Patents Represented by Attorney, Agent or Law Firm James D. Welch
  • Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence
    Patent number: 7304737
    Abstract: Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.
    Type: Grant
    Filed: August 3, 2006
    Date of Patent: December 4, 2007
    Assignee: J.A. Woollam Co., Inc
    Inventors: Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, John A. Woollam
  • System for sequentially providing aberation corrected electromagnetic radiation to a spot on a sample at multiple angles of incidence
    Patent number: 7304792
    Abstract: A system for sequentially providing electromagnetic radiation to a spot on a sample at different angles of incidence, and after reflection therefrom into a detector. The system includes a plurality of spherical mirrors, and a refractive element for correcting aberration.
    Type: Grant
    Filed: April 5, 2006
    Date of Patent: December 4, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, John A. Woollam
  • Control of uncertain angle of incidence of beam from Arc lamp
    Patent number: 7301631
    Abstract: A system for stabilizing the angle of incidence a beam of electromagnetic radiation from a vertically oriented Arc lamp onto a horizontally oriented sample surface.
    Type: Grant
    Filed: March 21, 2005
    Date of Patent: November 27, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Ping He, Galen L. Pfeiffer, Steven E. Green, Christopher A. Goeden, Martin M. Liphardt
  • Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
    Patent number: 7295313
    Abstract: Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data over an intermediate wavelength band range around a pass or reject band, to monitor and/or control fabrication of multiple layer high/low refractive index band-pass, band-reject and varied attenuation vs. wavelength thin film interference filters, either alone or in combination with transmissive non-ellipsometric electromagnetic beam turning point vs. layer data obtained at an essentially normal angle of incidence.
    Type: Grant
    Filed: September 17, 2004
    Date of Patent: November 13, 2007
    Assignee: J.A. Wollam Co., Inc.
    Inventors: Blaine D. Johs, Jeffrey S. Hale, John A. Woollam, Craig M. Herzinger
  • Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal from a substrate surface
    Patent number: 7283234
    Abstract: Improved methodology for monitoring deposition or removal of material to or from a process and/or wittness substrate which demonstrates a negative e1 at some wavelength. The method involves detection of changes in P-polarized electromagnetism ellipsometric DELTA at SPR Resonance Angle-of-Incidence (AOI) to monitor deposition of and/or removal of minute amounts of materials onto, or from, said process and/or witness substrate. The methodology can optionally monitor ellipsometric PSI, and involves simultaneously or sequentially applying non-P-polarized electromagnetism at the same angle of incidence, or electromagnetic radiation of any polarization at a different angle-of-incidence and wavelength to the process or wittness substrate and application of conventional ellipsometric analysis.
    Type: Grant
    Filed: December 16, 2004
    Date of Patent: October 16, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, Blaine D. Johs, Thomas E. Tiwald, Martin M. Liphardt, James D. Welch
  • Accurate determination of refractive indices of solid, fluid and liquid materials
    Patent number: 7280194
    Abstract: Systems and methodology for determining not only precise and repeatable results, but accurate values of the refractive index of solids, fluids and liquids.
    Type: Grant
    Filed: November 30, 2004
    Date of Patent: October 9, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Craig M. Herzinger, Steven E. Green, Gregory K. Pribil
  • Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
    Patent number: 7277171
    Abstract: A substantially self-contained “on-board” material system investigation system functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a large sample, including the capability to easily and conveniently change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface.
    Type: Grant
    Filed: April 14, 2005
    Date of Patent: October 2, 2007
    Assignee: J.A. Woollan Co., Inc.
    Inventors: Blaine D. Johs, Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch
  • Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems
    Patent number: 7274450
    Abstract: A sample sequestering system which allows access to a subspace in a chamber encompassed generally enclosed space, for use in entering and removing a sample when the subspace is opened to atmosphere. Sufficient purge gas is flowed from within the generally enclosed space into the subspace discourage atmospheric contaminates from entering into the subspace. Contained within the generally enclosed space is a spectrophotometer, ellipsometer or polarimeter or the like system which operates at wavelengths, (eg. UV), which are adversely affected, (eg. absorbed), by typical atmospheric contents.
    Type: Grant
    Filed: May 28, 2004
    Date of Patent: September 25, 2007
    Assignee: J.A. Woollam Co., Inc
    Inventors: Steven E. Green, Ping He, Galen L. Pfeiffer, Brian D. Guenther, Gerald T. Cooney, John A. Woollam, Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger
  • General virtual interface algorithm for in-situ spectroscopic ellipsometric data analysis
    Patent number: 7268876
    Abstract: A method of characterizing the outermost material on an article manufactured by deposition or removal of material from its surface, which requires no prior knowledge of the composition of the article.
    Type: Grant
    Filed: November 17, 2003
    Date of Patent: September 11, 2007
    Assignee: J.A. Woollam Co., Inc
    Inventor: Blaine D. Johs
  • Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like
    Patent number: 7265838
    Abstract: Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system involving regression based methodology for evaluating and compensating the effects of the presence electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.
    Type: Grant
    Filed: August 24, 2004
    Date of Patent: September 4, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch
  • Horizontal attenuated total reflection system
    Patent number: 7265839
    Abstract: Horizontally oriented attenuated total reflection (HATR) system applied in spectroscopic ellipsometer or polarimeter systems, and methodology of use.
    Type: Grant
    Filed: March 30, 2006
    Date of Patent: September 4, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Thomas E. Tiwald
  • System for implementing variable retarder capability in ellipsometer, polarimeter or the like systems
    Patent number: 7265835
    Abstract: A system for implementing Berek-type variable retarder plate tipping capability in two orthogonal directions via tipping about a single axis, in combination with a means for rotating the orientation of the axis, having application in ellipsometer and polarimeter and the like systems.
    Type: Grant
    Filed: March 14, 2006
    Date of Patent: September 4, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Craig M. Herzinger, Galen L. Pfeiffer
  • Ellipsometer or polarimeter and the like system with multiple detector element detector in environmental control chamber including secure sample access
    Patent number: 7253900
    Abstract: A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of wavelengths and a detector with multiple detector elements for simultaneous monitoring of a number of wavelengths in an environmental control chamber which optionally provides for secured sample entry, and methodology of use.
    Type: Grant
    Filed: October 9, 2004
    Date of Patent: August 7, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, Gregory K. Pribil, Martin M. Liphardt, James D. Welch
  • Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
    Patent number: 7245376
    Abstract: Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
    Type: Grant
    Filed: November 22, 2005
    Date of Patent: July 17, 2007
    Assignee: J. A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, John A. Woollam
  • Method of analysis of multiple layer samples
    Patent number: 7239391
    Abstract: Spectroscopic ellipsometer system(s) mediated methodology for quantifying layer defining parameters in mathematical models of samples which contain a plurality of layers of different materials, at least some of which are absorbing of electromagentic radiation, wherein an acquired data set is not sufficient to allow definite one for one parameter evaluation, and wherein a global fit procedure can be applied to obtain good parameter starting values for use in a parameter evaluating regression procedure.
    Type: Grant
    Filed: April 2, 2005
    Date of Patent: July 3, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Ronald A. Synowicki, Craig M. Herzinger
  • Sample orientation system and method
    Patent number: 7230699
    Abstract: Disclosed is a system comprising a stage with “X”, “Y” and “Z” translation and “X”, “Y” and optionally “Z” axes rotation capability, in combination with interrogation and monitoring means which act in functional combination to orient the surface of a sample so as to set an intended oblique approach of an electromagnetic beam with respect to a sample surface at a monitored location thereon.
    Type: Grant
    Filed: September 2, 2003
    Date of Patent: June 12, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He
  • System for visually monitoring pressure in an enclosed space
    Patent number: 7213464
    Abstract: A compliant balloon having an outer reflective surface which is positioned next to a transparent window which has an opaque element thereon, the reflection of the opaque element from the outer reflective surface of the balloon being visible when the outer reflective surface is not forced very near or against said opaque element on said transparent window, but prevented when said front reflective surface is forced very near or against the opaque element.
    Type: Grant
    Filed: October 21, 2005
    Date of Patent: May 8, 2007
    Inventor: Jon E. Traudt
  • Broadband ellipsometer or polarimeter system including at least one multiple element lens
    Patent number: 7215424
    Abstract: Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively undispersed, area spot on a material system.
    Type: Grant
    Filed: April 12, 2005
    Date of Patent: May 8, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, John A. Woollam
  • Control of beam spot size in ellipsometer and the like systems
    Patent number: 7215423
    Abstract: System and methodology for controlling a beam spot size where it impinges onto a sample, and/or discriminant selection and analysis of data from detector elements in a two dimensional detector array which correspond to identified regions on a sample.
    Type: Grant
    Filed: October 10, 2004
    Date of Patent: May 8, 2007
    Assignee: J.A. Woollam Co., Inc
    Inventors: Martin M. Liphardt, Blaine D. Johs, John A. Woollam, James D. Welch
  • Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of material deposited from a fluid
    Patent number: 7209234
    Abstract: A combined ellipsometer and oscillator system applied to a chamber for containing fluid, and method of decorrelated determination of thickness and optical constants of depostable materials present in a fluid. In use the ellipsometer determines the product of thickness and optical constant, and the oscillator system changes frequency of oscillation proportional to the thickness of material deposited upon a surface of an element therein.
    Type: Grant
    Filed: April 14, 2006
    Date of Patent: April 24, 2007
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, James D. Welch