By Optical Means (epo) Patents (Class 850/6)
  • Patent number: 11293940
    Abstract: A sensor device includes a carrier, a force feedback sensor, and a probe containing a spin defect, the probe being connected to the force feedback sensor either directly or indirectly via a handle structure. In order to couple the spin defect to a microwave field in an efficient and robust manner, the sensor device includes an integrated microwave antenna arranged at a distance of less than 500 micrometers from the spin defect. The sensor device can be configured as a self-contained exchangeable cartridge that can easily be mounted in a sensor mount of a scanning probe microscope.
    Type: Grant
    Filed: March 14, 2018
    Date of Patent: April 5, 2022
    Assignee: ETH Zurich
    Inventors: Christian Degen, Jens Boss, Kevin Chang, Jan Rhensius
  • Patent number: 11099210
    Abstract: A method of carrying out sub-resonant tapping in an atomic force microscope includes causing a probe that is disposed above a sample to be translated in a direction parallel to a horizontal plane defined by the sample and to oscillate in a vertical direction that is perpendicular to the horizontal plane about an equilibrium line that is separated from the horizontal plane by a vertical offset. As a result, the probe repeatedly taps a surface of the sample. Each tap begins with a first contact of the probe on the surface followed by a progressive increase in force exerted by the sample on the probe until a peak force is attained. The vertical offset is controlled by relying at least in part on a feature other than the peak force as a basis for controlling the vertical offset.
    Type: Grant
    Filed: January 30, 2018
    Date of Patent: August 24, 2021
    Assignee: Trustees of Tufts College
    Inventors: Piers Echols-Jones, William C. Messner, Igor Sokolov
  • Patent number: 10942200
    Abstract: A method to perform sub-surface detection of nanostructures in a sample, uses an atomic force microscopy system that comprising a scan head having a probe with a cantilever and a probe tip arranged on the cantilever. The method comprises: moving the probe tip and the sample relative to each other in one or more directions parallel to the surface for scanning of the surface with the probe tip; and monitoring motion of the probe tip relative to the scan head with a tip position detector during said scanning for obtaining an output signal. During said scanning acoustic vibrations are induced in the probe tip by applying a least a first and a second acoustic input signal respectively comprising a first and a second signal component at mutually different frequencies above IGHz, differing by less than IGHz to the probe, and analyzing the output signal for mapping at least subsurface nanostructures below the surface of the sample.
    Type: Grant
    Filed: January 15, 2018
    Date of Patent: March 9, 2021
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Abbas Mohtashami, Maarten Hubertus van Es, Hamed Sadeghian Marnani
  • Patent number: 10876942
    Abstract: A system for applying and measuring tensions of a plurality of bio-object constructs includes a base; and a flexible body disposed on the base, wherein the flexible body defines a plurality of construct holes for accommodating the plurality of bio-object constructs, such that when the flexible body is bent, the bending of the flexible body causes tensions to be applied to the plurality of bio-object constructs, thereby causing displacements of the plurality of bio-object constructs.
    Type: Grant
    Filed: July 22, 2020
    Date of Patent: December 29, 2020
    Assignee: VANDERBILT UNIVERSITY
    Inventors: John P. Wikswo, Philip C. Samson
  • Patent number: 10768225
    Abstract: A control system for placing an optic probe includes a receiver circuit that receives reflected light produced from the optic probe and provides a laser probe (LP) waveform of the reflected light in response to an activation of a trigger signal. A combinational logic analysis (CLA) processor provides a CLA waveform in response to simulating an optical response at a target location on a surface of a cell of a device under test to a test pattern. A test controller receives the CLA waveform and the LP waveform, and has a first output for providing the trigger signal, a second output for providing the test pattern, and a third output for providing a position signal. The test controller updates the position signal to move the optic probe closer to the target location according to a degree of fit between the LP waveform and the CLA waveform.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: September 8, 2020
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Venkat Krishnan Ravikumar, Wen Tsann Lua, Gopinath Ranganathan, Yi Xuan Seah, Shei Lay Phoa, Nathan Linarto, Jiann Min Chin
  • Patent number: 10545171
    Abstract: Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.
    Type: Grant
    Filed: August 28, 2019
    Date of Patent: January 28, 2020
    Assignee: Xallent, LLC
    Inventor: Kwame Amponsah
  • Patent number: 10228388
    Abstract: Methods and apparatus for obtaining extremely high sensitivity chemical composition maps with spatial resolution down to a few nanometers. In some embodiments these chemical composition maps are created using a combination of three techniques: (1) Illuminating the sample with IR radiation than is tuned to an absorption band in the sample; and (2) Optimizing a mechanical coupling efficiency that is tuned to a specific target material; (3) Optimizing a resonant detection that is tuned to a specific target material. With the combination of these steps it is possible to obtain (1) Chemical composition maps based on unique IR absorption; (2) spatial resolution that is enhanced by extremely short-range tip-sample interactions; and (3) resonant amplification tuned to a specific target material. In other embodiments it is possible to take advantage of any two of these steps and still achieve a substantial improvement in spatial resolution and/or sensitivity.
    Type: Grant
    Filed: November 10, 2016
    Date of Patent: March 12, 2019
    Assignee: Bruker Nano, Inc.
    Inventors: Craig Prater, Kevin Kjoller
  • Patent number: 10161959
    Abstract: An atomic force microscope acquires sample information by performing relative raster scanning between a cantilever and a sample across an XY-plane, while causing an interaction to be generated between a probe provided at a free end of the cantilever and the sample. The atomic force microscope includes a raster-scanning-information generator to generate raster scanning information, a raster-scanning controller to control the raster scanning based on the raster scanning information, and an interaction controller to control strength of the interaction based on the raster scanning information. The interaction controller relatively reduces the strength of the interaction, when a relative speed between the cantilever and the sample across the XY-plane of the raster scanning relatively decreases.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: December 25, 2018
    Assignee: OLYMPUS CORPORATION
    Inventor: Nobuaki Sakai
  • Patent number: 9880088
    Abstract: The disclosed subject matter relates to a force-clamp spectrometer that enables operation in constant force mode and allows for automated data acquisition and analysis, using feedback electronics and software. The disclosed subject matter also relates to methods of using the force-clamp spectrometer for the measurement of the dynamics of chemical reactions. The methods may include, but are not limited to, the measurement of the dynamics of substrate folding and unfolding, as well as bond cleavage and bond formation.
    Type: Grant
    Filed: January 14, 2013
    Date of Patent: January 30, 2018
    Assignee: The Trustees of Columbia University in the City of New York
    Inventors: Julio M. Fernandez, Raul Perez-Jimenez, Pallav Kosuri
  • Patent number: 9595569
    Abstract: Provided are single photon devices, single photon emitting and transferring apparatuses, and methods of manufacturing and operating the single photon devices. The single photon device includes a carrier transport layer disposed on a conductive substrate and at least one quantum dot disposed on the carrier transport layer. A single photon emitting and transferring apparatus includes a single photon device, an element that injects a single charge into the single photon device described above, a light collecting unit that collects light emitted from the single photon device, and a light transfer system that transmits light collected by the light collecting unit to the outside.
    Type: Grant
    Filed: June 20, 2014
    Date of Patent: March 14, 2017
    Assignees: SAMSUNG ELECTRONICS CO., LTD., SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
    Inventors: Kyung-sang Cho, Young Kuk, Seong-joon Lim, Byoung-Iyong Choi
  • Patent number: 9581188
    Abstract: A mechanical connection between two parts of a microelectromechanical and/or nanoelectromechanical structure forming a pivot with an axis of rotation pivot includes two first beams with an axis parallel to the pivot axis, the first beams configured to work in torsion, and two second beams with an axis orthogonal to the axis of the first beams, the second beams configured to work in bending, each one of the first and second beams being connected at their ends to the two parts of the structure.
    Type: Grant
    Filed: December 12, 2012
    Date of Patent: February 28, 2017
    Assignee: Commissariat a l'energie atomique et aux energies alternatives
    Inventors: Guillaume Jourdan, Dirk Ettelt, Patrice Rey, Arnaud Walther
  • Patent number: 9103784
    Abstract: We describe a new technique, standing wave axial nanometry (SWAN), to image the axial location of a single nanoscale fluorescent object with sub-nanometer accuracy and 3.7 nm precision. A standing wave, generated by positing an atomic force microscope tip over a focused laser beam, is used to excite fluorescence; axial position is determined from the phase of the mission intensity.
    Type: Grant
    Filed: November 15, 2013
    Date of Patent: August 11, 2015
    Assignee: IOWA STATE UNIVERSITY RESEARCH FOUNDATION, INC.
    Inventors: Sanjeevi Sivasankar, Hui Li, Chi-Fu Yen
  • Publication number: 20150121575
    Abstract: The present invention relates to an atomic resolution deformation distribution measurement device that can measure a deformation rate of an atomic scale with low expense by improving resolution using an AFM system, and the atomic resolution deformation distribution measurement device includes: a laser source generating a laser beam; a first cantilever and a second cantilever provided close to a measurement specimen or a reference specimen to cause deformation by an atomic force; an optical system controlling a light path of the laser beam so as to cause the laser beam to be sequentially reflected to the first cantilever and the second cantilever and locate the first cantilever and the second cantilever to an image point; a measurement unit measuring the laser beam reflected from the second cantilever; and a stage on which a measurement specimen or a reference specimen is located and movable in X, Y, and Z axis directions.
    Type: Application
    Filed: April 10, 2014
    Publication date: April 30, 2015
    Applicants: KOREA INSTITUTE OF MACHINERY & MATERIALS, Brown University
    Inventors: Bong Kyun JANG, Jae-Hyun KIM, Hak Joo LEE, Kyung-Suk Kim, Chien-Kai Wang
  • Patent number: 9003561
    Abstract: The present invention relates to an atomic resolution deformation distribution measurement device that can measure a deformation rate of an atomic scale with low expense by improving resolution using an AFM system, and the atomic resolution deformation distribution measurement device includes: a laser source generating a laser beam; a first cantilever and a second cantilever provided close to a measurement specimen or a reference specimen to cause deformation by an atomic force; an optical system controlling a light path of the laser beam so as to cause the laser beam to be sequentially reflected to the first cantilever and the second cantilever and locate the first cantilever and the second cantilever to an image point; a measurement unit measuring the laser beam reflected from the second cantilever; and a stage on which a measurement specimen or a reference specimen is located and movable in X, Y, and Z axis directions.
    Type: Grant
    Filed: April 10, 2014
    Date of Patent: April 7, 2015
    Assignees: Korea Institute of Machinery & Materials, Brown University
    Inventors: Bong Kyun Jang, Jae-Hyun Kim, Hak Joo Lee, Kyung-Suk Kim, Chien-Kai Wang
  • Patent number: 8997258
    Abstract: A microscope probe includes a substrate; an optical resonator disposed on the substrate and including an optical resonance property; a displacement member disposed on the substrate and separated from the optical resonator, the displacement member including: a first end disposed distal to the optical resonator; and a second end disposed proximate to the optical resonator; and a coupling member disposed on the substrate and connecting the displacement member to the substrate, wherein the first end is configured to probe a sample and to be displaced in response to a condition of the sample, the displacement member is configured to communicate displacement of the first end to the second end, and the second end is configured to change the optical resonance property in response to displacement of the second end.
    Type: Grant
    Filed: May 23, 2014
    Date of Patent: March 31, 2015
    Assignees: National Institute of Standards and Technology, University of Maryland, College Park
    Inventors: Vladimir Aksyuk, Kartik Srinivasan, Houxun Miao, Ivo W. Rangelow, Thomas Michels
  • Patent number: 8982451
    Abstract: A pump probe measuring device (1) comprises: an ultrashort optical pulse laser generator (2) for generating a first ultrashort optical pulse train which is a pump light (3a), second and third ultrashort optical pulse trains (3b), (3c) which are probe lights; an optical shutter unit (6) to which the second and the third ultrashort pulse trains (3b), (3c) are introduced; and a detecting unit (20) including an irradiation optical system (8) for directing the pump light (3a), the first probe light (3b) and the second probe light (3c) to a sample (7), a sensor (11) for detecting a probe signal from the sample (7), and a phase-sensitive detecting means (12) connected to the sensor (11).
    Type: Grant
    Filed: July 31, 2012
    Date of Patent: March 17, 2015
    Assignee: Japan Science and Technology Agency
    Inventors: Hidemi Shigekawa, Osamu Takeuchi
  • Publication number: 20150059026
    Abstract: A method of measuring surface curvature comprises forming an intensity distribution defined by Fresnel diffraction, wherein said intensity distribution is formed by electromagnetic radiation reflected from a surface, obtaining data for the intensity distribution and determining information relating to the curvature of the surface using the obtained data.
    Type: Application
    Filed: March 28, 2013
    Publication date: February 26, 2015
    Applicant: UCL Business PLC
    Inventors: Rodolfo Hermans, Gabriel Aeppli
  • Patent number: 8955161
    Abstract: An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ?, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system.
    Type: Grant
    Filed: March 17, 2014
    Date of Patent: February 10, 2015
    Assignee: Bruker Nano, Inc.
    Inventor: Gregory O. Andreev
  • Publication number: 20150020244
    Abstract: Apparatus for illuminating a probe of a probe microscope. A lens is arranged to receive a beam and focus it onto the probe. A scanning system varies over time the angle of incidence at which the beam enters the lens relative to its optical axis. The scanning system is typically arranged to move the beam so as to track movement of the probe, thereby maintaining the location on the probe at which the beam is focused. The scanning system may comprise a beam steering mirror which reflects the beam towards the lens; and a mirror actuator for rotating the beam steering mirror.
    Type: Application
    Filed: January 29, 2013
    Publication date: January 15, 2015
    Inventors: Andrew Humphris, Bin Zhao
  • Patent number: 8904561
    Abstract: An atomic force microscope based apparatus and method for detecting Raman effect on a sample of interest utilizes first and second electromagnetic sources to emit first electromagnetic radiation of frequency Vi and second electromagnetic radiation of frequency V2 onto a probe tip, which is coupled to a structure that can oscillate the probe tip. The frequency Vi and the frequency v2 are selected to induce Raman effect on a sample engaged by the probe tip that results in Raman force interactions between the probe tip and the sample. Oscillations of the probe tip due to the Raman force interactions are then measured.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: December 2, 2014
    Inventor: H. Kumar Wickramasinghe
  • Patent number: 8898809
    Abstract: The invention relates to a method for the combined analysis of a sample with objects to be analyzed, in particular a sample with biological objects, in which measurement results for one or more of the objects to be analyzed in the sample are obtained by analyzing the one or more objects to be analyzed by an imaging method of measurement, probe-microscopic measurement results are obtained for the one or more objects to be analyzed by analyzing the one or more objects to be analyzed by a probe-microscopic method of measurement, and the measurement results and the probe-microscopic measurement results are assigned to one another, after optional prior intermediate processing. Furthermore, the invention relates to an apparatus for carrying out combined analysis of a sample with objects to be investigated, in particular a sample with biological objects.
    Type: Grant
    Filed: July 24, 2008
    Date of Patent: November 25, 2014
    Assignee: JPK Instruments AG
    Inventors: Torsten Müller, Kathryn Anne Poole, Detlef Knebel, Torsten Jähnke
  • Publication number: 20140338074
    Abstract: A microscope probe includes a substrate; an optical resonator disposed on the substrate and including an optical resonance property; a displacement member disposed on the substrate and separated from the optical resonator, the displacement member including: a first end disposed distal to the optical resonator; and a second end disposed proximate to the optical resonator; and a coupling member disposed on the substrate and connecting the displacement member to the substrate, wherein the first end is configured to probe a sample and to be displaced in response to a condition of the sample, the displacement member is configured to communicate displacement of the first end to the second end, and the second end is configured to change the optical resonance property in response to displacement of the second end
    Type: Application
    Filed: May 23, 2014
    Publication date: November 13, 2014
    Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
    Inventors: VLADIMIR AKSYUK, KARTIK SRINIVASAN, HOUXUN MIAO, IVO W. RANGELOW, THOMAS MICHELS
  • Patent number: 8875311
    Abstract: An apparatus and method directed to a scanning probe microscopy cantilever. The apparatus includes body and an electromagnetic sensor having a detectable electromagnetic property varying upon deformation of the body. The method includes scanning the surface of a material with the cantilever, such that the body of the cantilever undergoes deformations and detecting the electromagnetic property varying upon deformation of the body of the cantilever.
    Type: Grant
    Filed: August 9, 2012
    Date of Patent: October 28, 2014
    Assignee: International Business Machines Corporation
    Inventors: Jens Hofrichter, Felix Holzner, Folkert Horst, Philip Paul
  • Publication number: 20140317790
    Abstract: This invention relates to an optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other.
    Type: Application
    Filed: March 12, 2014
    Publication date: October 23, 2014
    Inventors: Aleksander Labuda, Jason Cleveland, Deron Walters, Roger Proksch
  • Patent number: 8832859
    Abstract: A probe alignment tool (10) for scanning probe microscopes utilizes an attached relay optics to view the scanning probe microscope probe tip (40) and align its image in the center of the field of view of an optical microscope (36). Adjustments to optical microscope motorized stages (50) and (60) along with adjustments of scanning probe microscope stages (44), (46) and (58) allow determination of a path and distance from the center of the field of view to the probe tip (40). From such determination a target area to be examined by the scanning probe microscope may be positioned precisely and accurately under the probe tip (40). Replacement of a scanning probe microscope probe tip (40) in an atomic force microscope unit (42) may be accomplished without the loss of alignment measurements.
    Type: Grant
    Filed: September 18, 2008
    Date of Patent: September 9, 2014
    Inventor: Ali R. Afshari
  • Patent number: 8813261
    Abstract: A scanning probe microscope including: a scanning probe microscope unit section including, a cantilever having a probe, a cantilever holder configured to fix the cantilever, a sample holder on which a sample is configured to be placed, a horizontal fine transfer mechanism configured to relatively scan a surface of the sample with the probe, a vertical fine transfer mechanism configured to control a distance between the probe and the sample surface, an optical microscope configured to observe the cantilever and the sample; a control device; an imaging device to which a viewing field, wider than that of the optical microscope and capable of observing the cantilever and the sample at the same time, can be set; and an image display device configured to display images observed by the optical microscope and the imaging device.
    Type: Grant
    Filed: August 23, 2013
    Date of Patent: August 19, 2014
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Masato Iyoki, Naokatsu Nosaka, Hiroumi Momota, Junji Kuwahara
  • Patent number: 8776261
    Abstract: A micro-object is affixed to a mounting structure at a desired relative orientation. The micro-object may be a tool tip optimized to work with particular microscope objectives permitting the tip to be imaged along with the object surface and used to make measurements or modifications through a travel range along the microscope imaging axis equal to or nearly equal to the working distance of the given objective. The tool tip may have a lengths exceeding 80 microns, say up to several millimeters; even the longest tips can have widths of tens of microns.
    Type: Grant
    Filed: August 4, 2009
    Date of Patent: July 8, 2014
    Inventor: Victor B. Kley
  • Patent number: 8769711
    Abstract: The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device, and in which at least one subsection (1) of the measurement object (2, 12) is optically examined by an optical measurement system in an observation region associated with the optical measurement system, wherein a displacement of the at least one subsection (1) of the measurement object (2, 12) out of the observation region which is brought about by the examination by means of scanning probe microscopy is corrected in such a way that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged back in the observation region by means of a readjustment device which processes data signals that characterize the displacement.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: July 1, 2014
    Assignee: JPK Instruments AG
    Inventor: Torsten Jähnke
  • Patent number: 8739311
    Abstract: A new method in microscopy is provided which extends the domain of AFM's to nanoscale spectroscopy. Molecular resonance of nanometer features can be detected and imaged purely by mechanical detection of the force gradient between the interaction of the optically driven molecular dipole/multipole and its mirror image in a Platinum coated scanning probe tip. The method is extendable to obtain nanoscale spectroscopic information ranging from infrared to UV and RF.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: May 27, 2014
    Inventors: H. Kumar Wickramasinghe, Indrajith Rajapaksa
  • Patent number: 8739309
    Abstract: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
    Type: Grant
    Filed: November 13, 2009
    Date of Patent: May 27, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Yan Hu, Shuiqing Hu, Chanmin Su
  • Patent number: 8695108
    Abstract: To measure surface potentials in a liquid, the in-liquid potential measurement device according to the present invention includes: a cantilever having a probe at its free end; a displacement measurement unit that measures a voltage corresponding to a displacement of a tip of the cantilever; an AC source that applies an AC voltage between the probe and the sample; and a signal detection unit. A frequency of the AC voltage is 10 kHz or higher. The signal detection unit detects, from the voltage measured by the displacement measurement unit, an amplitude of a frequency component having the same frequency as that of the AC voltage, an amplitude of a frequency component having double frequency of that of the AC voltage, and a frequency component having the same phase as that of the frequency of the AC voltage.
    Type: Grant
    Filed: July 29, 2011
    Date of Patent: April 8, 2014
    Assignee: National University Corporation Kanazawa University
    Inventors: Fukuma Takeshi, Kobayashi Naritaka, Asakawa Hitoshi
  • Patent number: 8689360
    Abstract: A probe head and a scanning probe microscope (SPM) including the probe head are provided. The probe head includes a plurality of cantilevers, each including a probe; and a holder on which the plurality of cantilevers are installed, wherein a cantilever facing a sample is changed by rotating the holder.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: April 1, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: In-su Jeon
  • Publication number: 20140082775
    Abstract: A modular transferable ultra-high vacuum compatible device has a body with a tunnel through its thickness. An interferometric sensor is mounted above the body and has a brace on which a cantilever is disposed and through which an optical fiber passes so that the two may be aligned prior to installation in an atomic force measurement apparatus. The sensor-mounted body is coupled to a mount for engaging an atomic force measurement apparatus to act as the interferometric head of the apparatus.
    Type: Application
    Filed: September 17, 2013
    Publication date: March 20, 2014
    Applicant: Brookhaven Science Associates, LLC
    Inventor: Percy Zahl
  • Patent number: 8677511
    Abstract: The present disclosure describes an apparatus of leveling a substrate in a charged particle lithography system. In an example, the apparatus includes a cantilever-based sensor that includes an optical sensor and a cantilever structure. The optical sensor determines a distance between the optical sensor and a surface of the substrate based on light reflected from the cantilever structure. In an example, a first distance is between the cantilever structure and optical sensor, a second distance is a height of the cantilever structure, and a third distance is between the optical sensor and the surface of the substrate. The optical sensor determines the first distance based on the light reflected from the cantilever structure, such that the third distance is determined from the first distance and the second distance.
    Type: Grant
    Filed: May 2, 2012
    Date of Patent: March 18, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Chi Wang, Jeng-Horng Chen
  • Patent number: 8667611
    Abstract: Atomic Force Microscopes (AFMs) allow forces within systems under observation to be probed from the piconewton forces of a single covalent bond to the forces exerted by cells in the micronewton range. The pendulum geometry prevents the snap-to-contact problem afflicting soft cantilevers in AFMs which enable attonewton force sensitivity. However, the microscopic length scale studies of cellular/subcellular forces parallel to the imaging plane of an optical microscope requires high sensitivity force measurements at high sampling frequencies despite the difficulties of implementing the pendulum geometry from constraints imposed by the focused incoming/outgoing light interfering with the sample surface. Additionally measurement systems for biological tissue samples in vitro must satisfy complex physical constraints to provide access to the vertical cantilever.
    Type: Grant
    Filed: April 29, 2011
    Date of Patent: March 4, 2014
    Assignee: The Royal Institution for the Advancement of Learning/McGill University
    Inventors: Dilson Rassier, Aleksander Labuda
  • Patent number: 8650661
    Abstract: A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: February 11, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Gregory A. Dahlen, Hao-chih Liu
  • Patent number: 8650660
    Abstract: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: February 11, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Jian Shi, Yan Hu, Shuiqing Hu, Ji Ma, Chanmin Su
  • Patent number: 8621659
    Abstract: In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
    Type: Grant
    Filed: May 3, 2012
    Date of Patent: December 31, 2013
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kaifeng Zhang, Takenori Hirose, Masahiro Watanabe, Tetsuya Matsui, Tsuneo Nakagomi, Teruaki Tokutomi
  • Patent number: 8606426
    Abstract: A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.
    Type: Grant
    Filed: October 23, 2009
    Date of Patent: December 10, 2013
    Assignee: Academia Sinica
    Inventors: Ing-Shouh Hwang, En-Te Hwu, Hans Ulrich Danzebrink, Hartmut Illers
  • Patent number: 8595859
    Abstract: A method for optically controlling an atomic force microscope (AFM) includes acquiring an optical image of a sample using an optical imaging device, identifying a feature of interest on the sample using the optical image, acquiring a high resolution AFM image of the sample using an AFM imaging device, the AFM imaging device comprising a cantilever having a tip, overlaying the AFM image with the optical image at the feature of interest, and positioning the probe tip over the feature of interest using the optical image.
    Type: Grant
    Filed: September 30, 2011
    Date of Patent: November 26, 2013
    Assignee: Agilent Technologies, Inc.
    Inventors: Christian Rankl, Asger Iversen, Tianwei Jing
  • Publication number: 20130312142
    Abstract: A high-speed atomic force microscope (HSAFM) is disclosed herein. The HSAFM includes a cantilever, a piezotube, an optical detector, a circuit element, and a feedback controller. The cantilever has a probe, and the piezotube is arranged in proximity to the probe. The optical detector is configured to detect deflection of the cantilever, and the circuit element is abutting a first end of the cantilever and is configured to exert a force on the cantilever to resist deflection of the cantilever. The circuit element is communicably connected to the optical detector by a first feedback loop. The feedback controller is communicably connected to the piezotube and configured to modulate the piezotube along the Z-axis towards and away from the probe. And the feedback controller is communicably connected to the optical detector through a second feedback loop.
    Type: Application
    Filed: May 1, 2013
    Publication date: November 21, 2013
    Applicant: Boise State University
    Inventor: Boise State University
  • Publication number: 20130298294
    Abstract: A method of measuring properties of a sample, the method comprising: measuring a deflection of a cantilever of a COIFM; measuring a voltage at an actuator contacting the cantilever and configured to counteract the deflection of the cantilever; measuring a voltage at a scan signal source, wherein the scan signal source is communicably coupled to the piezotube and configured to move the piezotube along an X- and a Y-axis; measuring a voltage at a feedback controller, wherein the feedback controller is communicably coupled to the piezotube and configured to move the piezotube along a Z-axis; switching a switch from a first position to a second position; switching the switch to a third position; correlating at least one of the measurements to (i) a repulsive force, and (ii) an attractive force.
    Type: Application
    Filed: July 5, 2013
    Publication date: November 7, 2013
    Inventor: Byung I. Kim
  • Publication number: 20130276174
    Abstract: An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
    Type: Application
    Filed: June 24, 2013
    Publication date: October 17, 2013
    Inventors: Chunzeng Li, Yan Hu, Ji Ma, Jianli He, Lin Huang, Stephen C. Minne, Henry Mittel, Weijie Wang, Shuiqing Hu, Chanmin Su
  • Patent number: 8549661
    Abstract: An apparatus for performing magnetic resonance force microscopy on one or more large area samples comprising a base plate, one or more heat sink plates coupled to the base plate, one or more suspension mechanisms coupled to the base plate and the heat sink plates, a probe head suspended from the one or more suspension mechanisms for scanning the one or more samples and a sample cylinder comprising a sample stage coupled to the probe head for sample positioning and an outer drum for isolating the sample stage.
    Type: Grant
    Filed: January 30, 2012
    Date of Patent: October 1, 2013
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventor: Doran Smith
  • Patent number: 8528110
    Abstract: A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscope probe (16) is separated into two components. A first component (84) is analysed by the deflection detection system (28) and is used in a feedback system that maintains the average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the height of the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which the feedback system is unable to respond at the rate required to adjust probe height between pixel positions.
    Type: Grant
    Filed: June 8, 2009
    Date of Patent: September 3, 2013
    Assignee: Infinitesima Ltd.
    Inventor: Andrew Humphris
  • Patent number: 8479310
    Abstract: A dynamic probe detection system (29,32) is for use with a scanning probe microscope of the type that includes a probe (18) that is moved repeatedly towards and away from a sample surface. As a sample surface is scanned, an interferometer (88) generates an output height signal indicative of a path difference between light reflected from the probe (80a,80b,80c) and a height reference beam. Signal processing apparatus monitors the height signal and derives a measurement for each oscillation cycle that is indicative of the height of the probe. This enables extraction of a measurement that represents the height of the sample, without recourse to averaging or filtering, that may be used to form an image of the sample. The detection system may also include a feedback mechanism that is operable to maintain the average value of a feedback parameter at a set level.
    Type: Grant
    Filed: December 11, 2009
    Date of Patent: July 2, 2013
    Assignee: Infinitesima Ltd.
    Inventor: Andrew Humphris
  • Patent number: 8443459
    Abstract: A high-bandwidth SPM tip scanner includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: May 14, 2013
    Assignee: Bruker Nano, Inc.
    Inventors: Nghi Phan, Craig Cusworth, Craig Prater
  • Publication number: 20130111635
    Abstract: A probe head and a scanning probe microscope (SPM) including the probe head are provided. The probe head includes a plurality of cantilevers, each including a probe; and a holder on which the plurality of cantilevers are installed, wherein a cantilever facing a sample is changed by rotating the holder.
    Type: Application
    Filed: August 7, 2012
    Publication date: May 2, 2013
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: In-su JEON
  • Publication number: 20130097739
    Abstract: To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit.
    Type: Application
    Filed: October 12, 2012
    Publication date: April 18, 2013
    Inventor: Hitachi High-Technologies Corporation
  • Patent number: 8393010
    Abstract: A near-field scanning optical microscope is disclosed. The microscope includes a lighting component, a probe and an ellipsoidal mirror. The lighting component emits a light. The probe is disposed on one side of a testing sample, and the light is focused around a probe tip to draw the near-field light out. The ellipsoidal mirror has a first focal point and a second focal point, and the first focal point and the probe tip are disposed at the corresponding positions, and the near-field light drawn out from the probe tip is scattered from the first focal point inside the ellipsoidal mirror, and reflected and passed through the second focal point.
    Type: Grant
    Filed: January 28, 2011
    Date of Patent: March 5, 2013
    Assignee: National Applied Research Laboratories
    Inventors: Chih-Wen Chen, Jyh-Rou Sze, Din-Ping Tsai, Fong-Zhi Chen