Abstract: Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or distance sensor, such that a position of the valve closure and/or of the at least one adjustment element relative to a zero position, in particular an open position or closed position of the vacuum valve, can be measured.

Abstract: A vacuum valve including a housing, a closure unit with two valve plates, supported by a valve rod, and a carrier piece connected rigidly to the valve rod, a transmission unit, a drive unit with a base body and an actuator, a longitudinal linear guide, by which the transmission unit is guided parallel to a longitudinal adjusting direction relative to the base body, an oblique linear guide, by which the carrier piece is guided parallel to an oblique adjusting direction relative to the transmission unit, a spring acting between the transmission unit and the carrier piece, a stop device which blocks adjustment of the closure unit in the longitudinal adjusting direction in a middle position thereof, and a blocking unit, which in the locked state blocks an adjustment of the closure unit situated in the middle position counter to the longitudinal adjusting direction and, in the release state, allows adjustment.

Abstract: A sealing ring made of an elastomer material is fitted on the front side of an essentially rectangular valve plate for sealing a vacuum valve opening. On the rear side, the valve plate has a recess with an undercut boundary wall which forms a sloping surface which, for fastening the valve plate on a carrier, is braced with a sloping surface of the carrier. The valve plate has a lug which protrudes beyond the rear side thereof and has a through-passage bore through which a clamping screw is screwable into a threaded bore of the carrier, for bracing the valve plate sloping surface with the carrier sloping surface. In a side view of the valve plate, seen parallel to the longitudinal sides, the straight-line extension of the longitudinal center axis of the through-passage bore runs past the sloping surface at a distance from the rear side of the valve plate.

Abstract: An arrangement with a valve having a valve housing and a closure member mounted for movement in an interior space of the valve housing between a closed position and an open position by a valve drive. The closure member closes valve housing openings in the closed position and opens them in the open position. The arrangement has an attachment part with an attachment part housing and a push tube, and the push tube is mounted displaceably in the attachment part housing. The attachment part housing and the push tube together enclose a line cavity of the attachment part for conducting a fluid through the attachment part. The attachment part housing is fastened on the outside to the valve housing, and the push tube can be pushed through the interior space of the valve housing when the closure member is in the open position.

Abstract: A vacuum valve having a valve body, a closure member, a valve rod which supports the closure member, a guide piece by which the valve rod is movably guided parallel to a longitudinal displacement direction, a longitudinal travel drive by which the valve rod is displaceable with respect to the guide piece parallel to the longitudinal displacement direction, a transverse travel drive, and a slide part which is movable by the transverse travel drive, is guided by a primary linear guide to be movable with respect to the valve body, and is guided by a secondary linear guide to be movable with respect to the guide piece. The primary and secondary linear guides each run at an angle of less than 45° with respect to the longitudinal displacement direction, and the primary linear guides form an angle of more than 3° and less than 45° with the secondary linear guides.

Abstract: An assembly having at least two chambers (1, 2) and at least one transfer valve (3), wherein: a valve housing interior (9) of the transfer valve (3) is separated from each the chamber interiors (4, 5) of the chambers (1, 2) by respective partitions (12, 13) and a transfer opening (14, 15) for the feeding through of objects and/or fluids is formed in each of the partitions (12, 13) and in addition to the transfer opening (14, 15) in question an additional opening (16, 17) is arranged in each of the partitions (12, 13). The additional openings (16, 17) can be closed by respective switching valves (18, 19) of the assembly and, in an open state of the respective switching valves (18, 19), directly fluidically connect the valve housing interior (9) to the respective chamber interiors (4, 5) adjoining the respective partitions (12, 13).

Abstract: A seal support ring (1) for a valve (2), particularly a vacuum valve, which has a throughflow opening (3) and a basic body (4), which annularly surrounds the throughflow opening, and a fastener arrangement (5) for fastening the seal support ring to a valve housing (6) of the valve. The basic body has a first side (7) on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring (8) made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall (9) is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side (10) of the basic body (4) opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.

Abstract: Disclosed is a vacuum valve having at least one acoustic sensor, the acoustic sensor being designed such that information can be generated by the acoustic sensor via a structure-borne sound wave, as a measuring signal, impacting on at least one component of the vacuum valve.

Abstract: A vacuum valve (1) for loading and/or unloading a vacuum chamber (2). The vacuum valve has a closure plate (3) that is pressed against a valve seat (4) when in a closed position to seal a loading opening (5) and being raised from the valve seat (4) when in an open position, exposing the loading opening (5) for loading and/or unloading the vacuum chamber (2). The vacuum valve has at least one drive (6) for moving the closure plate (3) back and forth between the open and closed positions, the closure plate (3) being held by at least one guide (7) on at least one plate holder (8) of the drive (6). The vacuum valve has at least one elastic preload body (9), with the closure plate (3) being movable against a preload of the elastic preload body (9) along the guide (7) relative to the plate holder (8).

Abstract: A directional valve having a valve housing having a primary port and at least one first and one second secondary port and a rotary piece arranged in the valve housing, which is penetrated by a channel and is rotatable about a rotation axis in order to adjust the directional valve between at least first and second switching positions. A first end of the channel is concentric to the axis. The rotary piece has an outer surface which is curved in a spherical cap-shaped manner, at which the second end of the channel opens. The valve housing has an inner surface which is curved in a spherical cap-shaped manner, at which inner surface secondary connection channels of the secondary connections open, and which is opposite the curve outer surface of the rotary piece. The curved outer surface of the rotary piece and the curved inner surface of the valve housing extend at most over the extent of a hemisphere.

Abstract: A piston-cylinder unit having a cylinder housing (1) with a cylinder interior (2) and a piston (3) arranged in cylinder interior (2), from which a piston rod (4) starts and is guided out from the cylinder housing (1) through an opening and at the same time is sealed with respect to the cylinder housing (1) by a piston rod seal (12) arranged on the cylinder housing (1). A sliding sleeve (11) made of plastic and entrained by the piston rod (4) is arranged on the piston rod (4), and the piston rod seal (12) bears against said sliding sleeve.

Abstract: Disclosed is a pin lifting device for moving and positioning a substrate in a process atmosphere region. The pin lifting device has a coupling part including a coupling configured to receive a support pin designed to contact and carry the substrate, and a drive unit configured to adjust the coupling linearly along an adjustment axis (A) from a lowered normal position into an extended support position and back. The coupling part has a sliding guide element movable along the adjustment axis (A), where the sliding guide element is coupled to the drive unit and where the sliding guide element has at least one sliding element. The sliding element interacts with a guide surface provided by the coupling part to guide the sliding guide element can be linearly along the adjustment axis (A) and in a sliding manner relative to the guide surface.

Abstract: Disclosed is a vacuum valve including a valve closure and a preferably pneumatic or electro-pneumatic drive unit having a pressure medium, said drive unit being coupled to the valve closure. The vacuum valve also has a pressure sensor such that a pressure of the pressure medium can be measured.

Abstract: Disclosed is a pin lifting device for moving and positioning a substrate. Also, a pneumatic drive cylinder is provided having a cylindrical housing enclosing a first internal volume and a first piston assembly, having a first piston and a first piston rod. The first piston assembly can be moved into a fitting position by pressurization of the first internal volume. The device has at least one supporting pin connected to the first piston rod. The drive cylinder has a second piston assembly, which has a second piston and a second piston rod. The second piston assembly is arranged for motion coaxial to the first piston assembly. An end surface of the second piston rod faces the first piston. The first and second piston assemblies are arranged so the first piston and the second piston rod have no contact in the fitting position.

Abstract: An edge-welded bellows, including a plurality of diaphragms and a guide part for guiding on the outer surface of a rod extending through an inner through-opening of the bellows or for guiding on the inner surface of a tube surrounding the bellows. The guide part has a retaining fin, which, at the edge thereof, lies between the edges of adjacent diaphragms and is welded thereto, and a guide sleeve, which surrounds the longitudinal central axis and has a guide surface for guiding the bellows on the outer surface of the rod or the inner surface of the tube. The guide sleeve has a wall thickness that is more than three times that of the retaining fin. The guide sleeve has a step having a contact surface. The retaining fin lies, in a region adjoining the edge thereof, on the contact surface and is form-fittingly secured against being lifted off from the contact surface.

Abstract: An assembly, including a first chamber (1) and at least one second chamber (2) and at least one pivoting drive (3) for pivoting a pivoting object (4) of the assembly, wherein the pivoting object (4) is arranged in the first chamber (1) and at least one intermediate wall (5) is arranged between the first chamber (1) and the second chamber (2). A transmission body (6), which is annular at least in some sections, can be rotated about an axis of rotation (7) by the pivoting drive (3) and is fed through at least one feed-through opening (8), preferably two feed-through openings (8), in the intermediate wall (5).

Abstract: A connecting apparatus for the connection of a valve rod (4) to a closure member (1) of a vacuum valve, with a connecting body (12) which is arranged between a first connecting part (10) and a second connecting part (11). The connecting body (12) has a basic shape of a Steinmetz body which is formed by way of a intersection of two circular cylinders. The connecting body (12) is arranged in an intermediate space between arm projections (24, 25) of the first connecting part (10) and in an intermediate space between arm projections (26, 27) of the second connecting part (11). Corresponding bearing faces (28, 29, 30, 31) of the arm projections (24, 25, 26, 27) bear against bearing faces (13, 14, 15, 16) of the connecting body (12). The two arm projections (24, 25, 26, 27) of the respective connecting part (10, 11) approach one another towards their free ends.

Abstract: Disclosed is a vacuum valve with a sensor arrangement having at least one inertial sensor, where the sensor arrangement is designed in such a way it detects a measuring signal with respect to an acceleration impacting on the valve.

Abstract: A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Abstract: Disclosed is a vacuum valve having a valve seat, which has a valve opening, defining an opening axis, and a first sealing surface, a valve closure having a second sealing surface corresponding to the first sealing surface, a drive unit coupled to the valve closure, which can be moved from an open position, in which the valve closure and the valve seat do not contact each other, to a closed position, in which there is a sealing contact between the first sealing surface and the second sealing surface by a seal there between, and the valve opening is sealed gastight as a result. The vacuum valve has at least one temperature sensor, where the temperature sensor is designed and arranged such that, from the temperature sensor, a measurement signal representing thermal information in respect of at least one part of the vacuum valve can be detected.