Semiconductor Patents (Class 73/777)
  • Publication number: 20150075290
    Abstract: Even when a strain sensor chip and an object to be measured are bonded to each other by using a metallic bonding material such as solder, the metallic bonding material shows the creep behavior when used under high temperature environment of, for example, 100° C. or higher, and therefore, the strain detected by the strain sensor chip is gradually reduced, and the strain is apparently reduced. In the strain sensor chip mounting structure which is one embodiment of the present application, a strain sensor chip is fixed onto a surface to be measured of the object to be measured via a metallic bonding material. And, the metallic bonding material is bonded to a metallic film that is formed on a side surface of the strain sensor chip. In this manner, temporal change in a measurement error can be suppressed.
    Type: Application
    Filed: April 23, 2012
    Publication date: March 19, 2015
    Inventors: Hiroyuki Ohta, Kisho Ashida
  • Patent number: 8966991
    Abstract: An apparatus for sensing strain or stress includes a body including magnetic shape-memory alloy (MSMA) material, having a first axis. A first drive coil and first sensor coil are wound around the body about the first axis. The drive coil is coupled to a power source and configured to generate an alternating magnetic field on the body. The first sensor coil is configured to detect changes in inductance of the body due to changes in magnetic permeability of the body with deformation thereof.
    Type: Grant
    Filed: October 15, 2012
    Date of Patent: March 3, 2015
    Assignee: Boise State University
    Inventors: Kari Ullakko, Kotaro Sasaki, Peter Müllner
  • Patent number: 8943897
    Abstract: The present disclosure relates to an element for sensing strain, stress or force. The sensing element comprises a substrate, a pair of electrodes on the substrate, and a network of carbon nanotubes for sensing the strain, stress or force within a structure. The network of carbon nanotubes defines at least in part an electrical path between the electrodes of the pair, and the electrical path has a resistance which is altered by the sensed strain, stress or force. Combining a plurality of sensing elements coupled to a common substrate forms a sensing system.
    Type: Grant
    Filed: December 29, 2010
    Date of Patent: February 3, 2015
    Assignee: Societe de Commercialisation des Produits de la Recherche Appliquee—Socpra-Sciences et Genie S.E.C.
    Inventors: Jacques Beauvais, Patrick Boissy, Jonathan Genest, Annick Sauve
  • Patent number: 8943907
    Abstract: In the method for measuring a micromechanical semiconductor component which comprises a reversibly deformable measuring element sensitive to mechanical stresses, which is provided with electronic circuit elements and terminal pads for tapping measurement signals, the measuring element (18) of the semiconductor component (16), for the purpose of determining the distance/force and/or distance/pressure characteristic curve thereof, is increasingly deformed by mechanical action of a plunger (32) which can in particular be advanced step by step. After a or after each step-by-step advancing movement of the plunger (32) by a predetermined distance quantity, the current measurement signals are tapped via the terminal pads (24). The semiconductor component (16) is qualified on the basis of the obtained measurement signals representing the distance/force and/or distance/pressure characteristic curve.
    Type: Grant
    Filed: October 26, 2011
    Date of Patent: February 3, 2015
    Assignee: ELMOS Semiconductor AG
    Inventor: Peter Binkhoff
  • Patent number: 8943903
    Abstract: In one embodiment, an apparatus includes a touch sensor that includes a mesh of conductive material configured to extend across a display that includes multiple pixels that each include sub-pixels. The mesh includes multiple first and second lines of conductive material. The first lines are substantially parallel to each other, and the second lines are substantially parallel to each other. Each of the pixels has a first pixel pitch (PPx) along a first axis and a second pixel pitch (PPy) along a second axis that is substantially perpendicular to the first axis. The first pixel pitch is a distance between corresponding features of two adjacent pixels along the first axis, and the second pixel pitch is a distance between corresponding features of two adjacent pixels along the second axis. Each of the sub-pixels has a first sub-pixel pitch (SPPx) along the first axis.
    Type: Grant
    Filed: June 10, 2014
    Date of Patent: February 3, 2015
    Assignee: Atmel Corporation
    Inventor: David Brent Guard
  • Publication number: 20150027231
    Abstract: A mechanical quantity measuring device (semiconductor strain sensor) has a semiconductor chip including a plurality of piezoresistive elements formed on a front surface of a semiconductor substrate, a lead wire unit electrically connected to a plurality of electrodes of the semiconductor chip, and a plate member joined to a rear surface of the semiconductor chip. Further, the plate member includes a first region facing the rear surface of the semiconductor chip and a second region provided adjacent to the first region, and a thickness of the plate member in the first region is made larger than a thickness in the second region.
    Type: Application
    Filed: December 6, 2011
    Publication date: January 29, 2015
    Applicant: Hitachi, Ltd.
    Inventors: Kisho Ashido, Hiroyuki Ohta
  • Publication number: 20150020601
    Abstract: A device for measuring mechanical quantity is provided which reduces the influence of a difference in thermal expansion coefficient between an object to be measured and a base plate metal body, and precisely measures a mechanical quantity such as deformation quantity or strain quantity caused in the object to be measured. The device includes a semiconductor strain sensor module for measuring deformation quantity of the object to be measured, and the module includes a metal body, and a semiconductor strain sensor mounted on the metal body to detect strain of the metal body. The object to be measured is made of a material having a thermal expansion coefficient larger than that of the metal body. Further, the metal body mounted with the semiconductor strain sensor has a structure configured to be fixed to the object to be measured.
    Type: Application
    Filed: March 2, 2012
    Publication date: January 22, 2015
    Applicant: Hitachi, Ltd.
    Inventors: Kentaro Miyajima, Kisho Ashida, Hiroyuki Oota
  • Patent number: 8893557
    Abstract: The fastener tension monitoring system provides for automatic notification when a structural tensile fastener, such as a bolt, is loosened. The system incorporates piezoelectric material in the core of the fastener shank or deposited around the shank. The piezoelectric material communicates electrically with an electrical storage device, a microprocessor, and a transmitter installed on the fastener head. Vibration or other changes in the tensile force developed by the fastener result in electrical impulses being generated by the piezoelectric material, generating electrical energy that is stored in the storage device and used to operate the microprocessor. In the event that an out of tolerance condition is sensed by the microprocessor, the transmitter is activated to send a signal to that effect. A receiver and computer are provided to monitor any such signals. The piezoelectric material may include pyroelectric material as well for the generation of electrical energy due to temperature changes.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: November 25, 2014
    Assignees: King Fahd University of Petroleum and Minerals, King Abdulaziz City for Science and Technology
    Inventors: Samir Mekid, Uthman Baroudi
  • Patent number: 8869625
    Abstract: A device can have an electrostatic MEMS actuator and a capacitive sensor in electrical communication with the electrostatic MEMS actuator. The capacitive sensor can be configured to determine a capacitance of the electrostatic MEMS actuator while a force is being applied to the electrostatic MEMS actuator as the electrostatic MEMS actuator is being actuated. The device can be used to construct a keyboard having tactile feedback, for example.
    Type: Grant
    Filed: September 28, 2011
    Date of Patent: October 28, 2014
    Assignee: DigitalOptics Corporation MEMS
    Inventor: Roman C. Gutierrez
  • Patent number: 8850897
    Abstract: A sensor and method of sensing dimensional changes, stress changes or pressure changes on a substrate uses a sensor in the following manner. Temporarily and non-destructively attach a piezoresistant sensor to a surface. The piezoresistant sensor has an electrically conductive elastic body having at least one pair of opposed ends, and the elastic body contains conductive nanotubes homogeneously distributed therein. The elastic body has at least one surface with two opposed ends and electrodes at each of the opposed ends. A current is passed through the elastic body between the two electrodes. The current passing through the elastic body is sensed (e.g., a voltmeter). A mechanical step is performed with or on the substrate, and the sensor measures changes in the current between the electrodes, indicating strain or pressure on the sensor.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: October 7, 2014
    Assignee: 7-Sigma Incorporated
    Inventors: Wade R. Eichhorn, Kristian G. Wyrobek
  • Patent number: 8853805
    Abstract: A test structure for measuring strain in the channel of transistors. A method of correlating transistor performance with channel strain.
    Type: Grant
    Filed: June 27, 2011
    Date of Patent: October 7, 2014
    Assignee: Texas Instruments Incorporated
    Inventors: Jayhoon Chung, Catherine Beth Vartuli, Guoda Lian
  • Patent number: 8844367
    Abstract: A measurement unit for tensile or compressive stress can includes a CCD camera for detecting an interference light, the interference light being formed with a measurement beam from a measured region and a reference beam from a reference mirror. A first objective lens can have the reference mirror. An image processing apparatus can measure the three-dimensional shape of the measured region from the position of the first objective lens at which the interference light provides the maximum contrast and can measure the distance between two gauge points on the basis of the three-dimensional shape. When strain is generated on a micromaterial, the strain against the measured tensile stress is measured on the basis of the tensile stress and the distance between the two gauge points.
    Type: Grant
    Filed: June 1, 2011
    Date of Patent: September 30, 2014
    Assignee: Kumamoto University
    Inventors: Kazuki Takashima, Masaaki Otsu, Mitsuhiro Matsuda, Hiroaki Kurahara, Hidetaka Maeda, Tadahiro Yonekura
  • Publication number: 20140283618
    Abstract: According to one embodiment, a semiconductor device includes a substrate, a semiconductor substrate, an insulating gate field-effect transistor, and a strain gauge unit. The semiconductor substrate is placed on the substrate and has first and second regions. The insulating gate field-effect transistor is provided in the first region of the semiconductor substrate. The strain gauge unit has a long metal resistor, a first insulating film and a second insulating film. The long metal resistor is provided inside of an upper surface of the semiconductor substrate in the second region of the semiconductor substrate. The first insulating film is provided between the semiconductor substrate and the metal resistor and extends up to the upper surface of the semiconductor substrate. The second insulating film is provided above the first insulating film across the metal resistor.
    Type: Application
    Filed: September 5, 2013
    Publication date: September 25, 2014
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Takaaki Yasumoto, Naoko Yanase, Ryoichi Ohara, Shingo Masuko, Kenya Sano, Yorito Kakiuchi, Takao Noda, Atsuko IIda
  • Patent number: 8839677
    Abstract: Embodiments relate to stress sensors and methods of sensing stress. In an embodiment, a stress sensor comprises a vertical resistor. The vertical resistor can comprise, for example, an n-type resistor and can have various operating modes. The various operating modes can depend on a coupling configuration of terminals of the resistor and can provide varying piezo-coefficients with very similar temperature coefficients of resistances. Comparisons of resistances and piezo-coefficients in differing operating modes can provide a measure of mechanical stresses acting on the device.
    Type: Grant
    Filed: July 24, 2012
    Date of Patent: September 23, 2014
    Assignee: Infineon Technologies AG
    Inventors: Udo Ausserlechner, Mario Motz
  • Patent number: 8826742
    Abstract: A pressure sensor including: a MEMS resonator; a sweeping unit which sweeps a frequency of an excitation signal in a predetermined direction of sweeping, over a predetermined frequency range including a resonance frequency f0 of a vibrator in the MEMS resonator, while outputting the excitation signal to the MEMS resonator; an integrating unit which inputs a vibrating-state information signal as a characteristic amount indicative of a vibrating state of the vibrator from the MEMS resonator while the sweeping unit sweeps the frequency, integrates a plurality of the vibrating-state information signals at different frequencies of the excitation signal, and outputs the integrated value; and a conversion unit adapted to determine a pressure acting on the MEMS resonator, based on the integrated value.
    Type: Grant
    Filed: February 12, 2013
    Date of Patent: September 9, 2014
    Assignee: Panasonic Corporation
    Inventor: Kunihiko Nakamura
  • Publication number: 20140238144
    Abstract: The invention concerns a pressure transducer comprising a deflecting membrane, said membrane comprising two piezoresistors (10, 11) of different types, said piezoresistors being arranged such that a same stress or a same strain is applied on said piezoresistors and said piezoresistors (10, 11) yield changes in resistance, wherein a piezoresistor of a first type (10) is positioned such that its current direction is perpendicular to the stress direction (trans verse) and a piezoresistor of a second type is parallel to the stress direction (longitudinal), allowing, when a tensile stress is applied to the transducer, said piezoresistor of the first type to increase its resistance and said piezoresistor of the second type to decrease the resistance; or when a compressive stress is applied to the transducer, said piezoresistor of the first type to decrease its resistance and said piezoresistor of the second type to increase the resistance; wherein said piezoresistor of the first type (10) has a specific width and a
    Type: Application
    Filed: October 18, 2012
    Publication date: August 28, 2014
    Applicant: Ecole Poyltechnique Federale de Lausanne (EPFL)
    Inventor: Terunobu Akiyama
  • Patent number: 8813573
    Abstract: A micromechanical component includes: an adjustable element connected to a holder at least via a spring; a first sensor device with at least one first piezo-resistive sensor element, which first sensor device provides a first sensor signal relating to a first mechanical stress, the first piezo-resistive sensor element being situated on or in an anchoring region of the spring; and a second sensor device with at least one second piezo-resistive sensor element, which second sensor device provides a second sensor signal relating to a second mechanical stress, the second piezo-resistive sensor element being situated on or in an anchoring region of the spring.
    Type: Grant
    Filed: May 18, 2010
    Date of Patent: August 26, 2014
    Assignee: Robert Bosch GmbH
    Inventors: Frederic Njikam Njimonzie, Wolfram Schock, Joerg Muchow, Zoltan Lestyan
  • Patent number: 8789426
    Abstract: A system and method employing a piezoelectric sensor for quasi-static force measurement substantially free of drift and with improved low-frequency response. The output signal from the sensor is sampled and integrated using digital techniques that include a drift compensation algorithm. The algorithm continually monitors the sensor output and estimates bias errors that will cause the output to drift.
    Type: Grant
    Filed: August 15, 2011
    Date of Patent: July 29, 2014
    Assignee: Purdue Research Foundation
    Inventors: Steven D. Pekarek, Kevin A. Rosenbaum
  • Patent number: 8783113
    Abstract: A pressure sensor of the MEMS and/or NEMS type is disclosed, including: at least one first deformable cavity (20) to receive pressure variations from an ambient atmosphere, this first deformable cavity being made in a first substrate and including at least one mobile or deformable wall (25), arranged at least partially in the plane parallel to the first substrate, called plane of the sensor, pressure variations from an ambient atmosphere being transmitted to said cavity, a detector (24, 24?) for detecting a displacement or deformation, in the plane of the sensor, of said mobile or deformable wall, under the effect of a pressure variation of the ambient atmosphere.
    Type: Grant
    Filed: July 20, 2011
    Date of Patent: July 22, 2014
    Assignee: Commissariat à{grave over ( )} l'énergie atomique et aux énergies alternatives
    Inventors: Philippe Robert, Arnaud Walther
  • Patent number: 8757001
    Abstract: A force sensor system includes a substrate, a cover, a sensor, and a spherical force transfer element. The cover is coupled to the substrate, and has an inner surface, an outer surface, an opening extending between the inner and outer surfaces, and a wall structure extending from the inner surface that defines a sensor cavity between the inner surface and the substrate. The sensor is mounted on the substrate, is disposed within the sensor cavity, and is configured to generate a sensor signal representative of a force supplied to the sensor. The spherical force transfer element is disposed partially within the sensor cavity, is movable relative to the cover, extends from the opening in the cover, and engages the sensor. The spherical force transfer element is adapted to receive an input force and is configured, upon receipt of the input force, to transfer the input force to the sensor.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: June 24, 2014
    Assignee: Honeywell International Inc.
    Inventors: Richard Wade, Ian Bentley, Mohammed Abdul Javvad Qasimi
  • Patent number: 8746075
    Abstract: A flexible substrate has a major surface and a sensor attached to and aligned with the major surface of the substrate. The sensor may have an elastic body containing conductive nanotubes homogeneously distributed therein to form a conductive path and at least two electrodes in electrical connection with the conductive path. Balloons and flexible elements used in medical procedures are particularly useful.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: June 10, 2014
    Assignee: 7-Sigma, Inc.
    Inventors: Wade R. Eichhorn, Richard Duda, Kristian G. Wyrobek, Ahmet Serdar Sezen
  • Patent number: 8726736
    Abstract: A method for determining, in a first semiconductor material wafer having at least one through via, mechanical stress induced by the at least one through via, this method including the steps of: manufacturing a test structure from a second wafer of the same nature as the first wafer, in which the at least one through via is formed by a substantially identical method, a rear surface layer being further arranged on this second wafer so that the via emerges on the layer; measuring the mechanical stress in the rear surface layer; and deducing therefrom the mechanical stress induced in the first semiconductor material wafer.
    Type: Grant
    Filed: June 15, 2012
    Date of Patent: May 20, 2014
    Assignees: STMicroelectronics (Crolles 2) SAS, Commissariat à l'Énergie Atomique et aux Énergies Alternatives
    Inventors: Mohamed Bouchoucha, Pascal Chausse, Laurent-Luc Chapelon
  • Patent number: 8725431
    Abstract: A tactile sensor unit is provided, which includes a substrate; a coat formed on the substrate; and a cantilever beam structure having one end fixed to the substrate and curved to rise in such a direction that the other end of the cantilever beam structure is farther from the substrate than the one end. The tactile sensor unit detects a load applied to the coat. The cantilever beam structure is capable of resonating at a first resonant frequency and a second resonant frequency which is different from the first resonant frequency. The tactile sensor unit further includes a computation section for calculating a directional component of the load based on a change ratio of the first resonant frequency obtained in accordance with a change in the load and a change ratio of the second resonant frequency obtained in accordance with the change in the load.
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: May 13, 2014
    Assignee: National University Corporation Kyoto Institute of Technology
    Inventor: Kaoru Yamashita
  • Patent number: 8714023
    Abstract: This disclosure provides systems, methods and apparatus for assessing a surface using a piezoelectric element. In one aspect, the method includes applying a device to the surface, wherein the device includes at least one piezoelectric element and at least one EMS device, wherein the EMS device includes a conductive first layer separated from a conductive second layer, and wherein the piezoelectric element is electrically coupled to the EMS device such that a force applied to the piezoelectric element results in a voltage applied across the first and second layers.
    Type: Grant
    Filed: March 10, 2011
    Date of Patent: May 6, 2014
    Assignee: Qualcomm MEMS Technologies, Inc.
    Inventor: Jeffrey B. Sampsell
  • Patent number: 8707796
    Abstract: A strain monitoring system including an array of semiconductor strain gauges. Each strain gauge in the array of strain gauges includes a lithographically fabricated 4-resistor bridge for providing a voltage potential corresponding to the strain in the bridge and thin film transistors to provide addressability to each 4-resistor bridge in the array. After completion of the array of strain gauges, in preferred embodiments the array of strain gauges are transferred to polyimide film which is in turn bonded to a surface region of the component to be tested for strains. Each bridge provides voltage signals corresponding to the strain to which the material under the bridge is being subjected. In preferred embodiments control and data acquisition function are separated from the semiconductor strain gage array. Preferred embodiments the system are utilized to monitor strains on components of aircraft, especially light weight robotic aircraft.
    Type: Grant
    Filed: August 4, 2011
    Date of Patent: April 29, 2014
    Inventors: Terrisa Duenas, Shiv Joshi, Cesar Del Solar
  • Patent number: 8695433
    Abstract: A mechanical-quantity measuring device capable of measuring a strain component in a specific direction with high precision is provided. At least two or more pairs of bridge circuits are formed inside a semiconductor monocrystal substrate and a semiconductor chip, and one of these bridge circuits forms a n-type diffusion resistor in which a direction of a current flow and measuring variation of a resistor value are in parallel with a <100> direction of the semiconductor monocryastal silicon substrate, and an another bridge circuit is composed of combination of p-type diffusion resistors in parallel with a <110> direction.
    Type: Grant
    Filed: January 4, 2013
    Date of Patent: April 15, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Hiromi Shimazu, Hiroyuki Ohta, Yohei Tanno
  • Publication number: 20140096616
    Abstract: A method of manufacturing a flexible display device for sensing bending that includes forming a lower electrode layer, which includes a plurality of lower electrodes spaced apart from each other on a substrate, forming an insulation layer on the lower electrode layer, forming holes in the insulation layer to expose at least a part of each of the plurality of lower electrodes, and forming an upper electrode layer, which includes a plurality of upper electrodes that are spaced apart from each other on the insulation layer and that fill the holes in the insulation layer. At least two conductive units including the lower electrode layer, the insulation layer, and the upper electrode layer are formed to face each other on a substrate of a non-display unit that is arranged near a boundary of the display device.
    Type: Application
    Filed: March 7, 2013
    Publication date: April 10, 2014
    Inventors: Jae-Hyeon JEON, Tae-Jin KIM, Hae-Kwan SEO
  • Patent number: 8689647
    Abstract: A sensing insert device (100) is disclosed for measuring a parameter of the muscular-skeletal system. The sensing insert device (100) can be temporary or permanent. Used intra-operatively, the sensing insert device (100) comprises an insert dock (202) and a sensing module (200). The sensing module (200) is a self-contained encapsulated measurement device having at least one contacting surface that couples to the muscular-skeletal system. The sensing module (200) comprises one or more sensing assemblages, electronic circuitry (307), an antenna (2302), and communication circuitry (320). The sensing assemblages are between a top plate (1502) and a bottom plate (1504) in a sensing platform (121). The sensing assemblages comprise a load disc (2004) and a piezo-resistive sensor (2002) to measure the parameter. An elastic support structure or springs (1108) is coupled between the top plate (1502) and the bottom plate (1504) to prevent cantilevering of a surface.
    Type: Grant
    Filed: July 1, 2012
    Date of Patent: April 8, 2014
    Assignee: Orthosensor Inc.
    Inventor: Marc Stein
  • Patent number: 8683870
    Abstract: A sensor device includes at least one sensor device coupled to a substrate. A solder pad interface includes a plurality of steps, with at least a portion of the steps positioned at different planes, each of a step having a solder pad. A cable with a plurality of cable leads, is configured for each of a cable lead to be coupled to a solder pad.
    Type: Grant
    Filed: March 15, 2012
    Date of Patent: April 1, 2014
    Assignee: Meggitt (Orange County), Inc.
    Inventor: James C. Letterneau
  • Patent number: 8671769
    Abstract: The present invention is directed to a device for measuring a deformation ratio of a structure which includes a photonic crystal layer containing nanoparticles aligned at a certain interval. The device is useful for detecting when various industrial structures are deformed by a working load. The presence of deformation and the deformation ratio in the structures may be simply and easily measured by measuring the change of structural color or magnetic flux in the device. The device may be useful to prevent accidents due to excessive deformation in structures.
    Type: Grant
    Filed: March 2, 2010
    Date of Patent: March 18, 2014
    Assignees: Industry Academic Cooperation Foundation, Technovalue Co., Ltd.
    Inventors: Seung Joo Haam, Yun Mook Lim, Yoon Cheol Lim, JoSeph Park
  • Patent number: 8646335
    Abstract: A method for producing a contact stress sensor that includes one or more MEMS fabricated sensor elements, where each sensor element of includes a thin non-recessed portion, a recessed portion and a pressure sensitive element adjacent to the recessed portion. An electric circuit is connected to the pressure sensitive element. The circuit includes a pressure signal circuit element configured to provide a signal upon movement of the pressure sensitive element.
    Type: Grant
    Filed: January 12, 2012
    Date of Patent: February 11, 2014
    Assignee: Lawrence Livermore National Security, LLC
    Inventor: Jack Kotovsky
  • Patent number: 8640550
    Abstract: A shear force detection device for detecting a shear force includes: a support body including an opening defined by a pair of straight parts perpendicular to a detection direction of the shear force and parallel to each other; a support film on the support body and closing the opening, the support film having flexibility; a piezoelectric part on the support film and extending astride an inside and outside of the opening and along at least one of the pair of straight parts of the opening when viewed in a plane in which the support body is seen in a substrate thickness direction, the piezoelectric part being bendable to output an electric signal; and an elastic layer covering the piezoelectric part and the support film.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: February 4, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Tsutomu Nishiwaki
  • Patent number: 8640551
    Abstract: A shear force detection device for detecting a shear force includes: a support body including an opening defined by a pair of straight parts perpendicular to a detection direction of the shear force and parallel to each other; a support film on the support body and closing the opening, the support film having flexibility; a piezoelectric part on the support film and extending astride an inside and outside of the opening and along at least one of the pair of straight parts of the opening when viewed in a plane in which the support body is seen in a substrate thickness direction, the piezoelectric part being bendable to output an electric signal; and an elastic layer covering the piezoelectric part and the support film.
    Type: Grant
    Filed: January 10, 2013
    Date of Patent: February 4, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Tsutomu Nishiwaki
  • Patent number: 8631711
    Abstract: A MEMS composite transducer includes a substrate, a MEMS transducer, and a compliant membrane. Portions of the substrate define an outer boundary of a cavity. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate.
    Type: Grant
    Filed: April 19, 2011
    Date of Patent: January 21, 2014
    Assignee: Eastman Kodak Company
    Inventor: James D. Huffman
  • Publication number: 20140013855
    Abstract: A deflection sensor is disclosed herein. The deflection sensor includes a nanotube film adjacent to a substrate, and first and second contacts electrically connectable with the nanotube film. Methods of making and using the deflection sensor are also disclosed.
    Type: Application
    Filed: September 19, 2013
    Publication date: January 16, 2014
    Inventors: Mohammad M. FARAHANI, Vladimir Noveski, Neha M. Patel, Nachiket R. Raravikar
  • Patent number: 8618821
    Abstract: A device for detecting the thinning down of the substrate of an integrated circuit chip, including, in the active area of the substrate, bar-shaped diffused resistors connected as a Wheatstone bridge, wherein: first opposite resistors of the bridge are oriented along a first direction; the second opposite resistors of the bridge are oriented along a second direction; and the first and second directions are such that a thinning down of the substrate causes a variation of the imbalance value of the bridge.
    Type: Grant
    Filed: June 10, 2010
    Date of Patent: December 31, 2013
    Assignee: STMicroelectronics (Rousset) SAS
    Inventors: Pascal Fornara, Christian Rivero
  • Publication number: 20130340533
    Abstract: Strain gauge. The gauge includes a substrate and a thin film of overlapping, two-dimensional flakes deposited on the substrate. Structure responsive to conductance across the film is provided whereby a strain induced change in overlap area between neighboring flakes results in a change in conductance across the film. In a preferred embodiment, the two-dimensional flakes are graphene.
    Type: Application
    Filed: November 19, 2012
    Publication date: December 26, 2013
    Applicant: Massachusetts Institute of Technology
    Inventor: Massachusetts Institute of Technology
  • Patent number: 8614492
    Abstract: Stress sensors and stress sensor integrated circuits using one or more nanowire field effect transistors as stress-sensitive elements, as well as design structures for a stress sensor integrated circuit embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit, and related methods thereof. The stress sensors and stress sensor integrated circuits include one or more pairs of gate-all-around field effect transistors, which include one or more nanowires as a channel region. The nanowires of each of the field effect transistors are configured to change in length in response to a mechanical stress transferred from an object. A voltage output difference from the field effect transistors indicates the magnitude of the transferred mechanical stress.
    Type: Grant
    Filed: October 26, 2009
    Date of Patent: December 24, 2013
    Assignee: International Business Machines Corporation
    Inventors: Andres Bryant, Oki Gunawan, Shih-Hsien Lo, Jeffrey W Sleight
  • Patent number: 8590390
    Abstract: A strain sensing apparatus including a deformable substrate is presented. The deformable substrate is configured to detect a strain of the body that can be coupled to the deformable substrate. Sometimes, the deformable substrate is a flexible substrate having an upper surface and an opposite lower surface. The lower can be coupled to the body. There are sensing elements fabricated within the flexible substrate and proximate to the upper surface to detect properties of the body. The strain sensing apparatus is able to detect different strain modes, such as whether the strain is the result of bending of a body or a uniaxial elongation. Furthermore, the apparatus is small and less fragile than most conventional sensors, making it easy to use.
    Type: Grant
    Filed: March 30, 2011
    Date of Patent: November 26, 2013
    Assignee: Analatom Incorporated
    Inventor: Trevor Graham Edward Niblock
  • Patent number: 8544337
    Abstract: An impact sensor includes a piezoelectric transducer operatively connected to a chromic device. The chromic device includes a chromic material that changes from a first color state to a second color state in response to electric power generated by the piezoelectric transducer when exposed to a given level of impact force. The chromic material is bistable so that the chromic material remains in the second color state for a significant amount of time. An impact force to which the sensor has been subjected may be quantified by observing the chromic device. In one embodiment, the chromic material is an electrochromic material, such as a viologen, that changes through a color gradient of light transmission states from the first color state to the second color state. A printed color gradient may be used to aid in quantifying the impact force. In another embodiment, the chromic device includes a thermochromic material.
    Type: Grant
    Filed: April 6, 2010
    Date of Patent: October 1, 2013
    Assignee: International Business Machines Corporation
    Inventors: Joseph Kuczynski, Arvind K. Sinha, Kevin A. Splittstoesser, Timothy J. Tofil
  • Publication number: 20130239696
    Abstract: A sensor device includes at least one sensor device coupled to a substrate. A solder pad interface includes a plurality of steps, with at least a portion of the steps positioned at different planes, each of a step having a solder pad. A cable with a plurality of cable leads, is configured for each of a cable lead to be coupled to a solder pad.
    Type: Application
    Filed: March 15, 2012
    Publication date: September 19, 2013
    Inventor: James Letterneau
  • Patent number: 8534133
    Abstract: A structural health monitoring arrangement includes a component formed of fiber reinforced composite material with a plurality of electrical conducting fibers intrinsic to the composite defining electrical paths that run through the composite. The paths act as sensing paths running through the material and a detector watches for changes in electrical property indicative of a structural event. The paths may be configured as an open or a closed node grid whose electrical continuity is monitored directly or indirectly. Alternatively they may be fibers having a piezoresistive property and the changes in resistance may be monitored.
    Type: Grant
    Filed: July 7, 2009
    Date of Patent: September 17, 2013
    Assignee: BAE Systems PLC
    Inventors: Martyn John Hucker, Sajad Haq, Michael Dunleavy, David William Gough, Jason Karl Rew, Philip Lawrence Webberley
  • Patent number: 8528414
    Abstract: Because of stress occurring due to a change in temperature, and presence of heat distribution on a semiconductor substrate, and a dopant dosage gradient, an offset output occurs to a Wheatstone bridge circuit intended for detection of strain, posing a problem. To solve the problem, diffusion resistors are disposed in the form of a matrix, and bridge resistors Rv1, Rv2 each are formed by selectively connecting diffusion resistors disposed in each odd column, in series with each other, while Rh1, Rh2 each are formed by selectively connecting diffusion resistors disposed in each even column, in series with each other.
    Type: Grant
    Filed: July 12, 2011
    Date of Patent: September 10, 2013
    Assignee: Hitachi, Ltd.
    Inventors: Kentaro Miyajima, Mitsugu Kusunoki
  • Patent number: 8516905
    Abstract: A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
    Type: Grant
    Filed: April 2, 2012
    Date of Patent: August 27, 2013
    Assignee: Panasonic Corporation
    Inventors: Kunihiko Nakamura, Tomohiro Iwasaki, Takehiko Yamakawa, Keiji Onishi
  • Patent number: 8515677
    Abstract: Methods and apparatus are described to use real-time measurement systems to detect the onset of compression induced microfracturing of fiber-reinforced composite materials. Measurements are described to detect the onset of compression induced microfracturing of fiber-reinforced composite materials to prevent catastrophic failures of aircraft components containing such materials. Methods and apparatus are described to prevent fluids and gases from invading any compression induced microfractures by coating surfaces of fiber-reinforced materials to reduce the probability of failure of such fiber-reinforced materials.
    Type: Grant
    Filed: July 12, 2010
    Date of Patent: August 20, 2013
    Assignee: Smart Drilling and Completion, Inc.
    Inventor: William Banning Vail
  • Patent number: 8511174
    Abstract: The invention relates to a sensor as a built-in component of an object, especially an elastic object, the sensor comprising a polymer material containing electroconductive additives according to the invention and thereby acting as an expansion sensor (2), in that it measures the static and dynamic expansions of the object in relation to the acting forces and also monitors the changes of the polymer material generated by the static and dynamic expansions of the object over time. The invention also relates to a sensor arrangement (1) acting especially in combination with the following components: an expansion sensor (2), a fixed resistor (3), an analog/digital converter (4), a micro-controller comprising a memory (5), a radio interface (6), a controlled current/voltage source (7), an energy supply (8), a coupling coil (9), and a receiving unit (10).
    Type: Grant
    Filed: December 31, 2009
    Date of Patent: August 20, 2013
    Assignee: ContiTech AG
    Inventors: Wolfram Herrmann, Frank Jungrichter, Stefan Sostmann, Dieter Borvitz, Hubertus Gawinski, Siegfried Reck
  • Publication number: 20130205910
    Abstract: A new approach for building a stress-sensing rosette capable of extracting the six stress components and the temperature is provided, and its feasibility is verified both analytically and experimentally. The approach can include varying the doping concentration of the sensing elements and utilizing the unique behaviour of the shear piezoresistive coefficient (?44) in n-Si.
    Type: Application
    Filed: November 25, 2011
    Publication date: August 15, 2013
    Applicant: The Governors of the University of Alberta
    Inventors: Hossam Mohamed Hamdy Gharib, Walied Ahmed Mohamed Moussa
  • Patent number: 8499646
    Abstract: Tension monitoring is described using a sensor which may exhibit an offset for which compensation may be provided to produce a zero voltage amplified output or to increase dynamic range. An arrangement determines whether a power reset is responsive to a battery bounce such that an initially-measured system start-up parameter can be retained. The start-up parameter is automatically saved at start-up if the power reset is responsive to a start-up from a shut-down condition. The start-up parameter may be a zero tension amplified output responsive to the sensor offset at zero tension. Protection of a tension data set is provided such that no opportunity for altering the data set is presented prior to transfer of the data set. A housing configuration forms part of an electrical power circuit for providing electrical power to an electronics package from a battery.
    Type: Grant
    Filed: October 3, 2011
    Date of Patent: August 6, 2013
    Assignee: Merlin Technology, Inc.
    Inventors: Albert W. Chau, Rudolf Zeller, John E. Mercer, Charles Yu Yat Tsang
  • Patent number: 8495917
    Abstract: A sensing device is provided for measuring flexural deformations of a surface. Such a sensing device may be used as a user interface in portable electronic devices. The sensing device comprises at least one cell. The cell comprises a first electrode, a central electrode, a second electrode, a first piezoelectric sensing layer placed between the first electrode and the central electrode, a second piezoelectric sensing layer placed between the central electrode and the second electrode, and a circuit connected to the first, second and the central electrodes. The circuit is configured to measure a first electrical signal between the first electrode and the central electrode, and a second electrical signal between the second electrode and the central electrode. At least one of the first electrical signal and the second electrical signal is responsive to an external stress applied on the sensing device.
    Type: Grant
    Filed: February 21, 2012
    Date of Patent: July 30, 2013
    Assignee: Nokia Corporation
    Inventor: Zoran Radivojevic
  • Patent number: 8479585
    Abstract: In one aspect, the present invention relates to a pressure sensing/force generating device comprising a non-planar substrate, a printed pressure sensitive element comprising (a) a piezoelectric material containing ink composition capable of producing a piezoelectric effect/piezoresistive effect and/or (b) a dielectric material containing ink composition capable of producing a capacitive effect. It also includes a first printed electrode comprising a conductive ink composition, and a second printed electrode comprising a conductive ink composition. The first and second electrodes are in electrical contact with the printed pressure sensitive element. The first and second printed electrodes and the printed pressure sensitive element collectively form a pressure sensitive junction, which is coupled to the non-planar substrate. The present invention further relates to medical devices comprising the pressure sensing/force generating device and methods of making such devices.
    Type: Grant
    Filed: September 7, 2011
    Date of Patent: July 9, 2013
    Assignee: Micropen Technologies Corporation
    Inventor: Lori J. Shaw-Klein