Atomic Force Microscopy [afm] Or Apparatus Therefor, E.g., Afm Probes(epo) Patents (Class 850/33)
  • Patent number: 11506683
    Abstract: A method comprises using an atomic-force microscope, acquiring a set of images associated with surfaces, and, using a machine-learning algorithm applied to the images, classifying the surfaces. As a particular example, the classification can be done in a way that relies on surface parameters derived from the images rather than using the images directly.
    Type: Grant
    Filed: November 7, 2019
    Date of Patent: November 22, 2022
    Assignee: Trustees of Tufts College
    Inventors: Igor Sokolov, Milos Miljkovic
  • Patent number: 10996240
    Abstract: A method for detecting pores on cell membrane using an atomic force microscope, comprising the steps of: providing cells; fixing the cells in place; and observing the cells by means of an atomic force microscope. The pores are present in the cell membrane or pass through the cell membrane. By means of the present method, the presence of pores in the cell membrane can be accurately observed, and the size and depth of the pores can be accurately determined.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: May 4, 2021
    Assignee: Institute of Basic Medical Sciences, Chinese Academy of Medical Sciences
    Inventors: Bo Huang, Yuying Liu
  • Patent number: 10976345
    Abstract: An atomic force microscopy device arranged for determining sub-surface structures in a sample comprises a scan head with a probe including a flexible carrier and a probe tip arranged on the flexible carrier. Therein an actuator applies an acoustic input signal to the probe and a tip position detector measures a motion of the probe tip relative to the scan head during scanning, and provides an output signal indicative of said motion, to be received and analyzed by a controller. At least an end portion of the probe tip tapers in a direction away from said flexible carrier towards an end of the probe tip. The end portion has a largest cross-sectional area Amax at a distance Dend from said end, the square root of the largest cross-sectional area Amax is at least 100 nm and the distance Dend is in the range of 0.2 to 2 the value of said square root.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: April 13, 2021
    Inventors: Abbas Mohtashami, Maarten Hubertus van Es, Hamed Sadeghian Marnani
  • Patent number: 10935568
    Abstract: Method of determining an overlay error between device layers of a multilayer semiconductor device using an atomic force microscopy system, wherein the semiconductor device comprises a stack of device layers comprising a first patterned layer and a second patterned layer, and wherein the atomic force microscopy system comprises a probe tip, wherein the method comprises: moving the probe tip and the semiconductor device relative to each other for scanning of the surface; and monitoring motion of the probe tip with tip position detector during said scanning for obtaining an output signal; during said scanning, applying a first acoustic input signal to at least one of the probe or the semiconductor device; analyzing the output signal for mapping at least subsurface nanostructures below the surface of the semiconductor device; and determining the overlay error between the first patterned layer and the second patterned layer based on the analysis.
    Type: Grant
    Filed: June 16, 2017
    Date of Patent: March 2, 2021
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Maarten Hubertus van Es, Hamed Sadeghian Marnani
  • Patent number: 10914755
    Abstract: Methods and apparatus for obtaining extremely high sensitivity chemical composition maps with spatial resolution down to a few nanometers. In some embodiments these chemical composition maps are created using a combination of three techniques: (1) Illuminating the sample with IR radiation than is tuned to an absorption band in the sample; and (2) Optimizing a mechanical coupling efficiency that is tuned to a specific target material; (3) Optimizing a resonant detection that is tuned to a specific target material. With the combination of these steps it is possible to obtain (1) Chemical composition maps based on unique IR absorption; (2) spatial resolution that is enhanced by extremely short-range tip-sample interactions; and (3) resonant amplification tuned to a specific target material. In other embodiments it is possible to take advantage of any two of these steps and still achieve a substantial improvement in spatial resolution and/or sensitivity.
    Type: Grant
    Filed: March 12, 2019
    Date of Patent: February 9, 2021
    Assignee: Bruker Nano, Inc.
    Inventors: Craig Prater, Kevin Kjoller
  • Patent number: 10598691
    Abstract: A scanning probe microscope includes a light source, a detector, a housing, an opening and closing door, an opening and closing sensor, a control unit, and the like. The opening and closing door is provided in the housing. The control unit 16 also functions as the light intensity change processing unit 164. In the scanning probe microscope, when the opening and closing sensor detects opening and closing of the opening and closing door, the light intensity change processing unit automatically changes the intensity of light irradiated from the light source based on a detection result of the opening and closing sensor. Therefore, it is possible to omit light intensity adjustment work performed manually by the user. As a result, the workability of the user when using the scanning probe microscope 1 can be improved.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: March 24, 2020
    Assignee: Shimadzu Corporation
    Inventors: Kazuma Watanabe, Keita Fujino, Eiji Iida, Masato Hirade, Kenji Yamasaki, Hideo Nakajima, Yuichiro Ikeda, Hiroshi Arai
  • Patent number: 10545170
    Abstract: A measuring method of a scanning probe microscopy moves the probe from the first measuring point to the second measuring point while the probe has contact with the object to be measured and a pressing force weaker than the first pressing force is applied between the probe and the object to be measured after the measurement at the first measuring point has ended, applies the first pressing force between the probe and the object to be measured until the tip end position of the probe reaches the first distance in the depth direction from the upper surface of the object to be measured, and measures the physical property information of the object to be measured after the tip end position of the probe has reached the first distance in the depth direction from the upper surface of the object to be measured at the second measuring point.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: January 28, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Jun Hirota, Kazunori Harada, Tsukasa Nakai
  • Patent number: 10126326
    Abstract: Apparatus and associated method that contemplates performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output.
    Type: Grant
    Filed: October 2, 2015
    Date of Patent: November 13, 2018
    Inventors: Lin Zhou, Huiwen Liu, Dale Egbert, Jonathan A. Nelson, Jianxin Zhu
  • Patent number: 9885691
    Abstract: A multimode ultrasonic probe tip and transducer integrated into a micro tool, such as a nano indenter or a nano indenter interfaced with a Scanning Probe Microscope (SPM) is described. The tip component may be utilized to determine mechanical properties or characteristics of a sample, including for example, complex elastic modulus, hardness, friction coefficient, and strain and stress at nanometer scales and high frequencies. The tip component is configured to operate at multi-resonant frequencies providing sub-nanometer vertical resolution. The tip component may be quasi-statistically calibrated and contact mechanics constitutive equations may be utilized to derive mechanical properties of a sample. Contact mechanical impedance and acoustic impedance may also be compared.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: February 6, 2018
    Assignee: Nanometronix LLC
    Inventor: Antanas Daugela
  • Patent number: 9862941
    Abstract: Methods of non-destructively obtaining the genotype of a plant cell from a plant sample are disclosed. The plant cell is isolated from a plant cell sample using an integrated microfluidic device. The integrated microfluidic device includes an individual cell trap located downstream from a microfluidic channel and, the microfluidic device is configured to trap the plant cell in the individual cell trap. mRNA is extracted from the plant cell by contacting the plant cell with an atomic force microscope (AFM) probe and by attracting mRNA from loci of interest to the probe end using a dielectrophoresis DEP force under the alternating current (AC) field applied to the probe. The genotype of the plant cell is determined from cDNA obtained from the extracted mRNA. Alternatively, the mRNA is analyzed to determine gene expression patterns of the plant cell.
    Type: Grant
    Filed: October 7, 2016
    Date of Patent: January 9, 2018
    Inventors: Abraham P. Lee, Do-Hyun Lee, H. Kumar Wickramasinghe, Yinglei Tao, Xuan Li, Yue Yun
  • Patent number: 9625331
    Abstract: A force detector and method for using the same includes a movable lens having a spherical surface; a cantilever below the movable lens; a laser above the movable lens configured to emit a beam of light through the movable lens, such that light reflects from the spherical surface and the cantilever; a camera configured to capture images of interference rings produced by the light reflected from the spherical surface and the light reflected from the cantilever; and a processor configured to determine a force between the movable lens and the cantilever based on a change in phase of the interference rings.
    Type: Grant
    Filed: September 10, 2015
    Date of Patent: April 18, 2017
    Inventors: Arthur W. Ellis, Richard A. Haight, James B. Hannon, Rudolf M. Tromp
  • Patent number: 9345797
    Abstract: Photothermal antibacterial material RMG is provided in the present invention, where R represents aldehyde, di-aldehyde or multi-aldehyde, M is magnetic material, and G is reduced graphene oxide. A method of synthesizing the abovementioned antibacterial material comprises of three steps. At first graphene oxide was synthesized, followed by simultaneous reduction and functionlization with MNPs and eventually an aldehyde is modified on magnetic material to yield magnetic G functionalized glutaraldehyde (RMG). We utilize the photothermal feature of graphene for antibacterial activity, in addition graphene was functionalized with aldehyde for capturing bacteria and with magnetic material to enhance a focusing of light irradiation. Moreover, the magnetic properties of material could help for reusability of antibacterial material.
    Type: Grant
    Filed: September 5, 2013
    Date of Patent: May 24, 2016
    Inventors: Yong-Chien Ling, Archana Ramchandra-Deokar, Meng-Chin Wu, Chan-Hung Liao, Po-Yuan Shih
  • Patent number: 9261532
    Abstract: A conductive atomic force microscope including a plurality of probe structures each including a probe and a cantilever connected thereto, a power supplier applying a bias voltage, a current detector detecting a first current flowing between a sample object and each of the probes and a second current flowing between a measurement object and each of the probes, and calculating representative currents for the sample and measurement objects based on the first and second currents, respectively, and a controller calculating a ratio between representative currents of the sample object measured by each of the probe structures, calculating a scaling factor for scaling the representative current with respect to the measurement object measured by each of the probes, and determine a reproducible current measurement value based on the second measurement current and the scaling factor may be provided.
    Type: Grant
    Filed: April 23, 2015
    Date of Patent: February 16, 2016
    Inventors: Hyun-woo Kim, Woo-seok Ko, Young-hwan Kim, Jeong-hoi Kim, Baek-man Sung, Hyung-su Son, Chae-ho Shin, Yu-sin Yang, Jae-youn Wi, Sang-kil Lee, Chung-sam Jun
  • Patent number: 9150415
    Abstract: A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.
    Type: Grant
    Filed: July 25, 2008
    Date of Patent: October 6, 2015
    Assignee: Seagate Technology LLC
    Inventors: Lin Zhou, Huiwen Liu, Dale Egbert, Jonathan A. Nelson, Jianxin Zhu
  • Patent number: 9091704
    Abstract: The invention relates to a control method having at least two control loops for a scanning microscope provided with a microlever and an actuator suitable for energizing the microlever, in which a first loop maintains as a controlled variable the oscillation amplitude of the microlever and as a manipulated variable the amplitude of the electric signal supplied to the actuator, and a second loop uses as a controlled variable the amplitude of the aforementioned electric signal and as a manipulated variable the tip-sample distance. Said procedure makes it possible to ignore changes of sign in the tip-sample interaction.
    Type: Grant
    Filed: October 10, 2012
    Date of Patent: July 28, 2015
    Inventors: David Martinez Martin, Miriam Jaafar Ruiz-Castellanos, Julio Gomez Herrero
  • Publication number: 20150106979
    Abstract: An optical and atomic force microscopy measurement integrated system is described. The system has an atomic force microscope having a first probe configured to interact with a sample to be analysed, an optical tweezer, a second probe configured to be held in the focus of the optical tweezer, movement means for moving the two probes, measurement means for measuring the variations of position of the two probes and processing means configured to receive, as an input, the measurement signals of the two probes to generate an output signal representative of the sample.
    Type: Application
    Filed: December 13, 2012
    Publication date: April 16, 2015
    Inventors: Francesco Difato, Bruno Torre, Alberto Diaspro, Fabio Benfenati, Roberto Cingolani
  • Patent number: 9009861
    Abstract: Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of a substrate at an atomic level, an electron microscope for measuring the atomic microscope and the substrate, and at least one electrode which distorts the path of a secondary electron on the substrate covered by a cantilever of the atomic microscope so that the secondary electron proceeds to an electron detector of the electron microscope.
    Type: Grant
    Filed: June 24, 2011
    Date of Patent: April 14, 2015
    Assignee: Korea Research Institute of Standards and Science
    Inventors: Byong Chon Park, Ju Youb Lee, Woon Song, Jin Ho Choi, Sang Jung Ahn, Joon Lyou, Won Young Song, Jae Wan Hong, Seung Hun Baek
  • Patent number: 8997260
    Abstract: An embodiment includes an integrated microscope including scanning probe microscopy (SPM) hardware integrated with optical microscopy hardware, and other embodiments include related methods and devices.
    Type: Grant
    Filed: February 23, 2012
    Date of Patent: March 31, 2015
    Inventors: Ryan Murdick, Lukas Novotny
  • Patent number: 8997261
    Abstract: The invention relates to processes for the modification of surfaces and on processes for the measurement of adhesion forces and of different forces of interaction (friction forces, adhesion forces) by scanning probe microscopy functioning in continuous <<curvilinear>> mode, as well as to a scanning probe microscope and a device permitting the implementation of said processes.
    Type: Grant
    Filed: May 5, 2011
    Date of Patent: March 31, 2015
    Assignees: Centre National de la Recherche Scientifique-CNRS, Universite du Maine (Le Mans)
    Inventors: Olivier Noel, Pierre-Emmanuel Mazeran, Hussein Nasrallah
  • Publication number: 20150067932
    Abstract: A method of using a AFM/NMR probe, the method comprising the steps of injecting a sample to be analyzed with magnetic particles, introducing a probe into proximity with the sample, the probe capable of both transmitting and sensing electromagnetic radiation; generating a magnetic field via the probe, and adjusting the magnitude of the magnetic field to manipulate the magnetic particles within the sample.
    Type: Application
    Filed: November 11, 2014
    Publication date: March 5, 2015
    Inventors: Corey P. Neu, Babak Ziaie, Teimour Maleki-Jafarabadi, Charilaos Mousoulis, Xin Xu
  • Patent number: 8973161
    Abstract: A control-based approach is provided for achieving accurate indentation quantification in broadband and in-liquid nanomechanical property measurements using atomic force microscope (AFM). Accurate indentation measurement is desirable for probe-based material property characterization because the force applied and the indentation generated are the fundamental physical variables that are measured in the characterization process. Large measurement errors, however, occur when the measurement frequency range becomes large (i.e., broadband), or the indentation is measured in liquid on soft materials. Such large measurement errors are generated due to the inability of the conventional method to account for the convolution of the instrument dynamics with the viscoelastic response of the soft sample when the measurement frequency becomes large, and the random-like thermal drift and the distributive hydrodynamic force effects when measuring the indentation in liquid.
    Type: Grant
    Filed: June 24, 2013
    Date of Patent: March 3, 2015
    Assignee: Rutgers, The State University of New Jersey
    Inventors: Qingze Zou, Juan Ren
  • Patent number: 8959661
    Abstract: An atomic force microscope probe comprising a piezo-electric resonator provided with two electrodes and coated with an insulating layer and a tip attached on the coated resonator and functionalized with at least one group or molecule of interest is disclosed. The disclosed technology also relates to preparation method and to different uses thereof.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: February 17, 2015
    Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
    Inventors: Jérôme Polesel-Maris, Thomas Berthelot, Pascal Viel
  • Publication number: 20150047080
    Abstract: A compound microscope includes an optical microscope to acquire time-series successive optical observation images of an observation target, a scanning probe microscope to acquire time-series successive probe-derived observation images of the observation target, and a control device to simultaneously give a common control command to the optical microscope and the scanning probe microscope.
    Type: Application
    Filed: October 23, 2014
    Publication date: February 12, 2015
    Inventors: Akira YAGI, Nobuaki SAKAI, Yoshitsugu UEKUSA, Shuichi ITO
  • Publication number: 20150047079
    Abstract: There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with <210> orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron microscope, an electron beam applied analysis apparatus, an ion-electron multi-beam apparatus, a scanning probe microscope or a mask repair apparatus.
    Type: Application
    Filed: August 8, 2014
    Publication date: February 12, 2015
    Applicant: Hitachi High-Tech Science Corporation
    Inventors: Tomokazu Kozakai, Osamu Matsuda, Yasuhiko Sugiyama, Kazuo Aita, Fumio Aramaki, Anto Yasaka, Hiroshi Oba
  • Publication number: 20150020245
    Abstract: Energy dissipation measurements in Frequency Modulation-Atomic Force Microscopy (FM-AFM) should provide additional information for dynamic force measurements as well as energy dissipation maps for robust material properties imaging as they should not be dependent directly upon the cantilever surface interaction regime. However, unexplained variabilities in experimental data have prevented progress in utilizing such energy dissipation studies. The inventors have demonstrated that the frequency response of the piezoacoustic cantilever excitation system, traditionally assumed flat, can actually lead to surprisingly large apparent damping by the coupling of the frequency shift to the drive-amplitude signal. Accordingly, means for correcting this source of apparent damping are presented allowing dissipation measurements to be reliably obtained and quantitatively compared to theoretical models.
    Type: Application
    Filed: March 13, 2013
    Publication date: January 15, 2015
    Inventors: Aleksander Labuda, Peter Grutter, Yoichi Miyahara, William Paul, Antoine Roy-Gobeil
  • Patent number: 8925376
    Abstract: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
    Type: Grant
    Filed: June 26, 2012
    Date of Patent: January 6, 2015
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM, Inc
    Inventors: Roger Proksch, Jason Cleveland, Dan Bocek, Todd Day, Mario B. Viani, Clint Callahan
  • Patent number: 8904561
    Abstract: An atomic force microscope based apparatus and method for detecting Raman effect on a sample of interest utilizes first and second electromagnetic sources to emit first electromagnetic radiation of frequency Vi and second electromagnetic radiation of frequency V2 onto a probe tip, which is coupled to a structure that can oscillate the probe tip. The frequency Vi and the frequency v2 are selected to induce Raman effect on a sample engaged by the probe tip that results in Raman force interactions between the probe tip and the sample. Oscillations of the probe tip due to the Raman force interactions are then measured.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: December 2, 2014
    Inventor: H. Kumar Wickramasinghe
  • Publication number: 20140352005
    Abstract: A mechanism is provided for sequencing a biopolymer. The biopolymer is traversed from a first medium to a second medium. The biopolymer includes bases. As the biopolymer traverses from the first medium to the second medium, different forces are measured corresponding to each of the bases. The bases are distinguished from one another according to the different measured forces which are measured for each of the bases.
    Type: Application
    Filed: June 11, 2013
    Publication date: November 27, 2014
    Inventors: Venkat K. Balagurusamy, Stanislav Polonsky
  • Patent number: 8895923
    Abstract: A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.
    Type: Grant
    Filed: November 18, 2013
    Date of Patent: November 25, 2014
    Assignee: DCG Systems, Inc.
    Inventors: Vladimir A. Ukraintsev, Richard Stallcup, Sergiy Pryadkin, Mike Berkmyre, John Sanders
  • Patent number: 8898809
    Abstract: The invention relates to a method for the combined analysis of a sample with objects to be analyzed, in particular a sample with biological objects, in which measurement results for one or more of the objects to be analyzed in the sample are obtained by analyzing the one or more objects to be analyzed by an imaging method of measurement, probe-microscopic measurement results are obtained for the one or more objects to be analyzed by analyzing the one or more objects to be analyzed by a probe-microscopic method of measurement, and the measurement results and the probe-microscopic measurement results are assigned to one another, after optional prior intermediate processing. Furthermore, the invention relates to an apparatus for carrying out combined analysis of a sample with objects to be investigated, in particular a sample with biological objects.
    Type: Grant
    Filed: July 24, 2008
    Date of Patent: November 25, 2014
    Assignee: JPK Instruments AG
    Inventors: Torsten Müller, Kathryn Anne Poole, Detlef Knebel, Torsten Jähnke
  • Publication number: 20140304863
    Abstract: Methods of marking paper products and marked paper products are provided. Some methods include irradiating the paper product to alter the functionalization of the paper.
    Type: Application
    Filed: June 18, 2014
    Publication date: October 9, 2014
    Inventor: Marshall Medoff
  • Patent number: 8844061
    Abstract: In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.
    Type: Grant
    Filed: December 26, 2012
    Date of Patent: September 23, 2014
    Assignee: HITACHI, Ltd.
    Inventors: Shuichi Baba, Masahiro Watanabe, Toshihiko Nakata, Yukio Kembo, Toru Kurenuma, Takafumi Morimoto, Manabu Edamura, Satoshi Sekino
  • Patent number: 8839461
    Abstract: A device includes: an electrode; a displacement measurement unit outputting voltage corresponding to electrostatic force between the electrode and a sample; a first power supply applying a first voltage between the electrode and sample; a second power supply adding, to the first voltage, a second voltage having a different frequency than the first voltage, and applying the added voltage; and a signal detection unit outputting a particular frequency component's magnitude contained in the displacement measurement unit's output, in which the signal detection unit extracts, from the output by the displacement measurement unit, and outputs, to a potential calculation unit, magnitude and phase of a frequency component of a frequency identical to the frequency of the first voltage, and magnitude of a frequency component of a frequency identical to a frequency equivalent to a difference between the frequencies of the first and second voltages, to measure the sample's surface potential.
    Type: Grant
    Filed: September 12, 2012
    Date of Patent: September 16, 2014
    Assignee: National University Corporation Kanazawa University
    Inventors: Takeshi Fukuma, Naritaka Kobayashi
  • Patent number: 8813261
    Abstract: A scanning probe microscope including: a scanning probe microscope unit section including, a cantilever having a probe, a cantilever holder configured to fix the cantilever, a sample holder on which a sample is configured to be placed, a horizontal fine transfer mechanism configured to relatively scan a surface of the sample with the probe, a vertical fine transfer mechanism configured to control a distance between the probe and the sample surface, an optical microscope configured to observe the cantilever and the sample; a control device; an imaging device to which a viewing field, wider than that of the optical microscope and capable of observing the cantilever and the sample at the same time, can be set; and an image display device configured to display images observed by the optical microscope and the imaging device.
    Type: Grant
    Filed: August 23, 2013
    Date of Patent: August 19, 2014
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Masato Iyoki, Naokatsu Nosaka, Hiroumi Momota, Junji Kuwahara
  • Patent number: 8769711
    Abstract: The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device, and in which at least one subsection (1) of the measurement object (2, 12) is optically examined by an optical measurement system in an observation region associated with the optical measurement system, wherein a displacement of the at least one subsection (1) of the measurement object (2, 12) out of the observation region which is brought about by the examination by means of scanning probe microscopy is corrected in such a way that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged back in the observation region by means of a readjustment device which processes data signals that characterize the displacement.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: July 1, 2014
    Assignee: JPK Instruments AG
    Inventor: Torsten Jähnke
  • Patent number: 8769710
    Abstract: An atomic force microscope (AFM) system comprises a cantilever arm attached to a probe tip. The system controls a height of the cantilever arm to press the probe tip against a sample and then separate the probe tip from the sample, to detect a disturbance of the cantilever arm after the separation of the probe tip from the surface, and to engage active damping of the cantilever arm to suppress the disturbance.
    Type: Grant
    Filed: November 13, 2012
    Date of Patent: July 1, 2014
    Assignee: Agilent Technologies, Inc.
    Inventors: Christopher Ryan Moon, Richard K. Workman
  • Patent number: 8756711
    Abstract: The present invention relates to a method for classifying a tissue biopsy sample obtained from a tumor, comprising determining a plurality of stiffness values for said sample by measuring a plurality of points on the sample with a spatial resolution of at least 100 ?m and assigning the sample to a probability of malignancy. A sample showing a unimodal stiffness distribution is assigned to a high probability of being non-malignant, and a sample showing an at least bimodal stiffness distribution is assigned to a high probability of being malignant, wherein said stiffness distribution is characterized by a first peak exhibiting an at least two-fold higher stiffness value than a second peak. The present invention further relates to a system for classifying a tumor tissue biopsy sample.
    Type: Grant
    Filed: December 12, 2011
    Date of Patent: June 17, 2014
    Assignee: Universitat Basel
    Inventors: Marija Plodinec, Roderick Lim, Marko Loparic
  • Patent number: 8726411
    Abstract: A charged probe and an electric field measuring method are provided. The probe can be charged with single electricity on single nano particle attached on the top of the probe tip being a charged probe and the probe is applicable for measuring the electric fields of object in the nano scale. The probe comprises an insulating tip base, a cantilever and a single nano-particle. The cantilever is arranged for supporting the insulating tip base and the single nano-particle is configured on the erosion plane. After conducting contact electrification method to charge the electric nano particle, the single nano-particle will be charged with fixed number of single electrical charge. Then, the amount of the fixed number of single electrical charge is calculated by the virtual image charge calculation method. The charged probe can be used to measure the electric fields distribution by tapping mode or f-d curve measurement.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: May 13, 2014
    Assignee: National Tsing Hua University
    Inventors: Fan-Gang Tseng, Joe-Ming Chang
  • Patent number: 8719961
    Abstract: A method and system for probing mobile ion diffusivity and electrochemical reactivity on a nanometer length scale of a free electrochemically active surface includes a control module that biases the surface of the material. An electrical excitation signal is applied to the material and induces the movement of mobile ions. An SPM probe in contact with the surface of the material detects the displacement of mobile ions at the surface of the material. A detector measures an electromechanical strain response at the surface of the material based on the movement and reactions of the mobile ions. The use of an SPM tip to detect local deformations allows highly reproducible measurements in an ambient environment without visible changes in surface structure. The measurements illustrate effective spatial resolution comparable with defect spacing and well below characteristic grain sizes of the material.
    Type: Grant
    Filed: November 8, 2011
    Date of Patent: May 6, 2014
    Assignee: UT-Battelle, LLC
    Inventors: Sergei V. Kalinin, Nina Balke, Amit Kumar, Nancy J. Dudney, Stephen Jesse
  • Patent number: 8695111
    Abstract: Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.
    Type: Grant
    Filed: October 18, 2011
    Date of Patent: April 8, 2014
    Inventor: Chung Hoon Lee
  • Patent number: 8686358
    Abstract: Methods and apparatus are provided herein for time-resolved analysis of the effect of a perturbation (e.g., a light or voltage pulse) on a sample. By operating in the time domain, the provided method enables sub-microsecond time-resolved measurement of transient, or time-varying, forces acting on a cantilever.
    Type: Grant
    Filed: September 14, 2011
    Date of Patent: April 1, 2014
    Assignee: University of Washington through its Center for Commercialization
    Inventors: David Ginger, Rajiv Giridharagopal, David Moore, Glennis Rayermann, Obadiah Reid
  • Patent number: 8683611
    Abstract: A high resolution AFM tip is provided which includes an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of the semiconductor cantilever, the semiconductor pyramid having an apex. The AFM tip also includes a single Al-doped semiconductor nanowire on the exposed apex of the semiconductor pyramid, wherein the single Al-doped semiconductor nanowire is epitaxial with respect to the apex of the semiconductor pyramid.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: March 25, 2014
    Assignees: International Business Machines Corporation, King Abdulaziz City for Science and Technology
    Inventors: Guy Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
  • Patent number: 8667611
    Abstract: Atomic Force Microscopes (AFMs) allow forces within systems under observation to be probed from the piconewton forces of a single covalent bond to the forces exerted by cells in the micronewton range. The pendulum geometry prevents the snap-to-contact problem afflicting soft cantilevers in AFMs which enable attonewton force sensitivity. However, the microscopic length scale studies of cellular/subcellular forces parallel to the imaging plane of an optical microscope requires high sensitivity force measurements at high sampling frequencies despite the difficulties of implementing the pendulum geometry from constraints imposed by the focused incoming/outgoing light interfering with the sample surface. Additionally measurement systems for biological tissue samples in vitro must satisfy complex physical constraints to provide access to the vertical cantilever.
    Type: Grant
    Filed: April 29, 2011
    Date of Patent: March 4, 2014
    Assignee: The Royal Institution for the Advancement of Learning/McGill University
    Inventors: Dilson Rassier, Aleksander Labuda
  • Patent number: 8646319
    Abstract: Dynamic IR radiation power control for use in a nanoscale IR spectroscopy system based on an Atomic Force Microscope. During illumination from an IR source, an AFM probe tip interaction with a sample due to local IR sample absorption is monitored. The power of the illumination at the sample is dynamically decreased to minimize sample overheating in locations/wavelengths where absorption is high and increased in locations/wavelengths where absorption is low to maintain signal to noise.
    Type: Grant
    Filed: February 23, 2010
    Date of Patent: February 11, 2014
    Assignee: Anasys Instruments Corp.
    Inventors: Craig Prater, Kevin Kjoller
  • Publication number: 20140041084
    Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.
    Type: Application
    Filed: October 13, 2013
    Publication date: February 6, 2014
    Applicants: Oxford Instruments AFM, Inc, Oxford Instruments PLC
    Inventors: Roger Proksch, Roger C. Callahan
  • Patent number: 8646110
    Abstract: The present disclosure provides a procedure to obtain the absorption profiles of molecular resonance with ANSOM. The method includes setting a reference field phase to ?=0.5 ? relative to the near-field field, and reference amplitude A?5|?eff|. The requirement on phase precision is found to be <0.3 ?. This method enables ANSOM performing vibrational spectroscopy at nanoscale spatial resolution.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: February 4, 2014
    Inventors: Xiaoji Xu, Gilbert C. Walker
  • Patent number: 8646111
    Abstract: A novel way for constructing and operating scanning probe microscopes to dynamically measure material properties of samples, mainly their surface hardness, by separating the functions of actuation, indentation and sensing into separate dynamic components. The amplitude and phase shift of higher modes occurring at periodic indentations with the sample are characteristic values for different sample materials. A separate sensor cantilever, connected to the indentation probe tip, has the advantage of a high mechanical amplification of a desired higher mode while suppressing the actuation signal itself. The operational range of the sensor can be extended just by switching the actuation signal to another submultiple of the sensor cantilever's resonance frequency and/or by using more than one sensor cantilever for each indentation tip.
    Type: Grant
    Filed: February 13, 2007
    Date of Patent: February 4, 2014
    Assignee: The Regents of the University of California
    Inventors: Kimberly L. Turner, Benedikt Zeyen
  • Publication number: 20140020141
    Abstract: A method of analyzing a sample that includes applying a first set of energies at a first set of frequencies to a sample and applying, simultaneously with the applying the first set of energies, a second set of energies at a second set of frequencies, wherein the first set of energies and the second set of energies form a multi-mode coupling. The method further includes detecting an effect of the multi-mode coupling.
    Type: Application
    Filed: May 20, 2013
    Publication date: January 16, 2014
    Applicants: University of Tennessee Research Foundation, UT-Battelle, LLC
    Inventors: Ali Passian, Thomas George Thundat, Laurene Tetard
  • Publication number: 20140020140
    Abstract: A multi-head probe suitable for an atomic force microscopy (AFM) comprises a tip base, a single cantilever beam and at least two tips. The tip base has a tip end, which is ground to form a surface. The cantilever beam is connected to the tip base and for supporting the tip base. The at least two tips are disposed on the surface.
    Type: Application
    Filed: November 19, 2012
    Publication date: January 16, 2014
  • Patent number: 8621660
    Abstract: Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radius of curvature when the probe tip shape is approximated by a circle.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: December 31, 2013
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Masafumi Watanabe, Hiroumi Momota