Abstract: A transfer system includes: a first shelf disposed to block an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and can transfer the transported object with the transporting vehicle; a second shelf which puts the transported object; a displacing device can reciprocate the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and which can reciprocate the transported object at first direction position, which is away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device which receives a transfer request from the transporting vehicle, which can transmit a transfer permission to the transporting vehicle.

Abstract: Disclosed is an automated medicine storage and medicine introduction/discharge management system, which includes a main body in which a plurality of receiving shelves is arranged, the main body having a door to enable user access, a medicine introduction/discharge unit installed in one side region of the main body to introduce or discharge a medicine product into or out of the main body, a robot transfer unit installed in the main body to transfer the medicine product, introduced via the medicine introduction/discharge unit, to each receiving space of the main body, or to discharge the medicine product received in the receiving space, and a control unit to control operations of the main body, the medicine introduction/discharge unit, and the robot transfer unit. The system is able to store a variety of medicine in a single main body and to achieve enhanced security for special medicine and efficient management of stock.

Abstract: Arrangement (1) for processing electronic components, including a plurality of processing stations (3) for processing electronic component, at least some processing stations including an electrical actuator (8); a conveyor (2), such as a turret, for transporting components from one processing station to the next; and a central processing unit (5) for commanding the processing stations. At least some processing stations (3) include a local processing unit (7) for generating command signals (74) for the electric actuators (8). The central processing unit (5) is connected to the local processing units (7) over an electronic bus (6). Digital command instructions (75) are transferred on the electronic bus (6) between the central processing unit (5) and the local processing units (7).

Abstract: The production system includes: an item feeding device having transfer mechanisms provided alongside and respectively transferring containers each storing an item to item feeding positions; a carrier device holding and carrying the container and the item at the feeding position; and a control device making: the item feeding device operate to select only one of the transfer mechanisms and to transfer the container of the selected transfer mechanism to the feeding position; the carrier device operate to hold the item from the container transferred to the feeding position and to carry the item to a transfer position; and the carrier device operate to hold the container transferred to the feeding position and to carry the container from the feeding position to a transfer position over an item feeding position for a different one of the transfer mechanisms.

Abstract: A transport unit (1) is provided for workpieces (2), in particular sheet metal parts, between neighboring placement areas or machining devices (3, 4), in particular presses. The transport unit (1) includes a multi-axis robot (5) having a gripper tool (9). A controllable transfer unit (6) is also provided that is guided by the robot (5). The unit includes an advancement unit (7) and a pivot unit (8) for the gripper tool (9).

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

Abstract: An automated mail sorting system including a display for displaying the image of an item of mail belonging to a carrier route, and input device for associating the image with any of a plurality of stations in a walking sequence of the carrier route, and a sorter having a reader for identifying the item of mail, to sorter for placing the item of mail in a location corresponding to the station in the walking sequence.

Abstract: A method for automatically checking in passengers and their luggage by an electronic input of the passenger data or travel data by the passenger himself into an automatic check-in terminal is provided. In the automatic check-in terminal, possibly following selection of various criteria, the boarding pass and one or more information media for attachment to the luggage are created and output. The information medium created is a luggage tag which is easy to affix to the luggage item and which contains, in machine-readable form, at least all the data and information which are required for a later generation of an internationally standardized, preferably self-adhesive luggage band which is affixed to the luggage item within a conveying and sorting system in addition to the luggage tag.

Abstract: A medication dispenser provides automation to the steps of locating and acquiring medications to be administered to a patient. The medication dispenser includes an enclosure providing a secure environment for storing medications in multiple sized medication-storage bins. The medication storage bins are hung in storage racks located within the enclosure. A robot system is also provided within the enclosure for moving bins between the storage racks and a medication dispensing area. The medication dispensing area includes doors configured to open to define an opening for passing a selected bin through the enclosure. In some embodiments, the doors provide a variable-sized opening and, in some instances, the opening matches the size of a bin containing medications selected for dispensing.

Abstract: A method is provided for routing mail items in a mail sorting system that includes means for capturing address information from a mail item in the form of an address block and an analysis engine comprising a plurality of analysis modules. The method comprises: receiving the address block at the analysis engine and making available to each of a set of the analysis modules at least a portion of the address block; at each analysis module, decomposing the available portions of the address block into one or more data objects, each including a representation component representing at least part of the portion and a data type identifier; storing the data objects with an indication of the mail item to which the objects relate; and subsequent to identifying a delivery endpoint for the mail item, adding at least one of the stored data objects to a data set associated with that delivery endpoint whereby future mail items may be routed to that delivery endpoint in dependence on those data objects.

Abstract: Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on acceleration of the substrate holders. Whether there is the possibility of misalignment may be judged based on acceleration of a transporting section that transports the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of the substrate holders.

Abstract: A monitoring device for monitoring an abnormal load or unload operation of a wafer. The monitoring device includes a sensing unit and a detective unit. The sensing unit is for providing a sensing information, which indicates whether the wafer protrudes from a side of a carrier. The detective unit is for determining whether a duration, for which the wafer protrudes from the side of the carrier exceeds a predetermined time, for which the wafer is loaded or unloaded, according to the sensing information. If the duration exceeds the predetermined time, the detective unit further triggers an abnormal event.

Abstract: Methods and apparatus for removing an item from a conveyor system are provided. In some aspects, an escapement assembly includes a sensor system configured to detect a target item of a plurality of items on a feed conveyor of a conveyor system. The feed conveyor is configured to facilitate transport of the plurality of items to a first location. The escapement assembly also includes an escape conveyor configured to couple to a body of the conveyor system such that at least a portion of the escape conveyor is above the feed conveyor. The escapement assembly also includes a delivery assembly configured to pick the target item from the feed conveyor and to place the target item onto the escape conveyor. The escape conveyor is configured to facilitate transport of the target item to a second location different from the first location.

Abstract: A method and apparatus for assembling a complex product in a parallel process system wherein a collection of components are provided for assembling the complex product. The present invention involves transferring the collection of the components to one of a plurality of similar computerized assembly cells through the use of a transport system. The collection of components is automatically assembled into the complex product through the use of the computerized assembly cells. The complex product is then transferred from one of the assembly cells to a computerized test cell, where the complex product is tested to ensure for the proper dimensioning and functioning of the complex product. The complex product is then transferred from the test cell via the transport system to either a part reject area or conveyor, if the complex product is defective, or to an automatic dunnage load or part return system, if the complex product is not defective.

Abstract: A control device for a hoist, which enables easy judgment of the lifetime of a brake of a hoist is provided. The time setting unit sets the time from startup of a double winding induction motor to disengagement of the brake and the time from start of engagement of the brake to stopping of the double winding induction motor in accordance with the time from the startup of the double winding induction motor to generation of torque. The time changing unit detects if power-supply frequency of a power supply is 50 Hz or 60 Hz and can change at least one of the time from the startup of the double winding induction motor to the disengagement of the brake and the time from stopping of driving of the brake to stopping of double winding induction motor in accordance with the power-supply frequency of the power supply.

Abstract: A method for maximizing the overall efficiency of an insertion system by running the system with the optimal balance between system throughput and potential for system stoppages. In other words, the system is capable of running at less than maximum throughput if running at such throughput is causing excessive amounts of system stoppages and thus, negatively impacting overall system efficiency. The foregoing is accomplished by an algorithm that controls the flow of material being processed by a particular section of the machine, or “module”. This algorithm is capable of reducing the flow rate of material to, or within, that module if a problem arises downstream that may lead to a paper jam.

Abstract: The invention relates to a method for distributed control of a machining tool (24), in particular a laser machining tool, which comprises a machining area (31) which is surrounded by a protective housing (22) and has at least one area (27, 28) for access to the machining area (31) which is monitored, and comprising a control which is operated by at least one operator panel (21) to start the machining tool (24), wherein the machining tool is controlled by means of one or more multifunction keys (16), and at least one multifunction key (16) is associated with the at least one access area (27, 28), and when the respective multifunction key is pressed, (16) a work step of an operating sequence for the machining tool (24) is actuated which is next in a repetitive sequence of consecutive work steps of the operating sequence.

Abstract: The invention relates to a scalable freight loading system, especially for an aircraft, said system comprising drive means (L1-L9, R1-R9), covering sensors, bolts, proximity switches (PL1-PL9, PR1-PR9), and a central control device (CCB). According to the invention, the loading surface is divided into sectors (S1, S2, S3); a local control unit (SCB1, SCB2, SCB3) is associated with each sector; the drive means, covering sensors, and proximity switches of a sector are connected to IO ports of the local control unit; and the local control units are connected to the central control unit by means of a bus system (CAN-Bus).

Abstract: A vending arrangement for computerized vending machines, retail displays, automated retail stores, utilizes a centralized, robotic gantry associated with companion modules for vending selectable products. The modularized design enables deployment of half-sized or full-sized machines. The robotic gantry is deployed in a centralized module disposed adjacent display and inventory modules. The inventory modules can be fitted to both gantry sides, and doors can be fitted to the gantry front or rear. The gantry comprises an internal, vertically displaceable elevator utilizing a central conveyor for laterally, horizontally moving selected items from associated display and inventory positions to a vending position. The inventory modules comprise dispensing modules adjustably configurable to adjust the storage density of items to be vended.

Abstract: A system for transporting inventory items includes an inventory holder capable of storing inventory items and a mobile drive unit. The mobile drive unit is capable of moving to a first point with the inventory holder at least one of coupled to and supported by the mobile drive unit. The mobile drive unit is additionally capable of determining a location of the inventory holder and calculating a difference between the location of the inventory holder and the first point. The mobile drive unit is then capable of determining whether the difference is greater than a predetermined tolerance. In response to determining that the difference is greater than the predetermined tolerance, the mobile drive unit is also capable of moving to a second point based on the location of the inventory holder, docking with the inventory holder, and moving the mobile drive unit and the inventory holder to the first point.

Abstract: A substrate processing system 1 comprises a first detecting part 40 configured to detect unprocessed wafers W, and a second detecting part 50 configured to detect processed wafers W. The first detecting part 40 is configured to detect whether the unprocessed wafers W are respectively accommodated in respective accommodating portions 82 of a container 80 or not, and to detect accommodated conditions of the respective unprocessed wafers W accommodated in the respective accommodating portions 82. The second detecting part 50 is configured to collectively detect whether the processed wafers W are respectively accommodated in the respective accommodating portions 82 of the container 80.

Abstract: A method of transferring storage devices within a storage device testing system includes actuating an automated transporter to substantially simultaneously retrieve multiple storage devices presented for testing, and actuating the automated transporter to substantially simultaneously deliver each retrieved storage device to a respective test slot of the storage device testing system and substantially simultaneously insert each storage device in the respective test slot.

Abstract: A system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor calculates the location of the center and the notch of the wafer based on measurements by the sensor(s) and generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.

Abstract: An apparatus and method for transferring plurality of samples from one sample container to another one is disclosed wherein each sample is randomly accessible and can be “cherry picked”. The disclosed method of actuation allows for using a smaller number of actuators than the number of sample transferring channels or pins and thereby simplifies the design and control of the sample transferring apparatus.

Abstract: A method and system for a mainframe premove for a cluster tool is described herein. In one embodiment, the state of a process chamber which is to be used to run a process is obtained. A determination is made of whether the state of the process chamber indicates an almost ready state. A prepare command is sent to a transfer module if the state of the process chamber indicates the almost ready state. A transfer command is sent to the process chamber if the state of the process chamber indicates the almost ready state.

Abstract: By providing a look-ahead functionality for a tool internal substrate handling system of process tools on the basis of a process history, the tool internal substrate sequencing may be significantly enhanced. The look-ahead functionality enables a prediction of process time of substrates currently being processed in a respective process module, thereby enabling the initiation of transport activity for substrate load operations in order to significantly reduce the overall idle time of process modules occurring during substrate exchange.

Abstract: In response to a transfer request, for which a loading time at a transfer source and a loading time at a transfer target are designated by a production controller, there is created a transfer scenario, which contains a basic transfer (From) from the transfer source to a buffer near the transfer target, for example, and a basic transfer (To) from the buffer to the transfer target. In order that the basic transfers (From, To) may be able to be executed, the buffer is reserved, and a transfer vehicle is allocated. The time period for the transfer vehicle to run to the transfer source or the buffer and the time period for the transfer vehicle to run from the transfer source or the buffer are estimated to assign a transfer command to the transfer vehicle. The possibility that the loading and the loading time may deviate from a designated period is evaluated. In case this possibility is high, a production controller is informed that a just-in-time transfer is difficult.

Abstract: A method for positioning substrates in a substrate processing apparatus having a substrate alignment device, a first substrate transport apparatus and a second substrate transport apparatus, includes calibrating the substrate alignment device with a motion of the first substrate transport apparatus, and calibrating a coordinate system of the second substrate transport apparatus with the substrate alignment device.

Abstract: A document discarding apparatus includes: a metal detector that detects presence or absence of a metal embedded in a document; a code reader that reads a code; an instruction accept portion that accepts an instruction to discard the document; a document discarding portion that discards the document; a first determining unit that, according to the presence or absence of the metal, determines whether the document may be discarded in the document discarding portion; a second determining unit that, according to the code, determines whether the document may be discarded in the document discarding portion; and a document discarding control unit that, when the instruction accept portion accepts an instruction to discard the document, on condition that the first determining unit and the second determining unit both determine that the document can be discarded in the document discarding portion, controls the document discarding portion to discard the document.

Abstract: The invention relates to a multidirectional transport module having a control system for the goods pack movement direction and having an interface for communication with other transport modules. In this case, the invention provides for the control system to be designed to reserve the transport module for the transport of at least one goods pack in a given goods pack movement direction, in response to signals received via the interface.

Abstract: A method is provided for transferring a substrate from a first substrate holder, e.g., a pre-alignment unit, to a second substrate holder, e.g., a substrate table in a lithographic apparatus, by means of a transfer unit on the basis of transfer data available thereto. First, the substrate is provided on the first substrate holder. Subsequently, a position error of the substrate is measured, and positioning adjustment data are calculated based on the position error as measured. Then, the second substrate holder is moved relative to a reference position thereof in accordance with the positioning adjustment data. Finally, the substrate is transferred by means of the transfer unit from the first substrate holder to the second substrate holder in accordance with the transfer data, and placed on the second substrate holder as moved.

Abstract: A storage device processing system that includes at least one automated transporter, at least one rack accessible by the at least one automated transporter, and multiple test slots housed by the at least one rack. Each test slot is configured to receive a storage device for testing. The storage device processing system includes a conveyor arranged in a loop around and being accessible by the at least one automated transporter. The conveyor receives and transports the storage device thereon. The at least one automated transporter is configured to transfer the storage device between the conveyor and one of the test slots of the at least one rack.

Abstract: A substrate processing system includes a control section configured to control a series of transfer operations and preset to control operation of a container transfer apparatus, operation at a substrate access area, and operation of a substrate handling apparatus independently of each other. The control section includes a schedule creating portion configured to create a transfer schedule by individually adjusting operation timing of the container transfer apparatus, operation timing at the substrate access area, and operation timing of the substrate handling apparatus such that, in a state while a first lot of substrates are treated in the processing system, but the container transfer apparatus and the substrate access area are unoccupied, a container with a second lot of unprocessed substrates stored therein is transferred onto the substrate access area, thereby minimizing total transfer time.

Abstract: A control system for a load-handling clamp includes first and second load-engaging surfaces for selectively gripping and releasing a load disposed between said surfaces. At least one of said surfaces is selectively movable toward the other by a hydraulic actuator. At least one fluid valve assembly variably regulates a maximum hydraulic clamping pressure capable of causing the actuator to move one of the surfaces toward the other in a load clamping movement. Preferably, a load geometry sensor produces an electrical effect that varies as a function of the geometric profile of the load. A data receiver preferably also obtains load identification information related to at least one characteristic of the load, other than the load's geometry. A controller, in response to the data receiver and load geometry sensor, operates to control the valve assembly's regulation of the maximum hydraulic clamping pressure.

Abstract: Systems and methods that allow for orienting and delivering mail between a postage verifier and a mail sorter. A postage verifier includes an optical character reader for decoding addresses on mail pieces that do not have bar codes. A reverter orients mail from the postage verifier into a position required for processing by the mail sorter. A combination of mail carrying modules carry the mail from the reverter to the mail sorter. The mail sorter prints bar code information on mail lacking bar codes, when the data is available, and sorts the mail based on the bar code information.

Abstract: A method of adjusting any deviations of plate material in the lateral and longitudinal directions including: measuring positions on a first long side of a plate, rotating the plate thereby removing the difference between first and second points; measuring a position on a second long side of the plate, calculating the position of the center line in the lateral direction based on first, second and third points; adjusting the deviation of the positions by moving the plate in the lateral direction and matching the center line with the targeted center line; measuring a fourth position on a short side of the plate and calculating the position of the center line based on the position of the fourth point; and adjusting the deviation by moving the plate in a longitudinal direction and matching the center line in the longitudinal direction with the targeted center line.

Abstract: A multifeed processing apparatus includes a control unit and a storage unit and is connected to a multifeed detecting mechanism and an image reading mechanism. The control unit includes (i) a measuring unit that measures a multifeed detection pattern from any one or both of an output of the multifeed detecting mechanism and an image of a medium read by the image reading mechanism, (ii) a determining unit that determines whether the measured multifeed detection pattern is included in a multifeed disable pattern stored in the storage unit, (iii) a reading control unit that regards a multifeed detection performed by the multifeed detecting mechanism as invalid, and causes the image reading mechanism to continue a reading operation, and (iv) a storage control unit that stores the measured multifeed detection pattern as the multifeed disable pattern in the storage unit.

Abstract: A method and a device for transporting items, in particular mail items. uses multiple transport processes for transporting the items respectively to a processing system. For each item, a measurement is made before the transportation as to whether the item has a predefined characteristic, and if so, in what form. This measurement is executed afresh, after the item is fed to a processing system. For each item, it is determined by means of which transport process the item has been transported. To this end, it is determined which items with what form of the characteristic have been transported by means of which transport process.

Abstract: A sample processing system comprising: first, second and third sample processing units; first, second and third sample transport units; and a control section is disclosed. In order to transport a sample rack which is to be introduced to the first sample transport unit to a destination sample transport unit which is located downstream of a second sample transport unit, the control section initially controls the first and second transport unit to move a transport member. When the sample rack arrives at a predetermined position on the transport path of the first transport unit, the control section controls the third transport unit to move a transport member.

Abstract: A semiconductor workpiece processing system comprises at least one processing tool; a transport section configured to transport carriers to and from the processing tool; and a transport vehicle movably mounted on the transport section; wherein the transport vehicle is configured to: sense a location of a transport carrier alignment feature; adjust a location of a transport vehicle gripper based on the location of the transport carrier alignment feature; sense an attitude of the gripper at a point of engagement with the transport carrier; and adjust the location of the gripper based on the attitude of the gripper.

Abstract: A transport scenario composed of a basic transport (From) from a transport starting point to, e.g., a buffer near the transport destination point and a basic transport (To) from the buffer to the transport destination point is created in response to a transport request of a production controller for transport whose loading times at the transport starting point and at the transport destination point are specified. The buffer is reserved so as to perform the basic transport (From) and the basic transport (To), transport vehicles are allocated, the travel time to the transport starting point or the buffer and the travel time from the transport starting point or the buffer are estimated, and transport instructions are given to the transport vehicles. The possibility that the loading times are out of the specified period is evaluated. If the possibility is larger, the impossibility of a just-in-time transport is notified to the production controller.

Abstract: Methods and apparatus for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput and repeatable wafer processing history are provided. In one embodiment a first substrate is transferred from a first position to a second position and then the first substrate is transferred from the second position to a third position using a first robot. A second substrate is transferred from a first position to a second position and then the second substrate is transferred from the second position to a third position using a second robot. The movement of the first and second robots is synchronized so that the movement from the first position to the second position by the first and second robot is performed within a first time interval.

Abstract: A sorting device and a method for sorting goods in transit for an aircraft are disclosed. The sorting device includes a sorting region with a sorting unit and a storage region. The sorting region is adapted such that goods in transit are capable of being provided to the sorting region in an undetermined first arrangement. The sorting region includes a longitudinal axis, where a sorting unit may be moved along the longitudinal axis of the sorting region. The sorting unit is capable of sorting the goods in transit from an undetermined first arrangement to a predetermined second arrangement, where the goods in transit may be provided in the predetermined second arrangement in the storage region.

Abstract: A system and method for self-synchronization of modular production systems having components with various alternative capabilities for processing and transporting work units along transport highways, for various component/transport highway configurations. The method includes determining jobs of interest, with each job requiring the production of at least one work unit. The configuration of the components, including at least one machine module, and the transport highway is determined. Each component duration time is determined and a default self-synchronization time is identified. The default self-synchronization time is optimized by adjusting not less than one component duration time.

Abstract: A substrate carrying device decides whether or not a substrate received from a substrate supporting device is supported therein in a correct position. A support arm provided with support lugs and strain gages attached to the support lugs, respectively, is advanced to a forward position, and then the support arm is raised relative to lifting pins supporting a wafer to receive the wafer from the lifting pins. The strain gages measure strains produced in the support lugs, respectively, when load is placed on the support lugs. Decision about whether or not the wafer is supported in a correct position on the support lugs is made on the basis of strains measured by the strain gages. When it is decided that the wafer is supported in an incorrect position on the support lugs, the retraction of the support arm is inhibited.

Abstract: Methods and apparatus for selecting and combining packages in an outbound container by employing autonomous transfer and transport vehicles which move on a network of roadways to carry a plurality of individual cases each containing the same kind of product from a loading station and to a destination station where individual packages are combined in the outbound container. The travel of each vehicle through the roadway network is computer controlled, and each vehicle includes means for automatically loading and unloading packages from predetermined locations on the network.

Abstract: A method of transferring disk drives within a disk drive testing system includes actuating an automated transporter to retrieve multiple disk drives presented for testing, and actuating the automated transporter to deliver each retrieved disk drive to a respective test slot of the disk drive testing system and insert each disk drive in the respective test slot.

Abstract: In a vacuum transfer chamber, a position detecting mechanism for detecting the positions of semiconductor wafers is arranged. The semiconductor wafers disposed at predetermined positions in a load lock chamber and vacuum processing chambers are transferred to the position detecting mechanism by a vacuum transfer mechanism and the positions of the wafers are detected. Then, based on the detection results, aligning between the load lock chamber and the vacuum processing chambers is performed.

Abstract: A control method implemented in a variable speed drive for controlling a lifting load, the load control being carried out according to a first control profile that includes the following: accelerating the load with a view to reaching a first speed, decelerating the load upon receiving a deceleration order, and stopping the load. When the load receives a deceleration order when it is at a current speed lower than the first speed, the method determines a second speed lower than the first speed and higher than the current speed, the second speed having an optimal value for minimizing the load running time until stopping.

Abstract: A substrate processing apparatus capable of easily checking a state of a transfer mechanism when an error occurs and readily determining a cause of the error is provided. The substrate processing apparatus includes at least one sensor provided in a transfer mechanism for transferring a substrate, a transfer control module for receiving sensing data transmitted by the at least one sensor, a transfer system controller for controlling the transfer control module, and a manipulation unit at least including a display unit for displaying a state of the transfer mechanism based on the sensed data. Therefore, when an error occurs, at least the sensed data transmitted by the at least one sensor is displayed on the display unit.