provided within one or more of the material areas to indicate whether or not a sufficient amount of the associated material is available at one or more identified times to meet a demand of the one or more scheduled operations. The chart includes a scheduling hint that is displayed within a material area when an operation identifier has been selected. The scheduling hint identifies one or more portions within the material area for a material as providing either sufficient material or insufficient material for performance of the operation associated with the selected operation identifier.

Abstract: A system and method are described for managing instantiation of interface elements in a rich Internet application (RIA) that includes systematically creating a tree of descriptive nodes that describe the visual interface elements of the application. Only interface elements that are not stacked under other objects or not fully hidden on the screen are instantiated using the corresponding descriptive nodes. Detail objects corresponding to the descriptive nodes are then constructed and used by a rendering engine to render the visual interface elements of the declarative application. As the user moves to locations within the application that are stacked under other objects or are hidden, the descriptive nodes and detailed objects are created representing the interface elements of those locations for rendering by the rendering engine.

Abstract: A system for operating a process includes a processing circuit that uses a self-optimizing control strategy to learn a steady-state relationship between an input and an output. The processing circuit is configured to switch from using the self-optimizing control strategy to using a different control strategy that operates based on the learned steady-state relationship.

Abstract: The operation-time calculation device is configured such that the following processes are performed: a process in which operation-data information, work-time information, and operation-time information are stored in a storage unit, an input unit receives from a user parameter input at least including steps to be aggregated, aggregation start time, aggregation finish time, and aggregation unit time period, and a controller sets the aggregation time period on the basis of the parameters that were input; a process for converting total work time of the steps to be aggregated in each aggregation time period and the corresponding operation time using an operation-time conversion coefficient and calculating total operation time of the steps to be aggregated in the aggregation time period; a process for calculating the differential between total work time of the aggregation time period and total operation time; and a process for changing the operation-time conversion coefficient to minimize the differential.

Abstract: A system for determining a group of semiconductor manufacturing process steps with a similar influence on individual semiconductor products. The system generates a first table including time stamps for the individual semiconductor products. The system creates a second table including Q-times based on the first table. The Q-times refers to time differences between every pair of the time stamps. The system forms a dependency table by grouping the Q-times with similar dependencies together. The system identifies groups of the similar dependencies. The system extracts semiconductor process steps belonging to the groups.

Abstract: A supply chain management system for controlling component processes includes a computer device that is adapted to: detect a plurality of component processes; create a relative value of each one of the plurality of component processes; prioritize each one of the plurality of component processes according to sibling relationships; and control a flow of the plurality of component processes in a manufacturing line based on the prioritizing.

Abstract: A web-based tool (as a server) for integrated pharmaceutical analysis and report generation service is provided in the present invention. The server can be used for numerical analysis and report generation for pharmaceutical manufacturing, research and development, and has advantages such as simple operation, complicated but fast calculation and professional report generation, and high accuracy. The server includes at least one pharmaceutical manufacturing and research and development numerical analysis system configured to perform different pharmaceutical manufacturing and research and development numerical analyses and generate different reports.

Abstract: A substrate processing apparatus according to the present invention comprises a plurality of processing chambers, discharge systems each provided in conjunction with one of the processing chambers and a common discharge system connected with the discharge systems of at least two processing chambers among the discharge systems provided in conjunction with the individual processing chambers. The common discharge allows a switch-over between a scrubbing common discharge system that discharges discharge gas from each processing chamber after scrubbing the discharge gas at a scrubbing means and a non-scrubbing common discharge system that directly discharges the discharge gas from the discharge system of the processing chamber without scrubbing at the scrubbing means.

Abstract: A method and system for optimizing cutting of various materials. In some embodiments, an algorithm optimizes cutting by grouping items to be cut, wherein a plurality of cutting-stock pieces are grouped together and aligned such that a single cut simultaneously cuts items from all of the pieces. Some embodiments optimize a combination of reduced labor cost, reduced materials cost (e.g., reducing scrap), and/or reduced time needed to obtain an inventory of pieces cut to specified lengths and shapes (checking the various permutations). Overall optimization of labor and material is achieved by a combination of fewer cuts and reduced waste. Some embodiments include a computer-readable medium having instructions executed by a computer that optimizes placement of cuts to obtain cut-part items, and optionally controls a saw, laser, water-jet cutter or the like. In some embodiments, a human operator making the cuts is instructed by the computer to achieve the optimization.

Abstract: A method and system for scheduling a plurality of concurrent job sequences with constraints of precedence and mutual exclusion is described. In particular, a scheduler for a system performing biological analyses on clinical samples including non-preemptible jobs which must use a set of resources (machines) and having constraints on release times and execution times is described. The scheduling method uses on-purpose algorithmic solution that extracts the core of DBM data structures and Floyd-Warshall algorithm from the engine of a full-fledged Model Checking tool and tailors it to the specific requirements of the case.

Abstract: An embodiment is a method for semiconductor processing control. The method comprises identifying a key process stage from a plurality of process stages based on a parameter of processed wafers, forecasting a trend for a wafer processed by the key process stage and some of the plurality of process stages based on the parameter, and dispatching the wafer to one of a first plurality of tools in a tuning process stage. The one of the first plurality of tools is determined based on the trend.

Abstract: Methods and systems are provided for filtering lot schedules of a manufacturing facility. A first schedule is identified, in which the first schedule is a previously executed schedule. A processing device generates a pool of lots to be scheduled using information from the first schedule, in which the pool of lots is a subset of a plurality of lots associated with the first schedule. The processing device generates a second schedule using the pool of lots.

Abstract: Systems and methods for generating scheduling options in consideration of space and resource constraints in accordance with embodiments of the invention are disclosed. One embodiment of the invention includes a scheduling application that configures the processor to generate a project schedule from a TODO list comprising a plurality of construction operations, where the construction operations comprise at least one specific space requirements within a construction site, resource requirements, and a duration time.

Abstract: The disclosure generally relates to determining items to build based on inventory in an Internet of Things (IoT) network and using a 3D printer to build the determined items. In particular, inventory in the IoT network may be monitored to predict replacement needs associated with certain items in the IoT network inventory and determine further inventory needs (e.g., based on items that malfunction or break, upcoming calendar events, etc.). In one embodiment, in response to determining that additional inventory items may be needed in the IoT network, licenses and 3D printer blueprints to build the items may be obtained (internally and/or externally) and 3D printing may be scheduled to build the items (e.g., based on a priority scheme, timing criteria, resource availability, etc.), whereby the items may be added to the IoT network inventory when the 3D printer completes 3D print jobs to produce the items.

Abstract: Controllers communicate commands in terms of goals and constraints. A goal is an objective. A constraint is information regarding how the goal is to be achieved. For example, a constraint may specify when, or how much of, a resource may be used to achieve a goal. Additionally, or alternatively, a constraint may specify an acceptable or expected accuracy or tolerance regarding how the goal is achieved. Each controller is expected to achieve assigned goals in accord with associated constraints. Thereby, system communication may be reduced. If controllers achieve goals according to specified constraints, the controllers do not need to provide updates or be updated regarding the status of activities of other controllers or regarding other operational context information. In some embodiments, commands are generally not acknowledged. Instead, serving controllers respond to a command with an error message if a goal cannot be met in accord with an associated constraint.

Abstract: The present invention enables the efficient use of resources in the manufacture of substantially two-dimensional elements through multi-dimensional resource optimization subject to rules and objectives. The invention may be embodied as a computer-based method, a computerized system that performs the method, or a machine readable storage medium containing instructions that when executed cause performance of the method using the computerized system. To fulfill customer orders, product design data, resource data, and rules and objective data are accessed to determine the efficient use of the resources, such as consumption of particular units of raw material and utilization of production stations. For a given set of customer orders, multiple scenarios of production plans are computed and recomputed until an efficient production plan is achieved. The production plan can be generated at a location remote from the manufacturing site, and it can then be sent in an automated fashion to the production stations.

Abstract: A cluster tool may be operated on the basis of an enhanced sequencing regime in which the supply of substrates is controlled such that a planned time of maintenance is reached for two or more process chambers simultaneously. Consequently, the occurrence of non-correlated sequential down times of various process chambers may be significantly reduced, thereby enhancing throughput and availability of complex cluster tools.

Abstract: A system, method and computer program product for predicting at least one feature of at least one product being manufactured. The system receives, from at least one sensor installed in equipment performing one or more manufacturing process steps, at least one measurement of the feature of the product being manufactured. The system selects one or more of the received measurement of the feature of the product. The system estimates additional measurements of the feature of the product at a current manufacturing process step. The system creates a computational model for predicting future measurements of the feature of the product, based on the selected measurement and the estimated additional measurements. The system predicts the future measurements of the feature of the product based on the created computational model. The system outputs the predicted future measurements of the feature of the product.

Abstract: A system and method for controlling processor usage according to user related tasks is provided. For periodic tasks, by increasing the period at which the task runs, the average processor usage can be reduced to meet a particular target which can ensure that user input is not affected by the periodic task. As such, the periodic task can be intelligently degraded and altered to compensate for such degradation in order to free up enough processor usage space so as to not adversely affect user input.

Abstract: A method and a system execute a scheduled production process having an execution duration within a production schedule executed by a manufacturing execution system. The method includes defining within the production process a resource required for the execution of the production process and defining for the resource a sequence-dependent setup sub-process having a setup duration, a productive sub-process and a sequence-dependent teardown sub-process. The production process is scheduled with a start-time. At a predetermined period at the start-time of the production process, the production process for dispatching and subsequent executing is confirmed. In response to the confirmation, individual production processes are created for the sequence-dependent setup sub-process, the production sub-process and the teardown sub-process. The created individual production processes are linked together by precedence constraints defining a sequence of the created individual production processes.

Abstract: A modeling tool for determining the operation of a production facility. A variety of different activities can be modeled, including (a) feed material selection, including quantity and timing, (b) product sales, including quantity and timing, (c) process operations, including process conditions and timing, (d) blending operations, including process conditions and timing, and/or (e) inventory management. The modeling tool may represent time using continuous-time, discrete-time, asynchronous time periods, synchronous time periods, and combinations of these various approaches.

Abstract: Common portions of applications are extracted as common system service. A platform is formed by the common system service and a general purpose OS. A printer application, a copy application, and various applications are mounted on the platform. As a result, each software (application) corresponding to a printer, a copier, a facsimile device, and so on can be developed efficiently and the productivity of the apparatus as a whole can be improved.

Abstract: Techniques for scheduling and guaranteeing print jobs are presented. Print jobs are scheduled to process on a selected printer at user-defined dates and times. A print queue for the selected printer is managed to ensure that no subsequent print job begins on the printer when that subsequent print job cannot finish before a scheduled start time of a scheduled print job that has been guaranteed the scheduled start time on the printer.

Abstract: A system is disclosed that simplifies configuring an MES entity corresponding to a SCADA system object representing plant equipment. The system includes an equipment model builder (EMB) that receives a set of configured UCO information for a modeled piece of plant equipment in a SCADA system. The EMB extracts relevant MES information from the utilization capability object and invokes an application interface on an MES database to create a corresponding entity (e.g., a database element). Another aspect of the disclosed system and methods involves the enhancement of a SCADA system object, through a new MES facet, to support acquiring and reporting equipment status received via the SCADA system to a corresponding MES entity. A raw reason code configuration interface is provided by UCO configurator computer software executed on a computer. Each raw reason code is associated with a prioritized logical expression defining circumstances under which the reason code becomes true.

Abstract: Performance of a manufacturing tool is optimized. Optimization relies on recipe drifting and generation of knowledge that capture relationships among product output metrics and input material measurement(s) and recipe parameters. Optimized recipe parameters are extracted from a basis of learned functions that predict output metrics for a current state of the manufacturing tool and measurements of input material(s). Drifting and learning are related and lead to dynamic optimization of tool performance, which enables optimized output from the manufacturing tool as the operation conditions of the tool changes. Features of recipe drifting and associated learning can be autonomously or externally configured through suitable user interfaces, which also can be drifted to optimize end-user interaction.

Abstract: A vacuum processing apparatus includes a plurality of vacuum containers; a vacuumized transfer unit connected with the vacuum containers and having a transfer chamber; a plurality of lock chambers connected to the vacuumized transfer unit; a vacuumized transferring section arranged in the transfer chamber to transfer the sample between each of the lock chambers and each of the processing chambers inside the plurality of vacuum containers; an atmospheric transfer container having a space through which the sample is transferred under the atmospheric pressure; an atmospheric transfer unit arranged in the atmospheric transfer container and adapted to transfer the sample from a cassette; and a controller operative on the basis of schedule information of a plurality of operations to adjust the operations, the information including times of stagnation of the plurality of samples and set therefor.

Abstract: A substrate receiving method in a substrate processing system includes: a processing process of transferring a plurality of unprocessed substrates accommodated in a first substrate storage container to a substrate processing chamber in sequence and performing a plasma process on the unprocessed substrates in the substrate processing chamber; a retreating process of retreating the plasma-processed substrates temporarily to a second substrate storage container by transferring the plasma-processed substrates to the second substrate storage container in sequence; a determining process of determining whether or not the last unprocessed substrate is unloaded from the first substrate storage container; and a re-accommodating process of transferring and re-accommodating the plurality of the processed substrates accommodated in the second substrate storage container into the first substrate storage container in sequence when a substrate decided as the last unprocessed substrate is unloaded in the determining process.

Abstract: A job assignment apparatus of an automatic material-handling apparatus to calculate an initial optimum solution based on a cost table configured by the job assignment, and to calculate a single optimum solution based on the cost table converted by statistical data. The Hungarian algorithm is stored in a tool storage unit to calculate the optimum solution. A statistical-data calculator calculates statistical data to convert costs of the initial cost table into other costs. The cost-table converter converts the costs of the initial cost table based on the calculated statistical data.

Abstract: A dynamic insulated glass unit (IGU) assembly line scheduler is provided for production control of an IGU assembly line. When calculating the IGU assembly line order and controls, the scheduler evaluates at least i) a changeable set of uniquely identifiable glass lite storage loading locations adjacent a loading station, ii) a changeable set of uniquely identifiable IGU storage locations adjacent a unloading station, iii) a changeable identifiable subset of the set of uniquely identifiable IGU storage locations, and iv) a assembly line change outs to be performed at least in the production of the IGUs for the next in line set of IGUs to be shipped from the IGU assembly line. The scheduler is configured to re-evaluate the IGU assembly order at least with the filling of each next in line set of IGUs to be shipped.

Abstract: The present invention extends to methods, machines, systems, and computer program products for producing multiple packaging products in a tiled configuration within source production material, enabling production of multiple packaging products in parallel. Embodiments include accessing item data identifying items that are to be packaged, and determining packaging requirements for each item. A pair of box sizes that satisfy the packaging requirements are selected for tiled production. A packaging production machine to be used is also selected. Selection of the box sizes and/or the packaging production machine is based on a collective analysis of packaging requirements, packing system characteristics, and packaging machine characteristics. Based on the collective analysis, it is determined how to allocate box production to the production machine, and the pair of box sizes is matched to the production machine. Box production instructions are generated and sent to the packaging production machine.

Abstract: A system for determining a group of semiconductor manufacturing process steps with a similar influence on individual semiconductor products. The system generates a first table including time stamps for the individual semiconductor products. The system creates a second table including Q-times based on the first table. The Q-times refers to time differences between every pair of the time stamps. The system forms a dependency table by grouping the Q-times with similar dependencies together. The system identifies groups of the similar dependencies. The system extracts semiconductor process steps belonging to the groups.

Abstract: In one embodiment, a manufacturing system includes multiple manipulation modules each including means for mechanically and electrically connecting the module to another component in the system and an end effector including means for mechanically and electrically connecting the end effector to another component in the system, wherein the modules and end effector can be mechanically and electrically connected in multiple ways to alter the configuration of the system and the manufacturing tasks that the system can perform.

Abstract: The present disclosure provides a dynamic view in a modeling of an automation system. A first portion of the model may be described in a first sequence description and a second portion of the model may be described in a second sequence description. The sequence descriptions are linked together. In one embodiment, the links are visually provided.