Radiant Energy Sensor (e.g., Optical, Charged, Or Radioactive Particle) Patents (Class 73/514.19)
  • Patent number: 11372019
    Abstract: An optomechanical device optomechanical device for stabilizing an optomechanical resonator comprising a circuit configured to generate a first optical signal and a second optical signal, modulate the first optical signal, modulate the second optical signal, and combine the first optical signal and the second optical signal into a combined optical signal to direct the combined optical signal into an assembly. An inner sidewall of a first beam structure of the assembly has a first inner spatial frequency correspond to a second inner spatial frequency of an inner sidewall of a second beam structure of the assembly and an outer sidewall of the first beam structure has a first outer spatial frequency correspond to a second outer spatial frequency of an outer sidewall of the second beam structure.
    Type: Grant
    Filed: August 13, 2019
    Date of Patent: June 28, 2022
    Assignee: Honeywell International Inc.
    Inventors: Neil Krueger, Chad Fertig, Matthew Puckett, Arthur Savchenko, Steven Tin, Joshua Dorr
  • Patent number: 11164697
    Abstract: A coil-integrated-type yoke for realizing a deflector that can accurately deflect an orbit of an electron beam and a manufacturing method thereof are provided. There is provided a manufacturing method of a coil-integrated-type yoke, the manufacturing method including: a step of sequentially inserting a molding agent, a coil, and a spacer into a groove heading from a first surface toward a second surface of the yoke; and a step of polishing the first surface of the yoke and the spacer together.
    Type: Grant
    Filed: April 4, 2018
    Date of Patent: November 2, 2021
    Assignee: EBARA CORPORATION
    Inventors: Keisuke Matsushima, Tsutomu Karimata
  • Patent number: 10401432
    Abstract: A rotary switch state detection device includes a magnetic field generating unit, a gravity sensing unit, a magnetic force sensing unit and a processing unit. The magnetic field generating unit generates a magnetic field. The magnetic force sensing unit and the gravity sensing unit are disposed at a rotary switch to detect a gravity value and a magnetic force value of the magnetic field and generate a gravity strength signal and magnetic field strength signal, respectively. The processing unit is connected to the gravity sensing unit and the magnetic force sensing unit to calculate a gravity value variation and a magnetic force value variation and thereby precisely locate a rotation head of the rotary switch upon completion of rotation thereof.
    Type: Grant
    Filed: October 27, 2016
    Date of Patent: September 3, 2019
    Assignee: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
    Inventors: Yu-Shan Lin, Jun-Liang Zhu, Tung-Jung Hsu, Chao-Tse Hong
  • Patent number: 9525925
    Abstract: Methods and apparatuses are provided wherein a sensor which comprises at least two electrodes and a movable part is alternately biased with at least two different voltages.
    Type: Grant
    Filed: February 25, 2011
    Date of Patent: December 20, 2016
    Assignee: Infineon Technologies AG
    Inventors: Christoph Bernhard Wurzinger, Jose Luis Ceballos
  • Patent number: 8783106
    Abstract: An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.
    Type: Grant
    Filed: December 13, 2011
    Date of Patent: July 22, 2014
    Assignee: Sandia Corporation
    Inventors: Gregory N. Nielson, Eric Langlois, Michael Baker, Murat Okandan, Robert Anderson
  • Patent number: 8748851
    Abstract: An aging apparatus including a pulse laser, a beam expansion assembly, and a platform configured to carry an object is provided. The pulse laser transmits a first beam to the beam expansion assembly. The beam expansion assembly expands the first beam to a second beam and projects the second beam onto the object.
    Type: Grant
    Filed: November 11, 2012
    Date of Patent: June 10, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Yu-Tai Li, Yu-Hsien Lee, Hsien-Chen Ma, Chen-Wei Chen, Hung-Sen Wu
  • Patent number: 7743657
    Abstract: An angular velocity sensor device includes a structure having an angular velocity detecting element and a vibration body formed thereon. The structure is mounted on the case and the angular velocity detecting element is isolated from external vibrations without the need for rubber and gel vibration dampening materials. Permanent magnets of the same polarity are mounted opposite one another on the structure and the case. The magnetic repulsion is generated between the structure and the case to cause the structure to be housed within the case in a levitated state.
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: June 29, 2010
    Assignee: DENSO CORPORATION
    Inventor: Takeshi Ito
  • Patent number: 7516659
    Abstract: A sensor having a mass that moves relative to a structure is disclosed. A spring mechanism applies a restoring force to the mass when the mass moves from an equilibrium position with respect to the structure. A first code scale is attached to the mass and viewed by a first imaging system that is fixed with respect to the structure. The first imaging system forms images of the first code scale that are used by a controller to provide an indication of the relative position of the mass with respect to the structure. The mass can be located in a sealed chamber in the structure that has a transparent liquid through which the mass moves. The first imaging can view the first code scale from outside the chamber through a transparent window in the chamber.
    Type: Grant
    Filed: May 11, 2006
    Date of Patent: April 14, 2009
    Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
    Inventor: Muniandy Murelitharan
  • Patent number: 7461553
    Abstract: An oversampling electromechanical modulator, including a micro-electromechanical sensor which has a first sensing capacitance and a second sensing capacitance and supplies an analog quantity correlated to the first sensing capacitance and to the second sensing capacitance; a converter stage, which supplies a first numeric signal and a second numeric signal that are correlated to the analog quantity; and a first feedback control circuit for controlling the micro-electromechanical sensor, which supplies an electrical actuation quantity correlated to the second numeric signal.
    Type: Grant
    Filed: December 5, 2006
    Date of Patent: December 9, 2008
    Assignee: STMicroelectronics S.r.l.
    Inventors: Ernesto Lasalandra, Fabio Pasolini, Valeria Greco
  • Patent number: 7347096
    Abstract: A force-balance accelerometer having a pick-off coil responsive to displacement of a seismic mass from a balance position for providing an output corresponding to the displacement, includes a digital signal processor including tow pulse width modulation generators for converting the output of the pick-up coil to a digital signal, and a torque coil responsive to the digital signal for rebalancing the seismic mass by restoring the mass to the balance position. The processor outputs the digital signal as first and second PWM signals, which control the digital signal.
    Type: Grant
    Filed: July 25, 2005
    Date of Patent: March 25, 2008
    Inventor: Nebojsa Vrcelj
  • Patent number: 7293459
    Abstract: A system includes a support, a pendular element, an elastic restraint, an image sensor, and a processing system. The elastic restraint couples the pendular element to the support and applies to the pendular element a restraining force that opposes movement of the pendular element in at least a first direction. The image sensor captures images of the pendular element. The processing system determines one or more movement measures describing movement of the support from comparisons of ones of the images captured by the image sensor. In another aspect, a pendular element is elastically coupled to a support. A restraining force that opposes movement of the pendular element in at least a first direction is applied to the pendular element. Images of the pendular element are captured. One or more movement measures describing movement of the support are determined from comparisons of ones of the captured images.
    Type: Grant
    Filed: September 22, 2005
    Date of Patent: November 13, 2007
    Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
    Inventor: Akihiro Machida
  • Publication number: 20070175277
    Abstract: An angular velocity sensor device includes a structure having an angular velocity detecting element and a vibration body formed thereon. The structure is mounted on the case and the angular velocity detecting element is isolated from external vibrations without the need for rubber and gel vibration dampening materials. Permanent magnets of the same polarity are mounted opposite one another on the structure and the case. The magnetic repulsion is generated between the structure and the case to cause the structure to be housed within the case in a levitated state.
    Type: Application
    Filed: December 21, 2006
    Publication date: August 2, 2007
    Applicant: DENSO CORPORATION
    Inventor: Takeshi Ito
  • Patent number: 7232989
    Abstract: A method and system for generating modulated optical vortices. Optical vortices can be used for a variety of applications, such as applying controlled torque or controlled force patterns to objects from a few nanometers to hundreds of micrometers in size. Numerous optical modes of optical vortices can be created to meet virtually any desired need in manipulating of objects. Furthermore, one can modify the wavefront of a beam of light in a specific way to create a new type of optical trap useful for manipulating mesoscopic materials. When the modified beam is brought to a focus, the resulting optical trap exerts forces transverse to the optical axis that can be used to transport mesoscopic matter such as nanoclusters, colloidal particles, and biological cells.
    Type: Grant
    Filed: September 18, 2006
    Date of Patent: June 19, 2007
    Assignee: University of Chicago
    Inventors: David G. Grier, Jennifer E. Curtis
  • Patent number: 7155979
    Abstract: An oversampling electromechanical modulator, including a micro-electromechanical sensor which has a first sensing capacitance and a second sensing capacitance and supplies an analog quantity correlated to the first sensing capacitance and to the second sensing capacitance; a converter stage, which supplies a first numeric signal and a second numeric signal that are correlated to the analog quantity; and a first feedback control circuit for controlling the micro-electromechanical sensor, which supplies an electrical actuation quantity correlated to the second numeric signal.
    Type: Grant
    Filed: July 16, 2002
    Date of Patent: January 2, 2007
    Assignee: STMicroelectronics S.r.l.
    Inventors: Ernesto Lasalandra, Fabio Pasolini, Valeria Greco
  • Patent number: 7109473
    Abstract: A method and system for generating modulated optical vortices. Optical vortices can be used for a variety of applications, such as applying controlled torque or controlled force patterns to objects from a few nanometers to hundreds of micrometers in size. Numerous optical modes of optical vortices can be created to meet virtually any desired need in manipulating of objects. Furthermore, one can modify the wavefront of a beam of light in a specific way to create a new type of optical trap useful for manipulating mesoscopic materials. When the modified beam is brought to a focus, the resulting optical trap exerts forces transverse to the optical axis that can be used to transport mesoscopic matter such as nanoclusters, colloidal particles, and biological cells.
    Type: Grant
    Filed: September 10, 2003
    Date of Patent: September 19, 2006
    Assignee: University of Chicago
    Inventors: David G. Grier, Jennifer E. Curtis
  • Patent number: 7035698
    Abstract: A system including a user input device for controlling a position of medical equipment is described. In an example embodiment, the user input device is configured to be coupled to the medical equipment and is responsive to an operator input representation of a desired movement of the equipment. A processor determines a direction in which the operator desires the equipment to move based on a device output.
    Type: Grant
    Filed: July 23, 2004
    Date of Patent: April 25, 2006
    Assignee: General Electric Company
    Inventors: Mark A. Johnson, Luc Mauvarin
  • Patent number: 6898970
    Abstract: An extremely sensitive accelerometer suitable for use in extreme temperatures such as those encountered during space travel is formed by levitating a magnet in a box or sphere composed of diamagnetic material such as pyrolytic carbon, and a means for measuring the position of the magnet within the enclosure is provided so that over time, the position of the magnet can be monitored. Knowing the mass of the suspended magnet, the displacement over time of the magnetic can be used to calculate acceleration, which can then be used to determine position of a space vehicle.
    Type: Grant
    Filed: May 7, 2004
    Date of Patent: May 31, 2005
    Assignee: International Business Machines Corporation
    Inventor: Viktors Berstis
  • Patent number: 6867411
    Abstract: An optical accelerometer for detecting an acceleration of a proof mass includes a source of optical radiation for generating a pair of beams of output radiation. The pair of beams of optical radiation exerts radiation pressure on the proof mass, so as to maintain the proof mass in an equilibrium position along a sensing axis. A position detecting system detects a displacement from the equilibrium position of the proof mass along the sensing axis in response to an inertial force acting on the proof mass. A modulator adjusts the intensity of each one of the pair of beams, so as to restore the proof mass to the equilibrium position along the sensing axis. The difference in the adjusted intensities of each one of the pair of beams is representative of the acceleration, resulting from the inertial force, of the proof mass along the sensing axis.
    Type: Grant
    Filed: October 25, 2001
    Date of Patent: March 15, 2005
    Assignee: The Charles Stark Draper Laboratory, Inc.
    Inventors: William P. Kelleher, Stephen P. Smith, Richard E. Stoner
  • Patent number: 6832518
    Abstract: A mass is levitated with respect to a base, at least one of which is comprised of a diamagnetic material, with the levitated mass also having a permanent magnetic property. A second permanent magnet is optionally configured such that it attracts the levitation mass away from the base to overcome gravitational force on the mass, thereby suspending the mass over the surface of the base. The mass is contained in a nonmagnetic, non-shielding and optionally optically-transparent housing so as to limit its excursion within a range of levitation positions. A position measurement means such as a laser interferometer, capacitance detector, or pickup coil is configured to measure positional deviations of the mass in response to incident pressure wave, the output of which being an electronic signal representing the pressure wave.
    Type: Grant
    Filed: June 26, 2003
    Date of Patent: December 21, 2004
    Assignee: International Business Machines Corporation
    Inventor: Viktors Berstis
  • Patent number: 6723979
    Abstract: A roll arming sensor is provided for determining an arming signal for use on a vehicle for rollover detection. The roll arming sensor includes a light source for generating a light beam and a receiver for detecting the light beam. Disposed substantially horizontal between the light source and receiver are first and second cylindrical members, both oriented substantially parallel to the longitudinal axis of the vehicle. The first and second cylindrical members each have a window extending therethrough for passing the light beam during normal vehicle travel. Each of the first and second cylindrical members are movable to a second position upon experiencing an armed condition, such as a roll event, to prevent the optical beam from passing to the receiver, thereby generating an arming signal for use with a rollover sensor.
    Type: Grant
    Filed: February 27, 2001
    Date of Patent: April 20, 2004
    Assignee: Delphi Technologies, Inc
    Inventor: John L. Kastura
  • Patent number: 6664534
    Abstract: A tilt sensing device and method for its operation, the device being of the type comprising a) a housing, b) a radiation transmitter and a radiation receiver arranged in or at the housing to form a beam path therebetween, c) a radiation obstructing or deflecting body movable in relation to the beam path and d) a rest surface for the body defining at least two possible rest positions for the body relative the beam path between which rest positions the body can move by gravity at defined tilt angles for the device and which rest positions are selected to give a detectable output difference from the radiation receiver depending on which of the rest positions is occupied by the body. The size of the movable body, expressed as the diameter of a sphere of corresponding volume, is less than 10 mm. Operation of the device includes monitoring the output from the receiver to obtain an amplitude versus time function and processing data from the function to obtain a modified signal.
    Type: Grant
    Filed: March 28, 2002
    Date of Patent: December 16, 2003
    Assignee: Pharmacia AB
    Inventors: Birger Hjertman, Anders Holte
  • Patent number: 6606908
    Abstract: An inertial sensor includes an inertial reference for determining the attitude and position of a satellite or satellite parts. A test mass is situated in a space which is essentially free of electric and magnetic fields and is enclosed by a housing, and optical measuring sections are set up between reference elements on the housing and on the test mass, for determining the attitude and/or position of the test mass relative to the reference elements on the housing. A measuring arrangement is situated outside the housing for the optical measuring sections. The optical measuring sections are constructed as optical interferometric measuring elements; and the attitude and position of the test mass can be adjusted by means of the pressures of light exerted on the optical interferometric measuring sections upon the test mass.
    Type: Grant
    Filed: June 28, 2001
    Date of Patent: August 19, 2003
    Assignee: Astrium GmbH
    Inventors: Ulrich Johann, Hartmut Joerck
  • Patent number: 6583374
    Abstract: A microelectricalmechanical system (MEMS) digital isolator may be created in which an actuator such as an electrostatic motor drives a beam against a predefined force set, for example, by another electrostatic motor. When the threshold of the opposing force is overcome, motion of the beam may be sensed by a sensor also attached to the beam. The beam itself is electrically isolated between the locations of the actuator and the sensor. The structure may be incorporated into integrated circuits to provide on-chip isolation.
    Type: Grant
    Filed: February 20, 2001
    Date of Patent: June 24, 2003
    Assignee: Rockwell Automation Technologies, Inc.
    Inventors: Michael J. Knieser, Richard D. Harris, Robert J. Kretschmann, Ernst H. Dummermuth, Patrick C. Herbert