Abstract: Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, or the like systems.

Abstract: A method of monitoring, in real time, the depth to which a process sample is etched by an etching procedure involving investigating a sample substrate that has a patterned surface which, when electromagnetic radiation in an appropriate wavelength range is caused to reflect from, demonstrates lateral interference effects, such that when a frequency transform is applied to spectroscopic reflection data, three distinguishable peaks occur, at least for some range of pattern depth in the sample surface.

Abstract: Maintenance of information content in a focused beam of electromagnetic radiation when the intensity thereof is attenuated by application of an aperture-like element.

Abstract: A chain saw with a centrifugal clutch in a housing made at least partially of, or which is mounted magnetized material which aides clutch operation. An elongated support extending outward from inside the housing preferably includes at least one lateral or longitudinal slit to aid with adjusting chain saw tension or braking.

Abstract: A system for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.

Abstract: A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

Abstract: A system and method which reduces change in locus of a beam of electromagnetic radiation which otherwise result from vibrations caused by operation of a motor which controls the rotation of an element which affects the beam.

Abstract: A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.

Abstract: System and method for orienting the tilt and vertical position of samples in ellipsometer and the like systems.

Abstract: Disclosed is a method of providing continuing education for keeping professionals aware and informed of developments in easily accessed categorized topical areas of interest on a for-payment basis, utilizing the Internet primarily as an audio format distribution means. The method can include a client providing attestation of access and listened-to-grasping of the information over the internet, the client making permanent library copies, and the client accessing information utilizing time and/or topic tags.

Abstract: A reflectometer, ellipsometer, polarimeter or the like system with aperture, focusing means, sample and optionally detector planes oriented so that the Scheimpflug condition is substantially met on incident and/or, optionally, reflection sides of a sample. In addition beneficial aperture hole aspect ratio and aperture plane orientation is described.

Abstract: Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having a hole therethrough with a non-unity aspect ratio.

Abstract: A three wheeled vehicle, suitable for use at highway speeds, having at least one seat and independently suspended rear wheels, each being driven via a sequence of two constant velocity universal joints, there further being a transverse mounted multiple cylinder mid-engine and transmission substantially present between the seat and centers of the rear wheels.

Abstract: An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while simultaneously de-emphasizing intensity in a first range of wavelengths, (eg. the Visible wavelengths), and simultaneously relatively emphasizing intensity in another wavelength range, (eg. UV wavelengths).

Abstract: A system and method for application in single-sheet-feed copiers that automatically tends to the handling of original sheets after they are sequentially and individually placed into the single sheet-feed copier, including depositing the original sheets in a receptacle in a collated manner, without the requirement of direct handling of the original sheets by a user to achieve the collation.

Abstract: Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal lengths do not vary more than within an acceptable amount.

Abstract: Quasi-achromatic multi-element lens(es), the elements of which are mounted with respect to one another in a temperature controlled mounting system, and the application thereof in focusing, (and/or colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively undispersed, area spot on a material system, and application thereof in ellipsometer, polarimeter and the like systems.

Abstract: System for and Method of analyzing a sample at substantially the exact same small spot thereon with a plurality of wavelengths using a lens system which provides the same focal length at at least two wavelengths at various positions thereof with respect to a sample, including analyzing data obtained at those wavelengths.

Abstract: Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems.

Abstract: A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The preferred spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.