Abstract: A valve (1) having at least one closure member (2) for closing a valve opening (3) and at least one valve rod (4), at least one first connecting section (5) being provided in or on the valve rod (4), at least one second connecting section (6) being provided in or on the closure member (2), and the closure member being fastenable or fastened to the valve rod by the connection of the first connecting section to the second connecting section. The first connecting section (5) and/or the second connecting section (6) has/have at least one pressure chamber (8) for a fluid, this chamber being delimited by at least one elastically deformable boundary wall (7) and the boundary wall can be elastically deformed by the fluid provided in the pressure chamber (8) in order to form a clamped connection of the first connecting section (5) to the second connecting section (6).

Abstract: A valve system having a vacuum valve and a regulating unit is disclosed. The vacuum valve has a valve seat including a valve opening, a first seal surface, and a valve closure for closing the valve opening using a second seal surface. A drive unit coupled to the valve closure is designed to be adjusted to provide respective valve opening states. The regulating unit adjusts the valve opening state by actuating the drive unit based on a currently determined regulating variable and a target variable. The regulating unit has a checking function configured such that a series of states of the valve closure are detected as park of the regulating process, and the states are stored as current regulating data. The current regulating data is compared with specified target regulating data and process information is generated based on the comparison of the current and the target regulating data.

Abstract: A closure device (1) for an opening (2) in a chamber wall (3) is provided, wherein the closure device (1) has at least one closure element (4) and at least one closure element carrier body (5) and at least one yoke (6). The closure element (4) is fixedly connected to the yoke (6) by the closure element carrier body (5), wherein the yoke (6) is mounted in a housing (9) of the closure device (1) in such a way that the yoke can be slid by at least one cylinder-piston drive unit (7) of the closure device (1), in particular parallel to a longitudinal extent (8) of the closure element carrier body (5). The yoke (6) has at least one cylinder cavity (10) of the cylinder-piston drive unit (7) and/or at least one guide element receptacle (11) for guiding a guide element (12) of the closure device (1).

Abstract: An assembly having at least two chambers (1, 2) and at least one transfer valve (3), wherein: a valve housing interior (9) of the transfer valve (3) is separated from each the chamber interiors (4, 5) of the chambers (1, 2) by respective partitions (12, 13) and a transfer opening (14, 15) for the feeding through of objects and/or fluids is formed in each of the partitions (12, 13) and in addition to the transfer opening (14, 15) in question an additional opening (16, 17) is arranged in each of the partitions (12, 13). The additional openings (16, 17) can be closed by respective switching valves (18, 19) of the assembly and, in an open state of the respective switching valves (18, 19), directly fluidically connect the valve housing interior (9) to the respective chamber interiors (4, 5) adjoining the respective partitions (12, 13).

Abstract: The invention relates to a vacuum valve comprising a sensor assembly with at least one force sensor which has a deformation-sensitive element. The sensor assembly is designed such that a measurement signal relating to a compression of the seal (TO) which lies between a first and a second seal surface, said compression being produced by the first and the second seal surface, is detected by means of the sensor assembly.

Abstract: A connecting apparatus for the connection of a valve rod (4) to a closure member (1) of a vacuum valve, with a connecting body (12) which is arranged between a first connecting part (10) and a second connecting part (11). The connecting body (12) has a basic shape of a Steinmetz body which is formed by way of a intersection of two circular cylinders. The connecting body (12) is arranged in an intermediate space between arm projections (24, 25) of the first connecting part (10) and in an intermediate space between arm projections (26, 27) of the second connecting part (11). Corresponding bearing faces (28, 29, 30, 31) of the arm projections (24, 25, 26, 27) bear against bearing faces (13, 14, 15, 16) of the connecting body (12). The two arm projections (24, 25, 26, 27) of the respective connecting part (10, 11) approach one another towards their free ends.

Abstract: Disclosed is a pin lifting device for moving and positioning a substrate. The pin lifting device includes a coupling, a supporting pin configured to support the substrate, and a drive unit which configure to drive the coupling. The pin lifting device includes a separating means for separating a process atmosphere area from an external atmosphere area. The drive unit is at least partially in the external atmosphere area and the coupling is in the process atmosphere area. The coupling includes a linearly extending recess defining a central receiving axis. The recess has a width substantially orthogonally to the receiving axis. A clamping section delimited axially with respect to the receiving axis has a clamping element, in an unloaded receiving state, defines a clamping width that is smaller than the recess width, and the clamping width is variable as a function of a force acting radially on the clamping element.

Abstract: A pneumatic valve drive (1) for a valve (2), in particular for a vacuum valve, which has at least one pneumatic cylinder (3) with at least one piston (4) that is movably mounted in the pneumatic cylinder (3) and at least two cylinder cavities (5, 6) arranged on opposite sides of the piston (4). Each cylinder cavity (5, 6) is connected to at least one pressure source for applying pressure to each cylinder cavity (5, 6). One of the pressure sources is a constant pressure source (7) for applying a constant pressure to the cylinder cavity (5) arranged on one of the sides of the piston, and one of the other pressure sources is a regulated pressure source (8) for applying a variably regulatable pressure to the cylinder cavity (6) arranged on the opposite side of the piston (4).

Abstract: A piston-cylinder unit having a cylinder housing (1) with a cylinder interior (2) and a piston (3) arranged in cylinder interior (2), from which a piston rod (4) starts and is guided out from the cylinder housing (1) through an opening and at the same time is sealed with respect to the cylinder housing (1) by a piston rod seal (12) arranged on the cylinder housing (1). A sliding sleeve (11) made of plastic and entrained by the piston rod (4) is arranged on the piston rod (4), and the piston rod seal (12) bears against said sliding sleeve.

Abstract: A closure device including a closure element for closing an opening surrounded by a valve seat of the closure device. The closure device has an open state, in which the closure element exposes the opening at least partly, for an object to be led through the opening, an intermediate state, in which the closure element is brought into alignment with the opening without contact with the valve seat, and a closed state, in which the closure element at least rests on the valve seat via a seal of the closure device. The seal has a hollow space, to which a pressure medium from a pressure source of the closure device can be applied, and the closure device has a suction apparatus for sucking the pressure medium out of the hollow space of the seal.

Abstract: Closure element for a vacuum valve having a valve disk realized for the gas-tight closure of a process volume by means of interaction with a vacuum valve opening of the vacuum valve provided for the process volume, wherein the valve disk comprises a closure side and an oppositely situated rear side which is substantially parallel thereto and a first sealing face which is assigned to the closure side and corresponds to a second sealing face of the vacuum valve opening, in particular with regard to form and size, with cured-on sealing material, wherein the second sealing face runs around the vacuum valve opening, and a cross carrier with a receiving means for a drive component transversely with respect to an extension direction of the cross carrier, wherein the cross carrier is connected to the valve disk on the rear side of the valve disk at at least one connection point. The connection of the cross carrier to the valve disk comprises a friction stir welding connection at the at least one connection point.

Abstract: A vacuum adjustment device having a coupling for coupling an active element and a drive unit is disclosed. The drive unit adjusts the coupling from a normal position into an active position, in which the active element provides its intended effect. A separating device separates the process atmosphere region (P) from an outer atmosphere region (A), wherein the drive unit is at least partially associated with the outer atmosphere region (A). The coupling has a locking element cooperating with a collet which are arranged for a relative position variation axially along or parallel to a receiving axis that the locking element is adjustable relative to the collet into an open position and into a closed position. The coupling provides an open changing state in the open position by the interaction of the collet with the locking element and a closed working state in the closed position.

Abstract: A vacuum valve including a valve seat having a valve opening defining an opening axis and a first seal surface circumferential around the valve opening and having a closure element having a second seal surface corresponding to the first seal surface. The first seal surface and/or the second seal surface has an at least two-component material composite having a metallic carrier component and a polymer-based seal material. The metallic carrier component defines an inner and outer carrier region and has a plurality of defined depressions extending in the inner carrier region by the seal surface. The seal material is applied to the carrier component such that a defined profile of the seal material is provided on the outer carrier region and a part of the seal material extends at least into a part of the depressions of the carrier component and fills them at least halfway.

Abstract: A positioning device, in particular a wafer transportation container positioning device, for positioning a wafer transportation container in a loading and/or unloading position of a loading and/or unloading station which is configured at least for loading and/or unloading wafers from the wafer transportation container. The positioning device, in particular the wafer transportation container positioning device, comprises a positioning mechanism which is configured for contactless positioning of the wafer transportation container in a coupling process between the wafer transportation container and the loading and/or unloading station.

Abstract: Vacuum valve having a valve housing with first and second valve openings, and a closure unit having first and second plates, a roller support arranged between the plates, multiple roller pairs, each formed from first and second spreading rollers, and a spring. The plates are carried together with the roller support when it moves parallel to a movement direction from the open position into an intermediate position, and an additional movement of the plates in the movement direction is blocked when the roller support moves from the intermediate position into a closed position, during which the spreading rollers move along rising flanks of recesses, and the plates are thus spread apart. Rotational axes of the spreading rollers of each roller pair are offset relative to each other and are spaced apart in the spreading direction by a distance smaller than a sum of the radiuses of the spreading rollers.

Abstract: A vacuum valve is provided having a valve housing (1) which has a vacuum region (4) in the interior, a closure unit (5) which is arranged in the vacuum region (4) of the valve housing (1) and by which at least one valve opening (2, 3) is closable in a closed state of the vacuum valve, a longitudinal drive (11) by which the closure unit (5) is adjustable in a longitudinal direction (10) for adjusting the closure unit (5) between a position opening up the valve opening (2, 3) and a position covering the valve opening (2, 3). A longitudinal guide (19) for the displaceable guiding of the closure unit (5) parallel to the longitudinal direction (10) is provided, with this longitudinal guide having a guide rod (20) extending parallel to the longitudinal direction (10), and at least one guide part (21). At least one bearing element (36) of the guide part (21) is arranged in a region sealed off from the vacuum region (4) of the valve housing (1).

Abstract: A valve with a valve housing having a first connection along a first axis, a second connection along a second axis and a valve seat which surrounds the first connection arranged in the flow path of a flow chamber. A valve part is displaceable along a movement axis such that a closure surface can interrupt and release the flow path. A motorized drive unit to displace the valve part having a valve rod with a contact element, the drive unit has a guide mechanism with an actuating element configured to rotate about an actuating axis defining an outer track. The distance of the track from the actuating axis is adjustable by a rotation of the actuating element about the actuating axis. A rotation of the actuating element of the valve part is movable so that the interruption or release of the flow path can be provided thereby.

Abstract: An assembly, including a first chamber (1) and at least one second chamber (2) and at least one pivoting drive (3) for pivoting a pivoting object (4) of the assembly, wherein the pivoting object (4) is arranged in the first chamber (1) and at least one intermediate wall (5) is arranged between the first chamber (1) and the second chamber (2). A transmission body (6), which is annular at least in some sections, can be rotated about an axis of rotation (7) by the pivoting drive (3) and is fed through at least one feed-through opening (8), preferably two feed-through openings (8), in the intermediate wall (5).

Abstract: A vacuum valve including a valve housing with seat surrounding a first opening with a sealing surface is disclosed. A valve disk having a first disk section and a second disk section tightly mounted inside an outer boundary of the first disk that is movable parallel to an opening axis. A drive is connected to the first disk section. The first disk section includes a first bearing surface configured to contact the sealing surface in the closed position. The outer boundary has a radially inwardly oriented inner surface. The second disk section has a radially outwardly oriented outer surface configured to contact the inner surface sealing a second contact area. At least for determined radial angles about a center of the valve disk, a first radial distance from the center to the first bearing surface is shorter than a second radial distance from the center to the second contact area.

Abstract: In a seal arrangement for sealing first and second components of a vacuum device to one another using an elastomeric sealing material arranged on one of the two components and interacts with a sealing surface arranged on the other component, in a sealed state of the components, the first component is pressed onto the second component by a pressing-on force which acts in a pressing-on direction. The first component has a carrying portion and a bending portion. The elastomeric sealing material is arranged on the bending portion and the sealing surface is arranged on the second component, or vice versa. The thickness of the bending portion, for the case that the elastomeric sealing material is arranged on the bending portion without accounting for the elastomeric sealing material is less than one third of the thickness of the carrying portion and less than one fifth of the length of the bending portion.