Ac Mode (epo) Patents (Class 850/37)
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Patent number: 10598692Abstract: An acoustic analysis device based on atomic force microscopy for the volume analysis of an organic or inorganic sample includes a support on which the sample is immobilized, and an atomic force microscopy lever having a free end provided with a part that interacts with an upper face of the sample and scans said upper face, one or at least two of the independent piezoelectric actuators supplying ultrasonic waves with interferential coupling, and acoustic measurement and analysis bodies associated with the atomic force microscopy lever. The support is a total reflection prism to which the piezoelectric actuators are applied, and the piezoelectric actuators are applied in determined positions on said prism in order to define determined angles of excitation of the ultrasonic waves.Type: GrantFiled: July 25, 2017Date of Patent: March 24, 2020Assignee: UNIVERSITE DE BOURGOGNEInventors: Eric Bourillot, Eric Lesniewska, Pauline Vitry
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Patent number: 9140720Abstract: A method of measuring properties of a sample, the method comprising: measuring a deflection of a cantilever of a COIFM; measuring a voltage at an actuator contacting the cantilever and configured to counteract the deflection of the cantilever; measuring a voltage at a scan signal source, wherein the scan signal source is communicably coupled to the piezotube and configured to move the piezotube along an X- and a Y-axis; measuring a voltage at a feedback controller, wherein the feedback controller is communicably coupled to the piezotube and configured to move the piezotube along a Z-axis; switching a switch from a first position to a second position; switching the switch to a third position; correlating at least one of the measurements to (i) a repulsive force, and (ii) an attractive force.Type: GrantFiled: July 5, 2013Date of Patent: September 22, 2015Assignee: BOISE STATE UNIVERSITYInventor: Byung I. Kim
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Publication number: 20150013037Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.Type: ApplicationFiled: March 25, 2014Publication date: January 8, 2015Applicant: Asylum Research CorporationInventors: Roger Proksch, Anil Gannepalli
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Patent number: 8839461Abstract: A device includes: an electrode; a displacement measurement unit outputting voltage corresponding to electrostatic force between the electrode and a sample; a first power supply applying a first voltage between the electrode and sample; a second power supply adding, to the first voltage, a second voltage having a different frequency than the first voltage, and applying the added voltage; and a signal detection unit outputting a particular frequency component's magnitude contained in the displacement measurement unit's output, in which the signal detection unit extracts, from the output by the displacement measurement unit, and outputs, to a potential calculation unit, magnitude and phase of a frequency component of a frequency identical to the frequency of the first voltage, and magnitude of a frequency component of a frequency identical to a frequency equivalent to a difference between the frequencies of the first and second voltages, to measure the sample's surface potential.Type: GrantFiled: September 12, 2012Date of Patent: September 16, 2014Assignee: National University Corporation Kanazawa UniversityInventors: Takeshi Fukuma, Naritaka Kobayashi
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Patent number: 8789211Abstract: A method of analyzing a sample that includes applying a first set of energies at a first set of frequencies to a sample and applying, simultaneously with the applying the first set of energies, a second set of energies at a second set of frequencies, wherein the first set of energies and the second set of energies form a multi-mode coupling. The method further includes detecting an effect of the multi-mode coupling.Type: GrantFiled: May 20, 2013Date of Patent: July 22, 2014Assignees: UT-Battelle, LLC, University of Tennessee Research FoundationInventors: Ali Passian, Thomas George Thundat, Laurene Tetard
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Patent number: 8677809Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.Type: GrantFiled: October 21, 2010Date of Patent: March 25, 2014Assignees: Oxford Instruments PLC, Oxford Instruments AFM, IncInventors: Roger Proksch, Anil Gannepalli
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Patent number: 8615811Abstract: A method of measuring vibration characteristics of a cantilever in a scanning probe microscope (SPM). An excitation signal is generated by a forward and backward frequency sweep signal in a frequency range including a resonance frequency of the cantilever. The cantilever is vibrated by supplying the excitation signal to a vibrating portion of the cantilever. The largest amplitude of a displacement of the cantilever in a forward path and in a backward path is directly measured, and an intermediate value of a frequency between frequencies measured on the basis of the directly measured largest amplitude of the displacement of the cantilever is detected as the resonance frequency of the cantilever.Type: GrantFiled: March 23, 2012Date of Patent: December 24, 2013Assignee: SII NanoTechnology Inc.Inventors: Masatsugu Shigeno, Yoshiteru Shikakura
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Patent number: 8555711Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.Type: GrantFiled: September 23, 2011Date of Patent: October 15, 2013Assignee: Asylum Research CorporationInventors: Roger Proksch, Roger C. Callahan
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Patent number: 8484757Abstract: A device for oscillation excitation of a leaf spring, which is fastened on one side in an atomic force microscope (AFM) and comprises semiconductor material, which has no piezoelectric properties, a free end to which a tip is attached, which is brought into contact with a sample surface to be examined. The present invention has the leaf spring connected at least sectionally to a metal layer to form a Schottky contact, and an electrical voltage or field source is provided, which generates an electrical AC voltage a vicinity or area of the Schottky contact.Type: GrantFiled: June 30, 2006Date of Patent: July 9, 2013Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V.Inventors: Walter Arnold, Kerstin Meder, Ute Rabe
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Patent number: 8479309Abstract: Provided are methods and systems for high resolution imaging of a material immersed in liquid by scanning probe microscopy. The methods further relate to imaging a material submersed in liquid by tapping mode atomic force microscopy (AFM), wherein the AFM has a microfabricated AFM probe comprising a nanoneedle probe connected to a cantilever beam. The nanoneedle probe is immersed in the liquid, and the rest of the AFM probe, including the cantilever beam to which the nanoneedle probe is attached, remains outside the liquid. The cantilever is oscillated and the nanoneedle probe tip taps the material to image the material immersed in liquid. In an aspect, the material is supported on a shaped substrate to provide a spatially-varying immersion depth with specially defined regions for imaging by any of the methods and systems of the present invention.Type: GrantFiled: April 28, 2011Date of Patent: July 2, 2013Assignee: The Board of Trustees of the University of IllinoisInventors: Min-Feng Yu, Majid Minary-Jolandan
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Patent number: 8448501Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.Type: GrantFiled: October 20, 2009Date of Patent: May 28, 2013Assignees: Oxford Instruments PLC, Oxford Instruments AFM Inc.Inventor: Roger B Proksch
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Patent number: 8448261Abstract: A method of analyzing a sample that includes applying a first set of energies at a first set of frequencies to a sample and applying, simultaneously with the applying the first set of energies, a second set of energies at a second set of frequencies, wherein the first set of energies and the second set of energies form a multi-mode coupling. The method further includes detecting an effect of the multi-mode coupling.Type: GrantFiled: March 17, 2010Date of Patent: May 21, 2013Assignees: University of Tennessee Research Foundation, UT-Battelle, LLCInventors: Ali Passian, Thomas George Thundat, Laurene Tetard
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Patent number: 8347411Abstract: The scanning probe microscope has a primary control loop (7, 11, 12) for keeping the phase and/or amplitude of deflection at constant values as well as a secondary control loop (9) that e.g. keeps the frequency of the cantilever oscillation constant by applying a suitable DC voltage to the probe while, at the same time, a conservative AC excitation is applied thereto. By actively controlling the frequency with the first control loop (7, 11, 12) and subsequently controlling the DC voltage in order to keep the frequency constant, a fast system is created that allows to determine the contact potential difference or a related property of the sample (3) quickly.Type: GrantFiled: July 14, 2006Date of Patent: January 1, 2013Assignee: Specs Zürich GmbHInventors: Dominik Ziegler, Andreas Christian Stemmer, Jorg Rychen
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Patent number: 8296857Abstract: The piezo-electric actuator (1) to oscillate the probe of a scanning probe microscope is arranged in the feedback branch (3) of an analog amplifier (4). A current source (10) is provided for feeding a defined alternating current to the input of the amplifier (4). The amplifier (4) strives to adjust the voltage over the actuator (1) such that the current from the current source (10) flows through the actuator (1). As the current through the actuator (1) is proportional to its deflection, this design allows to run the actuator at constant amplitude without the need of complex feedback loops.Type: GrantFiled: December 17, 2008Date of Patent: October 23, 2012Assignee: Specs Zürich GmbHInventor: Jörg Rychen
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Patent number: 8122761Abstract: A microcantilever sensor includes a supporting substrate, a cantilever spring element at least partially disposed over the support substrate, a probe layer disposed over the first side of the cantilever spring element, and a piezoresistive transducer attached to the second side of the cantilever spring element. The cantilever spring element is characterized by having a first side and a second side and comprising a polymer having a Young's modulus less than about 100 Gpa. Sensing systems that incorporate the cantilever sensor of the invention include a detector in communication with the piezoresistive transducer to provide measurements of surface strain changes in the piezoresistive transducer.Type: GrantFiled: January 20, 2006Date of Patent: February 28, 2012Assignee: Wayne State UniversityInventor: Yong Xu
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Patent number: 8087093Abstract: Provided is a mechanically-coupled tuning fork-scanning probe vibrating system, the system including: a tuning fork vibrating due to an AC voltage applied thereto; a scanning probe attached to a side of the tuning fork and vibrating due to the tuning fork; and a contact member contacting a side surface of the scanning probe and adjusting a position of a contact point at which the contact member contacts with the scanning probe, to vary a natural frequency of a combination body in which the tuning fork and the scanning probe are combined with each other.Type: GrantFiled: September 8, 2009Date of Patent: December 27, 2011Assignee: Inha-Industry Partnership InstituteInventors: Seung Gol Lee, Kyoung-Duck Park, Dae-Chan Kim
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Publication number: 20110296564Abstract: The piezo-electric actuator (1) to oscillate the probe of a scanning probe microscope is arranged in the feedback branch (3) of an analog amplifier (4). A current source (10) is provided for feeding a defined alternating current to the input of the amplifier (4). The amplifier (4) strives to adjust the voltage over the actuator (1) such that the current from the current source (10) flows through the actuator (1). As the current through the actuator (1) is proportional to its deflection, this design allows to run the actuator at constant amplitude without the need of complex feedback loops.Type: ApplicationFiled: December 17, 2008Publication date: December 1, 2011Applicant: SPECS Zurich GmbHInventor: Jörg Rychen
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Patent number: 8069493Abstract: An object of the present invention is to provide an atomic force microscope apparatus allowing tracking errors to be made as close to zero as possible to reduce images obtained through high-speed scanning from being degraded. To accomplish the object of the present invention, the present invention provides an atomic force microscope apparatus imaging a surface topography of a sample in a contact mode, the apparatus including a cantilever having a probe interacting with the sample surface via an atomic force and being subjected to a deflection by the atomic force, laser light provision means for allowing first laser light to enter the cantilever, light detection means, a controller estimating the surface topography of the sample surface, and data storage means for recording the estimated surface topography.Type: GrantFiled: March 4, 2008Date of Patent: November 29, 2011Assignee: Yokohama National UniversityInventors: Hiroshi Fujimoto, Takashi Ooshima
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Patent number: 7975315Abstract: There is provided an atomic force microscope (AFM) with increase the speed and sensitivity of detection of the resonant frequency shift in a cantilever. An AFM (1) extracts a reference signal and a phase shift signal from a detection signal from a displacement sensor of the cantilever. The reference signal is restrained from a phase change in accordance with the resonant frequency shift. The phase shift signal has a phase shifted in accordance with the resonant frequency shift. The AFM (1) determines the phase difference of the phase shift signal from the reference signal, as the resonant frequency shift. The AFM (1) may detect the phase difference between a plus-minus inversion point on the reference signal and a corresponding plus-minus inversion point on the phase shift signal. The AFM (1) may adjust phase before phase detection. The phase adjustment may move the detection point for the resonant frequency shift defined on the oscillation waveforms to the plus-minus inversion point.Type: GrantFiled: July 27, 2007Date of Patent: July 5, 2011Assignee: National University Corporation Kanazawa UniversityInventors: Toshio Ando, Takayuki Uchihashi, Noriyuki Kodera, Naohisa Takahashi
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Patent number: 7904966Abstract: There is provided a scanning probe microscope apparatus which has a high sensitivity for the interaction between the cantilever and the sample and comprises a cantilever that can oscillate stably in dynamic mode even when a mechanical Q value is low. A driving signal having a frequency close to the resonant frequency of the cantilever (4) is supplied from the signal generator (9) to the oscillation exciting means (10) to separately (forcibly) oscillate the cantilever (4). And the frequency of the driving signal or the resonant frequency of the cantilever is controlled (by adjusting the distance between the cantilever (4) and the sample (1)), such that the phase difference between the oscillation of the cantilever (4) detected by the oscillation detecting means (5) and the driving signal becomes zero, i.e. the frequency of the driving signal and the resonant frequency of the cantilever (4) match.Type: GrantFiled: July 19, 2007Date of Patent: March 8, 2011Assignee: Japan Science and Technology AgencyInventors: Dai Kobayashi, Shuhei Nishida, Hideki Kawakatsu
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Publication number: 20110010809Abstract: A device for oscillation excitation of a leaf spring, which is fastened on one side in an atomic force microscope (AFM) and comprises semiconductor material, which has no piezoelectric properties, a free end of which a tip is attached, which may be brought into contact with a sample surface to be examined. The present invention has the leaf spring connected at least sectionally to a metal layer to form a Schottky contact, and an electrical voltage or field source is provided, which generates an electrical AC voltage a vicinity or area of the Schottky contact.Type: ApplicationFiled: June 30, 2006Publication date: January 13, 2011Inventors: Walter Arnold, Kerstin Meder, Ute Rabe
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Publication number: 20100132078Abstract: A scanning probe microscope and method for operating the same are disclosed. The microscope includes a probe mount for attaching a probe, an electromechanical actuator, a probe position signal generator, an impulse signal generator and a servo. A probe tip is mounted on a first end of a cantilever arm, a second end of the cantilever arm being mounted on a mechanical vibrator that causes the second end to vibrate in response to a drive signal. The probe position signal generator generates a position signal indicative of a position of the probe relative to the second end of the cantilever arm. The impulse signal generator measures a quantity related to an impulse imparted to the probe tip by the interaction between the tip and the local characteristics of the sample. The servo operates the electromechanical actuator so as to maintain the measured quantity at a predetermined value.Type: ApplicationFiled: November 24, 2008Publication date: May 27, 2010Inventor: Storrs Hoen
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Publication number: 20100132079Abstract: Methods and systems for improving high resolution imaging using a polarization-modulated tip enhanced optical microscope. A polarizer is configured to alternately create and remove a region of enhanced optical intensity adjacent the tip of the microscope probe at the focus of a light source. The sample being studied emits photons at specific rates relative to a background rate depending on the existence or nonexistence of the region of enhanced optical intensity. Comparing the rate of emissions when the region of enhanced optical intensity exists to when it does not creates a detailed image of the sample. By not requiring the probe to oscillate, this system enhances the resolution of the microscope without potentially causing damage to the sample.Type: ApplicationFiled: August 6, 2009Publication date: May 27, 2010Inventor: Jordan M. Gerton
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Publication number: 20100115673Abstract: Briefly described, embodiments of this disclosure include near-field scanning measurement-alternating current-scanning electrochemical microscopy devices, near-field scanning measurement-alternating current-scanning electrochemical microscopy systems, methods of using near-field scanning measurement-alternating current-scanning electrochemical microscopy, atomic force measurement-alternating current-scanning electrochemical microscopy (AFM-AC-SECM) devices, AFM-AC-SECM systems, methods of using AFM-AC-SECM, and the like.Type: ApplicationFiled: November 27, 2007Publication date: May 6, 2010Inventors: Christine Kranz, Boris Mizaikoff, Wolfgang Schuhmann, Kathrin Eckhard
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Patent number: 7709791Abstract: Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.Type: GrantFiled: October 15, 2007Date of Patent: May 4, 2010Assignee: Park Systems Corp.Inventors: Hyeong Chan Jo, Hong Jae Lim, Seung Jun Shin, Joon Hui Kim, Yong Seok Kim, Sang-il Park