Abstract: The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. In another aspect, the fabricator tool placement and replacement can be accomplished while maintaining a clean space environment about the fabricator tool.

Abstract: In one aspect a factory automation system for a wafer fab is provided. The factory automation system is adapted to facilitate cross-AMHS transfers of wafer lots within a semiconductor foundry. The factory automation system may include a first MCS and an associated first AMHS; a second MCS and an associated second AMHS; and a third MCS and an associated third AMHS. The system may also include a first bridge connecting the first AMHS and the second AMHS to allow a FOUP to travel between the first AMHS and the second AMHS. The system may also include a second bridge connecting the second AMHS and the third AMHS to allow a FOUP to travel between the second AMHS and the third AMHS. The system also includes a unified control unit in communication with the first, second, and third MCSs, the unified control unit for coordinating transfers of FOUPs between the first, second, and third AMHSs.

Abstract: The present invention generally comprises a method for achieving fault tolerance in a PV FAB. A plurality of processing tools may be coupled together along a processing line, and a plurality of substantially identical processing lines may be arranged within the FAB. Whenever a processing tool within any processing line is shut-down, rather than shut-down the entire processing line containing the shut-down processing tool, work-pieces may be routed around the shut-down processing tool by transferring the work-pieces to an adjacent processing line within the FAB. At a location after the shut-down processing tool, the work-pieces may be transferred back to the processing line containing the shut-down processing tool. During the time period that the processing tool is shut-down, the other processing lines within the FAB may increase their throughput in order to maintain a substantially constant optimum throughput for the FAB over a given period of time.

Abstract: The present invention provides a method, an apparatus, and a semiconductor manufacturing facility. The method includes receiving a request to move material from a first location to a second location in the semiconductor manufacturing facility, accessing information indicative of a duration of the move from the first location to the second location, and scheduling the requested move based on the information indicative of the duration of the move.

Abstract: A semiconductor manufacturing system includes a centralized computer integrated manufacturing (CIM) system; a plurality of sectional CIM systems respectively associated with a plurality of manufacturing facilities and coupled with the centralized CIM system; and a centralized basic record module, coupled and coordinated with the centralized CIM system, and designed for defining a unified process flow associated to a mobile object.

Abstract: A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to determine a moving path of the auto guided vehicle, a plurality of process stages at which processes are conducted on a substrate during fabrication of the LCD device, and a host to control the cassette stocker, the auto guided vehicle and the process stages. At least one of the auto guided vehicle and the cassette stocker having a bar code reader.

Abstract: A moving mechanism includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving member and a stator which is movable along the second guide surface. The first structural member is supported by the second structural member at three positions.

Abstract: A substrate processing apparatus includes a plurality of cells each including a predetermined processing unit, a transport mechanism, and a cell controller. The cell controller independently controls operations in each cell in accordance with transport setting and processing condition setting for each cell described in recipe data determined for each substrate unit to be processed. Because the processing and transport are performed independently of the operations of adjacent cells, substrates belonging to different substrate units are received through a feed inlet or the sane substrate inlet, are processed while being present in the same cell, and are transported to a feed outlet and a return outlet which are different substrate outlets. This allows the presence of different process flows in parallel.

Abstract: Shock waves occurring when opening a gate valve between two vacuum chambers and peeling of particles by a viscous force taking place when a gas is supplied into a vacuum chamber are necessary to be suppressed by the apparatus and method of the invention, whereby contamination of a substrate by particles is suppressed. If one vacuum chamber is a substrate processing chamber for performing a vacuum process on the substrate and the other chamber is a transfer chamber having a substrate transfer device therein, the gate valve is opened when inner pressures of both the vacuum chambers are less than 66.5 Pa and higher one thereof is less than twice a lower one thereof. Preferably, a purge gas for peeling of particles is supplied, before supplying the purge gas for pressure control, into the substrate processing chamber with a flow rate greater than that of the purge gas for pressure control.

Abstract: A self-diagnosing system for an encoder. The system includes an encoder circuit for outputting information detected by an encoder; a data preparing section provided in the encoder circuit and preparing data representing a state of an abnormal-state judgment factor in connection with at least one of the encoder and an electric motor combined with the encoder; a signal generating section provided in the encoder circuit and generating an abnormal-state signal when the data prepared in the data preparing section represents an abnormal state of the abnormal-state judgment factor; and a storage section provided in the encoder circuit and storing the data representing a state of the abnormal-state judgment factor when the signal generating section generates the abnormal-state signal. The storage section may store the data prepared in the data preparing section at a desired timing not later than the instant the signal generating section generates the abnormal-state signal.

Abstract: A method for determining a node based penalty for use in a path finding algorithm for an automated material handling system (AMHS) is described. The AMHS includes a track interconnecting a plurality of nodes, and on which a plurality of material transport vehicles (MTVs) move. In particular, each of the nodes and MTVs provide queue-blocking data that is stored in a queue-blocking database along with a time tag indicating the time the data was collected. The AMHS retrieves data from the queue-blocking database that has a time tag within a predetermined time window and determines a queue blocking metric for each node in the material transport system. The queue blocking time is converted from to a node based penalty that is the additional distance that an MTV would travel while blocked. Thus, the node based penalty distance is added to the physical distance between a pair of nodes to provide a distance metric indicative of the current traffic conditions.

Abstract: A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to determine a moving path of the auto guided vehicle, a plurality of process stages at which processes are conducted on a substrate during fabrication of the LCD device, and a host to control the cassette stocker, the auto guided vehicle and the process stages. At least one of the auto guided vehicle and the cassette stocker having a bar code reader.

Abstract: A substrate processing apparatus includes a plurality of cells each including a predetermined processing unit, a transport mechanism, and a cell controller. The cell controller independently controls operations in each cell in accordance with transport setting and processing condition setting for each cell described in recipe data determined for each substrate unit to be processed. Because the processing and transport are performed independently of the operations of adjacent cells, substrates belonging to different substrate units are received through a feed inlet or the same substrate inlet, are processed while being present in the same cell, and are transported to a feed outlet and a return outlet which are different substrate outlets. This allows the presence of different process flows in parallel.

Abstract: For assigning a tool to a workpiece conveyed on an assembly line, at least one transmitter is arranged in the area of an assembly line, and a receiver is arranged on the tool. An analyzing unit determines the distance of the tool from each transmitter, based on the transit times of at least one received signal, and an indicating device emits positions information regarding workpieces on the assembly line. An assignment unit assigns a tool or a tool position to a workpiece, based on at least one distance of the tool from the transmitter, and on the workpiece positions. The arrangement of the transmitters and receivers can also be interchanged.

Abstract: A method for forming an apparatus for storing and releasing containers (C1–C15) or such substantially box-shaped storing devices, comprising at least rails (28) having thereon a series of trolleys (14) mobile on the rails, on which trolleys the containers can be carried, the rails being supported by a supporting frame (54), which supporting frame is substantially built up from a series of standard modules, while, for a location, it is determined how many containers (7) are to be potentially storable therein, after which a construction for a supporting frame is determined on the basis of the modules, which modules are subsequently packaged and transported to said location, where the construction is built up from at least the modules.

Abstract: A method, system, and storage medium for facilitating a transport scheme in an automated material handling system environment are provided. The method includes detecting an occurrence of a trigger event while monitoring production operations in an automated material handling system environment, identifying a materials candidate to purge from a production line in response to the trigger event, production data captured relating to the materials candidate, and user-defined criteria for purging materials from the production line. The method also includes selecting a disposition plan for handling the materials candidate, generating a transport process job for the materials candidate for instructing the automated material handling system on executing the disposition plan, and transmitting the transport process job to the automated material handling system for execution.

Abstract: Disclosed is a moving mechanism which includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving member and a stator being movable along the second guide surface, wherein the first and second structural members are isolated from each other with respect to vibration, such that displacement of the stator due to a reaction force as the moving member is driven does not have an influence to the moving member guide surface.

Abstract: An inventory system including a plurality of mobile inventory trays with a positioning system that enables the mobile inventory trays to determine their three-dimensional coordinates within a facility and thereby navigate a factory floor. The mobile inventory trays are also equipped with a communication system in order to determine optimum mobile inventory trays to fill order requests for items of inventory. The mobile inventory trays interface with a material handling system to receive order requests and deliver inventory items to pack stations located on the factory floor. The resulting system is a real-time parallel-processing order fulfillment and inventory management system. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract: An inventory system includes a plurality of mobile drive units with a processor control and with a positioning system that enables the mobile drive units to navigate a factory floor. The mobile drive units interface with a material handling system to receive order requests and deliver inventory items to pack stations located on the factory floor. The inventory items are stored in trays stacked into movable inventory pods, which may be transported by the mobile drive units throughout the factory floor. The mobile drive units dock and undock with the movable inventory pods using a docking mechanism. The movable inventory pods are stored in a virtual storage grid when they are not being transported by the mobile drive units. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure.

Abstract: The substrate carrier management system includes a pre-diffusion processing apparatus, a carrier cleaner, and a carrier conveyer. The pre-diffusion processing apparatus unloads a substrate from a supplied carrier in which the substrate is stored, performs predetermined processing on the substrate, and transfers the processed substrate stored in a carrier to be used after processing. The carrier cleaner cleans a carrier emptied as a result of taking a substrate out of the carrier. The carrier conveyer conveys a carrier between the pre-diffusion processing apparatus and the carrier cleaner. The empty carrier unloaded from the pre-diffusion processing apparatus is cleaned by the carrier cleaner, and the processed substrate is stored in the empty carrier. With this arrangement, it is possible to automatically change carriers and thereby continuously use a cleaned carrier in the subsequent step without using a dedicated carrier.

Abstract: Source files are added in advance with data specification information necessary for conversion of the source files into a calibrating file, the source files are converted into a calibrating file, and calibration is performed based on the post-converted calibrating file.

Abstract: A product wafer processed by a semiconductor manufacturing apparatus is transferred to a check apparatus for checking, and a result thereof is sent to a host computer. A product wafer determined as being failed as a result of the checking is transported into an empty carrier by a built-in type wafer transport apparatus under the instruction of the host computer. The carrier in which the product wafer determined as being failed is accommodated is regarded as a rework lot by the host computer. Based on manufacturing standard information for rework held by the host computer, rework processing is performed through a wafer manufacturing operation. Therefore, such a semiconductor device manufacturing line results in that the carrier accommodating the product wafer is transferred and handled smoothly.

Abstract: A storage and management method for a multi-floor stocker system. The storage and management method combines a pull function and a push function with a from-to table to optimally distributed lots of work-in-process (WIP) to all stockers in the multi-floor system, thereby effectively utilizing every stocker. The from-to table is established by the following steps: evaluation of a step process time and a step equipment number; calculation of a step work ability for every stage based on the step process time and step equipment number of every product; and summary of the step work ability for every stage and production of a from-to table.

Abstract: The present invention provides a large-scale carrying system that allows the operation of only a part of the system which has been completely constructed, while concurrently allowing the construction of a part of the system which has not been constructed yet. A carrying system comprises a carrying vehicle system 3 which carries an article to a predetermined location using a carrying vehicle, an article housing system 4 in which the article is temporarily housed for storage, an integrating controller 5 which integrally controls a system set 2 comprising at least one carrying vehicle system 3 and at least one article housing system 4, and an auxiliary controller 14 which can integrally manage at least part of the system set. The integrating controller 5 and the auxiliary controller 14 are connected together through a network. It is thus possible to transfer data on the part of the system set 2 which is integrally managed by the auxiliary controller 14, to the integrating controller 5.

Abstract: A method for controlling an automatic guided vehicle system having an automatic guided vehicle and a central controller for controlling the automatic guided vehicle is capable of operating with improved operational efficiency. The control method includes the steps of: transmitting of an IMMEDIATE command by the central controller to the automatic guided vehicle; checking by the central controller as to whether the automatic guided vehicle, which is performing the IMMEDIATE command, can receive a NEXT command; transmitting of the NEXT command by the central controller to the automatic guided vehicle; continuous receiving, analyzing, and storing of the NEXT command by the automatic guided vehicle while the automatic guided vehicle receives and performs the IMMEDIATE command; and sequentially performing NEXT commands stored in the automatic guided vehicle after completion of the IMMEDIATE command.

Abstract: A method for controlling an automatic guide vehicle (AGV) in a semiconductor factory automation (FA) system, includes the steps of: a) receiving operating mode information of a process equipment changed by an operator; b) storing the operating mode information of the process equipment changed in a real-time database; c) carrying out a predetermined semiconductor process at an operating mode having a full automation mode and sending a process completion signal after the predetermined semiconductor process has been completed, wherein the predetermined semiconductor process is applied to a lot of semiconductor wafers; d) creating a queue in response to the process completion signal; e) checking the operating mode information of the process equipment stored in the real-time database in response to the queue; f) inactivating the AGV by interrupting a transmission of the queue to the AGV if the operating mode information of the process equipment stored in the real-time database is not the full automation mode; and

Abstract: A system, method, apparatus and program which enables the automation of the carrying of a lot or lots of special purpose wafers between stockers and to achieve high speed processing while suppressing an increase in storage volume. The carrying control system includes stockers for storing therein special purpose lot or lots comprising wafers which will not be processed in production facilities, or said special purpose lot or lots and usual lot or lots comprising wafers which will be processed by production facilities and a carrying host computer for controlling automatic carrying of lot or lots in carrying facilities.

Abstract: A computer-implemented software development system is provided for constructing applications that are embedded in a microcontroller of a motor vehicle. The development system includes a data dictionary which stores data type information for a plurality of vehicle parameters and is able to generate a parameter definition file having data type information for each vehicle parameter associated with a first application. A calibration repository is used to generate a calibratable file for the first application, where the calibratable file includes calibratable vehicle information and controller executable instructions for the first application. The parameter definition file and the calibratable file are then used by a calibration tool to calibrate the first application in relation to a particular motor vehicle.

Abstract: A method for generating a semiconductor test program is disclosed. The method is practiced by first creating a test plan according to a test key database, then take out the related parameters from the other databases in light of the test item in the test plan and creating a semiconductor test program. The semiconductor test program is attached to the wafer acceptance test (WAT) main program as a sub-program. The method for generating the auto-testing program can promote the efficiency for writing a test program and is easy to expand and maintain according to the progress of semiconductor processes.

Abstract: A method for transporting semiconductor wafers in semiconductor factory automation system, includes the steps of: a) processing a lot of semiconductor wafers to be contained in a semiconductor wafer cassette in a process equipment; b) sending a cassette transportation request from the process equipment to a cell management server when the process equipment has processed the lot of semiconductor wafers; c) generating a transportation instruction in response to the cassette transportation request; and d) if the semiconductor wafer cassette is transported from the process equipment to a stocker by an automatic guide vehicle (AGV), simultaneously activating the AGV and the stocker by simultaneously sending the transportation instruction to the AGV and the stocker. The method in accordance with the present invention can reduce a time taken to transport the semiconductor wafers.

Abstract: An integrated scheduler/material control system that receives a plurality of material move requests and prioritizes these move requests according to a critical pick-up time associated with each move request. Using vehicle utilization data from the traffic management system, the integrated scheduler/material control system determines the number of move requests to be deferred to a later time period and then calculates the number of move requests to be executed in the current time period. The integrated scheduler/material control system then passes the move requests and the number of move requests to be executed to the traffic management system in the prioritized order.

Abstract: An automatic operation system provides a CPU to detect and record a status of operation for the operated mechanism. As soon as a response is to be output for allowing the operated mechanism to perform a operation, the CPU figures out corresponding responses by way of a statistic analysis based on past record of operation status as a reference for the operator. Thus, an operation is simplified or a response is output automatically so as to allow the operated mechanism processing itself.

Abstract: A system and method for monitoring a process flow of a semiconductor wafer. In one embodiment, the method initially calculates a first location of the wafer before it is processed. The wafer is then moved into a process chamber where it is processed. Then a second location of the wafer is calculated before the wafer is unloaded. If the difference between the first and second locations are within a predetermined amount, the wafer is unloaded and regular processing steps proceed. If the difference is not within the predetermined amount, an alarm is activated and the process is stopped.

Abstract: A computer controlled manufacturing arrangement and method for selecting between multiple paths for transporting cassettes between processing locations. The manufacturing arrangement includes a plurality of stockers interconnected with tracks on which cassettes are carried on vehicles. A first and second stocker are interconnected by at least a first path and a second path formed by the tracks, and a cassette can be transported from the first to the second stocker via either of the two paths. A plurality of robotic arrangements are configured to transfer cassettes between the stockers and the vehicles. A data processing system is coupled to the robotic arrangements and configured and arranged to maintain an historical record of codes indicative of periods of time expended in transporting cassettes from the first stocker to the second stocker via the first path and second path, respectively.

Abstract: A system and method for managing garment alterations. The system includes a workroom processor having a display and operating a garment alteration application system. Alterations tickets are created using a garment alterations ticket terminal, or display interfaces on the workroom processor that prompt the user for garment alteration data. The alteration data is stored in an alteration ticket data structure that relates to the workflow of a typical workroom. Alterations tickets are presented in the ticket list from which the alteration ticket status updated according to work performed. The reports module generates corporate and workroom management reports based on data stored in relation to the alterations.

Abstract: In a semiconductor device test apparatus, a host computer having a data base writes test resultant data in the data base to output the test resultant data in response to a data request. Each of a plurality of testers performs an electric characteristic test based on a test program to generate a test resultant data for each of semiconductor devices to transmit to the host computer. Each of a plurality of handler sections sets the semiconductor devices of a pallet to a test head for the electric characteristic test. A loader section loads the semiconductor devices from a first tray to the pallet. An unloader section unloads the semiconductor devices from the pallet transported thereto to second trays based on the test resultant data from the host computer.

Abstract: A system and method for the simulation and modeling of biopharmaceutical batch process manufacturing facilities is described herein. The system and method includes the steps of identifying a production process sequence, the production process sequence including a plurality of zsubprocesses. At least one of the plurality of subprocesses includes a plurality of batch cycles, each of which includes a plurality of unit operations. Each of the unit operations are identified by unit operation identifiers. Next, the system and method retrieves the process parameter information from a master list for each of the unit operation identifiers in the process sequence. The process parameter information includes information on discrete tasks associated with each unit operation. After the steps of identifying and retrieving, the system and method generates a process schedule that identifies initiation and completion times for each of the discrete tasks in the process sequence.

Abstract: An automated material handling system is presented for a manufacturing facility divided into separate fabrication areas. The automated material handling system plans and carries out the movement of work pieces between fabrication areas and maintains a database indicating the location of each work piece within the manufacturing facility. In one embodiment, the automated material handling system accomplishes the containerless transfer of semiconductor wafers through a wall separating a first and second fabrication areas. The wafers are transported within containers (e.g., wafer boats). The material handling system includes a number of transfer tools, including air lock chambers, mass transfer systems, robotic arms, and stock areas. The material handling system also includes a control system which governs the operations of the transfer tools as well as the dispersal of containers.

Abstract: A semiconductor manufacturing system capable of reducing time required for manufacture of semiconductors with effective use of waiting time of lots in storage equipment is provided. While a lot including a plurality of semiconductor wafers are stored in storage equipment, the semiconductor wafers in the lot are subjected to non-processing steps carried out by non-processing apparatuses such as measuring apparatuses, inspecting apparatuses, and contaminant removing apparatuses.

Abstract: A computer controlled manufacturing arrangement and method for selecting between multiple paths for transporting cassettes between processing locations. The manufacturing arrangement includes a plurality of stockers interconnected with tracks on which cassettes are carried on vehicles. A first and second stocker are interconnected by at least a first path and a second path formed by the tracks, and a cassette can be transported from the first to the second stocker via either of the two paths. A plurality of robotic arrangements are configured to transfer cassettes between the stockers and the vehicles. A data processing system is coupled to the robotic arrangements and configured and arranged to maintain an historical record of codes indicative of periods of time expended in transporting cassettes from the first stocker to the second stocker via the first path and second path, respectively.

Abstract: An integrated circuit, a programming mechanism and a method are provided for programming manufacturing information upon non-volatile storage devices of the integrated circuit. The storage devices may be programmed after manufacture and prior to assembling the integrated circuit within a semiconductor package. Thereafter, the packaged circuit can be tested to determine where, how and when the integrated circuit was manufactured from among possibly numerous die within a wafer and wafer lot. The storage locations which receive manufacturing indicia are addressed in an address location entirely separate from the addresses which receive data during normal operation of the integrated circuit. Accordingly, manufacturing information is accessible by the manufacturer, and the customer is preferably made unaware of the address space employing those storage locations.