Probe Holders (epo) Patents (Class 850/53)
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Patent number: 11808784Abstract: The invention relates to the field of localized surface analysis, characterization and modification by electrochemistry. It particularly relates to a portable electrochemical microscopy device, to kits comprising such a portable device, and to uses of the portable device and kits. According to the invention, the portable device comprises: a body having a gripping surface for a user and a bearing surface that can be applied to a surface of a substrate to be analyzed; an electrolytic chamber formed in the body and arranged so as to receive an electrolyte, the electrolytic chamber comprising an opening leading to the bearing surface; and a working probe having a distal end arranged in the electrolytic chamber.Type: GrantFiled: July 5, 2019Date of Patent: November 7, 2023Assignees: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUEInventors: Gaëlle Charrier, Aurélien Doublet, Guy Deniau, Renaud Cornut
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Publication number: 20150075264Abstract: An objective testing module includes a module base configured for coupling with an objective turret of a microscope. The objective testing module includes a mechanical testing assembly. The mechanical testing assembly is configured to mechanically test a sample at macro scale or less, and quantitatively determine one or more properties of the sample based on the mechanical testing. The mechanical testing assembly optionally includes a probe and one or more transducers coupled with the probe. The transducer measures one or more of force applied to a sample by the probe or displacement of the probe within the sample. In operation, an optical instrument locates a test location on a sample and the objective testing module mechanically tests at the test location with the mechanical testing assembly at a macro scale or less. The mechanical testing assembly further determines one or more properties of the sample according to the mechanical test.Type: ApplicationFiled: March 13, 2013Publication date: March 19, 2015Inventors: Syed Amanulla Syed Asif, Rajiv Dama, Ryan Major
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Patent number: 8943611Abstract: A probe module includes a mount; a cantilever disposed on the mount; an electrode disposed on the mount and opposing the cantilever, and a primary fastener disposed on the mount to mechanically separate the cantilever and the electrode at a primary distance. In the probe module, the cantilever is detachably disposed on the mount, the electrode is detachably disposed on the mount, or a combination thereof.Type: GrantFiled: July 18, 2014Date of Patent: January 27, 2015Assignee: National Institute of Standards and TechnologyInventors: Rachel Cannara, Christian Long
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Patent number: 8925111Abstract: Provided are a scanning probe microscope and a method of operating the same. The scanning probe microscope includes a chuck configured to fix an object. A stacker is configured to load one or more cantilevers onto a head module. A stacker lifting element is configured to move the stacker in an up and down direction.Type: GrantFiled: December 24, 2013Date of Patent: December 30, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Wan-Sung Park, Sung-Ha Kim, Young-Hwan Kim
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Publication number: 20140380532Abstract: Provided are a scanning probe microscope and a method of operating the same. The scanning probe microscope includes a chuck configured to fix an object. A stacker is configured to load one or more cantilevers onto a head module. A stacker lifting element is configured to move the stacker in an up and down direction.Type: ApplicationFiled: December 24, 2013Publication date: December 25, 2014Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Wan-Sung PARK, Sung-Ha KIM, Young-Hwan KIM
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Patent number: 8898810Abstract: A method for functionalizing cantilevers is provided that includes providing a holder having a plurality of channels each having a width for accepting a cantilever probe and a plurality of probes. A plurality of cantilever probes are fastened to the plurality of channels of the holder by the spring clips. The wells of a well plate are filled with a functionalization solution, wherein adjacent wells in the well plate are separated by a dimension that is substantially equal to a dimension separating adjacent channels of the plurality of channels. Each cantilever probe that is fastened within the plurality of channels of the holder is applied to the functionalization solution that is contained in the wells of the well plate.Type: GrantFiled: December 23, 2013Date of Patent: November 25, 2014Assignees: UT-Battelle, LLC, University of Tennesse Research FoundationInventors: Barbara R. Evans, Ida Lee
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Publication number: 20140331368Abstract: A probe module includes a mount; a cantilever disposed on the mount; an electrode disposed on the mount and opposing the cantilever, and a primary fastener disposed on the mount to mechanically separate the cantilever and the electrode at a primary distance. In the probe module, the cantilever is detachably disposed on the mount, the electrode is detachably disposed on the mount, or a combination thereof.Type: ApplicationFiled: July 18, 2014Publication date: November 6, 2014Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGYInventors: RACHEL CANNARA, CHRISTIAN LONG
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Patent number: 8756710Abstract: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.Type: GrantFiled: August 31, 2012Date of Patent: June 17, 2014Assignee: Bruker-Nano, Inc.Inventors: Weijie Wang, Chanmin Quanmin Su
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Publication number: 20140123348Abstract: A method for functionalizing cantilevers is provided that includes providing a holder having a plurality of channels each having a width for accepting a cantilever probe and a plurality of probes. A plurality of cantilever probes are fastened to the plurality of channels of the holder by the spring clips. The wells of a well plate are filled with a functionalization solution, wherein adjacent wells in the well plate are separated by a dimension that is substantially equal to a dimension separating adjacent channels of the plurality of channels. Each cantilever probe that is fastened within the plurality of channels of the holder is applied to the functionalization solution that is contained in the wells of the well plate.Type: ApplicationFiled: December 23, 2013Publication date: May 1, 2014Applicant: UT-BATTELLE, LLCInventors: Barbara R. Evans, Ida Lee
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Patent number: 8689360Abstract: A probe head and a scanning probe microscope (SPM) including the probe head are provided. The probe head includes a plurality of cantilevers, each including a probe; and a holder on which the plurality of cantilevers are installed, wherein a cantilever facing a sample is changed by rotating the holder.Type: GrantFiled: August 7, 2012Date of Patent: April 1, 2014Assignee: Samsung Electronics Co., Ltd.Inventor: In-su Jeon
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Patent number: 8635711Abstract: A method for functionalizing cantilevers is provided that includes providing a holder having a plurality of channels each having a width for accepting a cantilever probe and a plurality of probes. A plurality of cantilever probes are fastened to the plurality of channels of the holder by the spring clips. The wells of a well plate are filled with a functionalization solution, wherein adjacent wells in the well plate are separated by a dimension that is substantially equal to a dimension separating adjacent channels of the plurality of channels. Each cantilever probe that is fastened within the plurality of channels of the holder is applied to the functionalization solution that is contained in the wells of the well plate.Type: GrantFiled: September 13, 2012Date of Patent: January 21, 2014Assignees: UT-Battelle, LLC, University of Tennessee Research FoundationInventors: Barbara R. Evans, Ida Lee
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Patent number: 8631511Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.Type: GrantFiled: February 7, 2011Date of Patent: January 14, 2014Inventor: Victor B. Kley
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Patent number: 8549661Abstract: An apparatus for performing magnetic resonance force microscopy on one or more large area samples comprising a base plate, one or more heat sink plates coupled to the base plate, one or more suspension mechanisms coupled to the base plate and the heat sink plates, a probe head suspended from the one or more suspension mechanisms for scanning the one or more samples and a sample cylinder comprising a sample stage coupled to the probe head for sample positioning and an outer drum for isolating the sample stage.Type: GrantFiled: January 30, 2012Date of Patent: October 1, 2013Assignee: The United States of America as represented by the Secretary of the ArmyInventor: Doran Smith
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Patent number: 8505111Abstract: Provided is a cantilever excitation device capable of preventing complication of resonance characteristics by a simple configuration. A cantilever excitation device (1) is provided with a cantilever (7), a cantilever holder (3) for holding the cantilever (7), and a piezoelectric vibrator (5) attached to the cantilever holder (3). The cantilever holder (3) includes a holder main part (11) (first part) having an acoustic impedance different from that of the piezoelectric vibrator (5) for transmitting vibration of the piezoelectric vibrator by elastic deformation and an attachment piece (13) (second part) having the acoustic impedance different from that of the first part for forming a material boundary to block propagation of an acoustic wave between the same and the first part. The first and second parts are interposed between the piezoelectric vibrator (5) and the cantilever (7).Type: GrantFiled: August 6, 2010Date of Patent: August 6, 2013Assignee: National University Corporation Kanazawa UniversityInventors: Hitoshi Asakawa, Takeshi Fukuma
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Publication number: 20130111635Abstract: A probe head and a scanning probe microscope (SPM) including the probe head are provided. The probe head includes a plurality of cantilevers, each including a probe; and a holder on which the plurality of cantilevers are installed, wherein a cantilever facing a sample is changed by rotating the holder.Type: ApplicationFiled: August 7, 2012Publication date: May 2, 2013Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventor: In-su JEON
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Patent number: 8371184Abstract: Measurement apparatus having a cantilever and a fluid flow channel, the cantilever being positioned in the channel so that it projects in a direction parallel to the direction of fluid flow. In an associated method, the cantilever is positioned in a fluid flow channel such that the cantilever extends parallel with the direction of fluid flow in the channel. Fluid is caused to flow in the channel at a known velocity. The resonant frequency of the cantilever is measured at one or more velocities of fluid flow and calculating the spring constant of the cantilever using the measured resonant frequency or frequencies. If the spring constant of the cantilever is known, the measurement of resonant frequency of the cantilever is used to determine the velocity of the fluid flow.Type: GrantFiled: January 31, 2008Date of Patent: February 12, 2013Assignee: The University Court of the University of St. AndrewsInventors: Georg Haehner, Gennady Lubarsky
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Publication number: 20120324608Abstract: A mount for a scanning probe sensor package (27) comprises a support structure (1, 5) defining a plane within the mount and at least one movable snap joint element (9) designed for interacting with a respective counterpart (43) in a scanning probe sensor package (27). The snap joint element (9) is movable to a first position in which it exerts a force on a mounted scanning probe sensor package (27) so as to force said scanning probe sensor package (27) in a normal direction of said plane towards the support structure (1,5) and to a second position in which it allows a scanning probe sensor package (27) to be mounted to or dismounted from the support structure (1, 5) along normal direction of said plane.Type: ApplicationFiled: October 5, 2010Publication date: December 20, 2012Applicant: SPECS Surface Nano Analysis GmbHInventor: Joerg Rychen
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Patent number: 8312560Abstract: The invention relates to a multifunctional scanning probe microscope comprising: a base (1); a preliminary approach unit (3) movably mounted on the base (1); a piezo-scanner (4) disposed on the preliminary approach unit (3); an object holder (5) disposed on the piezo-scanner (4); a sample (6) which comprises a measuring area (M) and is attached to the piezo-scanner (4) with the aid of the object holder (5); a platform (9) attached to the base (1) opposite the sample (6); an analyzer mounted on the platform (9) and comprising a first measuring head (13) which is oriented towards the sample (6) and is adapted for probing the measuring area (M) of the sample (6).Type: GrantFiled: February 12, 2010Date of Patent: November 13, 2012Assignee: NT-MDT Service & Logistics Ltd.Inventors: Andrey Bykov, Vladimir Kotov, Viktor Bykov
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Patent number: 8205268Abstract: Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, an extension of the said cantilever wherein the extension is integrated with an actuator, wherein the cantilever is adapted for actuated movement. The actuator can be electrostatic, thermal, or piezoelectric. The cantilever can comprise a tip, and material can be transferred from the tip to a surface.Type: GrantFiled: November 25, 2008Date of Patent: June 19, 2012Assignee: NanoInk, Inc.Inventor: Raymond Roger Shile
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Publication number: 20120036603Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.Type: ApplicationFiled: February 7, 2011Publication date: February 9, 2012Applicant: General Nanotechnology LLCInventor: Victor B. Kley
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Patent number: 8109135Abstract: A cantilever assembly (1) comprises a cantilever (10) having a cantilever tip (11). The cantilever is mounted to a rigid support (12,120,121) and is provided on its back side with an area (110) of a high reflectance material having a boundary (111) sloping towards the support (12). The extensions (c, ?c) of the area (110) and of the boundary (111) towards the support fulfil the condition c/?c?1 wherein c denotes the extension of the area (110) of the high reflectance material in the direction towards the support (12), and ?c denotes the extension of the sloped boundary (111) of the area (110) of the high reflectance material in the direction towards the support (12).Type: GrantFiled: November 4, 2004Date of Patent: February 7, 2012Assignee: Nano World AGInventors: Hans J. Hug, Bart Hoogenboom, Sascha Martin, Jinling Yang
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Patent number: 8099792Abstract: Atomic force photovoltaic microscopy apparatus and related methodologies, as can be used to quantitatively measure spatial performance variations in functioning photovoltaic devices.Type: GrantFiled: January 7, 2009Date of Patent: January 17, 2012Assignees: Northwestern University, The United States of America as represented by the Secretary of the Air ForceInventors: Mark C. Hersam, Benjamin Leever
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Patent number: 8099793Abstract: An automatic probe exchange system for a scanning probe microscope (SPM) exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic force. When the magnetic force on the SPM side is greater, the probe is attached to the probe mount on the SPM. When the magnetic force on the probe tray side is greater, the probe is attached to the probe mount on the probe tray. The magnetic force on the probe tray side is varied by moving the magnets that generate the magnetic force on the probe tray side closer to or further from the probe.Type: GrantFiled: September 29, 2009Date of Patent: January 17, 2012Assignee: Park Systems Corp.Inventors: Hyeong Chan Jo, Hong Jae Lim, Seung Jun Shin, Joon Hui Kim, Yong Seok Kim, Sang-il Park
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Patent number: 8089053Abstract: The present invention relates to double-tilt specimen holders of the side-entry type for transmission electron microscopy (TEM). The invention uses Micro Electro Mechanical Systems (MEMS) and Piezoelectric Transducer (PZT) technology to create a digitally programmable dynamically tilting specimen holder integrated into a standard transmission electron microscope stage. In this invention, specimens can be tilted using a MEMS/PZT-actuated specimen holder to between 10 and 25° for stereo pairs and at higher angles (up to 90°) for tomography applications. In one embodiment, the specimen cradle may be effectively rotated 360° about the Y axis, enabling virtually the complete three-dimensional mapping of a specimen.Type: GrantFiled: November 10, 2009Date of Patent: January 3, 2012Inventor: Dudley Sean Finch
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Publication number: 20110296565Abstract: The invention relates to a multifunctional scanning probe microscope comprising: a base (1); a preliminary approach unit (3) movably mounted on the base (1); a piezo-scanner (4) disposed on the preliminary approach unit (3); an object holder (5) disposed on the piezo-scanner (4); a sample (6) which comprises a measuring area (M) and is attached to the piezo-scanner (4) with the aid of the object holder (5); a platform (9) attached to the base (1) opposite the sample (6); an analyzer mounted on the platform (9) and comprising a first measuring head (13) which is oriented towards the sample (6) and is adapted for probing the measuring area (M) of the sample (6).Type: ApplicationFiled: February 12, 2010Publication date: December 1, 2011Applicant: NT-MDT SERVICE & LOGISTICS LTD.Inventors: Andrey Bykov, Vladimir Kotov, Viktor Bykov
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Patent number: 8063383Abstract: We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any instrument or device. All aspects of the present invention present a significant improvement over the prior art: a positioner is robust and compact; an optical instrument for positional control is a profoundly simple and compact module; a clamping assembly is self-aligning and suitable for robotic hot-swapping of objects being positioned.Type: GrantFiled: November 4, 2008Date of Patent: November 22, 2011Inventors: Sergiy Pryadkin, Dmitri Simonian
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Patent number: 8011016Abstract: An SPM probe with an elongated support element and a cantilever projecting beyond the front face of the support element and carrying a scanning tip, with the cantilever arranged at a front face side of the support element of the probe, protruding there from a front face side flank, and with the support element having an essentially trapezoidal cross-section with a longer and a shorter transverse edge at the face side flank, and also with critical corners at one of the transverse edges of the face side flank that are closest to a sample during the scanning process, wherein the support element has an elongated raised portion extending in the longitudinal direction of the support element and of the cantilever, with the raised portion having an essentially trapezoidal cross-section, and with the cantilever arranged on the face side on a narrow transverse edge of the raised portion of the support element, and with the raised portion with the cantilever arranged preferably at the longer transverse edge of the faceType: GrantFiled: March 12, 2009Date of Patent: August 30, 2011Assignee: NanoWorld AGInventors: Thomas Sulzbach, Christoph Richter
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Patent number: 7945964Abstract: Provided are a structure of an apparatus for analysis, inspection, and measurement in which a support structure supporting a detection unit is resistant to disturbance, suppresses a reduction in resolution during large-sample measurement, and has high rigidity, and a probe microscope using the apparatus structure. The apparatus structure supporting the detection unit which is opposed to a sample which is located on a unit movable in at least one axis direction and is an object to be analyzed has an arch shape. In the apparatus structure having the arch shape and supporting the detection unit, a surface substantially perpendicular to a flat surface portion of a sample holder located immediately under the apparatus structure is formed. The detection unit is supported on the perpendicular surface. The arch-shaped apparatus structure is a curved structure consistent with a catenary curve.Type: GrantFiled: March 31, 2009Date of Patent: May 17, 2011Assignee: SII NanoTechnology Inc.Inventors: Shigeru Wakiyama, Kenichi Akamatsu
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Publication number: 20110107472Abstract: A sensor for quantitative test electromechanical properties and microstructure of nano-materials and a manufacturing method for the sensor are provided. The sensor comprises a suspended structure, pressure-sensitive resistor cantilevers, support beams, bimetallic strip and other components. When the bimetallic strip produces bending deformation, one of the pressure-sensitive resistor cantilevers is actuated and then stretches the low-dimensional nano-materials which drive the other pressure-sensitive resistor cantilever to bend. Through signal changes are outputted by the Wheatstone bridge, the variable stresses of low-dimensional nano-materials are obtained. Meanwhile, the variable strains of low-dimensional nano-materials are obtained by the horizontal displacements between two cantilevers, so the stress-strain curves of low-dimensional nano-materials are worked out. When the low-dimensional nano-materials are measured in the power state, the voltage-current curves are also obtained.Type: ApplicationFiled: April 7, 2010Publication date: May 5, 2011Applicant: BEIJING UNIVERSITY OF TECHNOLOGYInventors: XIAODONG HAN, PAN LIU, YONGHAI YUE, ZE ZHANG
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Publication number: 20110093991Abstract: An object of the present invention relates to an arrangement of a manufactured probe in a prober apparatus without being exposed to an atmospheric air. The present invention relates to a probe storage container which can supply a probe in a prober apparatus without being exposed to an atmospheric air. Preferably, the probe is stored in the probe storage container by removing an oxide film in a leading end portion of the probe in accordance with a dry treatment using an ion source or the like, without being exposed to the atmospheric air. In accordance with the present invention, it is possible to replace and attach the probe with respect to the prober apparatus without being exposed to the atmospheric air, and it is possible to avoid a formation of the oxide film on a surface of the probe. Further, a worker attaching the probe to the prober apparatus can work without being directly in contact with the probe, and it is possible to prevent the leading end portion of the probe from being broken.Type: ApplicationFiled: December 23, 2010Publication date: April 21, 2011Applicant: Hitachi High-Technologies CorporationInventors: Masanori Gunji, Katsunori Nakajima, Yasuhiko Nara, Tsutomu Saito, Shigeru Izawa
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Publication number: 20110014378Abstract: Devices for leveling an object for patterning a substrate surface, including an array of scanning probe tips, are provided. A device may include a support structure adapted to mount an object, the object having a plurality of protrusions adapted to form a pattern on a surface of a substrate upon contact of the object to the surface; and at least one flexible joint assembly mounted to the support structure and adapted to allow the object to achieve a parallel orientation with respect to the surface upon contact of the object to the surface. Also provided are apparatuses and kits incorporating the devices and methods of making and using the devices and apparatuses.Type: ApplicationFiled: July 16, 2010Publication date: January 20, 2011Inventors: John Edward BUSSAN, Sergey V. Rozhok, Vadim Val-Khvalabov, Joseph S. Fragala, Jason R. Haaheim, Michael R. Nelson, Edward R. Solheim, Javad M. Vakil
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Patent number: 7861315Abstract: A simple method for integrating a circuit onto a probe with a handle, a cantilever and a tip is provided. By fabricating a probe whose surface has recessed patterns of the desirable profile, a circuit can be formed on one part of the handle out over the cantilever and back onto a different part of the handle without employing a circuit lithography step. The circuit material constituting the circuit is deposited orthogonally to the probe surface with a line-of-sight technique.Type: GrantFiled: December 11, 2008Date of Patent: December 28, 2010Assignee: Asylum Research CorporationInventors: Roger Proksch, Hector Cavazos
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Publication number: 20100263096Abstract: The invention relates to a measuring probe device for a probe microscope, in particular a scanning probe microscope, with a measuring probe holder and a measuring probe arranged on the measuring probe holder, which is set up for a probe microscopic investigation of a sample, wherein on the measuring probe holder, a measuring probe chamber is formed, which receives the measuring probe at least partially and is open on a side away from the measuring probe holder, and is configured to receive a liquid surrounding the measuring probe. The invention also relates to a measuring cell for receiving a liquid sample for a probe microscope, a scanning probe microscope with a measuring probe device and a scanning probe microscope with a measuring cell.Type: ApplicationFiled: July 24, 2008Publication date: October 14, 2010Inventors: Torsten Jähnke, Torsten Müller, Kathryn Anne Poole, Detlef Knebel
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Patent number: 7796493Abstract: In one embodiment, the present invention includes an apparatus having a first cantilever structure to move in a vertical direction, including a first plate formed of a conductive material, an insulation beam adapted on a portion of the first plate, and a second cantilever structure adapted on the insulation beam and including a second plate formed of a conductive material, where an air gap is present between the first and second plates. Other embodiments are described and claimed.Type: GrantFiled: August 10, 2007Date of Patent: September 14, 2010Assignee: Intel CorporationInventors: Tsung-Kuan Allen Chou, Donald Adams, Robert Stark
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Publication number: 20100229262Abstract: The invention relates to an apparatus and a method for examining a specimen by means of probe microscopy, in particular scanning probe microscopy. The apparatus comprises a probe microscope device which has a specimen holder for holding a specimen to be examined, a measurement probe and a displacement unit which is configured to displace the specimen holder and the measurement probe relative to one another for an examination of the specimen by means of probe microscopy, and comprises a condenser illumination and also an optical system which is arranged downstream of the condenser illumination and is configured to project condenser light, which is emitted by the condenser illumination in a condenser light path, into the region of the specimen holder for optical microscopy of the specimen to be examined, while at least partially maintaining condenser light parameters with which the condenser light is emitted by the condenser illumination.Type: ApplicationFiled: August 20, 2007Publication date: September 9, 2010Applicant: JPK INSTRUMENTS AGInventors: Gunnar Sommer, Jorn Kamps
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Patent number: 7793356Abstract: A signal coupling system interposed between a scanning probe and a measurement instrument provides signal communication between the scanning probe and the measurement instrument. The signal coupling system has a pre-stressed shape when the scanning probe is in a neutral position. The pre-stressed shape is designated to provide a characteristic impedance of the signal coupling system that varies linearly as a function of displacement of the scanning probe from the neutral position when the scanning probe is displaced, relative to the neutral position, over a designated range of displacements.Type: GrantFiled: September 11, 2008Date of Patent: September 7, 2010Assignee: Agilent Technologies, Inc.Inventors: Hassan Tanbakuchi, Matthew Richter, Michael Whitener
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Patent number: 7770231Abstract: A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.Type: GrantFiled: August 2, 2007Date of Patent: August 3, 2010Assignee: Veeco Instruments, Inc.Inventors: Craig Prater, Chanmin Su, Nghi Phan, Jeffrey M. Markakis, Craig Cusworth, Jian Shi, Johannes H. Kindt, Steven F. Nagle, Wenjun Fan
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Publication number: 20100192268Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.Type: ApplicationFiled: November 23, 2009Publication date: July 29, 2010Applicant: General Nanotechnology LLCInventor: Victor B. Kley
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Patent number: 7765606Abstract: A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.Type: GrantFiled: January 26, 2007Date of Patent: July 27, 2010Assignee: Canon Kabushiki KaishaInventors: Takao Kusaka, Nobuki Yoshimatsu, Susumu Yasuda, Junichi Seki
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Patent number: 7735358Abstract: The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first configuration; one or more oscillators coupled to the one or more elongated beams, wherein the one or more oscillators are operable for selectively oscillating the one or more elongated beams to form one or more “virtual” probe tips; and an actuator coupled to the one or more elongated beams, wherein the actuator is operable for selectively actuating the one or more elongated beams from the first configuration to a second configuration.Type: GrantFiled: June 15, 2007Date of Patent: June 15, 2010Assignee: Insitutec, Inc.Inventors: Marcin B. Bauza, Shane C. Woody, Stuart T. Smith
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Patent number: 7709791Abstract: Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.Type: GrantFiled: October 15, 2007Date of Patent: May 4, 2010Assignee: Park Systems Corp.Inventors: Hyeong Chan Jo, Hong Jae Lim, Seung Jun Shin, Joon Hui Kim, Yong Seok Kim, Sang-il Park
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Publication number: 20100100990Abstract: A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half.Type: ApplicationFiled: October 17, 2009Publication date: April 22, 2010Applicant: Massachusetts Institute of TechnologyInventors: David L. Trumper, Ian MacKenzie
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Patent number: 7690047Abstract: A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a drive circuit for driving the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.Type: GrantFiled: January 26, 2007Date of Patent: March 30, 2010Assignee: Canon Kabushiki KaishaInventors: Susumu Yasuda, Junichi Seki, Takao Kusaka, Nobuki Yoshimatsu
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Publication number: 20100037360Abstract: An automatic probe exchange system for a scanning probe microscope (SPM) exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic force. When the magnetic force on the SPM side is greater, the probe is attached to the probe mount on the SPM. When the magnetic force on the probe tray side is greater, the probe is attached to the probe mount on the probe tray. The magnetic force on the probe tray side is varied by moving the magnets that generate the magnetic force on the probe tray side closer to or further from the probe.Type: ApplicationFiled: September 29, 2009Publication date: February 11, 2010Inventors: Hyeong Chan JO, Hong Jae Lim, Seung Jun Shin, Joon Hui Kim, Yong Seok Kim, Sang-il Park
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Patent number: 7605368Abstract: A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the cantilever can contact the sample. The holder has a cantilever-attaching stand on which the main body part is placed and fastened such that the cantilever is tilted at a predetermined angle with respect to the sample. A first vibration source is fastened to the cantilever-attaching stand and vibrates with a phase and an amplitude depending on a predetermined waveform signal, and the first vibration source is fastened at a first location to a holder main body. A second vibration source is fastened at a second location, which is spaced from the first location, to the holder main body and generates vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body.Type: GrantFiled: November 9, 2006Date of Patent: October 20, 2009Assignee: SII NanoTechnology Inc.Inventors: Masatsugu Shigeno, Masato Iyoki
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Patent number: 7578853Abstract: A scanning probe microscope system comprising a hollow probe 3, a tube 4 connected to a rear end 32 of the hollow probe 3, a support table 1 provided under the hollow probe 3, and a substrate 2 and a means 5 for washing the hollow probe 3 that are fixed to the support table 1, a sample S passing through the tube 4 and the hollow probe 3, and the substrate 2 and the washing means 5 being moved by the support table 1 such that each of them opposes the hollow probe 3.Type: GrantFiled: July 1, 2005Date of Patent: August 25, 2009Assignee: Honda Motor Co., Ltd.Inventors: Tatsuya Hattori, Pu Qian