Patents Assigned to Carl Zeiss Industrielle Messtechnik GmbH
  • Patent number: 11592278
    Abstract: A method is described for determining a relative position of an axis of rotation of a rotary table of a coordinate measuring machine. The rotary table has or forms a reference element that is arranged eccentrically in relation to the axis of rotation. The method includes a measuring step including performing a rotary movement of the rotary table, and producing measuring points that encode a position of the reference element by a sensor of the coordinate measuring machine during the rotary movement. The method includes a determining step including determining the relative position of the axis of rotation of the rotary table based on the measuring points.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: February 28, 2023
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Walter Puntigam, Niko Maier, Mark Herter, Rainer Sagemüller, Kai Schäffauer, Ralf Bernhardt
  • Patent number: 11573076
    Abstract: An apparatus for adjusting a beam path for tracking an object includes an illumination unit to generate an illumination light beam, an optical unit with a beam expander optical unit and a beam deflection unit, the beam expander optical unit being configured to divergently expand the illumination light beam and the beam deflection unit being configured to deflect the illumination light beam spatially about two different axes of rotation, a detector unit to capture a light beam reflected by the object in response to an illumination by the illumination light beam and to generate a measurement signal, an evaluation and control unit to evaluate the measurement signal and configured to determine a manipulated variable for setting an effective focal length of the beam expander optical unit and/or for setting a spatial alignment of the beam deflection unit based on the information item in respect of the illumination of the object.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: February 7, 2023
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Florian Rettich, Wolfgang Högele, Volker Rasenberger, Thomas Mayer
  • Patent number: 11554494
    Abstract: A device for acquiring a position and orientation of an end effector of a robot is provided. The robot has a robot arm with axes coupled to one another by joints. The end effector is arranged on an end of the robot arm, optical markers are arranged on first and second axes, and a number of joints between the end effector and the first axis is lower than a number of joints between the end effector and the second axis. An optical sensor acquires image data of the optical markers. A storage device stores a kinematic model of the robot arm. An evaluation device, in a first case, determines a first position of a first optical marker and the position and orientation of the end effector and, in a second case, a second position of a second optical marker and the position and orientation of the end effector.
    Type: Grant
    Filed: October 5, 2019
    Date of Patent: January 17, 2023
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Heiko Goller, Peter Hofmann, Ivan Kausz, Gernot Sattelmayer
  • Patent number: 11543230
    Abstract: An articulating probe for a measurement device includes a base platform, a rotor platform that is movable relative to the base platform, and a sensor element coupled to the rotor platform. The rotor platform is coupled to the base platform via a spherical parallel kinematic system.
    Type: Grant
    Filed: June 7, 2020
    Date of Patent: January 3, 2023
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventor: Dominik Seitz
  • Patent number: 11504855
    Abstract: A system for determining the position of a movable object in space includes a marker which is to be applied to the object. The marker has a surface which is subdivided into a plurality of individual fields. The fields each have a statistical noise pattern. The system also includes an image capture unit which is remote from the object and is arranged to capture an image of the marker. The system further includes an image evaluation unit which stores a reference image of the noise patterns and is designed to locate at least one of the fields in the currently captured image of the marker by comparison with the reference image in order to determine a current position of the marker in space. There are corresponding methods for determining a position the object.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: November 22, 2022
    Assignees: Carl Zeiss SMT GmbH, Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Jan Horn, Nils Haverkamp, Marc Schneider, Tanja Teuber, Lars Omlor
  • Patent number: 11506485
    Abstract: An optical system includes an illumination module configured to illuminate a sample object with at least one angle-variable illumination geometry. The optical system includes an imaging optical unit configured to produce an imaged representation of the sample object that is illuminated with the at least one angle-variable illumination geometry on a detector. The optical system includes the detector, which is configured to capture at least one image of the sample object based on the imaged representation. The optical system includes a controller configured to determine a result image based on a transfer function and the at least one image. A method includes illuminating a sample object with at least one angle-variable illumination geometry, imaging the sample object on a detector, based on the imaged representation, capturing at least one image of the sample object, and, based on a transfer function and the at least one image, determining a result image.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: November 22, 2022
    Assignees: Carl Zeiss Industrielle Messtechnik GmbH, Carl Zeiss Microscopy GmbH
    Inventors: Lars Stoppe, Thomas Milde, Michael Totzeck
  • Patent number: 11499822
    Abstract: A calibration standard for geometry measurement calibration of a measurement system operating by tactile and/or optical means is provided which includes a flat surface having a structure that is capturable by a measurement system operating by optical and/or tactile means. The structure has a changeable periodicity that is capturable by a sensor in a first direction and/or in a second direction and for a change in the periodicity to code position information and/or direction information. In addition, a method for calibrating a coordinate measuring machine operating by tactile and/or optical means and to a coordinate measuring machine for such a method or having such a calibration standard is provided.
    Type: Grant
    Filed: March 26, 2021
    Date of Patent: November 15, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Philipp Mayinger, Tobias Held
  • Patent number: 11493899
    Abstract: A method for measuring a workpiece by a measurement device includes capturing an identification feature of a workpiece by a capture device, determining an item of identity information relating to the workpiece, comparing the identity information with identity information relating to a plurality of workpieces from a database which stores the identity information relating to the plurality of workpieces, identifying the workpiece in the database, and/or characterizing the workpiece from the comparison with the database, determining a measurement sequence stored in the database for the identified workpiece, or suggesting features or steps of a measurement sequence for the identified workpiece, and measuring the workpiece in accordance with the measurement sequence in the measurement device.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: November 8, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Matthias Riek, Thomas Mueller
  • Patent number: 11489466
    Abstract: The invention relates to a method for checking an electrical value of an electric machine, in particular an electric machine of a coordinate measuring device. The electric machine has an electric drive comprising a stator and a rotor. The method includes the steps of: detecting a value of a drive current delivered to the electric drive for driving the rotor, detecting a measured value of an electrical input variable of the electric machine, determining a calculated value of the electrical input variable on the basis of the detected value of the drive current and on the basis of a performance model of the electric machine, and determining a comparison value on the basis of the detected measured value and the calculated value of the electrical input variable, in order to check the detected value of the drive current.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: November 1, 2022
    Assignee: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
    Inventors: Guenter Grupp, Otto Ruck, Peter Uhl, Thomas Maier
  • Patent number: 11480419
    Abstract: A coordinate measuring machine and a method for operating a coordinate measuring machine, and a rotary table module for a coordinate measuring machine with a rotary table for receiving a workpiece and a rotary table block are provided. The rotary table is supported on a rotary table side rotatably about a rotary table axis. The rotary table block has, opposite the rotary table side of the rotary table block, a bottom side with which the rotary table module can be supported on a measurement table of the coordinate measuring machine. The rotary table block has a further supporting side with which the rotary table block is supportable on the measurement table of the coordinate measuring machine and which differs from the bottom side in its alignment. The rotary table module includes a pose capturing device for the determination of whether the rotary table block is supported on the bottom side.
    Type: Grant
    Filed: March 3, 2021
    Date of Patent: October 25, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Rainer Sagemueller, Johannes Geiger, Sabrina Rau, Peter Uhl
  • Patent number: 11454498
    Abstract: A coordinate measuring system includes a scanning module having a laser line scanner and a projection device. The laser line scanner projects a laser line onto a surface of a workpiece and produces scan data from a reflection of the laser line. The projection device and/or the laser line scanner project three optical markers onto the surface of the workpiece, at least one of the three markers being disposed on the laser line and at least one of the three markers being at a distance from the laser line. The coordinate measuring system includes an optical sensor capturing image data of the three optical markers and an evaluation device determining a position and an orientation of the coordinate system of the laser line scanner in the coordinate system of the optical sensor based on the image data of the optical sensor and the scan data of the laser line scanner.
    Type: Grant
    Filed: October 31, 2019
    Date of Patent: September 27, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Andrzej Grzesiak, Heiko Goller, Thomas Mayer
  • Patent number: 11454493
    Abstract: A position of a movable object is determined with a capture structure having a profile of an optical property that varies along a surface of the capture structure such that the profile corresponds to a progression of numerical values with local maxima and local minima on an ordered scale of the numerical values, and which is interpretable as a first mathematical function of the location. The optical property varies such that a second mathematical function of the location has an absolute maximum corresponding to a maximum value of the optical property. The optical property has assigned corresponding numerical values such that the progression thereof has the local maxima and the local minima and corresponds to the first mathematical function of the location. The position of the movable object is determined by a frequency analysis of the progression of the numerical values of the second mathematical function of the location.
    Type: Grant
    Filed: January 31, 2021
    Date of Patent: September 27, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventor: Nils Haverkamp
  • Patent number: 11441891
    Abstract: A coordinate measuring machine for determining dimensional and/or geometric properties of a measurement object has a measurement element, which defines a reference point and is movable along multiple movement axes relative to a measurement object receptacle. The movement axes include multiple linear axes and at least one axis of rotation. In order to control the measurement element relative to a measurement object, desired positions of the reference point and parameters defining limit values for permissible velocities and/or accelerations are provided. Multiple individual temporal sequences of respective individual axial positions for the plurality of movement axes are determined as a function of the desired positions of the reference point and the parameters. The individual temporal sequences each have individual time intervals between successive individual axial positions.
    Type: Grant
    Filed: April 23, 2020
    Date of Patent: September 13, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Ulrich Staaden, Walter Puntigam, Franziska Schoenig
  • Patent number: 11423566
    Abstract: A method and a system for determining a 6-DOF-pose of an object in space use at least one marker attached to the object and a plurality of cameras. Perspectives of the cameras are directed to a common measuring space in which the object is positioned. At least one camera from the plurality of cameras is movable such that the movable camera can be adjusted with respect to the object. At least one of the cameras captures an image of said marker attached to the object. Based on the at least one captured image, spatial parameters representing the 3D-position or the 6-DOF-pose of the marker and, consequently, the 6-DOF-pose of the object in space can be determined.
    Type: Grant
    Filed: November 20, 2019
    Date of Patent: August 23, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Thomas Mayer, Heiko Goller, Nils Haverkamp, Andrzej Grzesiak
  • Patent number: 11391566
    Abstract: A rotary table for a coordinate measuring apparatus for receiving and mounting a workpiece to be measured is provided. The rotary table has a rotatable main rotary table body and a clamping chuck, which is arranged on the rotatable main rotary table body and which has a clamping chuck receptacle for receiving the workpiece to be measured, the rotary table also having at least one master, which is arranged outside the clamping chuck receptacle, and/or at least one fastener for a master, which is provided in addition to the clamping chuck receptacle. In addition, a coordinate measuring apparatus with a corresponding rotary table is provided.
    Type: Grant
    Filed: September 29, 2017
    Date of Patent: July 19, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Rainer Sagemueller, Christian Bayer
  • Patent number: 11371647
    Abstract: A method and an apparatus for isolating a vibration of a positioning device are provided. The apparatus includes a base plate for the positioning device, at least one active bearing element for bearing the base plate on/at a foundation and at least one evaluation and control device. The apparatus includes at least one means for determining a foundation movement-dependent quantity, wherein the active bearing element is controllable by the at least one control and evaluation device on the basis of the foundation movement-dependent quantity.
    Type: Grant
    Filed: February 28, 2020
    Date of Patent: June 28, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventor: Philipp Mayinger
  • Patent number: 11371828
    Abstract: A coordinate measuring machine has a measurement head having a point measurement device which measures first coordinates of only a single point on the surface of a workpiece at a given time. An area measurement device records images of a reference surface. A displacement device displaces the measurement head and/or the workpiece such that they assume different relative positions with respect to one another. An evaluation device calculates a shift between images that the area measurement device has recorded of the reference surface at different times at different relative positions, with a stitching algorithm. Based on this, second coordinates of the measurement head, which are defined relative to the reference surface, are determined. By linking the first coordinates with the second coordinates, third coordinates are determined, which define the points on the surface of the workpiece measured by the point measurement device relative to the reference surface.
    Type: Grant
    Filed: April 28, 2021
    Date of Patent: June 28, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Nils Haverkamp, Dominik Seitz, Tanja Teuber, Lars Omlor
  • Patent number: 11346661
    Abstract: A method for creating a measurement protocol in a computer, such as the measurement computer of a coordinate-measuring machine or a computer remote therefrom, includes: providing data necessary for creating a measurement protocol generated on the basis of a measurement sequence by the coordinate-measuring machine; providing specification data specifying predefined conditions under which a measurement sequence should be performed and/or specifying predefined conditions under which examination features should be evaluated; checking the data necessary for creating a measurement protocol as to whether the predefined conditions under which the entire measurement sequence should be performed were met and/or as to whether the predefined conditions under which individual examination features to be examined should be evaluated were met; and, creating a measurement protocol in the form of an electronic document, in which compliance and/or non-compliance with the conditions in accordance with the specification data is d
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: May 31, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Robert Roithmeier, Udo Kirin
  • Patent number: 11331055
    Abstract: A computed tomography apparatus and a method for influencing a position of a focal spot in an x-ray radiation source having a centering device to center an electron beam and a focus are provided. The method includes positioning a reference object into a beam path of x-ray radiation between the x-ray radiation source and an x-ray radiation detector, the x-ray radiation detector having detector elements to generate an x-ray image, capturing an x-ray image of the reference object at different powers, reducing a focal spot displacement occurring at the different powers based on a comparison of the x-ray images captured at the different powers with one another, by setting at least one altered electric current to operate the centering device or the centering devices of the x-ray radiation source, and operating the computed tomography apparatus with the altered electric current, by which the focal spot displacement was reduced.
    Type: Grant
    Filed: September 14, 2019
    Date of Patent: May 17, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventor: Marco Erler
  • Patent number: 11302042
    Abstract: A method for correcting nonlinearities of image data of at least one radiograph and a computed tomography device are provided. The method includes obtaining image data of the at least one radiograph by irradiating an object with polychromatic invasive radiation and by detecting attenuated radiation that has passed through the object, utilizing a plurality of correction functions for correction purposes, said correction functions each being determined by the parameter value of at least one correction parameter, and applying an ascertainment method to ascertain the parameter value or the parameter values of the correction function used for correction purposes, said ascertainment method being determined by the parameter value of an ascertainment parameter or the parameter value sets of a plurality of ascertainment parameters.
    Type: Grant
    Filed: June 29, 2019
    Date of Patent: April 12, 2022
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventor: Martin Krenkel