Abstract: A system for a semiconductor fabrication facility includes a manufacturing tool including a load port, a maintenance crane, a rectangular zone overlapping with the load port of the manufacturing tool, a plurality of first sensors at corners of the rectangular zone, an OHT vehicle, a second sensor on the OHT vehicle, a third sensor on the load port, and a control unit. The first sensors are configured to detect a location of the maintenance crane and to generate a first location data. The second sensor is configured to generate a second location data. The control unit is configured to receive the first location data of the maintenance crane and the second location data of the OHT vehicle. The control unit further sends signals to the second sensor and the third sensor or to cut off the signal to the second sensor.

Abstract: Methods, apparatus, systems, and computer-readable media are provided for generating a spatio-temporal object inventory based on object observations from mobile robots and determining, based on the spatio-temporal object inventory, monitoring parameters for the mobile robots for one or more future time periods. Some implementations relate to using the spatio-temporal object inventory to determine a quantity of movements of objects that occur in one or more areas of the environment when one or more particular criteria are satisfied—and using that determination to determine monitoring parameters that can be utilized to provide commands to one or more of the mobile robots that influence one or more aspects of movements of the mobile robots at future time periods when the one or more particular criteria are also satisfied.

Abstract: A method for controlling a conveyance system includes transmitting, by a specific conveyance vehicle specific transfer location information to a management device, extracting from correspondence information by the management device, specific communication-device address information corresponding to the specific transfer location information received from the specific conveyance vehicle, and transmitting to the specific conveyance vehicle by the management device the specific communication-device address information extracted, and executing by the specific conveyance vehicle using the specific communication-device address information received from the management device communication with a first communication device connected to a first semiconductor manufacturing device to transfer a FOUP between the first semiconductor manufacturing device and the specific conveyance vehicle.

Abstract: In one embodiment, a device in a network receives a set of sensor data from a plurality of sensors deployed in a location. The device determines a physical layout for furnishings in the location based on the received set of sensor data. One or more of the furnishings is equipped with one or more actuators configured to move the equipped furnishing in one or more directions. The device generates an instruction for the one or more actuators of a particular one of the furnishings based on the determined physical layout for the furnishings. The device sends the instruction to the one or more actuators of the particular furnishing, to implement the determined physical layout.

Abstract: Signals are transmitted between a device placed on an object and at least one further device. Based on measurement of the signals transmitted between the device and the at least one further device, a position of the object is determined. Further, data associated with the object are stored in the device. The stored data are then transmitted from the device.

Abstract: A method for influencing a control program of a control unit, the control program having a plurality of first functions configured for controlling an actuator. The program code of the control program is examined for the occurrence of function calls, and the branch addresses and return addresses connected with the function calls, and the variables connected with the applicable first functions, are ascertained with the names of the variables and with the applicable memory addresses. The ascertained first functions and variables assigned to the applicable first functions are stored with the connected memory addresses in a first mapping table, and from a comparison of the first mapping table with a second predefined mapping table, function names are assigned to at least a portion of the first functions, and at least one first value of one of the variables is replaced by a second value.

Abstract: Techniques and systems for storing and retrieving data storage devices of a data storage system are disclosed. In some embodiments, inventory holders are used to store data storage devices used by a data storage system. When data is to be transacted with the data storage devices, mobile drive units locate appropriate inventory holders and transport them to a device reading station, where an appropriate device retrieval unit transacts the data. In some embodiments, each inventory holder includes a plurality of trays that are independently accessible to the device retrieval unit. After the data has been transacted, the data storage devices are returned to the appropriate inventory holders, and the inventory holders are placed by the mobile drive units in locations where they may be accessed in response to further data transactions.

Abstract: Techniques and systems for storing and retrieving data storage devices of a data storage system are disclosed. In some embodiments, inventory holders are used to store data storage devices used by a data storage system. When data is to be transacted with the data storage devices, mobile drive units locate appropriate inventory holders and transport them to a device reading station, where an appropriate device retrieval unit transacts the data. The inventory holders are configured such that any of the mobile drive units may interchangeably interact with any of the inventory holders and/or the data device reading stations. After the data has been transacted, the data storage devices are returned to the appropriate inventory holders, and the inventory holders are placed by the mobile drive units in locations where they may be accessed in response to further data transactions.

Abstract: Provided is a substrate processing system including a group controller which determines a combination of processing apparatuses having the shortest total processing time including the processing end time in a final processing apparatus, determines a predictable elapsed time up to a processing start time by a predetermined downstream processing apparatus for a wafer lot from a processing end time of the wafer lot by a predetermined processing apparatus in the combination of the processing apparatuses, and determines a timing of discharging the substrate to the predetermined processing apparatus or an upstream processing apparatus of the predetermined processing apparatus so that the predictable elapsed time is set within a predetermined time when the predictable elapsed time exceeds the predetermined time.

Abstract: A method for operating a production plant having an unmanned transport system involves transporting a first parts carrier having a plurality of parts from a warehouse to a picking station by at least one industrial truck. At least one part, which is predetermined according to a parts list, is extracted from the parts carrier using a worker and deposition of the part on a further parts carrier. The further parts carrier is transported to a work station by a further industrial truck.

Abstract: The instant disclosure provides a method for operating an automatic handling system applied to many wafer processing apparatuses. When a OHT (Overhead Hoist Transport) vehicle is moved to one of the wafer processing apparatuses, the OHT vehicle can ask a OHT control module whether a wafer carrier device can be unloaded from the OHT vehicle onto the wafer processing apparatus. There are two judgment methods as follows: (1) If there is another wafer carrier device already disposed on the wafer processing apparatus, the OHT control module will inform the OHT vehicle that the wafer carrier device cannot be unloaded from the OHT vehicle onto the wafer processing apparatus; (2) If there is no any wafer carrier device disposed on the wafer processing apparatus, the OHT control module will inform the OHT vehicle that the wafer carrier device can be unloaded from the OHT vehicle onto the wafer processing apparatus.

Abstract: A monitoring system has a vehicle and a monitoring device. The vehicle is movable along a predetermined route, and the monitoring device is mounted to the vehicle. The monitoring device has a sensor configured to monitor an environmental parameter and a controller communicatively coupled to the sensor. The controller is configured to record the monitored environmental parameter along the predetermined route as data points associated with time tags, record position information, and associate the position information with corresponding time tags. The number of time tags associated with the position information is less than the number of time tags associated with the monitored environmental parameter. A server is configured to receive and display a visualized presentation of the recorded monitored environmental parameter and the recorded position information.

Abstract: After a cassette is mounted on a cassette mounting part, a control unit instructs a substrate treatment apparatus to start treatment on substrates in the cassette. Thereafter, the control unit indicates, to the substrate treatment apparatus, a cassette on the cassette mounting part to which a substrate is transferred at completion of the treatment. If the transfer destination cassette for the substrate at the completion of treatment has not been indicated when a number of remaining treatment steps for the substrate reaches a predetermined set number, an alarm is given from the substrate treatment apparatus. This alarm is sent from the substrate treatment apparatus to the control unit, and the control unit indicates a transfer destination cassette for the substrate.

Abstract: A method for storing and/or order-picking product units in a storage and/or order-picking installation (P1), in which incoming transporting units are stored on an interim basis in a store, are supplied, if required, to a depalletizing station (4) and are individually stored on an interim basis in a buffer store (6) for product units. Thereafter, branch-specific mixed pallets (16) are automatically set up, supplied to the delivery zone (11) and loaded onto lorries. The system solution is distinguished, in particular, in that it can dispense entirely with transporting aids such as shelves for product units, rows of product units or for entire layers of transporting units. The transport shuttles (8) provided and the rail installation (8a) perform largely the functions of transporting aids, storage means and conveying systems.

Abstract: In a transfer system, a storage data and a specific equipment data indicating a specific equipment are generated. When a transfer command indicates the specific equipment as one of a previous location and a subsequent location, a priority level of the transfer command is increased. A transfer command having a highest priority level is selected. When an available carrier that is not assigned with a transfer command is not accessible within a previous area in which the previous location of the transfer command selected belongs to, when the priority level of the transfer command selected has been increased, and when an alternative carrier that is assigned with the transfer command and is transferring without carrying the cassette is accessible within the previous area, the transfer command selected is assigned to the alternative carrier.

Abstract: Transport scheduling and transport processes for low microbial (“LM”) bulk products are described. The transport scheduling and processes facilitate low microbial activity in a LM bulk product during the transport of the LM bulk product.

Abstract: Transport scheduling and transport processes for low microbial (“LM”) bulk products are described. The transport scheduling and processes facilitate low microbial activity in a LM bulk product during the transport of the LM bulk product.

Abstract: Transport scheduling and transport processes for low microbial (“LM”) bulk products are described. The transport scheduling and processes facilitate low microbial activity in a LM bulk product during the transport of the LM bulk product.

Abstract: Methods for manufacturing automation and a computer executed automated handling system for forming a device are presented. The method includes issuing a transfer request by a tool. The transfer request is processed by a production control system configured for tracking and controlling the flow of carriers. The processing of the transfer request includes selecting a carrier containing production material. A transport system having transport and load/unload (U/L) units in a production area to effect a transfer is controlled and the carrier is transferred by the transport system.

Abstract: Methods for automated handling for forming a device and automated handling systems for forming a device are presented. One of the methods includes providing a production area with a plurality of destinations and a transport system which includes transport and load/unload (U/L) units in the production area. The transport units include automated guided vehicles (AGVs) with a storage compartment for holding at least one carrier containing production material for forming the device and U/L units include AGVs with a robotic system for handling carriers. A transfer of a selected carrier from a first destination to a second destination is determined. A request to the transport system is issued to effect the transfer of the selected carrier, which includes using a selected U/L unit, a selected transport unit, or a combination of selected U/L and transport units.

Abstract: The instant disclosure provides a method for operating an automatic handling system applied to many wafer processing apparatuses. When a OHT vehicle is moved to one of the wafer processing apparatuses, the OHT vehicle can ask a OHT control module whether a wafer carrier device can be unloaded from the OHT vehicle onto the wafer processing apparatus. There are two judgment methods as follows: (1) If there is another wafer carrier device already disposed on the wafer processing apparatus, the OHT control module will inform the OHT vehicle that the wafer carrier device cannot be unloaded from the OHT vehicle onto the wafer processing apparatus; (2) If there is no any wafer carrier device disposed on the wafer processing apparatus, the OHT control module will inform the OHT vehicle that the wafer carrier device can be unloaded from the OHT vehicle onto the wafer processing apparatus.

Abstract: Disclosed are a substrate processing apparatus, a substrate processing method, and a storage medium, which can process a normal substrate according to a normal schedule in parallel with a substrate to be processed in preference to other substrates. Processing block performs the same types of processes for substrates, carried therein from FOUP placing unit, by using process arms. When a priority substrate having a priority over other substrates are carried, control unit carries and processes the priority substrate in priority processing unit that can receive a next substrate among priority processing units to which a plurality of processing units are partially or wholly assigned, in preference to other substrates.

Abstract: A method includes generating a reticle transport job using a computing device. The reticle job identifies a selected reticle. A reticle pod available for transporting the reticle is autonomously identified using the computing device. The reticle transport job is updated suing the computing device with an identifier of the reticle pod.

Abstract: Preparation of a wafer processing or measuring tool for a job can be initiated prior to assigning a wafer carrier to deliver wafers to the tool. The automated process may include transfer of wafers from a container, such as a bare wafer stocker, or between two tools.

Abstract: A closed container in which a reticle etc. is stored and kept is provided with a pressure sensor, transmission means for transmitting data on the pressure, a controller that controls the operation of them, and a battery serving as a power source of the above elements. The controller has a sleep mode in which it causes the transmission means to transmit the data on the pressure at regular intervals and an active mode in which it causes the transmission means to transmit the data on the pressure when necessary in response to an externally supplied command. By the above described configuration, the pressure in the interior of the container can be checked appropriately.

Abstract: An objective of the present invention is to provide an assembly system capable of reducing the equipment space while various kinds of automotive parts are assembled on one production line. The assembly system assembles plural kinds of automotive parts consisting of a main body and a part to be installed to the main body. This assembly system comprises an operator area at which an operator is assigned, a plurality of travel carts on which a main body of each of automotive parts is placed, traveling along the operator area, a part pallet on which a part to be installed to each of the automotive parts is placed, a belt conveyer conveying this part pallet along the operator area, and a control device controlling thereof. The control device drives the travel carts and the belt conveyer so as to convey the travel carts and the part pallet synchronously.

Abstract: A targeted product distribution system is described herein with respect to an exemplary management of product flow through a distribution center. Specifically, the system and method described herein is directed to the management and display of direct and easily-understood instructions, such that average individuals, as well as those with mental disabilities, will be able to contribute equally to the overall process.

Abstract: By providing a look-ahead functionality for a tool internal substrate handling system of process tools on the basis of a process history, the tool internal substrate sequencing may be significantly enhanced. The look-ahead functionality enables a prediction of process time of substrates currently being processed in a respective process module, thereby enabling the initiation of transport activity for substrate load operations in order to significantly reduce the overall idle time of process modules occurring during substrate exchange.

Abstract: A transport scenario composed of a basic transport (From) from a transport starting point to, e.g., a buffer near the transport destination point and a basic transport (To) from the buffer to the transport destination point is created in response to a transport request of a production controller for transport whose loading times at the transport starting point and at the transport destination point are specified. The buffer is reserved so as to perform the basic transport (From) and the basic transport (To), transport vehicles are allocated, the travel time to the transport starting point or the buffer and the travel time from the transport starting point or the buffer are estimated, and transport instructions are given to the transport vehicles. The possibility that the loading times are out of the specified period is evaluated. If the possibility is larger, the impossibility of a just-in-time transport is notified to the production controller.

Abstract: Process for developing and implementing a model (ASM) for the formal description of a collaborative system including multiple, distributed components, wherein analyzable models of the components are generated via simulation processes. The invention includes the steps of generation of models of collaborative units, preparation of a catalog of models of the collaborative units, assignment of a set of rules to the catalog for the specification of interactions among the autonomous models of the collaborative units and for the development of the model of the complex collaborative system, generation of the desired model using selected models of the collaborative units as the basic module from the catalog, and taking selected rules into account, and automatic adaptation of the model by deriving new rules, taking into account evaluation parameters for each application in one process operation.

Abstract: A parts delivery management system and method that synchronizes production line side parts deliveries with a production schedule to facilitate delivering the right part to the right production line location at the right time. A consolidation center for receiving parts from suppliers is co-located with an assembly plant. Parts are received in returnable containers and organized for line side delivery according to the manufacturer's production schedule. Parts are delivered to production line locations using multi-cart “trains” that transport parts to the locations. Trains made of multiple carts are assembled throughout the production day and loaded with containers holding the parts that are then delivered line side. A delivery management system application executing on a computer receives production schedule data as well as part and container data to determine which parts are needed throughout the day at the various production line side locations and when they are needed.

Abstract: An automated material handling system (AMHS) includes a plurality of first stockers for material storage and a plurality of second stockers for material storage, wherein the second stockers are smaller than the first stockers. A method of operating an AMHS, wherein the AMHS includes a plurality of first stockers for material storage and a plurality of second stockers for material storage and the second stockers are smaller than the first stockers, includes selecting one of the first stockers and the second stockers after a step of a process is performed with one or more pieces of material at a piece of processing equipment; unloading the one or more pieces of material from the piece of processing equipment; and transporting the one or more pieces of material to the selected one of the first stockers and the second stockers.

Abstract: A mobile station for an unmanned vehicle comprises a vehicular storage area for storing a vehicle during transit or at rest. A first wireless transceiver communicates a status or command between the vehicle and the mobile station during at least one of vehicular deployment and rest. A station controller manages a management plan of the vehicle comprising at least one of retooling the vehicle, loading a payload on the vehicle, and recharging or refueling of the vehicle.

Abstract: The invention relates to a method for dynamic automation, in which collaborative elements, such as humans and mobile robots, but also machines, co-operate, in order to carry out tasks as efficiently as possible. Each of said collaborative elements carries out a part of a working process which exploits the concept of collaboration the most in terms of efficiency, flexibility, quality and performance. The invention also relates to a control system for carrying out said method. The inventive method can be applied in logistics, especially storage logistics, such as commissioning.

Abstract: The claimed subject matter provides a system and/or method that facilitates utilizing multiple computer languages within an industrial environment. A controller can execute with a real-time operating system such that the controller can include two or more controller engine instances executing as processes on the controller. A language isolation component can organize one or more controller engine instances based upon a computer language utilized within the industrial environment.

Abstract: A method of batching substrates in an automated processing tool, the automated process tool and a system for batching substrates in the automated process tool. The method includes selecting a first container containing a first group of substrates; simultaneously transferring each substrate of the first group of substrates into a batching station of the automated processing tool; selecting a second container containing a second group of substrates; selecting less than all substrates of the second group of substrates; and transferring each substrate of the less than all substrates of the second group of substrates to the batching station to form a third group of substrates.

Abstract: A test system for data processing circuit design emulates multiple bus masters and provides an arbitration mechanism for coordinating arbitration between those bus masters in the design emulation. The shared bus being tested may be a multi-layer bus and one or more of the bus masters being emulated or bus slaves being emulated may be cut-down emulations modelling the bus interaction itself or full emulations of the intended bus master circuit or bus slave circuit including its operational data processing.

Abstract: An assembly, and an associated methodology, for provisioning a computer server, or other device, with an operating system or other computer data. The computer server is positioned at a build area that includes wireless local area network apparatus that broadcasts provisioning software. A mobile start cart is positioned at the build area to receive the broadcast data and to provide the data to the computer server to be provisioned. Provisioning of the computer server is made without need of an Ethernet connection, or associated Ethernet infrastructure.

Abstract: A method and system for managing a product during assembly or repair of the product includes use of a microserver configured to function as a local computing workstation and collect, store and process data for the product throughout the assembly or repair process. The microserver may be carried by a support structure that supports the product through the assembly or repair process. The product data and other information relevant to the assembly or repair process are stored on the microserver and may be accessed by other computing devices, both local and remote to the product. The information is updated on the microserver as it happens. Thus, users are able to track a status of the product in real-time. The microserver enables two-way communication such that the other computing devices may also send information to the microserver.

Abstract: The transport apparatus is provided with a path that extends past a plurality of article transferring locations, a plurality of article transporting vehicles that run on the path, a travel driving means provided on each of the article transporting vehicles for controlling movement of the article transporting vehicle, and a ground-side controller for managing operation of the plurality of article transporting vehicles by managing the travel driving means, wherein the ground-side controller is capable of transmitting run command information and stop command information, relating to each of the article transporting vehicles, to their corresponding travel driving means, and wherein the travel driving means drives and stops the article transporting vehicles based on the run command information and the stop command information from the ground-side controller.

Abstract: A method for automatically checking a sequence of loading boats and batches for a semiconductor manufacturing process is provided. According to a developed logic, a loading sequence is automatically calculated by a system. By comparing the actual loading sequence with the calculated sequence when the boats are entering, it is ensured that no errors occur when loading the boats in the batches. When loading the boats in the batches, operators can truly load the boats in the batches according to the entering sequence together with the current confirmation mechanism, so as to ensure the boat positions for the loaded materials to be correct. The method for automatically checking the sequence of loading boats and batches is further capable of calculating the loading sequence through the developed logic by automatically determining runnable boat positions for the material after recording a parameter for detecting a previous boat by the system.

Abstract: A semiconductor manufacturing system includes a centralized computer integrated manufacturing (CIM) system; a plurality of sectional CIM systems respectively associated with a plurality of manufacturing facilities and coupled with the centralized CIM system; and a centralized basic record module, coupled and coordinated with the centralized CIM system, and designed for defining a unified process flow associated to a mobile object.

Abstract: An automated sidewall assembly machine is provided for attaching a sidewall panel to a top and bottom rail of a wheeled trailer. The machine comprises a frame, a carriage for longitudinal movement relative to the frame, an automated punch mounted proximate the frame and an automated riveting press mounted proximate the frame so that the sidewall assembly is movable by the carriage with respect to the frame, the automated punching machine and the automated riveting machine so that holes can be punched through one or more of the sidewall, the bottom rail and the top rail and rivets can be inserted into the punched holes to be mashed. A sensor is operably mounted to the sidewall assembly machine so that information obtained by the sensor can be used to drive the carriage, the automated punching machine and the automated riveting press.

Abstract: A production moving line system. An illustrative embodiment of the production moving line system includes at least one metallic guide strip and at least one tow vehicle which may be adapted to follow the guide strip. The tow vehicle may include control circuitry and a power source and a wireless transceiver connected to the control circuitry. An assembly fixture cart may be coupled to the tow vehicle. A wireless communication link may be provided between a central control computer and the wireless transceiver of the tow vehicle. A production moving line method is also disclosed.

Abstract: A system and method for self-synchronization of modular production systems having components with various alternative capabilities for processing and transporting work units along transport highways, for various component/transport highway configurations. The method includes determining jobs of interest, with each job requiring the production of at least one work unit. The configuration of the components, including at least one machine module, and the transport highway is determined. Each component duration time is determined and a default self-synchronization time is identified. The default self-synchronization time is optimized by adjusting not less than one component duration time.

Abstract: Manufacturing equipment is provided for safely changing the setup of a jig while maintaining production line utilization. A safety wall prevents entry into a machining area where multiple machining installations are installed. Openable and closable access doors are provided for the machining installations. A workpiece holding tool is moved in the machining area conveys workpieces from one of the machining installations to another. Isolation walls prevent the movement of the workpiece holding tool. A control device drives the isolation walls allowing movement of the workpiece holding tool outside the machining area at the machining installation corresponding to an opened access door and prevents the workpiece holding tool from moving into the machining area with the opened access door.

Abstract: A system and method for self-synchronization of modular production systems having components with various alternative capabilities for processing and transporting work units along transport highways, for various component/transport highway configurations. The method includes determining jobs of interest, with each job requiring the production of at least one work unit. The configuration of the components, including at least one machine module, and the transport highway is determined. Each component duration time is determined and a default self-synchronization time is identified. The default self-synchronization time is optimized by adjusting not less than one component duration time.

Abstract: Disclosed is (i) an overmolding system, (ii) a method of an overmolding system, (iii) an article of manufacture for directing a data processing system to control a molding system, and (iv) an article manufactured by an overmolding system.

Abstract: In a flexible manufacturing system (FMS), a shelving module of a work cell is fitted with a dedicated lift conveying mechanism so that work materials of desired sizes may be retrieved individually from different shelves of the shelving module for conveyance to the machine of the work cell. By having its own dedicated lift conveying mechanism that operates independently from the transport system that transports raw materials to the wok cells of the FMS, the operation of each cell becomes unaffected by the transport system. As such, materials may be fed to the machine in each cell for fabrication, piece by piece if so desired, by the lift conveying mechanism while the various shelves of the shelving module continue to be stocked by the transport system. Any remnants that prior to the instant invention would have been wasted may be returned to the appropriate shelves of the shelving module for future use by the lift conveying mechanism.

Abstract: The present invention generally comprises a method for achieving fault tolerance in a PV FAB. A plurality of processing tools may be coupled together along a processing line, and a plurality of substantially identical processing lines may be arranged within the FAB. Whenever a processing tool within any processing line is shut-down, rather than shut-down the entire processing line containing the shut-down processing tool, work-pieces may be routed around the shut-down processing tool by transferring the work-pieces to an adjacent processing line within the FAB. At a location after the shut-down processing tool, the work-pieces may be transferred back to the processing line containing the shut-down processing tool. During the time period that the processing tool is shut-down, the other processing lines within the FAB may increase their throughput in order to maintain a substantially constant optimum throughput for the FAB over a given period of time.