Abstract: An in-line system for manufacturing a semiconductor package according to principles of the present invention can prevent wafer warpage due to a back-lap process and die defects due to sticking of the die. In one embodiment, the in-line system adheres a semiconductor chip to a substrate by coating a liquid adhesive agent on a rear surface of the wafer. The processes of the in-line system are preferably performed in series. More particularly, the in-line system for manufacturing a semiconductor package can include a loading unit for loading a wafer into the system. A back-lap unit can include a grinder configured to back-grind a rear surface of the wafer received from the loading unit. A cleansing unit preferably comprises an air pressure plasma generating unit for cleansing the wafer using air pressure plasma. A coating unit can be configured to form an adhesive layer on a rear surface of the cleansed wafer by using a nozzle to coat a liquid adhesive agent onto the wafer.

Abstract: A controlled relative motion system comprising a base support, a pivot holder and a plurality of pivoting links with the pivoting links rotatably coupled to both the base support and to members of the pivot holder to rotate about axes which extend in different directions for each of these rotatable couplings in a link, typically in accord with specific geometrical arrangements, and in different directions from similar axes in another of such links. The foregoing various rotatable couplings are provided by insertable bearings or bushings in the supports and links. The pivoting links have larger portions thereof outside of the interior of the manipulator parts of which can extend outside in different directions. Such systems can incorporate a variety of force imparting members to control movements of various ones of the pivoting links or pivot holder members.

Abstract: A linkage system which offers high rigidity and good assemblability and producibility, and enables parts such as rotary transmission components and actuators to be readily installed. A linkage system includes an input member disposed on an input side, an output member disposed on an output side, and three or more link mechanisms, each link mechanism consisting of end links rotatably coupled to the input member and the output member, respectively, a center link rotatably coupled to the end links on the input side and the output side, and four revolute joints by which the end links are rotatably coupled to the input and output members, and to the center link. The link mechanism being geometrically identical with respect to a center cross-sectional plane relative on the input and output sides. Each of the revolute joints of the link mechanism includes bearings that support at both ends of the revolute joint.

Abstract: A wafer transfer robot, having a robot hand which transfers a wafer in an improved driving manner by changing a driving force transfer device of the robot hand, is disclosed. The wafer transfer robot having at least robot hand to transfer a wafer includes an arm frame supported on an elevating shaft to vertically move the robot hand, wherein the robot hand includes a first robot arm rotatably supported on the arm frame, a second robot arm rotatably supported at an end of the first robot arm, a first driving device which rotates the first robot arm to rotate the robot hand, a second driving device which rotates the second robot arm to extend and contract the robot hand in a radial direction with the first driving device, and a controller which operates the first driving device and stops the second driving device when the robot hand is rotated, and operates both the first driving device and the second driving device at the same time when the robot hand is extended and contracted in a radial direction.

Abstract: A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.

Abstract: A robotic manipulator device includes a robotic linkage to rotate an insertion axis about a remote center of motion with two degrees of freedom. A driven link supports the insertion axis. Rigid links in a parallelogram arrangement constrain the driven link to move in parallel to a drive link and the insertion axis to rotate about the remote center of motion. A drive unit has an output shaft coupled to the drive link. Rotation of an input shaft causes the output shaft to rotate. The input and output shafts are at a substantial angle. A housing supports the output shaft. A first motor causes the input shaft to rotate the output shaft. A second motor causes the housing to rotate, rotating the output shaft about an axis that is substantially parallel to the input shaft and passes through the remote center of motion.

Abstract: A method and assembly line (10) for vehicle door mounting provides initial door installation for painting and subsequent reinstallation as previously positioned.

Abstract: A mobile robot with a chassis including one or more drive mechanisms and at least a first arm pivotably connected to the chassis and configured to pitch up and down. A ski structure is attached on an underside of the first arm for raising the chassis as the arm is pitched down so the drive mechanisms can traverse a riser in the path of the chassis.

Abstract: A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

Abstract: A method of transporting precision equipment materials without absorption of thermal energy through the heat sensitive material or device such as flat panel displays. The transfer member has a carbon fiber reinforced composite material body with a layer of metal film on the top and bottom surfaces of the transfer member that provides a reflective surface. Flat panel displays, for example, release radiant thermal energy that is absorbed by the carbon fiber reinforced composite which is detrimental to the flat panel display. The reflective surface created by the metal film prevents the energy absorption by the carbon fiber reinforced composite. A glass fiber and epoxy layer on the metal film surface protects the metal film.

Abstract: An energy efficient biped robotic system with passive-dynamic locomotion includes a body having a frame. An energy recapture mechanism is suspended within the frame. The energy recapture mechanism includes a load, a mechanical energy storage mechanism that interconnects the load and the frame, and a guide means secured to the load and the frame. A mechanical energy input mechanism interconnects the load with an electric energy generating mechanism. An output means transfers the generated electric energy to an energy storage device. The robot also includes a leg connected to the body portion. The cyclical movement of the leg during passive-dynamic locomotion is transferred to the load through the mechanical energy storage mechanism, and the resulting oscillatory movement of the load is transferred by the mechanical energy input mechanism to the electric energy generating mechanism. The generated electric energy is transferred to the energy storage device for use by the robotic system.

Abstract: A fitting device for fitting a first fitting member held in a hand mounted at the forward end of a robot arm to a corresponding second fitting member, comprising a detection unit for detecting the force or moment generated when the first and second fitting members come into contact with each other, and a judging unit for judging, based on the force or moment detected by the detection unit, whether a one-point contact state prevails in which the first and second fitting members are in contact with each other at one point or a two-point contact state prevails in which the first and second fitting members are in contact with each other at least two points. In the one-point contact state, the first fitting member held in the hand is pressed against the second fitting member in the fitting direction thereby to proceed with the fitting operation while maintaining the holding posture of the robot arm.

Abstract: A robot or the like able to precisely grip an object by flexibly changing an operation in accordance with various environments. When it is judged that a robot is in a “first state”, the action of the robot is controlled in accordance with a “first action mode”. Thus, the robot does not move and moves an arm or the like on the spot so that a first object W1 can be gripped by a hand. On the other hand, when the judging result is denial, the robot acts in an action mode different from the first action mode so that a relative position or the like of the first object W1 with the robot as a reference is changed. As a result, the robot can be changed from a non-first state to the first state.

Abstract: Candidate character strings representing objects disposed in a work cell, models for robot operation instructions which has variable parts, and robot commands related to the objects are defined in advance. By inputting a query such as ‘Workpiece 1 ?’ by voice, the object concerned is indicated by a display color so that the work cell can be confirmed. Models for operation instructions and a program to be edited are displayed to allow an operator to select the portion to be edited. When an operation instruction is input by voice in the model pattern, candidate character strings are assigned to the variable parts of the model. A completed statement that matches the voice-recognized statement is found, the robot operation commands defined for the objects are displayed, and the robot operation is displayed on the screen. The operation commands are inserted at the desired location in the program.

Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.

Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.

Abstract: A robot device includes a sensor on its base plate capable of sensing rotation of the base plate occasioned by decoupling of a detachable joint that joins a forearm member of the robot to the base plate. The sensor produces an output signal which, if above a preset threshold, shuts off the motors driving the robot.

Abstract: An autonomous mobile milking implement having a frame with, a sub-frame which is adjustable in height and which has at least one teat cup holder and a teat cup movable relative thereto. The teat cup holder is tiltable, via a tilting mechanism coupled to the teat cup holder and the frame between a substantially vertical position and a second partially inverted position. The milking implement protects the teat cups against contamination and is capable of storing them in a compact manner.

Abstract: Pollutants such as hydrocarbons which have settled on the bed of a body of water are removed to the surface using a submersible vehicle positioned above the bed of a diver supported on a platform above the pollutant. A wand at one end of a pipe evacuated by a centrifugal pump is manipulated to draw the pollutant to the surface for treatment or disposal.

Abstract: A device for mounting a pneumatic tire onto a vehicle wheel rim comprises a handling robot, including a robot hand (7), which is movable about a plurality of axes and comprises a rotationally drivable flange (8) and a gripper (2) attached thereto, the gripper including a base element (10) and at least two gripper arms (15) which are movable radially relative to the centre axis of the gripper (2). The gripper arms (15) are coupled to a synchronization device, which synchronizes the radial movement of the gripper arms (15) and includes a disc (23), mounted on the base element (10) of the gripper (2) so as to be rotatable about the centre axis of the gripper and rotationally drivable via a motor, and coupling members (25) fixed to the disc (23) and the gripper arms (15) via hinged joints (26, 27) in such a way that a rotation of the disc (23) produces a synchronous radial movement of the gripper arms (15).

Abstract: A substrate handling robot having a robot body and a robot arm with an end effector is configured to exhibit angular (?), radial (R) and Z motion. A pair of coaxial shafts link the robot arm to respective motors dedicated to angular (?) and radial (R) motions. The motors are stationarily mounted with respect to the robot body. The shafts are rotatably supported by a floating platform which is motivated in the Z direction by a third motor also stationarily mounted with respect to the robot body. The third motor is coupled to the platform by a Z motion linkage. The first and second motors are coupled to the coaxial shafts by angular and radial motion linkages each of which includes primary and secondary timing belts whose relative motions are synchronized with the Z motion linkage to achieve controllable independent angular (?), radial (R) and Z motions in a simple, light-weight package.

Abstract: An apparatus and a method for robotic control that allows an unbalanced pendulum robot to raise its Center of Mass and balance on two motorized wheels. The robot includes a pair of arms that are connected to the upper body of the robot through motorized joints. The method consists of a series of movements employing the arms of the robot to raise the robot to the upright position. The method comprises a control loop in which the motorized drives are included for dynamic balance of the robot and the control of the arm apparatus. The robot is first configured as a low Center of Mass four-wheeled vehicle, then its Center of Mass is raised using a combination of its wheels and the joint located at the attachment point of the arm apparatus and the robot body, between the rear and front wheels; the method then applies accelerations to the rear wheels to dynamically pivot and further raise the Center of Mass up and over the main drive wheels bringing the robot into a balancing pendulum configuration.

Abstract: An interactive personalized robotic system for a home environment includes a home network in communication with at least one electronic device. A robot is in communication with the home network and is capable of controlling the at least one electronic device. The robot further includes a plurality of modules for personally communicating with a user. The user can control the robot and the at least one electronic device by communicating with the robot.

Abstract: A mobile robot communication system includes a remote unit, a repeater module and a control station. A cable connects the repeater module to the control station. The remote unit has a wireless receiver/transmitter for sending and receiving commands. The repeater module has a wireless receiver/transmitter for sending and receiving commands from the mobile unit. The control station is operable in communication with the repeater module for remotely sending and receiving signals. The cable is attached between the repeater module and control station for transmitting signals therebetween.

Abstract: An apparatus calculates, based on unimproved behavior amounts, behavior amount variations of living behaviors when each of living behaviors increases by one unit behavior amount, calculates environmental load variation of living behavior when the living behavior increases by one unit behavior amount, by calculating sum of values each obtained by multiplying one of behavior amount variations by corresponding one of basic units, to obtain environmental load variations of living behaviors, assigns messages to living behaviors based on environment load variations of living behaviors, calculates environmental load reduction of living behavior by (a) calculating variation between one of unimproved behavior amounts and one of improved behavior amounts of living behavior, and (b) multiplying variation by environmental load variation of living behavior, to obtain environmental load reductions of living behaviors, and selects one of messages which is assigned to one of living behaviors has the largest environmental loa

Abstract: A dual purpose media drive exchanges data with removable media items. The drive includes at least one port to receive various control signals, including (1) data exchange commands directing the drive to read and/or write data to a media item mounted by the drive, and (2) robotic device management commands. The drive includes a processor that responds to incoming data exchange commands by reading and/or writing to the loaded media item. The processor responds to at least some robotic device management signals by forwarding them to a robotic media transport device. The processor withholds the data exchange commands from the robotic device, since they are only pertinent to operations of the drive itself. The robotic device may be configured to restrict host access to library components according to predefined logical partitions.

Abstract: A mobile robot which has a communication with a detection target by a motion of the mobile robot or by an utterance from the mobile robot, the mobile robot includes: a personal identification unit detecting an existence of the tag based on a signal transferred from the tag and obtaining the identification information stored on the tag; a position information acquisition unit obtaining distance information indicating a distance from the mobile robot to the detection target; a locomotion speed detection unit detecting a locomotion speed of the mobile robot; a personal information acquisition unit acquiring personal information based on the identification information; a communication motion determination unit determining contents of a communication motion based on the personal information; and an operation determination unit adjusting a start timing of each content of the communication motion based on distance information and on the locomotion speed of the mobile robot.

Abstract: A remote controlled robot system that includes a robot and a remote control station. A user can control movement of the robot from the remote control station. The remote control station may generate robot control commands that are transmitted through a broadband network. The robot has a camera that generates video images that are transmitted to the remote control station through the network. The user can control movement of the robot while viewing the video images provided by the robot camera. The robot can automatically stop movement if it does not receive a robot control command within a time interval. The remote control station may transmit a stop command to the robot if the station does not receive an updated video image within a time interval.

Abstract: A robot system is provided and includes an autonomous mobile robot. In the system in which monitoring is performed using the autonomous mobile robot which travels along a predetermined path, an interval between the time when a user requests transmission of images and the time when the user obtains the images may be reduced. The autonomous mobile robot travels along a predetermined path at predetermined times, a camera takes photographs at predetermined locations during the travel along the predetermined path, images taken by the camera are stored, and the stored images are sent to a requesting cell phone in response to a transmission request from the cell phone.

Abstract: A manual-mode operating system for a robot provided with an end-effector.

Abstract: A robotic storage library is provided for reducing the transition time to reach an operational state following a transition from a power-off to a power-on state. The robotic storage library can generally include a transport unit for moving data cartridges, or other storage elements, between a location in a shelf system and a drive, or data transfer interface, to complete storage operations for a host computer. The library can further include a controller for causing an audit to be performed to create an inventory of the locations. The audit can be stored in nonvolatile memory prior to the power transition. The inventory information can be transmitted to a host computer after the power transition.

Abstract: An assembling method and an apparatus for carrying out the method capable of efficiently, reliably and easily detecting an insertion and fitting position, for easy automatic assembly. In case a rod-like workpiece is inserted into a hole in an object, an insertable range is determined based an amount of clearance between the workpiece and the hole, an amount of chamfering of the hole, etc. The insertable range is defined as within a range centered at a hole center position 3cp and having a radium of r. A workpiece center position is indicated by 1cp. While the workpiece is moved once throughout a search range (XL-XU) in the X-axis direction, it is moved in the Y-axis direction by an amount equal to or less than an insertable range amount 2r. As shown by a dotted line, the workpiece center 1cp passes without fail through the insertable range during the motion throughout the search range (XL-XU, YL-YU).

Abstract: A robotic system that includes a plurality of robots that are linked to a plurality of remote stations. The robots have an input device and software that allows control of another robot. This allows an operator in close physical proximity to a robot to operate another robot. Each robot can be either a master or slave device.

Abstract: A robotic system that includes a remote controlled robot. The robot may include a camera, a monitor and a holonomic platform all attached to a robot housing. The robot may be controlled by a remote control station that also has a camera and a monitor. The remote control station may be linked to a base station that is wirelessly coupled to the robot. The cameras and monitors allow a care giver at the remote location to monitor and care for a patient through the robot. The holonomic platform allows the robot to move about a home or facility to locate and/or follow a patient.

Abstract: A robotic system that includes a mobile robot linked to a plurality of remote stations. The robot provides both audio and visual information to the stations. One of the remote stations, a primary station, may control the robot while receiving and providing audio and visual information with the remote controlled robot. The other stations, the secondary stations, may also receive the audio and visual information transmitted between the robot and the primary station. This allows operators of the secondary stations to observe, communicate and be trained through the robot and primary station. Such an approach may reduce the amount of travel required to train personnel.

Abstract: A robotic system that includes a remote controlled robot with at least five degrees of freedom and a teleconferencing function. The robot may include a camera, a monitor and a holonomic platform all attached to a robot housing. The robot may be controlled by a remote control station that also has a camera and a monitor. The remote control station may be linked to a base station that is wirelessly coupled to the robot. The cameras and monitors allow a care giver at the remote location to monitor and care for a patient through the robot. The holonomic platform provides three degrees of freedom to allow the robot to move about a home or facility to locate and/or follow a patient. The robot also has mechanisms to provide at least two degrees of freedom for the camera.

Abstract: A robotic system that includes a remote controlled robot. The robot may include a camera, a monitor and a holonomic platform all attached to a robot housing. The robot may be controlled by a remote control station that also has a camera and a monitor. The remote control station may be linked to a base station that is wirelessly coupled to the robot. The cameras and monitors allow a care giver at the remote location to monitor and care for a patient through the robot. The holonomic platform allows the robot to move about a home or facility to locate and/or follow a patient.

Abstract: A method for monitoring a patient with a robotic system that includes a remote controlled robot. The robot may include a camera, a monitor and a holonomic platform all attached to a robot housing. The robot may be controlled by a remote control station that also has a camera and a monitor. The remote control station may be linked to a base station that is wirelessly coupled to the robot. The cameras and monitors allow a care giver at the remote location to monitor and care for a patient through the robot. The holonomic platform allows the robot to move about a home or facility to locate and/or follow a patient.

Abstract: A robot apparatus having a robot and a controller for controlling the robot. The apparatus has a diagnosing computer connected to the controller and acquiring a state quantity of the robot. An analyzing computer is provided remotely from the robot and has a control parameter adjuster for adjusting a control parameter of the robot, and a communicating function of connecting the computers. The state quantity is transmitted to the analyzing computer by the communicating function and a control parameter of the robot is obtained based on the state quantity. The control parameter is transmitted to the controller through the diagnosing computer to control the robot.

Abstract: The screen-printing machine (10) comprises: a print station (12); at least one support surface (40A, 40B) for supporting the objects away from the print station (12); and at least one transfer device (18, 20) for transferring an object, which transfer device comprises a manipulator arm (54) equipped with an end clamp (56), the arm (54) being hinged relative to the support surface (40A, 40B) about a pivot axis (Z1-Z1) and the clamp (56) being hinged relative to the arm (54) about a tilt axis. The pivot axis (Z1-Z1) of the arm (54) defines with the normal to the support surface (40A, 40B) a non-zero angle of inclination that is less than 45°. Application to printing flasks.

Abstract: To improve the exchange of data between controls of machines, particularly robots, a method is provided for the exchange of such data, wherein a first control produces an instruction to be transmitted with data to be sent to a second control and with an identification representing the second control. The instruction to be transmitted is provided with an identification of the first control, wherein the first control sends the instruction to be transmitted to the second control, wherein the second control evaluates the data of the instruction and wherein the second control provides the first control with an acknowledgment.

Abstract: System and method for allowing execution of control over robot hardware other than specific robot hardware by using control software that does not have features to be applied to the robot hardware other than the specific hardware designed for control. Control software makes an inquiry about the presence of robot function requested by control software through the use of interface recording and robot function searching. If it has been found that the robot function is present, there is a requests that robot motion be performed. If it has been found that the robot function is not present, the request is skipped, or the request is made to similar robot function.

Abstract: A medical system that allows a medical device to be controlled by one of two input devices. The input devices may be consoles that contain handles and a screen. The medical devices may include robotic arms and instruments used to perform a medical procedure. The system may include an arbitrator that determines which console has priority to control one or more of the robotic arms/instruments.

Abstract: A compliance mechanism for manipulating a control object by an end effector supported by a robotic arm. The robotic arm is supported by a combination of linear slides for two-axis freedom of movement. A locking arm is attached to the robotic arm and the locking arm is moveable between a locked and an unlocked position. The locking arm is biased in the locked position to restrict movement of the robotic arm along the two axes. A plunger extends adjacent the end effector. Upon engagement with an alignment feature associated with the control object, the plunger moves the locking arm from the locked to the unlocked position, thereby introducing compliance along the two axes manipulation of the control object.

Abstract: Surgical robots and other telepresence systems have enhanced grip actuation for manipulating tissues and objects with small sizes. A master/slave system is used in which an error signal or gain is artificially altered when grip members are near a closed configuration.

Abstract: A medical master/slave manipulator is excellent in operability and capable of reducing burden on the operator. The medical master/slave manipulator includes a master unit provided with an operation control portion, a slave unit provided with a working device, an interlocking mechanism interlocking the slave unit with the master unit, an orientation difference measuring mechanism for measuring the orientation difference between the orientation of the master unit and that of the slave unit, and a control mechanism for controlling the slave unit to adjust the orientation of the slave unit to that of the master unit so that the orientation difference is reduced to zero in a transient master/slave operation mode in which an operation mode changes from an unrestricted operation mode to a master/slave operation mode.

Abstract: A medical system that allows a medical device to be controlled by one of two input devices. The input devices may be consoles that contain handles and a screen. The medical devices may include robotic arms and instruments used to perform a medical procedure. The system may include an arbitrator that determines which console has priority to control one or more of the robotic arms/instruments.

Abstract: A medical system that allows a medical device to be controlled by one of two input devices. The input devices may be consoles that contain handles and a screen. The medical devices may include robotic arms and instruments used to perform a medical procedure. The system may include an arbitrator that determines which console has priority to control one or more of the robotic arms/instruments.

Abstract: A pick and place apparatus comprises a bond arm adapted for rotation about an axis between a pick location and a place location. The bond arm is formed with a cavity at an end of the arm remote from the axis, within which cavity are located a plurality of damping particles for damping unwanted vibrations of the bond arm. The particles may be irregular tungsten granules with a diameter between 0.3 and 1.2 mm and a filling ratio of about 75%.

Abstract: A member for piping and wiring to an end effector of a robot is discharged from a first wrist element into a void area in a position displaced from an axis c, being bent and loosened, and then guided to a hollow path. Any variance in a length of the piping/wiring member 30 due to rotations of second and third wrist elements is absorbed in this void area, so that twining round or scratching by a wrist can be prevented.