Abstract: A sample processing apparatus comprising: a plurality of sample processing units, each processing a sample contained in a sample container; a transport apparatus that transports a sample rack holding a sample container to at least any one of the plurality of sample processing units; a rack feeding section that receives a sample rack and feeds the received sample rack to a transport line of the transport apparatus; and a controller configured to instruct the transport apparatus, according to a quantity of sample racks received by the rack feeding section, to transport a sample rack fed by the rack feeding section to either (a) a sample processing unit which can accept a subsequent sample rack more rapidly than any other sample processing unit or (b) a sample processing unit having a lower processing load than any other sample processing unit. Also, a sample rack transporting method.

Abstract: Provided is a substrate-processing apparatus including a storage member, a transfer member, and a control unit. The transfer member includes a plurality of transfer arms that load or pick up a substrate to or from the storage member. The control unit controls velocity of the transfer arms such that the simultaneously driven transfer arms simultaneously arrive at target points. Accordingly, the transfer member loads or takes out a plurality of wafers at once to or from the storage member, so that the substrate-processing apparatus reduces transfer time and improves productivity.

Abstract: Provided is a method of adjusting a velocity of a transfer arm in a transfer member. The method includes, accelerating the transfer arm from a start point to a first point where a movement velocity reaches a preset reference velocity, dividing a division from the first point to a second point into movement divisions to move the transfer arm in any one of a deceleration motion, an acceleration motion, and a uniform motion according to the respective movement divisions, and decelerating the transfer arm from the second point to a target point. The motion of the transfer arm in the current movement division is different from that in the movement division just before the current movement division. Thus, a different impulse from that in the precedent movement division is applied to a substrate loaded on the transfer arm. Accordingly, the impulse response superposition cancels residual vibration of the substrate, so as to improve transfer efficiency of the transfer member.

Abstract: A method for processing waste in a material handling system includes detecting an occurrence of a trigger event associated with a waste holder located at a first location and, in response to detecting the trigger event, moving a mobile drive unit to the first location. The method also includes loading waste material onto the mobile drive unit at the first location and transporting the waste material to a waste station using the mobile drive unit.

Abstract: An automated material handling system (AMHS) includes a plurality of first stockers for material storage and a plurality of second stockers for material storage, wherein the second stockers are smaller than the first stockers. A method of operating an AMHS, wherein the AMHS includes a plurality of first stockers for material storage and a plurality of second stockers for material storage and the second stockers are smaller than the first stockers, includes selecting one of the first stockers and the second stockers after a step of a process is performed with one or more pieces of material at a piece of processing equipment; unloading the one or more pieces of material from the piece of processing equipment; and transporting the one or more pieces of material to the selected one of the first stockers and the second stockers.

Abstract: To provide a processor and a processing method to make the operation to load and unload workpieces to and from a processing chamber more efficient, and improve workpiece processing efficiency.

Abstract: A vacuum chamber includes: a vacuum vessel arranged at the backward side, where a wafer of a processing subject is processed inside an internal processing chamber; a transfer chamber arranged at the forward side, where said wafer is transferred at the inside thereof under atmospheric pressure; a cassette stage arranged at the forward of this transfer chamber, where a cassette storing said wafer is mounted; a lock chamber connected with said transfer chamber at the backward of said transfer chamber; a robot arranged inside said transfer chamber, where said wafer is transferred between said cassette and said lock chamber; and an aligning machine for making position of said wafer fit with the predetermined position, wherein the wafer is transferred to said lock chamber, after performing alignment of said wafer on said aligning machine, in the case where displacement amount of position of this wafer is larger than the predetermined value.

Abstract: In a control method for a power assist apparatus, a pressing force acting on a workpiece held by a workpiece holding apparatus is detected, a determination is made as to whether or not the detected pressing force exceeds a preset threshold, a determination is made as to whether or not a dead man switch provided on the workpiece holding apparatus is ON, and a determination as to whether or not to release a rotation restriction applied to a joint portion for connecting the workpiece holding apparatus rotatably to an arm is made in accordance with a result of the determination as to whether or not the detected pressing force exceeds the preset threshold and a result of the determination as to whether or not the dead mean switch is ON.

Abstract: The present invention is directed to a method and automated unloading means for unloading a container from an apparatus. The apparatus of the present invention may include a means for automated loading, a means for automated transfer and/or a means for automated unloading of a container (e.g., a specimen container). In one embodiment, the apparatus can be an automated detection apparatus for rapid non-invasive detection of a microbial agent in a test sample. The detection system also including a heated enclosure, a holding means or rack, and/or a detection unit for monitoring and/or interrogating the specimen container to detect whether the container is positive for the presence of a microbial agent. In other embodiment, the automated instrument may include one or more, bar code readers, scanners, cameras, and/or weighing stations to aid in scanning, reading, imaging and weighing of specimen containers within the system.

Abstract: An ion implantation apparatus, system, and method are provided for a transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.

Abstract: An apparatus, system and method for line management. The apparatus, system and method includes data indicative of a plurality of items to pass through the line, a plurality of available processes, and a plurality of available streams. Ones of the plurality of available processes are corresponded to obtain at least one outcome.

Abstract: A method of transferring storage devices within a storage device testing system includes actuating an automated transporter to retrieve multiple storage devices presented for testing, and actuating the automated transporter to deliver each retrieved storage device to a respective test slot of the storage device testing system and insert each storage device in the respective test slot.

Abstract: Dumping stations for receiving articles and discharging the articles into a collection area are disclosed. Each dumping station includes a bin having pick and dump modes. In the pick mode, articles placed in the bin are retained, while in the dump mode, articles are deposited onto a central conveyor. The bin is biased, via gravity, toward the dump mode. A releasable latch is provided for retaining the bin in the pick mode. A processor is operably coupled to the latch and provides a release signal, whereby the latch releases the bin, thereby allowing the bin to switch to the dump mode. The bin may further include a status indicator for assisting a stock worker in identifying the bin in which to place articles.

Abstract: System and method for implementing integrated transportation control in a wafer fabrication facility are described. One embodiment is a factory automation system for a wafer fabrication facility (“fab”) comprising a plurality of bays, wherein each of the bays comprise a plurality of equipment interconnected by an intrabay overhead transport (“OHT”) system, and first and second interbay OHT systems each for interconnecting the intrabay OHT systems. The factory automation system comprises a manufacturing execution system (“MES”) for providing lot information regarding wafers being processed in the fab, a material control system (“MCS”) for providing traffic information regarding transportation of wafers in the fab, and an integrated transportation control (“ITC”) system for using the lot information from the MES and the traffic information from the MCS for selecting a destination and a route to the selected destination for a wafer carrier containing wafers in response to a transfer request.

Abstract: Two robotic arms roam in separate, non-overlapping areas of a test station, avoiding collisions. A traveling buffer moves along x-tracks between a front position and a back position. In the front position, a first robotic arm loads IC chips from an input tray or stacker into buffer cavities in the traveling buffer. The traveling buffer then moves along the x-tracks to the back position, where a second robotic arm moves chips from the traveling buffer to test boards for testing. After testing, the second robotic arm moves chips to a second traveling buffer, which then moves along tracks to a front position for unloading by the first robotic arm. Two traveling buffers may move on the same tracks in a loop. The buffer cavities in the traveling buffer move on internal tracks to expand and contract spacing and pitch between the front and back positions to match test-board pitch.

Abstract: The present invention relates to a control method in the feeding of plate shaped workpieces to a work station, comprising feeding of the workpiece (8) to a control station (1) at which control station (1) it is controlled that the desired number of workpieces (8) are fed to the work station (7), whereby weighing is performed at said control station (1) by at least one electronic weighing unit (3) that transmits signals to a control unit (6) arranged to signal for the feeding of the workpiece (8) to the work station (7) when the transmitted weight signal lies within a predetermined set point range, wherein said weighing unit (3) is kept fixed on top of a fixing structure (4) and in that control takes place directly at the control station (1) before initiating moving of the workpiece (8) to the work station (7), in order to give reliable moving of a single workpiece (8) at the time in the work station (7).

Abstract: Tooling is described for securing to the movable end of a computer-controlled robotic arm, by which articles can be picked up, optionally rotated and lowered into a new position. The tooling comprises two blades each having a leading edge and trailing edge, movable between a first position in which their leading edges are separated by a large gap and a second position in which the leading edges overlap, or are in contact or are separated by a smaller gap. A movement restraining mechanism is included which comprises at least one resiliency deformable member located above the plane containing the two blades and spaced therefrom by a distance which is less than the thickness of each article to be picked up by the tooling. In use, as the tooling is lowered onto an article. the underside of the deformable member engages the upper surface of the article and becomes deformed in order to accommodate the thickness of the article before the blades make contact with a surface on which the article rests.

Abstract: The present invention concerns a system for the disassembly, handling and reassembly of animal containment cages for use in a lab animal room, comprising automated means for handling and moving the cages (2, 3), at least one disassembly station (60) where said cages are placed during their disassembly, and a control unit that governs said automated means (2, 3) as a function of the parameters identified by suitable detection sensors (62, 63, 64) located at said disassembly station. The present invention also concerns the method implemented by said system.

Abstract: This invention relates to a printer that can feed, seal, and print an indicia (Postage Stamp) on a linerless label and/or standard lined label, cut or tear the label (if needed) and apply the printed label to a mailpiece as it is transported all in one pass. Printer will be capable of feeding mailpieces either by hand, semi-automatically or a stack of mailpieces automatically; sealing each mailpiece if needed, and printing an indicia (Postage Stamp) and adhering it to the mailpiece using Internet Based USPS approved software.

Abstract: A system for handling and/or treating packaging means and method for the format-compatible adjustment of such a system, a method for adjusting the format or changing-over the format of a system configured to treat, handle, and process containers or groups of containers, and an arrangement therefor. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims.

Abstract: A method and a central-belt machine are provided for filling an order container. The central-belt machine includes two central belt provided with articles along a virtual window of an order, and the articles being discharged to the order container at a filling point at the front longitudinal end (V) of the central belt. The two central belts (1, 2) of the central-belt machine, are arranged vertically one above the other, to fill the order container (3), for an order, by at least one interposed vertical conveyor (4) at a single filling point (P) of the lower central belt (2).

Abstract: A system is provided for tracking and maintaining an inventory of location of containers that are stored on cargo ships or in a container yard. The system includes one or more sensors, such as GPS and INS sensors for obtaining real-time position information, as well as a processor configured to automatically provide post processing to recover lost data and to correct erroneous data, such as when real-time position signals are blocked or distorted, the post processing performed by estimating trajectories and correcting the location errors. Post-processed positioning techniques are continuously applied to the stored position data to iteratively determine calibrated position locations to provide calibrated second trajectory segments in a real-time fashion. The calibrated second trajectories are then used to identify the errors in the past real-time position data as soon as a segment of the second calibrated trajectory becomes statistically trustworthy.

Abstract: A baggage management gate includes a first reading device and a second reading device, a detecting device, a determining unit, a first opening and closing device and a second opening and closing device. The baggage management gate manages baggage that is restricted to be carried in or out from a predetermined region. And in order away from the region in which the baggage is managed, the first reading device, the second opening and closing device, the detecting device for both the first person and the second person, the first opening and closing device, and the second reading device are arranged in an entrance direction from the passage to the management region in which the baggage is managed.

Abstract: An apparatus and method for filling vials comprises a shelving unit defining an array of storage locations. The shelving unit may be an array in an XY plane or one or more carousels. A plurality of storage containers are provided, each removably carried by one of the storage locations. A counting and dispensing unit, a source of vials, a label printer and application unit or units, and an output device are also provided. A computer controlled engagement device provides motion in a Z direction. The engagement device may be comprised of a first stage for engaging the storage containers and a second stage for engaging the vials. A computer controlled system carries the engagement device and moves the engagement device in XY directions among the plurality of storage locations, counting and dispensing unit, source of vials, label printer and application unit, and output device.

Abstract: There is provided a substrate processing apparatus capable of reducing a substrate carrying time. The substrate processing apparatus comprises a transfer machine configured to carry a substrate, a holding part configured to hold the substrate on the transfer machine, and a detector configured to detect whether the substrate is held on the transfer machine based on an operation of the holding part.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, an actuator within the enclosure, and a fan assembly disposed in the enclosure that is adapted to generate a pressure within the enclosure that is less than a pressure outside of the enclosure.

Abstract: A control device for controlling the movement of a machine determines a base position set value according to a given base track in space. By limitation of a base element of a machine therewith, the above is hence positionally moved along a base track. The control device further determines a corresponding current supplementary end position in space using the base position set value. The control device also determines a supplementary position set value from a given fixed supplementary start position in space and the current supplementary end position. By limitation of a supplementary element of the machine thereto, the above is thus displaced along an current supplementary track from the supplementary start position, to the current supplementary end position.

Abstract: A conveyance system. The conveyance system includes a movable device for conveying an article, and a robot selected from the group consisting of an articulated robot and an orthogonal robot. The movable device is configured to be both vertically and horizontally movable; and, the robot is mounted on the movable device. The robot includes a hand and a gripper disposed on the hand. The gripper is configured to hold the article. The movable device and the robot are configured to convey the article in conveyance operations that include an extraction, a conveyance, and an installation, of the article; the range of the conveyance operations lies within a working range of the robot from a present position that is selected with priority. The movable device is configured to remain in a stationary state when the article is conveyed by the robot using the conveyance operations within the working range.

Abstract: A system for automatic preparation of mail pieces for special service mailing has a transport device for transporting a series of mail pieces such as envelopes one-by-one in a first path, each envelope having imprinted information. A scanner in the first path reads predetermined information off each envelope. Return receipts are simultaneously fed in a second path past at least one printer, the second path joining the first path at a junction after the printer. The scanner is linked directly to the printer so that the information read from an envelope is immediately applied by the printer to the return receipt, and the prepared return receipt is then secured to the envelope.

Abstract: A vacuum processing system includes a transfer chamber configured to form a vacuum atmosphere through which a target object is transferred. A transfer mechanism is disposed in the transfer chamber and configured to transfer the target object. A process chamber is connected to the transfer chamber through a first gate valve and configured to perform a process on the target object within a vacuum atmosphere. A first exhaust port is formed in a bottom of the transfer chamber at the foot of the first gate valve. A first gas exhaust section is connected to the first exhaust port and configured to exhaust gas inside the transfer chamber.

Abstract: A substrate holder and method for using it to move a substrate. The holder comprises a frame having an inner periphery defining a first opening for receiving the substrate, and a shoulder projecting laterally inward from the inner periphery of the frame for supporting the substrate in the first frame opening. The shoulder has an inner periphery defining a second opening smaller than the first opening for receiving a substrate support. The holder and a substrate therein is moved to a position above the substrate support and then lowered to a position in which the shoulder of the holder is positioned below a top surface of the substrate support and the substrate is deposited on the top surface of the substrate support.

Abstract: A server includes a communication section which receives event information from an event detection device which detects a plurality of types of events occurring in a plurality of temporary storage devices provided at different locations, and transmits transportation load display information to a PC, a storage section which stores lot state data indicating states of lots and storage state data indicating states of the temporary storage devices, an update section which updates the lot state data and the storage state data based on the event information, and an information generation section which generates transportation load display information for notifying a lot transportation state to the user based on the lot state data and the storage state data.

Abstract: A substrate processing apparatus includes: a plurality of substrate processing sections arranged alongside a transport passage; a standby mechanism which retains a substrate in standby, the standby mechanism being movable along the transport passage; a transport mechanism which transports the substrate between the standby mechanism and each of the substrate processing sections, the transport mechanism being movable along the transport passage; a first movement mechanism which moves the transport mechanism along the transport passage; and a second movement mechanism which moves the standby mechanism along the transport passage.

Abstract: A method, a system and a computer program are provided for distributing objects on locations, in particular, for distributing components and materials to different locations of an assembly line. Controlling data is provided to control a distribution of the objects on object delivering units. A list is generated indicating a sequence, in which the objects have to be located on the object delivering units, depending on the controlling data. The objects are placed on the object delivering units in accordance with the list, and the object delivering units are moved to the locations.

Abstract: This invention provides a substrate transport apparatus (100) which transports a substrate (W) placed on a hand portion (10) to a processing apparatus or a predetermined storage unit. The substrate transport apparatus (100) includes a moving means (20) for supporting the proximal side (10b) of the hand portion (10) serving as one end of the hand portion (10), and reciprocally moving the hand portion (10) in the direction of its extension, a tilt detection means (30) for detecting the tilt of a distal end (10a) of the hand portion (10) with respect to the horizontal direction, which accompanies flexure of the hand portion (10) upon placing the substrate (W) on the hand portion (10), and a tilt correction means (40) for generating a pitching motion of the hand portion (10) as a whole so as to cancel the tilt of the distal end (10a) of the hand portion (10).

Abstract: A route setting method according to the present invention sets, in a work transfer system including a plurality of work transfer units which connect a plurality of loading places to a plurality of unloading places, a route of the work transfer units to pass a work between a planned loading place and a planned unloading place which are required to transfer the work in the plurality of loading places and the plurality of unloading places. The route setting method includes the steps of setting, based on layout information representing a layout of the plurality of work transfer units, a plurality of candidates of the route between the planned loading place and the planned unloading place, and selecting, based on a predetermined condition, one route from the plurality of candidates of the route set in the candidate setting step.

Abstract: A workpiece pickup apparatus is provided. The workpiece pickup apparatus includes: a gripping unit which sucks a workpiece so as to lift up the workpiece; a lowering unit which lowers the gripping unit from a waiting position towards the workpiece; a detecting unit which detects a physical amount which corresponds to a force with which the gripping unit presses the workpiece; a comparison unit which compares the detected physical amount with a reference physical amount; and a controller which controls a movement of the gripping unit based on a comparison result of the detected physical amount and the reference physical amount.

Abstract: A conveyance device (10) constructed from a multijoint robot having first to sixth arms (15A-15F) that are each numerically controlled. A suction arm (12) for sucking and holding a semiconductor wafer (W) is provided on the free end side of the conveyance device (10). The suction arm (12) has a suction section (12C) on the forward end side of the arm and is mounted so as to be movable in three perpendicular axes (X, Y, Z axes) through the arms (15A-15F) and so as to be rotatable in the direction tilting relative to an imaginary plane (S). Accordingly, even if the semiconductor wafer (W) is tilted relative to the imaginary plane (S), the suction section (12C) can be brought to intimate contact with the wafer (W) by changing the angle of the suction arm (12).

Abstract: Productivity is improved by ensuring reliability of palette holding and reliability of operations.

Abstract: Two robotic arms roam in separate, non-overlapping areas of a test station, avoiding collisions. A traveling buffer moves along x-tracks between a front position and a back position. In the front position, a first robotic arm loads IC chips from an input tray or stacker into buffer cavities in the traveling buffer. The traveling buffer then moves along the x-tracks to the back position, where a second robotic arm moves chips from the traveling buffer to test boards for testing. After testing, the second robotic arm moves chips to a second traveling buffer, which then moves along tracks to a front position for unloading by the first robotic arm. Two traveling buffers may move on the same tracks in a loop. The buffer cavities in the traveling buffer move on internal tracks to expand and contract spacing and pitch between the front and back positions to match test-board pitch.

Abstract: In a preferred embodiment, an automated Pharmacy Admixture System (APAS) may include a manipulator system to transport medical containers such as bags, vials, or syringes in a compounding chamber regulated to a pressure below atmospheric pressure. In a preferred implementation, the manipulator system is configured to grasp and convey syringes, IV bags, and vials of varying shapes and sizes from a storage system in an adjacent chamber regulated at a pressure above atmospheric pressure. Various embodiments may include a controller adapted to actuate the manipulator system to bring a fill port of an IV bag, vial, or syringe into register with a filling port at a fluid transfer station in the chamber. A preferred implementation includes a sanitization system that can substantially sanitize a bung on a fill port of a vial or IV bag in preparation for transport to the fluid transfer station.

Abstract: A document disposal management system of an example of the invention includes: a plurality of disposal document input units to which a document to be disposed of is input; a document transport mechanism unit which transports the input document in the disposal document input units; a disposal process instructing terminal which is provided in each disposal document input unit and instructs a kind of the document to be disposed of and a process treatment thereof; and a document processing mechanism unit which deposits the document transported from the document transport mechanism unit so as to be disposed of according to an instruction of the disposal process instructing terminal.

Abstract: The present invention is a transfer apparatus for a substrate, including a substrate housing container housing a substrate therein and having a transfer-in/out port for the substrate formed in a side surface thereof; a gas jet unit jetting a predetermined gas toward a rear surface of the substrate in the substrate housing container; and a control unit regulating a supply amount of the predetermined gas supplied from the gas jet unit to control the substrate in the substrate housing container to a predetermined height.

Abstract: Provided are a substrate processing apparatus and a method of displaying an abnormal state of the substrate processing apparatus. The substrate processing apparatus comprising: a manipulation unit comprising a manipulation screen displaying a state of at least one of a substrate carrying mechanism and a substrate processing mechanism; and a control unit comprising a carrying system controller controlling the substrate carrying mechanism. The manipulation unit comprises a setting screen through which detection conditions of sensors configured to detect states of the substrate carrying mechanism and the substrate processing mechanism, and information about a torque limitation including the enabling or disabling of the torque control and a torque control value are set for the substrate carrying mechanism.

Abstract: An apparatus and method for positioning objects at a desired reference position, including a sensor for determining the length of each object/mailpiece from a leading to a trailing edge, a transport mechanism having a positionable drive element for transporting the object/mailpiece, and a controller or processor for controlling the position of the drive element to release the object/mailpiece at a desired reference position. The described embodiments of the invention relate to positioning an object/mailpiece in a clamp assembly of a mixed mail sorter. The jaws of the clamp assembly are separated to receive the object/mailpiece by a pair of spiral cams. The spiral cams interpose and engage tabs of each jaw to open and close the clamp assembly as they concomitantly effect translation of the clamp assembly linearly past the positioning apparatus. The apparatus and method ensures predictable conveyance and release of objects/mailpieces while being manipulated by automated handling equipment.

Abstract: An electronic component inspection apparatus includes an inspection socket which inspects a component, a tray disposition area in which a component waits before it is inspected, tray disposition areas which store a component after it has been inspected, components transfer mechanisms each of which has a vacuum or suction nozzle that can pick up and hold a component to transfer the component, a component position confirmation camera which can capture an image of the component that is being transferred, and a controller which transfers a component to the inspection socket, via a position in which the component position confirmation camera captures an image of the component being held by the suction nozzle while the component is being transferred from the tray disposition area to the inspection socket, and based on that captured image, controls the drive of the components transfer mechanisms so that the component is set in the inspection socket.

Abstract: A transfer system includes: a first shelf blocking an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and which transfers the transported object with the transporting vehicle; a second shelf that puts the transported object; a displacing device which reciprocates the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and reciprocates the transported object at a first direction position, away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device receiving a first system signal indicating a transfer request from the transporting vehicle, which transmits a second system signal indicating a transfer permission to the transporting vehicle, which transmits the first system signal to the processing apparatus.

Abstract: Systems, methods and computer program code for the programming of motion control in load transportation systems are provided which may include programming motion control by specifying desired load motions.

Abstract: A buffer station provides potential improvement for the operation of a facility. By storing to-be-accessed workpieces in the buffer stations of an equipment, the operation of the facility is not interrupted when the equipment is down. The workpieces can be retrieved through emergency access port of the buffer station, thus ensure the continuous supply of workpieces for the workpiece flow of the facility. Algorithm for getting the needed workpieces to the buffer station is also provided through a controller or a computer mechanism. The buffer station can be incorporated in a stocker, such as wafer stocker or reticle stocker.

Abstract: A processing furnace for performing prescribed heat treatment on plural substrates, a boat for carrying the plural substrates that are laid one over another in the boat into and out of the processing furnace, a substrate detecting sensor for detecting the plural substrates laid one over another in the boat by changing a relative position of the substrate detecting sensor with respect to each of the plural substrates, and a control section for registering reference positions of the plural substrates and an allowable range of positional deviations from the reference positions of the plural substrates are provided.