Having Particular Transport Between Article Handling Stations Patents (Class 700/228)
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Patent number: 6654663Abstract: An assembly line comprising a number of pallets (1) carrying electronic components for assembly, provided with individual RF-tags (2) containing stored product information, a main conveyor (3) in the shape of an endless loop, conveying pallets (1); assembly stations (4) spaced along the main conveyor. Each station is equipped with a reading device (6) for reading the RF-tags and a data processing apparatus controlling the work station operations, depending on the data read off the RF-tag; an automatic storage system (7) placed in the vicinity of workstations (4) comprising a number of storage devices (8), as well as transfer means (9) feeding pre-selected components from a pre-selected storage device to the assembly stations.Type: GrantFiled: October 30, 2000Date of Patent: November 25, 2003Assignee: PMJ automec OyjInventor: Markku Jokela
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Patent number: 6654662Abstract: The invention concerns a method for organising the flow of goods for a stock consisting of heterogeneous units arranged closely on top of and beside one another in stacked standardised parallelepiped-shaped containers (1) which are joined into several co-ordinate-forming layers of containers in a vertical framework (6). With one or more computer-controlled lifting devices (5) with a gripping device (3) each individual container is lifted mechanically up and out of the stack for manual replenishment or a manual packing station (7). After dispatch the container (1) is returned to a new random, but continuously known position. The random and continuous alteration of location compels the statistically most frequently sold goods to be located in containers which have recently been returned to the upper layer of the stack, while those goods which statistically are seldom sold over a period of time will be located in containers in the lower layers of the stack.Type: GrantFiled: July 29, 1999Date of Patent: November 25, 2003Assignee: Autostore ASInventor: Ingvar Hognaland
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Patent number: 6647316Abstract: A traffic management system for an automatic material handling system (AMHS) divides time into a series of discrete time periods and analyzes a plurality of move requests that are to be executed within a particular time period is disclosed. The traffic management system receives a plurality of move requests from the AMHS and determines how many move requests are to be executed and selects which move requests in particular will be executed in the next time period. The traffic management system prioritizes the selected move requests by analyzing each source node and destination node contained in a move request in conjunction with other node traffic data. The traffic management system analyzes this data to ensure that a move request is not executed if a material transport vehicle would be dispatched to a node having a node traffic balance value that exceeds a predetermined value and a node traffic density value that exceeds a predetermined value.Type: GrantFiled: February 22, 2001Date of Patent: November 11, 2003Assignee: PRI Automation, Inc.Inventors: Namdar Bahri, Robert Gaskins, David Levassuer, Jing Wen Liu, Thomas Mariano, Ted Schnackertz
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Publication number: 20030191551Abstract: A method for transferring semiconductor wafers can suppress the generation of native oxides or watermarks, or the like, in cleaning the semiconductor wafers. In the semiconductor wafer transfer method of the preferred embodiment, first and second process chambers, and a dry unit are vertically arranged in a housing. The preferred method includes transferring the wafer between these chambers and the dry unit by a first non-contact hold type of a transfer robot, transferring the wafer between the housing and a wafer cassette by a second non-contact hold type of a transfer robot, and feeding nitrogen gas into the housing from gas-feeding inlets.Type: ApplicationFiled: April 1, 2003Publication date: October 9, 2003Inventors: Hideto Gotoh, Tohru Watari, Kazuyoshi Takeda
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Patent number: 6629018Abstract: A singulator is disclosed for singulating the flow of articles in a conveyor system. The singulator includes a mechanism for actuating a portion of a conveyor to remove one item at a time from the conveyor end. A control system singulates items by selectively actuating portions on the conveyor underlying the items and extending toward the end of the conveyor. After one item has been singulated, another item is singulated when a gap between the trailing edge of the first item and a leading edge of the second hem reaches a predetermined size. This process repeats itself for singulating more articles.Type: GrantFiled: April 27, 2001Date of Patent: September 30, 2003Assignee: Rapistan Systems Advertising Corp.Inventors: George R. Mondie, Gerald A. Isaacs, Homer L. Dickerson
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Patent number: 6622057Abstract: A method for controlling an automatic guide vehicle (AGV) in a semiconductor factory automation (FA) system, includes the steps of: a) receiving operating mode information of a process equipment changed by an operator; b) storing the operating mode information of the process equipment changed in a real-time database; c) carrying out a predetermined semiconductor process at an operating mode having a full automation mode and sending a process completion signal after the predetermined semiconductor process has been completed, wherein the predetermined semiconductor process is applied to a lot of semiconductor wafers; d) creating a queue in response to the process completion signal; e) checking the operating mode information of the process equipment stored in the real-time database in response to the queue; f) inactivating the AGV by interrupting a transmission of the queue to the AGV if the operating mode information of the process equipment stored in the real-time database is not the full automation mode; andType: GrantFiled: June 19, 2000Date of Patent: September 16, 2003Assignee: Hyundai Electronics Industries Co., Ltd.Inventors: Myung-Jai Ko, Young-Soo Cho
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Patent number: 6610955Abstract: An apparatus for performing multiple and varied processing and sorting procedures on mixed mailpieces of varied sizes in a single pass is provided. The apparatus further provides a user interface so that as few as a single user can perform the multi-task processing and sorting of mixed and non-machineable mailpieces. Also provided are related methods for performing in a single pass with as few as a single operator multiple processing and sorting steps on mixed mailpieces primarily with the purpose of rehabilitating and improving the characteristics of the mailpieces for the purpose of subsequent high speed processing.Type: GrantFiled: January 31, 2002Date of Patent: August 26, 2003Inventor: Steven W. Lopez
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Patent number: 6604017Abstract: In one embodiment of the present invention, a modular printing system has a plurality of modules for processing sheets. One module is a collator module configured to retain the sheets. The collator module has a collator controller and sensors linked to the collator controller. The sensors are arranged to detect erroneously processed sheets. The collator controller is configured to generate an error signal in response to detection of an error. The collator module also includes a feed assembly for presenting the sheets. A printer module is configured to receive sheets presented by the feed assembly. The printer module includes a printer controller and sensors linked to the printer controller. The sensors are arranged to detect erroneously processed sheets and to generate an error signal in response to detection of an error. The module printing system also includes a system controller linked to the collator controller and the printer controller.Type: GrantFiled: May 22, 2000Date of Patent: August 5, 2003Assignee: Check Technology CorporationInventors: Michael M. Richardson, Allan C. Brittle, Jr., Lee B. Fiedler, Kent Gorham, Jay R. Peterson, Gary T. Schultze, Chris J. Vetter, Eugene G. Weiss
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Patent number: 6598869Abstract: A method of media handoff from a first device to a second device comprises transmitting a first signal from the first device indicating a medium is at a predetermined handoff point. The first device receives a second signal from the second device instructing the first device to transport the medium toward the second device. The first device transports the medium toward the second device and receives a third signal from the second device indicating acceptance of the medium by the second device.Type: GrantFiled: July 18, 2001Date of Patent: July 29, 2003Assignee: Hewlett-Packard Development Company, LP.Inventors: Jon R. Johnson, Jeanette M. Coffren
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Patent number: 6591163Abstract: A system, method, apparatus and program which enables the automation of the carrying of a lot or lots of special purpose wafers between stockers and to achieve high speed processing while suppressing an increase in storage volume. The carrying control system includes stockers for storing therein special purpose lot or lots comprising wafers which will not be processed in production facilities, or said special purpose lot or lots and usual lot or lots comprising wafers which will be processed by production facilities and a carrying host computer for controlling automatic carrying of lot or lots in carrying facilities.Type: GrantFiled: February 2, 2001Date of Patent: July 8, 2003Assignee: NEC Electronics CorporationInventor: Hiroshi Nakashima
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Patent number: 6591162Abstract: A load port assembly capable of monitoring a plurality of performance characteristics of wafer carriers. The load port assembly may include one or more of the following monitoring systems: a torque measurement system, a wafer height measurement system, a carrier identification reader, an information pad, a resistivity measurement system, a cleanliness measurement system, a seal performance detector, and a relative humidity detector. In a preferred embodiment of the present invention, each of the monitoring systems are integrated into either a carrier advance plate or a port door of the load port assembly.Type: GrantFiled: August 16, 2000Date of Patent: July 8, 2003Assignee: Asyst Technologies, Inc.Inventor: Raymond S. Martin
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Publication number: 20030114957Abstract: A contaminant detection system for mail is provided. A tray of mailpieces is transported along a transport path into a chamber that has a negative pressure maintained by a vacuum system. The tray of mail enters the chamber and is quickly decelerated, such as, for example, by hitting a stop. The quick deceleration compresses the mailpieces in the tray, thereby ejecting air, dust and other particles from the mailpieces into the surrounding environment inside of the chamber. The vacuum system draws the ejected air, dust and other particles into a sampling system that monitors for the presence of a possible biohazard. If any type of contaminant is found in the ejected air, dust and other particles, the tray can be held for further investigation of the mailpieces. If no contaminants are detected, the tray is accepted and the mailpieces are further processed.Type: ApplicationFiled: December 18, 2001Publication date: June 19, 2003Applicant: Pitney Bowes IncorporatedInventors: Robert A. Cordery, Pushpavadan S. Nagarsheth, Joseph E. Wall
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Patent number: 6580967Abstract: A method and apparatus for providing distributed material management and flow control in an integrated circuit (IC) factory. The IC factory comprises a factory stocker, a plurality of process bays and a factory transport agent for moving wafer cassettes between the bay and the stocker. Each of the bays comprises a bay stocker, a plurality of tools, a mini-stocker and a bay transport agent for moving wafers amongst the bay components. The apparatus uses partitioned stockers to facilitate deadlock avoidance or deadlock resolution. Additionally, various algorithms are used to detect wafer cassette movement situations where deadlocks may result from a wafer cassette movement within a bay and for resolving deadlocks when they occur.Type: GrantFiled: June 26, 2001Date of Patent: June 17, 2003Assignee: Applied Materials, Inc.Inventors: Dusan Jevtic, Raja S. Sunkara
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Patent number: 6574530Abstract: Interactive movable waiting station, comprising a plurality of seating stations (16) carried by a motorized movable structure (22) adapted to cyclically take the various seating stations (16) in correspondence with a service counter (10) attended by an operator. Each seating station (16) is provided with first computer means (20) electronically connected to second computer means (12) associated with the service counter (10). The first computer means (20) are programmed for enabling the person who occupies the seating station to prepare a service request during the waiting time necessary for taking the person in correspondence with the service counter. The first computer means transfer the request for service to the second computer means (12) before the person who has prepared such request reaches the service counter.Type: GrantFiled: June 15, 2000Date of Patent: June 3, 2003Inventor: Fabrizio Bertone
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Patent number: 6560507Abstract: Each module of a wafer processing system is given a classification. Upon receipt of a command to move the wafer to one of the modules, a sequence enumerating the modules to be visited by the wafer before reaching its destination is created. The modules are added to the sequence based on their classification. The wafer is then worked on in each module enumerated in the sequence. By creating the sequence when needed, the number of static files that have to be maintained and stored in the wafer processing system is minimized. Further, creating the sequence at the time it is needed allows the sequence to take advantage of the history of the wafer and thereby eliminate unnecessary steps.Type: GrantFiled: October 20, 2000Date of Patent: May 6, 2003Assignee: Novellus Systems Inc.Inventors: Sofya B. Malitsky, Stanley P. Liu, Janet E. Yi, Eileen A. H. Wong
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Patent number: 6535784Abstract: In a system and method for scheduling the movement of wafers in a wafer-processing tool, the wafer-processing tool can include a load module, a wafer-transfer unit, a process module, and a scheduler. The scheduler can be configured to generate a schedule for the movement of wafers in the wafer-processing tool based on the duration of the operations to be performed by the wafer-transfer unit and the process module in processing the wafers.Type: GrantFiled: April 26, 2001Date of Patent: March 18, 2003Assignee: Tokyo Electron, Ltd.Inventors: Kentaro Joma, Tatsuya Ogi
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Patent number: 6526330Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: GrantFiled: January 26, 2001Date of Patent: February 25, 2003Assignee: Hitachi, Ltd.Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
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Patent number: 6519504Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: GrantFiled: January 19, 2000Date of Patent: February 11, 2003Assignee: Hitachi, Ltd.Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
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Patent number: 6516239Abstract: An assembly line control system, and more particularly, an automotive assembly line storage and lot controlled system is disclosed. A communications network is overlaid onto a manufacturing assembly line. The assembly line includes a number of readers and processing stations to determine and confirm the identity of vehicles passing proximate to the readers and processing stations, and the vehicles' build instructions, status, position, condition, defect and repair history, etc. This information is stored in a computer database. Based on the information stored about the vehicles, the status of inventories, production schedules and the like, a routing of the vehicles through the manufacturing process is determined and implemented.Type: GrantFiled: August 3, 1999Date of Patent: February 4, 2003Assignee: Honda of Canada IncorporatedInventors: Rick Madden, Jeff French
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Patent number: 6507770Abstract: A system for successively extracting unprocessed substrates from a cassette, successively conveying the extracted substrates to a plurality of processing units, causing the processing units to process the substrates, and successively returning processed substrates to a cassette is disclosed. In the system, corresponding to a recipe that contains process conditions for each of at least one lot, a process start prediction time at which processes of each lot start and a process completion prediction time at which processes for each lot are completed are calculated for at least two processes. Corresponding to the process start prediction time and the process completion prediction time, at least one of optimum processing units that optimize processes for each lot is selected for each lot.Type: GrantFiled: June 6, 2001Date of Patent: January 14, 2003Assignee: Tokyo Electron LimitedInventors: Masanori Tateyama, Kenichi Okubo, Jun Ookura
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Patent number: 6507769Abstract: The bill arranger of the present invention comprises: a loader for loading bills and feeding the bills one by one; a conveyer for conveying the bills fed from said loader; a discriminating device for discriminating the bills conveyed by said conveyer; a plurality of stackers for stacking the bills, which are conveyed by said conveyer, so that the bills can be removed; an operating device for selecting one of sorting process modes which defines a method of sorting the bills loaded in said loader; a controller for delivering the bills, which are fed from said loader, to one of said stackers, by said conveyer, based on the results of the discrimination by said discriminating device, according to the sorting process mode selected by said operating device; and displays, separately provided for said respective stackers, which can change displayed contents.Type: GrantFiled: March 9, 2000Date of Patent: January 14, 2003Assignee: Laurel Bank Machines Co., Ltd.Inventors: Ken Urata, Masaaki Egashira, Yoshiyuki Kato
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Publication number: 20020198623Abstract: A method and apparatus for providing distributed material management and flow control in an integrated circuit (IC) factory. The IC factory comprises a factory stocker, a plurality of process bays and a factory transport agent for moving wafer cassettes between the bay and the stocker. Each of the bays comprises a bay stocker, a plurality of tools, a mini-stocker and a bay transport agent for moving wafers amongst the bay components. The apparatus uses partitioned stockers to facilitate deadlock avoidance or deadlock resolution. Additionally, various algorithms are used to detect wafer cassette movement situations where deadlocks may result from a wafer cassette movement within a bay and for resolving deadlocks when they occur.Type: ApplicationFiled: June 26, 2001Publication date: December 26, 2002Applicant: Applied Materials, Inc.Inventors: Dusan Jevtic, Raja S. Sunkara
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Patent number: 6445977Abstract: The present invention relates to a carrier handling apparatus for a module IC (integrated circuit) handler and method therefor, for performing effective tests while carrier having a plural module ICs therein are transferred between the processes. The present invention includes a base frame, a vertical frame being provided perpendicular to one side of the base frame, carrier units being fixed at a top of a carrier holder, the carrier holder being disposed parallel at upper portion surfaces of the base frame and provided to slide along LM guide rails, respective press units being provided, corresponding to respective carrier units, at one side of the vertical frame, and for connecting the module ICs contained in the carrier unit, and a driving motor providing with pulley provided at one side of the vertical frame so as to slidably move rightward and leftward the carrier unit connected thereto by means of a timing belt.Type: GrantFiled: February 1, 2000Date of Patent: September 3, 2002Assignee: Mirae CorporationInventors: Ji Hyun Hwang, Hyun Joo Hwang
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Patent number: 6434446Abstract: The invention relates to a method for adjusting the workpiece flow in a production system (10), including workpieces (16) and workpiece agents (18) associated with the workpieces, machines (12) for machining the workpieces (16), and machine agents (14) associated with the machines (12) and transportation device (20). To make a flexible production system available that is tolerant of at least partial failures of system components, it is provided that each transportation agent (30) is assigned at least one machine (12) with a specified machine address Mn; that the transportation agent (30) is tasked to transport the workpiece (16) to a desired destination machine address Mz; and that the transportation agent (30) autonomously controls the transportation device (20) in such a way that the workpiece (16) is transported to the machine with the destination machine address Mz via a specified destination exit (A1-A4).Type: GrantFiled: July 25, 2000Date of Patent: August 13, 2002Assignee: Schneider Automation GmbHInventors: Ronald Schoop, Siegfried Ralf Neubert, Eckart I. Tietze
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Patent number: 6430469Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: GrantFiled: December 7, 2000Date of Patent: August 6, 2002Assignee: Hitachi, Ltd.Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
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Publication number: 20020103571Abstract: A robot wafer alignment tool uses a reflector mounted on a multi-axis robot to determine the position of the robot or other objects within a chamber. The reflector reflects images to at least one camera from an area or object of interest in the chamber.Type: ApplicationFiled: January 31, 2001Publication date: August 1, 2002Inventors: Woo Sik Yoo, Kitaek Kang
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Patent number: 6427096Abstract: A method and apparatus for automated interfacing with a processing tool in a manufacturing environment having a tilt mechanism and a rotation mechanism. In one embodiment, semiconductor wafers in a cassette are presented to a processing tool by tilting the cassette during movement towards the tool. The tilt mechanism provides a means for seating the wafers in the cassette. The rotation mechanism allows the cassette to be adjusted to meet a robotic arm which extracts wafers from the cassette. Where the cassette is part of a Standard Mechanical InterFace (SMIF) system, the pod is placed onto the interface apparatus, where the pod cover is removed to allow processing of the wafers. A bellows is provided to cover the exposed cassette, thus creating an extended mini-environment including the interface apparatus, tool, and pod cover. In one embodiment, the interface apparatus includes robotic arms and a lift mechanism.Type: GrantFiled: February 12, 1999Date of Patent: July 30, 2002Assignee: Honeywell International Inc.Inventors: Paul E. Lewis, Adel George Tannous, Karl A. Davlin, Khalid Makhamreh
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Publication number: 20020099470Abstract: A system for processing semiconductor wafers includes adaptations allowing the selective handling of cassettes for both 200-mm wafers and 300-mm wafers. The system is configured initially for handling standard 300-mm FOUP cassettes. Adaptions for handling 200-mm wafer open cassettes include a load port adapter frame for receiving such cassettes on a input/output platform; a cassette handler adapter configured for reversibly mounting on a cassette handler end effector and for receiving 200-mm open cassettes; a store adapter frame for converting 300-mm FOUP storage compartments into compartments for storing 200-mm open cassettes; and a Transhipment FOUP for holding 200-mm open cassettes upon a cassette transfer platform and bringing such cassettes into an interface with a wafer handler. The Transhipment FOUP has outer surfaces resembling a standard 300-mm FOUP cassette, but is configured to receive a 200-mm open cassette therein.Type: ApplicationFiled: January 24, 2001Publication date: July 25, 2002Inventors: Jan Zinger, Christianus G.M. De Ridder
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Publication number: 20020099469Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: ApplicationFiled: March 1, 2002Publication date: July 25, 2002Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
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Patent number: 6418355Abstract: A lot supply system includes a plurality of processing units, a supply unit, a plurality of counters, and a supply controller. The processing units output a lot supply request and perform a predetermined process for a lot supplied to them. The supply unit supplies a lot stored in it to requesting processing units in response to the lot supply request from the processing units. The counters count product lots supplied to the requesting processing units at least in units of the requesting processing units. When counts of the counters reach preset values set in units of the requesting processing units, the supply controller supplies measurement lots stored in advance to the requesting processing unit and initializes counts of the counters. A lot supply method is also disclosed.Type: GrantFiled: May 18, 2000Date of Patent: July 9, 2002Assignee: NEC CorporationInventor: Hiroshi Kondou
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Patent number: 6418356Abstract: A wafer cluster tool comprising a series of processes has a scheduler which synchronizes all events in the system. Events in the cluster tool are scheduled to occur at regular, periodic intervals, thereby improving throughput and quality. The scheduler also eliminates conflicts for transportation resources between modules in the cluster tool. Wafers are loaded into the cluster tool at a regular interval, referred to as a sending period. All events in the system are synchronized with the sending period, and all event timings are normalized in terms of the sending period. The conflicts are resolved by selectively adding delays in modules which can tolerate them without degrading throughput or performance in the system; modules that cannot tolerate delays are exempted. The periodicity of the scheduled cluster tool enables the identification of wafers in the cluster tool. The identification of the order in which a wafer was loaded also identifies a module path followed by the wafer.Type: GrantFiled: June 18, 1999Date of Patent: July 9, 2002Assignee: Silicon Valley Group, Inc.Inventor: Hilario Oh
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Publication number: 20020082744Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.Type: ApplicationFiled: March 1, 2002Publication date: June 27, 2002Inventors: Minoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
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Publication number: 20020082743Abstract: Two data streams which are not related real-time are operated on so that the input stream can be processed real-time vis-a-vis the output stream. Both streams are clocked by the same encoder and a random tracking signal is imposed on both the input and output data streams. A reject signal on the input stream can accordingly be placed at the correct location on the output stream.Type: ApplicationFiled: December 21, 2000Publication date: June 27, 2002Inventor: William J. Furnas
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Patent number: 6411864Abstract: A modular object handling system has a multi-level control architecture, which includes a system controller that coordinates the functions and/or operations of individual module controllers, that in turn control corresponding actuators, to provide a desired system function. The system controller performs the overall trajectory planning by taking the constraints of each of the module actuators into account. The system controller may compensate for deviations of objects from their planned trajectories by contemporaneously redetermining trajectories and trajectory envelopes to encode the various combinations of the system constraints and task requirements. The trajectory envelopes can denote regions around other trajectories to indicate control criteria of interest, such as control and collision boundaries.Type: GrantFiled: December 13, 1999Date of Patent: June 25, 2002Assignee: Xerox CorporationInventors: Markus P. J. Fromherz, Sudhendu Rai
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Patent number: 6405101Abstract: Disclosed is a system and method for detecting the position of a wafer with respect to a calibrated reference position. In one embodiment of the invention, sensors are used to detect the edges of the wafer as the wafer is being passed over the sensors. This wafer detection information is then used to calculate the amount by which the wafer is off-centered such that corrections can be made before the wafer is placed onto a destination location.Type: GrantFiled: November 5, 1999Date of Patent: June 11, 2002Assignee: Novellus Systems, Inc.Inventors: William R. Johanson, Craig Stevens, Steve Kleinke, Damon Genetti
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Patent number: 6401008Abstract: A semiconductor wafer review system and method. A method and system for front and back side review of semiconductor wafers is provided in various embodiments. Inspection data for the front side is used to position the wafer for front side review, and a wafer inverter is provided to flip the wafer for back side review. Inspection data for the back side is used to position the wafer for back side review.Type: GrantFiled: November 18, 1998Date of Patent: June 4, 2002Assignee: Advanced Micro Devices, Inc.Inventors: Edward E. Ehrichs, Chris Wooten
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Patent number: 6393336Abstract: There are provided a nozzle clogging detection device for an electronic component-mounting apparatus, which has a simple construction and is capable of accurately detecting clogging of a vacuum nozzle and erroneous mounting of a vacuum nozzle different in diameter, and a nozzle clogging detection method therefor. A flow meter is arranged across a vacuum passage communicating between a vacuum pump and the nozzle hole of the vacuum nozzle, for measuring an actual flow rate of air drawn in through the nozzle hole. Clogging of the nozzle hole and erroneous mounting of the vacuum nozzle is detected by comparing the actual flow rate measured by the flow meter with a design flow rate of air to be drawn through the nozzle hole, the design flow rate of air being stored in advance.Type: GrantFiled: February 22, 2000Date of Patent: May 21, 2002Assignee: Sanyo Electric Co., Ltd.Inventors: Yoshinori Kano, Takahiro Nagata, Ikuo Takemura
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Patent number: 6389326Abstract: A system and method for monitoring a process flow of a semiconductor wafer. In one embodiment, the method initially calculates a first location of the wafer before it is processed. The wafer is then moved into a process chamber where it is processed. Then a second location of the wafer is calculated before the wafer is unloaded. If the difference between the first and second locations are within a predetermined amount, the wafer is unloaded and regular processing steps proceed. If the difference is not within the predetermined amount, an alarm is activated and the process is stopped.Type: GrantFiled: August 20, 1998Date of Patent: May 14, 2002Assignee: GlobiTech IncorporatedInventors: Danny Kenny, Keith Lindberg
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Patent number: 6389327Abstract: In a mail processing system with a franking and addressing machine and to a method for combined franking and address printing, both printing jobs for franking or addressing are sequentially implemented in a specific sequence in separate passes with a single print head. The print medium surface is correspondingly printed while the print medium is transported past the print head. A turning station is provided for rotating a print medium by approximately 180° before or after the printing and is arranged in the mail processing system preceding or following the digital printer device.Type: GrantFiled: September 2, 1998Date of Patent: May 14, 2002Assignee: Francotyp-Postalia AG & Co.Inventor: Wolfgang Thiel
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Patent number: 6389328Abstract: A method of and apparatus for conveying a conveyable object is disclosed whereby the object (W) attracted at a conveying start site (A) by suction to an attractor means (12) carried by a conveyer arm (14) and conveyed by the conveyer arm (14) while being retained by suction to the attractor means (12) is instantaneously detached from the attractor means (12) at an object conveying destination site (B). To attract the object (W) and to hold it retained to the attractor means (12), an attractor plate (32) having fastened thereto the attractor means (12) and attached to a lower end of an inner cylinder (28) that extends in the outer cylinder (20) is held in a vacuum contact with a head plate (24) attached to a lower end of an outer cylinder (20) carried by a conveyer arm (14) in which a vacuum communication is established of the attractor means (12) with a suction source (16) via the attractor plate (32), the head plate (24) and suction hose means (22).Type: GrantFiled: July 5, 2000Date of Patent: May 14, 2002Assignee: Nippon Crescent Co., Ltd.Inventor: Nobuo Tokuno
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Patent number: 6366828Abstract: A device for collecting and transporting groups of partly superimposed postal objects, aligned along a transport direction and having front edges spaced from each other. The device includes a plurality of first transport modules receiving as input groups of partly superimposed postal objects, and supplying these objects as output to a transport system, in particular, aloop transport system in communication with inlets of second transport modules. The transport system is coupled with a control unit to receive a group of partly superimposed postal objects output from any first source module, and supplying it to any second destination transport module.Type: GrantFiled: December 16, 1998Date of Patent: April 2, 2002Assignee: Elsag SpAInventors: Guido De Leo, Stefano Solari
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Patent number: 6366827Abstract: A system for preparing mail items, the system comprising a general-purpose computer for preparing a document to be sent, a secure metering device connected to the general-purpose computer via a secure link so as to send it postage metering or “franking” information, a printer connected to the general-purpose computer so as to print both the document to be sent, and at least a destination address for the document and a postage imprint on an envelope that is to receive the document, and a folder/inserter connected both to the printer and to the general-purpose computer so as to receive and fold the printed document and so as to insert it into the corresponding franked envelope.Type: GrantFiled: September 23, 1998Date of Patent: April 2, 2002Assignee: Neopost IndustrieInventors: Marek Krasuski, Dominique Mazeiller
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Patent number: 6356804Abstract: A computer controlled manufacturing arrangement and method for selecting between multiple paths for transporting cassettes between processing locations. The manufacturing arrangement includes a plurality of stockers interconnected with tracks on which cassettes are carried on vehicles. A first and second stocker are interconnected by at least a first path and a second path formed by the tracks, and a cassette can be transported from the first to the second stocker via either of the two paths. A plurality of robotic arrangements are configured to transfer cassettes between the stockers and the vehicles. A data processing system is coupled to the robotic arrangements and configured and arranged to maintain an historical record of codes indicative of periods of time expended in transporting cassettes from the first stocker to the second stocker via the first path and second path, respectively.Type: GrantFiled: March 6, 2000Date of Patent: March 12, 2002Assignee: Advanced Micro Devices, Inc.Inventors: Michael R. Conboy, Patrick J. Ryan, Elfido Coss, Jr.
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Patent number: 6351686Abstract: A semiconductor device manufacturing apparatus and a control method thereof which can shorten the manufacturing term of semiconductor devices are achieved. The semiconductor device manufacturing apparatus includes a plurality of processing apparatuses for taking out and processing semiconductor wafers successively which constitute a process lot, and including a standby port where a lot to be processed following processing of the process lot is put on standby. The semiconductor device manufacturing apparatus further includes a stocker for storing a lot to be transported to the standby port. According to the control method of the semiconductor device manufacturing apparatus, it is predicted when there is no standby wafer left in the processing apparatus in a prediction step. The predicted time is used to set transfer starting time when transfer of the next-processed lot to the standby port is started in a time setting step. A lot to be processed next is selected in a lot selecting step.Type: GrantFiled: July 5, 2000Date of Patent: February 26, 2002Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Junji Iwasaki, Atsushi Fujisaki, Tomohiro Yamaguchi
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Publication number: 20020002422Abstract: A semiconductor processing system includes a transfer apparatus for transferring a wafer. The transfer apparatus has a pick arm member with wings. The reference distances between the wafer located at the normal position and the wings are stored in a memory of a CPU. Detection ranges of line sensors are set in a standby position in front of a process chamber in order to detect the distances between the wafer and the wings. In the CPU, the amount of positional shift of the wafer is detected based on the reference distances and the detected distances.Type: ApplicationFiled: May 21, 2001Publication date: January 3, 2002Inventors: Masaki Kondo, Hiroaki Saeki
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Publication number: 20010051837Abstract: A system for successively extracting unprocessed substrates from a cassette, successively conveying the extracted substrates to a plurality of processing units, causing the processing units to process the substrates, and successively returning processed substrates to a cassette is disclosed. In the system, corresponding to a recipe that contains process conditions for each of at least one lot, a process start prediction time at which processes of each lot start and a process completion prediction time at which processes for each lot are completed are calculated for at least two processes. Corresponding to the process start prediction time and the process completion prediction time, at least one of optimum processing units that optimize processes for each lot is selected for each lot.Type: ApplicationFiled: June 6, 2001Publication date: December 13, 2001Inventors: Masanori Tateyama, Kenichi Okubo, Jun Ookura
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Patent number: 6309162Abstract: A data storage system comprising: a media picker displacement path having a first end and a second end; a first media picker assembly mounted in the picker displacement path; a second media picker assembly mounted in the picker displacement path; a plurality of data storage media access locations located along the picker displacement path; the first media picker assembly being displaceable along the path from the first end to a point of interfering contact with the second media picker assembly; the second media picker assembly being displaceable along the path from the second end to a point of interfering contact with the first media picker assembly; the storage system having a normal running operating mode wherein the first media picker assembly is stationarily positioned at the first end of the displacement path and the second picker assembly is selectively positionable along the remainder of the path; the storage system having a fall back running operating mode wherein the second media picker assembly is sType: GrantFiled: May 13, 1999Date of Patent: October 30, 2001Assignee: Hewlett-Packard CompanyInventor: Joseph M. White
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Patent number: 6308110Abstract: A modular object handling system has a multi-level control architecture, which includes a system controller that coordinates the functions and/or operations of individual module controllers, that in turn control corresponding actuators, to provide a desired system function. The system controller performs the overall trajectory planning by taking the constraints of each of the module actuators into account. The system controller may compensate for deviations of objects from their planned trajectories by contemporaneously redetermining trajectories and trajectory envelopes to encode the various combinations of the system constraints and task requirements. The trajectory envelopes can denote regions around other trajectories to indicate control criteria of interest, such as control and collision boundaries.Type: GrantFiled: November 24, 1999Date of Patent: October 23, 2001Assignee: Xerox CorporationInventor: Markus P. J. Fromherz
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Patent number: 6308109Abstract: An apparatus and control method for feeding medications in which processing units, which can prepare drugs, non-drug articles and drug-related articles, are provided along a carrier feed line, and in which carriers for respective patients are fed on the feed line in the order in which preparations for carriers, preparations for medications, and preparation for receiving carriers are all finished so that a large amount of medications can be collected and delivered by carts to a plurality of wards in a hospital with high efficiency. When patient data is entered in a host computer, at least one of the processing units corresponding to this data is activated to prepare medications. When preparations in all of the processing units, tray feed units, and tray receiving unit have been made, a corresponding tray is fed on the conveyor to collect medications and is then loaded into a predetermined one of a plurality of carts.Type: GrantFiled: April 30, 1999Date of Patent: October 23, 2001Assignee: Kabushiki Kaisha Yuyama SeisakushoInventors: Shoji Yuyama, Hiroshi Nose, Takuo Morimoto
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Patent number: 6304795Abstract: The claimed processing operation is used to process piece goods. Large numbers of at least similar objects are processed by feeding objects into the operation in streams (PS) of starting products (A), feeding the starting products and/or intermediate products in product streams (PS) to processing steps (7, 8, 12, 14, 15 . . . ) where they are processed and then carried away from the processing steps, and discharging the processed objects from the operation in streams of end products (EP). In the incoming and outgoing product streams individual products or product groups are conveyed in a sequence. At each processing step at least one property of a processed product or product group is changed. The claimed operation is characterized by sequence changes (4, 5, 6, 10, 13, 16, 17 . . . ) in which the sequence of products or product groups can be changed by transferring products in or out or combinations of both.Type: GrantFiled: January 19, 1999Date of Patent: October 16, 2001Assignee: Ferag AGInventor: Walter Reist