Sample Handling Device Or Method(epo) Patents (Class 850/18)
  • Patent number: 10578644
    Abstract: The invention relates to a probe system for a scanning probe microscope which (a) has a receptacle apparatus for a probe, (b) has a probe storage, which provides at least one probe for the scanning probe microscope, (c) wherein the probe, the probe storage, and the receptacle apparatus are embodied in such a way that the probe can form a releasable first connection with the probe storage and a releasable second connection with the receptacle apparatus, wherein the first connection and/or the second connection use a magnetic force; and wherein the receptacle apparatus and the probe storage are movable relative to one another in such a way for receiving the probe that the probe forms the second connection before the first connection is released.
    Type: Grant
    Filed: December 1, 2017
    Date of Patent: March 3, 2020
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Christof Baur, Sylvio Ruhm, Gabriel Baralia, Christoph Pohl, Björn Harnath, Matthias Weber
  • Patent number: 9075081
    Abstract: A method for coupling high-frequency energy, in particular for microwave circuits, to a nanoscale junction involves placing a bias-T outside of the tip and sample circuits of a scanning probe microscope and connecting a portion of a sample of analyzed semi-conductor through an outer shielding layer of coaxial cable so as to complete a circuit with minimal involvement of the sample. The bias-T branches into high and low-frequency circuits, both of which are completed and, at least the high-frequency circuit, does not rely on grounding of implements or other structure to accomplish said completion.
    Type: Grant
    Filed: March 24, 2014
    Date of Patent: July 7, 2015
    Inventor: Mark J. Hagmann
  • Publication number: 20150067931
    Abstract: A method for coupling high-frequency energy, in particular for microwave circuits, to a nanoscale junction involves placing a bias-T outside of the tip and sample circuits of a scanning probe microscope and connecting a portion of a sample of analyzed semi-conductor through an outer shielding layer of coaxial cable so as to complete a circuit with minimal involvement of the sample. The bias-T branches into high and low-frequency circuits, both of which are completed and, at least the high-frequency circuit, does not rely on grounding of implements or other structure to accomplish said completion.
    Type: Application
    Filed: March 24, 2014
    Publication date: March 5, 2015
    Inventor: Mark J. Hagmann
  • Patent number: 8935811
    Abstract: A sample stage for microscopy includes a sample holder including a body in which a sample-mounting part and a seating part are provided on a bottom of the body and a grip part for a mounting unit is provided on a top of the body, a sample rack, on which the sample holder is mounted, including a supporter supporting the seating part of the sample holder, and an elastic element provided on the sample rack, providing the sample holder with a pressing force inclined with respect to a vertical direction and fastening the sample holder to the sample rack while the seating part is being supported by the supporter. The sample stage may be vertically mounted.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: January 13, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Hwan-soo Suh
  • Publication number: 20150013036
    Abstract: Provided is a sample fixing member for an atomic force microscope capable of reducing the drift amount of a sample during measurement. A sample fixing member for an atomic force microscope of the present invention includes a fibrous columnar structure including a plurality of fibrous columnar objects each having a length of 200 ?m or more.
    Type: Application
    Filed: January 29, 2013
    Publication date: January 8, 2015
    Applicant: NITTO DENKO CORPORATION
    Inventor: Youhei Maeno
  • Patent number: 8893309
    Abstract: An embodiment of a scanning tunneling microscope (STM) reactor includes a pressure vessel, an STM assembly, and three spring coupling objects. The pressure vessel includes a sealable port, an interior, and an exterior. An embodiment of an STM system includes a vacuum chamber, an STM reactor, and three springs. The three springs couple the STM reactor to the vacuum chamber and are operable to suspend the scanning tunneling microscope reactor within the interior of the vacuum chamber during operation of the STM reactor. An embodiment of an STM assembly includes a coarse displacement arrangement, a piezoelectric fine displacement scanning tube coupled to the coarse displacement arrangement, and a receiver. The piezoelectric fine displacement scanning tube is coupled to the coarse displacement arrangement. The receiver is coupled to the piezoelectric scanning tube and is operable to receive a tip holder, and the tip holder is operable to receive a tip.
    Type: Grant
    Filed: June 22, 2010
    Date of Patent: November 18, 2014
    Assignee: The Regents of the University of California
    Inventors: Feng Tao, Miquel Salmeron, Gabor A. Somorjai
  • Publication number: 20140304861
    Abstract: The present invention relates to a leveling apparatus that levels an object to be leveled with a surface of a substrate by measuring the force applied to the object, and an atomic force microscope including the leveling apparatus. A leveling apparatus according to the present invention, which levels an object with a substrate such that one side of the object is brought in parallel contact with the surface of the substrate, includes: force sensors disposed to measure force at at least three points on the other side of the object; an angle adjusting unit disposed to adjust the angle between the object and the surface of the substrate; and a controller connecting with the force sensors and the angle adjusting unit to drive the angle adjusting unit on the basis of data from the force sensors.
    Type: Application
    Filed: April 2, 2014
    Publication date: October 9, 2014
    Applicant: Park Systems Corp.
    Inventors: Suk Hyun Kim, Han Aul Noh, Ah Jin Jo
  • Publication number: 20140289912
    Abstract: An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ?, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system.
    Type: Application
    Filed: March 17, 2014
    Publication date: September 25, 2014
    Applicant: Bruker Nano, Inc.
    Inventor: Gregory O. Andreev
  • Publication number: 20140182020
    Abstract: A sample stage for microscopy includes a sample holder including a body in which a sample-mounting part and a seating part are provided on a bottom of the body and a grip part for a mounting unit is provided on a top of the body, a sample rack, on which the sample holder is mounted, including a supporter supporting the seating part of the sample holder, and an elastic element provided on the sample rack, providing the sample holder with a pressing force inclined with respect to a vertical direction and fastening the sample holder to the sample rack while the seating part is being supported by the supporter. The sample stage may be vertically mounted.
    Type: Application
    Filed: December 20, 2013
    Publication date: June 26, 2014
    Applicant: Samsung Electronics Co., Ltd.
    Inventor: Hwan-soo SUH
  • Patent number: 8646344
    Abstract: A mounting system for samples and instruments for use with a measuring device such as a surface forces apparatus has a housing and a sample mount assembly positioned within the housing. The sample mount assembly has a pivot arm having a first edge and a flexing section. A spring has a first end coupled to the pivot arm. A first sample holder is coupled to the second end of the spring. A second sample holder is positioned in proximity to the first sample holder.
    Type: Grant
    Filed: November 20, 2012
    Date of Patent: February 11, 2014
    Inventor: Jacob Israelachvili
  • Patent number: 8646345
    Abstract: A mounting system for samples and instruments for use with a measuring device such as a surface forces apparatus has a housing and a sample mount assembly positioned within the housing. The sample mount assembly has a pivot arm having a first edge and a flexing section. A spring has a first end coupled to the pivot arm. A first sample holder is coupled to the second end of the spring. A second sample holder is positioned in proximity to the first sample holder.
    Type: Grant
    Filed: November 20, 2012
    Date of Patent: February 11, 2014
    Inventor: Jacob Israelachvili
  • Patent number: 8507876
    Abstract: A device for holding a specimen holder, the device including a body with a slot formed therein. The slot includes an interior for receiving the specimen holder which may be a flat disk with edges and a pair of opposing sides. The disk may be made of a resilient deformable material. The slot may be sized to receive the specimen holder through an open top end and may taper from top bottom, such that the bottom end of the slot is smaller than the specimen holder. The slot further configured to contact the specimen holder along edges of the specimen holder and to allow some sideways deformation of the specimen holder without either side of the specimen holder distant from the edges coming into contact with the interior of the slot.
    Type: Grant
    Filed: March 8, 2011
    Date of Patent: August 13, 2013
    Assignee: Microscopy Innovations, LLC
    Inventors: Steven L. Goodman, Jack LaSee, Mark T. Nelson
  • Patent number: 8479310
    Abstract: A dynamic probe detection system (29,32) is for use with a scanning probe microscope of the type that includes a probe (18) that is moved repeatedly towards and away from a sample surface. As a sample surface is scanned, an interferometer (88) generates an output height signal indicative of a path difference between light reflected from the probe (80a,80b,80c) and a height reference beam. Signal processing apparatus monitors the height signal and derives a measurement for each oscillation cycle that is indicative of the height of the probe. This enables extraction of a measurement that represents the height of the sample, without recourse to averaging or filtering, that may be used to form an image of the sample. The detection system may also include a feedback mechanism that is operable to maintain the average value of a feedback parameter at a set level.
    Type: Grant
    Filed: December 11, 2009
    Date of Patent: July 2, 2013
    Assignee: Infinitesima Ltd.
    Inventor: Andrew Humphris
  • Patent number: 8445846
    Abstract: The present invention relates to a beam optical component including a charged particle lens for focusing a charged particle beam, the charged particle lens comprising a first element having a first opening for focusing the charged particle beam; a second element having a second opening for focusing the charged particle beam and first driving means connected with at least one of the first element and the second element for aligning the first opening with respect to the second opening. With the first driving means, the first opening and the second opening can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focusing. The present invention also relates to a charged particle beam device that uses said beam optical component for focusing the charged particle beam, and a method to align first opening and second opening with respect to each other.
    Type: Grant
    Filed: December 13, 2004
    Date of Patent: May 21, 2013
    Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
    Inventor: Juergen Frosien
  • Patent number: 8438661
    Abstract: The invention relates to a scanning probe microscope comprising: a specimen holder holding a specimen; and a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of the specimen is tilted relative to at least one of the two orthogonal horizontal directions.
    Type: Grant
    Filed: October 18, 2007
    Date of Patent: May 7, 2013
    Assignee: Universiteit Twente
    Inventors: David Hermanus Adrianus Blank, Augustinus Josephus Helena Maria Rijnders, Joska Johannes Broekmaat, Frank Johan Gerhardus Roesthuis
  • Patent number: 8418261
    Abstract: It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample without irradiated light blocked by a cantilever. The stage for scanning probe microscopy of the invention is a stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency and includes an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view. Light is irradiated from a bottom surface of the sample substrate onto the sample through the opening.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: April 9, 2013
    Assignees: Nippon Telegraph and Telephone Corporation, Isis Innovation Limited
    Inventors: Nahoko Kasai, Yuichi Harada, Chandra Sekar Ramanujan
  • Publication number: 20130061356
    Abstract: A technique for actively damping internal vibrations in a scanning probe microscope is disclosed. The excitation of various mechanical movements, including resonances, in the mechanical assembly of an SPM can adversely effect its performance, especially for high speed applications. An actuator is used to compensate for the movements. The actuator may operate in only the z direction, or may operate in other directions. The actuator(s) may be located at positions of antinodes.
    Type: Application
    Filed: November 5, 2012
    Publication date: March 7, 2013
    Applicant: ASYLUM RESEARCH CORPORATION
    Inventor: Roger Proksch
  • Patent number: 8371182
    Abstract: A mounting system for samples and instruments for use with a measuring device such as a surface forces apparatus has a housing and a sample mount assembly positioned within the housing. The sample mount assembly has a pivot arm having a first edge and a flexing section. A spring has a first end coupled to the pivot arm. A first sample holder is coupled to the second end of the spring. A second sample holder is positioned in proximity to the first sample holder.
    Type: Grant
    Filed: June 11, 2012
    Date of Patent: February 12, 2013
    Inventor: Jacob Israelachvili
  • Publication number: 20130031680
    Abstract: A semi-automated method for atomic force microscopy (“AFM”) scanning of a sample is disclosed. The method can include manually teaching a sample and AFM tip relative location on an AFM tool; then scanning, via a predefined program, on the same sample or other sample with same pattern to produce more images automatically.
    Type: Application
    Filed: July 26, 2012
    Publication date: January 31, 2013
    Applicant: SEAGATE TECHNOLOGY LLC
    Inventors: Huiwen Liu, Peter Gunderson
  • Patent number: 8327460
    Abstract: The present invention allows simple and sensitive detection of microimpurities, microdefects, and corrosion starting points which may be present in a material. A probe microscope has a function to sense ions diffused from a specimen in a liquid. A probe is caused to scan over a predetermined range on a specimen. Then, the probe is fixed to a particular position in a liquid so as to set the distance between the specimen and the probe to a given value at which the microstructure of the specimen surface cannot be observed. Thereafter, one of the current between the probe and a counter electrode and the potential between the probe and a reference electrode is controlled, and the other of the current and potential which varies in accordance with the control is measured. Thus, ions diffused from the specimen are sensed.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: December 4, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Kyoko Honbo, Katsumi Mabuchi, Motoko Harada
  • Patent number: 8312561
    Abstract: The invention relates to a device and a method for the micromechanical positioning and handling of an object. The aim of the invention is to provide a device and an associated method for the micromechanical positioning and handling of objects by means of which the scanning speed can be increased and the positional accuracy be improved so that real time images or video rate images (ca. 25 images per second) having a lateral and vertical resolution in the nanometer range can be achieved. According to the invention, a monolithic component, preferably made of silicon, comprises a support element, an object carrier, a plurality of guide elements and elements for transmitting the movement, the preferably piezoresistive drive elements and the preferably piezoresistive position detectors being integrated into said monolithic component; Said micromechanical positioning device can be used, for example, in scanning probe microscopy and in nanopositioning and nanomanipulation technology.
    Type: Grant
    Filed: January 28, 2008
    Date of Patent: November 13, 2012
    Assignee: Technische Universitaet Ilmenau
    Inventors: Ivo W. Rangelow, Stefan Klett, Eishad Guliyev, Tzvetan Ivanov, Burkhard Volland
  • Patent number: 8302456
    Abstract: A technique for actively damping internal vibrations in a scanning probe microscope is disclosed. The excitation of various mechanical movements, including resonances, in the mechanical assembly of an SPM can adversely effect its performance, especially for high speed applications. An actuator is used to compensate for the movements. The actuator may operate in only the z direction, or may operate in other directions. The actuator(s) may be located at positions of antinodes.
    Type: Grant
    Filed: February 22, 2007
    Date of Patent: November 6, 2012
    Assignee: Asylum Research Corporation
    Inventor: Roger Proksch
  • Patent number: 8220066
    Abstract: A The local probe microscopy apparatus (1) comprises a probe (3) with translation stages (5a, 5b) for controlling the position of the probe (3) relative to a sample surface. The probe (3) has a feedback mechanism (6, 5 7) for maintaining the deflection of the probe and a height measuring system (9) which includes means for compensating for environmental noise. The local probe microscopy apparatus is particularly suitable for use as a wafer inspection tool in a wafer fabrication plant where the inspection tool is liable to be exposed to significant mechanical vibration.
    Type: Grant
    Filed: August 4, 2008
    Date of Patent: July 10, 2012
    Assignee: Infinitesima Ltd.
    Inventor: Andrew Humphris
  • Patent number: 8214917
    Abstract: A microfluidic cell includes a compressible block and a cantilever. The compressible block includes a first horizontal surface, an opposite second horizontal surface and a plurality of vertical surfaces therebetween. A gasket structure depends downwardly from the second horizontal surface. The gasket structure defines an open cavity therein. The compressible block defines a fluid inlet passage and a fluid outlet passage each in fluid communication with the cavity and opening to a selected one of the first horizontal surface and one of the plurality of vertical surfaces. The cantilever includes body portion and a beam extending laterally therefrom. The body portion is embedded in the compressible block and a portion of the beam extends into the cavity defined by the gasket structure.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: July 3, 2012
    Assignee: Georgia Tech Research Corporation
    Inventors: Todd A. Sulchek, Siping Roger Qiu, Damien J. Noga, David K. Schoenwald
  • Patent number: 8191168
    Abstract: Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface.
    Type: Grant
    Filed: November 4, 2008
    Date of Patent: May 29, 2012
    Assignee: SII NanoTechnology Inc.
    Inventors: Xin Man, Kouji Iwasaki, Tatsuya Asahata
  • Publication number: 20120102601
    Abstract: Disclosed herein is a scanning probe microscope having an improved structure to precisely control a distance between a scanning probe and a surface of a sample. The scanning probe microscope includes a sample stage having a support structure on which a sample to be measured is placed and generating vibration, and a scanning probe not attached to the sample stage but independently constituted and scanning a surface of the sample placed on the sample stage and vibrated by the sample stage.
    Type: Application
    Filed: October 24, 2011
    Publication date: April 26, 2012
    Applicant: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY
    Inventors: Mun Seok JEONG, Kyoung-Duck Park, Seung Gol Lee
  • Patent number: 8028567
    Abstract: AFM tweezers that include a first probe, including a triangular prism member having a tip of a ridge which is usable as a probe tip in a scanning probe microscope, and a second probe, including a triangular prism member provided so as to open/close with respect to the first probe, are provided. The first probe and the second probe are juxtaposed such that a predetermined peripheral surface of the triangular prism member of the first probe and a predetermined peripheral surface of the triangular prism member of the second probe face substantially in parallel to each other, and the first probe formed of a notch that prevents interference with a sample when the sample is scanned by the tip of the ridge.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: October 4, 2011
    Assignees: AOI Electronics Co., Ltd., SII Nano Technology Inc.
    Inventors: Tatsuya Kobayashi, Masato Suzuki, Masatoshi Yasutake, Takeshi Umemoto
  • Patent number: 7926328
    Abstract: There is provided a sample manipulating apparatus which is an apparatus for manipulating a sample mounted on a substrate surface, in which at least position data and shape data are acquired by observing the sample. Thereafter, tweezers are positioned by moving means such that the sample is positioned between an observing probe and a grasping probe based on the two set of data. After positioning, a height of the tweezers is set to a position of being remote from the substrate surface by a constant distance by moving means while monitoring a result of measurement by displacement measuring means. Thereafter, the grasping probe is moved to a side of the observing probe while monitoring the result of measurement by the displacement measuring means at the set height and the sample is grasped while detecting a grasping start point.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: April 19, 2011
    Assignee: SII Nano Technology Inc.
    Inventors: Masatoshi Yasutake, Takeshi Umemoto, Masafumi Watanabe
  • Patent number: 7888655
    Abstract: The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder (40) to a second position in a second holder (10) and/or vice versa, each holder (10, 40) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders (10, 40) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders (10, 40) when the specimen is in the second position. The mechanical guidance mechanism may comprise extra parts (50). At least one of the holders (40) may be equipped to hold a multitude of specimens.
    Type: Grant
    Filed: July 25, 2007
    Date of Patent: February 15, 2011
    Assignee: FEI Company
    Inventors: Erik Pieter van Gaasbeek, Pleun Dona, Gerbert Jeroen van de Water, Johannes Antonius Maria van den Oetelaar, Paul Johannes Leonardes Barends, Ian Johannes Bernardus van Hees
  • Patent number: 7884323
    Abstract: The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.
    Type: Grant
    Filed: August 15, 2006
    Date of Patent: February 8, 2011
    Assignee: Cameca Instruments, Inc.
    Inventors: Thomas F. Kelly, Joseph H. Bunton, Scott A. Wiener
  • Patent number: 7849515
    Abstract: A nanotweezer (1) according to the present invention includes: a supporting member (25); an observation probe (10) that projects out from the supporting member (25), and is used when observing a surface of a specimen; a movable arm (20) that is arranged next to the observation probe (10) projecting out from the supporting member (25), and makes closed or opened between the observation probe (10) and the movable arm (20) to hold or release the specimen held between the observation probe (10) and the movable arm (20); and a drive mechanism that drives the movable arm (20) so as to make closed or opened between the observation probe (10) and the movable arm (20), and the supporting member (25), the observation probe (10) and the movable arm (20) are each formed by processing a semiconductor wafer (30) through a photolithography process.
    Type: Grant
    Filed: November 22, 2005
    Date of Patent: December 7, 2010
    Assignees: National University Corporation Kagawa University, AOI Electronics Co., Ltd.
    Inventors: Gen Hashiguchi, Maho Hosogi, Takashi Konno
  • Publication number: 20100306887
    Abstract: A microfluidic cell includes a compressible block and a cantilever. The compressible block includes a first horizontal surface, an opposite second horizontal surface and a plurality of vertical surfaces therebetween. A gasket structure depends downwardly from the second horizontal surface. The gasket structure defines an open cavity therein. The compressible block defines a fluid inlet passage and a fluid outlet passage each in fluid communication with the cavity and opening to a selected one of the first horizontal surface and one of the plurality of vertical surfaces. The cantilever includes body portion and a beam extending laterally therefrom. The body portion is embedded in the compressible block and a portion of the beam extends into the cavity defined by the gasket structure.
    Type: Application
    Filed: May 28, 2010
    Publication date: December 2, 2010
    Applicant: GEORGIA TECH RESEARCH CORPORATION
    Inventors: Todd A. Sulchek, Siping Roger Qiu, Damien J. Noga, David K. Schoenwald
  • Publication number: 20100242142
    Abstract: The invention relates to a scanning probe microscope comprising: a specimen holder holding a specimen; and a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of the specimen is tilted relative to at least one of the two orthogonal horizontal directions.
    Type: Application
    Filed: October 18, 2007
    Publication date: September 23, 2010
    Applicant: UNIVERSITEIT TWENTE
    Inventors: David Hermanus Adrianus Blank, Augustinus Josephus Helena Maria Rijnders, Joska Johannes Broekmaat, Frank Johan Gerhardus Roesthuis
  • Patent number: 7765606
    Abstract: A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.
    Type: Grant
    Filed: January 26, 2007
    Date of Patent: July 27, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takao Kusaka, Nobuki Yoshimatsu, Susumu Yasuda, Junichi Seki
  • Publication number: 20100154084
    Abstract: A microscope for performing apertureless near-field scanning optical microscopy on a sample comprising a means for mounting a sample; a scanning probe; means for illuminating the sample with light along optical axes from at least two illumination angles relative to an imaginary line connecting the probe and the sample; means for enhancing the electric field of light in a region of the sample with the probe; means for scanning the sample in a plane perpendicular to an imaginary line connecting the probe and the sample; means for moving said sample along said imaginary line to maintain a nearly constant distance between the probe and the sample; and means for collecting light scattered, emitted, or transmitted from the sample.
    Type: Application
    Filed: October 30, 2008
    Publication date: June 17, 2010
    Applicant: THE UNIVERSITY OF AKRON
    Inventors: Alexei Sokolov, Alexander Kisliuk, Ryan Hartschuh
  • Patent number: 7690047
    Abstract: A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a drive circuit for driving the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.
    Type: Grant
    Filed: January 26, 2007
    Date of Patent: March 30, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Susumu Yasuda, Junichi Seki, Takao Kusaka, Nobuki Yoshimatsu
  • Publication number: 20100032581
    Abstract: A method is described for producing a micro-gripper, which comprises a base body and a gripping body connected integrally to the base body, which projects beyond the base body and provides a receptacle slot on a free end area in such a way that a micrometer-scale or sub-micrometer-scale object may be clamped in the receptacle slot for gripping and holding, as well as a micro-gripper according to the species.
    Type: Application
    Filed: March 9, 2007
    Publication date: February 11, 2010
    Inventors: Christian Grosse, Frank Altmann, Michél Simon, Hilmar Hoffmeister, Detlef Riemer
  • Publication number: 20090230320
    Abstract: In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.
    Type: Application
    Filed: May 29, 2009
    Publication date: September 17, 2009
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Takao Kusaka, Nobuki Yoshimatsu, Susumu Yasuda, Junichi Seki
  • Publication number: 20090224170
    Abstract: An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.
    Type: Application
    Filed: February 25, 2009
    Publication date: September 10, 2009
    Inventors: Minoru YAMAZAKI, Akira Ikegami, Hideyuki Kazumi, Manabu Yano, Kazunari Asao, Takeshi Mizuno, Yuki Ojima
  • Patent number: 7574932
    Abstract: A sample working/observing apparatus possesses a sample holding mechanism. The sample holding mechanism possesses a sample holder holding a sample, and a base detachably supporting the sample holder. Between these, there are detachably provided a rotation support part supporting so as to be rotatable, a slide support part supporting so as to be slidable from a rotation center toward an X-direction, and a butting support part supporting so as to be slidable in the X-direction and a Y-direction. In an upper face, there are provided an X-direction positioning pin and a Y-direction positioning pin, which are disposed along the Y-direction and the X-direction from the rotation center, and butt against one side and the other side of the sample.
    Type: Grant
    Filed: January 31, 2007
    Date of Patent: August 18, 2009
    Assignee: SII Nano Technology Inc.
    Inventors: Masakatsu Hasuda, Mamoru Okabe
  • Publication number: 20090126051
    Abstract: Method and system for preparing samples for use in electron microscopy. The method and system use a focused ion beam (FIB) instrument and a scanning electron microscope to improve the time efficiency of the FIB instrument. The FIB instrument incorporates machining means for preparing thin-film samples by ion beam irradiation. The scanning electron microscope incorporates a gas supply means and a manipulator equipped with a probe. The gas supply means ejects gas at the sample after it has been shifted from the FIB instrument together with a sample holder. The sample is irradiated with an electron beam while the gas is injected at the sample from the gas supply means under the condition where the probe is contacted with the sample. Thus, the sample is bonded to the probe.
    Type: Application
    Filed: October 27, 2008
    Publication date: May 14, 2009
    Applicant: JEOL LTD.
    Inventor: Yusuke KAGAYA
  • Publication number: 20090119807
    Abstract: Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface.
    Type: Application
    Filed: November 4, 2008
    Publication date: May 7, 2009
    Inventors: Xin Man, Kouji Iwasaki, Tatsuya Asahata