Including Substrate Treatment Patents (Class 977/859)
  • Patent number: 8865268
    Abstract: A method and apparatus, the method including: forming a recess in a graphene layer wherein the recess creates a boundary between a first portion of the graphene layer and a second portion of the graphene layer; depositing electrically insulating material within the recess; and depositing an electrically conductive material over the insulating material.
    Type: Grant
    Filed: April 28, 2009
    Date of Patent: October 21, 2014
    Assignee: Nokia Corporation
    Inventors: Samiul Haque, Reijo K. Lehtiniemi, Asta M. Karkkainen, Lorenz Lechner, Pertti Hakonen
  • Patent number: 8586454
    Abstract: A two-step hydrogen anneal process has been developed for use in fabricating semiconductor nanowires for use in non-planar semiconductor devices. In the first part of the two-step hydrogen anneal process, which occurs prior to suspending a semiconductor nanowire, the initial roughness of at least the sidewalls of the semiconductor nanowire is reduced, while having at least the bottommost surface of the nanowire pinned to an uppermost surface of a substrate. After performing the first hydrogen anneal, the semiconductor nanowire is suspended and then a second hydrogen anneal is performed which further reduces the roughness of all exposed surfaces of the semiconductor nanowire and reshapes the semiconductor nanowire. By breaking the anneal into two steps, smaller semiconductor nanowires at a tight pitch survive the process and yield.
    Type: Grant
    Filed: February 5, 2013
    Date of Patent: November 19, 2013
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey W. Sleight, Sarunya Bangsaruntip
  • Patent number: 8575009
    Abstract: A two-step hydrogen anneal process has been developed for use in fabricating semiconductor nanowires for use in non-planar semiconductor devices. In the first part of the two-step hydrogen anneal process, which occurs prior to suspending a semiconductor nanowire, the initial roughness of at least the sidewalls of the semiconductor nanowire is reduced, while having at least the bottommost surface of the nanowire pinned to an uppermost surface of a substrate. After performing the first hydrogen anneal, the semiconductor nanowire is suspended and then a second hydrogen anneal is performed which further reduces the roughness of all exposed surfaces of the semiconductor nanowire and reshapes the semiconductor nanowire. By breaking the anneal into two steps, smaller semiconductor nanowires at a tight pitch survive the process and yield.
    Type: Grant
    Filed: March 8, 2012
    Date of Patent: November 5, 2013
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey W. Sleight, Sarunya Bangsaruntip
  • Patent number: 8480946
    Abstract: An imprint method, in which pattern forming is performed by having a light curable material applied on a sample face of a substrate being a processing target hardened by being exposed to light in a state where the light curable material and a pattern formed surface of a template contact each other, the pattern formed surface having a concave-convex pattern formed thereon; wherein in one exposure performed with respect to a predetermined shot of the light curable material, an exposure amount at a light curable material on a first region which contacts a pattern formed region including the concave-convex pattern of the template is greater than an exposure amount at a light curable material on a second region which at least contacts a part of a pattern periphery region of the template, the pattern periphery region existing in a periphery of the pattern formed region of the template.
    Type: Grant
    Filed: March 5, 2009
    Date of Patent: July 9, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Shinji Mikami, Ikuo Yoneda
  • Patent number: 8358153
    Abstract: A magnetic circuit in one aspect comprises a plurality of tapered magnetic wires each having a relatively wide input end and a relatively narrow output end, with the output end of a first one of the tapered magnetic wires being coupled to the input end of a second one of the tapered magnetic wires. Each of the tapered magnetic wires is configured to propagate a magnetic domain wall along a length of the wire in a direction of decreasing width from its input end to its output end. In an illustrative embodiment, the magnetic circuit comprises a logic buffer that includes at least one heating element. The heating element may be controlled to facilitate transfer of a magnetic moment from the output end of the first tapered magnetic wire to the input end of the second tapered magnetic wire.
    Type: Grant
    Filed: May 19, 2010
    Date of Patent: January 22, 2013
    Assignee: International Business Machines Corporation
    Inventors: Daniel Christopher Worledge, David William Abraham
  • Patent number: 8276211
    Abstract: The invention provides methods of using positionally controlled molecular tools in an inert environment (such as ultra high vacuum) to fabricate complex atomically precise structures, including diamond, graphite, nanotubes, fullerenes, additional sets of the selfsame molecular tools, and others. Molecular tools have atomically precise tooltips which interact directly with a workpiece to add, remove, and modify specific atoms and groups of atoms, and have handles by which they can be held and positioned; tools can be recharged after use. Specific tooltips are brought into contact with and bond to specific feedstock molecules distributed on a presentation surface, and then transfer said feedstock molecules to specific atomic sites on a workpiece using mechanosynthetic chemical reactions. Specific sites on a workpiece can be made chemically reactive, facilitating the transfer of specific groups to them.
    Type: Grant
    Filed: July 21, 2011
    Date of Patent: September 25, 2012
    Inventors: Robert A. Freitas, Jr., Ralph C. Merkle
  • Patent number: 8171568
    Abstract: The invention provides methods of using positionally controlled molecular tools in an inert environment (such as ultra high vacuum) to fabricate complex atomically precise structures, including diamond, graphite, nanotubes, fullerenes, additional sets of the selfsame molecular tools, and others. Molecular tools have atomically precise tooltips which interact directly with a workpiece to add, remove, and modify specific atoms and groups of atoms, and have handles by which they can be held and positioned; tools can be recharged after use. Specific tooltips are brought into contact with and bond to specific feedstock molecules distributed on a presentation surface, and then transfer said feedstock molecules to specific atomic sites on a workpiece using mechanosynthetic chemical reactions. Specific sites on a workpiece can be made chemically reactive, facilitating the transfer of specific groups to them.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: May 1, 2012
    Inventors: Robert A. Freitas, Ralph C. Merkle
  • Patent number: 8058906
    Abstract: A non-majority magnetic logic gate device for use in constructing compact and power efficient logical magnetic arrays is presented. The non-majority magnetic logic gate device includes a substrate, symmetrically aligned magnetic islands (SAMIs), at least one misaligned magnetic island (MAMI), magnetic field inputs (MFIs), and at least one magnetic field output (MFO). The SAMIs and MAMI are electrically isolated from each other but are magnetically coupled to one another through their respective magnetic fringe fields. The MAMI is geometrically and/or angularly configured to exhibit a magnetization ground state bias which is dependent upon which direction the applied magnetic clock field is swept. Non-majority logic gates can be made from layouts containing the SAMIs and the MAMI which contain a smaller number of components as comparable majority logic gate layouts.
    Type: Grant
    Filed: June 16, 2010
    Date of Patent: November 15, 2011
    Assignee: The University of Notre Dame Du Lac
    Inventors: Michael T. Niemier, Mohammad T. Alam, Gary H. Bernstein, Xiaobo Sharon Hu, Wolfgang Porod, Edit Varga
  • Patent number: 7838851
    Abstract: The present invention provides a method and an apparatus for producing a two-dimensional patterned beam, e.g. a two-dimensional patterned and focused ion beam, for fabricating a nano-structure on a substrate with the precursor gas. In comparison with the conventional focused ion beam that is applied for fabricating a dot-like nano-structure the method is more simplified and easy to be achieved.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: November 23, 2010
    Assignee: Instrument Technology Research Center, National Applied Research Laboratories
    Inventors: Jyh-Shin Chen, Liang-Chiun Chao, Sheng-Yuan Chen, Hsiao-Yu Chou
  • Patent number: 7638383
    Abstract: Faceted catalytic dots are used for directing the growth of carbon nanotubes. In one example, a faceted dot is formed on a substrate for a microelectronic device. A growth promoting dopant is applied to a facet of the dot using an angled implant, and a carbon nanotube is grown on the doped facet of the dot.
    Type: Grant
    Filed: September 19, 2006
    Date of Patent: December 29, 2009
    Assignee: Intel Corporation
    Inventors: Been-Yih Jin, Robert S. Chau, Brian S. Doyle, Marko Radosavljevic
  • Patent number: 7462498
    Abstract: Substantially enhanced field emission properties are achieved by using a process of covering a non-adhesive material (for example, paper, foam sheet, or roller) over the surface of the CNTs, pressing the material using a certain force, and removing the material.
    Type: Grant
    Filed: June 20, 2005
    Date of Patent: December 9, 2008
    Assignee: Applied Nanotech Holdings, Inc.
    Inventors: Dongsheng Mao, Richard Fink, Zvi Yaniv