Optical Sensor Patents (Class 73/514.26)
  • Patent number: 11307034
    Abstract: A gyroscope, an electronic device and a method of detecting an angular velocity. The gyroscope includes: a photoelectric detector and a light source, wherein the light source is movable relative to the photoelectric detector, and light emitted by the light source is able to be irradiated onto the photoelectric detector.
    Type: Grant
    Filed: September 4, 2018
    Date of Patent: April 19, 2022
    Assignees: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Ying Wang, Tien Lun Ting, Xue Cao, Peizhi Cai, Hao Liu, Chuncheng Che, Hailin Xue, Xibin Shao, Jie Wu
  • Patent number: 11243224
    Abstract: The invention relates to a device for detecting acceleration. The device contains: a frame; a mass; a lever arm connected to the mass, wherein the mass is provided at a first lever position; an optical fiber having a fiber-optic sensor; and a compensation element for disturbance variables, wherein the compensation element for disturbance variables is connected to the lever arm or the mass and wherein the compensation element for disturbance variables is connected to the frame.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: February 8, 2022
    Assignee: FOS4X GMBH
    Inventors: Sascha Kienitz, Markus Schmid, Manuel Mai
  • Patent number: 10768197
    Abstract: An accelerometer device (100) comprises a former (118) and an optical fiber (120) wound around the former. The winding of optical fiber (120) has a sensing portion (126) that is free to move in relation to a direction of desired sensitivity (128). A movable element (106) is disposed opposite the sensing portion (126) of the optical fiber (120), the movable element (106) being translatable so as to urge against the sensing portion (126) of the optical fiber (120) from a position external to the winding of the optical fiber (120) in order to vary a length of the optical fiber (120). The variation in the length of the optical fiber (120) caused by the moveable element (106) is indicative of an acceleration in the direction of desired sensitivity (128).
    Type: Grant
    Filed: November 2, 2015
    Date of Patent: September 8, 2020
    Assignee: SCHLUMBERGER TECHNOLOGY CORPORATION
    Inventor: Daniele Molteni
  • Patent number: 10677594
    Abstract: A microelectromechanical systems (MEMS) device comprises an optical directional coupler comprising: a first waveguide having a first and a second end, wherein a light beam is introduced into the first end; a second waveguide having a third and a fourth end, wherein the light beam is evanescently coupled between the two waveguides in the central region; a first photodetector to detect first optical power in the light beam at the second end; and a second photodetector to detect second optical power in the light beam at the fourth end; a vibrating proof mass adjacent to the coupler in a first direction from the coupler, wherein when inertial forces are applied to the MEMS device in a second direction, the proof mass moves in the first direction; a processor to determine the displacement of the proof mass from the coupler as a function of the first and the second optical power.
    Type: Grant
    Filed: January 22, 2018
    Date of Patent: June 9, 2020
    Assignee: Honeywell International Inc.
    Inventors: Jan Scheirich, Tomas Neuzil, Martin Vagner
  • Patent number: 10651424
    Abstract: Control of the emission characteristics of a light source in a light field display poses a significant benefit in the resulting 3D display quality for current and future technologies. A design system for microcavity OLEDs of any wavelength is detailed, which combines theoretical background with FDTD optimizations, permitting microcavity design of any OLED configuration. The resulting output profiles for microcavity OLEDs designed and fabricated with this method are compared to standard OLEDs and provide a reduction in spectral bandwidth, and a decrease in angular output.
    Type: Grant
    Filed: May 10, 2019
    Date of Patent: May 12, 2020
    Assignee: Avalon Holographics Inc.
    Inventors: Jordan Peckham, Jennifer Campbell, Jiaqi Cheng
  • Patent number: 10422321
    Abstract: A method for monitoring a wind turbine is described. The method comprises measuring acceleration by means of a fiber-optic acceleration sensor in a rotor blade of the wind turbine; opto-electronically converting an acceleration signal of the fiber-optic acceleration sensor; and filtering the opto-electronically converted acceleration signal by means of an analog anti-aliasing filter.
    Type: Grant
    Filed: December 1, 2015
    Date of Patent: September 24, 2019
    Assignee: fos4X GmbH
    Inventors: Mathias Müller, Matthias Schubert
  • Patent number: 10377625
    Abstract: An optical device formed of a mirror wafer, a cap wafer, and a glass wafer. The mirror wafer includes a first layer of electrically conductive material, a second layer of electrically conductive material, and a third layer of electrically insulating material between the first layer and the second layer. A mirror element is formed of the second layer of the mirror wafer, and has a reflective surface in the bottom of a cavity opened into at least the first layer. A good optical quality planar glass wafer can be used to enclose the mirror element when the mirror wafer, cap wafer, and glass wafer are bonded to each other.
    Type: Grant
    Filed: April 11, 2017
    Date of Patent: August 13, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Altti Torkkeli, Tapani Laaksonen
  • Patent number: 10340480
    Abstract: Control of the emission characteristics of a light source in a light field display poses a significant benefit in the resulting 3D display quality for current and future technologies. A design system for microcavity OLEDs of any wavelength is detailed, which combines theoretical background with FDTD optimizations, permitting microcavity design of any OLED configuration. The resulting output profiles for microcavity OLEDs designed and fabricated with this method are compared to standard OLEDs and provide a reduction in spectral bandwidth, and a decrease in angular output.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: July 2, 2019
    Assignee: Avalon Holographics Inc.
    Inventor: Jordan Peckham
  • Patent number: 10283930
    Abstract: The invention relates to methods of producing a cap substrate, to methods of producing a packaged radiation-emitting device at the wafer level, and to a radiation-emitting device. By producing a cap substrate, providing a device substrate in the form of a wafer including a multitude of radiation-emitting devices, arranging the substrates one above the other such that the substrates are bonded along an intermediate bonding frame, and dicing the packaged radiation-emitting devices, improved packaged radiation-emitting devices are provided which are advantageously arranged within a cavity free from organics and can be examined, still at the wafer level, in terms of their functionalities in a simplified manner prior to being diced.
    Type: Grant
    Filed: July 26, 2017
    Date of Patent: May 7, 2019
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Wolfgang Reinert, Hans Joachim Quenzer
  • Patent number: 10069494
    Abstract: A proximity sensor for detecting non-contact detection of a target using a fiber optic strain sensor and a system for operating multiple such proximity sensors is disclosed. The proximity sensor includes an optic fiber that has an optic fiber strain sensor that is coupled to a mass that moves in response to the target. The mass can be a magnet that moves when a ferrous target is within the magnetic field of the magnet causing the magnet to move and apply strain to the optic fiber strain sensor. The optic strain sensor can include periodic variation in the refractive index of the optic fiber, such as a fiber Bragg grating. The proximity sensor can include a second fiber optic sensor that is sensitive to temperature or a second fiber optic strain sensor coupled to a second magnet that operates in opposition to the first magnet. A system coupling multiple proximity sensors can include an interrogator that has an optical power source and a detector, each coupled to a processor.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: September 4, 2018
    Assignee: Safran Landing Systems Canada Inc./Safran Systemes D'Atterrissage Canada Inc.
    Inventor: Robert Kyle Schmidt
  • Patent number: 9990266
    Abstract: Embodiments are directed to capturing data associated with an occurrence of an event via a battery-powered recorder, comprising: storing analog data in a delay circuit while a recording circuit is powered off, detecting, by a trigger circuit, the occurrence of the event while the recording circuit is powered off, powering-on the recording circuit based on the detection of the event, converting samples of analog data associated with the event provided by the delay circuit to a digital format while the recording circuit powers on, and storing the converted digital samples after the recording circuit has powered on, wherein a time delay associated with the delay circuit is greater than a time it takes for the recording circuit to power-on.
    Type: Grant
    Filed: December 26, 2013
    Date of Patent: June 5, 2018
    Assignee: SIKORSKY AIRCRAFT CORPORATION
    Inventor: Ronald Moffatt
  • Patent number: 9695039
    Abstract: The present disclosure relates to a microelectromechanical systems (MEMS) package having two MEMS devices with different pressures, and an associated method of formation. In some embodiments, the (MEMS) package includes a device substrate and a cap substrate bonded together. The device substrate includes a first trench and a second trench. A first MEMS device is disposed over the first trench and a second MEMS device is disposed over the second trench. A first stopper is raised from a first trench bottom surface of the first trench but below a top surface of the device substrate and a second stopper is raised from a second trench bottom surface of the second trench but below the top surface of the device substrate. A first depth of the first trench is greater than a second depth of the second trench.
    Type: Grant
    Filed: May 2, 2016
    Date of Patent: July 4, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Chia Liu, Chia-Hua Chu, Chun-Wen Cheng, Kuei-Sung Chang, Jung-Huei Peng
  • Patent number: 9645167
    Abstract: An inertial sensor calibration method and inertial sensor calibration apparatus. One or more diffraction patterns are generated by one or more fixed and/or moveable gratings (inertial sensors) illuminated by an atomically stabilized source attached to a base and detected by an imager. The grating and/or inertial sensor has a designed parameter value and an actual respective parameter value, such as motion or distance that can be determined upon ultra-precise measurement. Such ultra-precise measurement can be used to calibrate the grating or inertial sensor.
    Type: Grant
    Filed: May 3, 2012
    Date of Patent: May 9, 2017
    Assignee: CORNELL UNIVERSITY
    Inventors: Amit Lal, Sarvani Piratla
  • Patent number: 9394161
    Abstract: The present disclosure relates to method of forming a MEMS device that mitigates the above mentioned difficulties. In some embodiments, the present disclosure relates to a method of forming a MEMS device, which forms one or more cavities within a first side of a carrier substrate. The first side of the carrier substrate is then bonded to a dielectric layer disposed on a micro-electromechanical system (MEMS) substrate, and the MEMS substrate is subsequently patterned to define a soft mechanical structure over the one or more cavities. The dielectric layer is then selectively removed, using a dry etching process, to release the one or more soft mechanical structures. A CMOS substrate is bonded to a second side of the MEMS substrate, by way of a bonding structure disposed between the CMOS substrate and the MEMS substrate, using a low-temperature bonding process.
    Type: Grant
    Filed: March 5, 2015
    Date of Patent: July 19, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Wen Cheng, Chia-Hua Chu, Jung-Huei Peng
  • Patent number: 9341525
    Abstract: Provided are a torque transducer, a method for manufacturing the torque transducer, and a transmission for a vehicle using the torque transducer. The torque transducer includes a mechano-luminescent (ML) part disposed on a torque measuring object and an illumination sensor disposed to be spaced apart from the ML part.
    Type: Grant
    Filed: July 22, 2014
    Date of Patent: May 17, 2016
    Assignee: Kyungpook National University Industry-Academic Cooperation Foundation
    Inventors: Gi Woo Kim, Ji Sik Kim
  • Patent number: 9285390
    Abstract: One embodiment includes an accelerometer system. The system includes a laser configured to emit an optical beam at a linear polarization. The system also includes an optical cavity system. The optical cavity system includes a mirror that is coupled to an accelerometer housing via a spring and is configured to reflect the optical beam. The optical cavity system also includes at least one photodetector configured to receive at least a portion of at least one of the optical beam and the reflected optical beam and to generate an acceleration signal that is indicative of motion of the mirror resulting from an external acceleration acting upon the accelerometer housing. The system further includes an acceleration processor configured to calculate a magnitude of the external acceleration based on the acceleration signal.
    Type: Grant
    Filed: May 31, 2013
    Date of Patent: March 15, 2016
    Assignee: Northrop Grumman Systems Corporation
    Inventors: A. Douglas Meyer, Michael D. Bulatowicz, Michael S. Larsen, Robert C. Griffith
  • Patent number: 9207354
    Abstract: In one aspect, an apparatus for estimating a characteristic of a sensor is disclosed that in one embodiment may include a chamber housing sensor, wherein the sensor includes a suspended movable force mass having an opening therethrough, a first partially reflective member that moves with the force mass and a second partially reflective member spaced from the first partially reflective member, a source of buoyant fluid configured to supply the buoyant fluid to the chamber at a plurality of pressures, a device for directing light to the first and second partially reflective members at a plurality of angles, a detector for providing signals corresponding to light passing through the second partially reflective member corresponding to each of the plurality of angles and each of the plurality of pressures, and a processor for determining the characteristic of the sensor from the signals provided by the detector.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: December 8, 2015
    Assignee: Baker Hughes Incorporated
    Inventors: Rocco DiFoggio, Carl Edwards
  • Patent number: 9194738
    Abstract: A fiber optic microseismic sensing system is provided. The system includes a plurality of nodes, each of the nodes including a surface portion, an underground portion, and an optical cable extending between the surface portion and the underground portion. The surface portion includes (1) an optical source for transmitting an optical signal along the optical cable to the underground portion, and (2) an optical receiver for receiving a return optical signal propagating along the optical cable from the underground portion. The underground portion includes at least one transducer, each of the at least one transducer including (1) a fixed portion configured to be secured to a body of interest, (2) a moveable portion having a range of motion with respect to the fixed portion, (3) a spring positioned between the fixed portion and the moveable portion, and (4) a mass engaged with the moveable portion.
    Type: Grant
    Filed: October 22, 2010
    Date of Patent: November 24, 2015
    Assignee: Pacific Western Bank
    Inventors: James Kengo Andersen, Eric Lee Goldner, Agop Hygasov Cherbettchian, Gerald Robert Baker, David T. Beatson
  • Publication number: 20150135832
    Abstract: An accelerometer is included within the confined space and limited volume of a distal portion of a surgical instrument. The surgical instrument includes an end component, a joint coupled to the end component, a shaft coupled to the joint, and a force transducer and accelerometer apparatus. The force transducer and accelerometer apparatus is coupled between the joint and the shaft. The force transducer and accelerometer apparatus includes a force sensor and an accelerometer. The accelerometer includes an optic fiber having a Fiber Bragg Grating. Information acquired from the Fiber Bragg Grating is used to drive a vibro-tactile haptic feedback output device coupled to a master control arm surgeon grip.
    Type: Application
    Filed: November 13, 2014
    Publication date: May 21, 2015
    Inventors: STEPHEN J. BLUMENKRANZ, Lawton N. Verner
  • Publication number: 20150033848
    Abstract: An optical sensor having one or more sensing interference elements is disclosed. A first detector function generates a coarse optical path difference signal for example using a discrete Fourier transform of a detected interference spectrum, and a second detector function generates a refined optical path difference signal using the coarse optical path difference signal and for example a cross correlation of the interference spectrum with one or more sets of periodic transfer functions.
    Type: Application
    Filed: March 13, 2013
    Publication date: February 5, 2015
    Applicant: OXSENSIS LTD
    Inventor: Ralf-Dieter Pechstedt
  • Publication number: 20150020604
    Abstract: An apparatus and method for measuring the sloshing in the cargo tank of a liquefied natural gas carrier is provided. The apparatus includes: a plate-shaped floating mat coupler which floats on the surface of the liquefied natural gas contained in the cargo tank of a liquefied natural gas carrier and moves in accordance with the movement of the liquefied natural gas; and an optical sensor measuring acceleration using optical sensor technology to measure acceleration when the floating mat coupler floats by being inserted in one or more positions in the floating mat coupler. The characteristics of the movement occurring in accordance with the sloshing of the liquefied natural gas in the cargo tank of a liquefied natural gas carrier, and the shock and deformation which the inner wall of the cargo tank is subjected to because of such movement, are measured at multiple angles.
    Type: Application
    Filed: October 25, 2011
    Publication date: January 22, 2015
    Inventor: Michael Myungsub Lee
  • Publication number: 20150020590
    Abstract: Technologies are generally described for operating and manufacturing optomechanical accelerometers. In some examples, an optomechanical accelerometer device is described that uses a cavity resonant displacement sensor based on a zipper photonic crystal nano-cavity to measure the displacement of an integrated test mass generated by acceleration applied to the chip. The cavity-resonant sensor may be fully integrated on-chip and exhibit an enhanced displacement resolution due to its strong optomechanical coupling. The accelerometer structure may be fabricated in a silicon nitride thin film and constitute a rectangular test mass flexibly suspended on high aspect ratio inorganic nitride nano-tethers under high tensile stress. By increasing the mechanical Q-factors through adjustment of tether width and tether length, the noise-equivalent acceleration (NEA) may be reduced, while maintaining a large operation bandwidth. The mechanical Q-factor may be improved with thinner (e.g., <1 micron) and longer tethers (e.
    Type: Application
    Filed: March 1, 2013
    Publication date: January 22, 2015
    Inventors: Oskar Painter, Martin Winger, Qiang Lin, Alexander Krause, Tim D. Blasius
  • Patent number: 8904867
    Abstract: An optical accelerometer and method of determining an acceleration are disclosed. In one aspect, an accelerometer includes a light source, a substrate, a light guide attached to a first side of the substrate and configured to redirect light from the light source through the substrate. The accelerometer also includes a light detector, a proof mass attached to a second side of the substrate via one or more springs, wherein the second side is opposite the first side and wherein motion of the proof mass alters a characteristic of the light from the light source reaching the light detector, and a processor configured to determine an acceleration based on the characteristic of the light reaching the light detector.
    Type: Grant
    Filed: November 4, 2010
    Date of Patent: December 9, 2014
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Russel A. Martin, Manish Kothari, Evgeni P. Gousev
  • Publication number: 20140283601
    Abstract: Methods, structures, devices and systems are disclosed for implementing optomechanical sensors in various configurations by using two optically coupled optical resonators or cavities that can be move or deform relative to each other. The optical coupling between first and second optical cavities to produce an optical resonance that varies with a spacing between the first and second optical cavities and provide the basis for the optomechanical sensing. Compact and integrated optomechanical sensors can be constructed to provide sensitive measurements for a range of applications, including motion sensing and other sensing applications.
    Type: Application
    Filed: October 8, 2012
    Publication date: September 25, 2014
    Inventors: Sunil A. Bhave, David Neil Hutchison
  • Publication number: 20140260614
    Abstract: Gyroscopes based on optomechanical designs to provide sensitive sensing while providing relatively large bandwidth and dynamic range with enhanced noise performance.
    Type: Application
    Filed: July 16, 2012
    Publication date: September 18, 2014
    Applicant: CORNELL UNIVERSITY
    Inventors: Sunil Bhave, Renyuan Wang
  • Patent number: 8820167
    Abstract: A sensor includes a housing adapted to be secured to a component within a system to be monitored by the sensor, an optical fiber, and a membrane spring assembly. The optical fiber includes a sensing portion containing a fiber Bragg grating that is able to undergo expansion and contraction resulting from movement of the optical fiber at a second location relative to a first location. The membrane spring assembly includes a membrane disc, wherein movement of a central portion thereof causes corresponding displacement of the optical fiber at the second location to cause expansion and contraction of the sensing portion of the optical fiber containing the fiber Bragg grating, which expansion and contraction effects a change in a light wavelength reflected by the fiber Bragg grating. The light wavelength reflected by the fiber Bragg grating can be used to measure movement of the central portion of the membrane disc.
    Type: Grant
    Filed: February 10, 2011
    Date of Patent: September 2, 2014
    Assignee: Siemens Energy, Inc.
    Inventors: Evangelos V. Diatzikis, Michael Twerdochlib, Luis Alberto de Almeida Ferreira, Francisco Manuel Moita Araújo
  • Patent number: 8783106
    Abstract: An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.
    Type: Grant
    Filed: December 13, 2011
    Date of Patent: July 22, 2014
    Assignee: Sandia Corporation
    Inventors: Gregory N. Nielson, Eric Langlois, Michael Baker, Murat Okandan, Robert Anderson
  • Patent number: 8770024
    Abstract: A fiber optic accelerometer has a hollow body that supports an optical fiber therein so as to form a cantilever section, a fiber optic splitter coupled to a first end of the optical fiber and a light source for directing light into the optical fiber via a first branch of the optical splitter. A photo detector receives light conveyed through the optical fiber via a second branch of the optical splitter and measures an intensity of the received light. A reflective target supported at a second end of the hollow body is axially aligned with the second end of the optical fiber in the absence of force. Upon acceleration the cantilever section moves such that its position relative to the reflective target changes thereby reducing the instantaneous intensity of light reflected by the target into the second end of the optical fiber and measured by the photo detector.
    Type: Grant
    Filed: July 5, 2013
    Date of Patent: July 8, 2014
    Assignee: Vibrosound Ltd.
    Inventors: Alexander Paritsky, Alexander Kots, Yuvi Kahana
  • Patent number: 8726732
    Abstract: A device for detecting seismic acceleration includes a proof mass; a base for providing a sensor acceleration, relative to the proof mass, based on the seismic acceleration; and an optical fiber portion operatively connected between the proof mass and the base for providing a fiber tension based on the sensor acceleration. A fiber Fabry-Perot interferometer (FFPI) in the optical fiber portion provides an optical characteristic representative of the fiber tension. A compensator applies a compensating tension to the FFPI to compensate for a change of the optical characteristic due to a temperature change of the FFPI.
    Type: Grant
    Filed: November 17, 2009
    Date of Patent: May 20, 2014
    Assignee: The Australian National University
    Inventors: Ian C. M. Littler, Jong H. Chow, David E. McClelland
  • Publication number: 20140076050
    Abstract: There is provided an optical accelerometer including a first substrate, a second substrate, a spacer and a processing unit. The first substrate includes a frame, a movable member and at least one elastic member. Periodic slots are formed on the movable member along at least one direction to be served as a diffraction grating. The elastic member is connected between the frame and the movable member. The second substrate includes at least one sensing unit configured to detect a diffraction pattern formed by the diffraction grating. The spacer is disposed between the first substrate and the second substrate to define a predetermined height. The processing unit is coupled to the sensing unit and configured to calculate a 3D acceleration according to the diffraction pattern.
    Type: Application
    Filed: July 15, 2013
    Publication date: March 20, 2014
    Inventors: Wei-Chung WANG, Hui-Hsuan CHEN
  • Patent number: 8640542
    Abstract: A cantilever beam structural resonant-type integrated optical waveguide accelerometer, includes an input waveguide (1), a dissymmetrical structural Mach-Zehnder interferometer (2), a micro-mechanical vibration cantilever beam (3), a short curved waveguide (4) and an output waveguide (5); all the waveguide structures and the cantilever beam use the integrated optical micromachining technique, and the device single-scale integration can be realized by using the temperature-insensitive organic polymer optical waveguide structure and the organic polymer substrate, the key technique indexes such as detection sensitivity, dynamic range are extensively adjusted. The phase difference of the optical signal can be measured by detecting the optical intensity of the resonant frequency of the optical circuit so as to achieve high sensitive acceleration detection, and to be free from the effect of the ambient temperature disturbance and waveguide birefringence.
    Type: Grant
    Filed: September 23, 2009
    Date of Patent: February 4, 2014
    Assignee: Southeast University
    Inventors: Tong Zhang, Xiaojun Xue, Xiaoyang Zhang, Pengqin Wu
  • Publication number: 20140026663
    Abstract: A device and method measure an acceleration of a moving body. The device contains a solid body having a moving part and an internal cavity capable of allowing for a free movement of the moving part. The internal cavity has at least one wall forming a sloping track, the sloping track having a surface allowing for the free movement of the moving part on the sloping track between an initial position at rest and a distant position spaced from the initial position situated at an end of the internal cavity and reachable by the moving part during a variation in acceleration. The moving part moving from the initial position to the distant position in the internal cavity under an effect of the acceleration of the moving body. At least one detector is provide and is capable of detecting a presence of the moving part at the distant position.
    Type: Application
    Filed: May 30, 2011
    Publication date: January 30, 2014
    Applicant: SIEMENS S.A.S.
    Inventor: Yves Clarissou
  • Patent number: 8604574
    Abstract: The transparent photodetector includes a substrate; a waveguide on the substrate; a displaceable structure that can be displaced with respect to the substrate, the displaceable structure in proximity to the waveguide; and a silicon nanowire array suspended with respect to the substrate and mechanically linked to the displaceable structure, the silicon nanowire array comprising a plurality of silicon nanowires having piezoresistance. In operation, a light source propagating through the waveguide results in an optical force on the displaceable structure which further results in a strain on the nanowires to cause a change in electrical resistance of the nanowires. The substrate may be a semiconductor on insulator substrate.
    Type: Grant
    Filed: May 3, 2011
    Date of Patent: December 10, 2013
    Assignee: International Business Machines Corporation
    Inventor: Tymon Barwicz
  • Patent number: 8567959
    Abstract: An optical device is capable of controlling a projector, wherein the projector is capable of wirelessly receiving an image signal from a data source, combining an identification signal into the image signal to generate a projection signal, and projecting a projection image according to the projection signal. The optical device includes an optical sensor. The optical sensor is capable of sensing the identification signal of the projection image, outputting a detection signal corresponding to the identification signal and wirelessly transmitting the detection signal to the projector. A projection system including a projector and an optical sensor is provided as well.
    Type: Grant
    Filed: October 13, 2010
    Date of Patent: October 29, 2013
    Assignee: Coretronic Corporation
    Inventors: Jung-Tsun Lien, Wei-Ting Yen, Chien-Yi Yang
  • Publication number: 20130255380
    Abstract: Optical accelerometers may be provided that detect acceleration in up to six axes. An optical accelerometer may include an image sensor and optical elements such as light pipes that extend over the image sensor. Light may be injected into the optical elements by a light source. The optical elements may guide the light onto corresponding portions of an image pixel array on the image sensor. The image pixels may be used to detect changes in the location, size, and intensity of illuminated portions of the pixel array when the optical elements move due to acceleration of the optical accelerometer. The optical accelerometer may include multiple light pipes having various lengths and thicknesses. Light pipes of matching length and thickness may be formed over opposing sides of a pixel array. The light pipes may be coated with a material that responds to electric or magnetic fields.
    Type: Application
    Filed: April 1, 2013
    Publication date: October 3, 2013
    Applicant: Aptina Imaging Corporation
    Inventor: Kenneth Edward Salsman
  • Patent number: 8499638
    Abstract: A tri-axis accelerometer for use in seismic surveying is provided. The accelerometer comprises at least three fiber optic accelerometer elements which have respective fiber sensor coils, and which are characteristic in that the fiber sensor coils are coiled about a common coiling axis and at least one of the accelerometer elements is a slant angle accelerometer element. A corresponding method of manufacturing a tri-axis fiber optic accelerometer is also disclosed. A fiber optic tri-axis accelerometer for sensing acceleration in three directions is also provided, which comprises a first, a second, and a third sensor base, each base including a first, a second, and a third fixed element, respectively, and a first, a second, and a third movable element, respectively, each pair of fixed and movable elements carrying a fiber sensing coil.
    Type: Grant
    Filed: March 1, 2011
    Date of Patent: August 6, 2013
    Assignee: Optoplan AS
    Inventor: Roar Furuhaug
  • Patent number: 8462358
    Abstract: The invention relates to an apparatus for input of movements and/or registration of forces, comprising at least one light source, at least one position sensitive device (PSD) and at least one diaphragm, wherein at least one of these three elements is moveable with respect to the two other elements. The light source is arranged at a mounting so that light from the light source is emitted through an opening in the mounting and through the at least one diaphragm onto the at least one PSD.
    Type: Grant
    Filed: October 18, 2007
    Date of Patent: June 11, 2013
    Assignee: Spacecontrol GmbH
    Inventors: Frank Becker, Manfred Engelhardt
  • Publication number: 20130104655
    Abstract: A fibre optical accelerometer comprising a base structure, a first seismic mass movably coupled to the base structure through a first hinge element, a second seismic mass movably coupled to the base structure through a second hinge element, an optical fibre coupled to the first and second seismic masses at first and second attachment joints, respectively, to subject the optical fibre to varying strain by displacement of the first and second seismic masses about the first and second hinge structures, respectively.
    Type: Application
    Filed: May 10, 2011
    Publication date: May 2, 2013
    Applicant: Bruel & Kjaer Sound & Vibration Measurement A/S
    Inventors: Søren Andresen, Torben Rask Licht
  • Publication number: 20120325001
    Abstract: Optical sensors and sensing methods are provided. A particular method includes applying light to a first end of an optical fiber. Light reflected by at least one of a first photonic crystal sensor coupled to a second end of the optical fiber and a second photonic crystal sensor coupled to the second end of the optical fiber is detected. The first photonic crystal sensor exhibits a first reflection spectrum that changes responsive a first sensed parameter and the second photonic crystal sensor exhibits a second reflection spectrum that changes responsive a second sensed parameter. A parameter value of at least one of the first sensed parameter and the second sensed parameter is determined based on the detected light.
    Type: Application
    Filed: June 27, 2011
    Publication date: December 27, 2012
    Applicant: The Boeing Company
    Inventors: Michael A. Carralero, Ty A. Larsen
  • Patent number: 8334984
    Abstract: A plurality of Fabry-Perot interferometric sensors are optically coupled in series with each other to form an ordered optical series. Each Fabry-Perot interferometric sensor has a unique signalband and a passband. Each Fabry-Perot interferometric sensor has its unique signalband within the passbands of all of the next higher ordered Fabry-Perot interferometric sensors in the optical series so that a corresponding unique fringe signal from each of the Fabry-Perot interferometric sensors is a multiplexed output from the optical series.
    Type: Grant
    Filed: August 21, 2009
    Date of Patent: December 18, 2012
    Assignee: The Regents of the University of California
    Inventors: Maximillian A. Perez, Andrei A. Shkel
  • Publication number: 20120198935
    Abstract: The present disclosure relates generally to an optical signal processor. In one embodiment, the optical signal processor includes a first sub-wavelength grating having a first grating period and a second sub-wavelength grating having a second grating period that is different than the first grating period of the first sub-wavelength grating.
    Type: Application
    Filed: October 5, 2010
    Publication date: August 9, 2012
    Inventors: Scott Samson, Sunny Kedia, Al-Aakhir Rogers
  • Patent number: 8205497
    Abstract: A microelectromechanical (MEM) inertial sensor is disclosed which can be used to sense a linear acceleration, or a Coriolis acceleration due to an angular rotation rate, or both. The MEM inertial sensor has a proof mass which is supported on a bridge extending across an opening through a substrate, with the proof mass being balanced on the bridge by a pivot, or suspended from the bridge by the pivot. The proof mass can be oscillated in a tangential direction in the plane of the substrate, with any out-of-plane movement of the proof mass in response to a sensed acceleration being optically detected using transmission gratings located about an outer edge of the proof mass to generate a diffracted light pattern which changes with the out-of-plane movement of the proof mass.
    Type: Grant
    Filed: March 5, 2009
    Date of Patent: June 26, 2012
    Assignee: Sandia Corporation
    Inventors: Murat Okandan, Gregory N. Nielson
  • Patent number: 8201452
    Abstract: The present invention relates to a housing for one or more micromechanical and/or micro-optic components, wherein the housing exhibits a supporting substrate having at least one micromechanical and/or micro-optic component and at least one cap substrate, which is joined to the supporting substrate. The supporting substrate and the at least one cap substrate form at least one cavity, which at least partially encloses the at least one micromechanical and/or micro-optic component, wherein the side of at least one cap substrate facing the at least one micromechanical and/or micro-optic component exhibits at least one optical window and at least one mechanical stop. Furthermore, the object of the present invention is a method for producing such a housing, wherein the method is particularly usable for encapsulation at the wafer level.
    Type: Grant
    Filed: January 17, 2008
    Date of Patent: June 19, 2012
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Marten Oldsen, Ulrich Hofmann
  • Publication number: 20120116709
    Abstract: An optical accelerometer and method of determining an acceleration are disclosed. In one aspect, an accelerometer includes a light source, a substrate, a light guide attached to a first side of the substrate and configured to redirect light from the light source through the substrate. The accelerometer also includes a light detector, a proof mass attached to a second side of the substrate via one or more springs, wherein the second side is opposite the first side and wherein motion of the proof mass alters a characteristic of the light from the light source reaching the light detector, and a processor configured to determine an acceleration based on the characteristic of the light reaching the light detector.
    Type: Application
    Filed: November 4, 2010
    Publication date: May 10, 2012
    Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.
    Inventors: Russel A. Martin, Manish Kothari, Evgeni P. Gousev
  • Publication number: 20120069703
    Abstract: There is provided a solid seismic streamer cable for use in seismic surveying in marine environments. The streamer is characterised by a buffer layer 2 which is provided with a cut-out 50 and a sensor element arranged in the cut-out 50. There is also provided an associated hydrophone for integration into the seismic streamer cable. The hydrophone is characteristic in a split-element sensor base 10, 11 being suited for efficient mounting into the cut-outs 50 of the seismic cable. There is also provided an associated accelerometer for integration into the seismic streamer cable. The accelerometer is characteristic by a split-element sensor base 30, 35 for being efficiently arranged into the cut-outs 50 of the seismic cable. A method of producing a seismic streamer cable according to the invention incorporating a hydrophone or accelerometer according to the invention is also provided.
    Type: Application
    Filed: November 22, 2011
    Publication date: March 22, 2012
    Applicant: Optoplan
    Inventors: Arne Berg, Jon Thomas Kringlebotn
  • Publication number: 20120024062
    Abstract: An accelerometer assembly and its method of operation. The accelerometer assembly is designed to be very low cost and robust. This enables the accelerometer assembly to be used in traditionally inexpensive consumer products. The accelerometer assembly uses one or more molded elastomeric structures. Each of the elastomeric structures has a flexible neck section and a head section that is supported by the flexible neck section. The head section of the elastomeric structure is placed between a light source and a photodetector. The head section partially obscures the photodetector from the light source. As the elastomeric structure experiences acceleration forces, the neck section flexes and the head section moves. This varies the degree in which the head section obscures the photodetector. The amount of light detected by the photodetector, therefore, becomes a measure of changing acceleration forces.
    Type: Application
    Filed: July 30, 2010
    Publication date: February 2, 2012
    Inventors: Simeon E. Tiefel, Webb T. Nelson, Mark J. Chernick, Vinnie Ryan
  • Patent number: 8079261
    Abstract: A fibre optic accelerometer particularly intended for use with an interferometer using the compliant cylinder approach but further providing a seismic mass at the core of the cylinder resulting in improved sensitivity and rejection of out-of-axis inputs.
    Type: Grant
    Filed: January 12, 2005
    Date of Patent: December 20, 2011
    Assignee: Qinetiq Limited
    Inventors: Roger Ian Crickmore, John David Hill, John Peter Fairfax Wooler, Peter James Thomas
  • Publication number: 20110303008
    Abstract: A cantilever beam structural resonant-type integrated optical waveguide accelerometer, includes an input waveguide (1), a dissymmetrical structural Mach-Zehnder interferometer (2), a micro-mechanical vibration cantilever beam (3), a short curved waveguide (4) and an output waveguide (5); all the waveguide structures and the cantilever beam use the integrated optical micromachining technique, and the device single-scale integration can be realized by using the temperature-insensitive organic polymer optical waveguide structure and the organic polymer substrate, the key technique indexes such as detection sensitivity, dynamic range are extensively adjusted. The phase difference of the optical signal can be measured by detecting the optical intensity of the resonant frequency of the optical circuit so as to achieve high sensitive acceleration detection, and to be free from the effect of the ambient temperature disturbance and waveguide birefringence.
    Type: Application
    Filed: September 23, 2009
    Publication date: December 15, 2011
    Inventors: Tong Zhang, Xiaojun Xue, Xiaoyang Zhang, Pengqin Wu
  • Publication number: 20110283795
    Abstract: A device for detecting seismic acceleration including a proof mass; a base for providing a sensor acceleration, relative to the proof mass, based on the seismic acceleration; an optical fibre portion operatively connected between the proof mass and the base for providing a fibre tension based on the sensor acceleration, a fibre Fabry-Perot interferometer (FFPI) in the optical fibre portion for providing an optical characteristic representative of the fibre tension, and a compensator for applying a compensating tension to the FFPI to compensate for a change of the optical characteristic due to a temperature change of the FFPI.
    Type: Application
    Filed: November 17, 2009
    Publication date: November 24, 2011
    Applicant: THE AUSTRALIAN NATIONAL UNIVERSITY
    Inventors: Ian C. M. Littler, Jong H. Chow, David E. McClelland
  • Patent number: 8061204
    Abstract: An accelerometer includes a substrate having a surface and a movable electrode. The movable electrode is mounted on the surface of the substrate and movable along an axis substantially parallel to the surface of the substrate in response to acceleration. A light-permeable region is defined in the movable electrode. A plurality of photosensitive regions and a plurality of non-photosensitive regions are defined in the surface of the substrate. The photosensitive regions and the non-photosensitive regions are spatially separated. The light-permeable region overlies only a portion of one of the non-photosensitive regions when at rest, and the light-permeable region overlies a portion of at least one of the photosensitive regions when the accelerometer is subjected to acceleration, such that the corresponding photosensitive region generates an output current.
    Type: Grant
    Filed: September 2, 2008
    Date of Patent: November 22, 2011
    Assignee: Hon Hai Precision Industry Co., Ltd.
    Inventor: Jen-Tsorng Chang