Displacement, Motion, Distance, Or Position Patents (Class 73/1.79)
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Patent number: 12141507Abstract: A defect prediction method for a device manufacturing process involving processing a pattern onto a substrate, the method comprising: identifying a processing window limiting pattern (PWLP) from the pattern; determining a processing parameter under which the PWLP is processed; and determining or predicting, using the processing parameter, existence, probability of existence, a characteristic, or a combination thereof, of a defect produced from the PWLP with the device manufacturing process.Type: GrantFiled: January 28, 2022Date of Patent: November 12, 2024Assignee: ASML NETHERLANDS B.V.Inventors: Stefan Hunsche, Venugopal Vellanki
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Patent number: 12061118Abstract: The present invention provides a calibration apparatus, system and method for an in-vehicle camera. The calibration apparatus for an in-vehicle camera includes: a body, where at least one distinctive mark arranged at intervals along a first direction and at least one heating member arranged at intervals along a second direction are disposed on the body. The distinctive mark is configured to be recognized by a common camera, and the heating member is configured to generate heat so as to be recognized by an infrared camera. According to the calibration apparatus, system and method for an in-vehicle camera provided in the present invention, during calibration, a common camera can recognize the distinctive mark, and therefore, the common camera can be calibrated; the heating member may generate heat so as to be recognized by an infrared camera, and therefore, the infrared camera is calibrated.Type: GrantFiled: October 16, 2020Date of Patent: August 13, 2024Assignee: AUTEL INTELLIGENT TECHNOLOGY CORP., LTD.Inventors: Yong Chen, Xinguang Tang, Xiaolong Wang
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Patent number: 12018933Abstract: An accuracy diagnostic device for a machine tool diagnoses an accuracy of the machine tool. The machine tool includes a change amount detection unit that measures a change amount. The change amount changes due to an installation environment and an operational motion. The accuracy diagnostic device includes a change-amount-reference-value recording unit that records a reference value of the change amount. The accuracy diagnostic device obtains the change amount measured by the change amount detection unit. The accuracy diagnostic device diagnoses a change of the accuracy of the machine tool based on a first change index derived from a magnitude of a change of the change amount per a predetermined period and a second change index derived from the current change amount and the reference value.Type: GrantFiled: June 7, 2021Date of Patent: June 25, 2024Assignee: Okuma CorporationInventor: Yuji Mizoguchi
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Patent number: 12018934Abstract: A method for identifying installation positions of sensors, which predefines the corresponding relationship between the first sliding member, the second sliding member and the signal features according to the installation directions of the sensors, and then drives the first sliding member and the second sliding member of one of the feed systems to move to obtain and analyze the three-axis signals fed back from the sensors, firstly select responsive three-axis signals, and then determine the axis with the largest response of the three-axis signals so as to identify the sensor installed on the first sliding member. Then, the corresponding relationship between the remaining three-axis signals and the sensors installed on the second sliding members is identified based on the dynamic signal feature and the static signal feature, so as to achieve the purpose of automatically identifying the installation position of the respective sensors.Type: GrantFiled: January 24, 2022Date of Patent: June 25, 2024Assignee: Hiwin Technologies Corp.Inventor: Yu-Hsin Lin
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Patent number: 12004852Abstract: A system, device and method of calibrating a sensor determine a sensor vector associated with a subject; process the sensor vector; determine a sensor elevation angle as a prediction of the subject's body elevation from a result of processing the sensor vector; and perform calibration using the sensor vector, sensor elevation angle, and a gravity vector.Type: GrantFiled: September 28, 2017Date of Patent: June 11, 2024Assignee: Vital Connect, Inc.Inventors: Nandakumar Selvaraj, Thang Tran, Arshan Aga
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Patent number: 11999361Abstract: An apparatus (1) for calibrating an ADAS sensor of a vehicle (9) comprises: a base unit (2) including a plurality of wheels (20); a support structure (3) integral with the base unit (2); a vehicle calibration assistance structure (4), mounted on the support structure (3) and including a calibration device (41, 42) configured to facilitate aligning or calibrating the ADAS sensor; a position detector, configured to capture values of a position parameter representing a position of the support structure (3) relative to the vehicle (9); a processing unit, configured to process the values of the position parameter in real time to derive information regarding an actual position of the support structure (3) relative to the vehicle (9).Type: GrantFiled: June 22, 2022Date of Patent: June 4, 2024Assignee: NEXION S.P.A.Inventor: Giulio Corghi
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Patent number: 11988506Abstract: An error identification method includes: installing a calibrator including a sphere row A and a sphere row B in which a plurality of spheres are linearly aligned in a direction perpendicular to the sphere row A on a table such that the sphere row A and the sphere row B are approximately parallel to respective two of the translational axes and measuring positions of a plurality of spheres of the sphere row A and the sphere row B using a position measurement sensor tool; rotating the calibrator to a plurality of angles around a normal direction on the upper surface of the table to install on the table and measuring each position of the plurality of spheres of the sphere row A and the sphere row B; and identifying an error of the translational axis based on measured values in the installing and the rotating.Type: GrantFiled: July 6, 2022Date of Patent: May 21, 2024Assignee: Okuma CorporationInventors: Tetsuya Matsushita, Takuya Kojima
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Patent number: 11970183Abstract: Among other things, techniques are described for calibrating a sensor of a vehicle. One technique involves identifying a trigger for calibrating at least one sensor of a vehicle. In response to identifying the trigger, the technique then involves initiating a calibration path planning mode for the vehicle. In the calibration path planning mode, the technique involves: generating a plurality of calibration-aware paths that each include at least one calibration trajectory along at least one road; and selecting, from the plurality of paths, a first calibration-aware path for the vehicle, where the at least one sensor is calibrated while the vehicle travels along the selected path.Type: GrantFiled: September 25, 2020Date of Patent: April 30, 2024Assignee: Motional AD LLCInventors: Bartolomeo Della Corte, Maurilio Di Cicco, Jun Shern Chan
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Patent number: 11913814Abstract: A position-measuring device includes a carrier body having a first and second measuring graduations and a reference mark. The first and second measuring graduations include graduation structures periodically arranged along first and second measurement directions, respectively, that are perpendicular to each other. The graduation structures of the first measuring graduation each extend parallel to a first direction and the reference mark extends in a second direction that forms an angle different from 0° with the first direction. First and second scanners are configured to scan the first and second measuring graduations and generate first and second scanning signals, respectively. A third scanner is configured to scan the reference mark and generate a reference pulse. The position-measuring device is configured such that a phase angle of the reference pulse is determined as a function of the first scanning signals and the reference pulse.Type: GrantFiled: July 8, 2020Date of Patent: February 27, 2024Assignee: DR. JOHANNES HEIDENHAIN GMBHInventors: Pascal Haible, Alois Bartlechner, Sebastian Gruber
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Patent number: 11911860Abstract: A numerical-control machine tool is provided that includes a tool-holder head which is provided with a tool-holder spindle and is capable of rotating/tilting the tool-holder spindle about two different rotation axes inclined to one another; a movable supporting structure that supports the tool-holder head; inclinometer microsensor(s) that are located on the movable supporting structure of the machine to measure/determine the tilt of the element on which the sensors are mounted; and an electronic control device that commands the moving members of the movable supporting structure and of the tool-holder head. The electronic control device is electronically connected to the inclinometer microsensor(s) controls the moving members of the movable supporting structure and of the tool-holder head based on signals arriving from the inclinometer microsensor(s), so as to correct the spatial position and/or the orientation of the tool-holder spindle.Type: GrantFiled: July 1, 2019Date of Patent: February 27, 2024Assignee: PARPAS S.P.A.Inventor: Vladi Parpajola
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Patent number: 11906672Abstract: A method for detecting a degradation in a distance-measuring system (1.1), comprising the following method steps: transmitting a transmission signal (1.2), acquiring a received signal back-scattered from an object, determining the distance (a) from the object using the received signal, and determining a degree of degradation based on the determined distance (a) from the object and/or the received signal strength of the received signal.Type: GrantFiled: July 12, 2019Date of Patent: February 20, 2024Assignee: Conti Temic Microelectronic GmbHInventor: Guenter Anton Fendt
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Patent number: 11892820Abstract: An error compensation method includes outputting at least one of a plurality of calibration-master conditions including a type of a calibration master that includes targets, obtaining measurement values of positions of the targets by detecting the positions of the plurality of targets under the calibration-master condition using a sensor mounted to the main spindle, and calculating an error value using the measurement value and a calibration value of the position of the target. The error compensation method further includes approximating a relation between the measurement values and the error values by a curve and a straight line, calculating a compensation parameter of a positioning error of a translational axis based on an approximate curve in a partial range of a stroke of the translational axis, and calculating the compensation parameter of the positioning error based on an approximate straight line in another range of the stroke of the translational axis.Type: GrantFiled: October 22, 2020Date of Patent: February 6, 2024Assignee: Okuma CorporationInventors: Takuya Kojima, Tetsuya Matsushita, Yasunori Kondo
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Patent number: 11841453Abstract: According to various, but not necessarily all, embodiments there is provided an apparatus comprising means for: obtaining a position of a user device; locating one or more surfaces providing one or more putative reflection points for a non-line-of-sight (NLOS) path between the user device and a wearable device; conditional upon locating the one or more surfaces, causing ranging signals to be exchanged between the user device and the wearable device to determine a relative position of the wearable device with respect to the user device; determining, from at least the relative position and position of the user device, data that enables calibration of one or more sensors of the wearable device; and causing transmission of the data to the wearable device.Type: GrantFiled: March 17, 2022Date of Patent: December 12, 2023Assignee: Nokia Technologies OyInventors: Harry Cronin, Christopher Wright, Phil Catton
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Patent number: 11839434Abstract: Surgical instrument calibration methods, systems, and devices are provided that allow a virtual representation of a surgical instrument to be modified to adjust for any variations in a distal tip of a surgical instrument. For example, an instrument calibration system is provided that can have a surgical instrument, a calibration instrument, and a monitoring system. The surgical instrument can have a distal tip and an orientation element thereon, and the calibration instrument can have a pivot point thereon and a calibration reference element attached thereto. The monitoring system can be configured to record movement of the surgical instrument with respect to the calibration instrument when the tip of the surgical instrument is inserted into the pivot point of the calibration instrument, and to calculate a deviation of the tip of the surgical instrument from a predefined ideal tip based on the recorded movement.Type: GrantFiled: June 26, 2019Date of Patent: December 12, 2023Assignee: DePuy Synthes Products, Inc.Inventors: Steffen Schumann, Marc Puls
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Patent number: 11781849Abstract: An inspection master can perform three- and five-axis measurements wherein measurement in a rotation axis or/and turning axis direction for a five-axis processing machine is added. In one aspect, peripheral-surface spherical reference portions protrudes laterally on a peripheral surface of a master main body having a tubular shape, including the peripheral surface and an upper surface, and an upper reference ball for detection of an inclination angle of the body protrudes upward on the upper surface. The reference portions are provided at two or more portions of the peripheral surface in a circumferential direction thereof. In another aspect, an upper reference ball protrudes upward on the upper surface, and upper-surface spherical reference portions protrudes upward at one or more portions of the upper surface on an outer side with respect to the ball. In another aspect, both the peripheral-surface and upper-surface spherical reference portions are on the master main body.Type: GrantFiled: January 24, 2020Date of Patent: October 10, 2023Assignee: ASANUMA GIKEN CO., LTD.Inventor: Susumu Asanuma
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Patent number: 11774227Abstract: The inspection gauge is an inspection gauge for a coordinate measuring apparatus having a triangular pyramid shape, and includes a plurality of support members in which first ends are provided at positions corresponding to vertexes of the triangular pyramid and second ends are connected to each other in a region inside the triangular pyramid, and a plurality of spheres provided at positions corresponding to the vertexes of the triangular pyramid on the plurality of support members, and at least three support members of the plurality of support members have mutually different shapes.Type: GrantFiled: July 13, 2022Date of Patent: October 3, 2023Assignee: MITUTOYO CORPORATIONInventor: Shingo Kiyotani
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Patent number: 11766301Abstract: Techniques for controlling a moveable component include a system, a method, and/or a non-transitory computer-readable medium. A controller coupled to the moveable component is configured to hold the moveable component at a first position, detect a disturbance that moves the moveable component from the first position, in response to a detection of the disturbance, move the moveable component according to a first motion, continue to move the moveable component according to the first motion until a stop condition is detected, even if the disturbance ends before the stop condition is detected, and in response to a detection of the stop condition, hold the moveable component at a second position.Type: GrantFiled: April 21, 2021Date of Patent: September 26, 2023Assignee: INTUITIVE SURGICAL OPERATIONS, INC.Inventors: Nicola Diolaiti, Jeffrey D. Brown, Daniel H. Gomez, Robert E. Holop, Anthony K. McGrogan, Probal Mitra, Craig R. Ramstad
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Patent number: 11759954Abstract: A calibration object is placed at a target orientation in a station of an electronics processing device by a first robot arm, and then retrieved from the station by the first robot arm. The calibration object is transferred to an aligner station using the first robot arm, a second robot arm and/or a load lock, wherein the calibration object has a first orientation at the aligner station. The first orientation at the aligner station is determined. A characteristic error value is determined based on the first orientation. The aligner station is to use the characteristic error value for alignment of objects to be placed in the first station.Type: GrantFiled: April 28, 2020Date of Patent: September 19, 2023Assignee: Applied Materials, Inc.Inventors: Nicholas Michael Bergantz, Damon K. Cox, Alexander Berger
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Patent number: 11740072Abstract: The inner surface shape measurement device, which measures an inner surface shape of a small hole formed in a workpiece, includes: a rotating body for rotating the workpiece around a rotation axis, and a linear-and-tilting-motion stage; an elongated probe capable of being inserted into the small hole of the workpiece; a probe linear-and-tilting-motion mechanism capable of adjusting posture of the probe; a camera, configured to be rotatable integrally with the rotating body, for imaging the probe from at least three circumferential positions on a rotation trajectory centered on a rotation axis; and a controller for adjusting the posture of the probe using the probe linear-and-tilting-motion mechanism based on an image taken by the camera at each of the circumferential positions.Type: GrantFiled: September 7, 2022Date of Patent: August 29, 2023Assignee: TOKYO SEIMITSU CO., LTD.Inventors: Hideki Morii, Katsufumi Moriyama
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Patent number: 11708896Abstract: A shift range control device switches a shift range by controlling driving of a motor. A learning unit learns, as a position correction value, a normal state time correction value calculated based on first and/or second reference angles when an output shaft signal is available when turning on of a start switch. The first reference angle is a motor angle when the output shaft signal changes in response to the rotation of the motor in a first direction. The second reference angle is the motor angle when the output shaft signal changes in response to the motor rotation in a second direction opposite to the first direction. A motor angle target value is set by using the normal state time correction value stored during a period from when all the output shaft signals are determined to be unavailable to when the start switch is turned off.Type: GrantFiled: November 13, 2019Date of Patent: July 25, 2023Assignees: DENSO CORPORATION, HONDA MOTOR CO., LTD.Inventors: Shigeru Kamio, Masahiko Akiyama, Masashi Misawa, Kenshi Masuo
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Patent number: 11656074Abstract: A calibration method includes: measuring, with a CMM, a ball-to-ball distance of a plurality of edges of an inspection gauge installed in a first posture, a second posture and a third posture, and calculating a calibration value calibrating a ball-to-ball distance between two balls at respective ends of a plurality of edges of the inspection gauge by solving simultaneous equations including the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the first posture, the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the second posture, the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the third posture, and a measurement error of the CMM at the measurement position.Type: GrantFiled: March 14, 2022Date of Patent: May 23, 2023Assignee: MITUTOYO CORPORATIONInventors: Yuto Inoue, Masayuki Nara
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Patent number: 11643286Abstract: The operator may first place a blank device in a first socket in a first site. The APS may self-teach the position and orientation of that first socket by removing and replacing the device in the socket one or more times, and by detecting the position of the device in the socket or by monitoring a change in position of the device as it is placed into the socket. The APS then picks the device from the first socket (or from the input tray) and moves it in succession through the rest of the sockets to establish position and orientation of each socket. After all sockets are taught, the APS loads all sockets with blank devices, and programming begins. Alternatively, the programming job begins as each site is taught and before the remaining sites are taught so that production output can begin “immediately.Type: GrantFiled: November 12, 2019Date of Patent: May 9, 2023Assignee: BPM MICROSYSTEMSInventors: William H. White, Alain A. Mangiat, Josué E. Salazar Vanoye, Colin D. Harper
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Patent number: 11639234Abstract: A method for aligning a removable sensor on a vehicle includes connecting the removable sensor to a sensor mounting device. The method further includes connecting a connector of an alignment apparatus to either (i) the removable sensor such that a spatial reference component of the alignment apparatus has a known position and orientation relative to a current position and orientation of the removable sensor or (ii) a fixed connection location on the vehicle such that the spatial reference component indicates a desired position and orientation of the removable sensor. In addition the method includes adjusting the current position and orientation of the removable sensor by reference to the alignment apparatus to cause the current position and orientation of the removable sensor to match the desired position and orientation of the removable sensor.Type: GrantFiled: April 24, 2019Date of Patent: May 2, 2023Assignee: The Boeing CompanyInventors: Kevin S. Callahan, Nick S. Evans, Eric R. Muir
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Patent number: 11590818Abstract: A control device for a vehicle is provided. The vehicle comprises vehicle axles, a chassis, and at least two sensor modules. The control device comprises an energy supply unit. The control device is configured to supply energy to the at least two sensor modules via the energy supply unit. The at least two sensor modules are permanently connected to one of the vehicle axles of the vehicle. A vehicle is also provided. The vehicle comprises vehicle axles, a chassis, a sensor arrangement, and a control device comprising an energy supply unit. The sensor arrangement comprises at least two sensor modules which are permanently connected to the vehicle axle and each comprise a supply connection for providing energy into the respective sensor module.Type: GrantFiled: February 19, 2018Date of Patent: February 28, 2023Assignee: ZF CV Systems Hannover GmbHInventor: Jens Gröger
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Patent number: 11571810Abstract: The arithmetic device configured to perform a calculation for controlling a motion of a grasping apparatus that performs work involving a motion of sliding a grasped object includes: an acquisition unit configured to acquire a state variable indicating a state of the grasping apparatus during the work; a storage unit storing a learned neural network that has been learned by receiving a plurality of training data sets composed of a combination of the state variable acquired in advance and correct answer data corresponding to the state variable; an arithmetic unit configured to calculate a target value of each of various actuators related to the work of the grasping apparatus by inputting the state variable to the learned neural network read from the storage unit; and an output unit configured to output the target value of each of the various actuators to the grasping apparatus.Type: GrantFiled: May 15, 2020Date of Patent: February 7, 2023Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventor: Taro Takahashi
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Patent number: 11448559Abstract: A capacitance detection device includes a sensor unit including at least one sensor element whose capacitance changes, a control line applying to the sensor element a predetermined charging voltage for detecting the capacitance of the sensor element, a shield line electrically shielding the control line, a control circuit supplying the charging voltage to the sensor element via the control line, measuring a voltage change of the sensor element when the charging voltage is applied to the sensor element, and detecting the capacitance of the sensor element based on the voltage change, and an equipotential circuit setting a potential of the shield line equal to a potential of the control line.Type: GrantFiled: January 17, 2019Date of Patent: September 20, 2022Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Hironobu Ukitsu, Yuta Moriura, Hiroyuki Furuya, Takashi Matsumoto, Yui Sawada
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Patent number: 11435179Abstract: A device for calibrating the speed of a movement axis of a machine, including a measuring instrument and a measuring assembly having first and second measuring elements provided at a defined and known distance from one another on the measuring assembly. The measuring assembly is arranged on a workpiece receptacle of the machine, and the measuring instrument performs measurements with a known target frequency. When the device is arranged on the machine and the measuring instrument is moved at a known target speed of a movement axis of the machine from the first measuring element to the second measuring element, the measuring instrument interacts with the respective measuring element to determine an interaction date or a detection date. The device detects starting from the first interaction date or detection date to the second interaction date or detection date, a number of measurements of the measuring instrument.Type: GrantFiled: February 17, 2022Date of Patent: September 6, 2022Assignee: M&H Inprocess Messtechnik GmbHInventor: Christoph Wiest
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Patent number: 11396071Abstract: A method of manufacturing a shim and related systems and equipment. A mechanical tool inserted into a shim space defined between two or more components with the mechanical tool in a first configuration. The mechanical tool is free of measurement electronics. The mechanical tool, while in the shim space, is modified such that the mechanical tool assumes a second configuration to establish a plurality of model points corresponding to a boundary surface of the shim space. The mechanical tool is removed from the shim space while maintaining the mechanical tool in the second configuration. Using a measurement station distinct from the tool, the positions of the model points are electronically measured while the mechanical tool is both disposed outside of the shim space and in the second configuration. Machining instructions are generated based on the measured positions. A shim is fabricated based on the generated machining instructions.Type: GrantFiled: March 13, 2019Date of Patent: July 26, 2022Assignee: The Boeing CompanyInventors: Nathan Alphonse Secinaro, Douglas Alan Jones, Brent F. Craig
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Patent number: 11385141Abstract: A sampling device and associated methods for assessing operation of a medical washing device includes a base, a cover, a fluid path, a sensor, and a controller. The cover is selectively removably mounted to the base and includes an opening. The fluid path is in fluid communication with the opening, and has an outlet through which the fluid is discharged. The sensor is a sensor of an analytical characteristic, and is disposed in the fluid path. The controller is in communication with the sensors.Type: GrantFiled: March 30, 2020Date of Patent: July 12, 2022Assignee: Stryker CorporationInventors: Michael Edward Weslosky, Richard F. Huyser
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Patent number: 11366447Abstract: A spatial accuracy correction apparatus performs a spatial accuracy correction of a positioner displacing a displacer to a predetermined set of spatial coordinates using a measurable length value measured by an interferometer and a measurable value of the set of spatial coordinates of the displacement body that is measured by the positioner. The measured length value and the measured value for each measurement point are acquired by displacing the displacement body to a plurality of measurement points in order, one or more repeated measurements are conducted for at least one of the plurality of measurement points being measured after conducting measurement of the measured length value and the measured value for each of the plurality of measurement points, and the plurality of points are measured again when a repeat error of the measured length value is equal to or greater than a threshold value.Type: GrantFiled: December 13, 2018Date of Patent: June 21, 2022Assignee: MITUTOYO CORPORATIONInventors: Shinichiro Yanaka, Masayuki Nara
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Patent number: 11366448Abstract: A method that corrects an error in positioning in a positioning mechanism by using a measurable length value measured by a laser interferometer and a measured value for spatial coordinates measured by the positioning mechanism. The method includes a measurement step in which a retroreflector affixed to a displacer is displaced to a plurality of measurement points, and the measured length value and the measured value at each of the measurement points is acquired; and a parameter calculation step in which a correction parameter is calculated based on the measured value, the measured length value, and the coordinates of a rotation center of the tracking-type laser interferometer. A first correction constant is applied to the measured length value for each measurement line, and a second correction constant different from the first correction constant is applied to the coordinates of the rotation center of the interferometer for each measurement line.Type: GrantFiled: December 13, 2018Date of Patent: June 21, 2022Assignee: MITUTOYO CORPORATIONInventors: Shinichiro Yanaka, Masayuki Nara
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Patent number: 11364650Abstract: Tools for replacing knives in cutting machines. The tools include a clamping body having a base, bracket, clamp, and knife support tab(s). The bracket has a flange portion spaced apart from an upper surface of the base. The clamp is coupled to the base for translating in translation directions transverse to a longitudinal axis of the base. The clamp has a lift tab on the same side of the base as a rear surface thereof, and a handle is secured to the flange portion of the bracket and located on the same side of the base as the lift tab. The support tab projects from the front surface of the base, and the clamp is biased toward the support tab so that the clamp and support tab create a knife gripping mechanism for clamping an edge of a knife against the tab.Type: GrantFiled: July 22, 2021Date of Patent: June 21, 2022Assignee: Urschel Laboratories, Inc.Inventors: Dustin Joseph Gereg, Scott Alan Klockow
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Patent number: 11300880Abstract: A coating system includes supporting pins, a suction plane, and a calibrating disk. The suction plane is located between the supporting pins, and the calibrating disk is configured to dispose on the supporting pins or the suction plane. The calibrating disk includes a round top surface and a round bottom surface being opposite to the round top surface. The round bottom surface has a round plane and a dependable wall surrounding the round plane, and an edge of the round plane and an edge of the round bottom surface are concentric. The dependable wall is configured to limited horizontal movement of the supporting pins, and the round plane is configured to cover the suction plane. A calibration method of the coating system is also provided.Type: GrantFiled: December 9, 2019Date of Patent: April 12, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Sheng-Kai Chang
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Patent number: 11238189Abstract: A defect prediction method for a device manufacturing process involving processing a pattern onto a substrate, the method comprising: identifying a processing window limiting pattern (PWLP) from the pattern; determining a processing parameter under which the PWLP is processed; and determining or predicting, using the processing parameter, existence, probability of existence, a characteristic, or a combination thereof, of a defect produced from the PWLP with the device manufacturing process.Type: GrantFiled: June 4, 2018Date of Patent: February 1, 2022Assignee: ASML Netherlands B.V.Inventors: Stefan Hunsche, Venugopal Vellanki
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Patent number: 11199205Abstract: An object of the present invention is to provide a construction machine that allows easy and accurate calibration of a pressure sensor and enables accurate control of hydraulic actuators.Type: GrantFiled: January 10, 2019Date of Patent: December 14, 2021Assignee: HITACHI CONSTRUCTION MACHINERY CO., LTD.Inventors: Hidekazu Moriki, Takaaki Chiba, Shinya Imura
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Patent number: 11193800Abstract: An absolute position detection apparatus includes a calculator configured to generate, based on a detection signal, a first signal, and a second signal. A relative movement range of the scale and the sensor includes a boundary between adjacent detection units in the first signal such that at least one of the boundary is included in each of a plurality of areas in the relative movement range. The calculator is configured to specify a detection unit, to be used to calculate the absolute position, in the first signal based on a code of each detection unit of the second signal in an area that includes the boundary of the plurality of areas.Type: GrantFiled: August 9, 2019Date of Patent: December 7, 2021Assignee: CANON KABUSHIKI KAISHAInventor: Kazuhiro Noguchi
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Patent number: 11108961Abstract: In an electronic device for controlling the shaking of a lens part of a camera module and an operation method for the electronic device according to various embodiments, the electronic device includes: a housing; a first camera that is accommodated in the housing and includes a first lens part capable of refracting light, reflected from an external object, through one surface of the housing, and a first optical image stabilizer (OIS) capable of compensating for the shaking of the first lens part; a second camera that is accommodated in the housing and includes a second lens part capable of refracting light, reflected from the external object, through the one surface and a second optical image stabilizer capable of compensating for the shaking of the second lens part; and a control circuit, wherein the control circuit may be configured to: acquire an image of the external object by using the first camera and the second camera; acquire a first signal, corresponding to the shaking of the first lens part, and a sType: GrantFiled: June 25, 2018Date of Patent: August 31, 2021Assignee: Samsung Electronics Co., Ltd.Inventors: Junseok Shin, Sungmin Kim, Yeonhak Kim, Sewon Kim, Dongyoul Park, Kihuk Lee
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Patent number: 11065064Abstract: An apparatus, including a magnetic field generator, a first magnetic field sensor configured for attachment to a proximal end of a surgical tool configured for insertion into a body, and a calibration device that includes a second magnetic field sensor and a proximity sensor, wherein the field sensors generate respective location signals responsive to a magnetic field emanating from the generator and traversing the field sensors. The apparatus includes a control unit, which receives the signals from all the sensors, extracts respective location and orientation coordinates of the field sensors based on the signals, computes a conversion relation between the coordinates of the first sensor and a distal end of the tool that is brought into contact with the calibration device, and subsequently applies the conversion relation, together with the coordinates of the first sensor, in providing a visual indication of a location of the distal end inside the body.Type: GrantFiled: November 14, 2017Date of Patent: July 20, 2021Assignee: Biosense Webster (Israel) Ltd.Inventors: Yoav Pinsky, Akram Zoabi, Itamar Bustan, Michal Alroy Levy
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Patent number: 11051721Abstract: Disclosed are a system, a method, and a program for initializing an attachment location of a measurement sensor. The method of determining an initial attachment location of at least one measurement sensor includes at least: retrieving, by the terminal, identification information of the at least one measurement sensor selected from a user, as the terminal receives a selection input for the at least one measurement sensor attached to a particular location of a body of the user, from the user; and matching, by the terminal, the retrieved identification information with the particular location of the body where the at least one measurement sensor is configured to be attached such that the initial attachment location of the at least one measurement sensor is determined.Type: GrantFiled: April 25, 2019Date of Patent: July 6, 2021Assignee: NEOFECT Co., Ltd.Inventors: Hoyoung Ban, Younggeun Choi, Soobin Lee
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Patent number: 10935397Abstract: A position-measuring device includes a graduation carrier having a measuring graduation disposed thereon. At least one position sensor is configured to generate position-dependent measurement signals by scanning the measuring graduation. A processor is configured to process the position-dependent measurement signals into position signals. An interface is configured to transmit the position signals to subsequent electronics via at least one data channel. At least one motion sensor is configured to generate time-varying measurement signals. A signal analyzer is configured to analyze the measurement signals in the frequency domain dependent on parameters that are transmittable from the subsequent electronics to the interface unit, and to produce result data that is transmittable from the interface unit to the subsequent electronics.Type: GrantFiled: September 5, 2018Date of Patent: March 2, 2021Assignee: DR. JOHANNES HEIDENHAIN GMBHInventors: Ingo Joachimsthaler, Sebastian Lenz, Thomas Geisler, Johannes Soier
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Patent number: 10900917Abstract: A coefficient-of-thermal-expansion measuring device includes temperature control device, optical interferometer, and control device including: an actual data acquiring unit sequentially changing an object's temperature and acquiring actual data measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data by setting an order of interference of the actual data within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data at each temperature; and a judging unit deriving approximation functions with different orders from each data set, determining an evaluation index value based on differences of verification data from each approximation function, selecting a candidate data set with the smallest evaluation index value for each approximation function, and determining whether the candidate data set is the same for each approximation functionType: GrantFiled: July 20, 2018Date of Patent: January 26, 2021Assignee: MITUTOYO CORPORATIONInventors: Yuichiro Yokoyama, Takeshi Hagino
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Patent number: 10866262Abstract: A device for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes, comprising an outer base with side walls defining a base interior, and an xy-stage having side walls and mounting means for at least one measurement or manipulation element, the xy-stage being arranged inside of the base interior and being displaceable in an XY-plane relative to the outer base. The xy-stage is coupled to the outer base with bending elements, and with actuators designed for displacing the xy-stage relative to the outer base. The outer base is provided with at least one stiffening element rigidly connected to the side walls of the outer base, and/or that the xy-stage is provided with at least one stiffening element rigidly connected to the side walls of the xy-stage.Type: GrantFiled: June 7, 2018Date of Patent: December 15, 2020Assignee: GETEC MICROSCOPY GMBHInventors: Peter Ziger, Georg E. Fantner, Jeffrey M. Markakis
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Patent number: 10831108Abstract: Methods are provided for deriving a partially continuous dependency of metrology metric(s) on recipe parameter(s), analyzing the derived dependency, determining a metrology recipe according to the analysis, and conducting metrology measurement(s) according to the determined recipe. The dependency may be analyzed in form of a landscape such as a sensitivity landscape in which regions of low sensitivity and/or points or contours of low or zero inaccuracy are detected, analytically, numerically or experimentally, and used to configure parameters of measurement, hardware and targets to achieve high measurement accuracy. Process variation is analyzed in terms of its effects on the sensitivity landscape, and these effects are used to characterize the process variation further, to optimize the measurements and make the metrology both more robust to inaccuracy sources and more flexible with respect to different targets on the wafer and available measurement conditions.Type: GrantFiled: June 30, 2016Date of Patent: November 10, 2020Assignee: KLA CorporationInventors: Tal Marciano, Barak Bringoltz, Evgeni Gurevich, Ido Adam, Ze'ev Lindenfeld, Zeng Zhao, Yoel Feler, Daniel Kandel, Nadav Carmel, Amnon Manassen, Nuriel Amir, Oded Kaminsky, Tal Yaziv, Ofer Zaharan, Moshe Cooper, Roee Sulimarski, Tom Leviant, Noga Sella, Boris Efraty, Lilach Saltoun, Amir Handelman, Eltsafon Ashwal, Ohad Bachar
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Patent number: 10670383Abstract: A measuring arrangement is calibrated for determining rotational positions of a rotary device that has a first part and a second part which can be rotated relative to the first part about a rotational axis. Rotational positions of the first part relative to the second part and/or rotational positions of the second part relative to the first part are detected using a plurality of sensors distributed about the rotational axis. A respective measurement signal corresponding to each detected rotational position is generated such that redundant information on the rotational positions of the first part and the second part relative to each other is provided. The redundant information on the rotational position(s) are analyzed such that effects of a translational movement of the first and the second part relative to each other are corrected, the translational movement running transverse to the extension of the rotational axis.Type: GrantFiled: July 8, 2011Date of Patent: June 2, 2020Assignee: Carl Zeiss Industrielle Messtechnik GmbHInventors: Thomas Engel, Dominik Seitz, Rainer Sagemueller, Fabian Holzwarth
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Patent number: 10656533Abstract: An apparatus and method for estimating a parameter of a lithographic process and an apparatus and method for determining a relationship between a measure of quality of an estimate of a parameter of a lithographic process are provided. In the apparatus for estimating the parameter a processor is configured to determine a quality of the estimate of the parameter relating to the tested substrate based on a measure of feature asymmetry in the at least first features of the tested substrate and further based on a relationship determined for a plurality of corresponding at least first features of at least one further substrate representative of the tested substrate, the relationship being between a measure of quality of an estimate of the parameter relating to the at least one further substrate and a measure of feature asymmetry in the corresponding first features.Type: GrantFiled: August 21, 2018Date of Patent: May 19, 2020Assignee: ASML Netherlands B.V.Inventors: Simon Gijsbert Josephus Mathijssen, Martin Jacobus Johan Jak, Kaustuve Bhattacharyya
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Patent number: 10603512Abstract: Systems and methods for tracking a target volume, e.g., tumor, during radiation treatment are provided. Under one aspect, a system includes an ultrasound probe, an x-ray imager, a processor, and a computer-readable medium that stores a 3D image of the tumor in a first reference frame and instructions to cause the processor to: instruct the x-ray imager and ultrasound probe to substantially simultaneously obtain inherently registered x-ray and set-up ultrasound images of the tumor in a second reference frame; establish a transformation between the first and second reference frames by registering the 3D image and the x-ray image; instruct the ultrasound probe to obtain an intrafraction ultrasound image of the tumor; registering the intrafraction ultrasound image with the set-up ultrasound image; and track target volume motion based on the registered intrafraction ultrasound image.Type: GrantFiled: July 13, 2015Date of Patent: March 31, 2020Assignee: ACCURAY INCORPORATEDInventors: Calvin R. Maurer, Jay West, Petr Jordan
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Patent number: 10537997Abstract: Embodiments described herein generally relate to an apparatus and method of performing a robot calibration process within a substrate processing system. In one embodiment, a calibration device is used to calibrate a robot having an end effector. The calibration device includes a body, a first side and a second side opposite to the first side. The calibration device further includes a sensor disposed on the second side of the body. In some embodiments, the sensor covers the entire second side of the body. In this configuration, because the sensor covers the entire second side of the body of the calibration device, the calibration device can be utilized to sense the contact between the sensor and various differently configured chamber components found in different types of processing chambers or stations disposed within a processing system during a calibration process performed in each of the different processing chambers or stations.Type: GrantFiled: May 10, 2017Date of Patent: January 21, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Narayanan Ramachandran, Karthik Narayanan Balakrishnan, Rajkumar Thanu, Jeffrey Hudgens
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Patent number: 10539004Abstract: Disclosed embodiments include well ranging apparatus, systems, and methods which operate to receive normal and tangential components of electromagnetic field strength measurements within a first well as a set of field strength components from at least one sensor, wherein the at least one sensor is used to take multiple azimuthal field strength measurements at a single depth. Further activities include determining an approximate range from the at least one sensor to a second well that serves as a source of an electromagnetic field, via direct transmission or backscatter transmission, when a ranging direction associated with a housing upon which the at least one sensor is mounted is unknown. Additional apparatus, systems, and methods are disclosed.Type: GrantFiled: August 4, 2015Date of Patent: January 21, 2020Assignee: HALLIBURTON ENERGY SERVICES, INC.Inventors: Hsu-Hsiang Wu, Akram Ahmadi Kalateh Ahmad
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Patent number: 10508530Abstract: Systems, devices, and methods for visualizing and steering a drilling apparatus are provided, including a drill string with a bottom hole assembly (BHA), a sensor system, and a controller operable to generate a visualization comprising an original drill plan and an adjusted ideal drilling path. The adjusted ideal drilling path may represent an ideal drilling route based on updated drilling data received by the controller such as determined parameters of geological formations. The differences between the location of the BHA and the adjusted ideal drilling path may also be visualized. This visualization may be used by an operator or the controller to steer the BHA.Type: GrantFiled: September 11, 2017Date of Patent: December 17, 2019Assignee: Nabors Drilling Technologies USA, Inc.Inventor: Colin Gillan
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Patent number: 10504269Abstract: Inertial damping is used to improve the simulation of deformable bodies for physics-based animation. Using this technique, undesirable dynamics of deformable bodies can be suppressed or completely removed while retaining other, more desirable dynamics. An inertial damping module selectively applies inertial damping to a subset of the dynamic modes of a simulated system (e.g., by using the quasi-static solution for these modes or reducing their magnitude). Thus, when the dynamics are simulated, the interactions between modes can be retained while the undesirable effects of the damped modes are reduced or eliminated. The results of the simulation are used to drive a physics-based animation.Type: GrantFiled: January 18, 2019Date of Patent: December 10, 2019Assignee: Ziva Dynamics Inc.Inventors: Essex A. Edwards, Jernej Barbic