Abstract: A physical quantity sensor includes a movable body and first and second detection electrodes facing the movable body with a separation distance between the movable body and the second detection electrode that is different from that between the movable body and the first detection electrode. The movable body and the first detection electrode are aligned to face one another in a first direction. Vibration of the movable body includes a drive vibration mode in which vibration in the first direction and vibration in a second direction orthogonal to the first direction are combined. To account for this drive vibration mode, an area of the second detection electrode is shifted to be greater in the second direction from its center in a plan view.

Abstract: An electromechanical system (MEMS) accelerometer is described. The MEMS accelerometer may be configured to sense linear acceleration along one, two or three axes, and to sense angular acceleration about one, two or three axes. As such, the MEMS accelerometer may serve as 2-axis, 3-axis, 4-axis, 5-axis or 6-axis inertial accelerometer. In some embodiments, the MEMS accelerometer may comprise a single mass connected to at least one anchor via a plurality of tethers. In other embodiments, the MEMS accelerometer may comprise a proof mass connected to at least one anchor via a plurality of tethers and one or more shuttle masses connected to the proof mass via a second plurality of tethers. Rotational and linear motion of the MEMS accelerometer may be sensed using capacitive sensors.

Abstract: A signal processing device for processing a measurement signal in a motor vehicle, wherein the measurement signal relates to a measurement variable which can change over time with sequential measurement values, including: a first signal processing unit for calculating the measurement variable which can change over time from the measurement signal; a second signal processing unit for processing the measurement variable which can change over time in order to obtain a processed measurement variable; a third signal processing unit for calculating a change rate of the measurement variable which can change over time, the third signal processing unit being designed to output an additional measurement signal which indicates the change rate; and a communication interface which is designed to combine the processed measurement variable and the additional measurement signal into a composite transmission signal and to transmit the composite transmission signal.

Abstract: A torque sensor (10), in particular for detecting torques occurring on or in a joint of an articulated-arm robot. The sensor has several measuring spokes (1, 2, 3, 4) that are designed to deform under the effects of torque; and several strain gauges (DR11, DR12, DR21, DR22, DR31, DR32, DR41, DR42), with two strain gauges being arranged on two opposite sides of the several measuring spokes (1, 2, 3, 4). The several strain gauges are each connected in one of at least two bridge circuits (A, B). The at least two bridge circuits (A, B) are each configured to generate a bridge voltage (Ua, Ub). By detecting and comparing differences in the bridge voltage signals (Ua, Ub) generated by the at least two bridge circuits (A, B); a reliability of the detected bridge voltage signals is determined.

Abstract: A rotational sensor for measuring rotational acceleration is disclosed. The rotational sensor comprises a sense substrate; at least two proof masses, and a set of two transducers. Each of the at least two proof masses is anchored to the sense substrate via at least one flexure and electrically isolated from each other; and the at least two proof masses are capable of rotating in-plane about a Z-axis relative to the sense substrate, wherein the Z-axis is normal to the substrate. Each of the transducers can sense rotation of each proof mass with respect to the sense substrate in response to a rotation of the rotational sensor.

Abstract: The invention relates to a capacitive micromechanical sensor structure comprising a stator structure rigidly anchored to a substrate and a rotor structure movably anchored by means of spring structures to the substrate. The stator structure has a plurality of stator finger support beams and the rotor structure has a plurality of rotor finger support beams. Stator fingers along the stator finger support beam of the stator structure extend into rotor gaps along the rotor finger support beam of the rotor structure, and rotor fingers along the rotor finger support beam of the rotor structure extend into stator gaps along the stator finger support beam of the stator structure.

Abstract: In a case where (i) accelerations except a specific angular acceleration cause a problem of noise and (ii) low-cost production is required, the present invention provides a device for measuring an angular acceleration which device has reduced noise that is caused by accelerations except the specific angular acceleration, by having an arrangement in which an oscillator is supported by a spring structure capable of greatly restraining movement in directions except a specific rotation direction.

Abstract: An exemplary device for determining a position of a component moved by operation of a motor includes a rotating member that rotates responsive to operation of the motor. At least one accelerometer is supported on the rotating member. The accelerometer provides at least one of an indication of a tangential force that is tangential to a direction of rotation of the rotating member and a radial force that is perpendicular to the tangential force. A controller determines the position of the component based upon the force indication from the accelerometer.

Abstract: An actuator includes: a movable portion that can oscillate around an oscillation axis; a connection portion that extends from the movable portion and is torsionally deformed in accordance with oscillation of the movable portion; and a support portion that supports the connection portion. The movable portion forms a cross shape in a plan view from a thickness direction of the movable portion.

Abstract: A bush component force detection device detects a component force acting on a cylindrical bush inserted into a hole provided in a frame of a vehicle to pivotally support a rod-like member inside thereof. The bush component force detection device includes: an outer ring provided between the bush and the hole with predetermined space from the bush and configured to surround an outer circumferential surface of the bush and to be attached on an inner circumferential surface of the hole; and a sensing unit. The sensing unit is a cylindrical member disposed between the bush and the outer ring and configured to surround the bush, and has one end of connected with an outer side of the bush, the other end connected with the outer ring, and strain gauges disposed on an outer circumferential surface thereof.

Abstract: A strain sensor is provided having an annular collar. At least one sensor is movably coupled to the collar, the at least one sensor having a body with a plurality of silicon strain gages coupled thereto. A first soldering connector is coupled to the collar, the first soldering connector configured to provide an excitation voltage. A plurality of second soldering connectors are coupled to the collar. A plurality of first conductors electrically are coupled to the first soldering connector on one end, and one of the plurality of silicon strain gages on a second end. A plurality of second conductors electrically are coupled between one of the plurality of second soldering connectors and one of the plurality of silicon strain gages.

Abstract: A bush component force detection device detects a component force acting on a bush which is press-fitted into a hole provided in a frame of a vehicle. The bush component force detection device includes: a cylinder which is inserted into the hole with predetermined space therefrom and has strain gauges; elastically deformable outer-side projections that extend in an axial direction of the cylinder and project radially outward from an outer surface of the cylinder; and elastically deformable inner-side projections that extend in an axial direction of the cylinder and project radially inward from an inner surface of the cylinder.

Abstract: A bush component force detection device detects a component force acting on a cylindrical bush which is inserted into a hole provided in a frame of a vehicle to pivotally support a rod-like member inside thereof. The device includes: a cylindrical inner ring provided between a bush and a hole and mounted on an outer circumferential surface of the bush; a cylindrical outer ring disposed outwardly of the inner ring with a predetermined space from the inner ring and mounted on an inner circumferential surface of the hole; and a sensing unit that is a cylindrical member disposed in the space between the inner ring and the outer ring substantially concentrically to the rod-like member, the sensing unit having one end connected with the inner ring, the other end connected with the outer ring, and strain gauges disposed on an outer circumferential surface of the sensing unit.

Abstract: A system and a method are disclosed for a high bandwidth linear flexure bearing, which may be particularly useful in high end accelerometers and high-precision linear servo mechanisms. Certain embodiments may apply to sensors that measure motion in one dimension. Such embodiments may substantially improve the off-axis performance of the sensors providing ultra-repeatability while maintaining linearity of motion and linearity in spring rate Some embodiments use spring flexures and flex-couplers to support the sensor stage and connect it to the reference base. Several embodiments are disclosed that may fit the needs of specific applications in the area of high-end servos and accelerometers.

Abstract: The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.

Abstract: The present invention provides an improved method and system for compensation of inertial sensors. In one implementation a modified moving average is applied to provide dynamic offset compensation for an inertial sensor output that is calculated when a vehicle is in motion.

Abstract: A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction.

Abstract: A rotational sensor for measuring rotational acceleration is disclosed. The rotational sensor comprises a sense substrate; at least two proof masses, and a set of two transducers. Each of the at least two proof masses is anchored to the sense substrate via at least one flexure and electrically isolated from each other; and the at least two proof masses are capable of rotating in-plane about a Z-axis relative to the sense substrate, wherein the Z-axis is normal to the substrate. Each of the transducers can sense rotation of each proof mass with respect to the sense substrate in response to a rotation of the rotational sensor.

Abstract: An inertial measurement unit is affixed to a rigid body. The inertial measurement includes a gyroscope that measures a first angular velocity and an angular acceleration; a first accelerometer that measures a first acceleration; a communications unit that receives a measurement signal, the measurement signal including a second acceleration transmitted from a second accelerometer, the second accelerometer being affixed to the rigid body; and a controller that calculates a relative orientation of the inertial measurement unit and the second accelerometer, and a distance separating the inertial measurement unit and the second accelerometer.

Abstract: A sensor arrangement for determining an angle of rotation of at least one shaft when rotated around its axis of rotation, which arrangement has at least one acceleration sensor which is arranged on the at least one shaft. The invention also relates to a method for determining an angle of rotation of at least one shaft when rotated around its axis of rotation, the angle of rotation being determined by at least one acceleration sensor which is arranged on the at least one shaft.

Abstract: A device for detecting rotation of a bicycle pedal mechanism and communicating that information to an electronic bicycle wheel motor controller.

Abstract: Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.

Abstract: A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.

Abstract: An apparatus (36) includes a motion amplification structure (52), an actuator (54), and a sense electrode (50) in proximity to the structure (52). The actuator (54) induces an axial force (88) upon the structure (52), which causes a relatively large amount of in-plane motion (108) in one or more beams (58, 60) of the structure (52). When sidewalls (98) of the beams (58, 60) exhibit a skew angle (28), the in-plane motion (108) of the beams (58, 60) produces out-of-plane motion (110) of a paddle element (62) connected to the end of the beams (58, 60). The skew angle (28), which results from an etch process, defines a degree to which the sidewalls (98) of beams (58, 60) are offset or tilted from their design orientation. The out-of-plane motion (110) of element (62) is sensed at the electrode (50), and is utilized to determine an estimated skew angle (126).

Abstract: A micromechanical element (123a) having a plurality of individual sensor elements (1?a, 2?a, 3?a, 23a), wherein a first physical measurement variable can be measured with a first individual sensor element (1?a, 2?a, 3?a, 23a) and a second physical measurement variable can be measured with a second individual sensor element (1?a, 2?a, 3?a, 23a). A component is provided having at least one control electronics unit (1?b, 2?b, 3?b) which can be connected electrically to the micromechanical element (123a); wherein the micromechanical element (123a) and the control electronics unit (1?b, 2?b, 3?b) are arranged in a common housing (123c). A method for producing the component is further described.

Abstract: Methods, structures, devices and systems are disclosed for implementing optomechanical sensors in various configurations by using two optically coupled optical resonators or cavities that can be move or deform relative to each other. The optical coupling between first and second optical cavities to produce an optical resonance that varies with a spacing between the first and second optical cavities and provide the basis for the optomechanical sensing. Compact and integrated optomechanical sensors can be constructed to provide sensitive measurements for a range of applications, including motion sensing and other sensing applications.

Abstract: A substrate for an inertial sensor system includes a plurality of electrode arrangements, each electrode arrangement including an acceleration sensor electrode and a pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode, where each electrode arrangement is capable of being overlaid by a corresponding plate of a shuttle such that the plate completely overlays the acceleration sensor electrode and partially overlays the pair of quadrature adjusting electrodes on opposite sides of the acceleration sensor electrode such that capacitive coupling between the plate and each of the quadrature adjusting electrodes is dependent upon the rotational position of the at least one shuttle while capacitive coupling between the plate and the acceleration sensor electrodes is substantially independent of the rotational position of the at least one shuttle.

Abstract: Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part respectively connecting the first and second mass bodies to the first frame; a second flexible part respectively connecting the first and second mass bodies to the first frame; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other; and a fourth flexible part connecting the first and second frames to each other.

Abstract: System for monitoring a structure includes at least one monitoring arrangement attached at a respective location to the structure, each monitoring arrangement having at least one inertial measurement unit (IMU) that measures acceleration and/or angular motion in any direction and rotation about any axis, a Global Navigation Satellite System (GNSS) receiver that determines its location, and a wireless communication system that transmits information derived from acceleration and/or angular motion measured by the IMU and a location determination by the GNSS receiver. Further, each monitoring arrangement may include a microphone, chemical sensor, a visual or IR light sensor, a radiation sensor, a magnetic sensor, and/or a strain sensor. As an alternative, the monitoring arrangements may include only IMUs or only GNSS receivers.

Abstract: A sensor includes: a first polymer sensor element generating a first voltage corresponding to a deformation thereof; a second polymer sensor element generating a second voltage corresponding to a deformation thereof; a fixing member fixing a first end of each of the first and the second polymer sensor elements while electrically insulating the first ends from each other; and a detector detecting an acceleration and an angular acceleration based on the first voltage derived from the first polymer sensor element and the second voltage derived from the second polymer sensor element.

Abstract: Method for determining the angular position of an electronic module fixed to the inner face of the tread of a tire fitted to a wheel of a vehicle. A sensor for measuring the radial acceleration of the wheel is integrated into the electronic module, measuring at least one measurement of the radial acceleration for determining the value of the period of revolution of the wheel, and detecting a variation of the radial acceleration representative of a position of the electronic module contacting the ground, the position of the electronic module in which the variation is detected is assigned the origin function of a frame of reference defined by the origin and a reference unit formed by an angular sector whose length is substantially shorter than the mean length of the footprint of the grounded tire, and the angular positions of the electronic module in the frame of reference are determined.

Abstract: A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

Abstract: In an inertial sensor, an acceleration sensor element section includes a first movable section configured to respond to acceleration applied thereto and a diagnosis electrode configured to displace the first movable section with an electrostatic force according to voltage application from a control circuit section. An angular velocity sensor element section includes a second movable section configured to respond to an angular velocity applied thereto and a driving electrode configured to displace the second movable section with an electrostatic force according to voltage application from the control circuit section. A voltage signal input to the driving electrode and a voltage signal input to the diagnosis electrode are the same voltage signal. The voltage signal input to the diagnosis electrode is a signal for detecting a mechanical failure. Carrier signal for detecting displacement of the first movable section has frequency higher than frequency of signal applied to the diagnosis electrode.

Abstract: An acceleration and angular velocity detection device includes a first oscillation element and a second oscillation element that are movable in a direction along a first axis and a direction along a second axis, an oscillating portion oscillating the first and second oscillation elements in opposite directions along the first axis, a first detection capacitance element and a second detection capacitance element whose capacitances change in a complementary way in accordance with a displacement of the first oscillation element, a third detection capacitance element and a fourth detection capacitance element whose capacitances change in a complementary way in accordance with a displacement of the second oscillation element, a charge amplifier having a fully differential structure, and a detecting portion detecting an acceleration and an angular velocity of a rotation.

Abstract: A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution.

Abstract: Embodiments can provide a system, a wheel localizer, a wheel localization device, a method or a computer program for locating a position of wheel. The system for locating the position of the wheel on the vehicle includes a detector for obtaining information related to a state of movement of the vehicle and a locator for determining the position of the wheel based on the information related to the state of movement of the vehicle.

Abstract: An embodiment of the invention provides an orientation detection method for a portable device. The method comprises acquiring an accelerometer data, determining whether the portable device is in a flat status, determining whether the portable device is in a stable status, and when the portable device is determined in both the flat status and the stable status, stopping acquiring the accelerometer data until receiving an enable signal.

Abstract: A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

Abstract: A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

Abstract: In a method for operating a sensor system including a substrate having a main plane of extension and an oscillating structure which is movable relative to the substrate, drive elements excite the oscillating structure to a torsional oscillation about an axis of oscillation running essentially perpendicular to the main plane of extension, first detection elements detect a first tilting movement of the oscillating structure about a first tilting axis essentially parallel to the main plane of extension, and further detection elements detect an angular acceleration of the substrate superposed to the torsional oscillation essentially about the axis of oscillation.

Abstract: A resonator element includes: three or more resonating arms, each of the resonating arms including; a lower electrode provided on a first surface of the resonating arm, a piezoelectric film formed on the lower electrode, an upper electrode formed on the piezoelectric film, a first wiring line coupled to the lower electrode, and a second wiring line coupled to the upper electrode; and a base to which the resonating arms are connected. In the resonator element, the resonating arm vibrates in a thickness direction of the resonating arm. The resonating arms adjacent to each other vibrate in opposite directions from each other. The first surface is opposed to a second surface in the thickness direction. The second wiring line is drawn out to the second surface through side surfaces of the resonating arm so as to surround the resonating arm.

Abstract: A sensor arrangement for determining an angle of rotation of at least one shaft when rotated around its axis of rotation, which arrangement has at least one acceleration sensor which is arranged on the at least one shaft. The invention also relates to a method for determining an angle of rotation of at least one shaft when rotated around its axis of rotation, the angle of rotation being determined by at least one acceleration sensor which is arranged on the at least one shaft.

Abstract: An angular velocity sensor comprising a fixed part, a weight coupled with the fixed part via a flexible part having a bending part, a first electrode disposed outside the bending part, and a second electrode disposed inside the bending part, in which the first electrode and the second electrode have an upper electrode and a lower electrode interposed by a piezoelectric layer, respectively, and the width of the first electrode is smaller than the width of the second electrode, and the difference of the amounts of electric charges generated at the first electrode and the second electrode can be suppressed thereby improving the accuracy of detection.

Abstract: In a method for determining the relative position, velocity, acceleration, and/or the rotation center of a body displaceable in a three dimensional space, at least twelve linear acceleration sensors are provided and in each case arranged on a position which is stationarily fixed with respect to the body. At least one acceleration measurement signal is captured by the linear acceleration sensors. A position, velocity, acceleration, and/or rotation center signal is generated for the body from the acceleration measurement signal and data describing the position and orientation of the linear acceleration sensors in the body-fixed coordinate system.

Abstract: Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.

Abstract: An angular velocity sensor of a horizontally located type, which can easily remove the translational acceleration influence thereto from the lateral direction, is provided. It includes a fixed portion fixed to the surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the surface place of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.

Abstract: An apparatus for acquiring image and location information includes an antenna comprising an element configured to receive signals for determining the location information, and an imaging device coupled to the antenna and configured to acquire the image information. A virtual perspective center of the imaging device is coincident with the element of the antenna.

Abstract: In a method for detecting a rolling motion of a wheel in a motor vehicle, a wheel acceleration variable characterizing a wheel acceleration is recorded using at least one sensor element, the wheel acceleration variable is scanned at various scanning points in time, and the presence of a rolling motion is detected with the aid of the scanned values. The wheel acceleration variable is scanned in a cycle, including at least three scanning points in time, of nonequidistant points in time.

Abstract: A sensorless controlling apparatus for controlling a brushless motor includes a speed calculator for calculating speed of a rotor ?, an angle calculator for calculating rotor angle ? at a predetermined time interval, and an angle controller for calculating correction angle ?? based on the current value of a d-axis current (d-axis current value id), thereby controlling the rotor angle ?. The angle calculator uses the correction angle ?? calculated by the angle controller, the speed ? calculated by the speed calculator, a predetermined time, and the rotor angle ? calculated by the angle calculator at a predetermined time to calculate the rotor angle at the predetermined time interval. Thus, the rotor angle ? calculated by the angle calculator is converged on the true angle of the rotor.

Abstract: Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.