Tuning Fork Patents (Class 73/504.16)
  • Patent number: 10451505
    Abstract: A flexible sensor that includes a printed circuit board (PCB), a capacitive structure on the PCB, and mechanical coupling sites. The PCB includes a slot extending from an outer edge of the PCB to an inner portion of the PCB, and the slot defines a first edge and a second edge facing the first edge. The first and second edges are separated by a gap when the PCB is in an unflexed state. The slot is configured to permit the PCB to flex so as to vary a relative position of the first edge with respect to the second edge. The capacitive structure on the PCB includes a first edge electrode on a portion of the first edge of the PCB, and a second edge electrode on a portion of a second edge of PCB. The second edge electrode is aligned with the first edge electrode across the slot.
    Type: Grant
    Filed: January 9, 2019
    Date of Patent: October 22, 2019
    Assignee: X Development LLC
    Inventor: Alexander Shai Shafer
  • Patent number: 10443384
    Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.
    Type: Grant
    Filed: September 30, 2016
    Date of Patent: October 15, 2019
    Inventor: Lee Ervin
  • Patent number: 10365105
    Abstract: An improved sensing device comprising micromechanical gyroscope and a feed-back loop with a controller for creating a damp control signal. A frequency generator generates a drive signal for drive mode vibration and a reference signal that is in quadrature-phase in relation to the drive mode vibration. The quadrature reference signal is summed with the damp control signal of the controller. The resulting transducer control signal is fed to the second mechanical resonator. Stable cancellation of the actual mechanical quadrature motion is achieved already at the sensing element level, before the detection of the Coriolis signal.
    Type: Grant
    Filed: June 26, 2013
    Date of Patent: July 30, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Lasse Aaltonen
  • Patent number: 10305426
    Abstract: A method for manufacturing a resonator element includes: an outer shape forming step of etching a substrate to form, in a plan view, a base portion, a pair of vibrating arms extending from the base portion in a first direction, a frame portion surrounding the base portion and the vibrating arms, and a coupling portion coupling the base portion with the frame portion; and a singulation step of cutting the coupling portion to singulate the resonator element. In the outer shape forming step, the coupling portion is formed so as to extend, in the plan view, from only one edge side of the base portion in a direction along a second direction orthogonal to the first direction and be connected with the frame portion.
    Type: Grant
    Filed: February 3, 2016
    Date of Patent: May 28, 2019
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Akinori Yamada
  • Patent number: 10190938
    Abstract: A microelectromechanical device includes a semi-flexible proof-mass comprising a primary part, a secondary part and a stiff spring suspending the primary part and the secondary part. The spring causes the parts to move as a single entity when the device is in its normal range. A first stopper structure stops the primary part. The proof-mass is configured to deform through deflection of the spring, when the device is subjected to a shock having a force that is beyond the normal operation range. While the shock causes motion of the proof-mass in one direction along an axis of movement, the spring is configured to cause a restoring force causing the secondary part of the proof-mass to be driven into a restoring motion in a direction opposite to motion along an axis caused by the shock. Momentum of the secondary part causes the primary part to dislodge from the first stopper structure.
    Type: Grant
    Filed: September 12, 2016
    Date of Patent: January 29, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Anssi Blomqvist, Ville-Pekka Rytkönen, Matii Liukku
  • Patent number: 10145685
    Abstract: An angular velocity sensor element includes a fixing part, an extension part, a twisted extension part, a drive vibrator, a detection vibrator, and a counter beam. The extension part has a first end coupled to the fixing part, and a second end. The twisted extension part has a first end coupled to the second end of the extension part, and a second end. The drive vibrator has a first end coupled to the second end of the twisted extension part, and a second end. The drive vibrator is provided with a drive electrode. The detection vibrator is coupled to the second end of the drive vibrator, and is provided with a first detection electrode. The counter beam is coupled to the second end of the twisted extension part, disposed substantially parallel to the drive vibrator, and configured to vibrate in a direction opposite to a vibration direction of the drive vibrator.
    Type: Grant
    Filed: April 14, 2016
    Date of Patent: December 4, 2018
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventor: Kensaku Yamamoto
  • Patent number: 10060744
    Abstract: When one direction of plane directions of a substrate is a first direction and a direction of the plane directions of the substrate perpendicular to the first direction is a second direction, a vibrating member is supported at an outer peripheral section via a plurality of beam sections having first beam-configuring members that can displace at least in the first direction and second beam-configuring members that are joined to the first beam-configuring members and that can displace at least in the second direction. In at least a subset of the plurality of beam sections, beam-configuring members on a side of the outer peripheral section among the first beam-configuring members and the second beam-configuring members are integrated with each other.
    Type: Grant
    Filed: June 11, 2015
    Date of Patent: August 28, 2018
    Assignee: DENSO CORPORATION
    Inventors: Minekazu Sakai, Tomoya Jomori
  • Patent number: 9964562
    Abstract: A capacitance type physical quantity sensor including a movable electrode formed in a weight part, and a fixed electrode facing the movable electrode is provided. A first movable sensing electrode and a first fixed sensing electrode face each other in a first y direction. A second movable sensing electrode and a second fixed sensing electrode face each other in a second y direction. A first movable damping electrode is located in the middle between two first fixed damping electrodes, faces one of the first fixed damping electrodes in the first y direction and faces the other of the first fixed damping electrodes in the second y direction. A plurality of the first movable damping electrodes are located point-symmetrically with respect to the center of the weight part or line-symmetrically with respect to a center line passing the center in the y direction.
    Type: Grant
    Filed: June 6, 2013
    Date of Patent: May 8, 2018
    Assignee: DENSO CORPORATION
    Inventor: Akira Ogawa
  • Patent number: 9958270
    Abstract: A sensing device comprising a micromechanical gyroscope, the gyroscope comprising an improved sensing device with a micromechanical gyroscope, where the resonance frequency of the first mechanical resonator and the resonance frequency of the second mechanical resonator are adjusted to essentially coincide. The device comprises a feed-back loop connected to the second mechanical resonator, the quality factor of the combination of the feed-back loop and the second mechanical resonator being less than 10. More accurate sensing is achieved without essentially adding complexity to the sensor device configuration.
    Type: Grant
    Filed: June 27, 2013
    Date of Patent: May 1, 2018
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Anssi Blomqvist
  • Patent number: 9835454
    Abstract: A system and/or method for efficiently operating a MEMS gyroscope without drive circuitry and/or with drive circuitry and a non-constant oscillating amplitude. In a non-limiting example, drive circuitry may be utilized to drive the MEMS gyroscope proof mass to a desired oscillating amplitude, and then the drive circuitry may be powered off. Rotational velocity may be sensed while the proof mass is being driven to a desired oscillating amplitude, while the proof mass is being maintained at a desired oscillating amplitude, and/or while the proof mass amplitude decays.
    Type: Grant
    Filed: February 9, 2015
    Date of Patent: December 5, 2017
    Assignee: INVENSENSE, INC.
    Inventor: Stephen Lloyd
  • Patent number: 9834432
    Abstract: Inertial sensor comprising a fixed part and at least one mass suspended from the fixed part and means of damping the displacement of the part suspended from the fixed part, said damping means being electromechanical damping means comprising at least one DC power supply source, one electrical resistor and one variable capacitor in series, said variable capacitor being formed partly by the suspended part and partly by the fixed part such that displacement of the suspended part causes a variation of the capacitance of the variable capacitor.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: December 5, 2017
    Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
    Inventors: Yannick Deimerly, Guillaume Jourdan, Patrice Rey
  • Patent number: 9829878
    Abstract: A robot includes a robot arm, a force sensor, and a control unit configured to control the operation of the robot art. The control unit initializes the force sensor while the robot arm is moving at uniform speed. It is preferable that the control unit initializes the force sensor while the robot arm is moving at the uniform speed and the amplitude of a detection value of the force sensor is smaller than a threshold.
    Type: Grant
    Filed: April 18, 2016
    Date of Patent: November 28, 2017
    Assignee: Seiko Epson Corporation
    Inventor: Yasuhiro Shimodaira
  • Patent number: 9810535
    Abstract: One embodiment of the invention includes a vibrating-mass gyroscope system. The system includes a sensor system comprising a vibrating-mass and a plurality of electrodes coupled to the vibrating-mass that are configured to facilitate in-plane motion of the vibrating-mass. The system also includes a gyroscope controller configured to generate a drive signal that is provided to a first set of the plurality of electrodes to provide an in-plane periodic oscillatory motion of the vibrating-mass along a drive axis, to generate a force-rebalance signal that is provided to a second set of the plurality of electrodes to calculate a rotation of the vibrating-mass gyroscope system about an input axis, and to generate a quadrature signal that is provided to a third set of the plurality of electrodes to substantially mitigate quadrature effects associated with the vibrating-mass.
    Type: Grant
    Filed: February 10, 2015
    Date of Patent: November 7, 2017
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Alexander Trusov, David M. Rozelle
  • Patent number: 9813037
    Abstract: A detection device includes a driving circuit which drives a vibrator, and a detection circuit which detects a desired signal. The driving circuit includes a current-voltage conversion circuit which receives a feedback signal, and performs a current-voltage conversion, a drive signal output circuit which amplifies an input voltage signal after being subjected to the current-voltage conversion, and outputs a drive signal of a sine wave, and a gain control circuit which controls a gain of amplification of the drive signal in the drive signal output circuit. When a resistance for a current-voltage conversion is set to RI, the gain of the amplification of the drive signal in the drive signal output circuit is set to K, and an equivalent series resistance in a fundamental wave mode of the vibrator is set to R, the gain control circuit performs a gain control such that K×RI=R is satisfied.
    Type: Grant
    Filed: November 6, 2014
    Date of Patent: November 7, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Katsuhiko Maki, Masahiro Kanai
  • Patent number: 9784581
    Abstract: A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.
    Type: Grant
    Filed: January 9, 2014
    Date of Patent: October 10, 2017
    Assignee: STMicroelectronics S.r.l.
    Inventors: Andrea Donadel, Davide Magnoni, Marco Garbarino
  • Patent number: 9696338
    Abstract: A capacitance detection circuit inhibits noise. The capacitance detection circuit detects a change in capacitance between a pair of electrodes of a physical quantity sensor, with these electrodes generating the change in capacitance in response to a change in physical quantity. The capacitance detection circuit has a carrier signal generating circuit that supplies a carrier signal to one of the electrodes, an operational amplifier that has an inverting input terminal to which the other one of the electrodes is input, a dummy capacity that is connected in parallel to the pair of electrodes, and a carrier signal conditioning circuit that inverts a phase of a carrier signal supplied from the carrier signal generating circuit to the dummy capacity and adjusts a gain to inhibit the dummy capacity.
    Type: Grant
    Filed: November 12, 2012
    Date of Patent: July 4, 2017
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Masami Kishiro
  • Patent number: 9698686
    Abstract: A detection device includes a driving circuit which drives a physical quantity transducer, a detection circuit which detects a desired signal, a power-supply terminal into which a power-supply voltage is input, a regulator circuit which performs a voltage adjustment of stepping down the power-supply voltage from the power-supply terminal, and supplies a regulated power-supply voltage obtained by the voltage adjustment to the driving circuit and the detection circuit as an operating power-supply voltage, and a buffer circuit which is supplied with the power-supply voltage, receives a drive signal from the driving circuit, and outputs an amplified drive signal in which an amplitude of the drive signal increases to the physical quantity transducer.
    Type: Grant
    Filed: November 5, 2014
    Date of Patent: July 4, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Katsuhiko Maki, Teppei Higuchi, Takashi Nomiya
  • Patent number: 9696156
    Abstract: An vibrating gyro device includes a base, drive vibrating arms extending from one end of the base, and detection vibrating arms extending from the other end of the base that faces away from the one end, and an adjustment film is provided on each of the drive vibrating arms in an area close to the base.
    Type: Grant
    Filed: March 20, 2013
    Date of Patent: July 4, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Keiji Nakagawa, Ryuta Nishizawa
  • Patent number: 9654082
    Abstract: A vibrator includes a vibrator element and a base on which the vibrator element is installed. In addition, when n is set to a natural number equal to or greater than 2, and j is set to a natural number equal to or greater than 1 and equal to or less than n, the vibrator element includes n inherent vibration modes having resonance frequencies different from each other, and when a resonance frequency of a main vibration of the vibrator element in the n inherent vibration modes is set to ?1 in a relationship between an arbitrary integer kj and a resonance frequency ?j corresponding to each of the n inherent vibration modes, the following three expressions are all satisfied. ?? ? ( ? j = 2 n ? k j ? ? j - k 1 - ? 1 ) / ? 1 ? ? 1 ? ? 0.
    Type: Grant
    Filed: April 22, 2016
    Date of Patent: May 16, 2017
    Assignee: SEIKO EPSON CORPORATION
    Inventors: Akinori Yamada, Shuhei Yoshida, Takayuki Kikuchi
  • Patent number: 9605963
    Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.
    Type: Grant
    Filed: January 16, 2015
    Date of Patent: March 28, 2017
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Satoshi Ohuchi, Hiroyuki Aizawa, Jiro Terada, Takami Ishida, Ichirou Satou, Hideo Ohkoshi, Yohei Ashimori
  • Patent number: 9599469
    Abstract: In an angular velocity sensor, when a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a first rotational vibration mode in which a base portion rotates and vibrates around a detection axis with respect to fixing units in association with the deformation of beam portions is set to f2 [Hz], a detuning frequency is set to f3 [Hz], and a resonance frequency in a second rotational vibration mode, having a phase opposite to that of the first rotational vibration mode, in which the base portion rotates and vibrates around the detection axis with respect to the fixing units in association with the deformation of the beam portions is set to f4, a relation of f1<f2<f3<f4 or a relation of f1<f2<f4<f3 is satisfied.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: March 21, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Ryuta Nishizawa, Takayuki Kikuchi
  • Patent number: 9587944
    Abstract: An angular velocity sensor includes fixing units, a base portion, beam portions that support the base portion with respect to the fixing units, driving vibrating arms connected to the base portion, and detection vibrating arms connected to the base portion. When a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a rotational vibration mode in which the base portion rotates and vibrates around a detection axis with respect to the fixing units in association with the deformation of the beam portions is set to f2 [Hz], and a detuning frequency is set to f3 [Hz], the relation of f1<f2<f3 is satisfied.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: March 7, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Ryuta Nishizawa, Keiji Nakagawa, Norifumi Shimizu
  • Patent number: 9568490
    Abstract: Provided is an angular velocity sensor including a plurality of angular velocity detection units each outputting a different detection result, and including a common driving circuit to drive the angular velocity detection units. The angular velocity detection units of the angular velocity sensor of the present invention are configured to have different driving amplitudes when being driven by a driving signal at the same frequency.
    Type: Grant
    Filed: March 19, 2012
    Date of Patent: February 14, 2017
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Heewon Jeong, Masahide Hayashi, Kiyoko Yamanaka
  • Patent number: 9568491
    Abstract: A method of controlling exposed glass charging in a micro-electro-mechanical systems (MEMS) device is disclosed. The method includes providing a MEMS device comprising a proof mass positioned apart from at least one sense plate and at least one outboard metallization layer, wherein at least one conductive glass layer is coupled to the sense plate and the outboard metallization layer, the conductive glass layer including at least one exposed glass portion near the proof mass; and applying a first voltage to the sense plate and a second voltage to the outboard metallization layer. The first voltage is separated from the second voltage by a predetermined voltage level such that the exposed glass portion has an average voltage corresponding to a voltage midway between the first voltage and the second voltage.
    Type: Grant
    Filed: July 8, 2013
    Date of Patent: February 14, 2017
    Assignee: Honeywell International Inc.
    Inventors: Mark W. Weber, Timothy J. Hanson
  • Patent number: 9562764
    Abstract: A method for determining absolute orientation of a platform is disclosed. In one embodiment, a first sky polarization data set for a first time Ti is measured using a sky polarization sensor disposed on a platform. A second sky polarization data set is obtained at a second time Tj. A difference in orientation between the first sky polarization data set and the second sky polarization data set is determined using an orientation determiner. The difference in orientation is provided as at least one orientation parameter for the platform at time Tj. The at least one orientation parameter is used to provide a direction relative to a reference point on the platform.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: February 7, 2017
    Assignee: Trimble Inc.
    Inventor: Peter Glen France
  • Patent number: 9562926
    Abstract: The invention provides an MEMS device. The MEMS device includes: a substrate, a proof mass, a spring, a spring anchor, a first electrode anchor, and a second electrode anchor, a first fixed electrode and a second fixed electrode. The proof mass is connected to the substrate through the spring and the spring anchor. The proof mass includes a hollow structure inside, and the spring anchor, the first electrode anchor, and the second electrode anchor are located in the hollow structure. The proof mass and the first fixed electrode form a first capacitor, and the proof mass and the second fixed electrode form a second capacitor. There is neither any portion of the proof mass nor any portion of any fixing electrode located between the first electrode anchor, second electrode anchor, and the spring anchor.
    Type: Grant
    Filed: May 8, 2015
    Date of Patent: February 7, 2017
    Assignee: RICHTEK TECHNOLOGY CORPORATION
    Inventors: Chiung-Wen Lin, Chiung-Cheng Lo, Yu-Fu Kang
  • Patent number: 9553561
    Abstract: A vibrating device having vibrating arms connected to a supporter. The vibrating arms have an n-type Si layer which is a degenerated semiconductor and an exciter provided on the n-type Si layer. The exciter has a piezoelectric thin film and a first and second electrodes with the piezoelectric thin film interposed therebetween.
    Type: Grant
    Filed: March 10, 2015
    Date of Patent: January 24, 2017
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Keiichi Umeda, Takehiko Kishi, Toshio Nishimura, Takashi Hase
  • Patent number: 9535084
    Abstract: A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (?T, ?T,0), a quadrature variable (?c, ?C,0) and a restoring variable (?S).
    Type: Grant
    Filed: March 17, 2011
    Date of Patent: January 3, 2017
    Assignees: Continental Teves AG & Co. oHG, Albert-Ludwigs-University of Freiburg
    Inventors: Markus Egretzberger, Andreas Kugi, Florian Mair, Michael Maurer, Yiannos Manoli, Thomas Northemann
  • Patent number: 9482533
    Abstract: The vibrating reed includes a first main surface and a second main surface that face each other in the thickness direction of a piezoelectric body and a detection unit that vibrates along the thickness direction when detecting. The detection unit includes a groove of which a groove bottom is positioned at a position beyond a midline between the first main surface and the second main surface in the depth direction from an opening formed in the first main surface, an inside surface electrode that is formed on an inside surface facing the inside of the groove, an outside surface electrode that is formed on an outside surface which is opposite the inside surface with the piezoelectric body interposed there between, and a pair of groove bottom electrodes that is provided further on the groove bottom at an interval than the midline and face inside the groove.
    Type: Grant
    Filed: October 29, 2014
    Date of Patent: November 1, 2016
    Assignee: Seiko Epson Corporation
    Inventor: Atsushi Matsuo
  • Patent number: 9470090
    Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.
    Type: Grant
    Filed: April 24, 2015
    Date of Patent: October 18, 2016
    Inventor: Lee Ervin
  • Patent number: 9449891
    Abstract: A method involves applying a voltage to a first conductive surface and a second conductive surface separated by a conductive surface gap of a distance greater than the distance required to produce a tunneling current between the first and second conductive surfaces when the voltage is applied, and using angled deposition to deposit conductive material on the first and second conductive surfaces to narrow the conductive surface gap until a tunneling current appears across the first and second conductive surfaces responsive to the applied voltage.
    Type: Grant
    Filed: February 25, 2015
    Date of Patent: September 20, 2016
    Assignee: THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY
    Inventors: Andrew Wang, Paul D. Swanson, Charles H. Tally, IV
  • Patent number: 9437801
    Abstract: A piezoelectric device, which has bipolar polarization-electric field (Pr-E) hysteresis characteristics of a piezoelectric material asymmetrically biased, when a first and second coercive electric fields respectively having smaller and larger absolute values are defined as Ec1 and Ec2 and a bias ratio of the coercive electric field is defined as [(Ec2+Ec1)/(Ec2?Ec1)]×100[%], includes a piezoelectric element unit including a piezoelectric body film whose bias ratio is 20% or more, the piezoelectric element unit operating with an electric field intensity smaller than that of the first coercive electric field. The piezoelectric device includes a refresh voltage applying circuit configured to apply a voltage to maintain operation performance of the relevant device, the voltage having an electric field intensity larger than the electric field intensity for operating the device and being equal to or less than three times |Ec1|, such that a polarized state of the piezoelectric body film is restored.
    Type: Grant
    Filed: March 18, 2015
    Date of Patent: September 6, 2016
    Assignee: FUJIFILM Corporation
    Inventor: Takamichi Fujii
  • Patent number: 9395183
    Abstract: A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: July 19, 2016
    Assignee: INVENSENSE, INC.
    Inventors: Joseph Seeger, Ozan Anac
  • Patent number: 9389413
    Abstract: A synchronizable optomechanical oscillator (OMO) network including at least two dissimilar silicon nitride (Si3N4) optomechanical resonators that can be excited to evolve into self-sustaining optomechanical oscillators (OMOs) coupled only through an optical radiation field. The tunability of the optical coupling between the oscillators enables one to externally control the dynamics and switch between coupled and individual oscillation states.
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: July 12, 2016
    Assignee: CORNELL UNIVERSITY
    Inventors: Michal Lipson, Paul McEuen, Arthur Barnard, Sasikanth Manipatruni, Mian Zhang, Gustavo Wiederhecker
  • Patent number: 9377483
    Abstract: A method for the precise measuring operation of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (qi) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between said trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (?T, ?T,0), a quadrature variable (?T, ?T,0) and a restoring variable (?S).
    Type: Grant
    Filed: March 17, 2011
    Date of Patent: June 28, 2016
    Assignee: Continental Teves AG & Co. oHG
    Inventors: Markus Egretzberger, Florian Mair, Andreas Kugi
  • Patent number: 9366535
    Abstract: A vibration gyro element includes drive vibrating arms and detection vibrating arms at the opposite side, and has a first detection mode in which the drive vibrating arms flexurally vibrate oppositely to each other in an out-of-plane direction in an opposite phase to an action direction of Coriolis force and the detection vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in an opposite phase to that of the drive vibrating arms, and a second detection mode in which the drive vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in the same phase as the action direction of the Coriolis force and the detection vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in the same phase as that of the drive vibrating arms.
    Type: Grant
    Filed: July 17, 2012
    Date of Patent: June 14, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Masashi Shimura, Takayuki Kikuchi
  • Patent number: 9344057
    Abstract: For a tuning-fork type crystal resonator plate, a crystal plate having a crystal orientation is used. The tuning-fork type crystal resonator plate includes: a base portion; and a pair of first and second leg portions protruding from the base portion in one direction. In the first leg portion and the second leg portion, grooves are formed so that each of the grooves is biased relative to a center of the corresponding first or second leg portion in a width direction. A lowermost point of the groove is positioned in a middle of the groove in the width direction (width direction of the first leg portion and the second leg portion) in a state viewed from an end surface of the first and second leg portions in the width direction.
    Type: Grant
    Filed: December 11, 2013
    Date of Patent: May 17, 2016
    Assignee: DAISHINKU CORPORATION
    Inventors: Yoshinobu Sakamoto, Satoru Ishino, Yoshinari Morimoto, Taiki Goto
  • Patent number: 9335170
    Abstract: An inertial sensor (110) includes a drive system (118) configured to oscillate a drive mass (114) within a plane (24) that is substantially parallel to a surface (50) of a substrate (28). The drive system (118) includes first and second drive units (120, 122) having fixed fingers (134, 136) interleaved with movable fingers (130, 132) of the drive mass (114). At least one of the drive units (120) is located on each side (126, 128) of the drive mass (114). Likewise, at least one of the drive units (122) is located on each side (126, 128) of the drive mass (114). The drive units (122) are driven in phase opposition to the drive units (120) so that a levitation force (104) generated by the drive units (122) compensates for, or at least partially suppresses, a levitation force (100) generated by the drive units (120).
    Type: Grant
    Filed: November 28, 2012
    Date of Patent: May 10, 2016
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Yizhen Lin, Jan Mehner, Michael Naumann
  • Patent number: 9291456
    Abstract: A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: March 22, 2016
    Assignee: INVENSENSE, INC.
    Inventors: Joseph Seeger, Ozan Anac
  • Patent number: 9287848
    Abstract: A resonator element includes a base portion which includes one end portion and the other end portion opposing the one end portion in a plan view, and a pair of vibrating arms which extend along a first direction from the one end portion of the base portion. The base portion includes a reduced width portion in which a width is gradually decreased along a second direction intersecting the first direction toward a direction side which is separated from the base portion along the first direction, in at least one of the one end portion and the other end portion, and a fixing portion is provided between the one end portion and the other end portion of the base portion.
    Type: Grant
    Filed: October 24, 2013
    Date of Patent: March 15, 2016
    Assignee: SEIKO EPSON CORPORATION
    Inventors: Akinori Yamada, Osamu Iwamoto
  • Patent number: 9258487
    Abstract: An auto calibration method and an optical image stabilizer (OIS) camera using the same are provided. The auto calibration method includes removing a DC offset of a gyroscope. A vibrator signal applied by operating a vibrator, and an actual measurement value of the gyroscope is obtained using the applied vibrator signal. A first gain value for compensating for sensitivity of the gyroscope is calculated using the vibrator signal and the actual measurement value of the gyroscope, and an actuator is operated. A displacement of a pixel actually moving on an image is moved under an operation of the actuator. A second gain value for controlling a sensitivity variation of the actuator is calculated based on the displacement of the actually moving pixel. Accordingly, it is possible to reduce processing time and to ensure high performance.
    Type: Grant
    Filed: July 9, 2012
    Date of Patent: February 9, 2016
    Assignee: LG INNOTEK CO., LTD.
    Inventors: Junghyun Lee, Seongcheol Jeong
  • Patent number: 9246470
    Abstract: A vibrating element has a drive mode, and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode. In frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta [° C.], a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb [° C.], and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc [° C.], Ta is lower than Tb and Tc, or Ta is higher than Tb and Tc.
    Type: Grant
    Filed: October 24, 2014
    Date of Patent: January 26, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Keiji Nakagawa, Ryuta Nishizawa
  • Patent number: 9219223
    Abstract: Preparations of piezoelectric single crystal elements involving the steps of mechanically finishing a single crystal element with select cuttings, coating electrodes on a pair of Z surfaces, poling the single crystal along the <011> axis under a 500V/mm electric field and a product made by the process thereof.
    Type: Grant
    Filed: February 11, 2011
    Date of Patent: December 22, 2015
    Assignee: CTG ADVANCED MATERIALS, LLC
    Inventor: Pengdi Han
  • Patent number: 9178470
    Abstract: A resonator element is provided. A base portion includes a first base portion, a second base portion, and a connecting portion. The base portion includes a width-decreasing portion that is provided at an end of the connecting portion on the first base portion side and that has a width along an X-axis direction which continuously decreases toward the second base portion. An outer edge of the width-decreasing portion and an outer edge of the connecting portion form a continuous line that does not include a corner portion, when seen in a plan view. When an angle between a tangent of a portion of the curved line on the first base portion side and a segment parallel to the X-axis direction is set to ?, a relation of 0°<?<90° is satisfied.
    Type: Grant
    Filed: July 18, 2014
    Date of Patent: November 3, 2015
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Akinori Yamada
  • Patent number: 9170107
    Abstract: A gyroscope comprises a substrate and a guided mass system. The guided mass system comprises proof masses and guiding arms disposed in a plane parallel to the substrate. The proof masses are coupled to the guiding arm by springs. The guiding arm is coupled to the substrate by springs. At least one of the proof-masses is directly coupled to the substrate by at least one anchor via a spring system. The gyroscope also comprises an actuator for vibrating one of the proof-masses in the first direction, which causes another proof mass to rotate in the plane. Finally, the gyroscope also includes transducers for sensing motion of the guided mass system in response to angular velocities about a single axis or multiple input axes.
    Type: Grant
    Filed: September 30, 2013
    Date of Patent: October 27, 2015
    Assignee: INVENSENSE, INC.
    Inventors: Ozan Anac, Joseph Seeger
  • Patent number: 9146107
    Abstract: A rotation rate sensor having a substrate including a main extension plane, force transmission elements that are movably fastened on the substrate using detection springs and a seismic mass are provided, the seismic mass being suspended over the force transmission elements, movably relative to the substrate, in such a way that the seismic mass is able to be excited, using a drive unit, to a drive vibration about a drive axis that is parallel to the main extension plane, and in response to the presence of a rotation rate that extends in parallel to the main extension plane and perpendicular to the drive axis, the seismic mass is excitable, as a result of Coriolis forces, to a detection vibration about a detection axis that is perpendicular to the main extension plane, the detection springs being connected to the force transmission elements in the region of the vibrational nodes.
    Type: Grant
    Filed: December 18, 2012
    Date of Patent: September 29, 2015
    Assignee: ROBERT BOSCH GMBH
    Inventors: Burkhard Kuhlmann, Jan-Timo Liewald
  • Patent number: 9130147
    Abstract: A vibrating reed includes a base part. A drive vibrating arm, a detection vibrating arm, and an adjustment vibrating arm extend from the base part. A first adjustment electrode and a second adjustment electrode are connected to the adjustment vibrating arm. The first adjustment electrode generates an electrical signal in first phase. The second adjustment electrode generates an electrical signal in second phase opposite to the first phase. The electrical signals of the adjustment electrodes are superimposed on the detection signal of the detection vibrating arm, and thereby, vibration leakage components are cancelled out. The adjustment vibrating arm is partially sandwiched between a first electrode piece and a second electrode piece, and the adjustment vibrating arm is partially sandwiched between a third electrode piece and a fourth electrode piece.
    Type: Grant
    Filed: April 23, 2013
    Date of Patent: September 8, 2015
    Assignee: Seiko Epson Corporation
    Inventors: Ryuta Nishizawa, Keiji Nakagawa
  • Patent number: 9123883
    Abstract: A vibration device includes a semiconductor device, a first electrode and a second electrode located in a first surface of the semiconductor device, a vibration element, a third electrode and a fourth electrode located in a first surface of the vibration element, a first connection section that connects the first electrode and the third electrode, and a second connection section that connects the second electrode and the fourth electrode. The semiconductor device and the vibration element have mutually different thermal expansion coefficients. The vibration element has a coupling section located between the third electrode and the fourth electrode, and the coupling section has at least one bend section located between the third electrode and the fourth electrode.
    Type: Grant
    Filed: March 25, 2013
    Date of Patent: September 1, 2015
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Hideaki Kurita
  • Patent number: 9093638
    Abstract: A vibrating element includes a base, drive vibrating arms, detection vibrating arms, and adjustment vibrating arms. The drive vibrating arms are driven to make bending vibration in a predetermined plane. The following expressions (1) and (2) are satisfied: f3>f2??(1) 0.964×(1?0.321(1+L/t))?f2/f1?0.995??(2) where t represents the thickness of the base, L represents the length of the base in the direction in which the drive vibrating arms extend, f1 represents the frequency of natural vibration of the detection vibrating arms in a direction that intersects the predetermined plane, f2 represents the frequency of natural vibration of the drive vibrating arms in a direction that intersects the predetermined plane, and f3 represents the frequency of natural vibration of the adjustment vibrating arms in a direction that intersects the predetermined plane.
    Type: Grant
    Filed: March 20, 2013
    Date of Patent: July 28, 2015
    Assignee: Seiko Epson Corporation
    Inventor: Keiji Nakagawa
  • Patent number: 9091542
    Abstract: A sensor element includes a base part, drive vibration arms that extend from the base part, an adjustment vibration arm 241 that extends from the base part and vibrates in response to drive vibration of the drive vibration arms, detection electrodes that output a signal according to a physical quantity applied to the drive vibration arms, and adjustment electrodes 551 and 553 provided on the adjustment vibration arm 241 and electrically connected to the detection electrodes for outputting a charge in a reverse polarity with respect to the detection electrodes in response to vibration of the adjustment vibration arm 241. The adjustment electrode 551 has a common part 60 electrically connected to the detection electrodes and a plurality of branch parts 61 branching out from the common part 60 and arranged side by side along an extension direction of the adjustment vibration arm 241.
    Type: Grant
    Filed: September 12, 2012
    Date of Patent: July 28, 2015
    Assignee: Seiko Epson Corporation
    Inventor: Fumio Ichikawa