Abstract: An optical system includes a first lens group having a positive refractive power, a second lens group having a negative refractive power, and a third lens group having a positive refractive power. The third lens group comprises at least one positive lens and at least one negative lens. The second lens group is movable along a direction of an optical axis, and the third lens group is movable in a direction substantially perpendicular to the optical axis. The optical system satisfies:0.25<F1/FT<0.46where FT is the focal length of the optical system, and F1 is the focal length of the first lens group.

Abstract: A projection exposure apparatus including an irradiation optical system including a light source and irradiating a mask with irradiation light beams, a projection optical system for projecting an image of a pattern of the mask on a substrate, a plurality of first fly-eye type optical integrators each having an emission side focal plane disposed on a Fourier transformed surface with respect to the pattern of the mask in the irradiation optical system or on a plane adjacent to the same and having a center located at a plurality of positions which are eccentric from the optical axis of the irradiation optical system, a plurality of second fly-eye type optical integrators each having an emission side focal plane disposed on a Fourier transformed plane with respect to the incidental end of each of a plurality of the first fly-eye type optical integrators or on a plane adjacent to the same and being disposed to correspond to a plurality of the first fly-eye type optical integrators, and a light divider for dividing

Abstract: A camera capable of operating in a red-eye prevention mode. The camera has an electronic flash device which is activated by a drive circuit in synchronization with the exposure. The electronic flash device also serve as a pre-light-emission device capable of performing pre-light-emission for the purpose of preventing red-eye effect. When it is judged from the photographing condition that red-eye effect may occur, a controller activates the electronic flash device to effect a pre-light-emission for reducing the size of pupils of eyes of a person to be photographed, before the main flashing which is executed in synchronization with the exposure.

Abstract: An electric revolver apparatus of a microscope comprises a revolver holding a plurality of objective lenses, a drive device for driving and braking the revolver based on a command signal from the outside of the electric revolver apparatus, a detection device for detecting a predetermined amount of rotation of the revolver and outputting a detection signal to brake the drive device, and a delay circuit for delaying the detection signal for a predetermined period of time and outputting it to the outside to delay the brake starting time of the drive device based on the command signal from the outside.

Abstract: A particle inspecting apparatus capable of detecting only particles without depending on conditions such as a density, a configuration, etc. of an original pattern of an object to be inspected is provided. The apparatus includes a light irradiating device for irradiating the inspected object with a beam of light and a condensing optical system for condensing the beam from the inspected object. The apparatus also includes a light limiting device, disposed in the vicinity of a Fourier transform plane for the inspected object in the condensing optical system, for admitting a passage of the beam corresponding to only a part of a Fourier transform pattern of the beam from the inspected object, a relative position shiftable device for shifting relative positions of the Fourier transform pattern of the beam from the inspected object and the light limiting device and a detecting device for detecting the particle on the basis of the beam passing through the light limiting device.

Abstract: In a rectilinear guide apparatus wherein a female guide is disposed outside a male guide and four rows, for example, of rollers are interposed between the two guides and the male guide is rectilinearly movable relative to the female guide, rollers in two of the four rows are oriented in the same direction and all rollers in the other two rows are inclined so as to be substantially orthogonal to the rotation center axes of the rollers in the first-mentioned two rows. This rectilinear guide apparatus provides an effect similar to a combination of two rows of cross rollers, but provides higher strength and simplifies working of the rolling surfaces of the rollers.

Abstract: A camera capable of operating in a red-eye prevention mode. The camera has an electronic flash device which is activated by a drive circuit in synchronization with the exposure. The electronic flash device also serve as a pre-light-emission device capable of performing pre-light-emission for the purpose of preventing red-eye effect. When it is judged from the photographing condition that red-eye effect may occur, a controller activates the electronic flash device to effect a pre-light-emission for reducing the size of pupils of eyes of a person to be photographed, before the main flashing which is executed in synchronization with the exposure.

Abstract: A zoom lens comprises a first lens group having a positive refracting power, a second lens group having a negative refracting power, and a third lens group having a positive refracting power, disposed in the named order from the object side, wherein the first lens group has a 1-1 lens group having a negative refracting power and a 1-2 lens group having a positive refracting power, disposed in the named order from the object side, wherein zooming from a wide angle end to a telephoto end is effected by increasing a gap between the first lens group and the second lens group and reducing a gap between the second lens group the third lens group, while fixing the first lens group, wherein focusing from infinity to near is effected by moving the 1-1 lens group to the object side; andwherein the following condition is satisfied:0.5<f1/fw<2.

Abstract: An optical system includes, in the following order from the object side, a first lens unit having a positive refractive power, a second lens unit having a negative refractive power, a third lens unit having a negative refractive power, a fourth lens unit having a positive refractive power, a fifth lens unit having a positive refractive power, and a sixth lens unit having a negative refractive power. At least the first and sixth lens units move toward the object side upon changing the focal length from the maximum wide-angle state to the maximum telephoto state in such a way that the gap between the first and second lens units increases, the gap between the third and fourth lens units decreases, and the gap between the fifth and sixth lens units decreases.

Abstract: A zoom lens system with a function of reducing image vibration is constituted of, in the order from an object side, a first lens group having a positive refracting power; a second lens group being provided so as to be shiftable substantially in a direction perpendicular to an optical axis and having a negative refracting power; and a third lens group having a positive refracting power. When varying the focal length of the zoom lens system from wide angle end to telephoto end, the first and third lens groups are moved on the optical axis toward the object side. The zoom lens system further has a vibration detecting device for detecting vibration of the zoom lens system; a drive device for driving the second lens group; and a control device for controlling the drive device based on the output of the vibration detecting device.

Abstract: A camera capable of automatic film rewinding into the magazine, comprises an information recording device for recording at least information on use in an information recording portion formed at a predetermined position of the magazine loaded in the magazine chamber of the camera, an information detecting means capable of detecting recorded information of the magazine when it is loaded, a prohibition device for prohibiting the photographing operation in response to a detection signal corresponding to information, indicating that all the film is already used, detected by the information detecting device and a control device for controlling the information recording device, information detecting device and prohibition device in such a manner that the detection by the information detecting device is conducted prior to the recording of information of use by the information recording device, and that the photographing operation is prohibited in response to the detection of information indicating that all the film i

Abstract: A stage device comprises a base, a movable member movably provided on the base, a damping system for giving a damping force to the movable member, a position detector for detecting a position of the movable member with respect to the base, a deviation detector for obtaining a deviation of a position of the movable member from a target position of the movable member on the base on the basis of a result of the detection by the position detector and a damping control system for changing the damping force in accordance with the deviation detected by the deviation detector.

Abstract: Disclosed is an image position correcting optical system, comprising, sequentially from an object side, a first lens group having positive refracting power and a second lens group having negative refracting power. The first lens group is fixed. The second lens group is so provided as to be movable along an optical axis. A part of lens subunits of lens elements constituting the first lens group is so provided as to be movable in a direction across the optical axis. A positive lens element of the lens elements constituting the first lens group satisfies the following conditions: ##EQU1## where n.sub.d is the refractive index with respect to the d-line, n.sub.F is the refractive index with respect to the F-line, n.sub.C is the refractive index with respect to the C-line, .nu..sub.d is the Abbe number with respect to the d-line, and .theta..sub.FCd is the partial dispersion ratio expressed by (n.sub.d -n.sub.C)/(n.sub.F -n.sub.C).

Abstract: A photographing information setting apparatus for a camera has a capability of improving the operativity in setting photographing information by displaying all of the photographing information or a part thereof contained in a photographing information group when such a group is selected by an information group selecting device. In selecting photographing information, a photographing information group containing exposing modes, shutter speeds, and others is selected by the information group selecting device and at least two pieces of photographing information contained in this photographing information group are displayed in a display. For example, when a photographing information group regarding exposing modes is selected, the exposing modes PM, P, S, A and M are displayed in the display.

Abstract: In an exposure method of illuminating a pattern formed on a mask with illumination light from an illumination optical system, and projecting/exposing an image of the pattern on a photosensitive substrate through a projection optical system, the pattern includes a transmission portion having a transmittance of about 1 with respect to the illumination light and a phase shift transmission portion which provides a phase difference of about (2n+1).pi.(n is an integer) with respect to the light transmitted through the transmission portion, and has a pattern width not more than a resolving limit of the projection optical system.

Abstract: A camera includes a photo-taking lens, an automatic focus adjusting device for effecting the automatic focus adjustment of the photo-taking lens, an eye-gaze detecting device for detecting the photographer's eye-gaze position in a finder field corresponding to a photographing picture plane, and producing an eye-gaze detection signal corresponding to the eye-gaze position, a focus adjustment signal producing device for outputting a plurality of focus adjustment signals corresponding to a plurality of detection areas in the photographing picture plane, and a control signal producing device for producing a control signal for controlling the automatic focus adjusting means, on the basis of the eye-gaze detection signal and the focus adjustment signals.

Abstract: A real-image zoom finder has an objective lens having a positive refractive power, and an eyepiece lens which is used for observing a real image of an object formed via the objective lens and has a positive refractive power. The objective lens includes, in the order from the object side, a first lens unit having a negative refractive power, a second lens unit having a positive refractive power, a third lens unit having a negative refractive power, and a fourth lens unit having a positive refractive power, and attains zooming by moving at least the second lens unit along the optical axis. The objective lens satisfies the following conditions:-0.6<(R2+R1)/(R2-R1)<00.3<.vertline.f3.vertline./fT<0.

Abstract: A catadioptric reduction projection optical system having a first lens unit having negative refractive power and widening a light beam from a reticle, a prism type beam splitter for transmitting therethrough a light beam from the first lens unit, a concave reflecting mirror for returning the light beam emerging from the beam splitter to the beam splitter while converging it, and a second lens unit having positive refractive power and converging the light beam returned to the beam splitter and reflected by the beam splitter, and forming the reduced image of a pattern on the reticle on a wafer.

Abstract: An internal-circulation-type ball screw having simple construction and high productivity is provided. A ball nut has one or more through holes and one or more constrictions, which are formed around its outer peripheral surface so as to span the openings of respective through holes. One or more deflectors are put in respective through holes and fixed by fitting corresponding deflector-locking springs onto the constrictions. Each deflector-locking spring is a thin plate spring having a substantially C-shaped cross section with a concave portion in the middle. When the deflector-locking spring is fitted onto the constriction, the concave portion thereof presses the deflector in the through hole toward the threaded shaft. Thus, the deflector is fixed to the ball nut.

Abstract: A camera-shake display device comprises a detection unit for determining whether a photographing lens detachably mounted on a camera body is provided with a compensation optical system for compensating camera-shake upon reception of a signal representing the camera-shake amount corresponding to a displacement of the camera body, and a display unit for displaying whether the camera-shake compensation is attainable or not in accordance with the output of the detection unit.