Abstract: The present invention features a system and method for estimating body states of a vehicle. The system includes at least two sensors mounted to the vehicle. The sensors generate measured vehicle state signals corresponding to the dynamics of the vehicle. A signal adjuster transforms the measured vehicle states from a sensor coordinate system to a body coordinate system associated with the vehicle. A filter receives the transformed measured vehicle states from the signal adjuster and processes the measured signals into state estimates of the vehicle, such as, for example, the lateral velocity, yaw rate, roll angle, and roll rate of the vehicle.

Abstract: An angular velocity sensor includes a tuning-fork oscillator that includes a base portion, arm portions extending from the base portion, and a pair of driving electrodes that are provided to extend from the front face and the back face to a side face of at least one of the arm portions.

Abstract: A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

Abstract: An angular velocity sensor device includes a structure having an angular velocity detecting element and a vibration body formed thereon. The structure is mounted on the case and the angular velocity detecting element is isolated from external vibrations without the need for rubber and gel vibration dampening materials. Permanent magnets of the same polarity are mounted opposite one another on the structure and the case. The magnetic repulsion is generated between the structure and the case to cause the structure to be housed within the case in a levitated state.

Abstract: An accelerometer captures multiple frames of image information and uses the image information to generate acceleration data related to an object. In particular, multiple image frames are used to determine relative movement between a target and an image collection system. The relative movement between the target and the image collection system is tracked over time to generate acceleration data related to the object.

Abstract: Integrated micromachined inertial sensing unit with multi-axis angular rate and acceleration sensors and method of fabricating the same. Micromachined angular rate and acceleration sensors are integrated together with an application-specific integrated circuit (ASIC) in one compact package. The ASIC combines many separate functions required to operate multiple rate sensors and accelerometers into a single chip. The MEMS sensing elements and the ASIC are die-stacked, and electrically connected either directly using ball-grid-arrays or wirebonding. Through the use of a single package and single ASIC for multiple angular rate and acceleration sensors, significant reduction in cost is achieved.

Abstract: A walk-substituting cart is equipped with a detecting device, which can detect the existence and measure the inclination of a downward slope that the walk-substituting cart is moving on; when the cart is moving down a slope, the detecting device will send a signal to a power source of the walk-substituting cart so that the power source can automatically slow down; therefore, the rider won't have to continue operating the brake lever or the brake pedal of the walk-substituting cart a long time when the cart is moving down a slope.

Abstract: An angular velocity measuring device includes an angular having a mounting surface on which a velocity detection element, element-side drive electrodes and element-side detection electrodes are provided and a ground electrode is disposed between the drive electrodes and the detection electrodes. On the top surface of a multilayer substrate, substrate-side drive electrodes and substrate-side detection electrodes are provided and a ground electrode is disposed between the drive electrodes and the detection electrodes. The electrodes of the angular velocity detection element are connected to the electrodes of the multilayer substrate and the two ground electrodes are arranged to face each other. Furthermore, on the top surface of the multilayer substrate, drive wirings connected to the drive electrodes are provided and, inside the multilayer substrate, detection wirings connected to the detection electrodes are provided.

Abstract: Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.

Abstract: A method is provided for making packaged micro-devices each including a micro movable element, a first packaging member formed with a recess, and a second packaging member formed with another recess. The micro movable element has a movable part. In accordance with the method, a device wafer is prepared for forming a plurality of micromovable elements. A first packaging wafer, formed with a plurality of recesses corresponding in position to the movable parts of the respective movable elements, is bonded to one surface of the device wafer. A second packaging wafer, formed with a plurality of recesses, is bonded to the other surface of the device wafer. The resulting laminate assembly is cut into separate products.

Abstract: An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.

Abstract: A micromechanical rotation rate sensor has a seismic mass and driving devices which cause a driving vibration of the seismic mass in a first direction x. The rotation rate sensor has measuring devices which measure a deflection of the seismic mass in a second direction y, and generate a deflection signal. The deflection includes a measurement deflection caused by a Coriolis force and an interference deflection, the interference deflection being phase-shifted with respect to the measurement deflection by 90°. Compensation devices are provided at the seismic mass to reduce the interference deflection. Regulation devices are provided, to which the deflection signal is supplied as an input variable, which demodulate an interference deflection signal from the deflection signal, and which generate a compensation signal from the interference deflection signal, which is supplied to the compensation devices.

Abstract: An electronic control unit for a vehicle system that includes at least one acceleration sensor and at least one angular rate sensor for generating data concerning motion of the vehicle relative to vehicle reference axes.

Abstract: The seat belt system includes a locking device for locking the retractor having a sensor-weight type acceleration sensor for activating the locking device, a posture controller for controlling a posture of a sensor weight of the sensor-weight type acceleration sensor, an angle detection device for detecting a rotation angle of a backrest, and an interlocking member for allowing the angle detection device to interlock with the posture controller. The angle detection device allows the interlocking member to rotate in accordance with the reclining angle of the backrest. The posture controller F is controlled by means of the rotation of the interlocking member 11 so as to keep the sensor-weight type acceleration sensor horizontal when the reclining angle is within a range where a passenger wears the seat belt and not to interlock with the angle detection device K when the reclining angle is outside of the range.

Abstract: A detection circuit 30 has a unit 30a for inputting a signal to be detected by synchronized wave detection, a unit 30b for inputting a standard signal for the signal to be detected and a unit 30c for inputting an offset signal applied on the signal to be detected. The offset signal is superimposed on the signal to be detected, which is then subjected to synchronized wave detection based on the standard signal.

Abstract: Provided are a washing machine and a method of calculating the amount of laundry. The washing machine includes a spin basket which has an inner space to put laundry therein and is rotatably mounted about a rotation shaft in a rotational direction by driving a motor and includes: a rotation time calculating unit which calculates a time period when the spin basket rotates once; a pulse torque generating unit which supplies a predetermined current or voltage to the motor during the time period when the spin basket rotates once and generates a pulse torque through an output shaft from the motor; an acceleration measuring unit which measures rotation acceleration of the output shaft of the motor according to the pulse torque generated from the motor; and a weight calculating unit which calculates the weight of the laundry put in the inner space of the spin basket by the rotation acceleration.

Abstract: An acceleration sensor includes a weight and a vibrator that supports the weight at its center of gravity. When acceleration is applied to the weight, stress equivalent to the applied acceleration is generated in the vibrator. As the vibrator is arranged to support the weight at its center of gravity, a characteristic relationship is observed between the acceleration, such as angular acceleration or translational acceleration, and the size of electric charges and the polarity. By taking advantage of this relationship, different types of acceleration can be easily detected.

Abstract: The present invention provides an apparatus and method for measuring the angular rotation of a moving body. The apparatus comprises an upper sensor layer, a lower handle layer substantially parallel to the sensor layer, at least one dither frame formed of the upper sensor layer, the frame having a dither axis disposed substantially parallel to the upper sensor layer and the lower handle layer. The apparatus further comprises a first accelerometer formed of the upper sensor layer and having a first force sensing axis perpendicular to the dither axis for producing a first output signal indicative of the acceleration of the moving body along the first force sensing axis, the first accelerometer having a proof mass and at least one flexure connecting the proof mass to the dither frame such that the proof mass can be electrically rotated perpendicular to the dither axis.

Abstract: An apparatus and method for sensor architecture based on bulk machining of Silicon-On-Oxide wafers and fusion bonding that provides a symmetric, nearly all-silicon, hermetically sealed MEMS device having a sensor mechanism formed in an active semiconductor layer, and opposing silicon cover plates each having active layers bonded to opposite faces of the sensor mechanism. The mechanism is structured with sensor mechanical features structurally supported by at least one mechanism anchor. The active layers of the cover plates each include interior features structured to cooperate with the sensor mechanical features and an anchor structured to cooperate with the mechanism anchor. A handle layer of each cover plate includes a pit extending there through in alignment with the cover plate anchor. An unbroken rim of dielectric material forms a seal between the cover plate anchor and the pit and exposes an external surface of the cover plate anchor.

Abstract: A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching arm assembly. The other arm of each latching arm assembly is carried by, and radially extends from the mass to oppose a respective first arm. A shock event will cause the mass to move in a certain direction to an extent where one or more of the arm assemblies will latch. The latching may be determined by an electrical circuit connected to contact pads on the central post and on the anchor members.

Abstract: A process for forming a microelectromechanical system (MEMS) device by a deep reactive ion etching (DRIE) process during which a substrate overlying a cavity is etched to form trenches that breach the cavity to delineate suspended structures. A first general feature of the process is to define suspended structures with a DRIE process, such that the dimensions desired for the suspended structures are obtained. A second general feature is the proper location of specialized features, such as stiction bumps, vulnerable to erosion caused by the DRIE process. Yet another general feature is to control the environment surrounding suspended structures delineated by DRIE in order to obtain their desired dimensions. A significant problem identified and solved by the invention is the propensity for the DRIE process to etch certain suspended features at different rates.

Abstract: A computer input device and method used to input coordinates and three-dimensional graphical information into a computer. The device includes an acceleration sensor that has a fixed volume vessel containing a magnetic fluid. A non-magnetic inertial body is located in the magnetic fluid. Three magnetic field sources are located on three perpendicular axes where each magnetic field source has an output for connection to a computer. Changes in Q-factors and inductance of electromagnetic coils aligned on the X, Y, and Z-axis of the sensor are used to compute linear and angular acceleration components of any movement involving the sensor which permits three-dimensional coordinates to be provided in real-time.

Abstract: A dual capacitance accelerometer system includes two flexure plates coupled to the housing and defining a respective parallel flex axes. A fixed plate is adjacent to and in substantially parallel relation to the two flexure plates and is also coupled to the housing. The fixed plate and one of the flexure plates define a first distance and the fixed plate and the other flexure plate define a second distance. The first and second distances vary in response to acceleration forces acting upon the flexure plates.

Abstract: Disclosed are an apparatus and a method for measuring the speed of a moving body using an accelerometer. A value of earth's gravitational acceleration component is detected from the measurements from the accelerometer and is removed from the acceleration value. Then, the acceleration value, after removal of the earth's gravitational acceleration component, is used to obtain the speed of the moving body. The earth's gravitational acceleration component is detected using a movement average at a point of time when the speed of the moving body is to be measured. By using the magnitude of a difference between a value obtained by removing an x-axis movement average from an x-axis measurement from the two-axis accelerometer and another value obtained by removing a y-axis movement average from a y-axis measurement from the two-axis accelerometer, it is possible to regulate a window for calculating the movement average and a weight value to each of the measurements included in the window.

Abstract: A high aspect ratio microelectromechanical system device for measuring an applied force and having a suspension structure for compensating out-of-plane displacements of the device proof mass, wherein the device includes a frame; a proof mass coupled to the frame for in-plane motion along an axis of symmetry, the proof mass having first and second sets of spaced apart capacitor plates projected therefrom on each side of the axis of symmetry and oriented substantially crosswise to the axis of symmetry; and third and fourth sets of spaced apart capacitor plates oriented substantially crosswise to the axis of symmetry of the proof mass and intermeshed respectively with the first and second sets of capacitor plates, the third and fourth sets of capacitor plates being suspended for motion relative to the frame about respective first and second axes of motion oriented substantially parallel with the axis of symmetry of the proof mass.

Abstract: A sensor for use in an interactive electronic device. The sensor comprises a base member having at least one recess formed therein which is partially defined by a peripheral wall thereof. Disposed within the peripheral wall of the base member is at least one switch. Also disposed within the recess is a trigger ball which is freely movable about the peripheral wall of the base member. The sensor is operative to generate at least two different states corresponding to respective positions of the sensor relative to a reference plane. The movement of the sensor relative to the reference plane facilitates the movement of the trigger ball within the recess, with one state being generated when the trigger ball is in contact with the switch and another state being generated when the trigger ball is not in contact with the switch.

Abstract: A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least one integrated electrode tip arranged to be integrated with the proof mass body, and at least one external electrode tip arranged externally to the proof mass body and suspended by micro-mechanical beams to permit an external electrode movement, the at least one external electrode tip further arranged to be in a close proximity to the at least one integrated electrode tip to permit a flow of the tunneling current between the at least one external electrode tip and the at least one integrated electrode tip, in which the displacement of the proof mass causes a change in the tunneling current.

Abstract: An accelerometer includes an inertial platform maintaining an attitude in response to a platform stabilizing controller signal and defining a spin axis and a reference plane. An accelerometer, coupled to the inertial platform a distance from the spin axis, defines a flex axis, which is perpendicular to the stability axis. The accelerometer generates an accelerometer signal in response to acceleration of the accelerometer. A second accelerometer defines a second flex axis also perpendicular to the stability axis, and is also coupled to the inertial platform a distance from the spin axis. The second accelerometer generates a second accelerometer signal in response to acceleration of the second accelerometer. A controller, including an angular acceleration signal generator, receives the first accelerometer signal and the second accelerometer signal and generates an angular acceleration signal from a difference in amplitudes between the first accelerometer signal and the second accelerometer signal.

Abstract: In an acceleration sensor including a vibrator subject to a sliding vibration and a weight section connected to the vibrator and supported at a position different from the position of the center of gravity of an assembly of the vibrator and weight section, for detecting an angular moment about the support point, which is produced at the weight section by application of acceleration, as sliding vibration with the vibrator, the acceleration sensor includes a rectangular substrate having a plurality of electrodes electrically connected to the vibrator, a formation pattern of the plurality of electrodes is symmetrical about an axis parallel to at least one side of the substrate, and the plurality of electrodes have substantially equal thickness. Since the formation pattern of the electrodes on the substrate is symmetrical and the respective electrodes have substantially equal thickness, the vibrator that is bonded to this substrate does not incline and the detection sensitivity does not vary.

Abstract: An electronic control unit for a vehicle system that includes at least one acceleration sensor and at least one angular rate sensor for generating data concerning motion of the vehicle relative to vehicle reference axes.

Abstract: A system for tracking the motion of an object relative to a moving reference frame includes a first inertial sensor mounted on the tracked object; a second inertial sensor mounted on the moving reference frame; a third inertial sensor mounted on the moving reference frame and spaced apart from the second inertial sensor; and an element coupled to said first and second and third inertial sensors and configured to determine a position of the object relative to the moving reference frame based on the signals from the first and second and third inertial sensor.

Abstract: A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least one integrated electrode tip arranged to be integrated with the proof mass body, and at least one external electrode tip arranged externally to the proof mass body and suspended by micro-mechanical beams to permit an external electrode movement, the at least one external electrode tip further arranged to be in a close proximity to the at least one integrated electrode tip to permit a flow of the tunneling current between the at least one external electrode tip and the at least one integrated electrode tip, in which the displacement of the proof mass causes a change in the tunneling current.

Abstract: An angular velocity sensor structured so as to reduce the application of external vibrations to tuning fork as described below. Supporting plate having plate having placement part for placing first rubber body over the top face thereof is placed above the top face of second base via at least two supports so as to provide space between the top face of second base and the supporting plate. First cover and fist base housing tuning fork are placed on first rubber body. Further placed on first cover is second rubber body. The top face of supporting plate and the inner ceiling of second cover compress and hold first rubber body and second rubber body therein.

Abstract: An inertial sensor includes a plurality of sense elements disposed upon a silicon wafer. Each of the sense elements senses a different inertia range. The sense elements are electrically connected to a common signal conditioning circuit that generates an output signal for each of the sense elements. The signal conditioning circuit has an output that is electrically connected to at least one control system and provides output signals in different ranges to the control system.

Abstract: The present invention provides an apparatus and method for measuring the angular rotation of a moving body. The apparatus comprises an upper sensor layer, a lower handle layer substantially parallel to the sensor layer, at least one dither frame formed of the upper sensor layer, the frame having a dither axis disposed substantially parallel to the upper sensor layer and the lower handle layer. The apparatus further comprises a first accelerometer formed of the upper sensor layer and having a first force sensing axis perpendicular to the dither axis for producing a first output signal indicative of the acceleration of the moving body along the first force sensing axis, the first accelerometer having a proof mass and at least one flexure connecting the proof mass to the dither frame such that the proof mass can be electrically rotated perpendicular to the dither axis.

Abstract: A balanced angular accelerometer is provided having a substrate, a fixed electrode with a plurality of fixed capacitive plates, and a rotational inertia mass with a central opening and substantially suspended over a cavity and including a plurality of movable capacitive plates arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates. The accelerometer has a central member and an outer member fixed to the substrate. According to one embodiment, a plurality of inner support arms extend between the central member and the inertia mass and a plurality of outer support arms extend between the inertia mass and the outer member to support the mass over the cavity. According to another embodiment, one or more cut out apertures are formed in the inertia mass to compensate for a channel and signal line so as to balance the inertia mass about the center of the inertia mass.

Abstract: An accelerometer design is described. It operates by measuring a change in capacitance when one plate is fixed and one is mobile (free to accelerate). Unlike prior art designs where such changes are caused by variations in the plate separation distance, in the design of the present invention the plate separation distance is fixed, it being the effective plate area that changes with acceleration. A key feature is that the basic unit is a pair of capacitors. The fixed plates in each case are at the same relative height but the mobile plates are offset relative to the fixed plates, one mobile plate somewhat higher than its fixed plate with the other mobile plate being somewhat lower. Then, when the mobile plates move (in the same direction), one capacitor increases in value while the other decreases by the same amount. This differential design renders the device insensitive to sources of systematic error such as temperature changes. A process for manufacturing the design is described.

Abstract: Providing a small-sized acceleration sensor including a vibrator formed of a piezoelectric single crystal, and a weight section connected to the vibrator and supported at a position different from the position of the center of gravity of an assembly of the vibrator and weight section. Two divided electrodes used for detecting an electrical signal are formed on the vibrator and connected to two wiring patterns of the weight section which also functions as a signal detecting substrate, with an anisotropic conductive adhesive. When an acceleration in one direction is applied, an angular moment exerted in the weight section is detected as sliding vibration by the vibrator, and an electrical signal corresponding to the acceleration is output from the electrodes through the wiring patterns.

Abstract: An oscillatory gyroscope is described with decoupled drive and sense oscillators and reduced cross-axis sensitivity. The gyroscope is fabricated using a plasma micromachining process on standard silicon wafers. The electrical isolation of the drive and sense functions of the gyroscope, contained within the same micromechanical element, reduce cross-coupling while obtaining high inertial mass and high sensitivity.

Abstract: A balanced angular accelerometer is provided having a substrate, a fixed electrode with a plurality of fixed capacitive plates, and a rotational inertia mass with a central opening and substantially suspended over a cavity and including a plurality of movable capacitive plates arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates. The accelerometer has a central member and an outer member fixed to the substrate. According to one embodiment, a plurality of inner support arms extend between the central member and the inertia mass and a plurality of outer support arms extend between the inertia mass and the outer member to support the mass over the cavity. According to another embodiment, one or more cut out apertures are formed in the inertia mass to compensate for a channel and signal line so as to balance the inertia mass about the center of the inertia mass.

Abstract: An accelerometer design is described. It operates by measuring a change in capacitance when one plate is fixed and one is mobile (free to accelerate). Unlike prior art designs where such changes are caused by variations in the plate separation distance, in the design of the present invention the plate separation distance is fixed, it being the effective plate area that changes with acceleration. A key feature is that the basic unit is a pair of capacitors. The fixed plates in each case are at the same relative height but the mobile plates are offset relative to the fixed plates, one mobile plate somewhat higher than its fixed plate with the other mobile plate being somewhat lower. Then, when the mobile plates move (in the same direction), one capacitor increases in value while the other decreases by the same amount. This differential design renders the device insensitive to sources of systematic error such as temperature changes. A process for manufacturing the design is described.

Abstract: The present invention is an acceleration sensor chip comprising a support frame part and a sensor structure. The sensor structure includes a displaceable weight part with a magnetic thin film formed on the surface and at least one beam part for connecting the weight part to the frame part. The support frame part and sensor structure are formed on a silicon substrate through an insulating layer. The insulating layer between the sensor structure and the silicon substrate is removed and a coil is formed to surround the weight part on the support frame part at the periphery of the weight part. In some embodiments, the accelerator sensor chip comprises a plurality of such sensor structures.

Abstract: A micromechanical angular-acceleration sensor having a substrate, which has an anchoring device provided on the substrate. The sensor has a ring-shaped inertial mass joined to the anchoring device by a torsion-spring device such that the anchoring device is essentially located in the center of the ring. The ring-shaped inertial mass can then be elastically displaced from its resting position, about at least one rotational axis, by the angular acceleration to be detected. The sensor has a displaceable, first capacitor-plate device attached to the ring-shaped inertial mass, and a stationary, second capacitor-plate device attached to the substrate. The first and the second capacitor-plate devices are designed as a differential-capacitor device for detecting one of the parameters indicating the angular acceleration about the rotational axis.

Abstract: A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. Each sensor is formed from two accelerometers having their sensing axes canted at an angle with respect to the plane of the substrate and further being directed in opposite directions. The rate sensing axes thus lie along three orthogonal axes.

Abstract: An inertial sensor having an inner stator and an outer rotor that are electrostatically coupled together by mobile sensor arms and fixed sensor arms. The rotor is connected to a calibration microactuator comprising four sets of actuator elements arranged one for each quadrant of the inertial sensor. There are two actuators making up each set. The actuators are identical to each other, are angularly equidistant, and each comprises a mobile actuator arm connected to the rotor and bearing a plurality of mobile actuator electrodes, and a pair of fixed actuator arms which are set on opposite sides with respect to the corresponding mobile actuator arm and bear a plurality of fixed actuator electrodes. The mobile actuator electrodes and fixed actuator electrodes are connected to a driving unit which biases them so as to cause a preset motion of the rotor, the motion being detected by a sensing unit connected to the fixed sensor arms.

Abstract: An electrostatic capacitance type acceleration sensor, an electrostatic capacitance type angular acceleration sensor and an electrostatic actuator are provided each having a low probability of damage to electrodes even when acceleration is applied excessively. A movable electrode is provided instead of a fixed electrode conventionally used in the background art to include two movable electrodes. The rigidities of beams (3) and (6) of a first movable electrode (4) and a second movable electrode (7) are controlled so that the amounts of movement of the first movable electrode (4) and the second movable electrode (7) are different from each other during application of acceleration. Acceleration is detected by the change in capacitance between the first movable electrode (4) and the second movable electrode (7), to thereby realize an electrostatic capacitance type acceleration sensor having a low probability of damage to the electrodes even when acceleration is applied excessively.

Abstract: A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. Each sensor is formed from two accelerometers having their sensing axes canted at an angle with respect to the plane of the substrate and further being directed in opposite directions. The rate sensing axes thus lie along three orthogonal axes.