Abstract: A piezoelectric device includes a connecting section connecting a pair of beam sections adjacent to each other. The connecting section is connected to one of the pair of beam sections at a first end portion. The connecting section is connected to another of the pair of beam sections at a second end portion. The second end portion faces the first end portion in a direction in which the pair of beam sections are aligned. A second coupling portion is located along a first coupling portion. The connecting section includes only one first end portion. The connecting section includes only one second end portion. Each of the first end portion and the second end portion is closer to a tip end portion than to a fixed end portion of each of the pair of beam sections.

Abstract: A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.

Abstract: An actuator usable in a cooling system is described. The actuator includes an anchored region and a cantilevered arm. The cantilevered arm extends outward from the anchored region. The cantilevered arm includes a step region, an extension region and an outer region. The step region extends outward from the anchored region and has a step thickness. The extension region extends outward from the step region and has an extension thickness less than the step thickness. The outer region extends outward from the extension region and has an outer thickness greater than the extension thickness.

Abstract: An actuator usable in a cooling system is described. The actuator includes an anchored region and a cantilevered arm. The cantilevered arm extends outward from the anchored region. The cantilevered arm includes a step region, an extension region and an outer region. The step region extends outward from the anchored region and has a step thickness. The extension region extends outward from the step region and has an extension thickness less than the step thickness. The outer region extends outward from the extension region and has an outer thickness greater than the extension thickness.

Abstract: An actuator usable in a cooling system is described. The actuator includes an anchored region and a cantilevered arm. The cantilevered arm extends outward from the anchored region. The cantilevered arm includes a step region, an extension region and an outer region. The step region extends outward from the anchored region and has a step thickness. The extension region extends outward from the step region and has an extension thickness less than the step thickness. The outer region extends outward from the extension region and has an outer thickness greater than the extension thickness.

Abstract: A displacement detection type force sensor, having a mechanism for relaxing deformation of a member due to a factor other than an external force. The force sensor has at least one of: a first relaxation part elastically deformable along a plane perpendicular to a first axis, and provided to at least one of a first substrate part, a first connection part, a second substrate part and a second connection part; and a second relaxation part elastically deformable along the first axis, and provided to at least one of the second substrate part, the second connection part, a third substrate part and a third connection part.

Abstract: A resonant transducer includes a resonant beam which is formed on a semiconductor substrate, a support beam of which one end is connected to a part of the resonant beam at a predetermined angle, a first electrode which is connected to the resonant beam via the support beam, a second electrode which is disposed adjacent to a center of one side surface of the resonant beam, and a conductor which is disposed between the support beam and the second electrode, the conductor being connected to the first electrode.

Abstract: This disclosure reveals a resonator where at least one suspended inertial mass is driven into rotational oscillation by a piezoelectric drive transducer, or where the rotational motion of at least one suspended inertial mass is sensed by a piezoelectric sense transducer. The disclosure is based on the idea of suspending the inertial mass with a one-sided suspender arrangement, where only one suspender is attached to each anchor point, and on the optimal positioning of the suspender in relation to the effective center of gravity of the resonator. The resonator may be employed in a resonator system, a clock oscillator or a gyroscope.

Abstract: A cantilever section as a substrate for a sensor includes: a base section; a movable section connected to the base section; an arm portion as a support portion extending along the movable section from the base section when viewed in a planar view as viewed from a thickness direction of the movable section; and a gap portion formed to have a predetermined gap between the movable section and the arm portion when viewed in the planar view, in which a ridge portion formed as an etching residue having a top portion on the side facing the gap portion is provided on each of facing surfaces of the movable section and the arm portion in the gap portion, and the predetermined gap is a gap between a top portion of a first ridge portion which is the ridge portion formed at one of the movable section and the arm portion, and a top portion of a second ridge portion which is the ridge portion formed at the other of the movable section and the arm portion.

Abstract: Mechanical low pass filters for motion sensors and methods for making the same are disclosed. In an implementation, a motion sensor package comprises: a substrate; one or more viscous dampers formed on the substrate; one or more mechanically compliant metal springs formed on the substrate; and a sensor stack attached to the one or more metal springs, the sensor stack overlying the one or more viscous dampers and forming a gap between the sensor stack and the one or more viscous dampers and channels between the one or more viscous dampers and metal springs, wherein the one or more metal springs and the one or more viscous dampers provide a mechanical suspension system having a resonant frequency that is higher than a sensing bandwidth of a motion sensor in the sensor stack and lower than a resonant frequency of the motion sensor.

Abstract: A method is provided for manufacturing a piezoelectric device including a piezoelectric element that is disposed above a diaphragm and that has a multilayer structure including a first electrode disposed above the diaphragm, a piezoelectric layer disposed on the first electrode, and a second electrode disposed on the piezoelectric layer. The method includes forming the multilayer structure including the first electrode, the piezoelectric layer, and the second electrode above the diaphragm, forming a voltage application electrode extending outwardly from an end of the second electrode to cover a region located above the piezoelectric layer in an inactive section having no second electrode, applying a voltage between the first electrode and the second electrode, and removing the voltage application electrode.

Abstract: A gyro sensor capable of suppressing influence of the same phase mode on a vibration mode includes a vibrating body, a first spring structure portion that extends in a direction along a first axis and is connected to the vibrating body, first and second vibrating portions that are disposed in parallel to each other in the direction along the first axis and are excited and vibrated in an opposite phase to each other, and a second spring structure portion that extends in the direction along the first axis and is connected to the first and second vibrating portions, in which a first spring constant K1 of the first spring structure portion is smaller than a second spring constant K2 from a middle point at which a length between both ends of the second spring structure portion is equally divided into two to one end of the second spring structure portion.

Abstract: A sensing assembly device includes a substrate, a chamber above the substrate, a first piezoelectric gyroscope sensor positioned within the chamber, and a first accelerometer positioned within the chamber.

Abstract: A microelectromechanical systems (MEMS) device, such as a three-axis MEMS device can sense acceleration in three orthogonal axes. The MEMS device includes a single proof mass and suspension spring systems that movably couple the proof mass to a substrate. The suspension spring systems include translatory spring elements and torsion spring elements. The translatory spring elements enable translatory motion of the proof mass relative to the substrate in two orthogonal directions that are parallel to the plane of the MEMS device in order to sense forces in the two orthogonal directions. The torsion spring elements enable rotation of the proof mass about a rotational axis in order to sense force in a third direction that is orthogonal to the other two directions. The translatory spring elements have asymmetric stiffness configured to compensate for an asymmetric mass of the movable element used to sense in the third direction.

Abstract: A microstructure device has a microstructure (e.g., a circuit card assembly, a printed circuit board, etc.) defining a sensitive axis and one or more isolators configured and adapted to be compliant along the sensitive axis and to be rigid along one or more other axes.

Abstract: This method determines an angular position of a rotary element in a system where a magnetic ring rotatably fastened to the rotary element in communication with multiple sensors each suitable for issuing a unitary electric signal representative of a magnetic field generated by the magnetic ring. At least two groups of sensors adapted to generate, based on the unitary sensor signals, at least one combined electric signal representative of the angular position of the magnetic ring. This method comprises; a) verifying the consistency the combined electric signal with at least one given rule b) assessing whether or not each group of sensors is correctly working based on the verification of step a); and if, a first group of sensors is not correctly working, disregarding its combined electric signal and relying on the combined electric signal of at least a second group of sensors for determining an angular position value.

Abstract: An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.

Abstract: A single flexible printed circuit (FPC) board for connecting multiple modules including a thin film is provided. The thin film has a first module connecting portion, a second module connecting portion and a third module connecting portion. The first module connecting portion is located on a first side of the thin film. The second module connecting portion and the third module connecting portion are located on a second side of the thin film. The first side is opposite to the second side. At least one first line is disposed between the first module connecting portion and the second module connecting portion. At least one second line is disposed between the first module connecting portion and the third module connecting portion.

Abstract: The present disclosure relates to nanoresonator oscillators or NEMS (nanoelectromechanical system) oscillators. A circuit for measuring the oscillation frequency of a resonator is provided, comprising a first phase-locked feedback loop locking the frequency of a controlled oscillator at the resonant frequency of the resonator, this first loop comprising a first phase comparator. Furthermore, a second feedback loop is provided which searches for and stores the loop phase shift introduced by the resonator and its amplification circuit when they are locked at resonance by the first loop. The first and the second loops operate during a calibration phase. A third self-oscillation loop is set up during an operation phase. It directly links the output of the controllable phase shifter to the input of the resonator. The phase shifter receives the phase-shift control stored by the second loop.

Abstract: The present invention refers to a method for detecting molecules and/or substances within a sample based on the use of a microcantilever system. The method comprises the variation of a certain condition such as humidity so as the mechanical feature analyzed varies with a characteristic pattern while the target molecule is bound to the detector. The invention also refers to the system used to carry out such method.

Abstract: An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions.

Abstract: The present disclosure relates to a vibrating element which is planar parallelly to an electrical crystallographic axis of a piezoelectric material such as quartz. The element comprises a beam holding electrodes, a stationary portion rigidly connected to one end of the beam, and a solid portion rigidly connected to the other end of the beam. The structure with facets from the chemical machining of the element has an axis of symmetry parallel to the electrical axis, and the solid portion has a center of gravity on the axis of symmetry. The useful vibration modes of the vibrating element, according to which the solid portion is reciprocatingly rotated about the axis of symmetry and reciprocatingly moved parallel to the plane of the element, are uncoupled. The measurement of an angular speed by a rate gyroscope including said vibrating elements is more precise.

Abstract: A MEMS device includes at least one proof mass, the at least one proof mass is capable of moving to contact at least one target structure. The MEMS device further includes at least one elastic bump stop coupled to the proof mass and situated at a first distance from the target structure. The MEMS device additionally includes at least one secondary bump stop situated at a second distance from the target structure, wherein the second distance is greater than the first distance, and further wherein the at least one elastic bump stop moves to reduce the first distance when a shock is applied.

Abstract: A method of making a handheld, electromechanical device useful in mammalian body-care includes the steps of: a) forming a one-piece housing having a single opening defined by a rim; b) assembling a unitary insert; c) inserting the unitary insert through the single opening of the housing; d) removably applying a cover having an exterior surface to close the opening of the one-piece housing; and e) attaching the unitary insert to at least one of the one-piece housing and the removable cover. The rim of the one-piece housing circumscribes a rim area, and the one-piece housing has a projected area that is substantially larger than the rim area. The unitary insert is dimensioned to be insertable through the opening defined by the rim, and it has a frame having disposed thereon electromechanical elements interconnected in an electrical circuit. The cover closes off the opening of the one-piece housing.

Abstract: A microelectromechanical structure (MEMS) device includes a secondary MEMS element displaceably coupled to a substrate. A primary MEMS element is displaceably coupled to the secondary MEMS element and has a resonant frequency substantially equal to the secondary MEMS element and has a much larger displacement than the secondary MEMS element.

Abstract: A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes, and a pair of supporting members for supporting the movable electrodes. The driver causes the supporting members to vibrate in opposite phases in a first direction. The first spring couples the supporting members of the acceleration detector and has elasticity in a second direction perpendicular to the first direction. The second spring couples the supporting members of the acceleration detector to a base and has elasticity in both directions. The third spring couples the supporting members of the acceleration detector to the supporting members of the angular velocity detector and has elasticity in both directions. The fourth spring couples the supporting members to the movable electrodes of the angular velocity detector and has elasticity in the second direction.

Abstract: A tuning bar piezoelectric vibrator includes first and second leg portions defined by a tuning bar piezoelectric vibrator, layers of first and second inner driver electrodes arranged as inner driver electrodes between first and second piezoelectric layers that are polarized in opposite directions of a thickness direction, a first outer electrode and a second outer electrode arranged to face the first and the second inner driver electrodes with the piezoelectric layers in between, respectively, and first and second vibrator portions in which the inner driver electrodes are used as driver electrodes.

Abstract: In exemplary embodiments of this invention, an inertial measurement unit (IMU) includes a cantilevered proof mass and electrostatic drive. The electrostatic drive puts the proof mass into a controlled trajectory in which it oscillates rapidly, for example, by vibrating back and forth in a plane or traveling in a circular or elliptical orbit. The IMU detects lateral or angular acceleration of the IMU, by measuring the perturbations of the proof mass trajectory from the expected motion in a fixed, non-rotating inertial frame. In exemplary embodiments of this invention, the proof mass position and motion are measured by methods of differential potential measurement (with constant slope voltage), differential displacement current measurement, or phase-sensitive or synchronous detection of motion.

Abstract: An inertial measurement unit may include a housing having an internal volume. The internal volume may have a dimension along an axis. A sensing element may be disposed in the internal volume. The sensing element may have a dimension along the axis that is less than the dimension of the internal volume. At least one piezoelectric actuator may be disposed in the housing adjacent the sensing element. When the at least one piezoelectric actuator is activated, it may prevent movement of the sensing element along the axis. When it is not activated, it may not prevent movement of the sensing element along the axis.

Abstract: A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes, and a pair of supporting members for supporting the moveable electrodes. The driver causes the supporting members to vibrate in opposite phases in a first direction. The first spring couples the supporting members of the accelereation detector and has elasticity in a second direction perpendicular to the first direction. The second spring couples the supporting members of the acceleration detector to a base and has elasticity in both directions. The third spring couples the supporting members of the acceleration detector to the supporting members of the angular velocity detector and has elasticity in both directions. The fourth spring couples the supporting members to the movable electrodes of the angular velocity detector and has elasticity in the second direction.

Abstract: A gyro sensor includes a base, a first connection arm and a second connection arm that extend from the base in opposite directions along an X axis, a first drive oscillation arm that extends from the first connection arm along a Y axis, a second drive oscillation arm that extends from the second connection arm along the Y axis, and a first detection oscillation arm and a second detection oscillation arm that extend from the base in opposite directions along the Y axis, and each of the first drive oscillation arm and the second drive oscillation arm has an oscillation component along the X axis and an oscillation component along a Z axis.

Abstract: A scanning probe microscope includes: a first and second probes for scanning a sample while maintaining the distance to the sample surface; crystal oscillators holding each of the first and second probes; and a modulation oscillator for providing the first probe with a vibration of a specific frequency which is different from the resonant frequency of each crystal oscillator. A control unit monitors the vibration of the specific frequency of the first and second probes, detects proximity of the first probe and the second probe to each other based on the change of the specific frequencies, and controls the drive of the first and second probes.

Abstract: Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. In one embodiment, a packaged resonator gyroscope comprises a carrier, a substrate layer mounted to the carrier, a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate, and a resonator mounted to the baseplate and suspended in the cavity. Other embodiments may be described.

Abstract: A sensor element has drive vibrating arms drive-vibrating by energization, adjustment vibrating arms vibrating with the drive vibrations of the drive vibrating arms, detection electrodes outputting charge in response to physical quantities applied to the drive vibrating arms, first electrodes provided on the adjustment vibrating arms, electrically connected to the detection electrodes, and outputting charge with the vibrations of the adjustment vibrating arms, and a pair of second electrodes provided on the adjustment vibrating arms, electrically connected to a pair of detection electrodes, and outputting charge having an opposite polarity to that of the first electrodes with the vibrations of the adjustment vibrating arms.

Abstract: The present invention discloses a method for assembling a 3D microelectrode structure. Firstly, 2D microelectrode arrays are stacked to form a 3D microelectrode array via an auxiliary tool. Then, the 3D microelectrode array is assembled to a carrier chip to form a 3D microelectrode structure. The present invention uses an identical auxiliary tool to assemble various types of 2D microelectrode arrays having different shapes of probes to the same carrier chip. Therefore, the method of the present invention increases the design flexibility of probes. The present invention also discloses a 3D microelectrode structure, which is fabricated according to the method of the present invention and used to perform 3D measurement of biological tissues.

Abstract: An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions.

Abstract: A sensor assembly includes a sound sensor, an image sensor, an acceleration sensor, and a gyroscope sensor. The sound sensor includes a substrate defining a first cavity, a diaphragm positioned on the substrate and covering the first cavity, a back plate covering the diaphragm and positioned on the substrate, and a capacitance. A first electrode layer is coated on the diaphragm and faces the first cavity. A second cavity is defined between the diaphragm and the back plate. A second electrode layer is coated on the back plate and faces the second cavity. The capacitance is electrically connected between the first and second electrode layers. The image sensor, the acceleration sensor, and the gyroscope sensor are positioned on the substrate.

Abstract: The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) device with a deformation protection structure. The MEMS device is located on a substrate, and it includes: a movable part; and a deformation protection structure, which has: a fixed plug, which is fixed on the substrate; multiple metal layers, including a top metal layer; and multiple plugs connecting the multiple metal layers. From top view, the top metal layer overlaps a portion of the movable part, and from cross section view, the bottom surface of the top metal layer is higher than the top surface of the movable part by a predetermined distance.

Abstract: A vibration sensor includes a base, a conducting ring, a number of cantilevers, a number of resistors, a number of helical springs, and a number of pairs of first and second pins. One end of each cantilever is connected to the base; the other end of each cantilever defines a guiding cutout. The resistors are correspondingly inserted in the guiding cutout. The helical springs are correspondingly deposited between the conducting ring and the holding block. The conducting ring slides in the guiding cutout due to a vibration and contacts with the resistor. The first and second pins formed in the base for correspondingly connecting to a pair of resistors in each cantilever. The vibration sensor senses the direction of the vibration by detecting a resistance that changes with a position of the conducting ring.

Abstract: Provided is a vibration gyro sensor including: a vibration element including a piezoelectric element group which has a first side provided with a drive electrode and a detection electrode and a second side opposed to the first side and provided with a common electrode, which vibrates by a drive signal input between the drive electrode and the common electrode and generates an output signal containing a detection signal corresponding to Coriolis force from the detection electrode; a bias section applying a bias voltage to the detection electrode; an oscillation circuit outputting the signal for causing vibration of the vibration element to the drive electrode as the drive signal based on the output signal generated by the detection electrode; and a phase inversion circuit outputting an inversion signal obtained by inverting a phase of the drive signal output from the oscillation circuit to the common electrode.

Abstract: An angular rate sensor includes: a substrate; and a vibrator having a beam part supported in a state of floating from the substrate and a pair of supports formed on the substrate and provided at both ends of the beam part for supporting the beam part. The vibrator includes a piezoelectric film formed in the beam part, a detecting electrode for detecting an angular rate, the detecting electrode being formed on the piezoelectric film so as to extend toward a center portion of the beam part from one end thereof, and a driving electrode for vibrating the vibrator, the driving electrode being formed on the piezoelectric film so as to extend toward the center portion of the beam part from the other end thereof and to be spaced from the detecting electrode.

Abstract: An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing element 2 according to the present embodiment includes oscillation arms 22, 23 and 24 formed of a semiconductor material, and a stopper member provided to limit the oscillation range of the oscillation arms. As such a stopper member, a first stopper member 25 is provided, for example, which limits the oscillation range of the oscillation arms at least within a single plane of the arms. Fixing portions 21, the oscillation arms 22, 23 and 24 and the first stopper member 25 are integrally formed by processing a semiconductor material, such as silicon.

Abstract: Disclosed is an angular velocity sensor for achieving downsizing of a variety of electronic devices. For this purpose, the angular velocity sensor has a subtracter for outputting a first differential signal based on two sensor signals output from a first sensing electrode unit and a second sensing electrode unit, an adder for outputting a first additional signal, another subtracter for outputting a second differential signal based on two sensor signals output from a third sensing electrode unit and a fourth sensing electrode unit, and another adder for outputting a second additional signal. The sensor then detects an angular velocity from an additional signal obtained based on the first differential signal and the second differential signal and a differential signal obtained based on the first additional signal and the second additional signal.

Abstract: A planar MEMS accelerometer that detects acceleration along an input axis that is orthogonal to the plane. There are spaced bonding pads coupled to a substrate. A generally planar Servo Member (SM) is flexibly coupled to the bonding pads by servo member flexures such that the SM is capable of oscillatory motion about a servo axis that is orthogonal to the plane. A generally planar plate Torque Summing Member (TSM) is located within, coplanar with, and flexibly coupled to the SM such that the TSM is capable of rotational motion about an output axis that is in the plane and orthogonal to the servo axis. The TSM is mass-imbalanced relative to the output axis. A generally planar plate rotor is located within, coplanar with, and flexibly coupled to the TSM such that it is capable of rotary oscillatory motion relative to the TSM about a rotor axis that is in the plane. Rotor drives directly oscillate the rotor about the rotor axis at a rotor oscillation frequency and amplitude.

Abstract: The present disclosure relates to a vibrating element which is planar parallelly to an electrical crystallographic axis of a piezoelectric material such as quartz. The element comprises a beam holding electrodes, a stationary portion rigidly connected to one end of the beam, and a solid portion rigidly connected to the other end of the beam. The structure with facets from the chemical machining of the element has an axis of symmetry parallel to the electrical axis, and the solid portion has a center of gravity on the axis of symmetry. The useful vibration modes of the vibrating element, according to which the solid portion is reciprocatingly rotated about the axis of symmetry and reciprocatingly moved parallel to the plane of the element, are uncoupled. The measurement of an angular speed by a rate gyroscope including said vibrating elements is more precise.

Abstract: A piezoelectric device is disclosed. A substrate has an arm portion. A piezoelectric member is disposed on the substrate. A drive electrode oscillates the arm portion by a piezoelectric operation of the piezoelectric member. First and second detection electrodes detect a Coriolis force from the oscillating arm portion. A first lead electrode having a first area is disposed on the substrate and connected to the first detection electrode and connects the first detection electrode to the outside. A second lead electrode has a second area substantially the same as the first area. The second lead electrode is disposed on the substrate asymmetrical to the first lead electrode with respect to an axis in a longitudinal direction of the arm portion and connected to the second detection electrode. The second lead electrode connects the second detection electrode to the outside. A third lead electrode connects the drive electrode to the outside.

Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.

Abstract: Monolithic solid-state inertial sensor. The sensor detects rotation rate about three orthogonal axes and includes a micromachined monolithic piezoelectric crystalline structure including an equal number of vibratory drive and detection tines on each side of an axis of symmetry of the sensor, the tines being synchronized to have alternate actuation movements inward and outward.

Abstract: A sensor includes at least one stationary pad with comb teeth, a hub, at least one actuator spoke coupled to a location on the hub, and at least one sensing spoke extending from the hub. The sensing spokes have comb teeth generally interdigitated with the comb teeth of the stationary pad. The location of the coupling between the actuator spoke and the hub offsets a line of action of a force on the actuator spoke from a center of rotation of the hub.

Abstract: An electronic device that prevents a failure caused by a temperature drift of an angular velocity sensor, and a signal compensation system and a signal compensation method for compensating for the temperature drift are provided. The present invention provides a mechanism including an angular velocity sensor that outputs a first signal in accordance with a rotational angular velocity. The device stores in advance data of a second signal normally output by the angular velocity sensor while in a stationary state, detects a stationary state and extracts the difference between the first and second signals when the stationary state is detected. The device thereby compensates for the first signal based on the extracted difference signal. A display unit in the device scrolls an image based on the compensated signal. This prevents a failure caused by the temperature drift of the angular velocity sensor.