Monitoring The Movement Or Position Of The Probe Responsive To Interaction With The Sample (epo) Patents (Class 850/5)
  • Patent number: 10126325
    Abstract: An image capturing control unit controls a video camera so as to capture an image while switching between a first image capturing condition suitable for capturing a laser light spot and a second image capturing condition suitable for capturing an image of a cantilever for each single image. The image composition unit creates an image in which a laser light spot image and a cantilever image clearly appearing in each of two consecutive images are composed and displays the image on a display unit. A laser light center position detection unit, a cantilever tip position detection unit, and a position adjustment amount calculation unit calculate a position adjustment amount for adjusting an optical axis from a laser light center position and a cantilever tip position obtained by image processing from two each of two consecutive images, and also display the calculated numeric value on the display unit.
    Type: Grant
    Filed: May 22, 2015
    Date of Patent: November 13, 2018
    Assignee: Shimadzu Corporation
    Inventor: Masamichi Nagai
  • Patent number: 9921242
    Abstract: Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
    Type: Grant
    Filed: July 5, 2016
    Date of Patent: March 20, 2018
    Assignee: OXFORD INSTRUMENTS ASYLUM RESEARCH INC
    Inventors: Roger Proksch, Roger C. Callahan, Frank Stetter, Ted Limpoco, Sophia Hohlbauch, Jason Bemis, Jason Cleveland, Nicholas Geiss
  • Patent number: 9921241
    Abstract: A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: March 20, 2018
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Masatsugu Shigeno, Yoshiteru Shikakura
  • Patent number: 9910064
    Abstract: An atomic force microscope (AFM) and corresponding method to provide low force (sub-20 pN) AFM control and mechanical property measurement is provided. The preferred embodiments employ real-time false deflection correction/discrimination by adaptively modifying the drive ramp to accommodate to deflection artifacts.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: March 6, 2018
    Assignee: Bruker Nano, Inc.
    Inventors: Changchun Liu, Bede Pittenger, Shuiqing Hu, Chanmin Su
  • Patent number: 9383388
    Abstract: Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
    Type: Grant
    Filed: April 21, 2015
    Date of Patent: July 5, 2016
    Assignee: Oxford Instruments Asylum Research, Inc
    Inventors: Roger Proksch, Roger C. Callahan, Frank Stetter, Ted Limpoco, Sophia Hohlbach, Jason Bemis, Jason Cleveland
  • Patent number: 9068952
    Abstract: A method and apparatus for producing high frequency dynamically focused oblique laser illumination for a spinning wafer inspection system. The focus is changed by changing the beam direction incidence angle so as to bring focal spot onto the wafer surface. Disclosed herein is a system and method for automatic beam shaping (i.e., spot size) and steering (i.e., position) for a spinning wafer inspection system, combined into a single module. Also disclosed is a method and system for measuring the beam position/size/shape and angle with sufficient resolution to make corrections using feedback from the monitor.
    Type: Grant
    Filed: September 2, 2009
    Date of Patent: June 30, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Aleksey Petrenko, Christian Wolters, Zhongping Cai, Anatoly Romanovsky, Bret Whiteside
  • Patent number: 9043946
    Abstract: The present invention relates to a method for measuring the near-field signal of a sample in a scattering type near-field microscope and to a device for conducting said method.
    Type: Grant
    Filed: December 19, 2012
    Date of Patent: May 26, 2015
    Assignee: Neaspec GmbH
    Inventor: Nenad Ocelic
  • Patent number: 8997261
    Abstract: The invention relates to processes for the modification of surfaces and on processes for the measurement of adhesion forces and of different forces of interaction (friction forces, adhesion forces) by scanning probe microscopy functioning in continuous <<curvilinear>> mode, as well as to a scanning probe microscope and a device permitting the implementation of said processes.
    Type: Grant
    Filed: May 5, 2011
    Date of Patent: March 31, 2015
    Assignees: Centre National de la Recherche Scientifique-CNRS, Universite du Maine (Le Mans)
    Inventors: Olivier Noel, Pierre-Emmanuel Mazeran, Hussein Nasrallah
  • Patent number: 8955161
    Abstract: An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ?, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system.
    Type: Grant
    Filed: March 17, 2014
    Date of Patent: February 10, 2015
    Assignee: Bruker Nano, Inc.
    Inventor: Gregory O. Andreev
  • Patent number: 8941057
    Abstract: The invention provides a probe and a method of obtaining a three-dimensional compositional map of one or more targets in a biological sample, or a portion thereof, comprising: (a) milling a surface layer of a biological sample with a focused ion beam, thereby creating a newly exposed surface layer of the biological sample; (b) imaging the newly exposed surface layer of the biological sample; (c) identifying the chemical composition of the newly exposed surface layer of the biological sample, or a portion thereof, with a mass spectrometer; and (d) repeating (a) to (c) until a three-dimensional compositional map of one or more targets in the biological sample, or portion thereof, is obtained. Uses of the three-dimensional map obtained from the inventive method are further provided.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: January 27, 2015
    Assignee: The United States of America, as represented by the Secretary, Department of Health and Human Services
    Inventor: Sriram Subramaniam
  • Patent number: 8925111
    Abstract: Provided are a scanning probe microscope and a method of operating the same. The scanning probe microscope includes a chuck configured to fix an object. A stacker is configured to load one or more cantilevers onto a head module. A stacker lifting element is configured to move the stacker in an up and down direction.
    Type: Grant
    Filed: December 24, 2013
    Date of Patent: December 30, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wan-Sung Park, Sung-Ha Kim, Young-Hwan Kim
  • Patent number: 8895923
    Abstract: A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.
    Type: Grant
    Filed: November 18, 2013
    Date of Patent: November 25, 2014
    Assignee: DCG Systems, Inc.
    Inventors: Vladimir A. Ukraintsev, Richard Stallcup, Sergiy Pryadkin, Mike Berkmyre, John Sanders
  • Patent number: 8887311
    Abstract: A scanning probe microscope that facilitates the optical axis adjustment operation at the time of initial cantilever installation and at the time of cantilever replacement. During the optical axis adjustment operation, markers are displayed on the video camera image at the cantilever and laser light center of luminance locations, and the markers, which follow the movement of the laser light location, are visually monitored and superposed. Furthermore, optical axis adjustment for a new cantilever is performed using marker location coordinate data stored after the initial optical axis adjustment. Moreover, by setting the target location coordinates, the direction of movement of laser light and the distance to the target location can be ascertained numerically.
    Type: Grant
    Filed: November 8, 2013
    Date of Patent: November 11, 2014
    Assignee: Shimadzu Corporation
    Inventor: Kaori Kirishima
  • Publication number: 20140331367
    Abstract: A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.
    Type: Application
    Filed: December 17, 2012
    Publication date: November 6, 2014
    Inventors: Amit Lal, Kwame Amponsah
  • Patent number: 8881311
    Abstract: An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: November 4, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Markus B. Raschke, Stefan B. Kaemmer, Stephen C. Minne, Chanmin Su
  • Patent number: 8875311
    Abstract: An apparatus and method directed to a scanning probe microscopy cantilever. The apparatus includes body and an electromagnetic sensor having a detectable electromagnetic property varying upon deformation of the body. The method includes scanning the surface of a material with the cantilever, such that the body of the cantilever undergoes deformations and detecting the electromagnetic property varying upon deformation of the body of the cantilever.
    Type: Grant
    Filed: August 9, 2012
    Date of Patent: October 28, 2014
    Assignee: International Business Machines Corporation
    Inventors: Jens Hofrichter, Felix Holzner, Folkert Horst, Philip Paul
  • Publication number: 20140289911
    Abstract: A method of investigating a sample surface. A probe is brought into close proximity with a first sample and scanned across the first sample. A response of the probe to its interaction with the sample is monitored using a detection system and a first data set is collected indicative of said response. The probe and/or sample is tilted through a tilt angle. The probe is scanned across the first sample or across a second sample after the tilting step, and a response of the probe to its interaction with the scanned sample is monitored using a detection system and a second data set is collected indicative of said response. The method includes the additional step of analysing the first data set prior to tilting the probe and/or sample in order to determine the tilt angle.
    Type: Application
    Filed: October 4, 2012
    Publication date: September 25, 2014
    Inventor: Andrew Humphris
  • Publication number: 20140283229
    Abstract: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
    Type: Application
    Filed: May 27, 2014
    Publication date: September 18, 2014
    Applicant: Bruker Nano, Inc.
    Inventors: Yan Hu, Shuiqing Hu, Chanmin Su
  • Patent number: 8832859
    Abstract: A probe alignment tool (10) for scanning probe microscopes utilizes an attached relay optics to view the scanning probe microscope probe tip (40) and align its image in the center of the field of view of an optical microscope (36). Adjustments to optical microscope motorized stages (50) and (60) along with adjustments of scanning probe microscope stages (44), (46) and (58) allow determination of a path and distance from the center of the field of view to the probe tip (40). From such determination a target area to be examined by the scanning probe microscope may be positioned precisely and accurately under the probe tip (40). Replacement of a scanning probe microscope probe tip (40) in an atomic force microscope unit (42) may be accomplished without the loss of alignment measurements.
    Type: Grant
    Filed: September 18, 2008
    Date of Patent: September 9, 2014
    Inventor: Ali R. Afshari
  • Patent number: 8819859
    Abstract: The apparatus includes a probe tip configured to scan a substrate having a defect to attach the defect on the probe tip while scanning the substrate, a cantilever configured to integrate a holder holding at least one probe tip, a stage configured to secure the substrate, an electromagnetic radiation source configured to generate the electromagnetic radiation beam, and an electromagnetic radiation detector configured to receive the first electromagnetic radiation signal and the second electromagnetic radiation signal. A first electromagnetic radiation signal is generated while an electromagnetic radiation beam focuses on the probe tip. A second electromagnetic radiation signal is generated while the electromagnetic radiation beam focuses on the sample attached on the probe tip. A chemical analysis of the sample is executed by comparing a difference between the first electromagnetic radiation signal and the second electromagnetic radiation signal.
    Type: Grant
    Filed: February 1, 2013
    Date of Patent: August 26, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Kai Huang, Yuan-Chih Chu
  • Publication number: 20140230103
    Abstract: Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.
    Type: Application
    Filed: February 11, 2014
    Publication date: August 14, 2014
    Applicant: Bruker Nano, Inc.
    Inventors: Chanmin Su, Jian Shi, Yan Hu, Shuiqing Hu, Ji Ma
  • Publication number: 20140223615
    Abstract: Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.
    Type: Application
    Filed: February 4, 2014
    Publication date: August 7, 2014
    Applicant: Bruker Nano, Inc.
    Inventors: Jian Shi, Yan Hu, Shuiqing Hu, Ji Ma, Chanmin Su
  • Patent number: 8769711
    Abstract: The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device, and in which at least one subsection (1) of the measurement object (2, 12) is optically examined by an optical measurement system in an observation region associated with the optical measurement system, wherein a displacement of the at least one subsection (1) of the measurement object (2, 12) out of the observation region which is brought about by the examination by means of scanning probe microscopy is corrected in such a way that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged back in the observation region by means of a readjustment device which processes data signals that characterize the displacement.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: July 1, 2014
    Assignee: JPK Instruments AG
    Inventor: Torsten Jähnke
  • Publication number: 20140150139
    Abstract: A method is provided for controlling an FM-AFM including a cantilever having a resonant frequency and an excitation system configured to oscillate the cantilever in response to a drive signal. The method includes determining latency of the excitation system; receiving a deflection signal indicating a deflection of a cantilever tip; mixing the deflection signal with a first sine signal output by a PLL indicating a frequency shift of a frequency response of the cantilever; measuring the frequency shift in response to the drive signal; determining spurious phase of the cantilever based on the determined latency, the resonant frequency of the cantilever, and the measured frequency shift; providing a second sine signal having a phase that is advanced by the determined spurious phase to preemptively compensate for subsequent spurious phase of the cantilever; and driving the excitation system using the second sine signal with an adjusted amplitude as the drive signal.
    Type: Application
    Filed: November 27, 2012
    Publication date: May 29, 2014
    Applicant: AGILENT TECHNOLOGIES, INC.
    Inventor: Christopher Ryan Moon
  • Patent number: 8739309
    Abstract: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
    Type: Grant
    Filed: November 13, 2009
    Date of Patent: May 27, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Yan Hu, Shuiqing Hu, Chanmin Su
  • Patent number: 8732861
    Abstract: A control system 32, 75 is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system 34 that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.
    Type: Grant
    Filed: October 19, 2012
    Date of Patent: May 20, 2014
    Assignee: Infinitesima Ltd.
    Inventors: Andrew Humphris, David Catto
  • Patent number: 8726411
    Abstract: A charged probe and an electric field measuring method are provided. The probe can be charged with single electricity on single nano particle attached on the top of the probe tip being a charged probe and the probe is applicable for measuring the electric fields of object in the nano scale. The probe comprises an insulating tip base, a cantilever and a single nano-particle. The cantilever is arranged for supporting the insulating tip base and the single nano-particle is configured on the erosion plane. After conducting contact electrification method to charge the electric nano particle, the single nano-particle will be charged with fixed number of single electrical charge. Then, the amount of the fixed number of single electrical charge is calculated by the virtual image charge calculation method. The charged probe can be used to measure the electric fields distribution by tapping mode or f-d curve measurement.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: May 13, 2014
    Assignee: National Tsing Hua University
    Inventors: Fan-Gang Tseng, Joe-Ming Chang
  • Patent number: 8719959
    Abstract: A displacement detection portion is provided in a lever portion of a cantilever or between the lever portion and a main body portion. The displacement detection portion is provided by laminating two conductor electrodes to sandwich an insulating portion. A thickness of the insulating portion (electrode interval) is set to a value capable of detecting a variation in tunnel current due to a change in electrode interval which corresponds to a displacement of the lever portion while a predetermined voltage is applied. When the lever portion is slightly displaced, the interval between the conductor electrodes changes. Therefore, the displacement may be detected as the variation in tunnel current at high resolution with sensitivity of an exponential multiple of the change in interval.
    Type: Grant
    Filed: August 27, 2009
    Date of Patent: May 6, 2014
    Assignee: SII Nano Technology Inc.
    Inventor: Masatsugu Shigeno
  • Publication number: 20140123347
    Abstract: Described herein is the analysis of nanomechanical characteristics of cells. In particular, changes in certain local nanomechanical characteristics of ex vivo human cells can correlate with presence of a human disease, such as cancer, as well as a particular stage of progression of the disease. Also, for human patients that are administered with a therapeutic agent, changes in local nanomechanical characteristics of ex vivo cells collected from the patients can correlate with effectiveness of the therapeutic agent in terms of impeding or reversing progression of the disease. By exploiting this correlation, systems and related methods can be advantageously implemented for disease state detection and therapeutic agent selection and monitoring.
    Type: Application
    Filed: January 3, 2014
    Publication date: May 1, 2014
    Applicant: The Regents of the University of California
    Inventors: James K. Gimzewski, Sarah E. Cross, Yusheng Jin, Jianyu Rao
  • Patent number: 8686358
    Abstract: Methods and apparatus are provided herein for time-resolved analysis of the effect of a perturbation (e.g., a light or voltage pulse) on a sample. By operating in the time domain, the provided method enables sub-microsecond time-resolved measurement of transient, or time-varying, forces acting on a cantilever.
    Type: Grant
    Filed: September 14, 2011
    Date of Patent: April 1, 2014
    Assignee: University of Washington through its Center for Commercialization
    Inventors: David Ginger, Rajiv Giridharagopal, David Moore, Glennis Rayermann, Obadiah Reid
  • Patent number: 8677511
    Abstract: The present disclosure describes an apparatus of leveling a substrate in a charged particle lithography system. In an example, the apparatus includes a cantilever-based sensor that includes an optical sensor and a cantilever structure. The optical sensor determines a distance between the optical sensor and a surface of the substrate based on light reflected from the cantilever structure. In an example, a first distance is between the cantilever structure and optical sensor, a second distance is a height of the cantilever structure, and a third distance is between the optical sensor and the surface of the substrate. The optical sensor determines the first distance based on the light reflected from the cantilever structure, such that the third distance is determined from the first distance and the second distance.
    Type: Grant
    Filed: May 2, 2012
    Date of Patent: March 18, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Chi Wang, Jeng-Horng Chen
  • Patent number: 8667611
    Abstract: Atomic Force Microscopes (AFMs) allow forces within systems under observation to be probed from the piconewton forces of a single covalent bond to the forces exerted by cells in the micronewton range. The pendulum geometry prevents the snap-to-contact problem afflicting soft cantilevers in AFMs which enable attonewton force sensitivity. However, the microscopic length scale studies of cellular/subcellular forces parallel to the imaging plane of an optical microscope requires high sensitivity force measurements at high sampling frequencies despite the difficulties of implementing the pendulum geometry from constraints imposed by the focused incoming/outgoing light interfering with the sample surface. Additionally measurement systems for biological tissue samples in vitro must satisfy complex physical constraints to provide access to the vertical cantilever.
    Type: Grant
    Filed: April 29, 2011
    Date of Patent: March 4, 2014
    Assignee: The Royal Institution for the Advancement of Learning/McGill University
    Inventors: Dilson Rassier, Aleksander Labuda
  • Patent number: 8650661
    Abstract: A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: February 11, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Gregory A. Dahlen, Hao-chih Liu
  • Patent number: 8650660
    Abstract: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: February 11, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Jian Shi, Yan Hu, Shuiqing Hu, Ji Ma, Chanmin Su
  • Patent number: 8646109
    Abstract: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.
    Type: Grant
    Filed: December 1, 2010
    Date of Patent: February 4, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Yan Hu, Shuiqing Hu, Chanmin Su, Jian Shi, Ji Ma
  • Patent number: 8646110
    Abstract: The present disclosure provides a procedure to obtain the absorption profiles of molecular resonance with ANSOM. The method includes setting a reference field phase to ?=0.5 ? relative to the near-field field, and reference amplitude A?5|?eff|. The requirement on phase precision is found to be <0.3 ?. This method enables ANSOM performing vibrational spectroscopy at nanoscale spatial resolution.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: February 4, 2014
    Inventors: Xiaoji Xu, Gilbert C. Walker
  • Patent number: 8627511
    Abstract: An electronic control device for a local probe with a piezoelectric resonator and preamplification and processing of its signals, the probe being configured for local measurement of physical properties of a sample in an environment with a particle beam directed towards the probe, in which an excitation voltage generated by an excitation mechanism is applied to the piezoelectric resonator through a first galvanic isolation transformer, and a current for measurement of mechanical oscillations of the piezoelectric resonator is applied through a second galvanic isolation transformer to a preamplification device on the output side.
    Type: Grant
    Filed: January 27, 2011
    Date of Patent: January 7, 2014
    Assignee: Commissariat a l'energie atomique et aux energies alternatives
    Inventor: Jerome Polesel
  • Patent number: 8621660
    Abstract: Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radius of curvature when the probe tip shape is approximated by a circle.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: December 31, 2013
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Masafumi Watanabe, Hiroumi Momota
  • Patent number: 8621658
    Abstract: A magnetic-field-observation device and method for measuring magnetic force near a magnetic material specimen's surface with high resolution and detecting the polarity of the magnetic pole of specimen's surface.
    Type: Grant
    Filed: September 5, 2011
    Date of Patent: December 31, 2013
    Assignee: Akita University
    Inventors: Hitoshi Saito, Satoru Yoshimura
  • Patent number: 8615811
    Abstract: A method of measuring vibration characteristics of a cantilever in a scanning probe microscope (SPM). An excitation signal is generated by a forward and backward frequency sweep signal in a frequency range including a resonance frequency of the cantilever. The cantilever is vibrated by supplying the excitation signal to a vibrating portion of the cantilever. The largest amplitude of a displacement of the cantilever in a forward path and in a backward path is directly measured, and an intermediate value of a frequency between frequencies measured on the basis of the directly measured largest amplitude of the displacement of the cantilever is detected as the resonance frequency of the cantilever.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: December 24, 2013
    Assignee: SII NanoTechnology Inc.
    Inventors: Masatsugu Shigeno, Yoshiteru Shikakura
  • Publication number: 20130340125
    Abstract: Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response.
    Type: Application
    Filed: May 3, 2013
    Publication date: December 19, 2013
    Applicant: UT-Battelle, LLC
    Inventor: UT-Battelle, LLC
  • Patent number: 8590061
    Abstract: An optimal input design method and apparatus to achieve rapid broadband nanomechanical measurements of soft materials using the indentation-based method for the investigation of fast evolving phenomenon, such as the crystallization process of polymers, the nanomechanical measurement of live cell during cell movement, and force volume mapping of nonhomogeneous materials, are presented. The indentation-based nanomechanical measurement provides unique quantification of material properties at specified locations. Particularly, an input force profile with discrete spectrum is optimized to maximize the Fisher information matrix of the linear compliance model of the soft material.
    Type: Grant
    Filed: March 21, 2012
    Date of Patent: November 19, 2013
    Assignee: Iowa State University Research Foundation, Inc.
    Inventors: Qingze Zou, Zhonghua Xu
  • Publication number: 20130276174
    Abstract: An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
    Type: Application
    Filed: June 24, 2013
    Publication date: October 17, 2013
    Inventors: Chunzeng Li, Yan Hu, Ji Ma, Jianli He, Lin Huang, Stephen C. Minne, Henry Mittel, Weijie Wang, Shuiqing Hu, Chanmin Su
  • Patent number: 8555711
    Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: October 15, 2013
    Assignee: Asylum Research Corporation
    Inventors: Roger Proksch, Roger C. Callahan
  • Patent number: 8528110
    Abstract: A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscope probe (16) is separated into two components. A first component (84) is analysed by the deflection detection system (28) and is used in a feedback system that maintains the average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the height of the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which the feedback system is unable to respond at the rate required to adjust probe height between pixel positions.
    Type: Grant
    Filed: June 8, 2009
    Date of Patent: September 3, 2013
    Assignee: Infinitesima Ltd.
    Inventor: Andrew Humphris
  • Patent number: 8516610
    Abstract: Rheology system. The system includes a first piezoelectric actuator assembly for providing microscale displacement of a sample and a second piezoelectric actuator assembly for oscillating the sample at a nano/micro scale displacement in a selected frequency range extended significantly as compared to the frequency range available on the commercial AFMs. A preferred sample is cartilage and the disclosed system can distinguish between normal cartilage and GAG-depleted cartilage.
    Type: Grant
    Filed: March 19, 2012
    Date of Patent: August 20, 2013
    Assignee: Massachusetts Institute of Technology
    Inventors: Hadi Tavakoli Nia, Iman Soltani Bozchalooi, Kamal Youcef-Toumi, Christine Ortiz, Alan J. Grodzinsky, Eliot Frank
  • Patent number: 8495760
    Abstract: Techniques for atomic force microscope manipulation of living cells include functionalizing a nanoscale tip of a microscale cantilever with a first ligand for a first receptor associated with a surface of a first type of cell. The method further comprises, controlling the cantilever to cause the first ligand on the nanoscale tip to contact the first receptor on a surface of a living cell of the first type in a particular temporal pattern to induce a target response by the living cell. Other techniques for controlling an atomic force microscope comprising a nanoscale tip include controlling the cantilever to cause the nanoscale tip to contact a living cardiomyocyte at a predetermined pressure. The cantilever is also controlled to turn off vertical deflection feedback after contacting the cardiomyocyte and collecting deflection data that indicates a time series of nanoscale vertical deflections of the microscale cantilever caused by the living cardiomyocyte.
    Type: Grant
    Filed: November 30, 2011
    Date of Patent: July 23, 2013
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Manish J Butte, Marc Amor Bruce, Jianwei Liu
  • Patent number: 8490209
    Abstract: Provided are a surface state measuring device which can measure an alternating force of an arbitrary frequency and which is excellent in spatial resolution, and a surface state measuring method using the device. This surface state measuring device measures the surface state of a sample by detecting the modulation of the oscillation of a probe arranged above the sample. The measuring device comprises: a cantilever having a probe near a free end; an excitation mechanism for exciting the cantilever; a scanning mechanism for making the probe scan the sample by moving the probe and the sample relative to each other; and alternating force generator for generating an alternating force of an arbitrary frequency in a space; and a modulation measuring mechanism for measuring the degree of frequency modulation or amplitude modulation of the oscillations of the probe, which are generated by the alternating force.
    Type: Grant
    Filed: August 9, 2010
    Date of Patent: July 16, 2013
    Assignee: Akita University
    Inventor: Hitoshi Saito
  • Patent number: 8484755
    Abstract: A microprobe, measurement system and method are disclosed. The microprobe includes a probe tip mounted at a meeting point of a plurality of flexures. The probe tip is moveable upon flexing of one or more of the flexures, each flexure further comprising one or more actuators controllable to flex the flexure and one or more sensors arranged to sense flexing of the flexure.
    Type: Grant
    Filed: November 17, 2008
    Date of Patent: July 9, 2013
    Assignee: The Secretary of State for Innovation, Universities and Skills
    Inventors: Richard Leach, Ben Hughes, Alan Wilson
  • Patent number: 8479308
    Abstract: A scanning probe microscope includes: a first and second probes for scanning a sample while maintaining the distance to the sample surface; crystal oscillators holding each of the first and second probes; and a modulation oscillator for providing the first probe with a vibration of a specific frequency which is different from the resonant frequency of each crystal oscillator. A control unit monitors the vibration of the specific frequency of the first and second probes, detects proximity of the first probe and the second probe to each other based on the change of the specific frequencies, and controls the drive of the first and second probes.
    Type: Grant
    Filed: June 21, 2010
    Date of Patent: July 2, 2013
    Assignee: Kyoto University
    Inventors: Katsuhito Nishimura, Yoichi Kawakami, Mitsuru Funato, Akio Kaneta, Tsuneaki Hashimoto