Scanning Near-field Optical Microscopy [snom] Or Apparatus Therefor, E.g., Snom Probes (epo) Patents (Class 850/30)
  • Patent number: 9658247
    Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation.
    Type: Grant
    Filed: March 1, 2015
    Date of Patent: May 23, 2017
    Assignee: Anasys Instruments
    Inventors: Honghua Yang, Kevin Kjoller, Sam Berweger, Craig Prater
  • Patent number: 9123500
    Abstract: An improved method and apparatus for shutting down and restoring an ion beam in an ion beam system. Preferred embodiments provide a system for improved power control of a focused ion beam source, which utilizes an automatic detection of when a charged particle beam system is idle (the beam itself is not in use) and then automatically reducing the beam current to a degree where little or no ion milling occurs at any aperture plane in the ion column. Preferred embodiments include a controller operable to modify voltage to an extractor electrode and/or to reduce voltage to a source electrode when idle state of an ion source of the charged particle beam system is detected.
    Type: Grant
    Filed: March 31, 2012
    Date of Patent: September 1, 2015
    Assignee: FEI COMPANY
    Inventors: Tom Miller, Sean Kellogg, Jiri Zbranek
  • Patent number: 9043946
    Abstract: The present invention relates to a method for measuring the near-field signal of a sample in a scattering type near-field microscope and to a device for conducting said method.
    Type: Grant
    Filed: December 19, 2012
    Date of Patent: May 26, 2015
    Assignee: Neaspec GmbH
    Inventor: Nenad Ocelic
  • Patent number: 9043947
    Abstract: A method is provided for manufacturing near-field optical probes including at least one organo-mineral material with an organic part and a mineral part, the method including steps of irradiating at least partially the organo-mineral material with a radiation beam to polymerize the organic part in the irradiated areas, and polycondensing the mineral part by sol-gel process. Also disclosed are near-field optical probes and AFM and SNOM systems using the probes.
    Type: Grant
    Filed: January 9, 2012
    Date of Patent: May 26, 2015
    Assignees: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, UNIVERSITE MONTPELLIER 2 SCIENCES ET TECHNIQUES
    Inventors: Pascal Falgayrettes, Raphael Kribich, Laurent Nativel, Bachar Mourched, Pascale Gall-Borrut, Benoit Belier
  • Patent number: 8997260
    Abstract: An embodiment includes an integrated microscope including scanning probe microscopy (SPM) hardware integrated with optical microscopy hardware, and other embodiments include related methods and devices.
    Type: Grant
    Filed: February 23, 2012
    Date of Patent: March 31, 2015
    Inventors: Ryan Murdick, Lukas Novotny
  • Publication number: 20150089694
    Abstract: The present invention relates to a method for measuring the near-field signal of a sample in a scattering type near-field microscope and to a device for conducting said method.
    Type: Application
    Filed: December 19, 2012
    Publication date: March 26, 2015
    Applicant: Neaspec GmbH
    Inventor: Nenad Ocelic
  • Patent number: 8904561
    Abstract: An atomic force microscope based apparatus and method for detecting Raman effect on a sample of interest utilizes first and second electromagnetic sources to emit first electromagnetic radiation of frequency Vi and second electromagnetic radiation of frequency V2 onto a probe tip, which is coupled to a structure that can oscillate the probe tip. The frequency Vi and the frequency v2 are selected to induce Raman effect on a sample engaged by the probe tip that results in Raman force interactions between the probe tip and the sample. Oscillations of the probe tip due to the Raman force interactions are then measured.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: December 2, 2014
    Inventor: H. Kumar Wickramasinghe
  • Patent number: 8832861
    Abstract: The invention relates to a device for conducting near-field optical measurements of a specimen, a method for conducting near-field optical measurements and the use of the device.
    Type: Grant
    Filed: March 12, 2010
    Date of Patent: September 9, 2014
    Assignee: Neaspec GmbH
    Inventor: Nenad Ocelic
  • Patent number: 8793811
    Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: July 29, 2014
    Assignee: Anasys Instruments
    Inventors: Craig Prater, Markus B. Raschke, Sam Berweger
  • Patent number: 8769711
    Abstract: The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device, and in which at least one subsection (1) of the measurement object (2, 12) is optically examined by an optical measurement system in an observation region associated with the optical measurement system, wherein a displacement of the at least one subsection (1) of the measurement object (2, 12) out of the observation region which is brought about by the examination by means of scanning probe microscopy is corrected in such a way that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged back in the observation region by means of a readjustment device which processes data signals that characterize the displacement.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: July 1, 2014
    Assignee: JPK Instruments AG
    Inventor: Torsten Jähnke
  • Publication number: 20140165237
    Abstract: Disclosed is a measurement method of a scanning probe microscope based upon a measurement method of a scanning probe microscope for observing a shape and an optical property of a sample by exciting near-field light, scanning relative positions of the near-field light and the sample and detecting scattered light by the sample of the near-field light and having a characteristic that the near-field light is modulated to periodically vary the relative positions of the near-field light and the sample and that a frequency of modulation applied to the near-field light and an interference signal generated at a frequency for varying the relative positions of the near-field light and the sample are selectively extracted.
    Type: Application
    Filed: April 4, 2012
    Publication date: June 12, 2014
    Applicant: Hitachi, Ltd.
    Inventors: Takehiro Tachizaki, Toshihiko Nakata, Masahiro Watanabe
  • Patent number: 8724116
    Abstract: Provided is a scanning optical measurement apparatus having super resolution.
    Type: Grant
    Filed: February 18, 2008
    Date of Patent: May 13, 2014
    Assignee: Industry-Academic Cooperation Foundation, Yonsei University
    Inventors: Seung-Han Park, Dae-Geun Kim, Hong-Gyu Ahn, Eung-Jang Lee
  • Patent number: 8695109
    Abstract: A system and method for optically imaging a sample. The method and system uses a controlled scatterer of light positioned in the near field of a sample. The extinguished power from an incident field, which illuminates both the sample and the controlled scatterer, is then measured as a function of the controlled scatterer position and is used to mathematically reconstruct an image of the sample.
    Type: Grant
    Filed: October 11, 2011
    Date of Patent: April 8, 2014
    Assignee: The Trustees Of The University Of Pennsylvania
    Inventors: John C. Schotland, Alexander A. Govyadinov, George Y. Panasyuk
  • Patent number: 8693837
    Abstract: An optical fiber including a surface including a non-covalent multilayer including a light-absorbing material can be used to develop fluorescence microscopy with a lateral resolution of about 5 nm and possibly lower. The non-covalent multilayer can be a highly absorptive thin film, for example a film based on J-aggregates, which can be used with conventional Near-Field Scanning Optical Microscopy.
    Type: Grant
    Filed: March 19, 2008
    Date of Patent: April 8, 2014
    Assignee: Massachusetts Institute of Technology
    Inventors: Jonathan R. Tischler, Michael Scott Bradley, Vladimir Bulovic
  • Patent number: 8606426
    Abstract: A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.
    Type: Grant
    Filed: October 23, 2009
    Date of Patent: December 10, 2013
    Assignee: Academia Sinica
    Inventors: Ing-Shouh Hwang, En-Te Hwu, Hans Ulrich Danzebrink, Hartmut Illers
  • Patent number: 8601609
    Abstract: Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism that calculates an effective probe height and a torsional spring constant of the cantilever from bending sensitivity determined from displacement information in a bending direction of the cantilever and torsional sensitivity determined from displacement information in a torsional direction of the cantilever, respectively, so as to use the calculated values for calculating the friction force.
    Type: Grant
    Filed: March 1, 2012
    Date of Patent: December 3, 2013
    Assignee: SII NanoTechnology Inc.
    Inventors: Masatoshi Yasutake, Masafumi Watanabe
  • Patent number: 8549661
    Abstract: An apparatus for performing magnetic resonance force microscopy on one or more large area samples comprising a base plate, one or more heat sink plates coupled to the base plate, one or more suspension mechanisms coupled to the base plate and the heat sink plates, a probe head suspended from the one or more suspension mechanisms for scanning the one or more samples and a sample cylinder comprising a sample stage coupled to the probe head for sample positioning and an outer drum for isolating the sample stage.
    Type: Grant
    Filed: January 30, 2012
    Date of Patent: October 1, 2013
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventor: Doran Smith
  • Patent number: 8528111
    Abstract: A method for positioning a tip of an atomic force microscope relative to a intracellular target site in a cell is provided. In general terms, the method comprises: a) positioning a fluorescent tip of an atomic force microscope over a cell comprising a fluorescent intracellular target site so that said tip is above target site; b) moving the tip toward said target site while obtaining images of the distal end of said tip and/or the target site using a fluorescence microscope; and c) arresting the movement of the tip when the target site and the distal end of the tip are both in focus in the fluorescence microscope. A microscope system for performing the method is also provided.
    Type: Grant
    Filed: July 5, 2011
    Date of Patent: September 3, 2013
    Assignee: Agilent Technologies, Inc.
    Inventors: Nazumi Alice Yamada, Bo U. Curry, Chriatian Rankl
  • Patent number: 8490210
    Abstract: A contact type plasmonic nano optical probe, a parallel probe constituted of the same, a plasmonic optical apparatus including the parallel probe, and a method of fabricating the parallel probe are disclosed. A contact type plasmonic nano optical probe includes a probe tip which protrudes in a truncated shape having a narrower plan surface and a wider plan surface relatively wider than the narrower plan surface, of which a metal thin film is coated on a surface, of and which an aperture of nm diameter included in a portion of the metal thin film on a central portion of the narrower plan surface, a spring structure disposed at a perimeter of the probe tip and configured to maintain a distance between the probe tip and a film to be exposed, a dielectric filled within the aperture, and a protection layer disposed on the narrower plan surface of the probe tip. Here, an optical transport path is included within the probe tip to be connected to the aperture.
    Type: Grant
    Filed: December 6, 2010
    Date of Patent: July 16, 2013
    Assignee: Industry-Academic Cooperation Foundation, Yonsei University
    Inventor: Jae Won Hahn
  • Patent number: 8484756
    Abstract: A scanning probe microscopy instrument includes a cantilevered tip that has a nanowire light emitting diode (LED).
    Type: Grant
    Filed: January 19, 2011
    Date of Patent: July 9, 2013
    Assignee: The United States of America, as represented by the Secretary of Commerce, the National Institute of Standards and Technology
    Inventors: Kristine A. Bertness, Norman A. Sanford, Pavel Kabos, Thomas M. Wallis
  • Publication number: 20130145507
    Abstract: In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
    Type: Application
    Filed: August 15, 2012
    Publication date: June 6, 2013
    Inventors: Toshihiko NAKATA, Masahiro WATANABE, Takashi INOUE, Kishio HIDAKA, Motoyuki HIROOKA
  • Patent number: 8429761
    Abstract: A method of obtaining PINEM images includes providing femtosecond optical pulse, generating electron pulses, and directing the electron pulses towards a sample. The method also includes overlapping the femtosecond optical pulses and the electron pulses spatially and temporally at the sample and transferring energy from the femtosecond optical pulses to the electron pulses. The method further includes detecting electron pulses having an energy greater than a zero loss value, providing imaging in space and time.
    Type: Grant
    Filed: September 16, 2010
    Date of Patent: April 23, 2013
    Assignee: California Institute of Technology
    Inventors: Ahmed H. Zewail, David J. Flannigan, Brett Barwick
  • Publication number: 20130097739
    Abstract: To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit.
    Type: Application
    Filed: October 12, 2012
    Publication date: April 18, 2013
    Inventor: Hitachi High-Technologies Corporation
  • Patent number: 8424111
    Abstract: Provided is a scanning near-field optical microscope capable of obtaining, in a highly sensitive manner, optical information having a spatial frequency higher than a spatial frequency corresponding to a wavelength of irradiation light. A scanning near-field optical microscope 100 according to the present invention includes: a light irradiating part 102 for emitting illumination light toward a sample 107; a light receiving part 112 for receiving light; a microstructure for generating or selectively transmitting near-field light, the microstructure being disposed on at least one of an emission side of the light irradiating part 102 and an incident side of the light receiving part 112; and an ultrahigh-wavenumber transmitting medium 108 for transmitting near-field light, the ultrahigh-wavenumber transmitting medium exhibiting anisotropy in permittivity or permeability.
    Type: Grant
    Filed: June 23, 2011
    Date of Patent: April 16, 2013
    Assignees: Olympus Corporation, The University of Tokyo
    Inventors: Koichi Karaki, Kimihiko Nishioka, Yasuo Sasaki, Takuya Tsukagoshi, Yoshiharu Ajiki, Isao Shimoyama, Kiyoshi Matsumoto, Tetsuro Kan, Yusuke Takei, Kentaro Noda
  • Patent number: 8407811
    Abstract: In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
    Type: Grant
    Filed: February 25, 2010
    Date of Patent: March 26, 2013
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Motoyuki Hirooka
  • Patent number: 8393010
    Abstract: A near-field scanning optical microscope is disclosed. The microscope includes a lighting component, a probe and an ellipsoidal mirror. The lighting component emits a light. The probe is disposed on one side of a testing sample, and the light is focused around a probe tip to draw the near-field light out. The ellipsoidal mirror has a first focal point and a second focal point, and the first focal point and the probe tip are disposed at the corresponding positions, and the near-field light drawn out from the probe tip is scattered from the first focal point inside the ellipsoidal mirror, and reflected and passed through the second focal point.
    Type: Grant
    Filed: January 28, 2011
    Date of Patent: March 5, 2013
    Assignee: National Applied Research Laboratories
    Inventors: Chih-Wen Chen, Jyh-Rou Sze, Din-Ping Tsai, Fong-Zhi Chen
  • Patent number: 8332960
    Abstract: A device for scanning the surface of a sample which is covered with a liquid, comprising a probe which has a tip at one end, means for moving the probe and the sample relative to one another a light source focussing device which focuses light from the light source onto a location in the area of the tip located in the liquid and a detector for detecting light which was scattered by the tip, wherein a boundary surface at which the light enters the liquid is located on the light path between the light source and the tip, wherein the boundary surface is positionally fixed with respect to the probe.
    Type: Grant
    Filed: September 14, 2007
    Date of Patent: December 11, 2012
    Assignee: Westfalische Wilhems-Universitat Munster
    Inventors: Tilman Schäffer, Matthias Böcker, Boris Anczykowski
  • Patent number: 8286260
    Abstract: A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques and includes: (A) an atmospheric pressure or near-atmospheric pressure ionization region; (B) a sample holder for holding the sample; (C) a laser for illuminating said sample; (D) a mass spectrometer having at least one evacuated chamber; (E) an atmospheric pressure interface for connecting said ionization region and said mass spectrometer; (F) a scanning near-field optical microscopy instrument; (G) a recording device for recording topography and mass spectrum measurements made during scanning of the sample with the near-field probe; (H) a plotting device for plotting said topography and mass spectrum measurements as separate x-y mappings; and (I) an imaging device for providing images of the x-y mappings.
    Type: Grant
    Filed: May 19, 2010
    Date of Patent: October 9, 2012
    Assignee: The George Washington University
    Inventors: Akos Vertes, Mark E. Reeves, Fatah Kashanchi
  • Patent number: 8266718
    Abstract: A microwave microscope including a probe tip electrode vertically positionable over a sample and projecting downwardly from the end of a cantilever. A transmission line connecting the tip electrode to the electronic control system extends along the cantilever and is separated from a ground plane at the bottom of the cantilever by a dielectric layer. The probe tip may be vertically tapped near or at the sample surface at a low frequency and the microwave signal reflected from the tip/sample interaction is demodulated at the low frequency. Alternatively, a low-frequency electrical signal is also a non-linear electrical element associated with the probe tip to non-linearly interact with the applied microwave signal and the reflected non-linear microwave signal is detected at the low frequency. The non-linear element may be semiconductor junction formed near the apex of the probe tip or be an FET formed at the base of a semiconducting tip.
    Type: Grant
    Filed: February 16, 2010
    Date of Patent: September 11, 2012
    Assignee: The Board of Trustees of Leland Stanford Junior University
    Inventors: Keji Lai, Michael Kelly, Zhi-Xun Shen
  • Publication number: 20120204297
    Abstract: Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
    Type: Application
    Filed: April 13, 2012
    Publication date: August 9, 2012
    Applicant: Hitachi, Ltd.
    Inventors: Toshihiko NAKATA, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Toshiaki Morita, Motoyuki Hirooka
  • Patent number: 8209767
    Abstract: An optical metrology tool may include a source of electromagnetic radiation having a characteristic wavelength, an objective having a central obscuration, a near field element located within the central obscuration of the objective, and an electromagnetic radiation detector coupled to the near field element. A mechanism is configured to bring the near field element into proximity to the target. A characteristic dimension of the near field element is sufficient smaller than the wavelength of the electromagnetic radiation that when the electromagnetic radiation passes through the cavity and the cavity is in sufficient proximity to the target that evanescent waves can couple energy from propagating radiation in the near-field element to the target. The detector detects an optical signal due to the evanescent waves coupling to the target.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: June 26, 2012
    Assignee: KLA-Tencor Corporation
    Inventor: Amnon Manassen
  • Publication number: 20120159677
    Abstract: A near-field scanning optical microscope is disclosed. The microscope includes a lighting component, a probe and an ellipsoidal mirror. The lighting component emits a light. The probe is disposed on one side of a testing sample, and the light is focused around a probe tip to draw the near-field light out. The ellipsoidal mirror has a first focal point and a second focal point, and the first focal point and the probe tip are disposed at the corresponding positions, and the near-field light drawn out from the probe tip is scattered from the first focal point inside the ellipsoidal mirror, and reflected and passed through the second focal point.
    Type: Application
    Filed: January 28, 2011
    Publication date: June 21, 2012
    Applicant: NATIONAL APPLIED RESEARCH LABORATORIES
    Inventors: Chih-Wen CHEN, Jyh-Rou SZE, Din-Ping TSAI, Fong-Zhi CHEN
  • Publication number: 20120137396
    Abstract: A method comprising characterizing the dimensions of structures on a semiconductor device having dimensions less than approximately 100 nanometers (nm) using one of scanning probe microscopy (SPM) or profilometry.
    Type: Application
    Filed: January 25, 2012
    Publication date: May 31, 2012
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Duncan M. Rogers, Vladimir A. Ukraintsev
  • Publication number: 20120096601
    Abstract: A system and method for optically imaging a sample. The method and system uses a controlled scatterer of light positioned in the near field of a sample. The extinguished power from an incident field, which illuminates both the sample and the controlled scatterer, is then measured as a function of the controlled scatterer position and is used to mathematically reconstruct an image of the sample.
    Type: Application
    Filed: October 11, 2011
    Publication date: April 19, 2012
    Inventors: John C. Schotland, Alexander A. Govyadinov, George Y. Panasyuk
  • Patent number: 8122761
    Abstract: A microcantilever sensor includes a supporting substrate, a cantilever spring element at least partially disposed over the support substrate, a probe layer disposed over the first side of the cantilever spring element, and a piezoresistive transducer attached to the second side of the cantilever spring element. The cantilever spring element is characterized by having a first side and a second side and comprising a polymer having a Young's modulus less than about 100 Gpa. Sensing systems that incorporate the cantilever sensor of the invention include a detector in communication with the piezoresistive transducer to provide measurements of surface strain changes in the piezoresistive transducer.
    Type: Grant
    Filed: January 20, 2006
    Date of Patent: February 28, 2012
    Assignee: Wayne State University
    Inventor: Yong Xu
  • Patent number: 8115921
    Abstract: A probe for near-field light scattering, has, on the tip thereof, at least fine particles containing silver or silver oxide, a titanium oxide layer, and a silver layer at least in the named order from the surface thereof. A process for producing the probe for near-field light scattering comprises at least steps of forming a silver layer, a titanium oxide layer, and fine particles containing silver or silver oxide in the named order on the body of the probe. A near-field optical microscope or a Raman spectroscope, comprises the probe for the near-field light scattering; a control function for bringing the probe into contact with a surface of a test sample; an optical excitation system for producing an exciting light to or vicinity of the tip of the probe; and detecting optical system for detecting detection light emitted form the tip of the probe.
    Type: Grant
    Filed: October 16, 2008
    Date of Patent: February 14, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventor: Shigeki Yoshida
  • Patent number: 8108943
    Abstract: There is provided in one embodiment of the invention a method for analyzing a sample material using surface enhanced spectroscopy. The method comprises the steps of imaging the sample material with an atomic force microscope (AFM) to select an area of interest for analysis, depositing nanoparticles onto the area of interest with an AFM tip, illuminating the deposited nanoparticles with a spectrometer excitation beam, and disengaging the AFM tip and acquiring a localized surface enhanced spectrum. The method may further comprise the step of using the AFM tip to modulate the spectrometer excitation beam above the deposited nanoparticles to obtain improved sensitivity data and higher spatial resolution data from the sample material. The invention further comprises in one embodiment a system for analyzing a sample material using surface enhanced spectroscopy.
    Type: Grant
    Filed: November 26, 2008
    Date of Patent: January 31, 2012
    Assignee: California Institute of Technology
    Inventor: Mark S. Anderson
  • Publication number: 20110321204
    Abstract: Provided is a scanning near-field optical microscope capable of obtaining in a highly sensitive manner, optical information having a spatial frequency higher than a spatial frequency corresponding to a wavelength of irradiation light. A scanning near-field optical microscope 100 according to the present invention includes: a light irradiating part 102 for emitting illumination light toward a sample 107; a light receiving part 112 for receiving light; a microstructure for generating or selectively transmitting near-field light, the microstructure being disposed on at least one of an emission side of the light irradiating part 102 and an incident side of the light receiving part 112; and an ultrahigh-wavenumber transmitting medium 108 for transmitting near-field light, the ultrahigh-wavenumber transmitting medium exhibiting anisotropy in permittivity or permeability.
    Type: Application
    Filed: June 23, 2011
    Publication date: December 29, 2011
    Applicants: THE UNIVERSITY OF TOKYO, OLYMPUS CORPORATION
    Inventors: Koichi KARAKI, Kimihiko NISHIOKA, Yasuo SASAKI, Takuya TSUKAGOSHI, Yoshiharu AJIKI, Isao SHIMOYAMA, Kiyoshi MATSUMOTO, Tetsuro KAN, Yusuke TAKEI, Kentaro NODA
  • Patent number: 8030604
    Abstract: A near-field detection optical component operating in transmission. It includes at least one portion (11b) forming at least one grating (11) of diffraction microstructures (11a) succeeding one another over several periods (p), this grating (11) being capable of converting evanescent waves (16), which are established between the component and an object (12) located in the near field, when it reflects or emits radiation having a wavelength, into propagating waves (16?) by a diffraction effect during transmission through the portion (11b) forming the grating (11) of diffraction microstructures (11a). The period (p) of the grating (11) being of the order of magnitude of the wavelength of the radiation.
    Type: Grant
    Filed: June 8, 2007
    Date of Patent: October 4, 2011
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Salim Mimouni, Ludovic Poupinet
  • Patent number: 7982194
    Abstract: A system that can maintain and track the position of a single nanoparticle in three dimensions for a prolonged period has been disclosed. The system allows for continuously imaging the particle to observe any interactions it may have. The system also enables the acquisition of real-time sequential spectroscopic information from the particle. The apparatus holds great promise in performing single molecule spectroscopy and imaging on a non-stationary target.
    Type: Grant
    Filed: June 23, 2008
    Date of Patent: July 19, 2011
    Assignee: The Regents of the University of California
    Inventors: Haw Yang, Hu Cang, Cangshan Xu, Chung M. Wong
  • Patent number: 7966867
    Abstract: The invention provides a scanning probe microscope capable of performing highly accurate three-dimensional profile measurement in a state in which no sliding of the probe or deformation of the sample substantially occurs.
    Type: Grant
    Filed: April 8, 2008
    Date of Patent: June 28, 2011
    Assignee: Hitachi, Ltd.
    Inventors: Masahiro Watanabe, Shuichi Baba, Toshihiko Nakata
  • Publication number: 20110051235
    Abstract: A microscope measurement system including: an optical microscope including a microscope body and an objective connected to the microscope body; a chamber including a support mechanism holding an object to be examined therein, the chamber including an opening inserting the objective into the chamber such that the objective is located essentially within the chamber and the microscope body is located essentially outside of the chamber; a sealing mechanism that provides an essentially gas-tight connection between the optical microscope and the chamber such that the chamber is sealed.
    Type: Application
    Filed: May 15, 2007
    Publication date: March 3, 2011
    Applicant: SONY DEUTSCHLAND GMBH
    Inventors: Tzenka Miteva, Piotr Minkin, Gabriele Nelles, Akio Yasuda
  • Publication number: 20110055984
    Abstract: Transmission efficiency and/or spatial resolution provided by resonant apertures can be enhanced by disposing a tip on part of the screen that extends laterally into the aperture. For example, a tip disposed on the ridge of a C-shaped aperture can dramatically improve performance. A spatial resolution of ?/50 has been experimentally demonstrated with this approach. The combination of high spatial resolution and high transmission efficiency provided by this approach enables many applications, such as near field optical probes for near field scanning optical microscopy (NSOM). Another application is high resolution electron sources, where an photoelectron emitter can be disposed at or near a tip+aperture structure such that the high resolution optical near-field provides a correspondingly high resolution electron source.
    Type: Application
    Filed: August 16, 2010
    Publication date: March 3, 2011
    Inventors: Yao-Te Cheng, Yin Yuen, Paul C. Hansen, Yuzuru Takashima, Lambertus Hesselink
  • Publication number: 20110035849
    Abstract: An elongate probe (50) for use in probe microscopy comprises a module (51) provided between a probe tip (53) and a driver (52). In use the driver (52) applies oscillations to the module (51) which are transmitted by the module to the tip (53). With the probe tip (53) positioned close to the surface of a sample, any phase variance in the oscillation of the tip with respect to the driving oscillation is representative of an interaction between the tip and the sample surface. The elongate arrangement of the probe (50) is particularly beneficial when used to probe samples which require a liquid environment.
    Type: Application
    Filed: March 12, 2009
    Publication date: February 10, 2011
    Inventors: Martin F. Finlan, Shelley J. Wilkins
  • Publication number: 20100306888
    Abstract: An optical fiber including a surface including a non-covalent multilayer including a light-absorbing material can be used to develop fluorescence microscopy with a lateral resolution of about 5 nm and possibly lower. The non-covalent multilayer can be a highly absorptive thin film, for example a film based on J-aggregates, which can be used with conventional Near-Field Scanning Optical Microscopy.
    Type: Application
    Filed: March 19, 2008
    Publication date: December 2, 2010
    Applicant: Massachusetts Institute of Technology
    Inventors: Jonathan R. Tischler, Michael Scott Bradley, Vladimir Bulovic
  • Publication number: 20100299791
    Abstract: Provided is a mechanically-coupled tuning fork-scanning probe vibrating system, the system including: a tuning fork vibrating due to an AC voltage applied thereto; a scanning probe attached to a side of the tuning fork and vibrating due to the tuning fork; and a contact member contacting a side surface of the scanning probe and adjusting a position of a contact point at which the contact member contacts with the scanning probe, to vary a natural frequency of a combination body in which the tuning fork and the scanning probe are combined with each other.
    Type: Application
    Filed: September 8, 2009
    Publication date: November 25, 2010
    Applicant: INHA INDUSTRY PARTNERSHIP INSTITUTE
    Inventors: Seung Gol Lee, Kyoung-Duck Park, Dae-Chan Kim
  • Patent number: 7823215
    Abstract: The present invention relates to near-field scanning optical microscopy (NSOM) and near-field/far-field scanning microscopy methods, systems and devices that permit the imaging of biological samples, including biological samples or structures that are smaller than the wavelength of light. In one embodiment, the present invention permits the production of multi-spectral, polarimetric, near-field microscopy systems that can achieve a spatial resolution of less than 100 nanometers. In another embodiment, the present invention permits the production of a multifunctional, multi-spectral, polarimetric, near-field/far-field microscopy that can achieve enhanced sub-surface and in-depth imaging of biological samples. In still another embodiment, the present invention relates to the use of polar molecules as new optical contrast agents for imaging applications (e.g., cancer detection).
    Type: Grant
    Filed: May 12, 2006
    Date of Patent: October 26, 2010
    Assignee: The University of Akron
    Inventor: George C. Giakos
  • Publication number: 20100218287
    Abstract: In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
    Type: Application
    Filed: February 25, 2010
    Publication date: August 26, 2010
    Inventors: Toshihiko NAKATA, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Motoyuki Hirooka
  • Publication number: 20100207039
    Abstract: A method of determining the position of a probe tip. An evanescent electromagnetic field is generated extending beyond an interface boundary between a first medium, having a first refractive index, and a second medium, having a second refractive index which is greater than the first refractive index, the interface boundary extending in a plane. A probe tip is positioned in the evanescent field in the first medium thereby causing propagating electromagnetic radiation to be produced as a result of the disruption of the evanescent field by the probe tip, and at least a portion of the propagating electromagnetic radiation is collected. The spatial intensity distribution of the collected radiation is detected with respect to an image plane. An at least one dimensional position of the probe tip in a probe tip plane is determined from the detected spatial intensity distribution, the probe tip plane being a plane which contains the probe tip and which is substantially parallel to the plane of the interface boundary.
    Type: Application
    Filed: April 9, 2008
    Publication date: August 19, 2010
    Applicant: THE UNIVERSITY OF BRISTOL
    Inventors: Arturas Ulcinas, David John Engledew, Loren Michael Picco, Mervyn John Miles, Massimo Antognozzi
  • Patent number: 7735146
    Abstract: A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques, and includes: (A) an atmospheric-pressure or near-atmospheric-pressure ionization region; (B) a sample holder for holding the sample; (C) a laser for illuminating said sample; (D) a mass spectrometer having at least one evacuated vacuum chamber; (E) an atmospheric pressure interface connecting said ionization region and said mass spectrometer; (F) a scanning near-field optical microscopy instrument comprising a near-field probe for scanning the sample; a vacuum capillary nozzle for sucking in particles which are desorbed by said laser, the nozzle being connected to an inlet orifice of said atmospheric pressure interface; a scanner platform connected to the sample holder, the platform being movable to a distance within a near-field distance of the probe; and a controller for maintaining distance information about a current distance between said probe
    Type: Grant
    Filed: January 26, 2006
    Date of Patent: June 8, 2010
    Assignee: The George Washington University
    Inventors: Akos Vertes, Mark E. Reeves, Fatah Kashanchi