Abstract: A combination of a focusing means, and a filtering means which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed to the focusing means as a function of wavelength, optionally as an element of an ellipsometer or polarimeter system.
Abstract: Application of digital light processor (DLP) systems in an imaging ellipsometer or imaging polarimeter with a focusing means, sample and detector arranged to meet the Scheimpflug condition.
Abstract: A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.
Abstract: The present invention facilitates improvements in laser ablation of solid samples to be analyzed by an external inductively coupled plasma (ICP) emission spectrometer, ICP/mass-spectrometer (ICP-MS), or flowing afterglow (FAG) mass spectrometer (FAG-MS) for elemental analysis (ICP and ICP-MS) or molecular analysis (FAG-MS). A novel invention mirror-with-hole beam combiner eliminates chromatic aberration in the invention sample view and allows rad-hardening the laser ablation invention for use in a radiation hot cell for analysis of high activity nuclear waste. Many other novel invention rad-hardening attributes facilitate a comprehensive rad-hardened laser ablation system (the world's first).
Type:
Grant
Filed:
September 14, 2008
Date of Patent:
September 25, 2012
Inventors:
Robert C. Fry, Steven K. Hughes, Madeline J. Arnold, Michael R. Dyas
Abstract: An ellipsometer, polarimeter, reflectometer, spectrophotometer or scatterometer system for use in the UV and infrared range of wavelengths, characterized by the combination of a fiber optic capable of transmitting wavelengths from below 2.2 micron up to at least 3.5 microns, and a beam collimator formed from a combination of two off-axis concave astigmatism reducing spherical mirrors capable of operating between about 190 nm up to 5.5 microns.
Type:
Grant
Filed:
August 23, 2010
Date of Patent:
August 28, 2012
Assignee:
J. A. Woollam Co., Inc.
Inventors:
Steven E. Green, Gerald T. Cooney, Martin M. Liphardt
Abstract: A method of applying spectroscopic ellipsometry to arrive at accurate values of optical and physical properties for thin films on samples having rough or textured surfaces.
Type:
Grant
Filed:
August 3, 2010
Date of Patent:
August 21, 2012
Assignees:
J.A. Woollam Co., Inc., Board of Regents of Nebraska University
Inventors:
Craig M. Herzinger, Blaine D. Johs, Mathias M. Schubert, Tino Hofmann
Abstract: A system for and method of mapping process samples which are present in an environmental control chamber at a plurality of “X”-“Y” locations on the surface thereof, wherein the system includes a shield between windows for entering and exiting a beam of electromagnetic radiation, and a process sample.
Abstract: A system and method for improving data provided by ellipsometer, polarimeter and the like systems involving diminishing the effects of undesirable noise in the intensity of a beam of electromagnetic radiation caused by, for instance, random variations in intensity of a source provided beam of electromagnetic radiation and/or periodic or non-periodic variations in beam intensity resulting from wobble/wander of a moving sample, during investigation of the sample by the beam of electromagnetic radiation.
Abstract: A system and method for application in single-sheet-feed copiers that automatically tends to the handling of original sheets after they are sequentially and individually placed into the single sheet-feed copier, including depositing the original sheets in a receptacle in a collated manner, without the requirement of direct handling of the original sheets by a user to achieve the collation.
Abstract: Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, Mueller matrix measuring, or the like systems.
Type:
Grant
Filed:
October 19, 2009
Date of Patent:
May 29, 2012
Assignee:
J.A. Woollam Co., Inc.
Inventors:
Martin M. Liphardt, Ping He, James D. Welch
Abstract: Disclosed is a method of providing continuing education for keeping professionals aware and informed of developments in easily accessed categorized topical areas of interest utilizing an electronic network (eg. the Internet), primarily as an audio format distribution means. The method can include a client providing attestation of access and listened-to-grasping of the information over the internet, the client making permanent library copies, and the client accessing information utilizing time and/or topic tags.
Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
Type:
Grant
Filed:
June 23, 2009
Date of Patent:
May 1, 2012
Assignees:
University of Nebraska Board of Regents, J. A. Woollam Co., Inc.
Inventors:
Craig M. Herzinger, Matias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
Abstract: A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
Type:
Grant
Filed:
November 19, 2009
Date of Patent:
April 17, 2012
Assignee:
J.A. Woollam Co., Inc.
Inventors:
Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, Ronald A. Synowicki, John A. Woollam
Abstract: A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.
Type:
Grant
Filed:
July 28, 2009
Date of Patent:
March 6, 2012
Assignee:
J.A. Woollam Co., Inc.
Inventors:
Galen L. Pfeiffer, Thomas E. Tiwald, Martin M. Liphardt