Abstract: A humidity sensor system and method include a ceramic substrate upon which a heater can be printed. A humidity sensor can be mounted above and in contact with the heater, or the heater can be mounted one side of the substrate and the humidity sensor on the opposite side of the substrate, such that the heater heats the humidity sensor, raising its temperature above the dew point of the ambient air such that moisture does not condense on the humidity sensor, thereby preventing the humidity sensor performance from being affected. The heater can be configured as a resistive heater, and the humidity sensor can be configured from one or more humidity-sensing die. A thin film platinum RTD (Resistance Temperature Detector) component can be printed upon the substrate in association with the humidity sensor.

Abstract: A humidity sensor having temperature sensing includes a substrate and a RLC (damped resonant) circuit formed in or on the substrate. The RLC circuit comprises a capacitor having a first and a second electrically conductive plate and a moisture sensitive dielectric interposed between the first and second plate. An RL network comprising an inductor and a resistor is coupled to the capacitor and comprises a high relative temperature coefficient of resistance (TCR) portion formed from a first material which is coupled to a low relative TCR portion formed from a second material different from the first material. The RLC circuit can be a series RLC circuit. In another embodiment, the RLC circuit can comprises a parallel RLC circuit.

Abstract: A method and equipment for measuring vapour flux from a surface (10) e.g. the rate of water loss from human skin, which is useful in the evaluation of the efficiency of the skin/water barrier. It uses a closed cylinder (12), which is placed against the skin and by measuring the temperature and relative humidity within the cylinder by means of sensors (13, 14) positioned adjacent the wall of the cylinder, the water vapour flux can be determined.

Abstract: An integrated mechanical combi sensor apparatus and method for measuring humidity, pressure and temperature. A pressure sensor and an ASIC can be mounted in a first compartment, and a temperature sensor mounted in a second compartment of a housing. Similarly, a humidity sensor can be mounted in a third compartment such that the pressure sensor, temperature sensor, and humidity sensor are isolated from each other. The sensor element associated with the sensors and the ASIC can be connected to a lead frame terminal by wire bonding for electrical connection. A pressure cover and a humidity cover can be utilized for covering the pressure sensor and the humidity sensor. The humidity sensor can include a hydrophobic filter for preventing moisture-saturated air from reaching the sensing element in order to provide accurate sensor measurements thereof.

Abstract: Provided is a humidity sensor whose electrode is set to have an island-like configuration and is enclosed by a humidity sensitive film. As a result, in the humidity sensor, adhesion property between the humidity sensitive films on the electrode is enhanced and thus high reliability is achieved.

Abstract: A gas sensor includes a gas responsive pellistor and associated information specific to that pellistor. The information can include environmental compensation information, such as temperature or humidity compensation information or other manufacturing information, and is stored in a computer readable medium. Such information can be used by local circuitry in compensating the sensor while making ambient gas level determinations.

Abstract: An apparatus (10) for sensing a condition, such as humidity, through an opening (20) in a surface (12) such as a duct or wall. A housing (14) includes an outer section (16) mounted on the surface and a probe section (18) extending into the duct or wall. A circuit board assembly (32) is mounted within the housing and includes a user interface section (34) within the housing outer section and a sensor section (36) rigidly connected to the user interface section and extending into the housing probe section. The sensor section may be integrated into the circuit board assembly by a rigid connector (42) allowing easy removal and field replacement of the sensor section. A sealing device (56) isolates the housing outer section from the air within the duct or wall. A flexible grounding connection (66) provides electrical grounding of the circuit board assembly and a degree of mechanical support.

Abstract: A microelectro-mechanical chemical sensor includes an active cantilever beam having a chemically selective material layer disposed thereon and at least one, preferably two, resistors with the resistance corresponding to the cantilever beam deflection. The sensor also has at least two, and preferably four, auxiliary cantilever beams adjacent to the active cantilever and attached to the same substrate, each having a piezoresistor disposed thereon. The piezoresistors are elements of a Wheatstone bridge, and the Wheatstone bridge output indicates the amount of a predetermined target chemical sorbed by the chemically selective material layer. The sensor is electrostatically actuated in order to monitor the resonant frequency.

Abstract: A sensor unit (1) comprises at least one sensor (3) that is arranged on a circuit board (2) and a cover (4) for the sensor (3). The cover (4) is open toward the circuit board (2) and adjoins the circuit board (2) in the installed state. The underside (14) of the circuit board simultaneously forms part of the seal. The at least one sensor (3) is completely climate-encapsulated.

Abstract: The present invention relates to a measuring device for measuring the humidity of materials, in particular the humidity of textiles. The measuring device according to the invention comprises an evaluation circuit EC having electrical terminals (8, 9), an oscillatory circuit (5) and a primary electrical circuit (1) contactlessly coupled to a secondary electrical circuit (2). Each of said primary and secondary circuit (1, 2) comprises a ferromagnetic element (3, 6) and a coil (4, 7) wrapped around it. Switching means (10) are provided for short-circuiting the coil in the secondary circuit (2) in response to the electrical resistance of an electric load connected the electrical terminals (8, 9) and output means (11) for outputting signals in response to the short-circuiting of the switching means (10) are also provided. A laundry drying machine comprising a measuring device is also disclosed.

Abstract: One embodiment of the invention comprises a moisture vapor probe comprising a hollow sleeve and a removable electronics module. The probe has a generally cylindrical hollow sleeve having a sidewall with an inner surface and an outer surface. The sleeve comprises a sensor plate having a moisture vapor sensor and forming a water impermeable barrier with the sidewall. The sleeve has an opening such that a volume is defined by the opening, the sidewall and the sensor plate. The probe further comprises an electronics module removably disposable within the sleeve. The electronics module includes an information transfer unit. The information transfer unit in communication with the moisture vapor sensor and adapted to receive relative humidity information from the moisture vapor sensor.

Abstract: The aim of the invention is to provide a simple and reliable method of measuring the quality of a fluid (2), in particular an oil or fat. This is achieved by a dielectric measurement in conjunction with a temperature measurement, which are carried out in situ by means of a measuring assembly and a sensor assembly (1) used with the latter, whereby the sensor assembly is submerged in the fluid. This permits information concerning the condition of the fluid, in particular concerning the age of the frying oil or fat, to be obtained in a rapid, low-cost manner.

Abstract: The present invention provides a sensor for humidity which is optimized as moisture sensitive material in basic properties such as long term stability and the like at the range of high temperature. The sensor for moisture according to the present invention is provided with a moisture sensitive film formed with polymer in which a hydrophilic group binds through at least one hydrophobic group to other hydrophilic groups. Basic properties of the sensor such as long term stability and the like is optimized by forming a moisture sensitive element provided with a moisture sensitive film formed with polymer in which the glass transition temperature is in the range of 240° C. to 500° C.

Abstract: A pair of identical humidity sensors (S1) and (S2) are in the same environment, so that they identically react to humidity effects; a sensing circuit includes an operational amplifier (10), its input (15) receiving from the first sensor (Si) a signal changing with humidity according to a logarithmic law, while the second sensor (S2), inserted in the amplifier feedback, reacts to humidity changes in the same way as the first sensor (Si) and consistently modifies the gain. The output signal (V0) is compensated, and has a substantially linear progression with humidity.

Abstract: A humidity sensor includes: a substrate; a pair of electrodes on the substrate; a humidity sensitive member between the electrodes having a capacitance changeable in accordance with humidity; an output element connecting to the electrodes in order to detect a capacitance of the humidity sensitive member and outputting a signal corresponding to the capacitance; and a setting member for setting a maximum amount of moisture in the humidity sensitive member to be a standard maximum amount of moisture. The humidity sensitive member is capable of absorbing a moisture up to the maximum amount of moisture. The setting member includes at least one of an element for reducing the maximum amount of moisture and an element for increasing the maximum amount of moisture.

Abstract: A chemical sensor has a substrate, a first metallization plane on the substrate, an electrode structure formed in the first metallization plane, a passivation layer applied to the first metallization plane and formed with contact holes, a sensitive ceramic layer on the passivation layer and in the contact holes, and a bond-promoting layer configured as a second metallization plane and between the passivation layer and the ceramic layer.

Abstract: A capacitive humidity sensor includes: a humidity sensing element with a humidity sensitive film and electrodes; and a processing circuit. The film has a dielectric constant variable in accordance with moisture. The electrodes detect capacitance of the film and outputs a signal corresponding to the capacitance. The processing circuit processes the signal. The film is made of inorganic material having fine pores for adsorbing the moisture. A diameter of the fine pores is set to be a predetermined diameter so that capillary tube aggregation phenomenon occurs at a predetermined relative humidity. The capacitance of the film has a change rate with respect to the relative humidity. The change rate in case of the relative humidity higher than the predetermined relative humidity is larger than that in case of the relative humidity lower than the predetermined relative humidity.

Abstract: A process and a device are provided for regulating a respiration humidifier by the temperature measured in the breathing gas. The output of the heating or dispensing unit (15), which releases its moisture into a mixing chamber (11), to which breathing gas flowing in is admitted, is set as a function of the dew coating measured downstream of the mixing chamber (11) such that an electrical resistance or a capacitance measured in the breathing gas downstream of the mixing chamber (11) between at least two measuring points (4, 5) as an indicator of dew coating is in a preset range of desired values with a maximum and a minimum.

Abstract: The invention provides a humidity-sensitive element using, as a humidity-sensitive film, a polyimide having a molecular structure capable of forming a network structure at a high density, exhibiting less drift after being left standing at a high temperature and a high humidity and having excellent characteristics. A humidity-sensitive element according to the invention uses the polyimide obtained by dehydrating and ring closing a polyamide acid forming a network structure in which terminals of basic molecular chains are interconnected with one another, as a humidity-sensitive film. The humidity-sensitive element of the invention suitably uses a polyimide, in which terminals of basic molecular chains are interconnected with one another by use of triamine or a tricarboxylic acid, as a humidity sensitive film.

Abstract: A humidity sensing apparatus and method include a substrate and a MEMS structure, wherein the MEMS structure is supported by the substrate. The MEMS structure comprises a humidity-sensitive material in association with a movable member such that when the humidity-sensitive material changes with humidity, the MEMS structure moves the movable member, thereby providing an indication of humidity based on a stress within the MEMS structure.

Abstract: A method for correcting humidity measurement results of a radiosonde, especially for errors resulting from radiative heat exchange. Environmental humidity Um is measured with a humidity sensor in the radiosonde, a current value of at least one environmental condition parameter is determined, and error-corrected humidity U is calculated directly or indirectly utilizing the measured environmental humidity Um and a correction value corresponding to the at least one current environmental condition parameter value.

Abstract: A capacitive humidity sensor includes a printed circuit board having an insulating substrate on which a circuit section is formed, a pair of electrodes formed on a surface of the insulating substrate to be opposite from each other with a space, and a humidity sensitive layer formed on the insulating substrate to cover the electrodes and the surface of the insulating substrate between the pair of electrodes. The relative permittivity of the humidity sensitive layer changes in response to humidity, and the circuit section performs a signal processing of a capacitance change between the electrodes. Furthermore, the electrodes and the circuit section are electrically connected through a wiring section formed in the insulating substrate.

Abstract: A humidity sensor capable of self-regulating temperature compensation and a manufacturing method thereof overcomes the inaccuracy caused by the resistor value of a conventional humidity-sensitive element changing depending due to changes in the temperature. The present invention proposes disposing two different humidity-sensitive elements in a humidity-sensitive substrate, wherein one humidity-sensitive element includes a saturated salt solution. The humidity-sensitive substrate has two different humidity-sensitive elements for achieving a self-regulating temperature compensation feature. The present invention of the humidity-sensitive element having the saturated salt solution can maintain the amount of humidity in the air regardless of the temperature.

Abstract: A humidity sensor element, a humidity sensor device and a method for manufacturing thereof are provided. The humidity sensor element includes a substrate having a nanocomposite film as sensing material, wherein said nanocomposite film consists of carbon nanotube/perfluorinated polymer with acid functional groups in weight ratio of 0.01-20; and at least a pair of electrodes, which contact with the sensing material at one or both side(s). The nanocomposite film increases the sensitivity of humidity sensor element such that even an infinitesimal amount of moisture can be detected with minimum detection limit of 15.76 ppmv.

Abstract: A capacitive humidity sensor for detecting a humidity change includes a first sensor element having a first capacitance, a second sensor element having a second capacitance and connected in series with the first sensor element, and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The first and the second capacitances change with respect to the humidity change at a different rate. The humidity is detected using the different capacitances of the first and the second sensor elements. The humidity sensitive layer is formed to each sensor element so that each sensor element can be effectively protected.

Abstract: A sensor means is proposed to determine an interior humidity and/or an interior volume delimited by a wall, in particular, of a vehicle passenger compartment 3, and a fogging up tendency of an inner surface of the wall, in particular, of a window 5 of the vehicle passenger compartment 3, with a dew point sensor 10 having a humidity sensor element 1 and a temperature sensor 2, wherein the humidity sensor element 1 and the temperature sensor 2 a thermally coupled, and a surface temperature sensor 4, wherein the dew point sensor 10 is designed to measure the air humidity and the room temperature of the interior volume and the surface temperature sensor 4 is designed to measure the temperature of the inner surface.

Abstract: A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.

Abstract: A humidity meter with non-contact temperature measurement capability, including a humidity meter contained at least partially in a housing and having outputs relating to measured humidity parameters including humidity and ambient temperature, an output display contained in the housing, for displaying measurements to a user, a non-contact optically-based temperature sensing device coupled to the housing, having an output related to sensed temperature, and circuitry contained in the housing for processing both the humidity meter outputs and the temperature sensing device output, and transmitting the processed output to the output display.

Abstract: An acoustic wave sensor apparatus is disclosed, which generally includes a piezoelectric substrate having a surface thereon. One or more interdigital transducers and a passivation layer can be formed upon the piezoelectric substrate. Additionally, an absorbent material can be formed upon the acoustic path (IDTs, electrodes, etc), such that the interdigital transducers respond to a plurality of acoustic waves propagating across the surface of the piezoelectric substrate, thereby providing data indicative of humidity in the vicinity of the piezoelectric substrate, along with the passivation layer and the interdigital transducers. Additionally, one or more heaters can be formed upon a side of the piezoelectric substrate opposite the side of the piezoelectric substrate upon which the interdigital transducers, the passivation and the absorbent material are located. The heater can be preferably configured from a material such as platinum.

Abstract: A method and a device for measuring humidity may be suitable for determining the relative humidity in the high-humidity range. The device includes a sensor device, as well as a circuit connected to the same. The sensor device includes a capacitive humidity-sensor element, a temperature-sensor element, and a heating element, the humidity-sensor element being heated in at least one part of the humidity-measuring range. The ambient temperature is further ascertained by the circuit, from the heating power required in the heating mode, as well as from the measured, local sensor device temperature, in order to further determine the relative humidity.

Abstract: A method and apparatus for measuring relative humidity of a mixture that provides a quick response time for thermal lag while affording protection to fragile sensors. In one aspect, the invention is an apparatus comprising: a chamber having a membrane covering an opening in the chamber, the membrane being permeable to water vapor while impermeable to liquid water; a humidity sensor for measuring relative humidity of the mixture within the chamber; a first temperature sensor for measuring a temperature relating to the mixture within the chamber; a second temperature sensor for measuring temperature of the mixture at a point exterior to the chamber; and a processor for receiving signals representing the measurements taken by the humidity sensor, the first temperature sensor, and the second temperature sensor and programmed to calculate relative humidity of the mixture at the point exterior to the chamber as a function thereof.

Abstract: A capacitive humidity sensor includes a detection portion and a reference portion. The detection portion includes detection electrodes and a moisture sensitive film. The reference portion includes reference electrodes and a moisture permeation film as a capacitance adjusting film. The capacitive humidity sensor detects humidity by converting a capacitance difference between a capacitance of the detection electrodes and a capacitance of the reference electrodes to an electric signal by using a capacitance-voltage conversion circuit. The moisture permeation film reduces offset voltage of the capacitive humidity sensor. Thus, an offset compensation circuit or the like is not required.

Abstract: A measuring device for measuring the moisture in gases comprises the following features: a moisture sensor and an evaluation unit connected thereto to provide a measured quantity representing a relative moisture in a gas, and a heating device which is thermally coupled to the moisture sensor. Said heating device is adapted to keep the moisture sensor at an operating temperature that is higher than the ambient temperature of the moisture sensor by an at least approximately constant difference in temperature.

Abstract: A dew point hygrometer for determining the dew point of a gas in which a displaceable transparent film is in contact with the gas and forms a condensation surface. The film is placed on a temperature control device controlling its temperature and an optic fiber, emits light on the film and reflected light is detected in another optic fiber, the two optical fibers being positioned at an angle with respect to the film. Condensation formed on the film changes the light transmitted by the film which is periodically displaced so that a new uncontaminated regions are exposed to the light.

Abstract: A method and apparatus are described for sensing the absolute humidity of gases where the relative humidity of gases are measured, the humidity transducer is heated, the resulting temperature measured and the absolute humidity calculated (based on the power to heat said transducer, the temperature of said transducer and the relative humidity). In further embodiments the humidity transducer may be heated to a pasteurisation temperature, to substantially kill any common pathogens present on the humidity transducer. The flow rate may be determined to estimate a more instantaneous valve of humidity. The operation of the sensor may be continually monitored for correct operation and various constructions disclosed for improving the efficiency of operation.

Abstract: A humidity sensor including an insulating substrate, and a lower electrode formed from a noble metal, a moisture sensitive layer formed of a porous body predominantly containing alumina and containing predetermined amounts of TiO2 and SnO2 and an upper electrode formed of a noble metal porous body successively formed on the insulating substrate. The upper electrode is connected to the moisture sensitive layer and a portion of the insulating substrate. Preferably, the lower electrode is formed of a porous body. More preferably, the lower and upper electrodes are formed from Pt. Furthermore, preferably, a heater and a temperature measurement resistor are provided in the insulating substrate and are located directly below the moisture sensitive layer.

Abstract: A humidity sensor and fabrication method thereof. In the humidity sensor of the present invention, two comb-type electrodes with a plurality of teeth are disposed on a semiconductor substrate. A SiO2 sensing film is disposed between the teeth of the two comb-type electrodes on the substrate. A predetermined voltage is applied between the two comb-type electrodes, a leakage current between the two electrodes is detected, and the humidity in the environment is measured according thereto.

Abstract: A humidity sensor and fabrication method thereof. In the humidity sensor of the present invention, two comb-type electrodes with a plurality of teeth are disposed on a semiconductor substrate. A SiO2 sensing film is disposed between the teeth of the two comb-type electrodes on the substrate. A predetermined voltage is applied between the two comb-type electrodes, a leakage current between the two electrodes is detected, and the humidity in the environment is measured according thereto.

Abstract: A humidity sensor has two detection electrodes located on a semiconductor substrate and a humidity sensitive film. The capacitance of the film changes in response to humidity. The sensor includes a reference capacitor and a feedback capacitor. An electrode of each capacitor is located beneath one of the detection electrodes to limit the size of the device.

Abstract: In a humidity sensor device comprising a pair of opposed electrodes disposed on an insulating substrate to define a gap therebetween and a humidity sensitive thin film lying on the gap, the humidity sensitive thin film is a thin film comprising a polymer or copolymer obtained from a monomer of formula (1), and formation of the humidity sensitive thin film is optionally combined with treatment of the insulating substrate by physical means. A humidity sensor device for detecting and determining moisture in the surrounding atmosphere which has improved water resistance, solvent resistance, and gas resistance, and exhibits stable output performance in a wide humidity region without hysteresis is provided as well as a method for preparing the same.

Abstract: A resonant microwave sensor (1) for determining properties of a material (3), that is to be examined, by means of the high-frequency measurement of a reflection factor (r) of a high-frequency resonance signal as measured variable for determining properties of a material to be examined, having

Abstract: A humidity sensor includes a pair of interdigital electrodes disposed on an insulating substrate and defining a gap therebetween, an undercoat layer of silane compound lying on the gap-defining electrodes and substrate, and a humidity sensitive thin film lying thereon. The humidity sensitive thin film is formed of a crosslinked product of a conductive polymer having ethylenically unsaturated groups, and physically bound to the undercoat layer through an interpenetrating polymer network. The sensor is fully resistant to water so that it ensures stable operation over a long time even in a dew condensing atmosphere. The sensor is free of hysteresis and able to measure humidity over a very wide range.

Abstract: A compact and inexpensive sensor sensitivity adjusting apparatus. The sensor sensitivity adjusting apparatus includes a sensor, a current supplying IC and a variable resistor. The current supplying IC has first and second fixed resistors connected in series between two terminals of a power supply, and an operational amplifier. The sensitivity of the sensor changes in accordance with the value of a drive current. The drive current is adjusted by changing the resistance of the variable resistor.

Abstract: A humidity sensor comprising an insulating substrate, a detection electrodes and a moisture-sensitive layer, wherein the moisture-sensitive layer is a porous layer and has a thickness not greater than 200 &mgr;m.

Abstract: A hydrophilic polymer material such as polyvinyl alcohol is formed into a porous film (301). A film (holding film) (303) made from a hydrophobic polymer material such as polyvinyl acetate is formed on the inner walls of a large number of pores (302) formed in the porous film (301). Lithium chloride (304) is held in these pores (302).

Abstract: A humidity sensor including an insulating substrate, and a lower electrode formed from a noble metal, a moisture sensitive layer formed of a porous body predominantly containing alumina and containing predetermined amounts of TiO2 and SnO2 and an upper electrode formed of a noble metal porous body successively formed on the insulating substrate. The upper electrode is connected to the moisture sensitive layer and a portion of the insulating substrate. Preferably, the lower electrode is formed of a porous body. More preferably, the lower and upper electrodes are formed from Pt. Furthermore, preferably, a heater and a temperature measurement resistor are provided in the insulating substrate and are located directly below the moisture sensitive layer.

Abstract: A moisture sensor includes a moisture-sensitive film between a pair of electrodes having conductive particles dispersed in a hygroscopic polymer. The hygroscopic polymer is a polymer comprising a polyether amine, an epoxy compound, and optionally a water-soluble nylon. Alternatively, the hygroscopic polymer is a polyether ester amide and optionally a water-soluble nylon. The sensor enables DC measurement, can detect a humidity in the range of RH 60% to 100%, and ensures high performance stability against repetitive operations.

Abstract: A device for detecting chemical substances includes a plurality of sensors arranged in an array. The sensors are connected to respective oscillator circuits which drive the sensors, and the oscillator circuits are coupled to a power multiplexer which provides the circuits with power according to a timing pattern such that not all of the oscillator circuits are activated at any one time. Preferably, only one oscillator circuit is activated at any given time. This multiplexing arrangement saves power and substantially eliminates cross talk between the oscillator circuits. The oscillator circuits are preferably application specific integrated circuits (ASICs), and the sensors are preferably surface acoustic wave (SAW) devices. In use, the SAW sensors are exposed to a gas, such as air, containing the chemical substance to be detected. Signals from the SAW sensors are analyzed to identify the chemical substance.

Abstract: A humidity sensor includes a pair of interdigital electrodes disposed on an insulating substrate and defining a gap therebetween, an undercoat layer of silane compound lying on the gap-defining electrodes and substrate, and a humidity sensitive thin film lying thereon. The humidity sensitive thin film is formed of a crosslinked product of a conductive polymer having ethylenically unsaturated groups, and physically bound to the undercoat layer through an interpenetrating polymer network. The sensor is fully resistant to water so that it ensures stable operation over a long time even in a dew condensing atmosphere. The sensor is free of hysteresis and able to measure humidity over a very wide range.

Abstract: A device for detecting snow and ice which has a humidity sensor and an ambient temperature sensor. An evaluator switch is controlled according to a humidity sensor-measured variable, producing a control signal at set humidity values for defrosting a surface which is being monitored for snow and ice. The ambient temperature sensor activates the humidity sensor within a temperature range of between +2° C. and −12° C. The humidity sensor itself has a PTC (positive temperature coefficient) heating element. The current consumption of the heating element is used as a measure of humidity. Both the ambient temperature sensor and the humidity sensor are positioned at a mutual distance in a longitudinally extended sensor cartridge made of plastic. The temperature sensor is thermally decoupled from the PTC heating element. The PTC heating element is built into a metal sleeve in such a way that it is corrosion and humidity proof.