Abstract: An atomic force microscope includes a sample stage on which a sample is placed, a cantilever including a probe tip, a laser radiating a laser beam to the cantilever, a photodetector receiving a laser beam reflected from the cantilever, a first camera photographing the sample and the cantilever, a second camera photographing the cantilever and the spot of the laser beam, and a processor electrically connected to the first and second cameras and the photodetector to process data acquired by the first and second cameras and the photodetector. An operation method of the atomic force microscope includes detecting the positions of the cantilever and the sample using the first camera, adjusting the position of the sample, detecting the positions of the laser and the cantilever using the second camera, aligning the laser, detecting the position of the laser beam using the photodetector, and aligning the position of the photodetector.

Abstract: This disclosure provides methods and apparatuses which advantageously stabilize beam parameters and elongate crystal lifetime. In one aspect, a UV laser apparatus includes a non-linear crystal, a laser source, a beam-crystal displacer, a beam parameter monitor, and a laser control unit. The laser source directs a source beam to the non-linear crystal to produce a UV beam and the beam-crystal displacer shifts the non-linear crystal relative to the source beam at a plurality of shift speeds. The beam parameter monitor measures the UV beam and outputs a measurement of a beam parameter. The laser control unit: receives the measurement; determines, based on the measurement, an adjustment in shift speed that steers the beam parameter toward a target value; and outputs the adjustment to the beam-crystal displacer.

Abstract: Disclosed are various embodiments for transferring molecules from a surface for mass spectrometry and other sample analysis methods, and the like. A laser is focused onto a tip of an atomic force microscope to remove and capture a quantity of molecules from the surface, so they can be transferred to a mass spectrometer or another instrument for analysis.

Abstract: The present invention relates to apparatuses and methods for examining a surface of a test object, such as e.g. a lithography mask. In accordance with one aspect of the invention, an apparatus for examining a surface of a mask comprises a probe which interacts with the surface of the mask, and a measuring apparatus for establishing a reference distance of the mask from a reference point, wherein the measuring apparatus measures the reference distance of the mask in a measurement region of the mask which is not arranged on the surface of the mask.

Abstract: An apparatus and method for facilitating Atomic Force Microscopy, SEM Nano-Probing, Scanning Probe Microscopy, and Collimated Ion Milling, through the implementation of a removable, magnetized fixture for fixing the position of a sample requiring surface treatment, the fixture attachable to a holder requiring surface treatment, the holder being mountable in various instruments, the fixture being transportable in a container having a magnetized surface plate or disc for magnetic attachment of said fixture, with the container having a valve to permit alternative evacuation and backfill with an inert gas to protect the sample surface.

Abstract: A charged particle beam device is described. In one aspect, the charged particle beam device includes a charged particle beam source, and a switchable multi-aperture for generating two or more beam bundles from a charged particle beam which includes: two or more aperture openings, wherein each of the two or more aperture openings is provided for generating a corresponding beam bundle of the two or more beam bundles; a beam blanker arrangement configured for individually blanking the two or more beam bundles; and a stopping aperture for blocking beam bundles. The device further includes a control unit configured to control the individual blanking of the two or more beam bundles for switching of the switchable multi-aperture and an objective lens configured for focusing the two or more beam bundles on a specimen or wafer.

Abstract: A frequency measuring and control apparatus includes a plurality of synchronized oscillators integrated in parallel into one programmable logic device.

Abstract: The present invention adds gain and phase into a canonical second order system in order to mitigate the adverse effects of unwanted resonance, where the gain is added to the forward path of a control loop of the system and is a ratio of the square of the system and mechanism frequencies, and the phase lead (H-factor) is added to the feedback path of the control loop of the system and is a complex ratio of these frequencies which includes a dc-component (Hdc) and a zero- or pole-component. By adding gain and phase lead, which is contrary to current approaches to addressing resonance, the present invention achieves the desired result of resonant free application in a canonical resonant-prone system of second order, and the methodology is applicable to higher order systems.

Abstract: A frequency measuring and control apparatus includes a plurality of synchronized oscillators integrated in parallel into one programmable logic device.

Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.

Abstract: An apparatus for demodulating an input signal that includes a frequency detector for tracking a frequency of the input signal, an oscillator and a mixer is disclosed. The input signal and an output signal of the oscillator can constitute the incoming signals for the mixer and the output signal of the mixer can constitute the demodulated input signal, wherein an arithmetic unit is arranged downstream of the frequency detector and upstream of the oscillator, wherein the tracked frequency of the input signal and a predefined second frequency constitute the incoming signals of the arithmetic unit and the arithmetic unit is designed such that it computes a control signal for the oscillator from the tracked frequency of the input signal and the predefined second frequency with the output signal of the oscillator depending on the control signal.

Abstract: Disclosed is a method for measuring the force interaction caused by a sample, wherein a bias voltage, with respect to the sample, is applied between a tip, and the tip is guided at such a small distance to the sample that a measurable current flows between the tip and the sample, and a sensor and signal converter S, which changes the current flowing through the tip-sample contact depending on the intensity of the force interaction, is formed and used in the region of the force interaction. A scanning tunneling microscope therefor is disclosed.

Abstract: A probe alignment tool (10) for scanning probe microscopes utilizes an attached relay optics to view the scanning probe microscope probe tip (40) and align its image in the center of the field of view of an optical microscope (36). Adjustments to optical microscope motorized stages (50) and (60) along with adjustments of scanning probe microscope stages (44), (46) and (58) allow determination of a path and distance from the center of the field of view to the probe tip (40). From such determination a target area to be examined by the scanning probe microscope may be positioned precisely and accurately under the probe tip (40). Replacement of a scanning probe microscope probe tip (40) in an atomic force microscope unit (42) may be accomplished without the loss of alignment measurements.

Abstract: A scanning probe microscope (SPM) has a piezoelectric actuator-based tube scanner to which a probe is attached and which is moveable in three planes by the application of a voltage to the piezoelectric tube. A set of flexures flex with the displacement of the tube and strain gauges attached to the flexures measure the flex of the flexures to provide feedback as to the displacement of the tube during the scanning of an object. The strain gauges and flexures form a kinematic sensing frame or arrangement in which a single constraint is provided for each degree of freedom and in which the constraints are at least substantially orthogonal to one another.

Abstract: A control system 32, 75 is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system 34 that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.

Abstract: A method of determining an applicable threshold for determining the critical dimension of a category of patterns imaged by atomic force scanning electron microscopy is presented. The method includes acquiring, from a plurality of patterns, a pair of images for each pattern; for each pair of images determining a reference critical dimension via an image obtained by a reference instrumentation and determining an empirical threshold applicable to an image obtained by a CD-SEM instrumentation such that the empirical threshold substantially corresponds to the reference critical dimension; determining a threshold applicable to a category of patterns, the threshold being determined from a plurality of empirical thresholds.

Abstract: The method relates to a method of scanning a sample. Scanning a sample is typically done by scanning the sample with a probe along a multitude of parallel lines. In prior art scan methods a sample is scanned multiple times with a nominally identical scan pattern. The invention is based on the insight that the coherence between adjacent points in a direction along the scan direction is much better than the coherence of adjacent points perpendicular to the scan direction. By combining two images that are scanned perpendicular to each other, it should thus be possible to form an image making use of the improved coherence (due to shorter temporal distance) in both directions. The method thus involves scanning the sample with two scan patterns, the lines of one scan pattern preferably perpendicular to the lines of the other scan pattern. Hereby it is possible to use the temporal coherence of scan points on a line of one scan pattern to align the lines of the other scan pattern, and vice versa.

Abstract: Methods and apparatus are provided herein for time-resolved analysis of the effect of a perturbation (e.g., a light or voltage pulse) on a sample. By operating in the time domain, the provided method enables sub-microsecond time-resolved measurement of transient, or time-varying, forces acting on a cantilever.

Abstract: A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.

Abstract: A novel way for constructing and operating scanning probe microscopes to dynamically measure material properties of samples, mainly their surface hardness, by separating the functions of actuation, indentation and sensing into separate dynamic components. The amplitude and phase shift of higher modes occurring at periodic indentations with the sample are characteristic values for different sample materials. A separate sensor cantilever, connected to the indentation probe tip, has the advantage of a high mechanical amplification of a desired higher mode while suppressing the actuation signal itself. The operational range of the sensor can be extended just by switching the actuation signal to another submultiple of the sensor cantilever's resonance frequency and/or by using more than one sensor cantilever for each indentation tip.

Abstract: A method of measuring vibration characteristics of a cantilever in a scanning probe microscope (SPM). An excitation signal is generated by a forward and backward frequency sweep signal in a frequency range including a resonance frequency of the cantilever. The cantilever is vibrated by supplying the excitation signal to a vibrating portion of the cantilever. The largest amplitude of a displacement of the cantilever in a forward path and in a backward path is directly measured, and an intermediate value of a frequency between frequencies measured on the basis of the directly measured largest amplitude of the displacement of the cantilever is detected as the resonance frequency of the cantilever.

Abstract: An optimal input design method and apparatus to achieve rapid broadband nanomechanical measurements of soft materials using the indentation-based method for the investigation of fast evolving phenomenon, such as the crystallization process of polymers, the nanomechanical measurement of live cell during cell movement, and force volume mapping of nonhomogeneous materials, are presented. The indentation-based nanomechanical measurement provides unique quantification of material properties at specified locations. Particularly, an input force profile with discrete spectrum is optimized to maximize the Fisher information matrix of the linear compliance model of the soft material.

Abstract: A method for positioning a tip of an atomic force microscope relative to a intracellular target site in a cell is provided. In general terms, the method comprises: a) positioning a fluorescent tip of an atomic force microscope over a cell comprising a fluorescent intracellular target site so that said tip is above target site; b) moving the tip toward said target site while obtaining images of the distal end of said tip and/or the target site using a fluorescence microscope; and c) arresting the movement of the tip when the target site and the distal end of the tip are both in focus in the fluorescence microscope. A microscope system for performing the method is also provided.

Abstract: According to one embodiment, a planar positioning device includes a first actuator displaceable in a first axis direction, a second actuator displaceable in a second axis direction perpendicular to the first axis, a first displacement magnifying mechanism configured to magnify a displacement of the first actuator, a second displacement magnifying mechanism configured to magnify a displacement of the second actuator, a stage arranged in a plane, a first drive support mechanism including a parallel link connected between the first displacement magnifying mechanism and the stage to transmit the magnified displacement in the first-axis direction to the stage, a second drive support mechanism including a parallel link connected between the second displacement magnifying mechanism and the stage to transmit the magnified displacement in the second-axis direction to the stage, and a stabilizing support mechanism configured to apply tensions in the first-axis direction and the second-axis direction to the stage.

Abstract: An approach for the thermomechanical characterization of phase transitions in polymeric materials (polyethyleneterephthalate) by band excitation acoustic force microscopy is developed. This methodology allows the independent measurement of resonance frequency, Q factor, and oscillation amplitude of a tip-surface contact area as a function of tip temperature, from which the thermal evolution of tip-surface spring constant and mechanical dissipation can be extracted. A heating protocol maintained a constant tip-surface contact area and constant contact force, thereby allowing for reproducible measurements and quantitative extraction of material properties including temperature dependence of indentation-based elastic and loss moduli.

Abstract: A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half.

Abstract: Provided are methods and systems for high resolution imaging of a material immersed in liquid by scanning probe microscopy. The methods further relate to imaging a material submersed in liquid by tapping mode atomic force microscopy (AFM), wherein the AFM has a microfabricated AFM probe comprising a nanoneedle probe connected to a cantilever beam. The nanoneedle probe is immersed in the liquid, and the rest of the AFM probe, including the cantilever beam to which the nanoneedle probe is attached, remains outside the liquid. The cantilever is oscillated and the nanoneedle probe tip taps the material to image the material immersed in liquid. In an aspect, the material is supported on a shaped substrate to provide a spatially-varying immersion depth with specially defined regions for imaging by any of the methods and systems of the present invention.

Abstract: Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel or spectroscopy step to accommodate changes in sample properties (adaptive band excitation).

Abstract: An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.

Abstract: The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever.

Abstract: The present invention relates to a method for investigating a sample using scanning probe photon microscopy or optical force microscopy, and to an apparatus which is designed accordingly. The method or the apparatus provides for two optical traps which can be moved in a local region of the sample, wherein in at least one of the two traps a probe is held. The sample is scanned using the two traps and the measured data from the two traps are captured separately and evaluated by correlation. In particular interference signals resulting from an interaction between sample and light trap can be eliminated by the method.

Abstract: A probe assembly for use with a scanning probe microscope includes a carrier supporting at least two probes mounted on a tilt stage arranged to tilt the carrier about an axis. The probes may be distributed on one or more surfaces. In use, the tilt stage operates either as a selection device, orienting a selected probe or surface towards a sample, and/or as an alignment tool, adjusting a planar array of probes such that they are better aligned with the sample. This offers the potential for automated exchange of probes, with increased speed and accuracy, during microscope operation.

Abstract: A frequency measuring and control apparatus includes a plurality of synchronized oscillators integrated in parallel into one programmable logic device.

Abstract: Disclosed is a method for examining a sample using a scanning tunneling microscope, wherein before or during image recording, a contrast agent is applied to at least one location on the tip of the scanning tunneling microscope and/or on the sample, which is part of the tunneling contact during the image recording, while a temperature less than or equal to the condensation temperature of the contrast agent is set at this location. A corresponding scanning tunneling microscope is disclosed.

Abstract: The invention relates to a multifunctional scanning probe microscope comprising: a base (1); a preliminary approach unit (3) movably mounted on the base (1); a piezo-scanner (4) disposed on the preliminary approach unit (3); an object holder (5) disposed on the piezo-scanner (4); a sample (6) which comprises a measuring area (M) and is attached to the piezo-scanner (4) with the aid of the object holder (5); a platform (9) attached to the base (1) opposite the sample (6); an analyzer mounted on the platform (9) and comprising a first measuring head (13) which is oriented towards the sample (6) and is adapted for probing the measuring area (M) of the sample (6).

Abstract: A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.

Abstract: An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an amplifier; and a crossover network connected between the amplifier, and the first actuator and the second actuator. The crossover network is adapted to provide a first drive signal to the first actuator over a first frequency range and to provide a second drive signal to the second actuator over a second frequency range.

Abstract: Devices for performing nanofabrication are provided which provide small volume reaction space and high reaction versatility. A device may include a reaction chamber adapted for nanoscale modification of a substrate and vacuum conditions; a scanning probe tip assembly enclosed within the reaction chamber; a first port coupled to the reaction chamber for delivering a gas; a second port coupled to the reaction chamber for applying a vacuum; and a substrate assembly insertedly mounted to the reaction chamber. The reaction chamber may include a body having one or more flexible walls and one or more supports to prevent the reaction chamber from collapsing under a vacuum. The device may further include an electrical conduit for coupling the tips of the scanning probe tip assembly to electrical components outside the reaction chamber. Also provided are apparatuses incorporating the devices and methods of using the devices and apparatuses.

Abstract: Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface.

Abstract: A method for Transmission Electron Microscopy (TEM) sample creation. The use of a Scanning Electron Microscope (SEM)—Scanning Transmission Electron Microscope (STEM) detector in the dual-beam focused ion beam (FIB)/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create TEM samples by using a precise endpoint detection method. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide methods for endpointing sample thinning and methods to partially or fully automate endpointing.

Abstract: There is provided in one embodiment of the invention a method for analyzing a sample material using surface enhanced spectroscopy. The method comprises the steps of imaging the sample material with an atomic force microscope (AFM) to select an area of interest for analysis, depositing nanoparticles onto the area of interest with an AFM tip, illuminating the deposited nanoparticles with a spectrometer excitation beam, and disengaging the AFM tip and acquiring a localized surface enhanced spectrum. The method may further comprise the step of using the AFM tip to modulate the spectrometer excitation beam above the deposited nanoparticles to obtain improved sensitivity data and higher spatial resolution data from the sample material. The invention further comprises in one embodiment a system for analyzing a sample material using surface enhanced spectroscopy.

Abstract: An object of the present invention is to provide an atomic force microscope apparatus allowing tracking errors to be made as close to zero as possible to reduce images obtained through high-speed scanning from being degraded. To accomplish the object of the present invention, the present invention provides an atomic force microscope apparatus imaging a surface topography of a sample in a contact mode, the apparatus including a cantilever having a probe interacting with the sample surface via an atomic force and being subjected to a deflection by the atomic force, laser light provision means for allowing first laser light to enter the cantilever, light detection means, a controller estimating the surface topography of the sample surface, and data storage means for recording the estimated surface topography.

Abstract: A method of determining the position of a probe tip. An evanescent electromagnetic field is generated extending beyond an interface boundary between a first medium, having a first refractive index, and a second medium, having a second refractive index which is greater than the first refractive index, the interface boundary extending in a plane. A probe tip is positioned in the evanescent field in the first medium thereby causing propagating electromagnetic radiation to be produced as a result of the disruption of the evanescent field by the probe tip, and at least a portion of the propagating electromagnetic radiation is collected. The spatial intensity distribution of the collected radiation is detected with respect to an image plane. An at least one dimensional position of the probe tip in a probe tip plane is determined from the detected spatial intensity distribution, the probe tip plane being a plane which contains the probe tip and which is substantially parallel to the plane of the interface boundary.

Abstract: The preferred embodiments are directed to a method of operating an SPM including providing probe cassette for a scanning probe microscope that includes a base having at least one probe storage receptacle, a lid mountable on the base with the probe storage receptacle at least substantially covering the at least one receptacle, and a probe retainer that retains a probe device of the scanning probe microscope in the receptacle under a compressive force. The probe cassette can be pre-loaded and shipped to a user site where the cassette can be loaded in an AFM without manual manipulation of the individual probe devices.

Abstract: A scanning probe microscope and method for using the same are disclosed. The Scanning probe microscope includes a probe mount for connecting a cantilever arm and a probe signal generator. The probe position signal generator generates a position signal indicative of a position of the probe relative to one end of the cantilever arm. The probe position signal generator includes a first light source that directs a light beam at a first reflector positioned on the cantilever arm and a detector that detects a position of the light beam after the light beam has been reflected from the first reflector. A second reflector reflects the light beam after the light beam is reflected from the first reflector and before the light beam enters the detector, the second reflector passing light from a second light source that illuminates the sample.

Abstract: The invention relates to a transfer mechanism for transferring a specimen (2) from a first position in a first holder (40) to a second position in a second holder (10) and/or vice versa, each holder (10, 40) equipped to detachably hold the specimen, the transfer of the specimen between the holders taking place in a transfer position different from the second position, characterized in that when the specimen is transferred between the holders (10, 40) a mechanical guidance mechanism positions the holders with a mutual accuracy higher than the mutual accuracy in the second position, and said mechanical guidance mechanism not positioning at least one of the holders (10, 40) when the specimen is in the second position. The mechanical guidance mechanism may comprise extra parts (50). At least one of the holders (40) may be equipped to hold a multitude of specimens.

Abstract: Microscope, in particular a scanning probe microscope, comprising a programmable logic device.

Abstract: A nanotweezer (1) according to the present invention includes: a supporting member (25); an observation probe (10) that projects out from the supporting member (25), and is used when observing a surface of a specimen; a movable arm (20) that is arranged next to the observation probe (10) projecting out from the supporting member (25), and makes closed or opened between the observation probe (10) and the movable arm (20) to hold or release the specimen held between the observation probe (10) and the movable arm (20); and a drive mechanism that drives the movable arm (20) so as to make closed or opened between the observation probe (10) and the movable arm (20), and the supporting member (25), the observation probe (10) and the movable arm (20) are each formed by processing a semiconductor wafer (30) through a photolithography process.

Abstract: An object of the present invention is to provide a probe microscope that permits qualitative and quantitative evaluation on ions existing near the surface of a sample and permits to detect further simply and easily such as impurities, flaws and corrosion origins existing on the sample in high sensitivity. A probe microscope according to the present invention is provided with a test cell that holds a sample and permits to receive liquid, a probe, a counter electrode, a reference electrode, a drive mechanism that causes the probe to follow the surface of the sample as well as to scan the same, a potential control portion that controls a potential between the probe and the reference electrode and a current measuring portion that measures a current flowing between the probe and the counter electrode, and is characterized in that the material of the probe is constituted by a conductive body containing any of gold or gold alloy, carbon or carbon compound, boron, zinc, lead, tin and mercury.

Abstract: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.