Abstract: An air filtration device for intake of atmospheric air, removal of contaminants from the atmospheric air, expulsion of filtered air, includes a housing configured for application directly to an electrical outlet and provides air intake from the front surface of the housing and air expulsion from the side of the housing to utilize a wall surface to disperse the filtered air. A filter change indicator is provided to communicate that a filter should be changed, and a filter orientation system is provided to allow proper orientation of the filter with respect to air flow.

Abstract: A method and apparatus for evaluating the end cap round transducer horn assemblies used in debubbling operations wherein the ECR THA can be evaluated off-line at both high and low power and on-line by making electrical measurements on the ECR THA. The electrical measurements are used to characterize the physical condition of the piezoelectric ceramics of the THA. A test box is employed to practice the method. The test box is connected between the THA and a signal analyzer. Power is supplied to the THA and the electrical signals across the THA are sampled. The sampled electrical signals are transmitted to the signal analyzer while maintaining the amplitude and phase relationship thereof. The sampled electrical signals are used to generate an impedance trace for the particular THA. That impedance trace is compared to a model impedance trace. In such manner, it can be determined whether the ECR THA is operational.

Abstract: An air purifier including a housing supporting an air inlet, an air outlet and an air flow passage interconnecting the air inlet and the air outlet. The airflow passage is defined by a filtration chamber positioned upstream from a blower chamber and an ultraviolet light chamber. A blower assembly is supported within the blower chamber and includes a fan driven by a motor for forcing air through the air flow passage from the air inlet to the air outlet. A pre-filter and a main filter are removably supported within the air filtration chamber for entrapping particulates having a size of 0.3 microns and greater. An ultraviolet light source is positioned within the light chamber and is positioned proximate the air outlet. An outlet grille is supported proximate the air outlet and provides for the passage of air while substantially preventing the passage of ultraviolet light. The outlet grille includes a louver assembly including a plurality of blades defining a plurality of convoluted passages.

Abstract: The present invention is directed to a filter module that may incorporate sensors to measure various characteristics of fluid flow and filtration. The sensors may be MEMS and may measure the temperature, flow rate, pressure, etc. of the fluid. One or more MEMS sensors may be included in a sensor package which, in turn, may be included in a sensor component. The latter, which may also include a processor, conductor pins, etc. for data communication, may be coupled to a sensor port in such a way as to allow contact between the sensor(s) and the fluid. Sensor measurements may be used to determine the occurrence of harmful events, such as cavitation or particle breakthrough, or to predict the remaining service life of a filter element.

Abstract: A method of reducing PFC emissions during a semiconductor manufacturing process that includes a set of sub-processes each of which produces at least one PFC includes the steps of exhausting PFC's produced by each sub-process to a common line to form a combined exhaust stream, treating the combined exhaust stream from each sub-process using a separate PFC abatement system, combining the treated exhaust streams to form a combined treated stream, and wet scrubbing the combined treated stream.

Abstract: A regenerable air cleaning device is disclosed which comprises a filter holder supporting a regenerable filter that includes activated carbon fibers (ACF) and a control system that is adapted to determine when to regenerate the regenerable filter. The device exhibits high performance and longevity over many regeneration cycles.

Abstract: An air or oil dryer module is provided to remove or reduce moisture from a lubricant using a pressurized air supply to inject dry air into a lubricant sump. As the “dry air” or air with a minimized moisture content, gathers moisture from the lubricant a relative humidity sensor detects an increase in air moisture. At a pre-determined relative humidity level, a fresh supply of air is added into the lubricant sump, purging the higher relative humidity level air from the sump.

Abstract: A compact, portable, lightweight, low power consuming, convenient, versatile and sterile laminar airflow device, useful in obtaining a workspace substantially devoid of airborne particulate contaminants, said device comprising a body (C) divided into an upper and lower chambers; the upper chamber housing one or more pre-filtration members (B), a motor (T) driving a fan (S), and one or more filters (U) located below the motor; and the lower chamber provided with a slideable front panel (M), a removable platform (X) located at the lower portion of the chamber and a perforated plane (N) placed on the removable platform.

Abstract: Methods and control systems for improving performance in an air filtration system are disclosed. The method includes monitoring performance of a blower motor in the air filtration system and adjusting blower motor torque based upon a measured airflow or a measured static air pressure within the air filtration system.

Abstract: A filtering device for treating substances passing therethrough includes a filter cartridge having a cylindrical inner wall surrounded by a cylindrical outer wall. The inner and outer walls are spaced to define an annular space between them. A filtering media occupies the annular space and operates to remove contamination from a fluid flowing through the filter cartridge. First and second covers are located at opposite axial ends of the filter cartridge for sealing the system. At least one biasing assembly is disposed at one axial end of the filter cartridge for applying an approximately constant compression force to the filter medium. The compression force minimizes the formation of voids and the occurrence of bridging within the filtering media. A sensing mechanism, such as a Hall Effect sensor, can be applied to the filter cartridge for detecting changes in the filtering media which indicate the formation of voids or defects in the filtering media.

Abstract: An air treatment appliance having an external body at least partially constructed of a translucent material. An air inlet and an air outlet in the external body permit airflow through the device. A fan inside the body is operable to draw in air through the air inlet and to expel it through the air outlet and the air may be passed through a filter mechanism in the device. At least some components of the interior of the air treatment appliance having a condition capable of visibly changing during an operation of the appliance, such as the filter mechanism and the fan, are visible from the exterior through the translucent material of the external body such that the condition is visible from the exterior of the external body through the translucent material. The translucent material may be clear, colored, or a predetermined combination of colors.

Abstract: Vent filters for containers such as barrels which contain hazardous waste, such as transuranic (nuclear) waste, include a bore therethrough which does not intersect the material of carbon-to-carbon filter media inserts disposed within the vent filter. Each of the bores has a stainless steel tube disposed therein wherein the stainless steel tube has at an interior end a septa-type seal and at an outer end an impenetrable plug. In order to sample head gases, a syringe is used with a needle that penetrates the septa-type seal. After the needle is withdrawn, the septa-type seal closes and the impenetrable plug is replaced.

Abstract: A tubular membrane extractor column is connected to an oil filled electrical component such as a transformer. Fault gases dissolved in the transformer oil are extracted from the oil in the separator and are isolated in a second phase. Oil and second phase gas are circulated in separate flow paths until equilibrium is reached. Equilibrated gas is routed to a gas chromatograph or other analytical instrument requiring controlled fluid flow, and which incorporates a manifold assembly that eliminates the need for many of the external fittings and connections required in the instrument. A manifold block has plural fluid flow paths formed therethrough to route fluids to selected components. A collar mates to the block and adapts to a rotary injection valve to provide the continued fluid paths from the block to the injector valve and the other components of the instrument.

Abstract: A filtration system for trapping airborne contaminants as exemplified in evacuating smoke generated during a surgical procedure wherein operation efficiency thereof is automatically reported in relation to filter structure cumulative use time and cumulative airflow volume. In a first embodiment a system processor correlates cumulative vacuum pump motor speed, operation duration, and air pressure difference measurements over an airflow filter path into a cumulative value and automatically compares that value to a plurality of known pre-determined correlated values to thereby provide filter life expectancy which is conveyed to a memory device of the filter structure for retention and. conveyance for display. In a second embodiment a self-contained microprocessor and memory device of the filter structure is in communication with the system processor to receive, store, and send filter structure time-duration operability data which is sent to a data display site for display.

Abstract: The invention provides an apparatus and method to monitor air filter restriction within an air cleaner system of a motor vehicle. The invention uses a quick connect couplig to allow fluid communication between a restriction gauge and the air cleaner housing and also provides a means of attaching the restriction gauge or a remote tubing connector to the air cleaner housing. The quick connect coupling is located within an axial bore, generally within a conduit in the housing. A portion of the filtered air is drawn from the air cleaner housing through the quick connect coupling and into the restriction gauge, where the pressure is measured and the amount of air filter restriction is gauged.

Abstract: A walk-through portal or other enclosure is provided for at least one of detection of a predetermined substance on a subject and decontamination of a subject from a predetermined substance, the subject being either a person or, for other type of enclosure, an object, such as a suitcase. The walk-through portal defines an examination zone and can be substantially open on at least one side, to permit a subject readily to enter and to exit the examination zone. A closure closes off the examination zone from the exterior. An inlet into the examination zone and an outlet from the examination zone permit air or other gas to flow through it, and this is pumped by a pump, so as to entrain at least one of vapors and particulates from such substance. At least part of the exhaust through the outlet can be passed to an analyzer, such as an IMS, to detect substances of interest.

Abstract: An end-of-service indicator for use with a respirator cartridge, the end-of-service indicator having an optical waveguide having two extremities, one of the extremities being connected to a light source, the other of the extremities being connected to a detector which measures the intensity of light guided and transmitted by the fiber. An alarm is connected to the detector and is triggered when the intensity of light measured by the detector is below a predetermined level. An important aspect of the end-of-service indicator is that at least a portion of the optical fiber is porous. In use, the end-of-service indicator is placed inside a respirator cartridge having a gas/vapor sorbent, so that when the respirator cartridge is used in a toxic environment, the gas/vapor sorbent and the porous glass gradually become saturated.

Abstract: A fan filter unit for use in cleanrooms is provided, which decreases efficiently the concentration of chemical substance existing in the atmosphere while the expansion of the air circulating space and the electric power consumption increase of the fan-driving motor are suppressed. The unit comprises an enclosure having an air inlet through which an outside air is introduced into the enclosure and an air outlet through which a cleaned air is emitted or discharged from the enclosure; a chemical filter mounted in the enclosure to remove chemical substance existing in the outside air; a dust filter mounted in the enclosure to remove dust existing in the outside air; a fan mounted in the enclosure to introduce the outside air into the enclosure through the air inlet and to emit the cleaned air to outside of the enclosure; and a bypassing path for returning part of the outside air that has penetrated the chemical filter to an upstream side of the fan without penetrating the dust filter.

Abstract: A self-moving device and method for the complete and full automatic examination of floor surfaces of all kind as well as for a particularly efficient suction of dust therefrom. In each case, the robot is controlled so as to explore the adjacent area and to detect the potential obstacles using special sensors before storing them in a data field. The displacement towards a new location is then carried out using the stored data until the whole accessible surface has been covered. One of the main constituent members of the robot includes an extensible arm that rests on the robot and on which contact and range sensors are arranged. When the robot is used as an automatic vacuum cleaner, an air flow is forced into the robot arm and the cleaning effect can further be enhanced by providing one or more circular rotary brushes at the front end of the arm. This device can essentially be used for domestic or industrial cleaning purposes with a view to replace traditional vacuum cleaners.

Abstract: The invention concerns a maintenance unit for compressed air with at least two connecting pieces, wherein the maintenance unit is formed without a housing, in that the connecting pieces can be inserted into or disposed onto the free pipe ends transporting the compressed air.

Abstract: A solid powder trapping system for filtering out solid powder from a mixture of gaseous reactants that also includes a device capable of determining the degree of powder accumulation inside the trap. The powder trapping system uses a powder trap to catch the solid powder within the gaseous mixture. A magnetic flux sensor is also installed inside the trap for measuring a magnetic flux whose strength depends on the amount of solid powder inside the trap. The magnetic flux sensor is connected to a display device so that reading from the display device reflects the amount of solid powder accumulated inside the powder trap.

Abstract: An air drier arrangement including an air compressor (1), an air-drier (3) and air conduits (2, 4). In order to obtain favorable working conditions for the arrangement under different temperatures there is a switch-over valve (6) in a separate signal air pipe (5) from the air drier to the compressor. This valve is operable between a first position, giving a governor mode for the arrangement, and a second position, giving an unloader mode for the arrangement. The operations of the valve may be governed by a thermostat (9).

Abstract: The present invention relates to a processing system for the preparation of compressed air made up of individual units, such as a filter unit, a control unit, an oiler unit and/or the like. The individual units are connected to each other by means of a system bus. The present invention also provides for an interface by which the system bus is operatively linked with the customer bus, which in turn can be connected to a control device.

Abstract: An air induction system with active noise control includes a self-cleaning air filter that is integrated within an air intake housing. The self-cleaning air filter filters out contaminants such as dust and dirt particulates from air flowing through the intake housing. The self-cleaning filter is powered and controlled by the same electronic unit that is used to power the active noise control system.

Abstract: A solid powder trapping system for filtering out solid powder from a mixture of gaseous reactants that also includes a device capable of determining the degree of powder accumulation inside the trap. The powder trapping system uses a powder trap to catch the solid powder within the gaseous mixture. A magnetic flux sensor is also installed inside the trap for measuring a magnetic flux whose strength depends on the amount of solid powder inside the trap. The magnetic flux sensor is connected to a display device so that reading from the display device reflects the amount of solid powder accumulated inside the powder trap.

Abstract: An air filtration device for intake of atmospheric air, removal of contaminants from the atmospheric air, expulsion of filtered air, includes a housing configured for application directly to an electrical outlet and provides air intake from the front surface of the housing and air expulsion from the side of the housing to utilize a wall surface to disperse the filtered air. A filter change indicator is provided to communicate that a filter should be changed, and a filter orientation system is provided to allow proper orientation of the filter with respect to air flow.

Abstract: A gas separation plant includes, downstream of the line for feeding the gas separation module with a compressed gas mixture, a liquid particle separation device which includes a liquid detector, for example, of the optronic type, delivering an output signal, connected to an alarm device and to a central control unit of the plant.

Abstract: A system and method for treating process gas streams containing isopropyl alcohol (IPA) to reduce the concentration of IPA therein. The invented system includes a scrubber unit that receives a process stream containing a concentration of IPA and reduces the concentration of IPA therein to below a determined threshold. The scrubber includes a reverse osmosis assembly that significantly reduces water consumption for the scrubbing process as compared to conventional once-through systems. The system may be operated at an elevated pH to prevent biofouling from inhibiting the operation of the reverse osmosis assembly. The system may contain a softening step on the make up water system to prevent scaling in the reverse osmosis system and a softening step on a sidestream of the scrubber water recirculation loop to reduce scrubber tower salting/scaling and to control the pH of the scrubbing liquid.

Abstract: A filter device for adsorption of gaseous constituents from a gas flow includes a filter chamber with filters arranged therein, a clean-gas chamber connected to the first chamber in a fluid-conducting manner via the filters, and a collection chamber arranged beneath the filter chamber, is open toward the filter chamber and has an interior which narrows toward the bottom. An unfiltered-gas duct which leads from the outside, is arranged in the lower area of the collection chamber in such a manner that it can be adjusted in the direction toward the filters. A dust-discharge device, which leads toward the outside, is arranged in the lower area.

Abstract: The air filter for a ceiling fan in accordance with the present invention is suspended from the switch box of a ceiling fan, and comprises a cover in which a rotating blade and a filter are received. With the air filter for a ceiling fan in accordance with the present invention, the air is drawn through the filtering means by the suction force from the fan blade and then flows out the cover. Since the housing is positioned just under the ceiling fan, the filtered air is then broadly spread to the whole room by the ceiling fan.

Abstract: A apparatus for the in-situ predetermination of the effects of NOx reduction systems on selected components. This determination can yield quick, inexpensive and accurate results for a number of characteristics, for example: catalyst longevity; efficiency with differing fuels, in differing locations, and at different temperatures; potential of catalyst poisoning in specific circumstances; ammonia slip considerations; SCR and SNCR interplay, as well as staged NOx reduction design criteria; pressure and blockage considerations; downstream effect on air preheater elements; and more. These determinations can be made in real, or accelerated time. Furthermore, the determinations can be made before any system modifications are made, or to assist in increasing the efficiency of existing systems, or even to assist in predictions of preventive maintenance and associated down time.

Abstract: An automatic detection and warning device of the filtering net of an air conditioner comprises: an outer frame installed with at least one wind inlet and at least one wind outlet, a wind groove being formed between the wind inlet and the wind outlet; a sampling filtering net installed in the wind groove of the outer frame; a detecting unit comprising a transmitter and a receiver for detecting the amount of collecting dusts on the sampling filtering net; and a circuit unit installed within the outer frame for controlling the operation of the detecting unit. Thereby, the amount of collecting dusts on the filtering net of an air conditioner can be determined so as to warn the user.

Abstract: In order to facilitate removal of an air filter from a housing, the air filter has a flexible tab which provides a finger grip. In a preferred embodiment, the flexible tab is disposed between a molded gasket and an expanded metal screen which covers the downstream area or dirty side of a pleated filter media.

Abstract: The invention is a high efficiency particulate (HEPA) filter apparatus and system, and method for assaying particulates. The HEPA filter provides for capture of 99.99% or greater of particulates from a gas stream, with collection of particulates on the surface of the filter media. The invention provides a filter system that can be cleaned and regenerated in situ.

Abstract: An object of the present invention is to provide a method for recovering a gas using a semipermeable membrane in an apparatus having a simple structure. The method is capable of maintaining a purity of a product gas at a constant value even if a feed amount of a feed stream is fluctuated. A feed stream G1 is a gas mixture of a fast gas having a relatively high permeability to a membrane 1 and a slow gas having a relatively low permeability to the membrane 1. The feed stream G1 is pressurized by a compressor 3 and fed to a membrane 1 separation unit 2 having the membrane 1. Part G7 of the permeate stream on the permeate side of the membrane 1 is recirculated to the upstream side of the compressor 3 through the first recirculation line 17 and merged into a stream of the feed stream G1. Simultaneously, another part of the permeate stream G2 on the permeate side of the membrane 1 is recovered through a product gas recovering line 5.

Abstract: The invention is directed to a mobile arrangement for cleaning contaminated air. The arrangement has a blower unit, a filter unit, supply air lines and discharge air lines. During the cleaning process, surrounding air is sucked in by the blower unit, guided through the filter for cleaning, and finally guided out of the arrangement again. The filter unit (2) has at least one cylindrical filter element (15, 16, 17) in which an activated charcoal filter (17) is arranged at the outer side of the cylinder jacket and a solids filter (15, 16) is arranged at the inner side of the cylinder jacket.

Abstract: Device and method for removing volatile compounds from a gas stream, the device including a material which is capable of removing and retaining the volatile compounds while displaying a visible color change, wherein at least some moisture has been removed from the material and there is relative movement between the gas stream and the material.

Abstract: A method for manufacturing a gas mask canister using a HEPA filter media having plastic separating plates inserted into between HEPA filter media at certain intervals. The HEPA filter, impregnated activated carbon, and a pre-filter are accommodated within a cylinder. The cylinder is inserted into a canister having an upper portion and a lower portion detachably coupled together. The impregnated activated carbon, the plastic separating plates and the casing of the canister can be reused, and the rest of elements are burned. A vinyl coating sheet is peeled off from the canister after each use. An indexing tab for recording the number of times of peeling is attached on each of vinyl coated sheets, so that the number of uses can be known.

Abstract: A method for the in-situ predetermination of the effects of NOx reduction systems on selected components. This determination can yield quick, inexpensive and accurate results for a number of characteristics, for example: catalyst longevity; efficiency with differing fuels, in differing locations, and at different temperatures; potential of catalyst poisoning in specific circumstances; ammonia slip considerations; SCR and SNCR interplay, as well as staged NOx reduction design criteria; pressure and blockage considerations; downstream effect on air preheater elements; and more. These determinations can be made in real, or accelerated time. Furthermore, the determinations can be made before any system modifications are made, or to assist in increasing the efficiency of existing systems, or even to assist in predictions of preventive maintenance and associated down time.

Abstract: A fan filter unit has a blower, a motor, a filter and a charge induction sensor installed on the ceiling of a clean room. The charge induction sensor is movable between a drive stopped position at which the sensor can be seen with the naked eye and a normal drive position at which the sensor can not be discriminated from the bottom of the filter. The direction of air passing through the filter and static charges prevailing in the unit dictate the position assumed by the sensor.

Abstract: A filter cartridge is capable of at least one-way communication with the base of a filtration system so as to confirm that the filter cartridge is properly configured for installation and use in the filtration system. Transmission and receipt of a filter presence confirmation signal can enhance the effectiveness of the filtration system, e.g., by disabling one or more operational characteristics of the system in the absence of a confirmation signal, and/or by automatically resetting one or more counters of a capacity indicator of the system upon receipt of the confirmation signal. The filter cartridge is particularly well-adapted for use in a filtration system having a flow meter which monitors the flow of liquid through the system.

Abstract: In a gas purifier, a gas flow is generated by a fan (15) and passed through a filter arrangement (14). A difference (SF) is measured (16, 19) between pollution levels in the gas flow before and after it has passed the filter arrangement (14). A controller (18) reduces the gas flow when the difference (SF) between the pollution levels drops below a threshold value (Th).

Abstract: This invention relates to a filter change indicator that is operable in various orientations of the device incorporating it. For example, the filter change indicator is operable when the device is positioned in either the upright or sideways position. The device incorporating the filter change indicator can be any air moving device which incorporates a cleanable or replaceable filter. The filter change indicator includes a transparent viewing window and a tubulation. The viewing window displays a visible signal when the filter needs changing. The visible signal can be a float retained in the tubulation. The tubulation is a hollow transparent tube which forms an incline plane within the housing. The tubulation includes a first end, a second end and a step. The first end is in fluid communication with an air flow path through the tubulation, and this air flow path is exposed to atmospheric pressure.

Abstract: A nozzle arrangement for a scrubbing column for a flue gas in desulfurization, in which the scrubbing column has a sump, a baffle-free zone above the sump and a nozzle arrangement above the absorption zone. The nozzles, preferably by selective connection of intermediate pipe sections are connected to a branch pipe system extending from a distributor. Flow density profiles are formed in predetermined cross sectional planes of the scrubbing column by the spray cones of the nozzles. In each of these cross sectional planes, the flow density profiles of different spray cones are superimposed on one another. The flow density profiles of different cross sectional planes are superimposed upon projection of them onto a one of the planes to form a flow density complete profile in this one plane over the entire cross section of the scrubbing column.

Abstract: A deodorizing and disinfecting apparatus having catalyst deterioration detection function of the present invention comprises: an air supply portion for inhaling air inside; an ozone generating portion for discharging ozone to the inhaled air: a catalyst for accelerating deodorizing and disinfecting actions and decomposition of the ozone disposed downstream from the ozone generating portion; an ozone sensor for detecting the concentration of remaining ozone disposed downstream from the catalyst; and means for repeating a cycle including stop of ozone discharge from the ozone generating portion for a predetermined time period when the concentration of the remaining ozone reaches a predetermined concentration or more, and for determining that the catalyst is deteriorated when a condition wherein an interval between times when the concentration of the remaining ozone is not less than a predetermined concentration becomes shorter than a predetermined time period is recognized at a predetermined frequency, and then

Abstract: An indoor unit of an air-conditioner having a unit body, provided on a rear of a ceiling, having an lower surface portion exposed indoor and an indoor heat exchanger and a blower in its exterior, a decorative panel, structured as the lower surface portion for the unit body, having an inlet port for guiding air in a room to the indoor heat exchanger, a filter fixing portion, structured as a part of the decorative panel, having a filter attached to a position opposite to the inlet port to be detachable, a support portion for supporting the filter fixing portion to be freely rotatable to the decorative panel, and an open/close driving mechanism for driving the filter fixing portion to be freely opened and closed against the decorative panel in a state that the support portion is used as a fulcrum, the mechanism for hanging the filter fixing portion from a ceiling surface when being opened to be moved.

Abstract: The invention relates to a device for removing one or more undesirable or dangerous substances for the human race from a gas or vapour mixture, the device comprising: a predetermined amount of adsorbent for adsorbing the substances and an odourant for releasing an odour in order to alarm a person, wherein the odourant is arranged in such a manner that the odourant is displaceable by the substances, following a predetermined level of saturation of the adsorbent.

Abstract: A substrate treatment system comprises process sections provided with at least either of liquid treatment group units and heat treatment group units, an upper space formed above the process sections in order to supply air to the process sections, a purification section for removing alkaline components from the air to be supplied to the upper spaces to purify the air, temperature/humidity controller communicating with the urification section and the upper spaces to control the temperature and humidity of the air passing through the purification sections, and fans for supplying air to the top spaces from the temperature/humidity controller, lowering the air from the upper spaces into the process sections, and supplying at least some of the air lowering through the process sections to the temperature/humidity controller.

Abstract: A flow control device (FCD) controls low flow rate fluid flow to within closely tolerated and consistently maintained limits by way of improved stacked disc technology. Stacking face to face of similar disc configurations generates novel enhanced etched disc stacks allowing course and fine flow adjustments, maintenance of cleanliness, resistance to flow degradation, improved structural strength and the ability to make real time flow adjustments during mission life. A stainless/copper sandwiched embodiment seals face to face leakage faster than known means for controlling etched disc face to face seal designs.

Abstract: A selection device for delivering one of two gases to an apparatus includes an apparatus having an inlet and an outlet, and a gas delivery line connected to the inlet of the apparatus. A first feed line and a second feed line for respectively feeding a first and a second gas are provided. A first purge line and a second purge line are also provided, the first feed line being connected to the first purge line and the second feed line being connected to the second purge line. A common connection line connects the first and the second feed lines to the gas delivery line. An additional purge line is connected to the outlet of the apparatus. A first element, a second element, and a third element for creating a pressure drop are disposed in the first, the second, and the additional purge lines, respectively, the first element for creating a pressure drop and the third element for creating a pressure drop being flow-regulating elements, the second element for creating a pressure drop being a backpressure regulator.