General Aspects Of Spm Probes, Their Manufacture, Or Their Related Instrumentation, Insofar As They Are Not Specially Adapted To A Single Specific Spm Technique (epo) Patents (Class 850/52)
  • Patent number: 10822229
    Abstract: Improved methods, systems and devices for mechanosynthesis, including those that involve the bulk chemical preparation of tips, multiple tips on a presentation surface, and multiple tips used sequentially in a thermodynamic cascade. These improvements can simplify starting requirements, improve versatility, and reduce equipment and process complexity.
    Type: Grant
    Filed: November 13, 2017
    Date of Patent: November 3, 2020
    Assignee: CBN Nano Technologies Inc.
    Inventors: Ralph C. Merkle, Robert A. Freitas, Jr., Jeremy Barton, Aru Hill, Michael Drew, Damian Allis, Tait Takatani, Michael Shawn Marshall, Matthew Kennedy
  • Patent number: 9865246
    Abstract: Provided are a laser-induced ultrasound generator and a method of manufacturing the laser-induced ultrasound generator. The laser-induced ultrasound generator includes: a substrate including a plurality of nanostructures provided on a first surface of the substrate; and a thermoelastic layer provided on the first surface of the substrate, the thermoelastic layer being configured to generate an ultrasound by absorbing a laser beam incident onto a second surface of the substrate, the second surface facing the first surface. The nanostructures may be cylinder-shaped nano-pillars.
    Type: Grant
    Filed: June 5, 2014
    Date of Patent: January 9, 2018
    Assignees: SAMSUNG ELECTRONICS CO., LTD., Korea Advanced Institute Of Science and Technology
    Inventors: Sung-chan Kang, Jong-seok Kim, Chang-jung Kim, Seung-bum Yang, Young-jae Oh, Yong-seop Yoon, Ki-hun Jeong
  • Patent number: 9003561
    Abstract: The present invention relates to an atomic resolution deformation distribution measurement device that can measure a deformation rate of an atomic scale with low expense by improving resolution using an AFM system, and the atomic resolution deformation distribution measurement device includes: a laser source generating a laser beam; a first cantilever and a second cantilever provided close to a measurement specimen or a reference specimen to cause deformation by an atomic force; an optical system controlling a light path of the laser beam so as to cause the laser beam to be sequentially reflected to the first cantilever and the second cantilever and locate the first cantilever and the second cantilever to an image point; a measurement unit measuring the laser beam reflected from the second cantilever; and a stage on which a measurement specimen or a reference specimen is located and movable in X, Y, and Z axis directions.
    Type: Grant
    Filed: April 10, 2014
    Date of Patent: April 7, 2015
    Assignees: Korea Institute of Machinery & Materials, Brown University
    Inventors: Bong Kyun Jang, Jae-Hyun Kim, Hak Joo Lee, Kyung-Suk Kim, Chien-Kai Wang
  • Patent number: 8984661
    Abstract: This disclosure provides systems, methods, and apparatus related to probes for multidimensional nanospectroscopic imaging. In one aspect, a method includes providing a transparent tip comprising a dielectric material. A four-sided pyramidal-shaped structure is formed at an apex of the transparent tip using a focused ion beam. Metal layers are deposited over two opposing sides of the four-sided pyramidal-shaped structure.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: March 17, 2015
    Assignee: The Regents of the University of California
    Inventors: Alexander Weber-Bargioni, Stefano Cabrini, Wei Bao, Mauro Melli, Eli Yablonovitch, Peter J. Schuck
  • Patent number: 8898811
    Abstract: Disclosed herein describes an SERS sensing substrate comprising upright metal nanostructures made by using oblique angle deposition (OAD) collocating with self-rotation substrate, wherein said upright nanostructures include individual upright nanopillars and metal/dielectric multilayered upright nanopillar stacks. The SERS sensing substrate exhibits higher and enhanced adsorption spectra for unpolarized incident rays in the visible and infrared wavelength regimes.
    Type: Grant
    Filed: December 28, 2012
    Date of Patent: November 25, 2014
    Assignees: Phansco Corp., National Taipei University of Technology
    Inventors: Yi-Jun Jen, Ching-Wei Yu
  • Patent number: 8898810
    Abstract: A method for functionalizing cantilevers is provided that includes providing a holder having a plurality of channels each having a width for accepting a cantilever probe and a plurality of probes. A plurality of cantilever probes are fastened to the plurality of channels of the holder by the spring clips. The wells of a well plate are filled with a functionalization solution, wherein adjacent wells in the well plate are separated by a dimension that is substantially equal to a dimension separating adjacent channels of the plurality of channels. Each cantilever probe that is fastened within the plurality of channels of the holder is applied to the functionalization solution that is contained in the wells of the well plate.
    Type: Grant
    Filed: December 23, 2013
    Date of Patent: November 25, 2014
    Assignees: UT-Battelle, LLC, University of Tennesse Research Foundation
    Inventors: Barbara R. Evans, Ida Lee
  • Patent number: 8893310
    Abstract: A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: November 18, 2014
    Assignees: International Business Machines Corporation, Cornell University
    Inventors: Mark C. Reuter, Brian A. Bryce, Bojan R. Ilic, Sandip Tiwari
  • Patent number: 8881311
    Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: November 4, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Markus B. Raschke, Stefan B. Kaemmer, Stephen C. Minne, Chanmin Su
  • Patent number: 8819861
    Abstract: The invention provides methods for sharpening the tip of an electrical conductor. The methods of the invention are capable of producing tips with an apex radius of curvature less than 2 nm. The methods of the invention are based on simultaneous direction of ionized atoms towards the apex of a previously sharpened conducting tip and application of an electric potential difference to the tip. The sign of the charge on the ions is the same as the sign of the electric potential. The methods of the invention can be used to sharpen metal wires, metal wires tipped with conductive coatings, multi-walled carbon nanotubes, semiconducting nanowires and semiconductors in other forms.
    Type: Grant
    Filed: November 9, 2011
    Date of Patent: August 26, 2014
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Joseph W. Lyding, Scott W. Schmucker
  • Patent number: 8819860
    Abstract: A device including a first part and a second part, the first and second part being connected to each other and being movable relative to each other. The first part is a cantilever that has a rectangular strip with a probe tip at one end and a magnetic element the other end. The magnetic element is configured to interact with a magnetic field. The first part is connected to the second part by a hinge.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: August 26, 2014
    Assignee: International Business Machines Corporation
    Inventors: Michel Despont, Venkataraman Kartik, Charalampos Pozidis, Deepak R. Sahoo
  • Patent number: 8756710
    Abstract: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: June 17, 2014
    Assignee: Bruker-Nano, Inc.
    Inventors: Weijie Wang, Chanmin Quanmin Su
  • Patent number: 8661561
    Abstract: A metal tip (1) for scanning probe applications is provided. The tip (1) has an axial extension (I), a radial extension (d), a pointy section (B) that extends axially from a section of maximum radial extension (5) to an atomically sharp end (9), and a blunt section (A) that extends axially from the section of maximum radial extension (5) to a blunt end (7), where the axial extension of the pointy section (B) is larger than the axial extension of the blunt section (A) The metal tip (1) has a mass of 10 ?g or less.
    Type: Grant
    Filed: August 2, 2010
    Date of Patent: February 25, 2014
    Assignee: SPECS Surface Nano Analysis GmbH
    Inventor: Erik Laegsgaard
  • Patent number: 8650661
    Abstract: A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: February 11, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Gregory A. Dahlen, Hao-chih Liu
  • Patent number: 8635711
    Abstract: A method for functionalizing cantilevers is provided that includes providing a holder having a plurality of channels each having a width for accepting a cantilever probe and a plurality of probes. A plurality of cantilever probes are fastened to the plurality of channels of the holder by the spring clips. The wells of a well plate are filled with a functionalization solution, wherein adjacent wells in the well plate are separated by a dimension that is substantially equal to a dimension separating adjacent channels of the plurality of channels. Each cantilever probe that is fastened within the plurality of channels of the holder is applied to the functionalization solution that is contained in the wells of the well plate.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: January 21, 2014
    Assignees: UT-Battelle, LLC, University of Tennessee Research Foundation
    Inventors: Barbara R. Evans, Ida Lee
  • Patent number: 8631511
    Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.
    Type: Grant
    Filed: February 7, 2011
    Date of Patent: January 14, 2014
    Inventor: Victor B. Kley
  • Patent number: 8621658
    Abstract: A magnetic-field-observation device and method for measuring magnetic force near a magnetic material specimen's surface with high resolution and detecting the polarity of the magnetic pole of specimen's surface.
    Type: Grant
    Filed: September 5, 2011
    Date of Patent: December 31, 2013
    Assignee: Akita University
    Inventors: Hitoshi Saito, Satoru Yoshimura
  • Patent number: 8505111
    Abstract: Provided is a cantilever excitation device capable of preventing complication of resonance characteristics by a simple configuration. A cantilever excitation device (1) is provided with a cantilever (7), a cantilever holder (3) for holding the cantilever (7), and a piezoelectric vibrator (5) attached to the cantilever holder (3). The cantilever holder (3) includes a holder main part (11) (first part) having an acoustic impedance different from that of the piezoelectric vibrator (5) for transmitting vibration of the piezoelectric vibrator by elastic deformation and an attachment piece (13) (second part) having the acoustic impedance different from that of the first part for forming a material boundary to block propagation of an acoustic wave between the same and the first part. The first and second parts are interposed between the piezoelectric vibrator (5) and the cantilever (7).
    Type: Grant
    Filed: August 6, 2010
    Date of Patent: August 6, 2013
    Assignee: National University Corporation Kanazawa University
    Inventors: Hitoshi Asakawa, Takeshi Fukuma
  • Patent number: 8490209
    Abstract: Provided are a surface state measuring device which can measure an alternating force of an arbitrary frequency and which is excellent in spatial resolution, and a surface state measuring method using the device. This surface state measuring device measures the surface state of a sample by detecting the modulation of the oscillation of a probe arranged above the sample. The measuring device comprises: a cantilever having a probe near a free end; an excitation mechanism for exciting the cantilever; a scanning mechanism for making the probe scan the sample by moving the probe and the sample relative to each other; and alternating force generator for generating an alternating force of an arbitrary frequency in a space; and a modulation measuring mechanism for measuring the degree of frequency modulation or amplitude modulation of the oscillations of the probe, which are generated by the alternating force.
    Type: Grant
    Filed: August 9, 2010
    Date of Patent: July 16, 2013
    Assignee: Akita University
    Inventor: Hitoshi Saito
  • Patent number: 8484761
    Abstract: An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: July 9, 2013
    Assignee: IMEC
    Inventors: Thomas Hantschel, Wilfried Vandervorst, Kai Arstila
  • Patent number: 8484760
    Abstract: A device including a first part and a second part, one of which is a cantilever, the first and second parts being connected to each other and movable relative to each other. The device includes a magnetic element arranged on the first part and configured to provide a magnetic field. The device further includes a magnetization device arranged on the second part and configured to provide an actuation magnetic field which interacts with the magnetic field of the magnetic element, thereby causing or suppressing relative movement of the first and second parts. A scanning system including such a device is also described.
    Type: Grant
    Filed: November 23, 2010
    Date of Patent: July 9, 2013
    Assignee: International Business Machines Corporation
    Inventors: Michael Despont, Venkataraman Kartik, Charalampos Pozidis, Deepak Ranjan Sahoo
  • Patent number: 8407811
    Abstract: In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
    Type: Grant
    Filed: February 25, 2010
    Date of Patent: March 26, 2013
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Motoyuki Hirooka
  • Patent number: 8397555
    Abstract: The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.
    Type: Grant
    Filed: February 28, 2011
    Date of Patent: March 19, 2013
    Assignee: Applied NanoStructures, Inc.
    Inventor: Ami Chand
  • Patent number: 8393011
    Abstract: A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
    Type: Grant
    Filed: May 13, 2009
    Date of Patent: March 5, 2013
    Assignee: NanoInk, Inc.
    Inventors: Joseph S. Fragala, Albert K. Henning, Raymond R. Shile
  • Patent number: 8327460
    Abstract: The present invention allows simple and sensitive detection of microimpurities, microdefects, and corrosion starting points which may be present in a material. A probe microscope has a function to sense ions diffused from a specimen in a liquid. A probe is caused to scan over a predetermined range on a specimen. Then, the probe is fixed to a particular position in a liquid so as to set the distance between the specimen and the probe to a given value at which the microstructure of the specimen surface cannot be observed. Thereafter, one of the current between the probe and a counter electrode and the potential between the probe and a reference electrode is controlled, and the other of the current and potential which varies in accordance with the control is measured. Thus, ions diffused from the specimen are sensed.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: December 4, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Kyoko Honbo, Katsumi Mabuchi, Motoko Harada
  • Patent number: 8291510
    Abstract: An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an amplifier; and a crossover network connected between the amplifier, and the first actuator and the second actuator. The crossover network is adapted to provide a first drive signal to the first actuator over a first frequency range and to provide a second drive signal to the second actuator over a second frequency range.
    Type: Grant
    Filed: September 27, 2010
    Date of Patent: October 16, 2012
    Assignee: Agilent Technologies, Inc.
    Inventors: Dale W. Schroeder, Richard P. Tella
  • Patent number: 8256017
    Abstract: A calibration leveling system and method are provided which improve printing and imaging at the nanoscale including improved tip-based deposition and nanolithography. The system can include a scanning probe instrument having a video camera with an adjustable lens. The scanner can be coupled to a one or two dimensional array of cantilevers comprising cantilever tips for imaging or printing. The scanning probe instrument has one or more motors for controlling the scanner in the z-axis. The z-axis motors position the scanner so that the cantilever tips are in a level orientation relative to the surface of a substrate. Once the cantilever tips are level with the substrate, the positions of the z-axis motors can be recorded for future reference.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: August 28, 2012
    Assignee: NanoInk, Inc.
    Inventor: Jason Haaheim
  • Patent number: 8245316
    Abstract: The scanning probe microscope applies a sum of an AC voltage (Uac) and a DC voltage (Udc) to its probe. The frequency of the AC voltage (Uac) substantially corresponds to the mechanical oscillation frequency of the probe, but its phase in respect to the mechanical oscillation varies periodically. The phase modulation has a frequency fmod. The microscope measures the frequency (f) or the amplitude (K) of a master signal (S) applied to the probe's actuator, or it measures the phase of the mechanical oscillation of the cantilever in respect to the master signal (S). The spectral component at frequency fmod of the measured signal is fed to a feedback loop controller, which strives to keep it zero by adjusting the DC voltage (Udc), thereby keeping the DC voltage at the contact voltage potential.
    Type: Grant
    Filed: December 15, 2006
    Date of Patent: August 14, 2012
    Assignee: Specs Zürich GmbH
    Inventor: Jörg Rychen
  • Publication number: 20120192320
    Abstract: Provided is a cantilever excitation device capable of preventing complication of resonance characteristics by a simple configuration. A cantilever excitation device (1) is provided with a cantilever (7), a cantilever holder (3) for holding the cantilever (7), and a piezoelectric vibrator (5) attached to the cantilever holder (3). The cantilever holder (3) includes a holder main part (11) (first part) having an acoustic impedance different from that of the piezoelectric vibrator (5) for transmitting vibration of the piezoelectric vibrator by elastic deformation and an attachment piece (13) (second part) having the acoustic impedance different from that of the first part for forming a material boundary to block propagation of an acoustic wave between the same and the first part. The first and second parts are interposed between the piezoelectric vibrator (5) and the cantilever (7).
    Type: Application
    Filed: August 6, 2010
    Publication date: July 26, 2012
    Inventors: Hitoshi Asakawa, Takeshi Fukuma
  • Patent number: 8220068
    Abstract: A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: July 10, 2012
    Assignee: International Business Machines Corporation
    Inventors: Guy M. Cohen, Hendrik F. Hamann
  • Patent number: 8214917
    Abstract: A microfluidic cell includes a compressible block and a cantilever. The compressible block includes a first horizontal surface, an opposite second horizontal surface and a plurality of vertical surfaces therebetween. A gasket structure depends downwardly from the second horizontal surface. The gasket structure defines an open cavity therein. The compressible block defines a fluid inlet passage and a fluid outlet passage each in fluid communication with the cavity and opening to a selected one of the first horizontal surface and one of the plurality of vertical surfaces. The cantilever includes body portion and a beam extending laterally therefrom. The body portion is embedded in the compressible block and a portion of the beam extends into the cavity defined by the gasket structure.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: July 3, 2012
    Assignee: Georgia Tech Research Corporation
    Inventors: Todd A. Sulchek, Siping Roger Qiu, Damien J. Noga, David K. Schoenwald
  • Patent number: 8209768
    Abstract: A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.
    Type: Grant
    Filed: October 9, 2009
    Date of Patent: June 26, 2012
    Assignee: NanoWorld AG
    Inventors: Thomas Sulzbach, Oliver Krause, Mathieu Burri, Manfred Detterbeck, Bernd Irmer, Christian Penzkofer
  • Patent number: 8201268
    Abstract: An optical tip for a Near-field Scanning Optical Microscope (NSOM) is provided. The optical tip includes a waveguide with a semiconductor or metal core and a cladding. The refractive-index-square-ratio contrast between the core and the cladding is at least 0.3. The optical tip may also include a light detector and a light source. The waveguide, the light source and the light detector may be integrated to form a single chip.
    Type: Grant
    Filed: November 12, 2009
    Date of Patent: June 12, 2012
    Assignee: Optonet Inc.
    Inventors: Seng-Tiong Ho, Yingyan Huang
  • Patent number: 8196218
    Abstract: An exemplary, highly integrated, SPM-based system for measuring the conductivity and/or force of substance under programmable engaging/stretching processes is described. A sample bias is applied across two electrodes. A substance to be measured is sandwiched between them. A first electrode is first brought relative to a second electrode (engaging) in programmable pathways that can be described as stretching distance versus time curves. The process of engaging the electrodes continues until a certain current reached, a certain force reached and whichever case happens first. The electrodes are then separated (stretching) in programmable pathways that can be described as stretching distance versus time curves. A periodic modulation can be applied to the engaging/stretching process to realize different stretch pathways. The sample bias across the electrodes is kept constant or swept in a programmable shape over time, described as a voltage-versus time curve.
    Type: Grant
    Filed: March 30, 2009
    Date of Patent: June 5, 2012
    Assignee: University of Georgia Research Foundation, Inc.
    Inventors: Bingqian Xu, Fan Chen
  • Publication number: 20120117696
    Abstract: An integrated coupon structure for atom probe tomography (APT) analysis includes a base portion and an array of microtip posts protruding from the base portion. Both the base portion and the microtip posts formed from a same metal material, and the microtip posts being shaped at an apex thereof so as to be adapted to receive a sample attached thereto.
    Type: Application
    Filed: November 9, 2010
    Publication date: May 10, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Michael Hatzistergos, Christopher M. Molella, Paul Ronsheim, Matthew F. Stanton
  • Patent number: 8122761
    Abstract: A microcantilever sensor includes a supporting substrate, a cantilever spring element at least partially disposed over the support substrate, a probe layer disposed over the first side of the cantilever spring element, and a piezoresistive transducer attached to the second side of the cantilever spring element. The cantilever spring element is characterized by having a first side and a second side and comprising a polymer having a Young's modulus less than about 100 Gpa. Sensing systems that incorporate the cantilever sensor of the invention include a detector in communication with the piezoresistive transducer to provide measurements of surface strain changes in the piezoresistive transducer.
    Type: Grant
    Filed: January 20, 2006
    Date of Patent: February 28, 2012
    Assignee: Wayne State University
    Inventor: Yong Xu
  • Patent number: 8104332
    Abstract: To provide a probe 1 for use in a cantilever 2 of an scanning probe microscope (SPM) manufacturable in a simple manufacturing process and usable while allowing full use of the properties of single-crystalline material and a cantilever 2 using that probe. A probe 1 disposed at the tip of beam part 2a of a cantilever 2 used for an SPM, wherein the probe 1 comprises a needle-like part 1a having a length of not less than 10 ?m or and a flat plate part 1b having a face contacting a beam part of the cantilever, the needle-like part 1a and the flat plate part 1b are integrally formed with a single-crystalline material, and at least one side face of the flat plate part 1b contains a flat surface 1c in order to indicate the crystal orientation of the single-crystalline material.
    Type: Grant
    Filed: July 15, 2010
    Date of Patent: January 31, 2012
    Assignee: Namiki Seimitsu Houseki Kabushiki Kaisha
    Inventors: Kouji Koyama, Toshiro Kotaki, Kazuhiko Sunagawa
  • Patent number: 8089053
    Abstract: The present invention relates to double-tilt specimen holders of the side-entry type for transmission electron microscopy (TEM). The invention uses Micro Electro Mechanical Systems (MEMS) and Piezoelectric Transducer (PZT) technology to create a digitally programmable dynamically tilting specimen holder integrated into a standard transmission electron microscope stage. In this invention, specimens can be tilted using a MEMS/PZT-actuated specimen holder to between 10 and 25° for stereo pairs and at higher angles (up to 90°) for tomography applications. In one embodiment, the specimen cradle may be effectively rotated 360° about the Y axis, enabling virtually the complete three-dimensional mapping of a specimen.
    Type: Grant
    Filed: November 10, 2009
    Date of Patent: January 3, 2012
    Inventor: Dudley Sean Finch
  • Patent number: 8063383
    Abstract: We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any instrument or device. All aspects of the present invention present a significant improvement over the prior art: a positioner is robust and compact; an optical instrument for positional control is a profoundly simple and compact module; a clamping assembly is self-aligning and suitable for robotic hot-swapping of objects being positioned.
    Type: Grant
    Filed: November 4, 2008
    Date of Patent: November 22, 2011
    Inventors: Sergiy Pryadkin, Dmitri Simonian
  • Patent number: 8060943
    Abstract: The proposed device is based on a carbon nanotube oscillator consisting of a finite length outer stationary nanotube and a finite length inner oscillating nanotube. Its main function is to measure changes in the characteristics of the motion of the carbon nanotube oscillating near a sample surface, and profile the roughness of this surface. The device operates in a non-contact mode, thus it can be virtually non-wear and non-fatigued system. It is an alternative to the existing atomic force microscope (AFM) tips used to scan surfaces to determine their roughness.
    Type: Grant
    Filed: August 26, 2009
    Date of Patent: November 15, 2011
    Assignees: University of South Florida, North Carolina Central University
    Inventors: Adrian Popescu, Lilia M. Woods, Igor V. Bondarev
  • Patent number: 8028567
    Abstract: AFM tweezers that include a first probe, including a triangular prism member having a tip of a ridge which is usable as a probe tip in a scanning probe microscope, and a second probe, including a triangular prism member provided so as to open/close with respect to the first probe, are provided. The first probe and the second probe are juxtaposed such that a predetermined peripheral surface of the triangular prism member of the first probe and a predetermined peripheral surface of the triangular prism member of the second probe face substantially in parallel to each other, and the first probe formed of a notch that prevents interference with a sample when the sample is scanned by the tip of the ridge.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: October 4, 2011
    Assignees: AOI Electronics Co., Ltd., SII Nano Technology Inc.
    Inventors: Tatsuya Kobayashi, Masato Suzuki, Masatoshi Yasutake, Takeshi Umemoto
  • Patent number: 8011016
    Abstract: An SPM probe with an elongated support element and a cantilever projecting beyond the front face of the support element and carrying a scanning tip, with the cantilever arranged at a front face side of the support element of the probe, protruding there from a front face side flank, and with the support element having an essentially trapezoidal cross-section with a longer and a shorter transverse edge at the face side flank, and also with critical corners at one of the transverse edges of the face side flank that are closest to a sample during the scanning process, wherein the support element has an elongated raised portion extending in the longitudinal direction of the support element and of the cantilever, with the raised portion having an essentially trapezoidal cross-section, and with the cantilever arranged on the face side on a narrow transverse edge of the raised portion of the support element, and with the raised portion with the cantilever arranged preferably at the longer transverse edge of the face
    Type: Grant
    Filed: March 12, 2009
    Date of Patent: August 30, 2011
    Assignee: NanoWorld AG
    Inventors: Thomas Sulzbach, Christoph Richter
  • Patent number: 7997125
    Abstract: A miniaturized spring element is intended to be particularly suitable for use as a beam probe or cantilever for detecting atomic or molecular forces, in particular in an atomic force microscope, and, to this end, is intended to make it possible to detect its deflection in a particularly reliable manner and with high resolution. For this purpose, the spring element contains a basic body which is formed from a matrix containing embedded nanoparticles or defects. The spring element is produced using the principle of local deposition with focused energetic particles or electromagnetic waves or by pyrolytically induced deposition.
    Type: Grant
    Filed: August 1, 2008
    Date of Patent: August 16, 2011
    Assignees: Nanoscale Systems, Nanoss GmbH, Johann Wolfgang Goethe-Universitaet
    Inventors: Alexander Kaya, Michael Huth
  • Patent number: 7977636
    Abstract: A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.
    Type: Grant
    Filed: August 12, 2008
    Date of Patent: July 12, 2011
    Assignee: Anasys Instruments, Inc.
    Inventor: Markus B. Raschke
  • Publication number: 20110126329
    Abstract: A device including a first part and a second part, one of which is a cantilever, the first and second parts being connected to each other and movable relative to each other. The device includes a magnetic element arranged on the first part and configured to provide a magnetic field. The device further includes a magnetization device arranged on the second part and configured to provide an actuation magnetic field which interacts with the magnetic field of the magnetic element, thereby causing or suppressing relative movement of the first and second parts. A scanning system including such a device is also described.
    Type: Application
    Filed: November 23, 2010
    Publication date: May 26, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Michel Despont, Venkataraman Kartik, Charalampos Pozidis, Deepak Ranjan Sahoo
  • Patent number: 7945966
    Abstract: The invention relates to a nanoprobe comprising a silica fiber (2) with an end opening having a diameter of less than 100 nm, and a metallic sheath (11). The total diameter of the silica part and the metallic sheath (11) is less than 300 nm. The invention also relates to a method for producing one such nanoprobe.
    Type: Grant
    Filed: June 6, 2006
    Date of Patent: May 17, 2011
    Inventors: Tiberiu Minea, Guy Louarn, Guirec Ollivier, Marc Chaigneau
  • Publication number: 20110099673
    Abstract: It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample without irradiated light blocked by a cantilever. The stage for scanning probe microscopy of the invention is a stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency and includes an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view. Light is radiated from a bottom surface of the sample substrate onto the sample through the opening.
    Type: Application
    Filed: June 27, 2008
    Publication date: April 28, 2011
    Applicants: NIPPON TELEGRAPH AND TELEPHONE CORPORATION, ISIS INNOVATION LIMITED
    Inventors: Nahoko Kasai, Yuichi Harada, Chandra Sekar Ramanujan
  • Patent number: 7926328
    Abstract: There is provided a sample manipulating apparatus which is an apparatus for manipulating a sample mounted on a substrate surface, in which at least position data and shape data are acquired by observing the sample. Thereafter, tweezers are positioned by moving means such that the sample is positioned between an observing probe and a grasping probe based on the two set of data. After positioning, a height of the tweezers is set to a position of being remote from the substrate surface by a constant distance by moving means while monitoring a result of measurement by displacement measuring means. Thereafter, the grasping probe is moved to a side of the observing probe while monitoring the result of measurement by the displacement measuring means at the set height and the sample is grasped while detecting a grasping start point.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: April 19, 2011
    Assignee: SII Nano Technology Inc.
    Inventors: Masatoshi Yasutake, Takeshi Umemoto, Masafumi Watanabe
  • Patent number: 7921465
    Abstract: A system (100) for characterizing surfaces can include a nanotip microscope (104) in a first pressure envelope (102) at a first pressure with an electrically conductive nanotip (110) mounted thereon for characterizing a sample surface. The system can also include an ion imaging system (122, 124, 128) within a second pressure envelope (120) at a second pressure. The second pressure can less than or equal to the first pressure and the pressure envelopes (102, 120) can be separated by a pressure limiting aperture (PLA) (132). The system can further include gas sources (116, 118) for introducing into the first pressure envelope (102) at least one gas, and a voltage supply (114) coupled to the nanotip (110) for generating an electric field between the nanotip (114) and the PLA (132).
    Type: Grant
    Filed: August 14, 2008
    Date of Patent: April 5, 2011
    Assignee: Texas Instruments Incorporated
    Inventor: Vladimir Ukraintsev
  • Patent number: 7917966
    Abstract: Techniques for fabricating carbon nanotubes aligned on a tip are provided. In one embodiment, a method for fabricating carbon nanotubes aligned on a tip includes forming nanostructures on the tip, and aligning the nanostructures on the tip using a fluid flowing on the tip.
    Type: Grant
    Filed: August 21, 2008
    Date of Patent: March 29, 2011
    Assignee: SNU R&DB Foundation
    Inventors: Yong Hyup Kim, Wal Jun Kim
  • Publication number: 20110061139
    Abstract: Scanning hall probe microscopy is used to measure 3 components of the magnetic field vector at nanometer resolution by connecting of Hall probe to the end of the piezo scanner, then gluing of the sample to the sample holder, thereafter positioning of the SHPM head under the optical microscope with approximately ×40 magnification, then moving back of the slider puck around approximately 30 steps or moving the sensor or sample back by sufficient amount using motors, piezo or other positioner such that signal decays to negligible levels; thereafter setting the temperature of cryostat or to desired temperature, then offset nulling of the Hall sensor in gradiometer or normal conditions, and finally setting of the scan area, speed, resolution and the acquisition channels through SPM control program.
    Type: Application
    Filed: September 4, 2009
    Publication date: March 10, 2011
    Inventors: Ahmet Oral, Munir Dede, Rizwan Arkam